CN202785673U - Trichlorosilane synthesis system - Google Patents
Trichlorosilane synthesis system Download PDFInfo
- Publication number
- CN202785673U CN202785673U CN2012203976680U CN201220397668U CN202785673U CN 202785673 U CN202785673 U CN 202785673U CN 2012203976680 U CN2012203976680 U CN 2012203976680U CN 201220397668 U CN201220397668 U CN 201220397668U CN 202785673 U CN202785673 U CN 202785673U
- Authority
- CN
- China
- Prior art keywords
- gas
- trichlorosilane
- synthesis system
- tail gas
- ceramic element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a trichlorosilane synthesis system, which comprises a trichlorosilane synthesis device and tail gas treatment equipment, wherein the tail gas treatment equipment treats the synthesis tail gas from the trichlorosilane synthesis device, and the tail gas treatment equipment comprises a sedimentation device, a gas filter device, a condenser and an adsorption tower which are sequentially connected, the gas filter device is internally provided with a ceramic filter element and is used for filtering the synthesis tail gas from the sedimentation device and then conveying the synthesis tail gas to the condenser, the condenser is used for separating the filtered synthesis tail gas into liquid chlorosilane and gas hydrogen and hydrogen chloride, and the adsorption tower is used for adsorbing the gas hydrogen chloride to obtain the hydrogen. According to the system provided by the utility model, the gas filter device provided with the ceramic filter element is adopted, the filter device has the excellent characteristics of high temperature resistance and corrosion resistance, and the material quality is stable, so that the quality of a polycrystalline silicon product is not affected.
Description
Technical field
The utility model relates to production of polysilicon Technology field, and more specifically, the utility model relates to a kind of trichlorosilane synthesis system.
Background technology
China's present stage polysilicon project Technology all belongs to the Siemens process technology more than 85%, in this technological process, have numerous systems need to carry out gas filtration.Specifically have: producing trichloro hydrosilicon by hydrogenation of silicon tetrachloride system, trichlorosilane synthesis system, reduction tail gas dry process recovery system etc.
The general strainer that adopts is cloth envelop collector at present, and in process of production, finds that there is following several shortcoming in cloth envelop collector:
1, the cloth envelop collector resistance to elevated temperatures is poor.Especially in trichlorosilane synthesis system and producing trichloro hydrosilicon by hydrogenation of silicon tetrachloride system, find that cloth envelop collector is very easy to breakage occur, cause the filter effect degradation, finally cause follow-up system to stop up;
2, cloth envelop collector is damaged easily, rolls up with regard to causing the Dust Capacity in the gas, finally causes quality product to occur declining to a great extent;
3, cloth envelop collector is expensive, and the filter material of at present import is converted on the finished product filter bag, and every square metre of price reaches more than 1000 yuan;
4, the filter material poor corrosion resistance of cloth envelop collector, simultaneously strut member easily corrosion in maintenance process cause the maintenance difficulty, and the cost of overhaul is high.
The utility model content
The utility model one of is intended to solve the problems of the technologies described above at least to a certain extent or provides at least a kind of useful commerce to select.
For this reason, a purpose of the present utility model is to propose that a kind of combined coefficient is high, cost is low, the trichlorosilane synthesis system of good product quality.
Trichlorosilane synthesis system according to the utility model example, comprise trichlorosilane synthesizer and tail gas treatment device, described tail gas treatment device will carry out vent gas treatment from the synthesis tail gas of described trichlorosilane synthesizer, described tail gas treatment device comprises the sedimentation device that connects successively, gas-filtering device, condenser and adsorption tower, wherein, be provided with ceramic element in the described gas-filtering device, and described gas-filtering device flows to described condenser after being used for filtering from the synthesis tail gas of described sedimentation device, synthesis tail gas after described condenser is used for filtering is separated into the chlorosilane of liquid and hydrogen and the hydrogenchloride of gaseous state, described adsorption tower is used for adsorptive gaseous hydrogenchloride, to obtain hydrogen.
