CN219644457U - A liquid cold plate, cooling device and server - Google Patents

Abstract

The utility model belongs to the technical field of liquid cooling and heat dissipation, and in particular relates to a liquid cooling plate, a cooling device and a server. The liquid cooling plate includes a liquid cooling plate main body, a liquid inlet and a liquid outlet. channel, the second confluence channel and a plurality of side-by-side micro-channels, heat dissipation teeth are formed between two adjacent micro-channels, all micro-channels are connected in parallel, and the first confluence channel is connected between the liquid inlet and the inlets of all micro-channels , the second confluence channel is connected between the liquid outlet and the outlets of all the microchannels, so that the heat exchange area can be increased through the cooling teeth, and the liquid flow in the main body of the liquid cold plate can also be increased through all the microchannels connected in parallel. The cross-sectional area reduces the length of the liquid flow to reduce the pressure drop of the liquid and improve the liquid carrying capacity of the liquid cold plate and the heat dissipation efficiency of the server.

Description

A liquid cold plate, cooling device and server

technical field

The utility model belongs to the technical field of liquid cooling and heat dissipation, in particular to a liquid cold plate, a cooling device and a server.

Background technique

The liquid cold plate is a key component of the liquid cooling design, and the flow channels in the traditional liquid cold plate are connected in series or in series and parallel. The liquid-cooled plates with flow channels in series are mostly used in scenarios with low heat source density. In this scenario, the liquid-cooled plates have better temperature uniformity and higher cooling efficiency.

In a scenario with a high heat source density, such as a server, since the area of the heat dissipation surface of the heat source is small, the area of the heat conduction surface in contact with the heat source on the liquid cooling plate is larger than the area of the heat dissipation surface of the heat source. The high temperature area corresponding to the heat source and the low temperature area staggered with the heat source in the heat conduction surface, the liquid cold plate cannot quickly spread the heat away, the fluid flowing through the low temperature area cannot quickly absorb heat, and the temperature uniformity of the liquid cold plate is poor.

In addition, in the scene with high heat source density, in order to increase the heat exchange area of the liquid cooling plate, microchannels are usually arranged in the liquid cooling plate, and the microchannels are connected in series and parallel. The length of the microchannels set in series and parallel is longer, and the cross-sectional area Smaller, the pressure drop of the liquid after the liquid passes through the microchannel is relatively large, resulting in poor thermal capacity of the liquid-cooled plate.

Utility model content

The technical problem to be solved by the utility model is: to provide a liquid cold plate, a cooling device and a server in view of the technical problems of the existing liquid cold plate that the liquid pressure drop is relatively large and the liquid carrying capacity is poor.

In order to solve the above technical problems, on the one hand, the embodiment of the utility model provides a liquid cooling plate, including a cold plate main body, a liquid inlet and a liquid outlet, and a first confluence channel, a second A confluence channel and a plurality of side-by-side micro-channels, heat dissipation teeth are formed between two adjacent micro-channels, all the micro-channels are connected in parallel, and the first confluence channel communicates with the liquid inlet and all all the micro-channels Between the inlets of the microchannels, the second confluence channel communicates between the liquid outlets and the outlets of all the microchannels.

Optionally, a first confluence channel and a second confluence channel are also provided in the main body of the liquid cooling plate, and the first confluence channel communicates between the liquid inlet and the inlets of all the microchannels, so The second confluent channel is connected between the liquid outlet and the outlets of all the microchannels.

Optionally, multiple microchannels are arranged in parallel, the lengths of the multiple microchannels are equal, and the cross-sectional areas of the multiple microchannels are equal.

Optionally, the first confluence channel and the second confluence channel extend along the arrangement direction of the plurality of microchannels.

Optionally, the liquid inlet and the liquid outlet are respectively located on both sides of the main body of the liquid cooling plate in the extending direction of the microchannel;

The first end of the first confluence channel is connected to the liquid inlet, the first end of the second confluence channel is opposite to the first end of the first confluence channel in the extending direction of the microchannel, The second end of the second confluence channel is connected to the liquid outlet, and the second end of the second confluence channel is opposite to the second end of the first confluence channel in the extending direction of the microchannel.

Optionally, the main body of the liquid cold plate has a closed steam cavity, the steam cavity is located on the side of the microchannel facing the heat source, the steam cavity is isolated from the microchannel, and the steam cavity encapsulates There is a phase change working substance.

Optionally, the main body of the liquid cooling plate includes a main body frame and a first sealing plate, a groove is formed on the side of the main body frame facing away from the microchannel, and the first sealing plate is sealingly connected to the groove The notch of the first sealing plate and the main body frame form the steam chamber.

Optionally, one side of the main frame facing away from the steam chamber is open, and the liquid-cooled plate body further includes a second sealing plate, the second sealing plate is sealingly connected to the opening of the main frame and abut against the heat dissipation teeth.

Optionally, a guide post is provided in the steam chamber, the guide post extends along the thickness direction of the main body of the liquid cooling plate, and a first capillary structure is provided in the guide post.

Optionally, a plurality of second capillary structures are arranged on the chamber wall of the steam chamber.

According to the liquid cold plate of the embodiment of the present invention, a plurality of microchannels are arranged side by side in the main body of the liquid cold plate of the liquid cold plate, so that heat dissipation teeth are formed between two adjacent microchannels, and the entrances of all microchannels pass through The first confluence channel communicates with the liquid inlet of the liquid cold plate, and the outlets of all microchannels communicate with the liquid outlet of the liquid cold plate through the second confluence channel, so that all microchannels are connected in parallel, that is, they are located between the liquid inlet and the liquid cold plate. All the microchannels between the liquid outlets are connected in parallel, so that while increasing the heat exchange area through the cooling teeth, the cross-sectional area of the liquid flow in the main body of the liquid cold plate is also increased through all the microchannels connected in parallel, and the length of the liquid flow is reduced , to reduce the pressure drop of the liquid and improve the liquid carrying capacity of the liquid cold plate.

On the other hand, the embodiment of the present utility model also provides a cooling device, including a cooler, a hydraulic pump, and the above-mentioned liquid cold plate, and the cooler, the hydraulic pump and the liquid cold plate are connected in series to form a circulation loop, so The outlet of the hydraulic pump is connected to the liquid inlet through a cooling pipeline.

On the other hand, an embodiment of the present utility model also provides a server, including a heat generating device and the above-mentioned liquid cold plate, and the liquid cold plate is in thermal contact with the heat generating device and is fixedly connected.

Description of drawings

Fig. 1 is a schematic diagram of an exploded structure of a perspective view of the liquid cooling plate and the heat source provided by the first embodiment of the present invention;

Fig. 2 is a schematic diagram of an exploded structure from another perspective of the liquid cooling plate and the heat source provided by the first embodiment of the present invention (hidden guide post);

Fig. 3 is a schematic diagram of the internal structure of the liquid-cooled plate provided by the first embodiment of the present invention (the arrow shows the flow direction of the fluid, and the square section structure shows the position of the heat source);

Fig. 4 is a schematic diagram of the internal structure of the liquid-cooled plate provided by the second embodiment of the present invention (the arrow indicates the flow direction of the fluid);

Fig. 5 is a schematic diagram of the internal structure of the liquid-cooled plate provided by the third embodiment of the present invention (the arrow indicates the flow direction of the fluid).

The reference signs in the instructions are as follows:

1. The main body of the liquid cooling plate; 11. The main frame; 111. The heat dissipation teeth; 112. The groove; 12. The first sealing plate; 13. The second sealing plate; The second confluence channel; 17. Guide post; 2. Liquid inlet joint; 3. Liquid outlet joint; 4. Heat source;

201, cooling teeth; 202, micro channel; 203, first confluence channel; 204, second confluence channel;

301, radiator; 302, micro channel; 303, first confluence channel; 304, second confluence channel.

