DE69311840D1 - Pressform zur Herstellung eines mikro-optischen Elementes, zugehöriges Herstellungsverfahren, mikro-optisches Element und Herstellungsverfahren - Google Patents
Pressform zur Herstellung eines mikro-optischen Elementes, zugehöriges Herstellungsverfahren, mikro-optisches Element und HerstellungsverfahrenInfo
- Publication number
- DE69311840D1 DE69311840D1 DE69311840T DE69311840T DE69311840D1 DE 69311840 D1 DE69311840 D1 DE 69311840D1 DE 69311840 T DE69311840 T DE 69311840T DE 69311840 T DE69311840 T DE 69311840T DE 69311840 D1 DE69311840 D1 DE 69311840D1
- Authority
- DE
- Germany
- Prior art keywords
- micro
- manufacturing process
- optical element
- production
- press mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 3
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/082—Construction of plunger or mould for making solid articles, e.g. lenses having profiled, patterned or microstructured surfaces
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0025—Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2101/00—Use of unspecified macromolecular compounds as moulding material
- B29K2101/12—Thermoplastic materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0016—Lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0016—Lenses
- B29L2011/005—Fresnel lenses
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/10—Die base materials
- C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/16—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals
- C03B2215/17—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals comprising one or more of the noble meals, i.e. Ag, Au, platinum group metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/31—Two or more distinct intermediate layers or zones
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/40—Product characteristics
- C03B2215/41—Profiled surfaces
- C03B2215/412—Profiled surfaces fine structured, e.g. fresnel lenses, prismatic reflectors, other sharp-edged surface profiles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/40—Product characteristics
- C03B2215/41—Profiled surfaces
- C03B2215/414—Arrays of products, e.g. lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12102—Lens
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10083592A JP3147481B2 (ja) | 1992-04-21 | 1992-04-21 | ガラス製回折格子の成形用金型及びその製造方法及びガラス製回折格子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69311840D1 true DE69311840D1 (de) | 1997-08-07 |
DE69311840T2 DE69311840T2 (de) | 1997-11-27 |
Family
ID=14284377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69311840T Expired - Fee Related DE69311840T2 (de) | 1992-04-21 | 1993-04-20 | Pressform zur Herstellung eines mikro-optischen Elementes, zugehöriges Herstellungsverfahren, mikro-optisches Element und Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US5436764A (de) |
EP (1) | EP0567896B1 (de) |
JP (1) | JP3147481B2 (de) |
DE (1) | DE69311840T2 (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0636585B1 (de) * | 1993-07-28 | 1998-11-18 | Matsushita Electric Industrial Co., Ltd. | Pressform zum Pressen von optischen Elementen sowie ihr Herstellungsverfahren und ihre Verwendung |
US6003336A (en) * | 1993-07-28 | 1999-12-21 | Matsushita Electric Industrial Co. Ltd. | Method of manufacturing a die for press-molding optical elements |
RU2083733C1 (ru) * | 1993-10-20 | 1997-07-10 | Совместное предприятие "Амкрис-Эйч, Лтд." | Способ изготовления крупногабаритных поликристаллических пластин из оптических и сцинтилляционных материалов |
DE69529334T2 (de) * | 1994-09-09 | 2003-10-16 | Koninklijke Philips Electronics N.V., Eindhoven | Verfahren zum herstellen einer form zur verwendung in der herstellung eines optischen elements, das optische unterelemente in musterform angeordnet enthält und vorrichtung zur durchführung des verfahrens |
US5770120A (en) * | 1994-12-09 | 1998-06-23 | Olympus Optical Co., Ltd. | Method of manufacturing die and optical element performed by using the die |
US5602947A (en) * | 1995-01-05 | 1997-02-11 | Ceram Optee Industries, Inc. | Anti-reflective mid-infrared optical fiber and micro optical components |
US5636057A (en) * | 1995-02-10 | 1997-06-03 | Ecolux Inc. | Prismatic toroidal lens and traffic signal light using this lens |
US5997709A (en) * | 1996-05-28 | 1999-12-07 | Minnesota Mining And Manufacturing Co. | Method of providing diffuse risers on a fresnel lens die |
WO1998032036A1 (en) * | 1997-01-17 | 1998-07-23 | Cymer, Inc. | Reflective overcoat for replicated diffraction gratings |
WO1998033222A1 (en) * | 1997-01-27 | 1998-07-30 | Corning Incorporated | Rigid battery separator with compliant layer |
US5958469A (en) * | 1997-05-14 | 1999-09-28 | Eastman Kodak Company | Method for fabricating tools for molding diffractive surfaces on optical lenses |
US6162495A (en) | 1997-09-29 | 2000-12-19 | Cymer, Inc. | Protective overcoat for replicated diffraction gratings |
US6330261B1 (en) | 1997-07-18 | 2001-12-11 | Cymer, Inc. | Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
JPH11236229A (ja) | 1997-12-16 | 1999-08-31 | Ngk Insulators Ltd | ガラス素子のプレス成形用金型 |
US6570505B1 (en) | 1997-12-30 | 2003-05-27 | Gelcore Llc | LED lamp with a fault-indicating impedance-changing circuit |
US20020027301A1 (en) | 1998-06-11 | 2002-03-07 | Hideo Kato | Method for manufacture of optical element |
US6352759B2 (en) * | 1998-08-20 | 2002-03-05 | Physical Optics Corporation | Non-lambertian glass diffuser and method of making |
WO2000046622A1 (en) | 1999-02-05 | 2000-08-10 | Corning Incorporated | Optical fiber component with shaped optical element and method of making same |
JP3751778B2 (ja) * | 1999-04-26 | 2006-03-01 | 日本板硝子株式会社 | ゾルゲル成形物の製造方法 |
US7179536B1 (en) * | 1999-09-29 | 2007-02-20 | Konica Corporation | Optical element having a low surface roughness, an optical pickup device including the optical element, and a die for making the optical element |
DE19956654B4 (de) * | 1999-11-25 | 2005-04-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Strukturierung von Oberflächen von mikromechanischen und/oder mikrooptischen Bauelementen und/oder Funktionselementen aus glasartigen Materialien |
US20020118465A1 (en) * | 2001-02-28 | 2002-08-29 | Konica Corporation | Molding die for optical element, optical element and master die |
WO2002070739A2 (en) * | 2001-03-08 | 2002-09-12 | Boehringer Ingelheim (Canada) Ltd | Assay for identifying inhibitors of the rna dependent rna polymerase (ns5b) of hcv |
US20030115907A1 (en) * | 2001-09-07 | 2003-06-26 | Patton Edward K. | Multiple lens molding system and method |
KR100446914B1 (ko) * | 2001-11-14 | 2004-09-01 | 주식회사 엘지에스 | 핫 엠보싱을 이용한 회절광학소자 렌즈의 제조방법 및 그장치 |
DE10207952A1 (de) * | 2002-02-25 | 2003-09-04 | Max Planck Gesellschaft | Verfahren zur Erzeugung von porösem Material mit periodischer Porenanordnung |
US6899838B2 (en) * | 2002-07-12 | 2005-05-31 | Becton, Dickinson And Company | Method of forming a mold and molding a micro-device |
WO2004033382A1 (en) * | 2002-10-04 | 2004-04-22 | Corning Incorporated | Lens array, method for fabricating the lens array and photosensitive glass plate |
KR20040061658A (ko) * | 2002-12-31 | 2004-07-07 | 삼성전자주식회사 | 하이브리드 애크로매틱 광학 렌즈 및 그 제조방법 |
US20040183220A1 (en) * | 2003-03-18 | 2004-09-23 | Avinash Dalmia | Ultra thin layer coating using self-assembled molecules as a separating layer for diffraction grating application |
JP4007269B2 (ja) * | 2003-07-29 | 2007-11-14 | オムロン株式会社 | 生体分子の形状転写方法、チップ基板の製造方法及びバイオチップの製造方法 |
JP2005250469A (ja) * | 2004-03-05 | 2005-09-15 | Arisawa Mfg Co Ltd | レンズ、透過型スクリーン、及びレンズの製造方法 |
TWI346092B (en) | 2004-03-31 | 2011-08-01 | Konica Minolta Opto Inc | Manufacturing method of die for optical element molding |
DE102004021215C5 (de) * | 2004-04-29 | 2014-10-30 | Schott Ag | Verfahren zum Ausbilden eines optischen Elements |
JP4576961B2 (ja) * | 2004-09-28 | 2010-11-10 | 株式会社島津製作所 | レプリカ回折格子の製造方法 |
JP4575787B2 (ja) * | 2005-01-07 | 2010-11-04 | アルプス電気株式会社 | 型の製造方法 |
US20060170774A1 (en) * | 2005-01-31 | 2006-08-03 | Eastman Kodak Company | Method and apparatus for calibrating and correcting tone scale differences between two or more outputs of a CCD |
