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DE60130700D1 - Induktiver Positionsgeber - Google Patents

Induktiver Positionsgeber

Info

Publication number
DE60130700D1
DE60130700D1 DE60130700T DE60130700T DE60130700D1 DE 60130700 D1 DE60130700 D1 DE 60130700D1 DE 60130700 T DE60130700 T DE 60130700T DE 60130700 T DE60130700 T DE 60130700T DE 60130700 D1 DE60130700 D1 DE 60130700D1
Authority
DE
Germany
Prior art keywords
position sensor
inductive position
inductive
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60130700T
Other languages
English (en)
Other versions
DE60130700T2 (de
Inventor
Yasuo Nekado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DMG Mori Co Ltd
Original Assignee
Sony Manufacturing Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Manufacturing Systems Corp filed Critical Sony Manufacturing Systems Corp
Application granted granted Critical
Publication of DE60130700D1 publication Critical patent/DE60130700D1/de
Publication of DE60130700T2 publication Critical patent/DE60130700T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2046Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G01D5/2216Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils by a movable ferromagnetic element, e.g. a core
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/225Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils
    • G01D5/2258Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils by a movable ferromagnetic element, e.g. core

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE60130700T 2000-03-27 2001-03-23 Induktiver Positionsgeber Expired - Lifetime DE60130700T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000090742A JP2001272201A (ja) 2000-03-27 2000-03-27 位置検出装置
JP2000090742 2000-03-27

Publications (2)

Publication Number Publication Date
DE60130700D1 true DE60130700D1 (de) 2007-11-15
DE60130700T2 DE60130700T2 (de) 2008-07-17

Family

ID=18606309

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60130700T Expired - Lifetime DE60130700T2 (de) 2000-03-27 2001-03-23 Induktiver Positionsgeber

Country Status (4)

Country Link
US (1) US6580264B2 (de)
EP (1) EP1139070B1 (de)
JP (1) JP2001272201A (de)
DE (1) DE60130700T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004003479A2 (de) * 2002-06-26 2004-01-08 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensorspule und wegmesssensor
DE10253107B4 (de) * 2002-06-26 2016-03-03 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensorspule und Wegmesssensor
US8022691B2 (en) * 2002-10-02 2011-09-20 Microstrain, Inc. Microminiature gauging displacement sensor
US6876194B2 (en) * 2003-02-26 2005-04-05 Delphi Technologies, Inc. Linear velocity sensor and method for reducing non-linearity of the sensor output signal
TWI224797B (en) * 2003-04-22 2004-12-01 Darfon Electronics Corp Transformer structure
WO2006121146A1 (ja) * 2005-05-12 2006-11-16 Matsushita Electric Works, Ltd. ポジションセンサ
JP4960767B2 (ja) * 2007-05-25 2012-06-27 パナソニック株式会社 変位センサ
JP5269357B2 (ja) * 2007-07-12 2013-08-21 株式会社ミツトヨ 電気マイクロメータ用検出器製造方法、及び電気マイクロメータ用検出器
GB0714208D0 (de) * 2007-07-20 2007-08-29 Active Sensors Ltd
EP2172683B1 (de) * 2007-07-31 2023-09-13 Amiteq Co., Ltd. Flussratensteuerungsventil und vorrichtung zur erkennung der spulenposition des flussratensteuerungsventils
US7847442B2 (en) * 2008-04-22 2010-12-07 Nti Ag Linear motor
DE102008063527A1 (de) * 2008-12-18 2010-07-01 Micro-Epsilon Messtechnik Gmbh & Co. Kg Schaltungsanordnung und Verfahren zum Auswerten eines Sensors
US8307700B2 (en) * 2010-02-19 2012-11-13 Sunpower, Inc. Internal position and limit sensor for free piston machines
JP5626962B2 (ja) * 2010-03-25 2014-11-19 株式会社ワコム 位置検出装置および位置入力装置
JP5590958B2 (ja) * 2010-04-28 2014-09-17 オリンパス株式会社 形状記憶合金アクチュエータ
DE102011013270A1 (de) * 2011-03-07 2012-09-13 Areva Np Gmbh Vorrichtung zur Detektion eines magnetisch leitfähigen Objektes sowie Stellungsmesssystem zur Positionsmessung eines Führstabes und zugehöriges Positionsmessverfahren
DE102011115030B4 (de) 2011-10-07 2021-07-01 Bürkert Werke GmbH Berührungslos arbeitender Wegmesssensor und Verfahren zur berührungslosen Wegstreckenmessung
US9305497B2 (en) 2012-08-31 2016-04-05 Qualcomm Mems Technologies, Inc. Systems, devices, and methods for driving an analog interferometric modulator
CN103021339B (zh) * 2012-12-31 2015-09-16 昆山工研院新型平板显示技术中心有限公司 像素电路、显示装置及其驱动方法
CN103615963B (zh) * 2013-12-12 2016-06-08 北京曙光航空电气有限责任公司 线性差动变压器式位移传感器的静子组件结构
DE102014218754A1 (de) * 2014-09-18 2016-03-24 Continental Teves Ag & Co. Ohg Magnetischer Sensor, Sensoranordnung und Verfahren zur Bestimmung der Position eines magnetisch wirksamen Elements
CN104390618A (zh) * 2014-12-05 2015-03-04 西安航空动力控制科技有限公司 一种便于调整零位的线位移传感器
CN105546175B (zh) * 2015-12-21 2017-12-05 中国航空工业集团公司金城南京机电液压工程研究中心 一种四余度传感器与伺服阀阀体的连接结构和零位调节方法
JP7566607B2 (ja) * 2020-12-10 2024-10-15 住友重機械工業株式会社 スプール型流量制御弁およびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3234491A (en) * 1959-12-04 1966-02-08 Wm Ainsworth & Sons Inc Transducer having coil sections of varying inside and outside diameter
JPS6013405U (ja) * 1983-07-05 1985-01-29 株式会社 東京衡機製造所 アクチユエ−タ
US4723446A (en) * 1985-04-04 1988-02-09 Kanto Seiki Co., Ltd. Device for measuring displacement
DE3518772A1 (de) 1985-05-24 1986-11-27 Robert Bosch Gmbh, 7000 Stuttgart Sensoranordnung
US6310472B1 (en) * 2000-04-13 2001-10-30 Jacob Chass Multiple hall effect sensor of magnetic core displacement

Also Published As

Publication number Publication date
DE60130700T2 (de) 2008-07-17
EP1139070B1 (de) 2007-10-03
US20010028248A1 (en) 2001-10-11
US6580264B2 (en) 2003-06-17
EP1139070A1 (de) 2001-10-04
JP2001272201A (ja) 2001-10-05

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