Detailed ways

In order to make the technical problems, technical solutions and beneficial effects solved by the utility model clearer, the utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model, and are not intended to limit the utility model.

first embodiment

The liquid cold plate provided by the first embodiment of the utility model is applied in a scene with a high heat source density to improve the heat exchange efficiency and heat carrying capacity of the liquid cold plate.

As shown in Figures 1 to 3, the liquid cold plate includes a liquid cold plate main body 1, a liquid inlet and a liquid outlet, and a plurality of microchannels 14 are arranged side by side in the liquid cold plate main body 1, and between two adjacent microchannels 14 Heat dissipation teeth 111 are formed between them, the inlets of all the microchannels 14 communicate with the liquid inlets, and the outlets of all the microchannels 14 communicate with the liquid outlets, so that all the microchannels 14 are connected in parallel.

Such setting can increase the heat exchange area and heat exchange efficiency through the heat dissipation teeth 111, and also increase the cross-sectional area of the liquid flow in the liquid cold plate main body 1 through all the microchannels 14 in parallel, reduce the length of the liquid flow, and Reduce the pressure drop of the liquid and improve the heat carrying capacity of the liquid cold plate.

Specifically, as shown in FIGS. 1 to 3 , the liquid-cooled plate main body 1 includes a main body frame 11, a first sealing plate 12 and a second sealing plate 13, the main body frame 11 is in a rectangular parallelepiped structure, and the length direction of the main body frame 11 is defined as the first One direction, the width direction is the second direction, the thickness direction (height direction) is the third direction, and the liquid cooling plate and the heat source 4 are arranged close to each other in the third direction.

In the third direction, the side of the main body frame 11 facing away from the heat source 4 is open, and the main body frame 11 is provided with a plurality of cooling teeth 111 side by side in the opening. The cooling teeth 111 are extended in the first direction, and the plurality of cooling teeth 111 parallel and juxtaposed in the second direction. The second sealing plate 13 is sealingly connected to the opening of the main body frame 11 and abuts against the cooling teeth 111 to form a microchannel 14 surrounded by the main body frame 11 and the second sealing plate 13 between two adjacent cooling teeth 111 , the plurality of microchannels 14 are arranged extending in the first direction, and the plurality of microchannels 14 are parallel and arranged side by side in the second direction.

In this embodiment, as shown in FIG. 3 , the main body frame 11 is formed by processing a copper block, and the opening and the cooling teeth 111 are all formed by milling. Each cooling tooth 111 is a strip-shaped plate structure. The width, height and length are all equal, so that the lengths of all microchannels 14 are all equal, and the cross-sectional areas of all microchannels 14 are all equal, so that the flow velocity and resistance of the liquid flow flowing through each microchannel 14 are equal, which helps To ensure uniformity of heat dissipation throughout the liquid cold plate.

A first confluence channel 15 and a second confluence channel 16 are also arranged in the liquid-cooled plate main body 1, the first confluence channel 15 communicates between the liquid inlet and the inlets of all the microchannels 14, and the second confluence channel 16 communicates with the outlet Between the liquid port and the outlets of all microchannels 14.

Specifically, as shown in FIG. 3 , the first confluence channel 15 and the second confluence channel 16 are formed by surrounding the main body frame 11 and the second sealing plate 13 , and the first confluence channel 15 and the second confluence channel 16 are formed on the first side. Upwardly located on both sides of all cooling teeth 111, that is, on both sides of the microchannels 14, the first confluence channel 15 and the second confluence channel 16 are extended in the second direction, that is, in the arrangement of all microchannels 14 extend in the direction. The first confluence channel 15 has a first end and a second end on the arrangement direction of the microchannels 14, and the second confluence channel 16 also has a first end and a second end on the arrangement direction of the microchannels 14, the first The first end of the confluence channel 15 is on the extension direction of the microchannel 14, that is, it is opposite to the first end of the second confluence channel 16 in the first direction, and the second end of the first confluence channel 15 is in the extension direction of the microchannel 14. direction, that is, opposite to the second end of the second bus channel 16 in the first direction. The first confluent channel 15 communicates with the inlets of all the microchannels 14 , and the second confluent channel 16 communicates with the outlets of all the microchannels 14 .

