CN206860416U - Micro fluid control device - Google Patents

Abstract

A micro fluid control device comprises an air inlet plate, a resonator plate and a piezoelectric actuator which are stacked, wherein the air inlet plate is provided with at least one air inlet hole, at least one bus bar hole and a circular concave part forming a bus bar chamber; the resonance sheet is provided with a hollow hole; the piezoelectric actuator is provided with a suspension plate, an outer frame and a piezoelectric ceramic plate; the suspension plate is provided with a circular convex part corresponding to the circular concave part, and the ratio of the working characteristic relation of the transmission air pressure is formed by changing the corresponding relation between the circular concave part and the circular convex part, so that the transmission air pressure flow is improved, and the performance of the micro fluid control device is improved.

Description

microfluidic control device

technical field

This case is about a micro-fluid control device, which is suitable for a micro-ultra-thin and silent micro-pneumatic power device.

Background technique

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery included in products such as micro pumps, sprayers, inkjet heads, and industrial printing devices Structure is its key technology, so how to use innovative structure to break through its technical bottleneck is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the structure of these traditional motors and gas valves, it is difficult to reduce the volume of such instruments and equipment, so that the volume of the overall device cannot be reduced, that is, it is difficult to achieve the goal of thinning, so it cannot be installed It is not convenient enough to be used on or in conjunction with a portable device. In addition, these traditional motors and gas valves also generate noise during operation, making users anxious, resulting in inconvenient and uncomfortable use.

Therefore, how to develop a micro-fluid control device that can improve the above-mentioned deficiencies in the known technology, and can make the traditional instrument or equipment using a micro-fluid control device small in size, miniaturized and quiet, and then achieve a light and comfortable portable purpose, Moreover, it is an urgent problem to be solved at present to be able to achieve the working characteristics of stabilizing the gas transmission pressure.

Utility model content

The main purpose of this case is to provide a microfluidic control device suitable for portable or wearable instruments or equipment, by virtue of the diameter of the circular concave part of the air intake plate and the circular convexity of the suspension plate of the piezoelectric actuator The diameters of the parts correspond to each other to form the working characteristic relationship ratio of the gas transmission pressure, so that the formed confluence chamber has a fluid anti-return function, thereby greatly improving and improving the working characteristic efficiency of the microfluidic control device.

In order to achieve the above purpose, a more general implementation of this case is to provide a micro-fluid control device, which is suitable for a micro-pneumatic power device. surface, the air intake surface is provided with at least one air intake hole, the joint surface is respectively recessed with a circular recess and at least one bus hole, the circular recess has a first diameter, one end of the bus hole and the The circular recesses communicate with each other, and the other end of the confluence row hole communicates with the at least one air intake hole, the gas is introduced from the at least one air intake hole, and the gas is confluent to the circular recess through the at least one confluence discharge hole. A confluence chamber is formed; a resonant plate has a hollow hole corresponding to the circular recess of the inlet plate; and a piezoelectric actuator has: a suspension plate with a first opposite surface and a The second surface, the second surface has a circular convex portion, the circular convex portion is perpendicular to the circular concave portion, the circular convex portion has a second diameter, the second diameter and the first diameter correspond to each other ; an outer frame, arranged around the periphery of the suspension board; at least one bracket, connected between the suspension board and the outer frame; and a piezoelectric plate, attached to the first surface of the suspension board; wherein, The above-mentioned piezoelectric actuator, the resonant plate and the air inlet plate are arranged and positioned in sequence, and there is a gap between the resonant plate and the piezoelectric actuator to form a first chamber, so that When the piezoelectric actuator is driven, the gas is introduced from the at least one air intake hole of the air intake plate, collected to the circular recess through the at least one manifold hole, and then flows through the hollow hole of the resonant plate, into the first chamber, and then transported downward through a gap between the at least one bracket of the piezoelectric actuator, so as to push out the gas continuously.

Description of drawings

FIG. 1A is a schematic diagram of the front exploded structure of the miniature pneumatic power device of the preferred embodiment in this case.

FIG. 1B is a schematic diagram of the front assembled structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2A is a schematic diagram of the rear exploded structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2B is a schematic diagram of the rear assembled structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 3A is a schematic diagram of the front assembled structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A .

FIG. 3B is a schematic diagram of the rear assembly structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A .

FIG. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A .

FIGS. 4A to 4E are schematic diagrams of partial actions of the micro-fluid control device of the micro-pneumatic power device shown in FIG. 1A .

FIG. 5A is a schematic diagram of the pressure collecting action of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A .

FIG. 5B is a schematic diagram of the pressure relief action of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A .

FIG. 6A to FIG. 6E are schematic diagrams of the pressure collecting action of the micro pneumatic power device shown in FIG. 1A .

FIG. 7 is a schematic diagram of the decompression or decompression action of the micro-pneumatic power device shown in FIG. 1A .

detailed description

Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are used as illustrations in nature, rather than construed to limit this case.

The micro-pneumatic power device 1 of this case can be applied to industries such as medical biotechnology, energy, computer technology or printing, so as to transmit gas, but not limited thereto. Please refer to Fig. 1A, Fig. 1B, Fig. 2A and Fig. 2B, the micro-pneumatic power device 1 of this case is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has an air inlet plate 11. Structures such as a resonant sheet 12, a piezoelectric actuator 13, insulating sheets 141, 142, and a conductive sheet 15, but not limited thereto. The piezoelectric actuator 13 is arranged corresponding to the resonant sheet 12, and makes the intake plate 11, the resonant sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142, the gas collecting plate 16, etc. are stacked in sequence, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric plate 133; and the micro valve device 1B includes a The valve plate 17 and an outlet plate 18 are not limited thereto. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure with a side wall 168 on the periphery, and the side wall 168 formed by the periphery and its bottom The plates jointly define a housing space 16a for the piezoelectric actuator 13 to be arranged in the housing space 16a, so when the assembly of the micro pneumatic power device 1 of this case is completed, its front schematic view will be as follows As shown in Figure 1B, and as shown in Figures 6A to 6E, it can be seen that the microfluidic control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro valve device 1B are sequentially assembled. The stacked arrangement is positioned on the gas collector plate 16 of the microfluidic control device 1A. And the rear schematic view of its assembly then shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18, the outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is then used to make the micro valve device The gas in 1B is discharged to achieve the effect of pressure relief. By virtue of the assembly arrangement of the microfluidic control device 1A and the microvalve device 1B, the gas is inhaled from at least one gas inlet hole 110 on the gas inlet plate 11 of the microfluidic control device 1A, and passes through the piezoelectric actuator 13, and flow through a plurality of pressure chambers (not shown) to continue transmission, so that the gas can flow in one direction in the micro-valve device 1B, and the pressure can be accumulated in the outlet port connected to the outlet port of the micro-valve device 1B. In a device (not shown), and when pressure relief is required, the output of the microfluid control device 1A is regulated so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the micro valve device 1B, so as to Perform depressurization.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air intake plate 11 of the microfluidic control device 1A has an air intake surface 11a and a joint surface 11b. The air intake surface 11a is provided with at least one air intake hole 110, In this embodiment, the number of air intake holes 110 is 4, but it is not limited thereto. They penetrate the air intake surface 11a and the joint surface 11b of the air intake plate 11, and are mainly used for supplying air from the outside of the device. The atmospheric pressure flows into the micro-fluid control device 1A from the at least one air inlet 110 . And as shown in Figure 2A, it can be seen from the joint surface 11b of the air inlet plate 11 that it is concavely provided with a circular recess 111 and at least one busbar hole 112, and one end of the at least one busbar hole 112 is connected with the circular recess 111 , and the other end of the at least one bus hole 112 communicates with the at least one air inlet 110 of the air inlet surface 11 a of the inlet plate 11 . In this embodiment, the number of the bus holes 112 corresponds to the air inlet holes 110, and the number is four, but it is not limited thereto, so that the gas entering the bus holes 112 from the air inlet holes 110 The guiding and converging flow is concentrated to the circular recess 111 for transmission. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a confluence row hole 112, and a circular recess 111, and a confluence chamber for confluent gas is correspondingly formed at the circular recess 111, For temporary storage of gas. In some embodiments, the material of the intake plate 11 may be but not limited to be made of stainless steel. In some other embodiments, the depth of the confluence chamber formed by the circular recess 111 is the same as the depth of the confluence row holes 112, and the preferred value of the depth of the confluence chamber and the confluence row holes 112 is between Between 0.2mm-0.4mm, but not limited thereto. The resonant plate 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 on the resonant plate 12, which is arranged corresponding to the circular recess 111 of the joint surface 11b of the air inlet plate 11 to allow the gas to circulate. In some other embodiments, the resonant piece can be made of a copper material, but not limited thereto.

Please also refer to FIG. 3A, FIG. 3B and FIG. 3C, the piezoelectric actuator 13 is assembled together by a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric plate 133, wherein, The piezoelectric plate 133 is attached to the first surface 130b of the suspension plate 130 for applying voltage to generate deformation to drive the suspension plate 130 to bend and vibrate. When 131 is driven by voltage, the suspension board 130 can bend and vibrate from the central part 130d to the outer peripheral part 130e, and the at least one bracket 132 is connected between the suspension board 130 and the outer frame 131. In this embodiment, the bracket 132 is The connection is arranged between the suspension board 130 and the outer frame 131, and its two ends are respectively connected to the outer frame 131 and the suspension board 130 to provide elastic support, and there are at least A gap 135 is used for gas circulation, and the types and quantities of the suspension board 130 , the outer frame 131 and the support 132 are varied. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130 and has a conductive pin 134 protruding outwards for power supply connection, but not limited thereto. In this embodiment, the suspension board 130 is a stepped surface structure, which means that the second surface 130a of the suspension board 130 further has a circular convex portion 130c, and the circular convex portion 130c is perpendicular to the circular concave portion. Corresponding to the circular concave portion, the height of the circular convex portion 130c is between 0.02mm-0.08mm, preferably 0.03mm. 3A and 3C at the same time, it can be seen that the surface of the circular convex portion 130c of the suspension board 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension board 130 and the second surface of the bracket 132 The surface 132a is also coplanar, and there is a certain distance between the circular protrusion 130c of the suspension board 130 and the second surface 131a of the outer frame 131, the second surface 130a of the suspension board 130 and the second surface 132a of the bracket 132. depth. As for the first surface 130b of the suspension plate 130, as shown in FIG. 3B and FIG. Then stick to the first surface 130b of the flat suspension board 130 . In some other embodiments, the shape of the suspension board 130 can also be a double-sided flat plate-like square structure, which is not limited thereto, and can be changed arbitrarily according to the actual implementation situation. In some embodiments, the suspension board 130 , the bracket 132 and the outer frame 131 can be integrally formed, and can be made of a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the side length of the suspension board 130 is between 8mm-9mm.

In some other embodiments, the side length of the piezoelectric plate 133 is slightly smaller than the side length of the suspension plate 130 , and has a length between 7.5mm-8.5mm, but it is not limited thereto.

In addition, in another embodiment, the side length of the suspension board 130 may preferably be 7.5 mm, and the side length of the piezoelectric board 133 is slightly smaller than the side length of the suspension board 130 , and the side length thereof is 7 mm.

Please continue to refer to FIG. 4A for the relevant embodiments of the micro pneumatic power device 1 of this case, the circular convex portion 130c of the suspension plate 130 and the circular concave portion 111 of the air intake plate 11 are vertically arranged and correspond to each other, wherein the circular concave portion 111 It has a first diameter D1, and the circular convex portion 130c has a second diameter D2. When the first diameter D1 is fixed and the second diameter D2 is adjusted, the relationship between the working characteristics obtained from the correspondence between the two is shown in Table 1 below:

Table I

Therefore, it is known from the above table of the experiment that the ratio D2/D1 between the first diameter D1 of the circular concave portion 111 of the air intake plate 11 and the second diameter D2 of the circular convex portion 130c of the suspension plate 130 is, for The gas flow rate of the micro-fluid control device 1A has a great influence. When the ratio D2/D1 of the second diameter D2 to the first diameter D1 is between 0.95 and 1.15, the efficiency of its gas transmission working characteristics will be improved, and a higher efficiency will be obtained. Gas transmission pressure value, the minimum gas transmission pressure value exceeds 380mmHg, especially when the ratio D2/D1 is between 1 and 1.1, the minimum gas transmission pressure value is above 410mmHg, it can be known that the second diameter D2 and the first The ratio D2/D1 of the diameter D1 will affect the working characteristics (pressure value) of the microfluidic device 1A, and in this case, when the ratio D2/D1 of the second diameter D2 to the first diameter D1 is defined between 0.95 and 1.15, a better The large air pressure further greatly improves the efficiency of the microfluid control device 1A and improves its working characteristics. In this case, the difference between the first diameter D1 of the circular concave portion 111 and the second diameter D2 of the circular convex portion 130c of the suspension plate 130 is adopted in this case. The ratio of the working characteristics of gas transmission air pressure is formed corresponding to each other. This is because the proportional relationship between the second diameter D2 and the first diameter D1 will have a fluid anti-return effect in the confluence chamber formed here, which not only greatly improves and improves the micro The efficiency of the working characteristics of the fluid control device 1A is a very important design point. In any case, the first diameter D1 of the circular concave portion 111 and the second diameter D2 of the circular convex portion 130c of the suspension plate 130 correspond to each other. The working characteristic relationship ratio of the gas transmission air pressure is obtained through experiments, and cannot be directly deduced by theoretical formulas. The first diameter D1 of the circular concave portion 111 and the second diameter of the circular convex portion 130c of the suspension plate 130 The diameters D2 correspond to each other to form the working characteristic relationship ratio of the gas transmission pressure. The speculation of the reason is only used as a reference for the rationality of the experiment.

The reason why the piezoelectric actuator 13 in this case uses a square suspension board 130 is that compared with the design of a circular suspension board, the structure of the square suspension board 130 obviously has the advantage of saving electricity, and the comparison of its power consumption is as follows Table 2 shows:

Table II

From the above table of the experiment, it is known that the piezoelectric actuator 13 with the side length size (8mm to 10mm) of the square suspension plate 130 is compared with the piezoelectric actuator with the diameter of the circular suspension plate (8mm to 10mm). , more power-saving. The power consumption comparison data obtained by the above experiments can be speculated to be due to the fact that the power consumption of the capacitive load operating at the resonant frequency will increase with the increase of the frequency, and because the side length is square The resonance frequency of the designed suspension board 130 is obviously lower than that of the same circular suspension board, so its relative power consumption is also significantly lower, that is, the design of the square suspension board 130 used in this case is compared with the design of the circular suspension board. It actually has the advantage of saving power, especially when it is applied to wearable devices, saving power is a very important design focus. But in any case, the power-saving effect of the hoverboard with the above-mentioned square design is obtained through experiments, and cannot be directly deduced by theoretical formulas.

In addition, please continue to refer to FIG. 1A and FIG. 2A. In the microfluidic control device 1A, an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142 are sequentially and correspondingly arranged under the piezoelectric actuator 13, and their The form roughly corresponds to the form of the outer frame of the piezoelectric actuator 13 . In some embodiments, the insulating sheets 141 and 142 are made of insulating materials, such as plastic, but not limited thereto, for insulation purposes; in other embodiments, the conductive sheet 15 is made of Constructed of conductive materials, such as, but not limited to, metal, for the purpose of conducting electricity. And, in this embodiment, a conductive pin 151 may also be provided on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIG. 4A to FIG. 4E at the same time, wherein FIG. 4A to FIG. 4E are partial action diagrams of the micro-fluid control device 1A of the micro-pneumatic power device shown in FIG. 1A . First, as shown in FIG. 4A, it can be seen that the microfluidic control device 1A is formed by stacking the gas inlet plate 11, the resonant plate 12, the piezoelectric actuator 13, the insulating plate 141, the conductive plate 15, and another insulating plate 142 in sequence. In this embodiment, a material is filled in the gap g0 between the resonant plate 12 and the periphery of the outer frame 131 of the piezoelectric actuator 13, such as conductive glue, but not limited thereto, so that The depth of the gap g0 can be maintained between the resonant plate 12 and the circular convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, thereby guiding the airflow to flow more rapidly, and because the circular convex portion of the suspension plate 130 The distance between 130c and the resonant plate 12 is kept at an appropriate distance to reduce contact and interference with each other, so that the generation of noise can be reduced.

Please continue to refer to FIGS. 4A to 4E. As shown in the figure, when the air intake plate 11, the resonant plate 12 and the piezoelectric actuator 13 are assembled in sequence, the hollow hole 120 of the resonant plate 12 can be connected with the The gas inlet plate 11 together forms a chamber for converging gas, and a first chamber 121 is further formed between the resonant plate 12 and the piezoelectric actuator 13 for temporarily storing gas, and the first chamber 121 is transparent. Through the hollow hole 120 of the resonant plate 12, it communicates with the cavity at the circular recess 111 of the first surface 11b of the intake plate 11, and the two sides of the first cavity 121 are supported by the bracket 132 of the piezoelectric actuator 13 The gap 135 between them communicates with the micro valve device 1B arranged thereunder.

When the micro-fluid control device 1A of the micro-pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by voltage to vibrate vertically reciprocatingly with the support 132 as a fulcrum. As shown in Figure 4B, when the piezoelectric actuator 13 is actuated by voltage to vibrate downward, since the resonant plate 12 is a light and thin sheet structure, when the piezoelectric actuator 13 vibrates, the resonance The sheet 12 will also carry out vertical reciprocating vibration with the resonance, that is, the part of the resonant sheet 12 corresponding to the circular concave portion 111 of the air intake plate 11 will also deform with the bending vibration, that is, the resonant sheet 12 corresponds to the The circular recess 111 of the intake plate 11 is the movable part 12a of the resonant piece 12, so when the piezoelectric actuator 13 bends and vibrates downward, the movable part 12a of the resonant piece 12 will be affected by the fluid. brought in and pushed and driven by the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 bends, vibrates, and deforms downward, the gas enters through at least one air inlet 110 on the air inlet plate 11, and Pass through at least one bus hole 112 on the joint surface 11b to collect at the central circular recess 111, and then flow down to the first chamber through the central hole 120 corresponding to the circular recess 111 on the resonant sheet 12 121, thereafter, due to being driven by the vibration of the piezoelectric actuator 13, the resonant plate 12 will also carry out vertical reciprocating vibrations with the resonance of the piezoelectric actuator, as shown in Figure 4C, at this time the movable part 12a of the resonant plate 12 It also vibrates downward, and sticks against the circular convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, so that the area other than the circular convex portion 130c of the floating plate 130 is in contact with the two sides of the resonant plate 12. The distance between the confluence chambers between the fixed parts 12b will not become smaller, and the volume of the first chamber 121 will be compressed by the deformation of the resonant plate 12, and the middle flow space of the first chamber 121 will be closed to promote the internal flow of the first chamber 121. The gas pushes to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow downward. As for FIG. 4D, the movable part 12a of the resonant plate 12 is deformed by bending vibration, and then returns to the initial position, and the subsequent piezoelectric actuator 13 is driven by voltage to vibrate upwards, so that the first chamber 121 is also squeezed. At this time, since the piezoelectric actuator 13 is lifted upwards, the displacement of the lift can be d, so that the gas in the first chamber 121 will flow toward both sides, and then drive the gas to continuously flow from the gas inlet plate At least one air inlet 110 on the 11 enters, and then flows into the cavity formed by the circular concave portion 111, and then as shown in FIG. The movable part 12a of the resonant piece 12 also reaches the upward position, so that the gas in the circular recess 111 flows into the first chamber 121 through the central hole 120 of the resonant piece 12, and passes through the bracket of the piezoelectric actuator 13. 132 to pass through the gap 135 downwards out of the microfluidic control device 1A. From this embodiment, it can be seen that when the resonant piece 12 vibrates vertically, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words, between the two A gap g0 is provided between the structures so that the resonant piece 12 can generate a greater vertical displacement during resonance. In this way, a pressure gradient is generated in the flow channel design of the microfluid control device 1A, so that the gas flows at a high speed, and the gas is transmitted from the suction end to the discharge end through the impedance difference in the flow channel in and out direction, and there is a pressure gradient at the discharge end. Under the state of air pressure, it still has the ability to continuously push out the gas, and can achieve the effect of silence.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can go up or down at the same time, which can be based on the actual implementation situation. Any changes are not limited to the action shown in this embodiment.

Please also refer to Fig. 1A, Fig. 2A and Fig. 5A, Fig. 5B, the micro valve device 1B of the micro pneumatic power device 1 in this case is formed by stacking the valve plate 17 and the outlet plate 18 in sequence, and is equipped with a micro fluid control device 1A gas collector plate 16 to operate.

In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161, and the surface 160 is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be disposed therein, controlled by microfluidics. The gas transported downward by the device 1A is temporarily accumulated in the gas-collecting chamber 162, and there are a plurality of through holes in the gas-collecting plate 16, which includes a first through-hole 163 and a second through-hole 164, the first through-hole 163 and the second through-hole 164. One end of the through hole 163 and the second through hole 164 communicate with the gas collection chamber 162, and the other end is respectively connected with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collection plate 16. connected. And, a protrusion structure 167 is further added at the first outlet chamber 166 , such as but not limited to a cylindrical structure, and the height of the protrusion structure 167 is higher than the reference surface 161 of the air collecting plate 16 .

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, wherein the pressure relief through hole 181 and the outlet through hole 182 respectively penetrate the reference surface 180 of the outlet plate 18 With the second surface 187, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180. The pressure relief through hole 181 is located at the center part of the second pressure relief chamber 183, and in the second pressure relief chamber 183. There is also a communication channel 185 between the second pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through hole 182 is connected with the second outlet chamber 184, and the other end is connected with the second outlet chamber 184. The outlet 19 is connected. In this embodiment, the outlet 19 can be connected with a device (not shown), such as a press, but not limited thereto.

There is a valve hole 170 and a plurality of positioning holes 171 on the valve plate 17; when the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the gas collecting plate 18. The first through hole 163 of the plate 16, the second pressure relief chamber 183 corresponds to the first pressure relief chamber 165 of the gas collecting plate 16, and the second outlet chamber 184 corresponds to the second pressure relief chamber 16 of the gas collecting plate 16. An outlet chamber 166, and the valve plate 17 is arranged between the gas collecting plate 16 and the outlet plate 18, blocking the communication between the first pressure relief chamber 165 and the second pressure relief chamber 183, and the valve plate 17 The valve hole 170 is disposed between the second through hole 164 and the outlet through hole 182, and the valve hole 170 is located at the protrusion structure 167 of the first outlet chamber 166 of the gas collecting plate 16 and is arranged correspondingly. The valve hole 170 is designed so that the gas can flow in one direction according to the pressure difference.

In addition, one end of the pressure relief through hole 181 of the outlet plate 18 can be further provided with a protruding convex structure 181a, such as but not limited to a cylindrical structure, and this convex structure 181a can be improved to increase its Height, the height of the protrusion structure 181a is higher than the reference surface 180 of the outlet plate 18, so as to strengthen the valve plate 17 to quickly collide and close the pressure relief through hole 181, and achieve a pre-forced conflicting effect of complete sealing; And, the outlet plate 18 has at least one position-limiting structure 188. Taking this embodiment as an example, the position-limiting structure 188 is arranged in the second pressure relief chamber 183 and is an annular block structure. It is mainly used for supporting the valve plate 17 when the micro valve device 1B is carrying out pressure-gathering operations, so as to prevent the valve plate 17 from collapsing, and to enable the valve plate 17 to be opened or closed more quickly.

When the micro-valve device 1B is pressure-collecting and actuated, as shown in Figure 5A, it can respond to the pressure provided by the gas transmitted downward from the micro-fluid control device 1A, or when the external atmospheric pressure is greater than that of the outlet. 19 connected to the internal pressure of the device (not shown), the gas will flow from the gas collection chamber 162 in the gas collection plate 16 of the microfluidic control device 1A through the first through hole 163 and the second through hole 164 to the Flow down into the first pressure relief chamber 165 and the first outlet chamber 166, at this moment, the downward gas pressure is to make the flexible valve plate 17 bend downward and make the volume of the first pressure relief chamber 165 enlarged, and corresponding to the first through hole 163, it is flatly attached downwards and abuts against the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181 of the outlet plate 18, so the second pressure relief chamber 183 The gas inside will not flow out from the pressure relief through hole 181. Of course, in this embodiment, the design of adding a convex structure 181a to the end of the pressure relief through hole 181 can be used to strengthen the valve plate 17 to quickly contact and close the pressure relief through hole 181, and achieve a pre-forced resistance to complete sealing. At the same time, through the limiting structure 188 arranged around the pressure relief through hole 181, it assists in supporting the valve plate 17 so that it will not collapse. On the other hand, since the gas flows downward from the second through hole 164 into the first outlet chamber 166, and the valve plate 17 corresponding to the first outlet chamber 166 is also bent downward, so that its corresponding The valve hole 170 is opened downwards, and the gas can flow from the first outlet chamber 166 through the valve hole 170 into the second outlet chamber 184, and flow to the outlet 19 and the device connected to the outlet 19 by the outlet through hole 182. (not shown), the device is used to collect pressure.

Please continue to refer to FIG. 5B. When the micro-valve device 1B is depressurized, it can control the gas transmission volume of the micro-fluid control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected with the outlet 19 When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the micro valve device 1B can be released. At this time, the gas will be input into the second outlet chamber 184 from the outlet through hole 182 connected with the outlet 19, so that the volume of the second outlet chamber 184 will expand, and then the flexible valve plate 17 will be bent upwards and deformed, and Flatly stick upwards and against the gas collecting plate 16 , so the valve hole 170 of the valve plate 17 will be closed due to being against the gas collecting plate 16 . Of course, in this embodiment, the design of adding a convex structure 167 to the first outlet chamber 166 can be used, so that the flexible valve plate 17 can be bent upwards and quickly resisted, so that the valve hole 170 is more favorable to achieve a predetermined value. The force resistance effect is completely attached to the closed state of the seal. Therefore, when it is in the initial state, the valve hole 170 of the valve plate 17 will be closed due to being close to the convex structure 167, and the inside of the second outlet chamber 184 will be closed. The gas will not flow back into the first outlet chamber 166, so as to achieve a better effect of preventing gas leakage. And, the gas in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and making the gas corresponding to the second pressure relief chamber 183 The valve plate 17 of the pressure chamber 183 is also bent and deformed upwards. At this time, because the valve plate 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber The gas in the chamber 183 can flow out through the pressure relief through hole 181 for pressure relief operation. Of course, in this embodiment, the flexible valve plate 17 can be made upward by using the convex structure 181a added at the end of the pressure relief through hole 181 or through the limiting structure 188 provided in the second pressure relief chamber 183. The bending shape changes quickly, which is more favorable for breaking away from the state of closing the pressure relief through hole 181 . In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged to lower the pressure through the one-way pressure relief operation, or the gas in the device (not shown) connected to the outlet 19 can be discharged completely to complete the pressure relief operation.

Please refer to FIG. 1A , FIG. 2A and FIG. 6A to FIG. 6E at the same time, wherein FIG. 6A to FIG. 6E are schematic views of the pressure collecting action of the micro pneumatic power device shown in FIG. 1A . As shown in Figure 6A, the micro-pneumatic power device 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is composed of an air inlet plate 11, a resonance plate 12, The piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142 and the gas collecting plate 16 are stacked and assembled for positioning, and between the resonant sheet 12 and the piezoelectric actuator 13 is a G0, and there is a first chamber 121 between the resonant plate 12 and the piezoelectric actuator 13, and the micro-valve device 1B is also sequentially stacked and assembled by the valve plate 17 and the outlet plate 18, etc. Formed on the gas collecting plate 16 of the control device 1A, and between the gas collecting plate 16 and the piezoelectric actuator 13 of the microfluidic control device 1A, there is a gas collecting chamber 162 and a reference surface 161 on the gas collecting plate 16 Further recess a first pressure relief chamber 165 and a first outlet chamber 166, and further recess a second pressure relief chamber 183 and a second outlet chamber 184 on the reference surface 180 of the outlet plate 18, in this embodiment , the operating frequency of the micro-pneumatic power device is between 27K-29.5K, the operating voltage is ±10V-±16V, and the drive and resonance of these multiple different pressure chambers are matched with the piezoelectric actuator 13 The vibration of sheet 12 and valve sheet 17 makes the gas gather and transmit downward.

As shown in Figure 6B, when the piezoelectric actuator 13 of the microfluidic control device 1A is actuated by voltage to vibrate downward, the gas will enter the microfluidic control device 1A from the air inlet 110 on the gas inlet plate 11 , and through at least one busbar hole 112 to gather at its circular recess 111 , and then flow down into the first chamber 121 through the hollow hole 120 on the resonant plate 12 . Thereafter, as shown in FIG. 6C , due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonant plate 12 will also vibrate reciprocatingly, that is, it vibrates downward and is close to the piezoelectric actuator 13. On the circular convex portion 130c of the suspension plate 130, the volume of the chamber at the circular concave portion 111 of the intake plate 11 is increased by the deformation of the resonant plate 12, and the volume of the first chamber 121 is simultaneously compressed , and then promote the gas in the first chamber 121 to push and flow to both sides, and then pass through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow downwards, so as to flow to the microfluidic control device 1A and the microfluidic control device 1A. In the gas-collecting chamber 162 between the valve device 1B, the first through-hole 163 and the second through-hole 164 communicated with the gas-collecting chamber 162 flow down to the first pressure relief chamber 165 and the second through-hole correspondingly. In an outlet chamber 166, it can be seen from this embodiment that when the resonant plate 12 performs vertical reciprocating vibration, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, In other words, setting the gap g0 between the two structures can make the resonant plate 12 have a larger vertical displacement when it resonates.

Then, as shown in FIG. 6D , since the resonant plate 12 of the microfluidic control device 1A returns to the initial position, and the piezoelectric actuator 13 is driven by voltage to vibrate upward, the volume of the first chamber 121 is also squeezed like this, The gas in the first chamber 121 flows toward both sides, and is continuously input into the gas collection chamber 162, the first pressure relief chamber 165 and the first In the outlet chamber 166, so that the air pressure in the first pressure relief chamber 165 and the first outlet chamber 166 is larger, and then the flexible valve plate 17 is pushed downward to produce bending deformation, and then in the second pressure relief chamber In the chamber 183, the valve plate 17 is flatly attached downwards and against the protrusion structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181. In the second outlet chamber 184, the valve plate 17 The valve hole 170 corresponding to the outlet through hole 182 on 17 is opened downwards, so that the gas in the second outlet chamber 184 can be passed down to the outlet 19 and any device (not shown) connected with the outlet 19 by the outlet through hole 182 ), so as to achieve the purpose of pressure-gathering operation. Finally, as shown in FIG. 6E , when the resonant plate 12 of the microfluidic control device 1A resonates and moves upward, the gas in the circular recess 111 of the joint surface 11 b of the gas inlet plate 11 can flow in through the hollow hole 120 of the resonant plate 12 In the first chamber 121, through the gap 135 between the brackets 132 of the piezoelectric actuator 13, it is continuously transported downwards to the gas collecting plate 16, because the gas pressure continues to increase downwards, so the gas is still Will continue to flow to the outlet 19 and any device connected to the outlet 19 through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet through hole 182, The pressure gathering operation can be driven by the pressure difference between the external atmospheric pressure and the device, but it is not limited thereto.

When the internal pressure of the device (not shown) connected to the outlet 19 was greater than the external pressure, then the miniature pneumatic power device 1 could perform decompression or decompression operations as shown in Figure 7, and its decompression or decompression The action mode of pressure is mainly as mentioned above, the gas can no longer be input into the gas collection chamber 162 by regulating the gas transmission volume of the micro-fluid control device 1A, at this time, the gas will flow from the outlet connected to the outlet 19 The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 expands, and then the flexible valve plate 17 is bent and deformed upwards, and flattened upwards and abutted against the first outlet chamber 166 on the protrusion structure 167, so that the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and, in the second outlet chamber 184 The gas can flow into the second pressure relief chamber 183 through the communication channel 185, and then perform the pressure relief operation through the pressure relief through hole 181; in this way, the one-way gas transmission operation of the micro valve structure 1B will The gas in the device connected to the outlet 19 is discharged to reduce the pressure, or completely discharged to complete the pressure relief operation.

In summary, the micro-pneumatic power device provided in this case mainly improves the micro-fluid control device by adjusting the diameter ratio of the circular concave part of the air inlet plate and the circular convex part of the suspension plate in the micro-fluid control device. The air pressure value of the micro fluid control device can be adjusted to improve the overall exhaust effect. When the micro fluid control device and the micro valve device are assembled with each other, the gas enters from the air inlet on the micro fluid control device and is actuated by the piezoelectric actuator. , so that the gas generates a pressure gradient in the designed flow channel and pressure chamber, and then the gas flows at a high speed and is transmitted to the micro valve device, and then through the one-way valve design of the micro valve device, the gas flows in one direction. In turn, the pressure can be accumulated in any device connected to the outlet; and when the pressure is to be reduced or released, the transmission volume of the microfluidic control device is regulated, and the gas can be transmitted from the device connected to the outlet to the micro valve device The second outlet chamber is transmitted to the second pressure relief chamber by the communication flow channel, and then flows out through the pressure relief hole, so as to achieve the rapid transmission of gas, and at the same time achieve the effect of silence, and can also The overall volume of the micro gas power device is reduced and thinned, so that the micro gas power device can be portable and comfortable, and can be widely used in medical equipment and related equipment. Therefore, the miniature gas power device in this case is of great industrial value, so please file an application in accordance with the law.

Symbol Description

1: Miniature Pneumatic Power Device

1A: Microfluidic Control Device

1B: Micro-valving device

1a: Housing

10: base

11: Air intake plate

11a: The second surface of the intake plate

11b: The first surface of the intake plate

110: air intake hole

111: circular recess

112: busbar hole

12: Resonant plate

12a: Movable part

12b: fixed part

120: hollow hole

121: First chamber

13: Piezoelectric Actuator

130: Hoverboard

130a: second surface of the hoverboard

130b: first surface of the hoverboard

130c: circular convex part

130d: center part

130e: Peripheral part

131: Outer frame

131a: the second surface of the outer frame

131b: the first surface of the outer frame

132: bracket

132a: Second surface of bracket

132b: first surface of bracket

133: piezoelectric plate

134, 151: Conductive pins

135: Void

141, 142: insulating sheet

15: Conductive sheet

16: Gas collecting plate

16a: Accommodating space

160: surface

161: datum surface

162: Gathering chamber

163: First through hole

164: second through hole

165: the first pressure relief chamber

166: First exit chamber

167, 181a: Convex structure

168: side wall

17: Valve sheet

170: valve hole

171: Locating holes

18: Export plate

180: datum surface

181: Pressure relief through hole

182: Outlet through hole

183: Second decompression chamber

184: Second exit chamber

185: Connected flow channel

187: Second Surface

188: Limiting structure

19: Export

g0: Gap

D1: first diameter

D2: second diameter

Claims (17)

1. A microfluidic control device, characterized in that, comprising: An air intake plate has an air intake surface and a joint surface opposite to the air intake surface, the air intake surface is provided with at least one air intake hole, and the joint surface is respectively recessed with a circular recess and at least one bus drain hole, The circular recess has a first diameter, one end of the bus hole communicates with the circular recess, the other end of the bus hole communicates with the at least one air inlet, and the gas is introduced from the at least one air inlet , and confluence the gas to a confluence chamber formed by the circular recess through the at least one confluence row hole; a resonant plate having a hollow hole corresponding to the circular recess of the inlet plate; and A piezoelectric actuator having: a suspension plate having an opposite first surface and a second surface, the second surface has a circular convex portion perpendicular to the circular concave portion of the joint surface of the intake plate, The circular convex portion has a second diameter, the second diameter of the circular convex portion and the first diameter of the circular concave portion are formed corresponding to each other, and have a working characteristic relationship ratio of gas transmission pressure; An outer frame is arranged around the periphery of the suspension board; at least one bracket connected between the suspension board and the outer frame; and a piezoelectric plate attached to the first surface of the hoverboard; Wherein, the above-mentioned piezoelectric actuator, the resonant plate and the gas inlet plate are sequentially arranged and positioned corresponding to each other, and there is a gap between the resonant plate and the piezoelectric actuator to form a first chamber, When the piezoelectric actuator is driven, the gas is introduced from the at least one air inlet of the air inlet plate, collected into the circular recess through the at least one manifold hole, and then flows through the hollow of the resonant plate. The hole is used to enter the first chamber, and then is transmitted downward through a gap between the at least one bracket of the piezoelectric actuator to continuously push out the gas. 2. The microfluidic control device according to claim 1, wherein the operating characteristic relationship ratio is a ratio of the first diameter of the circular concave portion to the second diameter of the circular convex portion ranging from 0.95 to Between 1.15. 3. The micro-fluid control device as claimed in claim 2, wherein when the operating characteristic relationship ratio is between 0.95 and 1.15, the gas transmission pressure of the constituent gas exceeds 380 mmHg. 4. The microfluidic control device according to claim 1, wherein the operating characteristic relationship ratio is a ratio of the first diameter of the circular concave portion to the second diameter of the circular convex portion ranging from 1 to 1.1 between. 5 . The micro-fluid control device as claimed in claim 4 , wherein when the operating characteristic relationship ratio is between 1 and 1.1, the gas transmission pressure of the constituent gas exceeds 410 mmHg. 6 . 6. The micro-fluid control device according to claim 2 or 4, wherein both the suspension plate and the piezoelectric plate are square structures. 7. The micro-fluid control device as claimed in claim 6, wherein a side length of the suspension plate is slightly longer than a side length of the piezoelectric plate. 8. The micro-fluid control device as claimed in claim 6, wherein the suspension plate has a side length of 8 mm to 9 mm. 9. The micro-fluid control device as claimed in claim 8, wherein the side length of the piezoelectric plate is 7.5 mm to 8.5 mm. 10. The micro-fluid control device according to claim 6, wherein the side length of the suspension plate is 7.5 mm. 11. The micro-fluid control device as claimed in claim 10, wherein the side length of the piezoelectric plate is 7mm. 12. The micro-fluid control device as claimed in claim 1, wherein the height of the circular protrusion is between 0.02 mm and 0.08 mm. 13. The micro-fluid control device as claimed in claim 12, wherein the height of the circular protrusion is 0.03 mm. 14. The micro-fluid control device as claimed in claim 1, wherein the depth of the circular recess is between 0.2mm and 0.4mm. 15. The micro-fluid control device according to claim 1 or 14, wherein the depth of the confluence chamber is the same as the depth of the at least one confluence row hole. 16. The microfluidic control device according to claim 1, further comprising at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially arranged on the piezoelectric actuator Down. 17. A micro fluid control device, characterized in that it comprises: An air intake plate has an air intake surface and a joint surface opposite to the air intake surface, the air intake surface is provided with at least one air intake hole, and the joint surface is respectively recessed with a circular recess and at least one bus drain hole, the circular recess has a first diameter; a resonant plate having a hollow hole corresponding to the circular recess of the inlet plate; and A piezoelectric actuator having at least: A suspension plate has an opposite first surface and a second surface, the second surface has a circular convex portion, the circular convex portion is perpendicular to the circular concave portion of the joint surface of the air intake plate, and the circular convex portion is vertically arranged. The convex portion has a second diameter, the second diameter of the circular convex portion is formed corresponding to the first diameter of the circular concave portion, and has a working characteristic relationship ratio of gas transmission pressure; a piezoelectric plate attached to the first surface of the hoverboard; Wherein, the above-mentioned piezoelectric actuator, the resonant plate and the gas inlet plate are sequentially arranged and positioned correspondingly to each other.