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DE3667547D1 - Kontaktloses pruefen integrierter schaltungen. - Google Patents

Kontaktloses pruefen integrierter schaltungen.

Info

Publication number
DE3667547D1
DE3667547D1 DE8686103212T DE3667547T DE3667547D1 DE 3667547 D1 DE3667547 D1 DE 3667547D1 DE 8686103212 T DE8686103212 T DE 8686103212T DE 3667547 T DE3667547 T DE 3667547T DE 3667547 D1 DE3667547 D1 DE 3667547D1
Authority
DE
Germany
Prior art keywords
integrated circuits
contactless testing
contactless
testing
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686103212T
Other languages
English (en)
Inventor
Johannes Georg Beha
Russell Earren Dreyfus
Gary Wayne Rubloff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3667547D1 publication Critical patent/DE3667547D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
DE8686103212T 1985-03-29 1986-03-11 Kontaktloses pruefen integrierter schaltungen. Expired - Lifetime DE3667547D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/717,407 US4670710A (en) 1985-03-29 1985-03-29 Noncontact full-line dynamic AC tester for integrated circuits

Publications (1)

Publication Number Publication Date
DE3667547D1 true DE3667547D1 (de) 1990-01-18

Family

ID=24881902

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686103212T Expired - Lifetime DE3667547D1 (de) 1985-03-29 1986-03-11 Kontaktloses pruefen integrierter schaltungen.

Country Status (5)

Country Link
US (1) US4670710A (de)
EP (1) EP0205760B1 (de)
JP (1) JPS61225831A (de)
CA (1) CA1232975A (de)
DE (1) DE3667547D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4837506A (en) * 1986-10-02 1989-06-06 Ultraprobe, Inc. Apparatus including a focused UV light source for non-contact measuremenht and alteration of electrical properties of conductors
DE3685331D1 (de) * 1986-10-23 1992-06-17 Ibm Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum.
JPH0644012B2 (ja) * 1986-12-23 1994-06-08 浜松ホトニクス株式会社 電気信号観測装置
US4823368A (en) * 1987-06-30 1989-04-18 Rikagaku Kenkyujyo Open counter for low energy electron detection with suppressed background noise
DE19742055C2 (de) * 1997-09-24 2000-02-24 Ita Ingb Testaufgaben Gmbh Vorrichtung zum Testen von Schaltungsplatinen
US6452412B1 (en) 1999-03-04 2002-09-17 Advanced Micro Devices, Inc. Drop-in test structure and methodology for characterizing an integrated circuit process flow and topography
US6297644B1 (en) * 1999-03-04 2001-10-02 Advanced Micro Devices, Inc. Multipurpose defect test structure with switchable voltage contrast capability and method of use
US7611726B2 (en) 2004-07-15 2009-11-03 L'oréal Shine-enhancing film formers
US20060103396A1 (en) * 2004-10-28 2006-05-18 Tan Michael R T Method and apparatus for non-contact testing of microcircuits
FR2916051A1 (fr) * 2007-05-07 2008-11-14 Beamind Soc Par Actions Simpli Procede et dispositif d'alignement d'un systeme de test avec un element electrique a tester

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2659264A (en) * 1950-04-27 1953-11-17 Eastman Kodak Co Method of determining the velocity and acceleration characteristics of moving objects
US2663215A (en) * 1950-04-27 1953-12-22 Eastman Kodak Co Method and apparatus for determining the velocity and acceleration characterisitics of moving objects
US3124790A (en) * 1959-01-30 1964-03-10 Kuehlxr
US2951961A (en) * 1959-05-28 1960-09-06 Bell Telephone Labor Inc Electron beam deflection system
JPS522573A (en) * 1975-06-24 1977-01-10 Toshiba Corp Surface potential measuring device
DE2813947C2 (de) * 1978-03-31 1986-09-04 Siemens AG, 1000 Berlin und 8000 München Verfahren zur berührungslosen Messung des Potentialverlaufs in einem elektronischen Bauelement und Anordnung zur Durchführung des Verfahrens
US4301409A (en) * 1978-06-06 1981-11-17 California Institute Of Technology Solar cell anomaly detection method and apparatus
JPS59166357U (ja) * 1983-04-22 1984-11-07 日本電子株式会社 走査電子顕微鏡
DE3422395A1 (de) * 1983-06-16 1985-01-17 Hitachi, Ltd., Tokio/Tokyo Verfahren und vorrichtung zum ermitteln von verdrahtungsmustern

Also Published As

Publication number Publication date
US4670710A (en) 1987-06-02
CA1232975A (en) 1988-02-16
JPS61225831A (ja) 1986-10-07
JPH0428138B2 (de) 1992-05-13
EP0205760A1 (de) 1986-12-30
EP0205760B1 (de) 1989-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee