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DE59202713D1 - Mehrstufiges Vakuum-Pumpsystem. - Google Patents

Mehrstufiges Vakuum-Pumpsystem.

Info

Publication number
DE59202713D1
DE59202713D1 DE59202713T DE59202713T DE59202713D1 DE 59202713 D1 DE59202713 D1 DE 59202713D1 DE 59202713 T DE59202713 T DE 59202713T DE 59202713 T DE59202713 T DE 59202713T DE 59202713 D1 DE59202713 D1 DE 59202713D1
Authority
DE
Germany
Prior art keywords
vacuum pump
pump system
stage vacuum
stage
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59202713T
Other languages
English (en)
Inventor
Gion Caduff
Roland Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Balzers Pfeiffer GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Pfeiffer GmbH filed Critical Balzers Pfeiffer GmbH
Application granted granted Critical
Publication of DE59202713D1 publication Critical patent/DE59202713D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE59202713T 1991-11-11 1992-10-17 Mehrstufiges Vakuum-Pumpsystem. Expired - Fee Related DE59202713D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4136950A DE4136950A1 (de) 1991-11-11 1991-11-11 Mehrstufiges vakuumpumpsystem

Publications (1)

Publication Number Publication Date
DE59202713D1 true DE59202713D1 (de) 1995-08-03

Family

ID=6444465

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4136950A Withdrawn DE4136950A1 (de) 1991-11-11 1991-11-11 Mehrstufiges vakuumpumpsystem
DE59202713T Expired - Fee Related DE59202713D1 (de) 1991-11-11 1992-10-17 Mehrstufiges Vakuum-Pumpsystem.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4136950A Withdrawn DE4136950A1 (de) 1991-11-11 1991-11-11 Mehrstufiges vakuumpumpsystem

Country Status (3)

Country Link
EP (1) EP0541989B1 (de)
JP (1) JPH05248383A (de)
DE (2) DE4136950A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19500823A1 (de) * 1995-01-13 1996-07-18 Sgi Prozess Technik Gmbh Vakuum-Pumpstand
EP1101943B1 (de) 1995-02-28 2003-12-03 Anest Iwata Corporation Kontrollsystem für zweistufige Vakuumpumpe
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19630264A1 (de) * 1996-07-26 1998-01-29 Klein Schanzlin & Becker Ag Verfahren zur Schaltung von Einrichtungen oder Maschinen in einem Strömungssystem
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE202013000913U1 (de) * 2013-01-30 2014-05-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe insbesondere Wälzkolbenpumpe
GB2579360A (en) * 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US4505647A (en) * 1978-01-26 1985-03-19 Grumman Allied Industries, Inc. Vacuum pumping system
US4361418A (en) * 1980-05-06 1982-11-30 Risdon Corporation High vacuum processing system having improved recycle draw-down capability under high humidity ambient atmospheric conditions
JP2607572B2 (ja) * 1987-12-23 1997-05-07 株式会社日立製作所 荷電粒子を用いる分析装置および方法
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump

Also Published As

Publication number Publication date
EP0541989A1 (de) 1993-05-19
JPH05248383A (ja) 1993-09-24
DE4136950A1 (de) 1993-05-13
EP0541989B1 (de) 1995-06-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee