DE69617307T2 - Korrosion verhindernde Struktur - Google Patents
Korrosion verhindernde StrukturInfo
- Publication number
- DE69617307T2 DE69617307T2 DE1996617307 DE69617307T DE69617307T2 DE 69617307 T2 DE69617307 T2 DE 69617307T2 DE 1996617307 DE1996617307 DE 1996617307 DE 69617307 T DE69617307 T DE 69617307T DE 69617307 T2 DE69617307 T2 DE 69617307T2
- Authority
- DE
- Germany
- Prior art keywords
- coating film
- fine particles
- alloy
- corrosion
- type alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005260 corrosion Methods 0.000 title claims description 42
- 230000007797 corrosion Effects 0.000 title claims description 40
- 239000011248 coating agent Substances 0.000 claims description 92
- 238000000576 coating method Methods 0.000 claims description 92
- 229910018104 Ni-P Inorganic materials 0.000 claims description 65
- 229910018536 Ni—P Inorganic materials 0.000 claims description 65
- 229910045601 alloy Inorganic materials 0.000 claims description 56
- 239000000956 alloy Substances 0.000 claims description 56
- 239000010419 fine particle Substances 0.000 claims description 37
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 37
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 37
- -1 polytetrafluoroethylene Polymers 0.000 claims description 31
- 229910000838 Al alloy Inorganic materials 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical class [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 description 28
- 229910052801 chlorine Inorganic materials 0.000 description 27
- 239000007789 gas Substances 0.000 description 23
- 238000011282 treatment Methods 0.000 description 22
- 239000000047 product Substances 0.000 description 18
- 238000007772 electroless plating Methods 0.000 description 15
- 230000035515 penetration Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- 239000002585 base Substances 0.000 description 11
- 238000007747 plating Methods 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 9
- 239000000523 sample Substances 0.000 description 9
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 8
- 239000002131 composite material Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000003449 preventive effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910015844 BCl3 Inorganic materials 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013068 control sample Substances 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- TVZISJTYELEYPI-UHFFFAOYSA-N hypodiphosphoric acid Chemical compound OP(O)(=O)P(O)(O)=O TVZISJTYELEYPI-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002987 primer (paints) Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000013074 reference sample Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- ing And Chemical Polishing (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
- Drying Of Semiconductors (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7110311A JP2936129B2 (ja) | 1995-04-12 | 1995-04-12 | 防食構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69617307D1 DE69617307D1 (de) | 2002-01-10 |
| DE69617307T2 true DE69617307T2 (de) | 2002-05-08 |
Family
ID=14532501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1996617307 Expired - Fee Related DE69617307T2 (de) | 1995-04-12 | 1996-04-12 | Korrosion verhindernde Struktur |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0737759B1 (ja) |
| JP (1) | JP2936129B2 (ja) |
| DE (1) | DE69617307T2 (ja) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5667775A (en) | 1993-08-11 | 1997-09-16 | Geltex Pharmaceuticals, Inc. | Phosphate-binding polymers for oral administration |
| DE19860526A1 (de) * | 1998-12-30 | 2000-07-06 | Basf Ag | Wärmeüberträger mit verringerter Neigung, Ablagerungen zu bilden und Verfahren zu deren Herstellung |
| US6444083B1 (en) * | 1999-06-30 | 2002-09-03 | Lam Research Corporation | Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof |
| US6733780B1 (en) | 1999-10-19 | 2004-05-11 | Genzyme Corporation | Direct compression polymer tablet core |
| DE10016215A1 (de) | 2000-03-31 | 2001-10-04 | Basf Ag | Verfahren zur Beschichtung von Apparaten und Apparateteilen für den chemischen Anlagenbau |
| DE10241947A1 (de) * | 2001-09-14 | 2003-04-03 | Magna Steyr Powertrain Ag & Co | Verfahren zur Oberflächenbehandlung eines Maschinenelementes und Maschinenelement |
| WO2004024985A1 (ja) * | 2002-09-11 | 2004-03-25 | Inspire Technology Resource Management Corporation | 無電解メッキ液、及びこれを用いた無電解メッキ方法及び無電解メッキ被処理物 |
| JP4234038B2 (ja) * | 2004-03-03 | 2009-03-04 | 株式会社椿本チエイン | 防食性チェーン |
| US7985418B2 (en) | 2004-11-01 | 2011-07-26 | Genzyme Corporation | Aliphatic amine polymer salts for tableting |
| EP1951266A2 (en) | 2005-09-02 | 2008-08-06 | Genzyme Corporation | Method for removing phosphate and polymer used therefore |
| EP1924246B1 (en) | 2005-09-15 | 2015-10-21 | Genzyme Corporation | Sachet formulation for amine polymers |
| JP4709731B2 (ja) * | 2006-11-17 | 2011-06-22 | 三菱重工業株式会社 | 耐食性めっき層形成方法および回転機械 |
| DE102007002111A1 (de) | 2007-01-15 | 2008-07-17 | Futurecarbon Gmbh | Beschichtungsbad zum Beschichten eines Bauteils, beschichtetes Bauteil sowie Verfahren zu dessen Herstellung |
| JP5385512B2 (ja) * | 2007-06-08 | 2014-01-08 | 株式会社ニッキ | ガス燃料用レギュレータ |
| JP2009275535A (ja) * | 2008-05-13 | 2009-11-26 | Nikki Co Ltd | 気体燃料用インジェクタ |
| US20110027576A1 (en) * | 2009-07-28 | 2011-02-03 | General Electric Company | Sealing of pinholes in electroless metal coatings |
| JP2011075221A (ja) * | 2009-09-30 | 2011-04-14 | Daikin Industries Ltd | 冷凍装置および冷凍装置におけるシール材の注入方法 |
| JP6382493B2 (ja) * | 2013-08-12 | 2018-08-29 | 積水化学工業株式会社 | 導電性粒子、導電材料及び接続構造体 |
| TWI569931B (zh) * | 2014-11-06 | 2017-02-11 | Sdi Corp | Stapler and its gutter structure |
| MA41202A (fr) | 2014-12-18 | 2017-10-24 | Genzyme Corp | Copolymères polydiallymine réticulé pour le traitement du diabète de type 2 |
| IT201900003463A1 (it) * | 2019-03-11 | 2020-09-11 | Nuovo Pignone Tecnologie Srl | Componente di turbomacchine avente un rivestimento metallico |
| CN112226749A (zh) * | 2020-10-14 | 2021-01-15 | 扬州市景杨表面工程有限公司 | 一种汽车差速器调整片ptfe复合镀层加工方法 |
-
1995
- 1995-04-12 JP JP7110311A patent/JP2936129B2/ja not_active Expired - Lifetime
-
1996
- 1996-04-12 DE DE1996617307 patent/DE69617307T2/de not_active Expired - Fee Related
- 1996-04-12 EP EP19960302595 patent/EP0737759B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0737759B1 (en) | 2001-11-28 |
| JP2936129B2 (ja) | 1999-08-23 |
| JPH08283955A (ja) | 1996-10-29 |
| DE69617307D1 (de) | 2002-01-10 |
| EP0737759A1 (en) | 1996-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: SEIKO INSTRUMENTS INC., CHIBA, JP |
|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |