CN103727364A - Three-freedom-degree precision locating platform - Google Patents
Three-freedom-degree precision locating platform Download PDFInfo
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- CN103727364A CN103727364A CN201410008167.2A CN201410008167A CN103727364A CN 103727364 A CN103727364 A CN 103727364A CN 201410008167 A CN201410008167 A CN 201410008167A CN 103727364 A CN103727364 A CN 103727364A
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- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 abstract description 9
- 230000003321 amplification Effects 0.000 abstract description 6
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 6
- 238000013519 translation Methods 0.000 abstract description 5
- 230000014616 translation Effects 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000005489 elastic deformation Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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Abstract
本发明公开了一种三自由度精密定位平台，包括基座和设置在其内部的动平台，基座和动平台通过三个沿动平台的周向均布的铰链放大机构和三个板形柔性铰链机构连接；每个铰链放大机构的一端与基座柔性连接，另一端和动平台柔性连接，中部设有一输入端，输入端与压电陶瓷驱动器连接；每个板形柔性铰链机构包括一块弧形柔性板和垂直固定在其上的1～5块径向柔性板。本发明能够实现两平动一转动，结构简单紧凑；利用铰链放大机构进行位移放大和力的传递，使得板形柔性铰链机构发生弹性变形，从而带动动平台运动，实现微纳米位移的输出，输出位移较大，轴向刚度较高；可作为纳米微操作系统的辅助定位平台实现微量进给和精密定位。
The invention discloses a three-degree-of-freedom precision positioning platform, which includes a base and a moving platform arranged inside it, and the base and the moving platform pass through three hinge amplification mechanisms uniformly distributed along the circumference of the moving platform and three plate-shaped flexible hinges Mechanism connection; one end of each hinge amplification mechanism is flexibly connected to the base, the other end is flexibly connected to the moving platform, and an input end is provided in the middle, and the input end is connected to the piezoelectric ceramic driver; each plate-shaped flexible hinge mechanism includes an arc A flexible board and 1 to 5 radial flexible boards vertically fixed on it. The invention can realize two translations and one rotation, and has a simple and compact structure; the hinge amplification mechanism is used for displacement amplification and force transmission, so that the plate-shaped flexible hinge mechanism undergoes elastic deformation, thereby driving the moving platform to move, realizing the output of micro-nano displacement, output Large displacement and high axial stiffness; it can be used as an auxiliary positioning platform for nano-micro operating systems to achieve micro-feeding and precise positioning.
Description
Technical field
The invention belongs to nanometer technique field, be specially a kind of two translations one that can be applicable to micro OS and rotate three-degree of freedom flexible precision positioning working platform.
Background technique
Along with scientific and technological development, in fields such as ultraprecise processing, microelectronic engineering, bioengineering, nanometer technologies all in the urgent need to the even nano level precision positioning technology of submicron order.Most typical application is the manufacture production of nano-device.Nano-device comprises nano electron device and nano photoelectric device, can be widely used in electronics, optics, micro-mechanical device, novel computer etc., being research field the most dynamic in current new material and new unit research field, is also components and parts miniaturization, intellectuality, highly integrated etc. mainstream development direction.Nano-device is worth owing to having potential great market and national defence, makes the method, approach, technique etc. of its Design and manufacture become the focus of numerous scientists, government and large enterprise's research and investment.So greatly develop precision positioning technology, being trend of the times, is the progressive imbody of Creative Science and Technology Co. Ltd.
But micro/nano level precisely locating platform is mainly in the majority with two-freedom translation at present, even if the three freedom precision positioning platform of design also has the defects such as complex structure, stroke is little, axial carrying capacity is lower, be difficult to meet the demand of practical application.
Summary of the invention
The present invention provides a kind of simple and compact for structure, stroke is large, axial carrying capacity is higher a kind of three freedom precision positioning platform for solving the technical problem existing in known technology.
The technological scheme that the present invention takes for the technical problem existing in solution known technology is: a kind of three freedom precision positioning platform, comprise pedestal and the moving platform of the portion that sets within it, described pedestal is connected with three plate shape flexure hinge mechanisms by three circumferential uniform hinge enlargers along described moving platform with described moving platform, one end of each described hinge enlarger and described pedestal flexibly connect, the other end and described moving platform flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator with ball joint by flexible hinge, described piezoelectric ceramic actuator is arranged on described pedestal, described piezoelectric ceramic actuator is along the radially setting of described moving platform, on the output terminal of described piezoelectric ceramic actuator, be connected with described ball joint, described ball joint contacts with described flexible hinge is tangent, described flexible hinge is fixed on the input end of described hinge enlarger, each described plate shape flexure hinge mechanism comprises an arc flexible board and is vertically fixed on 1～5 block of radial compliance plate on it, described arc flexible board is along the circumferential setting of described moving platform, the two ends of described arc flexible board are fixed on described pedestal, and the inner of described radial compliance plate is fixed on described moving platform, three described plate shape flexure hinge mechanisms and three described piezoelectric ceramic actuators uniformly at intervals week of described moving platform upwards.
Described moving platform is disc.
On every described arc flexible board, be fixed with 2～3 blocks of uniform described radial compliance plates.
On described pedestal, be provided with positioning hole.
Advantage and good effect that the present invention has are: by adopting, disc moving platform is arranged on to base interior, and three hinge enlargers and three plate shape flexure hinge mechanisms that the two is evenly arranged by interval link together, and the structure of input end is set on hinge enlarger, realize two translation one rotations, simple and compact for structure; Utilize hinge enlarger to carry out the transmission of displacement amplification and power, make plate shape flexure hinge mechanism generation resiliently deformable, thereby drive moving platform motion, realize the output of micro-nano displacement, output displacement is larger, and axial rigidity is higher; The assist location platform that can be used as nanometer micro OS is realized microfeed and precision positioning.For the manufacture of nano-device, produce effective supplementary means is provided, there is very important application value.
Accompanying drawing explanation
Fig. 1 is plan view of the present invention;
Fig. 2 is stereogram of the present invention.
In figure: 1-piezoelectric ceramic actuator, 2-ball joint, 3-pretension bolt, 4-flexible hinge, 5-hinge enlarger, 6-plate shape flexible hinge, 6-1, arc flexible board, 6-2, radial compliance plate, 7-moving platform, 8-positioning hole, 9-pedestal.
Embodiment
For further understanding summary of the invention of the present invention, Characteristic, hereby exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
Refer to Fig. 1 and Fig. 2, a kind of three freedom precision positioning platform, the moving platform 7 that comprises pedestal 9 and the portion that sets within it, described pedestal is connected with three plate shape flexure hinge mechanisms 6 by three circumferential uniform hinge enlargers 5 along described moving platform with described moving platform 7, one end of each described hinge enlarger 5 and described pedestal 9 flexibly connect, the other end and described moving platform 7 flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator 1 with ball joint 5 by flexible hinge 4, described piezoelectric ceramic actuator 1 is arranged on described pedestal 9, described piezoelectric ceramic actuator 1 is along the radially setting of described moving platform 7, on the output terminal of described piezoelectric ceramic actuator 1, be connected with described ball joint 2, described ball joint 2 and tangent contact of described flexible hinge 4, described flexible hinge 4 is fixed on the input end of described hinge enlarger 5, each described plate shape flexure hinge mechanism 6 comprises an arc flexible board 6-1 and is vertically fixed on 1～5 radial compliance plate 6-2 on it, described arc flexible board 6-1 is along the circumferential setting of described moving platform 7, the two ends of described arc flexible board 6-1 are fixed on described pedestal 9, the inner of described radial compliance plate 6-2 is fixed on described moving platform 7, and the outer end of described radial compliance plate 6-2 is fixed on arc flexible board 6-1, three described plate shape flexure hinge mechanisms 6 and three described piezoelectric ceramic actuators 1 uniformly at intervals week of described moving platform 7 upwards.In order to make structure compacter, described moving platform 7 preferably adopts discoidal.Due to the number of radial compliance plate 6-2 and effective travel and the axial carrying capacity of disc moving platform 7 closely bound up, increasing of radial compliance plate 6-2 number will improve the bearing capacity of moving platform 7, but its effective travel can to a certain degree reduce; And the minimizing of radial compliance plate 6-2 number, although can increase the effective travel of moving platform 7, its axial carrying capacity but can reduce to a certain extent.So, consider effective travel and the bearing capacity of moving platform 7, preferably scheme is: on every described arc flexible board 6-1, be fixed with 2～3 uniform described radial compliance plate 6-2.
In the present embodiment, on described pedestal 9, be provided with positioning hole 8.Center take moving platform 7 on described pedestal 9 arranges three grooves on the same circumference in the center of circle, and angle is respectively 120 ° between two.Three piezoelectric ceramic actuators 1 are arranged on respectively in three grooves, piezoelectric ceramic actuator 1 is provided with pretension bolt 3, pretension bolt 3 is arranged on pedestal 9, be used for guaranteeing that piezoelectric ceramic actuator 1 is not separation with hinge enlarger 5 with pedestal 9, the output terminal of piezoelectric ceramic actuator 1 is threaded connection spherical joint 2, spherical joint withstands on flexible hinge 4 curved walls, and the two is tangent, to realize a hertz contact.Hinge enlarger 5 is according to lever amplification principle design, and two ends are realized and being flexibly connected with pedestal 9 and moving platform 7 respectively.On hinge enlarger, be designed with flexible hinge 4, contact with the spherical joint 2 being connected on piezoelectric ceramic actuator 1 output terminal, realize transition and the buffer function of transmitting input displacement and power.Plate shape flexure hinge mechanism 6 is comprised of 4 flexible boards, wherein the two ends of arc flexible board 6-1 are connected with pedestal 9, one end of 3 radial compliance plate 6-2 is connected on flexible board 1, the other end is connected on moving platform 7, three plate shape flexure hinge mechanisms 6 are arranged in center take moving platform 7 on the same circumference in the center of circle, angle is 120 ° between two, and with the angle of piezoelectric ceramic actuator 1 be 60 °.Moving platform 7 is realized and being connected with pedestal 9 with three plate shape flexure hinge mechanisms 6 by three hinge enlargers 5, has improved moving platform 7 axial carrying capacities.
The working procedure that the present invention realizes: by the control voltage signal of computer export, order about piezoelectric ceramic actuator 1 and produce fore and aft motion according to the movement locus of specifying, through transition and the buffering of flexible hinge 4, act on hinge enlarger 5, making to input displacement is amplified, by overcoming the elastic force of plate shape flexure hinge mechanism 6, reaching, make moving platform 7 produce the effect of displacement output.By controlling the elongation of three piezoelectric ceramic actuators 1, can realize the control of moving platform 7 different positions and poses, realize along the translation of plane both direction with around the rotation of vertical shaft; When the elongation of three piezoelectric ceramic actuators 1 is identical, realize the pure rotation of moving platform 7.
Although by reference to the accompanying drawings the preferred embodiments of the present invention are described above; but the present invention is not limited to above-mentioned embodiment; above-mentioned embodiment is only schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present invention; not departing from the scope situation that aim of the present invention and claim protect, can also make a lot of forms, within these all belong to protection scope of the present invention.
Claims (4)
1. a three freedom precision positioning platform, it is characterized in that, comprise pedestal and the moving platform of the portion that sets within it, described pedestal is connected with three plate shape flexure hinge mechanisms by three circumferential uniform hinge enlargers along described moving platform with described moving platform;
One end of each described hinge enlarger and described pedestal flexibly connect, the other end and described moving platform flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator with ball joint by flexible hinge, described piezoelectric ceramic actuator is arranged on described pedestal, described piezoelectric ceramic actuator is along the radially setting of described moving platform, on the output terminal of described piezoelectric ceramic actuator, be connected with described ball joint, described ball joint contacts with described flexible hinge is tangent, described flexible hinge is fixed on the input end of described hinge enlarger,
Each described plate shape flexure hinge mechanism comprises an arc flexible board and is vertically fixed on 1～5 block of radial compliance plate on it, described arc flexible board is along the circumferential setting of described moving platform, the two ends of described arc flexible board are fixed on described pedestal, and the inner of described radial compliance plate is fixed on described moving platform;
Three described plate shape flexure hinge mechanisms and three described piezoelectric ceramic actuators uniformly at intervals week of described moving platform upwards.
2. three freedom precision positioning platform according to claim 1, is characterized in that, described moving platform is disc.
3. three freedom precision positioning platform according to claim 1, is characterized in that, is fixed with 2～3 blocks of uniform described radial compliance plates on every described arc flexible board.
4. three freedom precision positioning platform according to claim 1, is characterized in that, on described pedestal, is provided with positioning hole.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410008167.2A CN103727364B (en) | 2014-01-03 | 2014-01-03 | A three-degree-of-freedom precision positioning platform |
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| CN201410008167.2A CN103727364B (en) | 2014-01-03 | 2014-01-03 | A three-degree-of-freedom precision positioning platform |
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| CN103727364B CN103727364B (en) | 2015-11-18 |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103104793A (en) * | 2013-01-25 | 2013-05-15 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN104599722A (en) * | 2014-11-27 | 2015-05-06 | 天津三英精密仪器有限公司 | Flexible hinge based flexible dynamic coupling connection fixing mechanism |
| CN105244061A (en) * | 2015-10-13 | 2016-01-13 | 天津大学 | Pressure-controllable large-stroke micro-locating platform based on stick-slip drive |
| CN106363615A (en) * | 2016-10-31 | 2017-02-01 | 天津大学 | Horizontal type six-freedom-degree micro-nano operating device |
| GB2541171A (en) * | 2015-07-29 | 2017-02-15 | Skf Ab | A device for adjusting the positioning of an apparatus relative to a foundation in a shaft alignment process and a method thereof |
| CN106710637A (en) * | 2016-11-30 | 2017-05-24 | 南京航空航天大学 | Micrometric displacement positioning mechanism based on piezoelectric stack |
| CN106838566A (en) * | 2016-11-23 | 2017-06-13 | 南京航空航天大学 | The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives |
| CN107689248A (en) * | 2017-09-19 | 2018-02-13 | 苏州迈客荣自动化技术有限公司 | A kind of micromotion platform |
| CN109079766A (en) * | 2018-11-12 | 2018-12-25 | 广东工业大学 | A kind of Three-degree-of-freedom motion platform based on flexible amplification mechanism |
| CN109531546A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of normal direction two degrees of freedom micromotion platform |
| CN111720442A (en) * | 2020-06-29 | 2020-09-29 | 青岛科技大学 | a gas static bearing |
| CN111749980A (en) * | 2020-06-29 | 2020-10-09 | 青岛科技大学 | A hydrodynamic bearing |
| CN112865592A (en) * | 2020-12-31 | 2021-05-28 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
| CN113669362A (en) * | 2021-08-10 | 2021-11-19 | 青岛科技大学 | A Tilting Pad Bearing Actively Controlling Oil Film Gap |
| CN113669369A (en) * | 2021-08-10 | 2021-11-19 | 青岛科技大学 | Active control gas tilting pad bearing |
| CN113669361A (en) * | 2021-08-10 | 2021-11-19 | 青岛科技大学 | Tilting pad bearing capable of actively controlling radial clearance |
| CN114992453A (en) * | 2022-06-07 | 2022-09-02 | 重庆大学 | Controllable plane high-precision flexible displacement platform with high load and large stroke |
| CN115566930A (en) * | 2022-11-10 | 2023-01-03 | 吉林大学 | Large-stroke piezoelectric actuator capable of outputting continuous angular displacement |
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| CN103104793B (en) * | 2013-01-25 | 2015-03-11 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
| CN103104793A (en) * | 2013-01-25 | 2013-05-15 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
| CN104599722B (en) * | 2014-11-27 | 2017-12-26 | 须颖 | It is a kind of to be connected mechanism based on flexible hinge chain flexibility Dynamic Coupling |
| CN104599722A (en) * | 2014-11-27 | 2015-05-06 | 天津三英精密仪器有限公司 | Flexible hinge based flexible dynamic coupling connection fixing mechanism |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| GB2541171A (en) * | 2015-07-29 | 2017-02-15 | Skf Ab | A device for adjusting the positioning of an apparatus relative to a foundation in a shaft alignment process and a method thereof |
| CN105244061A (en) * | 2015-10-13 | 2016-01-13 | 天津大学 | Pressure-controllable large-stroke micro-locating platform based on stick-slip drive |
| CN106363615B (en) * | 2016-10-31 | 2019-02-26 | 天津大学 | A horizontal six-degree-of-freedom micro-nano manipulator |
| CN106363615A (en) * | 2016-10-31 | 2017-02-01 | 天津大学 | Horizontal type six-freedom-degree micro-nano operating device |
| CN106838566A (en) * | 2016-11-23 | 2017-06-13 | 南京航空航天大学 | The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives |
| CN106710637A (en) * | 2016-11-30 | 2017-05-24 | 南京航空航天大学 | Micrometric displacement positioning mechanism based on piezoelectric stack |
| CN107689248A (en) * | 2017-09-19 | 2018-02-13 | 苏州迈客荣自动化技术有限公司 | A kind of micromotion platform |
| CN109079766A (en) * | 2018-11-12 | 2018-12-25 | 广东工业大学 | A kind of Three-degree-of-freedom motion platform based on flexible amplification mechanism |
| CN109079766B (en) * | 2018-11-12 | 2023-08-22 | 广东工业大学 | A three-degree-of-freedom motion platform based on flexible amplification mechanism |
| CN109531546A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of normal direction two degrees of freedom micromotion platform |
| CN109531546B (en) * | 2018-12-25 | 2024-05-31 | 西交利物浦大学 | Micro-motion platform with normal two degrees of freedom |
| CN111720442A (en) * | 2020-06-29 | 2020-09-29 | 青岛科技大学 | a gas static bearing |
| CN111749980A (en) * | 2020-06-29 | 2020-10-09 | 青岛科技大学 | A hydrodynamic bearing |
| CN112865592B (en) * | 2020-12-31 | 2022-06-24 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
| CN112865592A (en) * | 2020-12-31 | 2021-05-28 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
| CN113669362A (en) * | 2021-08-10 | 2021-11-19 | 青岛科技大学 | A Tilting Pad Bearing Actively Controlling Oil Film Gap |
| CN113669369A (en) * | 2021-08-10 | 2021-11-19 | 青岛科技大学 | Active control gas tilting pad bearing |
| CN113669361A (en) * | 2021-08-10 | 2021-11-19 | 青岛科技大学 | Tilting pad bearing capable of actively controlling radial clearance |
| CN113669361B (en) * | 2021-08-10 | 2023-03-14 | 青岛科技大学 | Tilting pad bearing capable of actively controlling radial clearance |
| CN113669362B (en) * | 2021-08-10 | 2023-03-14 | 青岛科技大学 | Tilting pad bearing capable of actively controlling oil film gap |
| CN114992453A (en) * | 2022-06-07 | 2022-09-02 | 重庆大学 | Controllable plane high-precision flexible displacement platform with high load and large stroke |
| CN114992453B (en) * | 2022-06-07 | 2024-02-27 | 重庆大学 | Controllable plane high-precision flexible displacement platform with high load and large stroke |
| CN115566930A (en) * | 2022-11-10 | 2023-01-03 | 吉林大学 | Large-stroke piezoelectric actuator capable of outputting continuous angular displacement |
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