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DE69910336D1 - Tintenstrahldruckkopf und dessen Herstellungsverfahren - Google Patents

Tintenstrahldruckkopf und dessen Herstellungsverfahren

Info

Publication number
DE69910336D1
DE69910336D1 DE69910336T DE69910336T DE69910336D1 DE 69910336 D1 DE69910336 D1 DE 69910336D1 DE 69910336 T DE69910336 T DE 69910336T DE 69910336 T DE69910336 T DE 69910336T DE 69910336 D1 DE69910336 D1 DE 69910336D1
Authority
DE
Germany
Prior art keywords
ink chamber
common ink
manufacturing process
inkjet printhead
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69910336T
Other languages
English (en)
Other versions
DE69910336T2 (de
Inventor
Tomoaki Takahashi
Noriaki Okazawa
Ryoichi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69910336D1 publication Critical patent/DE69910336D1/de
Application granted granted Critical
Publication of DE69910336T2 publication Critical patent/DE69910336T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69910336T 1998-12-14 1999-12-14 Tintenstrahldruckkopf und dessen Herstellungsverfahren Expired - Lifetime DE69910336T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35462898A JP3371331B2 (ja) 1998-12-14 1998-12-14 インクジェット式記録ヘッドおよびその製造方法
JP35462898 1998-12-14

Publications (2)

Publication Number Publication Date
DE69910336D1 true DE69910336D1 (de) 2003-09-18
DE69910336T2 DE69910336T2 (de) 2004-06-24

Family

ID=18438848

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69910336T Expired - Lifetime DE69910336T2 (de) 1998-12-14 1999-12-14 Tintenstrahldruckkopf und dessen Herstellungsverfahren

Country Status (5)

Country Link
US (1) US6332671B1 (de)
EP (1) EP1010533B1 (de)
JP (1) JP3371331B2 (de)
AT (1) ATE246998T1 (de)
DE (1) DE69910336T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69827021T2 (de) * 1997-01-29 2005-02-24 Cornell Research Foundation, Inc. An verschiedenen orten verabreichung von adenoviren-vektor zur induzierung von angiogenese
JP3578129B2 (ja) * 2000-10-02 2004-10-20 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3753116B2 (ja) * 2001-09-26 2006-03-08 セイコーエプソン株式会社 液体噴射ヘッド
US6953241B2 (en) 2001-11-30 2005-10-11 Brother Kogyo Kabushiki Kaisha Ink-jet head having passage unit and actuator units attached to the passage unit, and ink-jet printer having the ink-jet head
US7387373B2 (en) * 2002-09-30 2008-06-17 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US7001013B2 (en) * 2002-12-12 2006-02-21 Brother International Corporation Nanostructure based microfluidic pumping apparatus, method and printing device including same
JP4729840B2 (ja) * 2003-08-12 2011-07-20 セイコーエプソン株式会社 液体噴射ヘッドの製造方法およびそれによって得られた液体噴射ヘッド
JP4548376B2 (ja) * 2006-03-31 2010-09-22 ブラザー工業株式会社 インクジェットヘッド
JP5024543B2 (ja) * 2007-10-24 2012-09-12 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5370648B2 (ja) * 2009-02-25 2013-12-18 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5927761B2 (ja) * 2011-02-04 2016-06-01 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、及び、液体噴射ヘッドの製造方法
JP2013163290A (ja) * 2012-02-09 2013-08-22 Seiko Epson Corp 液体噴射装置およびその制御方法
JP7115275B2 (ja) * 2018-12-10 2022-08-09 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3292223B2 (ja) * 1993-01-25 2002-06-17 セイコーエプソン株式会社 インクジェット式記録ヘッドの駆動方法、及びその装置
US5786833A (en) 1993-10-07 1998-07-28 Seiko Epson Corporation Piezoelectric driver for an ink jet recording head, including front end plate having front end face aligned with front end face of inactive region of driver
JP3235635B2 (ja) 1993-11-29 2001-12-04 セイコーエプソン株式会社 インクジェット記録ヘッド
US5818482A (en) * 1994-08-22 1998-10-06 Ricoh Company, Ltd. Ink jet printing head
EP0819523A1 (de) 1996-07-18 1998-01-21 Océ-Technologies B.V. Tintenstrahldüsenkopf

Also Published As

Publication number Publication date
EP1010533B1 (de) 2003-08-13
DE69910336T2 (de) 2004-06-24
JP2000177124A (ja) 2000-06-27
ATE246998T1 (de) 2003-08-15
EP1010533A3 (de) 2001-09-26
JP3371331B2 (ja) 2003-01-27
US6332671B1 (en) 2001-12-25
EP1010533A2 (de) 2000-06-21

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