The liquid cold plate also includes a liquid inlet joint 2 and a liquid outlet joint 3, both of which are connected to the main frame 11. In this embodiment, the liquid inlet joint 2 and the liquid outlet joint 3 are directly connected to the main frame 11 Formed in one piece by machining. In other embodiments, the liquid inlet joint 2 and the liquid outlet joint 3 can be processed separately and then connected to the main body frame 11 through a screw structure. In this embodiment, both the liquid inlet joint 2 and the liquid outlet joint 3 are arranged extending in the first direction, and the interface where the liquid inlet joint 2 communicates with the main body frame 11 forms the liquid inlet of the liquid cooling plate, and the liquid outlet joint 3 and the main body The connected interface of the frame 11 forms the liquid outlet of the liquid cold plate.

The liquid inlet and the liquid outlet are respectively located on both sides of the main body 1 of the liquid cooling plate in the extending direction of the microchannel 14, that is, the liquid inlet joint 2 and the liquid outlet joint 3 are respectively connected to two sides of the main body frame 11 in the first direction. side. As shown in Figure 3, the liquid inlet joint 2 is located at the first end of the first confluence channel 15, the liquid outlet joint 3 is located at the second end of the second confluence channel 16, and the liquid inlet is connected with the first end of the first confluence channel 15 , the liquid outlet is connected to the second end of the second confluence channel 16 . In this way, the liquid inlet joint 2 and the liquid outlet joint 3 are arranged at the rectangular diagonals of the main body frame 11, so that the lengths of the tributaries of the liquid flow through the microchannels 14 from the liquid inlet to the liquid outlet are all equal, that is, it is possible to ensure that the liquid The flow velocity of the liquid flow in each part of the cold main body is equal, which helps to reduce the fluid pressure drop of the entire liquid cold plate and improve the temperature uniformity of the entire liquid cold plate.

In the main body 1 of the liquid cooling plate, the main body frame 11 and the second sealing plate 13 enclose a liquid cooling chamber. The liquid cooling chamber includes a microchannel 14, a first converging channel 15 and a second converging channel 16. The liquid cooling working medium is in the liquid cooling chamber internal circulation. In the liquid-cooled plate main body 1, there is also a steam cavity in the thickness direction of the liquid-cooled plate, the steam cavity is a closed cavity, and the steam cavity is located on the side of the microchannel 14 facing the heat source, and the steam cavity is isolated from the liquid-cooled cavity. Encapsulated with phase change working fluid. In this embodiment, the phase change working medium packaged in the steam chamber is water, and the steam chamber is a negative pressure chamber.

Specifically, as shown in FIG. 1 and FIG. 2, the first sealing plate 12, the main frame 11 and the second sealing plate 13 are arranged in the thickness direction of the liquid cooling plate, that is, in the third direction. In the third direction, the main frame 11 towards the side of the heat source 4, that is, a groove 112 is formed on the side facing away from the microchannel 14, the notch of the groove 112 faces away from the direction of the microchannel 14, and the first sealing plate 12 is sealed and connected to the groove 112. At the position of the notch, the first sealing plate 12 , the second sealing plate 13 and the main frame 11 are sealed and connected by welding to form a closed steam chamber between the first sealing plate 12 and the main frame 11 .

