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DE2825437C3 - Druckmeßvorrichtung - Google Patents

Druckmeßvorrichtung

Info

Publication number
DE2825437C3
DE2825437C3 DE2825437A DE2825437A DE2825437C3 DE 2825437 C3 DE2825437 C3 DE 2825437C3 DE 2825437 A DE2825437 A DE 2825437A DE 2825437 A DE2825437 A DE 2825437A DE 2825437 C3 DE2825437 C3 DE 2825437C3
Authority
DE
Germany
Prior art keywords
weight
segregation
metal
hardenable
housing parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2825437A
Other languages
German (de)
English (en)
Other versions
DE2825437B2 (de
DE2825437A1 (de
Inventor
Isamu Tokio Asano (Japan)
Mitsuru Tama Tamai
Takeshi Tokio Yasuhara
Tadanori Tachikawa Yuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of DE2825437A1 publication Critical patent/DE2825437A1/de
Publication of DE2825437B2 publication Critical patent/DE2825437B2/de
Application granted granted Critical
Publication of DE2825437C3 publication Critical patent/DE2825437C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/0038—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm using buoyant probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE2825437A 1977-06-09 1978-06-09 Druckmeßvorrichtung Expired DE2825437C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6728177A JPS542783A (en) 1977-06-09 1977-06-09 Production of pressure or differential pressure measuring apparatus

Publications (3)

Publication Number Publication Date
DE2825437A1 DE2825437A1 (de) 1978-12-21
DE2825437B2 DE2825437B2 (de) 1980-06-04
DE2825437C3 true DE2825437C3 (de) 1981-02-26

Family

ID=13340421

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2825437A Expired DE2825437C3 (de) 1977-06-09 1978-06-09 Druckmeßvorrichtung

Country Status (3)

Country Link
US (1) US4158311A (ja)
JP (1) JPS542783A (ja)
DE (1) DE2825437C3 (ja)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4265389A (en) * 1978-10-30 1981-05-05 Michael Mastromatteo Method of welding a diaphragm assembly
JPS5921497B2 (ja) * 1978-11-02 1984-05-21 富士電機株式会社 圧力測定装置
US4322775A (en) * 1979-10-29 1982-03-30 Delatorre Leroy C Capacitive pressure sensor
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
DE3107891A1 (de) * 1981-03-02 1982-09-16 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung gefasster metallmembranen und fassungsring zur durchfuehrung des verfahrens
DE3225650A1 (de) * 1982-07-09 1984-01-12 Schoppe & Faeser Gmbh, 4950 Minden Verfahren zur herstellung einer differenzdruckmesskapsel
US4670733A (en) * 1985-07-01 1987-06-02 Bell Microsensors, Inc. Differential pressure transducer
DE3818458A1 (de) * 1988-05-31 1989-12-07 Moto Meter Ag Vorrichtung zur messung des druckes fluessiger oder gasfoermiger medien
US4996627A (en) * 1989-01-30 1991-02-26 Dresser Industries, Inc. High sensitivity miniature pressure transducer
JP2639159B2 (ja) * 1989-04-14 1997-08-06 富士電機株式会社 静電容量式差圧検出器
DE4111119A1 (de) * 1991-04-03 1992-10-08 Univ Chemnitz Tech Stapelbare mikromechanische kapazitive druckmesszelle
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
DE4416978C2 (de) * 1994-05-13 2000-09-07 Ifm Electronic Gmbh Drucksensor
US5600072A (en) * 1995-06-23 1997-02-04 Motorola, Inc. Capacitive pressure sensor and method for making the same
US6019002A (en) * 1997-12-02 2000-02-01 Setra Systems, Inc. Pressure transducer having a tensioned diaphragm
US6807865B2 (en) * 2002-02-04 2004-10-26 Dwyer Instruments, Inc. Pressure sensor with a radially tensioned metal diaphragm
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US7841240B2 (en) * 2008-04-16 2010-11-30 Kulite Semiconductor Products, Inc. Header for a differential pressure transducer
DE102012111533A1 (de) * 2012-11-28 2014-05-28 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
DE102014102973A1 (de) * 2014-03-06 2015-09-10 Endress + Hauser Gmbh + Co. Kg Drucksensor
WO2017180670A2 (en) 2016-04-11 2017-10-19 The Alfred E. Mann Foundation For Scientific Research Pressure sensors with tensioned membranes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999386A (en) * 1956-11-02 1961-09-12 Trans Sonics Inc High precision diaphragm type instruments
US3027769A (en) * 1959-03-03 1962-04-03 Grant W Coon Diaphragm type capacitance transducer
US3800413A (en) * 1969-10-27 1974-04-02 Rosemount Inc Differential pressure transducer

Also Published As

Publication number Publication date
DE2825437B2 (de) 1980-06-04
DE2825437A1 (de) 1978-12-21
US4158311A (en) 1979-06-19
JPS542783A (en) 1979-01-10
JPS5618891B2 (ja) 1981-05-02

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Legal Events

Date Code Title Description
OAP Request for examination filed
OD Request for examination
C3 Grant after two publication steps (3rd publication)
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee