CN107464586A - A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling - Google Patents

Abstract

The invention discloses a three-degree-of-freedom large-stroke micro-positioning platform with driving force decoupling. There are two transfer beams: transfer beam I is used to connect the flexible hinge deformation structure at both ends of the middle part and the top part in the Y direction, and transfer beam II is used to connect the flexible hinges at the two ends of the middle part and the top part in the X direction Deformation structure; the top part is provided with a flexible hinge deformation structure, a moving platform and an output platform sequentially from the outside to the inside. Electroceramic driver. The flexible beam of the present invention connects the two decoupling parts of the moving platform to realize the average distribution and decoupling of the driving force; it uses two voice coil motors to drive the moving platform to realize the high-precision and large-stroke movement of the moving platform in the XY plane.

Description

A three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force

technical field

The present invention relates to the technical field of micro-positioning platforms, in particular to a three-degree-of-freedom large-stroke micro-positioning platform with driving force decoupling, in particular to a three-degree-of-freedom large-stroke high-precision platform driven by a voice coil motor and piezoelectric ceramics , driving force decoupling flexible micro-positioning platform, used in microelectronics manufacturing, biomedical engineering, optical micro-assembly and ultra-precision processing and other fields.

Background technique

With the continuous development of fields such as microelectronics manufacturing, biomedical engineering, optical microassembly and ultra-precision machining, these fields also put forward higher requirements for micro-positioning platforms. The current micro-positioning platform technology has made great progress, but there is still a lot of room for improvement in terms of response speed, stability, and positioning accuracy. At the same time, there is a more urgent demand for multi-degree-of-freedom motion platforms.

Traditional mechanisms are usually connected by kinematic pairs and composed of combined assemblies, which have disadvantages such as friction, need for lubrication, and empty back characteristics. Existing micro-positioning platforms widely use flexible hinge components, and use the resettable elastic deformation of the weak part of the rod to transmit motion, force and energy. It has many advantages such as no mechanical friction, no gap, no lubrication, stable movement, and high sensitivity. Accurate angular deformation in a small range, combined with the widely used parallel structure at the same time, overcomes the shortcomings of the traditional series configuration, such as serious error accumulation, low bearing capacity, and low response ability, and has made great achievements in the small-stroke precision positioning platform technology. major breakthrough.

However, the existing micro-positioning platforms that use voice coil motors or piezoelectric ceramic drivers as driving elements and flexible hinge parallel mechanisms as supporting rails still have too small strokes and large volumes, and due to the limitations of driving force distribution and structure in different There is a certain coupling effect between the motion directions, which seriously affects the further improvement of the performance of the positioning platform.

Contents of the invention

The purpose of the present invention is to solve the problems existing in the background technology and provide a large-travel, high-precision three-degree-of-freedom micro-positioning platform based on the decoupling of the driving force driven by the voice coil motor and piezoelectric ceramics. The flexible hinge structure arranged symmetrically realizes a large working stroke; the beam structure arranged on the bottom layer and the flexible hinge restraint structure arranged on the top layer reduce the influence of the driving force on the movement in irrelevant directions and improve the rotational stiffness of the platform; In the middle of the top structure, the rotation of the platform around the center line perpendicular to the XY plane can be realized through the symmetrically arranged piezoelectric ceramic drive structure. The positioning platform has the characteristics of large stroke, compact structure, and decoupling of motion and driving force.

The technical solution of the present invention: a three-degree-of-freedom large-stroke micro-positioning platform with driving force decoupling, including a micro-movement platform base, and the micro-motion platform base sequentially includes a bottom plate, a middle part, and a top layer part from bottom to top;

Bosses are arranged on the four top corners of the bottom plate to support the top layer, and parallel plate guide mechanisms are connected between two adjacent bosses, and the middle part of the parallel plate guide mechanism is set There is a central boss, and a voice coil motor driver is respectively arranged at the central boss at the X-direction and Y-direction ends of the bottom plate;

The top layer part is provided with a flexible hinge deformation structure, a moving platform and an output platform in sequence from the outside to the inside. The two right-angle leaf spring flexible hinges symmetrically arranged along the symmetrical axis of the moving platform are composed of two ends of the right-angle leaf spring flexible hinges arranged symmetrically along the symmetrical axis of the moving platform. Connecting the transmission member, the transmission member is integrated with the parallel plate guide mechanism;

The center of the moving platform is provided with an output platform, and the two ends of the output platform are respectively connected to piezoelectric ceramic drivers through a lever amplifying mechanism;

Two transfer beams are arranged in the center of the middle part, where transfer beam I is used to connect the middle part and the flexible hinge deformation structure at both ends of the Y direction of the top part, and where transfer beam II is used to connect the middle part and the top layer Part of the flexible hinge deformation structure at both ends of the X direction.

The bottoms of the one right-angle leaf spring flexible hinge arranged along the symmetrical axis of the moving platform and the two right-angle leaf spring flexible hinges symmetrically arranged along the symmetrical axis of the moving platform are all provided with two ends of the opening of the flexible hinge leaf spring. Connecting rod.

Positioning holes are arranged on the bottom plate.

The two voice coil motor drivers are perpendicular to each other.

The two piezoelectric ceramic drivers are parallel to each other.

Beneficial effects of the present invention: the flexible beam is used to connect the two decoupling parts of the moving platform to realize the average distribution and decoupling of the driving force; the driving of the moving platform by two voice coil motors can realize the high precision and large size of the moving platform in the XY plane The movement of the stroke; the right-angle plate spring type flexible hinge parallel structure is used as the decoupling mechanism and the displacement transmission mechanism, which has the characteristics of motion decoupling, high precision, high stability, and high natural frequency; the parallel plate guide mechanism is used to transmit the driving force, The rotation stiffness and motion precision of the platform are improved; two piezoelectric ceramic drivers are used to drive, and under the action of the amplification function of the lever amplification mechanism, the output platform can rotate around the center line of the vertical XY plane; the micro-motion platform adopts redundant motion supports Chain constraints can effectively improve the stiffness and bearing capacity of the motion platform; the platform adopts decoupling design, which is easy to control motion and improve motion accuracy.

Description of drawings

Fig. 1 is a schematic plan view of an embodiment of the present invention;

2 is a schematic plan view of the base plate and the middle part of the micro-movement platform according to the embodiment of the present invention;

Fig. 3 is a schematic plan view of the top layer of the base body of the micro-motion platform according to the embodiment of the present invention.

In the figure: 1. Bottom plate, 2. Voice coil motor driver, 3. Transfer beam I, 4. Boss, 5. Transfer beam II, 6. Parallel plate guide structure, 7. Parallel hinge central boss, 8. Positioning hole , 9 10, flexible hinge, 11, moving platform, 12, piezoelectric ceramic driver, 13, lever amplification mechanism, 14, output platform, 15, connecting rod, 16, transmission component.

detailed description

The present invention will be further described below by accompanying drawing. The embodiments of the present invention are for better understanding of the present invention by those skilled in the art, and do not limit the present invention in any way.

As shown in Figures 1 to 3, a three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force includes a micro-motion platform base, and the micro-motion platform base sequentially includes a bottom plate 1, a middle part, and a top layer from bottom to top. The bottom plate 1 is provided with positioning holes 8, and bosses 4 are arranged on the four top corners of the bottom plate 1 for supporting the top layer; a parallel plate guide mechanism is connected between two adjacent bosses 4 6. A central boss 7 is provided in the middle of the parallel plate guide mechanism 6, and a voice coil motor driver 2 is respectively arranged at the central boss 7 at the X-direction and Y-direction ends of the bottom plate 1 to provide driving force. The two voice coil motor drives 2 are perpendicular to each other. Two transfer beams are arranged in the center of the middle part, among which the transfer beam I3 is used to connect the flexible hinge deformation structure at both ends of the micro-motion platform base in the Y direction, and the transfer beam II5 is used to connect the flexible hinges at the X-direction ends of the micro-motion platform base The deformation structure is used to balance the driving force at both ends of the dynamic platform, realize the decoupling of the driving force, and improve the rotational stiffness; the top layer is provided with a flexible hinge deformation structure, a moving platform 11 and an output platform 14 in sequence from outside to inside. The flexible hinge deformation structure is composed of a right-angle leaf spring flexible hinge 10 arranged along the symmetry axis of the moving platform 11 and two right-angle leaf spring flexible hinges 9 arranged symmetrically along the symmetry axis of the moving platform 11. The hinge deformation structure is connected with the moving platform 11 through a right-angle leaf spring flexible hinge 10, and the moving platform 11 is connected with the output platform 14 through a lever amplification mechanism 13; The bottoms of the flexible hinge 10 and two right-angle leaf spring flexible hinges 9 arranged symmetrically along the axis of symmetry of the moving platform 11 are all provided with connecting rods 15 connecting the two ends of the flexible hinge leaf spring opening, which are used to eliminate the inconsistency of the flexible leaf spring. Necessary bending deformation; the two ends of the two right-angle leaf spring flexible hinges 9 arranged symmetrically along the axis of symmetry of the moving platform 11 are connected to the boss 4, and the transmission member 16 is connected in the middle, and the transmission member 16 is connected to the The parallel plate guiding mechanism 6 is connected as a whole to transmit the driving force to the flexible hinge deformation structure and the moving platform 11; the center of the moving platform 11 is provided with an output platform 14, and the two ends of the output platform 14 are respectively passed through the lever amplifying mechanism 13 is connected with piezoelectric ceramic drivers 12, and the two piezoelectric ceramic drivers 12 are parallel to each other, and jointly drive the output platform 14 to rotate around the centerline of the vertical XY plane.

The working principle of the present invention: first, pre-apply voltage to two piezoelectric ceramic drivers, so that the corresponding lever amplification mechanism connected to it produces a displacement, and finally makes the output platform in a balanced state;

Secondly, by simultaneously pressurizing or depressurizing the two piezoelectric ceramic drivers, the output platform can be rotated around the centerline of the vertical XY plane;

Finally, by controlling the voltage applied to the voice coil motor driver, the driving force can be applied to one side of the moving platform while being applied to the flexible hinge on the other side of the moving platform through the transfer beam balance, so that the moving platform can move along the X or Y axis. Direction translation, and drive the output platform to move accordingly.

To sum up, the output platform of the present invention can not only realize translation along the X direction and Y direction, but also realize rotation around it perpendicular to the center line of the XY plane. And because of the decoupling effect of its transmission beam and flexible hinge, the coupling effect between different motion directions is greatly reduced.

It should be understood that the embodiments and examples discussed here are only for illustration, and those skilled in the art may make improvements or changes, and all these improvements and changes shall belong to the protection scope of the appended claims of the present invention.

Claims (5)

1. a kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling, including micromotion platform matrix, it is characterised in that institute State micromotion platform matrix includes bottom plate, center section and top layer portion successively from bottom to up；

Boss is arranged with four drift angles of the bottom plate, for supporting the top layer portion, adjacent two boss Between be connected with parallel-plate guiding mechanism, central boss is provided with the middle part of the parallel-plate guiding mechanism, in the X of the bottom plate A voice coil motor driver is respectively arranged to the central boss with Y-direction one end；

The top layer portion is disposed with flexible hinge distressed structure, moving platform and output stage from outside to inside, described soft Property hinge distressed structure by a L-square reed-type flexible hinge along the moving platform symmetrical direction of principal axis arrangement and two edges L-square reed-type flexible hinge that the symmetrical direction of principal axis of moving platform is arranged symmetrically is formed, and two along the moving platform symmetry axis The both ends for the L-square reed-type flexible hinge that direction is arranged symmetrically connect the boss, centre connection driving member, the biography Dynamic component is connected as a single entity with the parallel-plate guiding mechanism；

The moving platform center is provided with output stage, and the output stage both ends are connected with pressure by bar thick stick enlarger respectively Electroceramics driver；

The center of the center section is provided with two transfer beams, and wherein transfer beams I are used to connect the center section and top The flexible hinge distressed structure at the Y-direction both ends of layer segment, wherein transfer beams II are used to connect the center section and top layer portion Flexible hinge distressed structures of the X divided to both ends.

2. the big stroke mini positioning platform of Three Degree Of Freedom according to claim 1, it is characterised in that one along moving platform The L-square reed-type flexible hinge and two L-squares being arranged symmetrically along the symmetrical direction of principal axis of moving platform of symmetrical direction of principal axis arrangement The bottom of reed-type flexible hinge is provided with the connecting rod at connection flexible hinge leaf spring opening both ends.

3. the big stroke mini positioning platform of Three Degree Of Freedom according to claim 1, it is characterised in that be provided with the bottom plate Positioning hole.

4. the big stroke mini positioning platform of Three Degree Of Freedom according to claim 1, it is characterised in that described two voice coil motors Driver is mutually perpendicular to.

5. the big stroke mini positioning platform of Three Degree Of Freedom according to claim 1, it is characterised in that described two piezoelectric ceramics Driver is parallel to each other.