CN112240280B - Micro pump - Google Patents

Abstract

A micro pump includes a flow collecting plate, a valve plate, an outflow plate, and a pump core module. The flow collecting plate comprises an inner groove, a convex part and at least one flow collecting hole, wherein the convex part is arranged at the center of the inner groove, and the flow collecting hole is arranged in the inner groove and at the outer edge of the convex part. The valve plate comprises a valve hole which is arranged at the center of the valve plate. The convex part of the current collecting plate is propped against the valve hole. A collecting chamber is formed between the valve plate and the collecting plate. The outflow plate has an annular shape and includes an outflow channel. The valve hole of the valve plate is communicated with the outflow channel. After the pump core module draws fluid and enters the pump core module, the fluid flows into the collecting cavity through the at least one collecting hole, and then the fluid pushes away the valve plate and enters the outflow channel of the outflow plate through the valve hole to finish the transmission of the fluid.

Description

micro pump

technical field

This case relates to a pump, especially a miniature, silent and rapid transmission of high-flow fluid.

Background technique

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid contained in products such as micro pumps, sprayers, inkjet heads, and industrial printing devices The actuator is its key technology.

With the rapid development of science and technology, the application of fluid conveying structure is becoming more and more diversified, such as industrial application, biomedical application, medical care, electronic heat dissipation, etc., and even the recent popular wearable devices can be seen. It can be seen that Traditional fluid actuators are gradually trending towards miniaturization of devices and maximization of flow rate.

Therefore, how to increase the application range of the fluid actuator through an innovative packaging structure is an important development topic at present.

Contents of the invention

The main purpose of this case is to provide a micro-pump, which uses the combination of the outlet plate and the collector plate, and clamps the valve plate between the two to form a concentric circular backstop symmetrical structure with one-way output, and has a pressure relief function, so as to achieve The structure of the valve plate is greatly reduced, the overall airtight reliability is improved, the degree of freedom of the output direction is increased, and the pressure relief flow resistance is greatly reduced.

A broad implementation of this case is a micropump, which includes a collector plate, a valve plate, an outlet plate and a pump core module. The collector plate has a first surface of the collector plate and a second surface of the collector plate. The first surface of the collector plate and the second surface of the collector plate are two opposite surfaces. The collector plate includes an outer groove arranged on the first surface of the collector plate, an inner groove arranged on the first surface of the collector plate and surrounded by the outer groove, and a convex portion arranged on the first surface of the collector plate And set at the center of the inner groove, at least one collecting hole, from the first surface of the collecting plate to the second surface of the collecting plate, and set in the inner groove and the outer edge of the convex part, and an outer peripheral part , is arranged on the second surface of the current collecting plate and defines a current collecting space. The valve piece is arranged in the groove inside the collecting plate, and includes a valve hole, which is arranged at the center of the valve piece. The convex part of the collecting plate abuts against the valve hole. A collecting chamber is formed between the valve plate and the collecting plate. The outflow plate has an annular shape and includes an outflow channel disposed at the center of the outflow plate, at least one outflow channel, and an outflow peripheral wall to define an outflow space. The outflow space communicates with the outflow channel and at least one discharge channel. The valve hole of the valve plate communicates with the outflow space and the outflow channel. The peripheral wall of the outflow is arranged in the groove outside the collector plate, so that the valve plate is accommodated in the outflow space. The pump core module is accommodated in the collecting space of the collecting plate. After the pump core module draws fluid into the pump core module, it flows into the collecting chamber through at least one collecting hole, and then pushes the valve plate open and enters the outlet channel of the outlet plate through the valve hole to complete the fluid transmission.

Description of drawings

In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein:

FIG. 1 is a three-dimensional schematic view of the first embodiment of the micropump of the present application.

FIG. 2A is an exploded perspective view of the first embodiment of the present invention.

FIG. 2B is a three-dimensional exploded schematic diagram of the first embodiment of the present application obtained from another viewing angle.

3A and 3B are respectively a top view and a bottom view of the outflow plate of the first embodiment of the present application.

4A and 4B are respectively a top view and a bottom view of the valve plate of the first embodiment of the present application.

5A and 5B are respectively a top view and a bottom view of the current collecting plate of the first embodiment of the present application.

FIG. 6A is a three-dimensional exploded schematic diagram of the pump core module of the first embodiment of the present invention.

FIG. 6B is a three-dimensional exploded schematic view of the pump core module of the first embodiment of the present invention obtained from another perspective.

Fig. 7A is a schematic cross-sectional view of the core module of the pump in this case.

Fig. 7B is a schematic cross-sectional view of another embodiment of the core module of the pump in this case.

7C to 7E are schematic diagrams of the operation of the core module of the pump in this case.

FIG. 8A is a top view of the first embodiment of the present application.

FIG. 8B is a schematic cross-sectional view obtained from the line A-A in FIG. 8A .

FIG. 8C is a schematic diagram of the outflow operation of the first embodiment of the present invention.

FIG. 8D is a schematic diagram of the discharge action of the first embodiment of the present invention.

FIG. 9 is a three-dimensional schematic view of the second embodiment of the micropump of the present invention.

FIG. 10A is a top view of the second embodiment of the present application.

FIG. 10B is a schematic cross-sectional view obtained from the B-B section line in FIG. 10A .

FIG. 10C is a schematic diagram of the outflow action of the second embodiment of the present application.

FIG. 10D is a schematic diagram of the discharge action of the second embodiment of the present application.

Explanation of reference signs

10, 10': micro pump

1, 1': outflow plate

11: outflow peripheral wall

12: outflow space

13: Outflow channel

14: Discharge channel

2: valve plate

21: Peripheral wall of the valve plate

22: valve space

23: valve hole

3: Collector plate

3a: The first surface of the collector plate

3b: The second surface of the collector plate

31: Outer groove

32: inner groove

33: convex part

34: Manifold

35: Collector peripheral wall

36: Gathering space

37: Pin opening

4: Pump core module

41: Inlet plate

41a: Inlet hole

41b: bus bar groove

41c: confluence chamber

42: Resonant plate

42a: hollow hole

42b: Movable part

42c: fixed part

43: Piezoelectric Actuator

43a: Hoverboard

43b: outer frame

43c: bracket

43d: Clearance

43e: first conductive pin

44: piezoelectric element

45: The first insulating sheet

46: Conductive sheet

46a: Electrode

46b: second conductive pin

47: Second insulating sheet

48: Resonance chamber

C: Collecting chamber

A-A, B-B: hatching

detailed description

Embodiments embodying the features and advantages of this case will be described in detail in the description of the latter paragraph. It should be understood that the present case can have various changes in different aspects without departing from the scope of the present case, and the descriptions and diagrams therein are used for illustration in nature rather than limiting the present case.

Referring to FIG. 1 to FIG. 2B , this application provides a micropump 10 , which includes an outlet plate 1 , a valve plate 2 , a collector plate 3 and a pump core module 4 . The pump core module 4 is accommodated in the collector plate 3 .

Please refer to FIG. 3A to FIG. 3B , in the first embodiment of the present case, the outflow plate 1 includes an outflow peripheral wall 11 , an outflow space 12 , an outflow channel 13 and at least one outflow channel 14 . The outflow peripheral wall 11 protrudes from one side of the outflow plate 1 and defines the outflow space 12 . The outflow channel 13 is arranged at the center of the outflow plate 1 . The outflow space 12 communicates with the outflow channel 13 and at least one outflow channel 14 .

It should be noted that, in the first embodiment of the present case, the outflow plate 1 includes four discharge channels 14 arranged at equal intervals and surrounding the outflow channel 13 . In addition, the outflow plate 1 has a circular shape, so that the outflow plate 1 forms a concentric symmetrical structure. In other embodiments, the number and arrangement of the discharge channels 14 and the type of the outflow plate 1 are not limited by the present disclosure, and can be changed according to design requirements.

It should be noted that, in the first embodiment of the present application, the outflow channel 13 is a straight line channel, therefore, the fluid can be transmitted along the direction perpendicular to the valve plate 2, but not limited thereto.

Please refer to FIG. 4A , FIG. 4B , FIG. 8A and FIG. 8B , in the first embodiment of the present case, the valve plate 2 includes a valve plate outer peripheral wall 21 , a valve plate space 22 and a valve hole 23 . The outer peripheral wall 21 of the valve plate is disposed on the side of the valve plate 2 away from the outlet plate 1 and protrudes from the valve plate 2 away from the outlet plate 1 to define a space 22 for the valve plate. The valve hole 23 is arranged at the center of the valve plate 2 . The valve hole 23 communicates with the outflow space 12 and the outflow channel 13 of the outflow plate 1 . In the first embodiment of the present case, the valve plate 2 has a circular shape, so that the valve plate 2 forms a concentric and symmetrical structure. In addition, the valve plate 2 is a silicone thin film, but not limited thereto. In other embodiments, the type and material of the valve plate 2 are not limited by the present disclosure, and can be changed according to design requirements.

Please refer to Fig. 5A, Fig. 5B, Fig. 8A and Fig. 8B, in the first embodiment of this case, the current collecting plate 3 has a current collecting plate first surface 3a and a current collecting plate second surface 3b, the current collecting plate first The surface 3a and the second surface 3b of the collector plate are two opposite surfaces. The collector plate 3 includes an outer groove 31 , an inner groove 32 , a protrusion 33 , at least one collector hole 34 , a collector peripheral wall 35 , a collector space 36 and two pin openings 37 . The outer groove 31 is disposed on the first surface 3a of the collector plate, and is in an annular shape. The inner groove 32 is disposed on the first surface 3 a of the collector plate and surrounded by the outer groove 31 . The protrusion 33 is disposed on the first surface 3 a of the current collector plate and disposed at the center of the inner groove 32 . The inner groove 32 and the protrusion 33 are respectively in a circular shape, so that the current collecting plate 3 forms a concentric symmetrical structure. At least one collecting hole 34 penetrates from the first surface 3 a of the collecting plate to the second surface 3 b of the collecting plate, and is disposed in the inner groove 32 and the outer edge of the protrusion 33 . The collecting peripheral wall 35 is disposed on the second surface 3 b of the collecting plate and protrudes from the second surface 3 b of the collecting plate away from the valve plate 2 , thereby defining a collecting space 36 . The valve plate 2 is disposed in the inner groove 32 , so that the protrusion 33 abuts against the valve hole 23 of the valve plate 2 , and a collecting chamber C is formed between the valve plate 2 and the collecting plate 3 .

It should be noted that, in the first embodiment of the present application, the collector plate 3 includes four collector holes 34 arranged at equal intervals and surrounding the protrusion 33 . In other embodiments, the number and arrangement of the collecting holes 34 are not limited by the present disclosure, and can be changed according to design requirements.

It is worth noting that in the first embodiment of this case, the outflow peripheral wall 11 of the outflow plate 1 is engaged in the outer groove 31 of the collector plate 3, so that the valve plate 2 is accommodated in the outflow plate 1 in the outflow space 12. Thereby, the outlet plate 1 can be directly bonded to the collector plate 3 , so that the valve plate 2 is firmly sandwiched between the outlet plate 1 and the collector plate 3 . In other embodiments, the combination of the outlet plate 1 and the collector plate 3 is not limited to the bonding described in this disclosure, and can be changed according to design requirements.

It is worth noting that, in the first embodiment of the present case, the micropump 10 has a total thickness (not including the part of the outflow channel 13) between 1 millimeter (mm) and 6 millimeters (mm), but not limit. In other embodiments, the value of the total thickness can be changed according to design requirements.

Please refer to FIG. 2A , FIG. 2B , FIG. 5B , and FIG. 6A to FIG. 7A , in the first embodiment of the present case, the pump core module 4 is accommodated in the collecting space 36 of the collecting plate 3 . The pump core module 4 is composed of an inlet plate 41 , a resonant plate 42 , a piezoelectric actuator 43 , a first insulating plate 45 , a conductive plate 46 and a second insulating plate 47 stacked in sequence. The inlet plate 41 has at least one inlet hole 41a, at least one confluence row groove 41b and one confluence chamber 41c. The inlet hole 41a is used for introducing fluid, and passes through the busbar groove 41b. The confluence groove 41b communicates with the confluence chamber 41c, so that the fluid introduced by the inlet hole 41a can pass through the confluence groove 41b and then flow into the confluence chamber 41c. In the first embodiment of this case, the number of inlet holes 41a and busbar grooves 41b is the same, 4 respectively, but it is not limited to this, and the number of inlet holes 41a and busbar grooves 41b can be changed according to design requirements . In this way, the four inlet holes 41a respectively pass through the four busbar grooves 41b, and the four busbar grooves 41b communicate with the busbar chamber 41c.

In the first embodiment of the present case, the resonant piece 42 is connected to the inlet plate 41 and has a hollow hole 42a, a movable part 42b and a fixed part 42c. The hollow hole 42 a is located at the center of the resonant plate 42 and corresponds to the position of the confluence chamber 41 c of the inlet plate 41 . The movable part 42 b is disposed around the hollow hole 42 a , and the fixed part 42 c is disposed on the outer peripheral portion of the resonant piece 42 and fixedly joined to the inlet plate 41 .

In the first embodiment of this case, the piezoelectric actuator 43 is bonded to the resonant plate 42, and includes a suspension plate 43a, an outer frame 43b, at least one bracket 43c, a piezoelectric element 44, at least one gap 43d and a The first conductive pin 43e. The suspension board 43a is in a square shape and can bend and vibrate. The reason why the suspension board 43a is square is that compared with the design of the circular shape, the structure of the suspension board 43a in the square shape has the obvious advantage of saving electricity. Because of the capacitive load operated under the resonant frequency, its power consumption will increase with the rise of the frequency, and because the resonant frequency of the square shape suspension plate 43a is obviously lower than that of the circular shape suspension plate, so its relative power consumption is also significantly lower. Low, that is to say, the hoverboard 43a of the square shape design adopted in this case has the benefit of saving electricity. The outer frame 43b is disposed around the outer side of the suspension board 43a. At least one bracket 43c is connected between the suspension board 43a and the outer frame 43b to provide the support force for the suspension board 43a to be elastically supported. The piezoelectric element 44 has a side length which is less than or equal to the side length of the suspension plate 43a, and the piezoelectric element 44 is attached to a surface of the suspension plate 43a for being applied with a voltage to drive the suspension plate 43a to bend and vibrate. At least one gap 43d is formed between the suspension board 43a, the outer frame 43b and the bracket 43c for fluid to pass through. The first conductive pin 43e protrudes from the outer edge of the outer frame 43b.

In the first embodiment of the present case, an electrode 46a protrudes from the inner edge of the conductive sheet 46, and a second conductive pin 46b protrudes from the outer edge. The electrode 46 a is electrically connected to the piezoelectric element 44 of the piezoelectric actuator 43 . The first conductive pin 43e of the piezoelectric actuator 43 and the second conductive pin 46b of the conductive sheet 46 connect external current to drive the piezoelectric element 44 of the piezoelectric actuator 43 . The first conductive pin 43 e and the second conductive pin 46 b respectively protrude from the pin opening 37 of the current collector plate 3 to the outside of the current collector plate 3 . In addition, the arrangement of the first insulating sheet 45 and the second insulating sheet 47 can avoid the occurrence of short circuit.

Please refer to FIG. 7A , in the first embodiment of the present case, a resonance chamber 48 is formed between the suspension plate 43 a and the resonance plate 42 . The resonant chamber 48 can be formed by filling the gap between the resonant plate 42 and the outer frame 43b of the piezoelectric actuator 43 with a material, such as conductive glue, but not limited thereto, so that the resonant plate 42 and the piezoelectric actuator 43 A certain depth can be maintained between the suspension plates 43a, thereby guiding the fluid to flow more rapidly. Moreover, since the suspension plate 43a and the resonant plate 42 maintain an appropriate distance, the mutual contact interference is reduced, and the generation of noise is reduced. In other embodiments, the thickness of the gap-filling material between the resonant piece 42 and the outer frame 43b of the piezoelectric actuator 43 can also be reduced by increasing the height of the outer frame 43b of the piezoelectric actuator 43 . In this way, when the pump core module 4 is assembled as a whole, the filling material will not be indirectly affected by changes in the hot-pressing temperature and cooling temperature, which can prevent the filling material from affecting the actual spacing of the resonant chamber 48 after molding due to thermal expansion and contraction. , but not limited to this. In addition, the size of the resonance chamber 48 will affect the transmission effect of the pump core module 4 , so maintaining a fixed size of the resonance chamber 48 is very important for the pump core module 4 to provide stable transmission efficiency. Therefore, as shown in FIG. 7B , in another embodiment, the suspension board 43a can be stamped and formed to extend upwards for a distance. The bracket 43c is adjusted so that the surface of the suspension board 43a and the surface of the outer frame 43b are non-coplanar. Applying a small amount of filling material on the assembly surface of the outer frame 43b, such as: conductive glue, the piezoelectric actuator 43 is attached to the fixed part 42c of the resonant plate 42 in a hot pressing manner, and then the piezoelectric actuator 43 It can be assembled and bonded with the resonant plate 42 . In this way, the structural improvement of the resonant chamber 48 is directly formed by adopting the above-mentioned suspension plate 43a of the piezoelectric actuator 43 through a stamping process, and the required resonance chamber 48 can be adjusted by adjusting the suspension plate of the piezoelectric actuator 43. 43a stamping and forming distance, which effectively simplifies the adjustment of the structure design of the resonance chamber 48, and also simplifies the manufacturing process and shortens the manufacturing process time. In addition, the first insulating sheet 45 , the conductive sheet 46 and the second insulating sheet 47 are frame-shaped thin sheets, which are sequentially stacked on the piezoelectric actuator 43 to form the overall structure of the pump core module 4 .

In order to understand the action mode of the pump core module 4, please continue to refer to FIG. 7C to FIG. 7E. In the first embodiment of this case, as shown in FIG. 7C, after the piezoelectric element 44 of the piezoelectric actuator 43 is applied with a driving voltage Deformation occurs, which drives the suspension plate 43a to move away from the inflow plate 41. At this time, the volume of the resonance chamber 48 is increased, and a negative pressure is formed in the resonance chamber 48, and the fluid in the confluence chamber 41c is drawn to flow through the resonance chamber. The hollow hole 42a of the sheet 42 enters the resonance chamber 48, and at the same time, the resonance sheet 42 is affected by the resonance principle and synchronously displaces in a direction away from the inflow plate 41, which increases the volume of the confluence chamber 41c, and because the confluence chamber 41c The relationship between the fluid entering the resonance chamber 48 causes the confluence chamber 41c to be in a negative pressure state as well, and then the fluid is sucked into the confluence chamber 41c through the inlet hole 41a and the confluence drain groove 41b. Next, as shown in Figure 7D, the piezoelectric element 44 drives the suspension plate 43a to move towards the direction of the inflow plate 41, compressing the resonance chamber 48, and similarly, the resonance plate 42 is driven by the suspension plate 43a to approach the inflow plate due to resonance. The displacement in the direction of 41 pushes the fluid in the resonance chamber 48 to flow out of the pump core module 4 through the gap 43d, so as to achieve the effect of fluid transmission. Finally, as shown in Figure 7E, when the suspension plate 43a is displaced back to its initial position away from the inlet plate 41, the resonant plate 42 is also driven to move away from the inflow plate 41. At this time, the resonant plate 42 Compress the resonance chamber 48 to move the fluid in the resonance chamber 48 to the gap 43d, and increase the volume of the confluence chamber 41c, so that the fluid can continuously pass through the inlet hole 41a and the confluence drain groove 41b to converge in the confluence chamber within 41c. By continuously repeating the actuation steps of the pump core module 4 shown in FIG. 7C to FIG. 7E , the pump core module 4 can continuously guide the fluid from the inlet hole 41a into the inlet plate 41 and the resonance plate 42. The flow channel generates a pressure gradient, and then is discharged through the gap 43d, so that the fluid flows at a high speed to achieve the operation of the pump core module 4 for transmitting fluid.

Please refer to Fig. 8A to Fig. 8D, when the micropump 10 is actuated, the pump core module 4 will be actuated, and the fluid drawn from the micropump 10 will enter the pump core module 4, pass through the collecting hole 34 of the collecting plate 3 and then enter The collecting chamber C then pushes the valve plate 2 away from the protrusion 33 of the collecting plate 3 and then enters the outlet channel 13 of the outlet plate 1 through the valve hole 23 to complete the fluid transmission. When the micropump 10 stops working, the pump core module 4 is not actuated, the fluid flows back into the micropump 10 from the outflow channel 13, and the part of the valve plate 2 corresponding to the collecting chamber C is pushed away from the outflow plate 1 , so that the fluid can enter the discharge passage 14 through the space between the valve plate 2 and the outlet plate 1 and then be discharged out of the micropump 10 to complete the discharge operation.

Please refer to Fig. 9 to Fig. 10D, in the second embodiment of this case, only the structure of the outflow plate 1' is different from that of the outflow plate 1 in the first embodiment, and the difference lies in the type of the outflow channel 13. state. In the second embodiment of the present case, the outflow channel 13 is a curved channel. Thereby, fluid is transported laterally from the micropump 10'. It is worth noting that since the outlet plate 1' is a concentric symmetrical structure, the output direction of the fluid can have 360 degrees of freedom. The center rotates 360°, so the user can easily adjust the outlet direction of the outflow channel 13 according to the desired output direction during use.

To sum up, the micropump provided in this case forms a concentric backstop symmetrical structure with one-way output, and has a pressure relief function, so as to greatly reduce the structure of the valve plate, improve the overall airtight reliability, and increase the output. The degree of freedom of direction and the effect of greatly reducing the pressure relief flow resistance.

This case can be modified in various ways by the people who are familiar with this technology, Ren Shijiang, but all of them do not break away from the intended protection of the scope of the attached patent application.

Claims (13)

1. A micropump, comprising:

a collector plate having a collector plate first surface and a collector plate second surface, the collector plate first surface and the collector plate second surface being oppositely disposed surfaces, the collector plate comprising:

an outer groove arranged on the first surface of the collector plate;

the inner groove is arranged on the first surface of the collector plate and is surrounded by the outer groove;

the convex part is arranged on the first surface of the collector plate and arranged in the center of the inner groove;

at least one flow collecting hole, which penetrates from the first surface to the second surface of the flow collecting plate and is arranged in the inner groove and at the outer edge of the convex part; and

a current collecting peripheral wall arranged on the second surface of the current collecting plate and defining a current collecting space;

the valve plate is arranged in the inner groove of the current collecting plate and comprises a valve hole, the valve hole is arranged at the center of the valve plate, the convex part of the current collecting plate is propped against the valve hole, and a current collecting cavity is formed between the valve plate and the current collecting plate;

the outflow plate comprises an outflow channel, at least one outflow channel and an outflow peripheral wall, the outflow channel is arranged at the center of the outflow plate, an outflow space is defined by the outflow peripheral wall, the outflow space is communicated with the outflow channel and the at least one outflow channel, the valve hole of the valve block is communicated with the outflow space and the outflow channel, and the outflow peripheral wall is clamped in the outer groove of the flow collecting plate, so that the valve block is accommodated in the outflow space; and

the pump core module is accommodated in the flow collecting space of the flow collecting plate;

the pump core module draws fluid to enter the pump core module, then flows into the collecting chamber through the at least one collecting hole, pushes away the valve plate, and then enters the outflow channel of the outflow plate through the valve hole to finish the transmission of the fluid.