A guide post 17 is arranged in the steam chamber. One end of the guide post 17 abuts against the bottom wall of the groove 112, and the other end abuts against the first sealing plate 12. The guide post 17 is formed by sintering a copper post, and the sintered There is a first capillary structure inside the guide pillar 17, the first capillary structure includes a plurality of particles formed by sintering the copper pillar, holes are formed between the plurality of particles, the plurality of holes are connected, and the liquid working medium can be absorbed by the capillary force. It is transported in a plurality of connected holes to realize the delivery of the liquid working medium in the length direction of the guide post 17 . During the cooling process of the heat source 4 by the liquid cold plate, the first sealing plate 12 is in contact with the heat source 4, and the working fluid close to the first sealing plate 12 in the steam chamber is a gaseous working medium that is vaporized after absorbing the heat of the heat source 4, and deviates from The working medium of the first sealing plate 12 and the groove bottom wall near the groove 112 is the liquid working medium cooled by the liquid cooling working medium in the liquid cooling chamber, and the capillary in the first capillary structure of the guide post 17 can transfer the liquid working medium The substance is transported from the bottom of the groove 112 to the first sealing plate 12 along the thickness direction of the liquid cooling plate, so as to realize the circulation of the phase change working substance in the steam chamber.

In this embodiment, copper powder is sintered on the first sealing plate 12 and the groove wall of the groove 112 to form a plurality of second capillary structures on the wall of the steam chamber. There are multiple particles, holes are formed between the particles, and the holes are connected, and the liquid working medium can be transported in the multiple connected holes under the action of capillary force, so as to realize the transportation of the liquid working medium in the wall surface of the steam chamber , so that the phase change working medium in the steam chamber is evenly distributed in the steam chamber to ensure that the temperature in the steam chamber is consistent everywhere, which helps to achieve the temperature uniformity of the steam chamber.

In this embodiment, the components in the liquid cooling plate are welded and sintered together, hydrogen is passed through the liquid cooling chamber and the steam chamber for reduction and oxidation, and then an appropriate amount of water is injected into the steam chamber, the steam chamber is vacuumed and the air outlet is welded firmly , to test the sealing performance of the steam chamber, and to conduct high temperature and thermal shock reliability tests on the entire liquid cold plate to ensure the reliability of the liquid cold plate in the working process.

In this embodiment, all the microchannels 14 in the liquid cooling chamber are arranged in parallel, which can reduce the resistance of the liquid flow in the liquid cooling chamber, reduce the pressure drop of the liquid flow, and reduce the pressure resistance requirements for the liquid cooling plate; at the same time, the liquid cooling plate The part in contact with the heat source 4 is provided with a steam chamber, and the heat of the heat source 4 quickly diffuses in the steam chamber, and is conducted to the heat dissipation teeth 111 through the bottom plate of the groove 112, and then to the liquid-cooled working medium, which helps to improve the performance of the liquid-cooled plate. Uniform temperature and heat transfer efficiency.

second embodiment

The second embodiment of the utility model provides a liquid cold plate, which is different from the first embodiment in that, as shown in Figure 4, the heat dissipation teeth 201 in the main body frame of the liquid cold plate and the micro The shape of the channel 202 is "S" shape, the microchannels 202 are arranged side by side, the lengths of the multiple microchannels 202 are equal, the inlets of the multiple microchannels 202 communicate with the first confluence channel 203, and the outlets of the multiple microchannels 202 communicate with the first confluent channel 203. The two converging channels 204 are connected, and the cross-sectional areas of the microchannels 202 are equal, which can ensure that the resistance and flow velocity of the liquid cooling working medium passing through the microchannel 202 are equal, and also help to reduce the pressure drop of the liquid cooling working medium in the liquid cold plate, and improve the liquid cooling temperature. The heat carrying capacity of the cold plate.

In other embodiments, the shape of the microchannel in the liquid cooling plate can also be "L" shape or other special-shaped structure, the length of the microchannel and the cross-sectional area of the microchannel can be unequal, as long as multiple microchannels are connected in parallel, it can Increase the cut-off area of the liquid-cooled working medium in the liquid-cooled chamber, reduce the length of the flow path of the liquid-cooled working medium in the liquid-cooled chamber, thereby reducing the pressure drop of the liquid-cooled working medium and improving the heat-carrying capacity of the liquid-cooled plate.

third embodiment

The third embodiment of the present utility model provides a liquid cooling plate, which is different from the first embodiment in that the shape of the liquid cooling cavity in the first embodiment is a cuboid, as shown in Figure 5 in this embodiment , the shape of the liquid cooling cavity is spindle-shaped. In the extending direction of the microchannel 302, the liquid inlet and the liquid outlet are respectively located on both sides of the liquid cooling cavity, and the cooling teeth 301 and the microchannel 302 are located in the middle of the spindle-shaped length direction. , the first confluent channel 303 and the second confluent channel 304 are at both ends of the spindle-shaped length direction, the width of the first confluent channel 303 gradually decreases from the microchannel to the liquid inlet, and the width of the second confluent channel 304 is from the microchannel to the liquid inlet. The liquid outlet gradually increases, the liquid inlet and the liquid outlet are respectively located at the two ends of the spindle in the length direction, and both the liquid inlet and the liquid outlet are in the middle of the spindle in the width direction.

Or in other embodiments, the liquid cooling cavity is a special-shaped cavity, and the first confluence channel and the second confluence channel are special-shaped structures.

Fourth embodiment

The fourth embodiment of the utility model provides a liquid cooling plate, which is different from the first embodiment in that the setting of the steam chamber is cancelled, the main frame has a heat conducting surface for contacting the heat source, and the heat conducting surface is located in the liquid cooling chamber On the side wall of the heat source, and the heat conduction surface is set away from the liquid cooling chamber, the area of the heat conduction surface is equal to the area of the heat dissipation surface on the heat source. The cross-section of the liquid cooling chamber in the direction of the vertical liquid flow is trapezoidal, the shorter bottom of the trapezoid corresponds to the side wall provided with the heat conducting surface, and the heat dissipation teeth are arranged on the chamber wall provided with the heat conducting surface, and the heat dissipation teeth are formed by the trapezoidal shorter The short bottom extends toward the long bottom, and the microchannels are arranged side by side in the arrangement direction of the two waists of the trapezoid, so that the heat of the heat source can be quickly transferred to the cooling process in the liquid cooling chamber through the heat conduction surface and the heat dissipation teeth. quality, and because the area of the heat conduction surface is equal to the area of the heat dissipation surface in the heat source, it helps to transfer heat evenly in the liquid cooling chamber.

fifth embodiment

The sixth embodiment of the present utility model provides a liquid cold plate, which differs from the first embodiment in that the setting of the second sealing plate is canceled in the main body of the liquid cold plate, and a plurality of through holes are processed on the main body frame, and a plurality of The through holes communicate with the first confluence channel and the second confluence channel, a plurality of through holes form a plurality of microchannels, the channel walls between two adjacent microchannels form heat dissipation teeth, and the liquid cooling chamber includes microchannels formed by a plurality of microchannels cavity, a first manifold cavity formed by the first manifold channel, and a second manifold cavity formed by the second manifold channel.

Sixth embodiment

The seventh embodiment of the utility model provides a liquid cooling plate, which differs from the first embodiment in that the steam chamber cancels the setting of the guide column, and the liquid cooling plate It is located on the upper side of the heat source in the direction of gravity, so that the liquid in the steam chamber that is cooled by the liquid-cooled working medium in the liquid cooling chamber and forms a liquid working medium falls on the first sealing plate of the steam chamber under the action of gravity to absorb the heat of the heat source After the gasification goes up to realize the circulation in the steam chamber.

The embodiment of the utility model also provides a cooling device, the cooling device includes a cooler, a hydraulic pump and the liquid cooling plate in any of the above embodiments, the hydraulic pump, the liquid cooling plate and the cooler are connected in series to form a circulation loop, and the liquid cooling The substance circulates in the circulation circuit, and the hydraulic pump provides the hydraulic pressure flowing in the circulation circuit for the liquid-cooled working fluid. The inlet of the hydraulic pump is connected to the outlet of the cooler through the cooling pipeline, and the outlet of the hydraulic pump is connected to the liquid cooling fluid through the cooling pipeline. Plate inlet connections.

Embodiments of the present utility model also provide a server, including a heating device and the liquid cooling plate in any one of the above embodiments, and the liquid cooling plate is in thermal contact with the heating device and is fixedly connected. Heat-generating components include central processing units, metal oxide field effect transistors, and other high-heating components. The number of liquid-cooled plates is equal to the number of high-heating components mentioned above, and can also be smaller than the number of high-heating components. For example, two Two high-heating components can share a liquid cold plate.

There is a heat dissipation surface on the high-heating components, and the heat-conducting surface of the liquid-cooled plate is in thermal contact with the heat-dissipating surface, and the liquid-cooled plate is also fixedly connected to the high-heating components through screws to avoid the gap between the liquid-cooled plate and the high-heating components. relative movement between them.

The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present utility model shall be included in this utility model. within the scope of protection of utility models.

Claims (11)

1. A liquid-cooled plate, characterized in that it comprises a liquid-cooled plate main body, a liquid inlet and a liquid outlet, and the liquid-cooled plate main body is provided with a first confluence channel, a second confluence channel and a plurality of side-by-side micro channel, heat dissipation teeth are formed between two adjacent microchannels, all the microchannels are connected in parallel, and the first confluent channel is connected between the liquid inlet and the inlets of all the microchannels, The second confluence channel is connected between the liquid outlet and all outlets of the microchannels. 2 . The liquid cold plate according to claim 1 , wherein the plurality of microchannels are arranged in parallel, the lengths of the plurality of microchannels are equal, and the cross-sectional areas of the plurality of microchannels are equal. 3 . The liquid cold plate according to claim 1 , wherein the first confluence channel and the second confluence channel extend along the arrangement direction of the plurality of microchannels. 4 . 4. The liquid cold plate according to claim 3, wherein the liquid inlet and the liquid outlet are respectively located on both sides of the main body of the liquid cold plate in the extending direction of the microchannel; The first end of the first confluence channel is connected to the liquid inlet, the first end of the second confluence channel is opposite to the first end of the first confluence channel in the extending direction of the microchannel, The second end of the second confluence channel is connected to the liquid outlet, and the second end of the second confluence channel is opposite to the second end of the first confluence channel in the extending direction of the microchannel. 5. The liquid cold plate according to any one of claims 1 to 4, wherein the liquid cold plate main body has a closed steam cavity, and the steam cavity is located at the side of the microchannel facing the heat source. On one side, the steam chamber is isolated from the microchannel, and the steam chamber is encapsulated with a phase-change working fluid. 6. The liquid cold plate according to claim 5, wherein the main body of the liquid cold plate comprises a main body frame and a first sealing plate, and a groove is formed on the side of the main body frame facing away from the microchannel, The first sealing plate is sealingly connected to the notch of the groove to form the steam chamber between the first sealing plate and the main body frame. 7. The liquid cold plate according to claim 6, characterized in that, the side of the main body frame facing away from the steam chamber is open, and the liquid cold plate main body also includes a second sealing plate, the second The sealing plate is sealingly connected to the opening of the main body frame and abuts against the heat dissipation teeth. 8. The liquid-cooled plate according to claim 5, wherein a guide post is arranged in the steam chamber, and the guide post extends along the thickness direction of the main body of the liquid-cooled plate, and the guide post is provided with a first capillary structure. 9 . The liquid cold plate according to claim 8 , wherein a plurality of second capillary structures are arranged on the cavity wall of the steam cavity. 10. A cooling device, characterized in that it comprises a cooler, a hydraulic pump and the liquid cold plate according to any one of claims 1 to 9, the cooler, the hydraulic pump and the liquid cold plate are connected in series A circulation loop is formed, and the outlet of the hydraulic pump is connected to the liquid inlet through a cooling pipeline. 11. A server, characterized by comprising a heat generating device and the liquid cold plate according to any one of claims 1 to 9, the liquid cold plate is in thermal contact with the heat generating device and is fixedly connected.