CN210106129U - Micro Piezo Pump - Google Patents

Abstract

A miniature piezoelectric pump comprising: the tube plate is provided with an inflow tube, an outflow tube, an inflow channel, an outflow channel, a positive pressure chamber, a negative pressure chamber and an accommodating chamber, the inflow channel is arranged in the inflow tube and penetrates through the inflow tube, the outflow channel is arranged in the outflow tube and penetrates through the outflow tube, the inflow channel is communicated with the negative pressure chamber, the outflow channel is communicated with the positive pressure chamber, and the accommodating chamber is arranged between the positive pressure chamber and the negative pressure chamber; the cover plate is covered on the tube plate in a sealing way; the pump core module is accommodated in the accommodating cavity of the tube plate; the pump core module draws fluid in the negative pressure cavity, enters the pump core module, flows into the positive pressure cavity, then flows out of the outflow channel, and meanwhile, external fluid can flow into the negative pressure cavity from the inflow channel to finish fluid transmission.

Description

Micro Piezo Pump

technical field

This case is about a micro-pump, especially a micro-piezoelectric pump that can transmit high-flow fluid in a small, silent and fast manner.

Background technique

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, the fluids contained in products such as micropumps, sprayers, inkjet heads, and industrial printing devices are Actuator is its key technology.

With the rapid development of science and technology, the application of fluid conveying structures has become more and more diversified, such as industrial applications, biomedical applications, medical care, electronic cooling, etc., and even the recent popular wearable devices can be seen. Traditional fluid actuators have gradually tended to miniaturize devices and maximize flow.

Therefore, how to increase the application scope of the fluid actuator by means of an innovative packaging structure is an important development topic at present.

Utility model content

The main purpose of this case is to provide a miniature piezoelectric pump with a shell structure, so that when a pump core module is arranged in the shell structure, it can not only achieve the effect of protecting the pump core module, but also generate negative air pressure in the shell structure and The effect of positive air pressure, whereby the fluid is transported.

A broad implementation aspect of the present case is a micro piezoelectric pump, which includes a tube plate, a cover plate, and a pump core module. The tube sheet has an inflow pipe, an outflow pipe, an inflow channel, an outflow channel, a positive pressure chamber, a negative pressure chamber and an accommodating chamber. The inflow channel is arranged in the inflow pipe and penetrates through the inflow pipe. The outflow channel is arranged in the outflow pipe and runs through the outflow pipe. The inflow channel communicates with the negative pressure chamber, and the outflow channel communicates with the positive pressure chamber. The accommodating chamber is arranged between the positive pressure chamber and the negative pressure chamber. The cover plate covers the tube plate and has a concave portion and an outer peripheral portion surrounding the concave portion. The pump core module is accommodated in the accommodating chamber of the tube sheet, and is enclosed in the tube sheet by the cover plate, whereby a positive pressure chamber is formed between the pump core module and the tube sheet. After the pump core module draws the fluid in the negative pressure chamber into the pump core module, it flows into the positive pressure chamber, and then flows out of the tube sheet from the outflow channel. At the same time, the external fluid will also flow into the negative pressure chamber from the inflow channel to complete the fluid transfer.

Description of drawings

FIG. 1 is a schematic perspective view of the first embodiment of the micro piezoelectric pump of the present invention.

FIG. 2 is a schematic exploded perspective view of the first embodiment of the micro piezoelectric pump of the present invention.

3A and 3B are schematic views of the front and the back of the tube sheet according to the first embodiment of the present invention, respectively.

3C is a perspective partial perspective view of the tube sheet of the first embodiment of the present invention.

4A and 4B are schematic views of the front and the back of the cover plate according to the first embodiment of the present invention, respectively.

FIG. 5A is a schematic exploded perspective view of the pump core module according to the first embodiment of the present invention.

FIG. 5B is another perspective exploded schematic view of the pump core module of the first embodiment of the present invention.

FIG. 6A is a schematic cross-sectional view of the pump core module of the present invention.

6B is a schematic cross-sectional view of another embodiment of the pump core module of the present invention.

6C to 6E are schematic diagrams of the operation of the pump core module of the present invention.

FIG. 7A is a schematic cross-sectional view taken from the section line A-A in FIG. 3A .

FIG. 7B is a schematic cross-sectional view taken from the section line B-B in FIG. 3A .

FIG. 7C is a schematic diagram of the inflow action of the first embodiment of the present invention.

FIG. 7D is a schematic diagram of the leakage action of the first embodiment of the present invention.

FIG. 8 is a three-dimensional schematic diagram of the tube plate of the second embodiment of the micro piezoelectric pump of the present invention.

FIG. 9 is a schematic front view of the tube sheet according to the second embodiment of the present invention.

FIG. 10A is a schematic cross-sectional view taken from the C-C section line in FIG. 9 .

FIG. 10B is a schematic cross-sectional view taken from the D-D section line in FIG. 9 .

FIG. 10C is a schematic diagram of the inflow action of the second embodiment of the present invention.

FIG. 10D is a schematic diagram of the leakage action of the second embodiment of the present invention.

Description of reference numerals

10, 10': Micro Piezo Pump

1, 1': tube sheet

11: Inflow tube

11a: Inflow channel

12: Outflow pipe

12a: Outflow channel

13: pin opening

14: Ridge

2: Cover

21: Peripheral part

22: Recess

3: Pump core module

31: Inlet plate

31a: inlet hole

31b: Busbar groove

31c: Convergence Chamber

32: Resonance sheet

32a: Hollow hole

32b: Movable part

32c: Fixed part

33: Piezoelectric Actuators

33a: Hoverboard

33b: Outer frame

33c: Bracket

33d: Gap

33e: first conductive pin

34: Piezoelectric elements

35: First insulating sheet

36: Conductive sheet

36a: Electrodes

36b: second conductive pin

37: Second insulating sheet

38: Resonance Chamber

C1: Positive pressure chamber

C2: accommodating chamber

C3: Negative pressure chamber

h1: Inflow opening

h2: Outflow opening

A-A, B-B, C-C, D-D: hatching

Detailed ways

Embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially used for illustration rather than limiting this case.

Referring to FIGS. 1 to 3 , the present application provides a micro piezoelectric pump 10 , which includes a tube plate 1 , a cover plate 2 and a pump core module 3 . The pump core module 3 is enclosed in the tube sheet 1 by the cover plate 2 to form a micro piezoelectric pump 10 .

Referring to FIGS. 3A to 3C , 7A and 7B, in the first embodiment of the present case, the tube sheet 1 has an inflow pipe 11 , an outflow pipe 12 , a plurality of pin openings 13 , a ridge 14 , a A positive pressure chamber C1, an accommodating chamber C2, a negative pressure chamber C3, an inflow opening h1 and an outflow opening h2. The inflow pipe 11 has an inflow channel 11 a , which is arranged in the inflow pipe 11 and penetrates through the inflow pipe 11 . The outflow pipe 12 has an outflow channel 12 a , which is arranged in the outflow pipe 12 and penetrates through the outflow pipe 12 . The inflow channel 11a communicates with the negative pressure chamber C3. The outflow channel 12a communicates with the positive pressure chamber C1. The accommodating chamber C2 is disposed between the positive pressure chamber C1 and the negative pressure chamber C3. The ridge portion 14 is protruded in the tube sheet 1 , and the accommodating chamber C2 is formed in the ridge portion 14 . In the first embodiment of the present application, the ridge portion 14 is in an annular shape, but it is not limited thereto, and the shape of the ridge portion 14 can be changed according to design requirements in other embodiments. In the first embodiment of the present application, the inflow channel 11a is a bent channel, but it is not limited thereto, and the shape of the inflow channel 11a can be changed according to design requirements in other embodiments. The inflow opening h1 is communicated between the inflow channel 11 a and the negative pressure chamber C3 , and due to the bending design of the inflow channel 11 a , the inflow opening h1 is provided on the ridge 14 . The outflow opening h2 communicates between the outflow channel 12a and the positive pressure chamber C1.

It is worth noting that, in the first embodiment of the present case, the inflow pipe 11 and the outflow pipe 12 are arranged on the same side of the tube sheet 1, but not limited to this, the arrangement of the inflow pipe 11 and the outflow pipe 12 can be used in other implementations. The example can be changed according to design requirements.

Referring to FIGS. 3A , 4A, 4B, 7A and 7B, in the first embodiment of the present application, the cover plate 2 covers the tube plate 1 and has a peripheral portion 21 and a concave portion 22 . The outer peripheral portion 21 surrounds the concave portion 22 and the ridge portion 14 of the tube sheet 1 , whereby the ridge portion 14 of the tube sheet 1 protrudes into the concave portion 22 of the cover plate 2 . In addition, in the first embodiment of the present application, a depth of the concave portion 22 of the cover plate 2 is greater than a height of the ridge portion 14 of the tube plate 1 , so that the negative pressure chamber C3 can be formed between the cover plate 2 and the tube plate 1 . .

Please refer to FIG. 2 , FIG. 5A , FIG. 5B , FIG. 6A and FIG. 7A , in the first embodiment of the present case, the pump core module 3 is accommodated in the accommodating chamber C2 of the tube sheet 1 , and is enclosed by the cover plate 2 . Tube sheet 1. Thereby, the positive pressure chamber C1 is formed between the pump core module 3 and the tube sheet 1 , and the negative pressure chamber C3 is formed between the cover plate 2 and the pump core module 3 . In the first embodiment of the present case, the pump core module 3 consists of an inlet plate 31 , a resonance plate 32 , a piezoelectric actuator 33 , a first insulating sheet 35 , a conductive sheet 36 and a second insulating sheet 37 . Stacked in order. The inflow plate 31 has at least one inflow hole 31a, at least one confluence groove 31b and a confluence chamber 31c. The inflow hole 31a is for introducing fluid, and penetrates through the bus bar groove 31b. The bus grooves 31b are communicated with the bus chambers 31c, whereby the fluid introduced by the inflow holes 31a can pass through the bus grooves 31b and then flow into the bus chambers 31c. In the first embodiment of the present application, the numbers of the inflow holes 31a and the bus bar grooves 31b are the same, which are four respectively, but not limited to this, the number of the inflow holes 31a and the bus bar grooves 31b can be changed according to the design requirements . In this way, the four inflow holes 31a pass through the four busbar grooves 31b respectively, and the four busbar grooves 31b communicate with the busbar chamber 31c.

In the first embodiment of the present application, the resonance plate 32 is joined to the inlet plate 31 and has a hollow hole 32a, a movable portion 32b and a fixed portion 32c. The hollow hole 32 a is located at the center of the resonance plate 32 and corresponds to the position of the confluence chamber 31 c of the inlet plate 31 . The movable portion 32b is disposed around the hollow hole 32a, and the fixed portion 32c is disposed on the outer peripheral portion of the resonance plate 32 and fixedly joined to the air inlet plate 31 .

In the first embodiment of the present case, the piezoelectric actuator 33 is joined to the resonance plate 32 and includes a suspension plate 33a, an outer frame 33b, at least one bracket 33c, a piezoelectric element 34, at least one gap 33d, and a The first conductive pin 33e. The suspension board 33a has a square shape and can be bent and vibrated. The reason why the hover board 33a is square is that compared with the circular shape, the structure of the square shape hover board 33a has the advantage of obvious power saving. Due to the capacitive load operating at the resonant frequency, its power consumption will increase with the increase of the frequency, and since the resonant frequency of the square-shaped suspension board 33a is significantly lower than that of the circular-shaped suspension board, its relative power consumption is also significantly higher. Low, that is, the hover board 33a designed in a square shape in this case has the benefit of saving electricity. The outer frame 33b is disposed around the outer side of the suspension board 33a. At least one bracket 33c is connected between the suspension board 33a and the outer frame 33b to provide a supporting force for the elastic support of the suspension board 33a. The piezoelectric element 34 has a side length less than or equal to the side length of the suspension board 33a, and the piezoelectric element 34 is attached to a surface of the suspension board 33a for applying a voltage to drive the suspension board 33a to bend and vibrate. At least one gap 33d is formed between the suspension board 33a, the outer frame 33b and the bracket 33c for fluid to pass through. The first conductive pins 33e protrude from the outer edge of the outer frame 33b.

In the first embodiment of the present application, an electrode 36a protrudes from the inner edge of the conductive sheet 36 in a curved shape, and a second conductive pin 36b protrudes from the outer edge. The electrode 36 a is electrically connected to the piezoelectric element 34 of the piezoelectric actuator 33 . The first conductive pin 33e of the piezoelectric actuator 33 and the second conductive pin 36b of the conductive sheet 36 are connected with an external current to drive the piezoelectric element 34 of the piezoelectric actuator 33 . The first conductive pins 33 e and the second conductive pins 36 b respectively protrude from the pin openings 13 of the tube sheet 1 to the outside of the tube sheet 1 . In addition, the arrangement of the first insulating sheet 35 and the second insulating sheet 37 can prevent the occurrence of short circuits.

Referring to FIG. 6A , in the first embodiment of the present application, a resonance chamber 38 is formed between the suspension plate 33 a and the resonance plate 32 . The resonance chamber 38 can be formed by filling the gap between the resonance plate 32 and the outer frame 33b of the piezoelectric actuator 33 with a material, such as conductive glue, but not limited thereto, so that the resonance plate 32 and the outer frame 33b of the piezoelectric actuator 33 are filled with a material, such as conductive glue. A certain depth can be maintained between the suspension plates 33a, thereby guiding the fluid to flow more rapidly. In addition, since the suspension plate 33a and the resonance plate 32 are kept at an appropriate distance, the contact interference is reduced, and the generation of noise is reduced. In other embodiments, the thickness of the gap filling material between the resonance plate 32 and the outer frame 33b of the piezoelectric actuator 33 can also be reduced by increasing the height of the outer frame 33b of the piezoelectric actuator 33 . In this way, when the pump core module 3 is assembled as a whole, the filling material will not be indirectly affected by the change of the hot-pressing temperature and the cooling temperature, which can prevent the filling material from affecting the actual spacing of the resonance chambers 38 after molding due to thermal expansion and cold contraction. , but not limited to this. In addition, the size of the resonance chamber 38 will affect the transmission effect of the pump core module 3 , so maintaining a fixed size of the resonance chamber 38 is very important for the pump core module 3 to provide stable transmission efficiency. Therefore, as shown in FIG. 6B , in another embodiment, the suspension board 33a can be extended upward for a distance by a stamping forming process, and the upward extension distance can be formed by at least one part formed between the suspension board 33a and the outer frame 33b. The bracket 33c is adjusted so that the surface of the suspension board 33a and the surface of the outer frame 33b are both non-coplanar. By coating a small amount of filling material, such as conductive glue, on the assembly surface of the outer frame 33b, the piezoelectric actuator 33 is attached to the fixing portion 32c of the resonance plate 32 by hot pressing, so that the piezoelectric actuator 33 It can be assembled and joined with the resonance plate 32 . In this way, the structure of the resonance chamber 38 is directly improved by using the above-mentioned suspension plate 33 a of the piezoelectric actuator 33 to form a stamping process, and the required resonance chamber 38 can be adjusted by adjusting the suspension plate of the piezoelectric actuator 33 . 33a is completed by stamping and forming distance, which effectively simplifies the structural design of adjusting the resonance chamber 38, and also simplifies the process and shortens the process time. In addition, the first insulating sheet 35 , the conductive sheet 36 and the second insulating sheet 37 are all frame-shaped thin sheets, which are sequentially stacked on the piezoelectric actuator 33 to form the overall structure of the pump core module 3 .

In order to understand the operation mode of the pump core module 3, please refer to FIG. 6C to FIG. 6E. In the first embodiment of the present application, as shown in FIG. 6C, after the piezoelectric element 34 of the piezoelectric actuator 33 is applied with a driving voltage Deformation is generated, and the suspension plate 33a is driven to displace in the direction away from the inlet plate 31. At this time, the volume of the resonance chamber 38 is increased, and a negative pressure is formed in the resonance chamber 38, so that the fluid in the confluence chamber 31c is drawn to flow through the resonance. The hollow hole 32a of the sheet 32 enters the resonance chamber 38, and the resonance sheet 32 is simultaneously displaced in the direction away from the inlet plate 31 under the influence of the resonance principle, which increases the volume of the confluence chamber 31c. The relationship of the fluid entering the resonance chamber 38 results in a negative pressure state in the confluence chamber 31c, and the fluid is drawn into the confluence chamber 31c through the inflow holes 31a and the confluence grooves 31b. Next, as shown in FIG. 6D , the piezoelectric element 34 drives the suspension plate 33a to displace in the direction close to the air inlet plate 31, compressing the resonance chamber 38. Similarly, the resonant plate 32 is driven by the suspension plate 33a to move closer to the air inlet plate due to resonance. The direction displacement of 31 pushes the fluid in the resonance chamber 38 to flow out of the pump core module 3 through the gap 33d, so as to achieve the effect of fluid transmission. Finally, as shown in FIG. 6E, when the suspension plate 33a is displaced back to the initial position in the direction away from the inlet plate 31, the resonance plate 32 is also driven and displaced in the direction away from the inlet plate 31. At this time, the resonance plate 32 The resonance chamber 38 is compressed, so that the fluid in the resonance chamber 38 moves to the gap 33d, and the volume in the confluence chamber 31c is increased, so that the fluid can continue to pass through the inflow holes 31a and the confluence grooves 31b to converge in the confluence chamber 31c. By continuously repeating the operation steps of the pump core module 3 shown in FIG. 6C to FIG. 6E , the pump core module 3 can continuously guide the fluid from the inflow hole 31a into the inflow plate 31 and the resonance plate 32. The flow channel generates a pressure gradient, and then is discharged from the gap 33d, so that the fluid flows at a high speed, and the operation of the pump core module 3 to transmit the fluid is achieved.

Please refer to FIG. 7C and FIG. 7D , when the pump core module 3 is activated, the pump core module 3 draws the fluid in the negative pressure chamber C3 into the pump core module 3, then flows into the positive pressure chamber C1, and then passes through the outflow opening h2 flows out of the micro piezoelectric pump 10 from the outflow channel 12a of the outflow pipe 12. At the same time, the external fluid is sucked from the inflow channel 11a of the inflow pipe 11 and enters the negative pressure chamber C3 through the inflow opening h1 to complete the fluid flow. transmission.

Referring to FIGS. 8 to 10D , in the second embodiment of the present application, only the structure of the tube sheet 1 ′ is different from the structure of the tube sheet 1 in the first embodiment, and the difference lies in the inflow pipe 11 and the outflow pipe 12 configuration method. In the second embodiment of the present application, the inflow pipe 11 and the outflow pipe 12 are disposed on opposite sides of the tube sheet 1 , but not limited thereto. It should be noted that in other embodiments, the inflow pipe 11 and the outflow pipe 12 may only be disposed on different sides of the tube sheet 1 , for example, adjacent two sides. The operation mode of the second embodiment of the present case is the same as that of the first embodiment, so it will not be repeated. Because the outflow pipe 12 in the second embodiment is arranged on the opposite side of the inflow pipe 11, the outflow direction of the fluid in FIG. 10D is different from the outflow direction of the fluid in the first embodiment, that is, the fluid in the first embodiment is on the same side. Inflow and outflow; while the fluid in the second embodiment flows in and out on different sides, but does not affect the transmission of the fluid.

It is worth noting that, in the first embodiment of the present application, by arranging the inflow tube 11 and the outflow tube 12 of the micro piezoelectric pump 10 on the side of the tube plate 1 , the fluid can be released from the micro piezoelectric pump 10 . The side transmission of the pump 1 achieves the purpose of thinning. In addition, the overall structure of the tube sheet 1 presents a multi-directional stepped chamber design, which can utilize the cooperation of negative pressure and positive pressure to complete the fluid transmission. Furthermore, in the first embodiment and the second embodiment of the present application, the overall thickness of the micro piezoelectric pump 10 is 2 to 5 microns, but not limited thereto.

To sum up, the miniature piezoelectric pump provided in this case can not only achieve the effect of thinning and protecting the core module of the pump, but also generate negative and positive pressure in the tube sheet through the design of multi-directional stepped chambers. effect, whereby the fluid is transported.

This case can be modified by Shi Jiangsi, a person who is familiar with this technology, but all of them do not deviate from the protection of the scope of the patent application attached.

Claims (13)

1. A miniature piezoelectric pump, comprising:

the tube plate is provided with an inflow tube, an outflow tube, an inflow channel, an outflow channel, a positive pressure chamber, a negative pressure chamber and an accommodating chamber, the inflow channel is arranged in the inflow tube and penetrates through the inflow tube, the outflow channel is arranged in the outflow tube and penetrates through the outflow tube, the inflow channel is communicated with the negative pressure chamber, the outflow channel is communicated with the positive pressure chamber, and the accommodating chamber is arranged between the positive pressure chamber and the negative pressure chamber;

a cover plate covering the tube plate and having a recess and a peripheral portion surrounding the recess; and

the pump core module is accommodated in the accommodating chamber of the tube plate and is sealed in the tube plate by the cover plate, so that the positive pressure chamber is formed between the pump core module and the tube plate;

the pump core module draws fluid in the negative pressure cavity to enter the pump core module, then flows into the positive pressure cavity, and then flows out of the tube plate from the outflow channel, and meanwhile, external fluid also flows into the negative pressure cavity from the inflow channel to finish fluid transmission.