2. The micropump of claim 1, wherein the manifold plate comprises a plurality of manifold holes disposed at equal intervals in the inner recess and surrounding the protrusion.

3. The micropump of claim 2, wherein the outer channel of the manifold plate is of an annular configuration, and the inner channel and the protrusion are each of a circular configuration, such that the manifold plate forms a concentrically symmetrical structure.

4. The micropump of claim 1, wherein the outlet plate includes a plurality of outlet channels, equally spaced, and surrounding the outlet channels.

5. The micropump of claim 4, wherein the outlet plate has a circular configuration such that the outlet plate forms a concentric symmetrical configuration.

6. The micropump of claim 1, wherein the valve plate further comprises a peripheral wall of the valve plate disposed on a side of the valve plate adjacent to the collecting plate and received in the inner recess of the collecting plate.

7. The micropump of claim 1, wherein the outflow channel is a linear channel.

8. The micropump of claim 1, wherein the outlet flow channel is a tortuous channel.

9. The micropump of claim 1, wherein the pump core module comprises:

the inflow plate is provided with at least one inflow hole, at least one bus groove and a confluence chamber, wherein the inflow hole is used for leading in fluid and penetrates through the bus groove, and the bus groove is communicated with the confluence chamber, so that the fluid led in by the inflow hole can flow into the confluence chamber after passing through the bus groove;

a resonance sheet, which is connected on the flow inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the position of the confluence chamber of the flow inlet plate, the movable part is arranged around the hollow hole, and the fixed part is arranged at the outer peripheral part of the resonance sheet and is fixedly connected on the flow inlet plate; and

a piezoelectric actuator jointed on the resonance sheet;

the fluid is guided in from the inflow hole of the inflow plate, collected into the confluence chamber after passing through the bus groove, and then flows through the hollow hole of the resonance plate, thus achieving the transmission of the fluid.

10. The micropump of claim 9, wherein the piezoelectric actuator comprises:

the suspension plate is in a square shape and can be bent and vibrated;

an outer frame disposed around the outer side of the suspension plate;

at least one bracket connected between the suspension plate and the outer frame for providing a supporting force for the suspension plate to elastically support; and

the piezoelectric element is attached to one surface of the suspension plate and is used for being applied with voltage to drive the suspension plate to vibrate in a bending mode.

11. The micropump of claim 10, wherein the pump core module further comprises a first insulating sheet, a conductive sheet, and a second insulating sheet, wherein the flow inlet plate, the resonator plate, the piezoelectric actuator, the first insulating sheet, the conductive sheet, and the second insulating sheet are sequentially stacked.

12. The micropump of claim 11, wherein the piezoelectric actuator further comprises a first conductive pin protruding from an outer edge of the outer frame, the conductive plate has a second conductive pin protruding from an outer edge of the conductive plate, and the manifold further comprises a plurality of pin openings, the first conductive pin and the second conductive pin protruding from the plurality of pin openings to the outside of the manifold, respectively.

13. The micropump of claim 9, wherein the piezoelectric actuator comprises:

a suspension plate which is in a square shape and can be bent and vibrated;

an outer frame surrounding the suspension plate;

at least one support connected between the suspension plate and the outer frame for providing the suspension plate with elastic support, forming a non-coplanar structure between one surface of the suspension plate and one surface of the outer frame, and forming a cavity space between one surface of the suspension plate and the resonator plate; and

the piezoelectric element is attached to one surface of the suspension plate and used for applying voltage to drive the suspension plate to vibrate in a bending mode.

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