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DE69634396D1 - Verfahren zur Gasreinigung mit einem Photokatalysator - Google Patents

Verfahren zur Gasreinigung mit einem Photokatalysator

Info

Publication number
DE69634396D1
DE69634396D1 DE69634396T DE69634396T DE69634396D1 DE 69634396 D1 DE69634396 D1 DE 69634396D1 DE 69634396 T DE69634396 T DE 69634396T DE 69634396 T DE69634396 T DE 69634396T DE 69634396 D1 DE69634396 D1 DE 69634396D1
Authority
DE
Germany
Prior art keywords
photocatalyst
gas purification
purification
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69634396T
Other languages
English (en)
Other versions
DE69634396T2 (de
Inventor
Toshiaki Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8031230A external-priority patent/JPH09168722A/ja
Priority claimed from JP8031231A external-priority patent/JP2991963B2/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69634396D1 publication Critical patent/DE69634396D1/de
Application granted granted Critical
Publication of DE69634396T2 publication Critical patent/DE69634396T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8668—Removing organic compounds not provided for in B01D53/8603 - B01D53/8665
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20707—Titanium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/80—Type of catalytic reaction
    • B01D2255/802—Photocatalytic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/38—Tubular collector electrode

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Catalysts (AREA)
DE69634396T 1995-10-17 1996-10-17 Verfahren zur Gasreinigung mit einem Photokatalysator Expired - Fee Related DE69634396T2 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP29330195 1995-10-17
JP29330195 1995-10-17
JP35218395 1995-12-28
JP35218395 1995-12-28
JP8031230A JPH09168722A (ja) 1995-10-17 1996-01-26 局所空間の汚染防止方法及び装置
JP3123096 1996-01-26
JP3123196 1996-01-26
JP8031231A JP2991963B2 (ja) 1996-01-26 1996-01-26 基材又は基板表面の汚染防止方法と装置

Publications (2)

Publication Number Publication Date
DE69634396D1 true DE69634396D1 (de) 2005-04-07
DE69634396T2 DE69634396T2 (de) 2006-04-06

Family

ID=27459400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69634396T Expired - Fee Related DE69634396T2 (de) 1995-10-17 1996-10-17 Verfahren zur Gasreinigung mit einem Photokatalysator

Country Status (3)

Country Link
US (1) US6159421A (de)
EP (1) EP0769322B1 (de)
DE (1) DE69634396T2 (de)

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DE69732971T2 (de) * 1996-08-20 2006-02-16 Ebara Corp. Methode und vorrichtung zur reinigung eines verunreinigungen enthaltenden gases
JP3405439B2 (ja) 1996-11-05 2003-05-12 株式会社荏原製作所 固体表面の清浄化方法
EP1035574A4 (de) * 1997-11-28 2007-11-28 Ebara Corp Behälter zur übertragung von halbleiterwafern
DE19813544C2 (de) * 1998-03-27 2001-02-08 Hansa Metallwerke Ag Einrichtung zum Entkeimen von Wasser
JP2000311933A (ja) 1999-04-27 2000-11-07 Canon Inc 基板保持装置、基板搬送システム、露光装置、塗布装置およびデバイス製造方法ならびに基板保持部クリーニング方法
JP2003527720A (ja) * 1999-10-12 2003-09-16 シーゲイト テクノロジー エルエルシー ディスクドライブ汚染物減少のための光触媒装置
DE19956290A1 (de) * 1999-11-20 2001-05-23 Volkswagen Ag Photokatalytische Abgasreinigungsanlage
CN1188202C (zh) * 2000-06-10 2005-02-09 清风株式会社 使用光电催化系统去除污染物的方法和设备
JP4028706B2 (ja) * 2001-09-28 2007-12-26 株式会社東芝 冷蔵庫
US6462947B1 (en) * 2002-01-08 2002-10-08 Hsi Cheng Huang Device case with air purifying function
US6807874B2 (en) * 2002-01-21 2004-10-26 Shimadzu Corporation Collecting apparatus of floating dusts in atmosphere
US6786222B2 (en) * 2002-10-25 2004-09-07 Motorola, Inc. Method for removing particles from a semiconductor processing tool
CN100394654C (zh) * 2003-01-16 2008-06-11 松下电器产业株式会社 光电子放出板及使用该板的负粒子发生装置
ITMO20050067A1 (it) * 2005-03-23 2006-09-24 Arditi Spa Mezzi di illuminazione e metodo per ottenere mezzi di illuminazione.
US20100003912A1 (en) * 2005-08-16 2010-01-07 Industrial Technology Research Institute Medical mini-environment device
TWI259261B (en) * 2005-08-16 2006-08-01 Ind Tech Res Inst Device for cleaning environmental air in local area for medical use
US7560409B2 (en) * 2005-08-19 2009-07-14 Alliance For Sustainable Energy, Llc Photo-oxidation catalysts
US20070212271A1 (en) * 2006-02-17 2007-09-13 Kennedy Paul E Process air desulfurization for syngas production
CN101511467B (zh) * 2006-05-15 2013-07-24 开利公司 抗硅氧烷紫外光催化剂
FI123183B (fi) * 2006-11-03 2012-12-14 Flaekt Woods Ab Laite virtauksen ohjaamiseksi
US10207927B2 (en) * 2007-04-26 2019-02-19 Ludlum Measurements, Inc. Method to produce a calibration, reagent or therapeutic gas by exposing a precursor gas to ultraviolet light
US7820100B2 (en) * 2007-05-17 2010-10-26 Garfield Industries, Inc. System and method for photocatalytic oxidation air filtration using a substrate with photocatalyst particles powder coated thereon
US20090004066A1 (en) * 2007-06-30 2009-01-01 Yu-Lin Cheng Air purifier with a sensor and/or timer switching function.
TW200917348A (en) * 2007-08-02 2009-04-16 Ehd Technology Group Inc Apparatus using electrosprayed fluids for cleaning surfaces with reduced residual contaminants, and method related thereto
US8092577B2 (en) 2008-12-19 2012-01-10 Steris Corporation Method and apparatus for removing gaseous or vaporous sterilants from a medium
JP5388643B2 (ja) * 2009-03-19 2014-01-15 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
DE102009032608A1 (de) * 2009-07-10 2011-01-20 Erdinger, Lothar, Priv.-Doz. Dr. Verfahren und Vorrichtung zur Messung der photokatalytischen Aktivität einer Probe
DE102010022129A1 (de) * 2010-05-20 2011-11-24 Krones Ag Vorrichtung und Verfahren zur Reinigung von Gas in Blasmaschinen
US9196497B2 (en) * 2010-06-08 2015-11-24 Amethyst Research, Inc. Photolytic processing of materials with hydrogen
US8398828B1 (en) 2012-01-06 2013-03-19 AquaMost, Inc. Apparatus and method for treating aqueous solutions and contaminants therein
MX2014006561A (es) 2011-12-02 2014-09-22 Aquamost Inc Aparato y metodo para tratar soluciones acuosas y contaminantes en las mismas.
US9045357B2 (en) 2012-01-06 2015-06-02 AquaMost, Inc. System for reducing contaminants from a photoelectrocatalytic oxidization apparatus through polarity reversal and method of operation
EP2953903A4 (de) 2013-02-11 2017-01-04 AquaMost, Inc. Vorrichtung und verfahren zur behandlung von wässrigen lösungen und verunreinigungen darin
KR102446556B1 (ko) * 2015-09-21 2022-09-23 삼성디스플레이 주식회사 기판 처리 장치
CN105423374A (zh) * 2015-11-13 2016-03-23 深圳科思研环保健康管理发展有限公司 一种附加在抽油烟机作分解油烟的装置
RU2637120C1 (ru) * 2016-11-03 2017-11-30 Федеральное государственное автономное образовательное учреждение высшего образования "Новосибирский национальный исследовательский государственный университет" (Новосибирский государственный университет, НГУ) Способ приготовления металл-нанесенного катализатора для процесса фотокаталитического окисления монооксида углерода
TWI835948B (zh) * 2018-12-19 2024-03-21 丹麥商愛利Ｉｐ有限公司 空氣處理方法及在無塵室中之空氣處理系統
WO2021111550A1 (ja) * 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム
US12205821B2 (en) 2021-05-18 2025-01-21 The United States Of America As Represented By The Secretary Of The Army Hydrogen-passivated topological materials, devices, and methods

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* Cited by examiner, † Cited by third party
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JPS61178050A (ja) * 1985-02-04 1986-08-09 Ebara Corp 紫外線照射による空気清浄方法及びその装置
JP2623290B2 (ja) * 1988-04-18 1997-06-25 株式会社荏原製作所 気体の清浄方法及びその装置
JPH0690694B2 (ja) * 1989-06-01 1994-11-14 中部日本電気ソフトウェア株式会社 ファイル転送方式
US5616532A (en) * 1990-12-14 1997-04-01 E. Heller & Company Photocatalyst-binder compositions
JP2989031B2 (ja) * 1991-04-11 1999-12-13 株式会社荏原総合研究所 炭化水素の除去方法及び装置
JPH0822393B2 (ja) * 1991-09-13 1996-03-06 株式会社荏原総合研究所 微粒子の荷電・捕集ユニット装置
JPH0796939B2 (ja) * 1991-12-02 1995-10-18 株式会社荏原製作所 基材又は基盤表面の接触角の増加防止方法及び装置
US5380503A (en) * 1992-03-13 1995-01-10 Ebara Research Co., Ltd. Stocker
US5595813A (en) * 1992-09-22 1997-01-21 Takenaka Corporation Architectural material using metal oxide exhibiting photocatalytic activity
DE4303272A1 (de) * 1993-02-05 1994-08-11 Handwerkskammer Hamburg Verfahren zur Reinigung von Abluft durch ein katalytisches System
JP2545727B2 (ja) * 1993-04-19 1996-10-23 工業技術院長 消臭灯及びその製造方法
JP2863419B2 (ja) * 1993-08-17 1999-03-03 株式会社荏原総合研究所 基材又は基板表面の汚染防止方法と装置
US5849200A (en) * 1993-10-26 1998-12-15 E. Heller & Company Photocatalyst-binder compositions
KR100357482B1 (ko) * 1993-12-10 2003-03-10 도토기키 가부시키가이샤 광촉매기능을갖는다기능재료및그의제조방법
GB2298149B (en) * 1995-02-14 1999-08-18 Hirayama Setsubi Kk An air conditioner for a clean room

Also Published As

Publication number Publication date
DE69634396T2 (de) 2006-04-06
EP0769322B1 (de) 2005-03-02
US6159421A (en) 2000-12-12
EP0769322A1 (de) 1997-04-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee