CN105643604B - A kind of submissive system of four-degree-of-freedom fine motion - Google Patents

Abstract

The invention discloses a four-degree-of-freedom micro-motion compliance system. The moving platform has four degrees of freedom DxDyRxRy, which can be applied in specific fields such as micro-electromechanical systems, ultra-precision processing and manufacturing, aerospace and the like. Its specific structure includes a compliant module with two rotational degrees of freedom Rx and Ry and an Awtar compliant platform capable of realizing two translational degrees of freedom Dx and Dy; the compliant module with two rotational degrees of freedom consists of a compliant sliding hinge, a compliant Hooke hinge and driving elements and other components, mounted on the middle platform of the Awtar mechanism; the Awtar platform provides translational motion of DxDy two degrees of freedom through parallel smooth sliding hinges. The invention realizes the complete decoupling of translation and rotation, which can be driven separately; a flexible sliding hinge is used in the four peripheral legs of the two-degree-of-freedom compliant module, which can realize large axial changes, among which The two adjacent ones are used as active legs, and are equipped with drive elements to realize rotation.

Description

A four-degree-of-freedom micro-motion compliance system

technical field

The invention belongs to the technical fields of micro-electro-mechanical systems, ultra-precision machining and manufacturing, aerospace and the like, and in particular relates to a four-degree-of-freedom micro-motion compliance system.

Background technique

With the development of science and technology, micro-nano related technologies have been widely used in many fields such as micro-electromechanical systems, ultra-precision machining and manufacturing, medical equipment, optical engineering, aerospace and bioengineering, among which precision micro Positioning and adjusting devices is an important research direction. At present, researchers have developed more and more systems with micro-nano-level positioning and adjustment functions to meet different needs, and some have been applied in the fields of micro-electromechanical systems, large-scale integrated circuits, and biology and micromedicine. important role. But there is no mature configuration and system design method for two-rotation, two-translation four-degree-of-freedom precision positioning device.

The friction and clearance factors in the kinematic pairs of traditional rigid mechanisms make it impossible to effectively realize the operation of micro-nano precision, and the assembly of many parts not only makes the mechanism complicated and inconvenient to maintain, but also makes the volume relatively large and inconvenient to move. development in the direction of miniaturization. As a structure that uses material deformation to produce micro-displacement, the compliant mechanism has the advantages of integral molding, no assembly, no friction and wear on the hinge, no impact, vibration and noise, less maintenance, and high precision. These advantages are used in practical engineering applications. It can improve the precision and work efficiency, combined with high-precision drive technology such as piezoelectric ceramics and the application of new materials, the precision of the four-degree-of-freedom precision positioning and adjustment device can reach the nanometer level.

At present, the forms of 4-DOF micro-motion parallel mechanism disclosed at home and abroad mainly include the following types: Zhang Jiangbo, Zhu Tao, Wang Yuechao,. Development of a 4-DOF micro-motion platform with nanometer positioning accuracy. Robotics, 2003 ,25(3):213～216. Introduced a new four-degree-of-freedom nano-micro-motion platform system, which uses piezoelectric elements to realize three translations of X, Y, Z and θ (around the horizontal axis) rotation There are four degrees of freedom. Duan Jianguo, Guo Zonghe, Wang Kejie. Structure and motion analysis of a new four-degree-of-freedom parallel mechanism. Journal of Shandong University of Technology (Natural Science Edition), 2008, 22(1): 23-27. A four-degree-of-freedom parallel mechanism is proposed, which can Realize translation in X, Y, and Z directions and rotation in the γ (horizontal axis) direction with a total of four degrees of freedom. Zhao Ran. Design and basic performance research of four-degree-of-freedom 4-RRUR parallel micro-motion robot. Yanshan University Master Thesis, 2010. A four-degree-of-freedom parallel robot capable of translation in X, Y, and Z directions and rotation around the Z axis is proposed. Institutional configuration. ZhenyuH, Zhixu Z, Zhihua X. Dimensional Synthesis of a 4-DOF Hybrid Driving Platform. Applied Mechanics and Materials, 2014, 441:543～547. Dimensional synthesis of a four-DOF parallel mechanism driven by a pneumatic unit, Caixia F, Hongzhao L, Gexia Y, et al.A Novel 2T2R4-DOF Parallel Manipulator.2011 Fourth International Symposium on KnowledgeAcquisition and Modeling,8-9 Oct.2011[C].Los Alamitos,CA,USA:IEEE Computer Society,2011.5～8.Proposed A parallel mechanism configuration that can realize two rotations and two translations is proposed, but each drive branch has too many hinges, which cannot realize precise micro-motion operation. Qinchuan L,Zhen H.Type synthesis of 4-DOFparallel manipulators[A].IEEE International Conference on Robotics and Automation.IEEE ICRA 2003 Conference Proceedings,14-19 Sept.2003[C].Piscataway,NJ,USA:IEEE,2003.755～760 . The configuration of the four-degree-of-freedom parallel mechanism is synthesized, but the configuration proposed by the present invention is not included.

The 4-DOF mechanism proposed in the above literature has the following deficiencies: 1) It cannot realize two translations of X and Y and two rotations around X and Y at the same time; 2) There are too many hinges in each driving branch, and it is difficult to realize the ultra-high precision of the mechanism Jog operation.

Contents of the invention

The purpose of the present invention is to provide a four-degree-of-freedom micro-motion compliance system, which aims to solve the problem that due to the existence of friction and gaps in the kinematic pairs of traditional rigid mechanism equipment such as CNC machine tools, the operation of micro-nano level precision cannot be effectively realized. Moreover, the assembly of many parts not only makes the mechanism complicated and inconvenient for maintenance, but also makes the volume relatively large and inconvenient for miniaturized applications.

The present invention is achieved in this way, a four-degree-of-freedom micro-motion compliance system, the four-degree-of-freedom micro-motion compliance system includes an Awtar compliance platform and a compliance module with two degrees of freedom Rx and Ry, and its connection mode is that the Awtar compliance platform is below , the compliant module with two degrees of freedom Rx and Ry is on the top, which is connected in series;

The compliant module with two degrees of freedom Rx and Ry is composed of a compliant sliding hinge, a compliant Hooke hinge and a driving element.

Further, the compliant module with two degrees of freedom of Rx and Ry is composed of five branches fixedly connected to the base and the supported rigid body moving platform, and the upper end of each branch is fixedly connected with the rigid body moving platform; the base It is fixedly connected with the Awtar compliant platform, and the whole micro-rotation platform is driven by the Awtar compliant platform for translational movement in the X and Y directions; the upper sections of each branch are compliant Hooke hinges, and the centers of the compliant Hooke hinges are at the same initial position. On the horizontal plane; the lower sections of the surrounding four outriggers are smooth sliding hinges.

Further, the compliant module with two degrees of freedom Rx and Ry is mounted on the middle platform of the Awtar compliant platform, that is, the base of the compliant module with two degrees of freedom Rx and Ry is fixedly connected with the moving platform in the middle of the Awtar compliant platform. A voice coil motor is installed in the base space of the Awtar compliant platform as a driver, and the base of the compliant module with two degrees of freedom Rx and Ry has slots, which are installed on the Awtar compliant platform to detect the actual translational displacement of the intermediate moving platform. device.

Further, the driving element is a piezoelectric ceramic or a voice coil motor.

The beneficial effects of the present invention are:

The four-degree-of-freedom micro-movement compliance system provided by the present invention mounts a compliance mechanism with a micro-rotational degree of freedom on the intermediate platform of the mechanism, which can be independently driven and four-degree-of-freedom micro-motion can be realized, and micro-nano-level positioning and Adjusted effect.

The present invention uses the compliant Hooke hinge and the compliant sliding hinge as compliant units to design the compliant structural configuration of the compliant rotating module, and combines with the compliant platform to obtain the entire compliant platform with four degrees of freedom; 4 degrees of freedom can be realized in practical engineering applications Micro-nano positioning and adjustment; the platform designed with flexible units avoids the complexity of many parts assembly of traditional rigid mechanisms, and is easy to maintain, small in size and convenient for miniaturized applications.

Description of drawings

Fig. 1 is a schematic structural diagram of a four-degree-of-freedom micro-motion compliance system provided by an embodiment of the present invention;

In the picture: 1. Awtar compliant platform; 2. compliant sliding hinge; 3. compliant Hooke hinge.

Fig. 2 is an assembly diagram of the flexible micro-motion four-degree-of-freedom platform provided by the embodiment of the present invention.

Fig. 3 is a three-dimensional view of the flexible platform provided by the embodiment of the present invention.

Fig. 4 is an assembly diagram of the flexible platform with two rotational degrees of freedom provided by the embodiment of the present invention.

Fig. 5 is a three-dimensional view of the flexible sliding hinge provided by the embodiment of the present invention.

Fig. 6 is a three-dimensional view of the flexible Hooke hinge provided by the embodiment of the present invention.

Detailed ways

In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

The application principle of the present invention will be further described below in conjunction with the accompanying drawings.

As shown in Figure 1, the four-degree-of-freedom micro-motion compliance system of the embodiment of the present invention includes an Awtar compliance platform 1 and a compliance module with two degrees of freedom Rx and Ry; It is composed of gram hinge 3 and driving components. Fig. 2 is an assembly drawing of the flexible micro-motion four-degree-of-freedom platform provided by the embodiment of the present invention; Fig. 3 is a three-dimensional view of the flexible platform provided by the embodiment of the present invention; Fig. 4 is a flexible platform with two rotation degrees of freedom provided by the embodiment of the present invention. Assembly drawing of the platform; FIG. 5 is a three-dimensional view of the flexible sliding hinge provided by the embodiment of the present invention; FIG. 6 is a three-dimensional view of the flexible Hooke hinge provided by the embodiment of the present invention.

The compliant module with two rotation degrees of freedom is composed of five branches fixedly connected with the base and the rigid body moving platform supported thereon, the upper end of each branch is fixedly connected with the rigid body moving platform; the base and The Awtar compliant platform 1 is fixedly connected, and the Awtar compliant platform 1 drives the entire micro-rotation platform to perform translational movement in the X and Y directions. The upper section of each branch is a compliant Hooke hinge 3 and the center of the compliant Hooke hinge 3 is on the same horizontal plane at the initial position; the lower section of the four surrounding legs is a compliant sliding hinge 2, which can A telescopic movement is generated on the upper side, where one edge leg in the X direction and one edge leg in the Y direction are active legs, and the other two edge legs are passive legs.

The compliant module with two degrees of freedom Rx and Ry is mounted on the middle platform of Awtar compliant platform 1, that is, the base of the compliant module with two degrees of freedom Rx and Ry is fixedly connected with the moving platform in the middle of Awtar compliant platform 1, so that DxDy translates The degree of freedom and the RxRy micro-rotational degree of freedom are completely decoupled, and can be driven independently. A compliant sliding hinge is used in the four legs around the compliant module of the rotational degree of freedom, which can provide axial deformation with a large stroke. A piezoelectric ceramic or a voice coil motor is installed in the middle space of the flexible sliding hinge of the active leg as a driving device, and a voice coil motor is installed in the base space of the Awtar flexible platform 1 as a driver, and the base of the rotating flexible module is opened There is a groove, leaving space for the sensor device installed on the Awtar compliant platform 1 to detect the actual translational displacement of the intermediate moving platform.

In Figure 1, the compliant module with two degrees of freedom Rx and Ry is mounted on the middle platform of the Awtar mechanism. The Awtar platform realizes the translation of DxDy two degrees of freedom, and the upper platform realizes the rotation of RxRy two degrees of freedom. This arrangement can realize the complete decoupling of translation and rotation, and can be driven separately. A flexible sliding hinge is used in the four peripheral legs of the upper platform, which can realize large axial changes, and the adjacent two are used as active legs, and are equipped with driving elements to realize rotation.

For those skilled in the art, various corresponding changes and modifications can be made according to the above technical solutions and ideas, and all these changes and modifications should be included in the protection scope of the claims of the present invention.

Claims (3)

1. A four-degree-of-freedom micro-motion compliance system, characterized in that, the four-degree-of-freedom micro-motion compliance system includes a compliance platform and a compliance module with two degrees of freedom Rx and Ry, and its connection mode is that the compliance platform is at the bottom, and Rx and The Ry two-degree-of-freedom compliant module is on the top, and the two are connected in series; The compliant module with two degrees of freedom Rx and Ry is composed of a compliant sliding hinge, a compliant Hooke hinge and a driving element; The compliant module with two degrees of freedom Rx and Ry is composed of five branches fixedly connected to the base and a supported rigid-body moving platform, and the upper end of each branch is fixedly connected with the rigid-body moving platform; the base and The compliant platforms are fixedly connected, and the compliant platform drives the entire micro-rotation platform to perform translational movement in the X and Y directions; the upper sections of each branch are compliant Hooke hinges, and the centers of the compliant Hooke hinges are on the same horizontal plane at the initial position; The lower segments of the four surrounding branches are smooth sliding hinges. 2. The four-degree-of-freedom micro-motion compliance system according to claim 1, wherein the compliance module with two degrees of freedom Rx and Ry is mounted on the middle platform of the compliance platform, and the compliance module of the two degrees of freedom Rx and Ry The base of the module is fixedly connected with the moving platform in the middle of the compliant platform. A voice coil motor is installed in the base space of the compliant platform as a driver. The base of the compliant module with two degrees of freedom Rx and Ry has slots, and the A sensor device that detects the actual translational displacement of the intermediate moving platform. 3. The four-degree-of-freedom micro-motion compliance system according to claim 1, wherein the driving element is a piezoelectric ceramic or a voice coil motor.