CN205943470U - High accuracy, parallelly connected microposition platform of big three degrees of freedom of stroke - Google Patents

Abstract

The utility model discloses a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform. Any one of the flexible bridge amplifying mechanisms arranged is driven by a piezoelectric ceramic driver I, and the two flexible bridge amplifying mechanisms arranged along the Y direction are each driven by a piezoelectric ceramic driver II; the two flexible bridge amplifying mechanisms arranged along the X direction Each mechanism uses two semicircular flexible hinges connected in series along the X direction to connect with the moving platform, and the two flexible bridge-type amplification mechanisms arranged along the Y direction each use a pair of semicircular flexible hinges II to connect with the moving platform. The two semicircular flexible hinges II in each group are connected in series and parallel to the Y direction, and the two groups of semicircular flexible hinges II are symmetrical about the center. The utility model can realize the high-precision and large-stroke movement of the moving platform in the XY plane, and has higher working bandwidth and natural frequency.

Description

A high-precision, large-travel three-degree-of-freedom parallel micro-positioning platform

technical field

The utility model relates to a three-degree-of-freedom parallel micro-positioning platform, in particular to a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform.

Background technique

With the development of science and technology, micro-nano technology has been widely used. However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology. At present, the micro-positioning platform with small stroke has achieved a major breakthrough, but the micro-positioning platform with high precision and large stroke needs to be further improved. At present, the most commonly used structure of high-precision, long-stroke micro-positioning platform is: X-direction translation, Y-direction translation and Z-direction rotation in series. However, this cascading mechanism will lead to a reduction in the operating bandwidth and natural frequency of the platform.

Contents of the invention

The utility model provides a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform for solving the technical problems in the known technology. The platform has a relatively high working bandwidth and natural frequency.

The technical solution adopted by the utility model to solve the technical problems existing in the known technology is: a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform, including a base body, a moving platform and uniformly distributed Four flexible bridge amplifying mechanisms around the moving platform, two of which are arranged along the X direction, and the other two are arranged along the Y direction, and each of the flexible bridge amplifying mechanisms is arranged along the X direction. The bridge-type amplifying mechanism is provided with a parallel plate guiding mechanism, and the combination of the two forms a micro-positioning mechanism; any one of the flexible bridge-type amplifying mechanisms arranged along the X direction is driven by a piezoelectric ceramic driver I, and the two arranged along the Y direction Each of the above-mentioned flexible bridge-type amplifying mechanisms is driven by a piezoelectric ceramic driver II; each of the two flexible bridge-type amplifying mechanisms arranged along the X direction uses two semicircular flexible hinges I connected in series along the X-direction to connect with the moving platform connection, the two flexible bridge-type amplifying mechanisms arranged along the Y direction each use a group of two semicircular flexible hinges II to connect with the moving platform, and the two semicircular flexible hinges in each group II is connected in series and parallel to the Y direction, and the two groups of semicircular flexible hinges II are symmetrical about the center.

The parallel plate guiding mechanism is provided with 4 parallel plates.

Positioning holes are arranged on the base body.

The advantages and positive effects of the utility model are: four micro-positioning mechanisms containing flexible bridge-type amplifying mechanisms are used in parallel to realize high-precision and large-stroke movement of the moving platform in the XY plane; X-direction and Y-direction micro-positioning mechanisms Parallel connection increases the bandwidth of the platform and the natural frequency of the platform; the flexible bridge amplifying mechanism has the function of amplifying, and under the constraints of the parallel plate guiding mechanism, the moving platform can move accurately to avoid the semicircle of the moving platform. The flexible hinge is unstable under pressure; the four series of semicircular flexible hinges connected to the moving platform decouple the movement restrictions of the micro-positioning mechanism on the X-direction translation, Y-direction translation and vertical XY plane centerline rotation of the moving platform, improving The motion accuracy of the moving platform.

Description of drawings

Fig. 1 is the structural representation of the utility model;

Fig. 2 is a structural schematic diagram of a micro-positioning mechanism of the present invention.

In the figure: 1. Substrate, 2. Piezoelectric ceramic driver Ⅰ, 3. Flexible bridge-type amplification mechanism, 4. Parallel plate guide mechanism, 5. Piezoelectric ceramic driver Ⅱ, 6. Positioning hole, 7. Semicircular flexible hinge Ⅱ, 8, moving platform, 9, semicircular flexible hinge Ⅰ.

detailed description

In order to further understand the invention content, characteristics and effects of the present utility model, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

Please refer to Figures 1 to 2, a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform, including a base body 1, a moving platform 8 is formed in the center of the base body 1, and evenly distributed around the moving platform 8 Four flexible bridge-type amplifying mechanisms 3, wherein two of the flexible bridge-type amplifying mechanisms 3 are arranged along the X direction, and the other two flexible bridge-type amplifying mechanisms 3 are arranged along the Y-direction, each of the flexible bridge-type amplifying mechanisms 3 is provided with a parallel plate guiding mechanism 4, the combination of the two forms a micro-positioning mechanism, any one of the flexible bridge amplifying mechanisms 3 arranged along the X direction is driven by a piezoelectric ceramic driver I2, and the two described flexible bridges arranged along the Y direction The flexible bridge-type amplifying mechanisms 3 are each driven by a piezoelectric ceramic driver II5, and the two flexible bridge-type amplifying mechanisms 3 arranged along the X direction each use two semicircular flexible hinges I9 connected in series along the X-direction to connect with the moving parts. The platform 8 is connected, and the two flexible bridge-type amplifying mechanisms 3 arranged along the Y direction are respectively connected to the moving platform 8 by semicircular flexible hinges II7 in groups of two, and the two semicircular flexible hinges II7 in each group are connected to the moving platform 8. The circular flexible hinges II7 are connected in series and parallel to the Y direction, and the two groups of semicircular flexible hinges II7 are symmetrical about the center.

In this embodiment, the parallel plate guiding mechanism 4 is provided with four parallel plates. Positioning holes 6 are provided on the base body 1 .

Working principle of the utility model:

Firstly, the voltage is pre-applied to the piezoelectric ceramic driver I2 and the two piezoelectric ceramic drivers II5, so that the corresponding flexible bridge amplifying mechanism 3 produces a displacement, and finally the moving platform 8 is in a balanced state.

By changing the voltage on the piezoelectric ceramic driver I2, the piezoelectric ceramic driver I2 drives the platform 8 to move in translation along the X direction through the flexible bridge amplifying mechanism 3 connected to it and arranged along the X direction.

By applying pressure to one piezoceramic driver II5 and decompressing the other piezoceramic driver II5 at the same time, the two piezoceramic drivers II5 drive the moving platform 8 through the flexible bridge amplifying mechanism 3 arranged along the Y direction connected to it. Translate in the Y direction.

By simultaneously pressurizing or decompressing the two piezoelectric ceramic actuators II5, the two piezoelectric ceramic actuators II5 drive the center of the moving platform 8 along its vertical XY plane through the flexible bridge-type amplifying mechanism 3 arranged along the Y direction connected to it. The line turns.

To sum up, the moving platform 10 of the present invention can not only realize rotation along its center line perpendicular to the XY plane, but also realize X-direction translation and Y-direction translation.

Although the preferred embodiment of the utility model has been described above in conjunction with the accompanying drawings, the utility model is not limited to the above-mentioned specific implementation, and the above-mentioned specific implementation is only illustrative and not restrictive. Under the enlightenment of the utility model, those skilled in the art can also make many forms without departing from the purpose of the utility model and the protection scope of the claims, and these all belong to the protection scope of the utility model.

Claims (3)

1. a kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform are it is characterised in that include matrix, in described matrix Central authorities be formed with moving platform and be distributed on around described moving platform four flexible bridge-type enlargers, soft described in two of which Property bridge-type enlarger along X to arrangement, two other described flexibility bridge-type enlarger along Y-direction arrange, each described flexible bridge Formula enlarger is provided with a parallel-plate guiding mechanism, and the two combination forms a nano-positioning stage；Along X to any one arranged Described flexibility bridge-type enlarger is driven using piezoelectric ceramic actuator I, along two described flexibility bridge-type enlargers of Y-direction arrangement Structure is respectively driven using a piezoelectric ceramic actuator II；Respectively adopt two along X to two of arrangement described flexibility bridge-type enlargers The individual two described flexibility bridge-types amplifications being connected with described moving platform to the semicircle flexible hinge I of series connection along X, arranging along Y-direction Mechanism respectively adopts the semicircle flexible hinge II of one group of each two to be connected with described moving platform, the described semicircle of two in every group Flexible hinge II is connected and parallel with Y-direction, and described in two groups, semicircle flexible hinge II is with regard to centrosymmetry.

2. high accuracy according to claim 1, big stroke freedom degree parallel connection mini positioning platform are it is characterised in that described Parallel-plate guiding mechanism is provided with 4 parallel-plates.

3. high accuracy according to claim 1, big stroke freedom degree parallel connection mini positioning platform are it is characterised in that in institute State matrix and be provided with location hole.