According to the trichlorosilane synthesis system of the utility model example, owing to adopt the gas-filtering device that is provided with ceramic element, this filtration unit has high temperature resistant, and corrosion resistant good characteristic, and stable material quality can not impact the polysilicon product quality; Ceramic element can produce the filter core of different accuracy, and the ceramic element moulding be simple according to the requirement of filtering accuracy, and scale operation is easy, and is cheap.
Described gas-filtering device comprises the upper cover that connects successively from top to bottom, vertical tube part and lower cover, wherein, the top of described filtration unit is provided with for the air outlet of discharging the gas after filtering and bottom and is provided with for the slag-drip opening of discharging waste residue, the bottom of described vertical tube part is provided with for the inlet mouth that imports gas to be filtered in described straight tube, and the top of described inlet mouth is provided with filter house, described filter house comprises the floral disc that is provided with through hole and is located at ceramic element in the described through hole, described gas-filtering device for the treatment of technique of trichlorosilane synthetic tail gas also comprises: heat exchange jacket, described heat exchange jacket is located at the outside of described vertical tube part, and the bottom of described heat exchange jacket is provided with the heat transferring medium import and top is provided with the heat transferring medium outlet.
Described through hole is a plurality of, and described a plurality of through holes are equipped with described ceramic element along the radial and axial even distribution of described floral disc in each described through hole.
The number of described through hole and described ceramic element is configured to flow rate control with described gas at 0.01～0.2m/s.
Described ceramic element is fixed on the described floral disc by fastening piece, described fastening piece comprises set collar and gland, described set collar be welded on the described floral disc and the endoporus of described set collar corresponding with described through hole, described gland snaps onto the top of described ceramic element and is connected that with described set collar described ceramic element is fixed in the described through hole.
Described ceramic element is the aluminum oxide filter core.
The filtering accuracy of described aluminum oxide filter core is 800～1500 orders.
Also be provided with air inlet endless tube and traverse baffle in the described vertical tube part, described air inlet endless tube is connected with described inlet mouth, and described traverse baffle is between described ceramic element and described air inlet endless tube.
Be interval with equably a plurality of outlets on the described air inlet endless tube, and described traverse baffle has a plurality ofly, described a plurality of traverse baffles rise and evenly distribute on the circumferential direction of described vertical tube part along the spiral inner wall of described vertical tube part.
Described vertical tube part is provided with access hole, and described access hole is positioned at the top of described filter house.
Described air outlet is located at the top of described upper cover and the bottom that described slag-drip opening is located at described lower cover.
Additional aspect of the present utility model and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Description of drawings
Above-mentioned and/or additional aspect of the present utility model and advantage are from obviously and easily understanding becoming the description of example in conjunction with following accompanying drawing, wherein:
Fig. 1 is the trichlorosilane synthesis system synoptic diagram according to the utility model example;
Fig. 2 is the gas-filtering device structural representation according to the utility model example;
Fig. 3 is the gas-filtering device ceramic element distribution schematic diagram according to the utility model example;
Fig. 4 is the gas-filtering device ceramic element fastening piece synoptic diagram according to the utility model example;
Fig. 5 is the schematic flow sheet according to the treatment process of the technique of trichlorosilane synthetic tail gas of the utility model example;
Fig. 6 is the trichlorosilane synthesis system treatment scheme synoptic diagram according to the utility model example.
Embodiment
The below describes example of the present utility model in detail, and the example of described example is shown in the drawings, and wherein identical or similar label represents identical or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the example that is described with reference to the drawings, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " " center "; " vertically "; " laterally "; " length "; " width "; " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only be for convenience of description the utility model and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " only are used for describing purpose, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the present utility model, the implication of " a plurality of " is two or more, unless clear and definite concrete restriction is arranged in addition.
In the utility model, unless clear and definite regulation and restriction are arranged in addition, broad understanding should be done in the terms such as term " installation ", " linking to each other ", " connection ", " fixing ", for example, can be to be fixedly connected with, and also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can indirectly link to each other by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be the concrete meaning of above-mentioned term in the utility model.
In the utility model, unless clear and definite regulation and restriction are arranged in addition, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, can comprise that also the first and second features are not directly contacts but by the other feature contact between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that the First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that the First Characteristic level height is less than Second Characteristic.
The below at first describes according to trichlorosilane synthesis system of the present utility model in conjunction with Fig. 1.
As shown in Figure 1, trichlorosilane synthesis system according to the utility model example comprises trichlorosilane synthesizer and tail gas treatment device, described tail gas treatment device will carry out vent gas treatment from the synthesis tail gas of described trichlorosilane synthesizer, described tail gas treatment device comprises sedimentation device 50, gas-filtering device 60, condenser 70 and the adsorption tower 80 that connects successively
Wherein, be provided with ceramic element in the gas-filtering device 60, and gas-filtering device 60 flows to condenser 70 after being used for filtering from the synthesis tail gas of sedimentation device 50, synthesis tail gas after condenser 70 is used for filtering is separated into the chlorosilane of liquid and hydrogen and the hydrogenchloride of gaseous state, adsorption tower 80 is used for adsorptive gaseous hydrogenchloride, to obtain hydrogen.
According to the trichlorosilane synthesis system of the utility model example, owing to adopt the gas-filtering device that is provided with ceramic element, this filtration unit has high temperature resistant, and corrosion resistant good characteristic, and stable material quality can not impact the polysilicon product quality; Ceramic element can produce the filter core of different accuracy, and the ceramic element moulding be simple according to the requirement of filtering accuracy, and scale operation is easy, and is cheap, can filter by this system and obtain the higher hydrogen of purity.
Specifically describe gas-filtering device in the above-mentioned example below in conjunction with accompanying drawing.
As shown in Figure 2, preferably, this gas-filtering device can comprise: the upper cover 10, vertical tube part 20, lower cover 30 and the heat exchange jacket 40 that connect successively from top to bottom.
Wherein, the top of described gas-filtering device is provided with for the air outlet 11 of discharging the gas after filtering and bottom and is provided with for the slag-drip opening 31 of discharging waste residue, the bottom of vertical tube part 20 is provided with for the inlet mouth 21 that imports gas to be filtered in described straight tube, and the top of inlet mouth 21 is provided with filter house, filter house comprises the floral disc 22 that is provided with through hole and is located at ceramic element 23 in the through hole, heat exchange jacket 40 is located at the outside of vertical tube part 20, and the bottom of heat exchange jacket 40 is provided with heat transferring medium import 41 and top is provided with heat transferring medium outlet 42.
Thus, according to the above-mentioned gas filtration unit, owing to adopted ceramic element 23, so that gas-filtering device has is high temperature resistant, corrosion resistant good characteristic, and stable material quality can not impact the polysilicon product quality; Ceramic element 23 can produce the filter core of different accuracy, and ceramic element 23 moulding be simple according to the requirement of filtering accuracy, and scale operation is easy, and is cheap; The gas-filtering device outside is provided with heat exchange jacket 40, can guarantee filtration temperature, effectively prevents the condensation of gas, can prevent effectively that also portion temperature is too high, causes the damage of built-in fastening piece.
Further contemplate cost and mass production problem, in one example, preferably, ceramic element 23 is the aluminum oxide filter core.Thus, the ceramic element 23 of this material both can satisfy high temperature resistant, corrosion resistant requirement, and easily scale operation, can further reduce production costs.
In one example, as shown in Figure 3, through hole is a plurality of, and a plurality of through holes are equipped with ceramic element 23 along the radial and axial even distribution of floral disc 22 in each through hole.Thus, by a plurality of through holes are set, can filter the duct separately, arrange that according to the size of heat interchanging area and floral disc 22 ceramic element 23 reaches filter effect, avoiding appearance filtration duct to stop up is whole out of use situation, improves the practicality of filtration unit.
Consider the problem of gas volume and filtration area, in one example, the number of through hole and ceramic element 23 is configured to flow rate control with described gas at 0.01～0.2m/s.Thus, gas is filtered more fully.
In one example, as shown in Figure 4, ceramic element 23 is fixed on the floral disc 22 by fastening piece, described fastening piece comprises set collar 241 and gland 242, set collar 241 be welded on the floral disc 22 and the endoporus of set collar 241 corresponding with through hole, gland 242 snaps onto the top of ceramic element 23 and is connected that with set collar 241 ceramic element 23 is fixed in the through hole.Thus, ceramic element 23 can be fixed on the floral disc 22, and fixed form is reasonable, conveniently dismantles, reduction maintenance difficulty is installed.
In one example, the filtering accuracy of described aluminum oxide filter core is 800～1500 orders.Thus, can filter out as required the larger dust of order number.
In one example, also be provided with air inlet endless tube 25 and traverse baffle 26 in the vertical tube part 20, air inlet endless tube 25 is connected with inlet mouth 21, and traverse baffle 26 is between ceramic element 26 and air inlet endless tube 25.Further, in one example, be interval with equably a plurality of outlets 251 on the air inlet endless tube 25, and traverse baffle 26 has a plurality ofly, a plurality of traverse baffles 26 rise and evenly distribute on the circumferential direction of vertical tube part 20 along the spiral inner wall of vertical tube part 20.Thus, air inlet endless tube 25 and traverse baffle 26 can guarantee effectively that air inlet is even, reach to promote the uniform purpose of filter element filtering, and simultaneously, the dust in the air-flow can part sedimentation under traverse baffle 26 effect, reaches the effect that alleviated the filter core load.
Advantageously, in one example, vertical tube part 20 is provided with access hole 27, and access hole 27 is positioned at the top of described filter house.Thus, by access hole 27 is set, can conveniently carry out trouble shooting, not need detaching equipment.
In one example, air outlet 11 is located at the top of upper cover 10 and the bottom that slag-drip opening 31 is located at lower cover 30.Thus, can so that the deslagging of filtration unit, save the process of detaching equipment.
The below is further combined with the flow process of Fig. 5 description according to the treatment process of technique of trichlorosilane synthetic tail gas in the trichlorosilane synthesis system of the present utility model.
Particularly, the treatment process of described technique of trichlorosilane synthetic tail gas may further comprise the steps:
A) described technique of trichlorosilane synthetic tail gas being carried out sedimentation processes, and the technique of trichlorosilane synthetic tail gas after sedimentation processed utilizes gas-filtering device to filter, to remove solid impurity wherein, wherein, described gas-filtering device is according to the described gas-filtering device of above-mentioned example.
B) technique of trichlorosilane synthetic tail gas after will filtering carries out condensation, with chlorosilane and the hydrogen of gaseous state and the mixture of hydrogenchloride that obtains liquid.
C) mixture with hydrogen and hydrogenchloride adsorbs by sorbent material, with absorption hydrogenchloride wherein, obtains high-purity hydrogen.
Owing to have above-mentioned technique effect according to the above-mentioned gas-filtering device of the utility model, therefore, the treatment process of above-mentioned technique of trichlorosilane synthetic tail gas also has corresponding technique effect, and can filter by this treatment process and to obtain the higher hydrogen of purity.
In order to guarantee the normal operation of filtration unit, improve filtration efficiency, preferably, the inlet air temperature that can control gas-filtering device is 250～300 ℃, and intake pressure is 0.05～0.3MPa, and charge flow rate is 500～2000Nm
3/ h.
Specifically describe treatment scheme according to trichlorosilane synthesis system of the present utility model below in conjunction with embodiment and accompanying drawing.
Embodiment 1
As shown in Figure 6, at first silica flour and hydrogenchloride being passed into trichlorosilane synthesizer, to carry out trichlorosilane synthetic, then synthesis tail gas is carried out sedimentation by sedimentation device 50 and gather dust to remove wherein high chlorosilane and solid impurity, the synthesis tail gas component is chlorosilane, hydrogen and hydrogenchloride.
Gas after sedimentation gathered dust passes into gas-filtering device 60 and filters, and the inlet air temperature of control gas-filtering device 60 is 250～300 ℃, and intake pressure is 0.05～0.3MPa, and charge flow rate is 500～2000Nm
3/ h, filtering accuracy are 800～1500 orders.
Gas passes into condenser 70 and carries out condensation after will filtering, and the synthesis tail gas after filtering is separated into the chlorosilane of liquid and hydrogen and the hydrogenchloride of gaseous state, it being passed into the adsorptive gaseous hydrogenchloride of adsorption tower 80, obtains high-purity hydrogen.High-purity hydrogen synthesizes and obtains hydrogenchloride, and hydrogenchloride can be used as raw material and silica flour, and to carry out trichlorosilane synthetic.
In the description of this specification sheets, the description of reference term " an embodiment example ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one example of the present utility model or the example in conjunction with specific features, structure, material or the characteristics of this example or example description.In this manual, the schematic statement of above-mentioned term not necessarily referred to identical example or example.And the specific features of description, structure, material or characteristics can be with suitable mode combinations in any one or more examples or example.
Although the above has illustrated and has described example of the present utility model, be understandable that, above-mentioned example is exemplary, can not be interpreted as restriction of the present utility model, those of ordinary skill in the art in scope of the present utility model, can change above-mentioned example in the situation that does not break away from principle of the present utility model and aim, modification, replacement and modification.
Claims (11)
1. trichlorosilane synthesis system, described synthesis system comprises trichlorosilane synthesizer and tail gas treatment device, described tail gas treatment device will carry out vent gas treatment from the synthesis tail gas of described trichlorosilane synthesizer, described tail gas treatment device comprises sedimentation device, gas-filtering device, condenser and the adsorption tower that connects successively, wherein
Be provided with ceramic element in the described gas-filtering device, and described gas-filtering device flows to described condenser after being used for filtering from the synthesis tail gas of described sedimentation device,
Synthesis tail gas after described condenser is used for filtering is separated into the chlorosilane of liquid and hydrogen and the hydrogenchloride of gaseous state,
Described adsorption tower is used for adsorptive gaseous hydrogenchloride, to obtain hydrogen.
2. trichlorosilane synthesis system according to claim 1 is characterized in that, described gas-filtering device comprises upper cover, vertical tube part and the lower cover that connects successively from top to bottom, wherein,
The top of described filtration unit is provided with for the air outlet of discharging the gas after filtering and bottom and is provided with for the slag-drip opening of discharging waste residue,
The bottom of described vertical tube part is provided with for the inlet mouth that imports gas to be filtered in described straight tube, and the top of described inlet mouth is provided with filter house, and described filter house comprises the floral disc that is provided with through hole and be located at ceramic element in the described through hole,
Described gas-filtering device for the treatment of technique of trichlorosilane synthetic tail gas also comprises:
Heat exchange jacket, described heat exchange jacket is located at the outside of described vertical tube part, and the bottom of described heat exchange jacket is provided with the heat transferring medium import and top is provided with the heat transferring medium outlet.
3. trichlorosilane synthesis system according to claim 2 is characterized in that, described through hole is a plurality of, and described a plurality of through holes are equipped with described ceramic element along the radial and axial even distribution of described floral disc in each described through hole.
4. trichlorosilane synthesis system according to claim 3 is characterized in that, the number of described through hole and described ceramic element is configured to flow rate control with described gas at 0.01～0.2m/s.
5. trichlorosilane synthesis system according to claim 2, it is characterized in that, described ceramic element is fixed on the described floral disc by fastening piece, described fastening piece comprises set collar and gland, described set collar be welded on the described floral disc and the endoporus of described set collar corresponding with described through hole, described gland snaps onto the top of described ceramic element and is connected that with described set collar described ceramic element is fixed in the described through hole.
6. trichlorosilane synthesis system according to claim 2 is characterized in that, described ceramic element is the aluminum oxide filter core.
7. trichlorosilane synthesis system according to claim 6 is characterized in that, the filtering accuracy of described aluminum oxide filter core is 800～1500 orders.
8. trichlorosilane synthesis system according to claim 2, it is characterized in that, also be provided with air inlet endless tube and traverse baffle in the described vertical tube part, described air inlet endless tube is connected with described inlet mouth, and described traverse baffle is between described ceramic element and described air inlet endless tube.
9. trichlorosilane synthesis system according to claim 8, it is characterized in that, be interval with equably a plurality of outlets on the described air inlet endless tube, and described traverse baffle has a plurality of, and described a plurality of traverse baffles rise and evenly distribution on the circumferential direction of described vertical tube part along the spiral inner wall of described vertical tube part.
10. trichlorosilane synthesis system according to claim 2 is characterized in that, described vertical tube part is provided with access hole, and described access hole is positioned at the top of described filter house.
11. trichlorosilane synthesis system according to claim 2 is characterized in that, described air outlet is located at the top of described upper cover and the bottom that described slag-drip opening is located at described lower cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203976680U CN202785673U (en) | 2012-08-10 | 2012-08-10 | Trichlorosilane synthesis system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203976680U CN202785673U (en) | 2012-08-10 | 2012-08-10 | Trichlorosilane synthesis system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202785673U true CN202785673U (en) | 2013-03-13 |
Family
ID=47812980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012203976680U Expired - Lifetime CN202785673U (en) | 2012-08-10 | 2012-08-10 | Trichlorosilane synthesis system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202785673U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102815706A (en) * | 2012-08-10 | 2012-12-12 | 中国恩菲工程技术有限公司 | Trichlorosilane synthesis system |
| CN104310406A (en) * | 2014-10-11 | 2015-01-28 | 江西赛维Ldk太阳能多晶硅有限公司 | Recovery device and recovery method for trichlorosilane synthetic tail gas |
-
2012
- 2012-08-10 CN CN2012203976680U patent/CN202785673U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102815706A (en) * | 2012-08-10 | 2012-12-12 | 中国恩菲工程技术有限公司 | Trichlorosilane synthesis system |
| CN104310406A (en) * | 2014-10-11 | 2015-01-28 | 江西赛维Ldk太阳能多晶硅有限公司 | Recovery device and recovery method for trichlorosilane synthetic tail gas |
| CN104310406B (en) * | 2014-10-11 | 2016-06-22 | 江西赛维Ldk太阳能多晶硅有限公司 | The retracting device of technique of trichlorosilane synthetic tail gas and recovery method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102814086B (en) | Gas filtering apparatus | |
| CN102716628B (en) | Grain de-dusting filter and de-dusting filtering method | |
| CN103553048A (en) | Method and system for cyclic utilization of materials during production of polycrystalline silicon | |
| CN202785673U (en) | Trichlorosilane synthesis system | |
| CN113247908B (en) | Separation method and separation device for chlorosilane in polysilicon production | |
| CN102814095B (en) | Processing method of tail gas of trichlorosilane synthesis | |
| CN202921105U (en) | Gas filter device | |
| CN102815670B (en) | Dry recovery system and method of reduction tail gas produced in polysilicon production process | |
| CN109078410A (en) | Air purifier | |
| CN102815705A (en) | System and method for preparing trichlorosilane through silicon tetrachloride cold hydrogenation | |
| CN202924720U (en) | Dry-process recovery system for reduction exhaust produced in polycrystalline silicone production technology | |
| CN202921106U (en) | Gas filter device for polycrystalline silicon production process | |
| CN104815501B (en) | A kind of multi-channel composite mist eliminator and its mist removal method | |
| CN202785675U (en) | System for preparing trichlorosilane through cold hydrogenation of silicon tetrachloride | |
| CN102815706A (en) | Trichlorosilane synthesis system | |
| CN102815711B (en) | Cold hydrogenation system for preparing trichlorosilane from silicon tetrachloride | |
| CN110079832B (en) | Aluminum electrolysis flue gas purification and waste heat recovery system and method | |
| CN102815709B (en) | Method for preparing trichlorosilane through silicon tetrachloride cold hydrogenation | |
| CN202988745U (en) | Cold hydrogenation system for preparing trichlorosilane from silicon tetrachloride | |
| CN102814084A (en) | Gas filtering apparatus used in polysilicon production technology | |
| CN206624799U (en) | Organic oxygen-containing compound olefin hydrocarbon apparatus | |
| CN202762229U (en) | Laminar flow type smoke and oil mist purification device in workshop | |
| CN202778186U (en) | Washing rectifying tower for treating trichlorosilane synthetic tail gas | |
| CN202390212U (en) | Device for treating silicon tetrachloride-containing solution | |
| CN202605936U (en) | Gas and solid separation equipment for producing gas-phase silicon dioxide |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130313 |
|
| CX01 | Expiry of patent term |