2. A miniature piezoelectric pump according to claim 1, wherein the tube sheet further has a ridge protruding into the tube sheet, the receiving chamber is formed in the ridge, and the outer peripheral portion of the cover plate surrounds the ridge.

3. A miniature piezoelectric pump according to claim 2, wherein the tube sheet further has an inlet opening and an outlet opening, the inlet opening communicating between the inlet channel and the negative pressure chamber and being disposed on the ridge, and the outlet opening communicating between the outlet channel and the positive pressure chamber.

4. A miniature piezoelectric pump as defined in claim 2 wherein the recess of the cover plate has a depth greater than a height of the ridge of the tube sheet whereby the negative pressure chamber is formed between the cover plate and the pump core module.

5. A miniature piezoelectric pump as defined in claim 1, wherein the inflow channel is a tortuous channel.

6. A miniature piezoelectric pump according to claim 1, wherein the inlet tube and the outlet tube are disposed on the same side of the tube sheet.

7. A miniature piezoelectric pump according to claim 1, wherein the inlet tube and the outlet tube are disposed on different sides of the tube sheet.

8. A miniature piezoelectric pump according to claim 7, wherein the inlet tube and the outlet tube are disposed on opposite sides of the tube sheet.

9. A miniature piezoelectric pump as defined in claim 1, wherein the pump core module comprises:

the inflow plate is provided with at least one inflow hole, at least one bus groove and a confluence chamber, wherein the inflow hole is used for introducing fluid and penetrates through the bus groove, and the bus groove is communicated with the confluence chamber, so that the fluid introduced by the inflow hole can flow into the confluence chamber after passing through the bus groove;

a resonance sheet, which is connected on the flow inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the position of the confluence chamber of the flow inlet plate, the movable part is arranged around the hollow hole, and the fixed part is arranged at the outer peripheral part of the resonance sheet and is fixedly connected on the flow inlet plate; and

a piezoelectric actuator jointed on the resonance sheet;

the fluid is guided in from the inflow hole of the inflow plate, collected into the collecting flow chamber after passing through the collecting flow groove, and then flows through the hollow hole of the resonance sheet, so as to achieve the transmission of the fluid.

10. A piezoelectric micropump as claimed in claim 9, wherein the piezoelectric actuator comprises:

the suspension plate is in a square shape and can be bent and vibrated;

an outer frame surrounding the suspension plate;

at least one bracket connected between the suspension plate and the outer frame for providing a supporting force for the suspension plate to elastically support; and

the piezoelectric element is attached to one surface of the suspension plate and is used for being applied with voltage to drive the suspension plate to vibrate in a bending mode.

11. The micro piezoelectric pump according to claim 10, wherein the pump core module further comprises a first insulating sheet, a conductive sheet and a second insulating sheet, wherein the flow inlet plate, the resonator plate, the piezoelectric actuator, the first insulating sheet, the conductive sheet and the second insulating sheet are sequentially stacked.

12. A piezoelectric micropump as claimed in claim 11, wherein the piezoelectric actuator further comprises a first conductive leg protruding from an outer edge of the outer frame, the conductive plate has a second conductive leg protruding from an outer edge of the conductive plate, the tube plate has a plurality of leg openings, and the first conductive leg and the second conductive leg respectively protrude from the plurality of leg openings to outside the tube plate.

13. A piezoelectric micropump as claimed in claim 9, wherein the piezoelectric actuator comprises:

the suspension plate is in a square shape and can be bent and vibrated;

an outer frame surrounding the suspension plate;

at least one bracket connected between the suspension plate and the outer frame for providing the suspension plate with elastic support, forming a non-coplanar structure between one surface of the suspension plate and one surface of the outer frame, and forming a cavity space between one surface of the suspension plate and the resonator plate; and

the piezoelectric element is attached to one surface of the suspension plate and used for applying voltage to drive the suspension plate to vibrate in a bending mode.

Images