US7561611B2 (en) | 2005-02-03 | 2009-07-14 | Corning Incorporated | Extended-lifetime elements for excimer lasers |
US8092723B2 (en) | 2005-11-18 | 2012-01-10 | Nanocomp Oy Ltd | Method of producing a diffraction grating element |
CA2645285A1 (en) * | 2006-03-10 | 2007-09-20 | Alza Corporation | Microprojection array application with high barrier retainer |
US8141384B2 (en) * | 2006-05-03 | 2012-03-27 | 3M Innovative Properties Company | Methods of making LED extractor arrays |
KR100782468B1 (ko) * | 2006-05-22 | 2007-12-05 | 삼성에스디아이 주식회사 | 레이저 조사장치 및 그를 이용한 유기전계발광소자의제조방법 |
US8330176B2 (en) * | 2007-02-13 | 2012-12-11 | 3M Innovative Properties Company | LED devices having lenses and methods of making same |
US9944031B2 (en) * | 2007-02-13 | 2018-04-17 | 3M Innovative Properties Company | Molded optical articles and methods of making same |
US8958070B2 (en) * | 2007-05-29 | 2015-02-17 | OptoTrace (SuZhou) Technologies, Inc. | Multi-layer variable micro structure for sensing substance |
DE102008038910A1 (de) | 2008-08-13 | 2010-02-18 | Schott Ag | Verfahren und Vorrichtung zur Herstellung eines strukturierten Gegenstands sowie strukturierter Gegenstand |
US9981844B2 (en) * | 2012-03-08 | 2018-05-29 | Infineon Technologies Ag | Method of manufacturing semiconductor device with glass pieces |
JP6188743B2 (ja) * | 2014-06-19 | 2017-08-30 | キヤノン株式会社 | 複数の光学機能面を有する光学素子、分光装置およびその製造方法 |
US10969560B2 (en) | 2017-05-04 | 2021-04-06 | Lightpath Technologies, Inc. | Integrated optical assembly and manufacturing the same |
WO2019031387A1 (ja) * | 2017-08-11 | 2019-02-14 | ナルックス株式会社 | 金型の製造方法 |
CN110923754A (zh) * | 2019-12-04 | 2020-03-27 | 瑞声通讯科技(常州)有限公司 | 一种易于脱模的菲涅尔模具的制造方法 |
CN111637645A (zh) * | 2020-05-20 | 2020-09-08 | 杨金玉 | 玻璃线性菲涅尔透镜在太阳能中应用 |
CN112034543B (zh) * | 2020-09-01 | 2023-01-24 | 湖北新华光信息材料有限公司 | 一种红外衍射面光学元件模压成型方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110857A (en) * | 1978-02-17 | 1979-08-30 | Nec Corp | Optical production of sawtooth photo-sensitive resin flim |
JPS5557807A (en) * | 1978-10-25 | 1980-04-30 | Hitachi Ltd | Production of diffraction grating |
JPS5835742A (ja) * | 1981-08-21 | 1983-03-02 | Victor Co Of Japan Ltd | 情報記録媒体円盤の製作に用いられるスタンパの製作法 |
JPS6025761A (ja) * | 1983-07-22 | 1985-02-08 | Seiko Epson Corp | インクジエツトヘツド |
JPS60246230A (ja) * | 1984-05-17 | 1985-12-05 | Matsushita Electric Ind Co Ltd | 光学ガラス素子のプレス成形用型 |
US4753414A (en) * | 1986-04-14 | 1988-06-28 | Balzers Optical Corporation | Carbon coatings in replicated optics art |
US4842633A (en) * | 1987-08-25 | 1989-06-27 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing molds for molding optical glass elements and diffraction gratings |
JPH0243590A (ja) * | 1988-08-03 | 1990-02-14 | Sharp Corp | ブレーズホログラムの製造方法 |
US5171347A (en) * | 1989-01-13 | 1992-12-15 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing glass optical element |
JPH0823602B2 (ja) * | 1989-01-30 | 1996-03-06 | 松下電器産業株式会社 | 回折格子のプレス成形用金型の作製方法および回折格子の作製方法 |
US5071597A (en) * | 1989-06-02 | 1991-12-10 | American Bank Note Holographics, Inc. | Plastic molding of articles including a hologram or other microstructure |
JPH0725557B2 (ja) * | 1989-06-20 | 1995-03-22 | 松下電器産業株式会社 | 光学素子のプレス成形用金型の作製方法及び光学素子の作製方法 |
JPH0356901A (ja) * | 1989-07-26 | 1991-03-12 | Canon Inc | グレーティングレンズ系 |
JPH03279901A (ja) * | 1990-03-28 | 1991-12-11 | Omron Corp | 光学素子アレーの製造方法 |
-
1992
- 1992-04-21 JP JP10083592A patent/JP3147481B2/ja not_active Expired - Fee Related
-
1993
- 1993-04-20 US US08/049,434 patent/US5436764A/en not_active Expired - Fee Related
- 1993-04-20 DE DE69311840T patent/DE69311840T2/de not_active Expired - Fee Related
- 1993-04-20 EP EP93106355A patent/EP0567896B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69311840T2 (de) | 1997-11-27 |
EP0567896A1 (de) | 1993-11-03 |
US5436764A (en) | 1995-07-25 |
JPH05297210A (ja) | 1993-11-12 |
JP3147481B2 (ja) | 2001-03-19 |
EP0567896B1 (de) | 1997-07-02 |
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