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DE69638126D1 - Rasterelektronenmikroskop - Google Patents

Rasterelektronenmikroskop

Info

Publication number
DE69638126D1
DE69638126D1 DE69638126T DE69638126T DE69638126D1 DE 69638126 D1 DE69638126 D1 DE 69638126D1 DE 69638126 T DE69638126 T DE 69638126T DE 69638126 T DE69638126 T DE 69638126T DE 69638126 D1 DE69638126 D1 DE 69638126D1
Authority
DE
Germany
Prior art keywords
electron microscope
scanning electron
scanning
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69638126T
Other languages
English (en)
Inventor
Hideo Todokoro
Makoto Ezumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69638126D1 publication Critical patent/DE69638126D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/047—Changing particle velocity
    • H01J2237/0475—Changing particle velocity decelerating
    • H01J2237/04756—Changing particle velocity decelerating with electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69638126T 1995-10-19 1996-10-15 Rasterelektronenmikroskop Expired - Lifetime DE69638126D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27146095 1995-10-19

Publications (1)

Publication Number Publication Date
DE69638126D1 true DE69638126D1 (de) 2010-04-01

Family

ID=17500350

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69638126T Expired - Lifetime DE69638126D1 (de) 1995-10-19 1996-10-15 Rasterelektronenmikroskop

Country Status (3)

Country Link
US (4) US5872358A (de)
EP (1) EP0769799B1 (de)
DE (1) DE69638126D1 (de)

Families Citing this family (106)

* Cited by examiner, † Cited by third party
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JP3514070B2 (ja) * 1997-04-25 2004-03-31 株式会社日立製作所 走査電子顕微鏡
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JP4236742B2 (ja) * 1998-10-29 2009-03-11 株式会社日立製作所 走査形電子顕微鏡
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JP4727777B2 (ja) 1999-05-24 2011-07-20 株式会社日立製作所 走査形電子顕微鏡による測長方法
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JP4708854B2 (ja) * 2005-05-13 2011-06-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置
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JP4801573B2 (ja) * 2006-12-11 2011-10-26 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
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JP2018174016A (ja) 2015-07-29 2018-11-08 株式会社日立ハイテクノロジーズ 荷電粒子線装置
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CN112889127B (zh) * 2018-10-19 2024-12-13 Asml荷兰有限公司 用于对准多束检查装置中的电子束的系统和方法
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JP7396954B2 (ja) * 2020-04-01 2023-12-12 株式会社日立ハイテク 荷電粒子線装置
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JP7647271B2 (ja) * 2021-04-13 2025-03-18 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置
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Also Published As

Publication number Publication date
US6069356A (en) 2000-05-30
EP0769799A3 (de) 2004-11-24
EP0769799B1 (de) 2010-02-17
US5872358A (en) 1999-02-16
US6084238A (en) 2000-07-04
EP0769799A2 (de) 1997-04-23
US5900629A (en) 1999-05-04

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