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CN202749676U - End-pumped dual-wavelength coaxial switching output laser device - Google Patents

End-pumped dual-wavelength coaxial switching output laser device Download PDF

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CN202749676U
CN202749676U CN 201220290040 CN201220290040U CN202749676U CN 202749676 U CN202749676 U CN 202749676U CN 201220290040 CN201220290040 CN 201220290040 CN 201220290040 U CN201220290040 U CN 201220290040U CN 202749676 U CN202749676 U CN 202749676U
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胡杰
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Shenyang Ligong University
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Abstract

本实用新型公开了一种端面泵浦双波长同轴切换输出激光器,包括激光源、转向镜、聚焦透镜、倍频晶体、准直镜、谐波分离镜、偏振旋转器。通过调Q方式产生线性偏振、高峰值功率准连续基频激光输出,然后输出的基频激光经过透镜聚焦到倍频晶体上并产生细小的光斑和高光功率密度,在倍频晶体后得到倍频激光输出。当在光路中插入偏振旋转器并移出谐波分离镜之后,基频激光的偏振方向旋转90度,激光器切换为基频激光输出,并通过相同的聚焦系统之后具有较为一致的聚焦参数。本实用新型可保证两种波长在切换输出时,系统效率最大化,可以广泛应用于工业加工、科研、医疗、军事等领域。

The utility model discloses an end-pumped dual-wavelength coaxial switching output laser, which comprises a laser source, a steering mirror, a focusing lens, a frequency doubling crystal, a collimating mirror, a harmonic separation mirror and a polarization rotator. Generate linearly polarized, high-peak-power quasi-continuous fundamental-frequency laser output through Q-switching, and then the output fundamental-frequency laser is focused on the frequency-doubling crystal through a lens to produce a small spot and high optical power density, and frequency doubling is obtained after the frequency-doubling crystal Laser output. When the polarization rotator is inserted in the optical path and the harmonic separation mirror is removed, the polarization direction of the fundamental frequency laser is rotated by 90 degrees, the laser switches to the fundamental frequency laser output, and has relatively consistent focusing parameters after passing through the same focusing system. The utility model can ensure that the system efficiency is maximized when the two wavelengths are switched for output, and can be widely used in fields such as industrial processing, scientific research, medical treatment, and military affairs.

Description

一种端面泵浦双波长同轴切换输出激光器An end-pumped dual-wavelength coaxial switching output laser

技术领域 technical field

本实用新型涉及激光技术领域,特别是涉及一种端面泵浦双波长同轴切换输出激光器。  The utility model relates to the field of laser technology, in particular to an end-pumped dual-wavelength coaxial switching output laser. the

背景技术 Background technique

目前市场上大部分的端泵激光器都是单一波长输出方式。这种方式结构紧凑,光束质量较好,效率较高;基于端泵技术的倍频激光大多采用腔内倍频方式,可以利用腔内的高功率密度获得较大的倍频激光输出,但是这种方式容易遇到纵模竞争导致的稳定性较差问题。为了满足对不同材料选择性的加工,通常需要不同波长的激光器。尤其是需要基频激光和倍频激光交替加工时,不得不使用两台激光器交替使用。系统复杂性较高,不仅增加了成本,还增加了工序。利用激光晶体自身的光谱特性制成的双波长激光器,可以获得两种基频激光波长输出,但不能获得倍频激光输出,且不能以交替切换方式输出两种波长的激光。少数大能量双波长或多波长激光器,利用腔外倍频、和频方式产生两种或多种波长激光的输出,但一般是不同波长的输出路径不同,并且各种波长是同时产生的,利用率较低。  Most end-pumped lasers currently on the market are single-wavelength output. This method has a compact structure, better beam quality, and higher efficiency; most frequency-doubling lasers based on end-pump technology use intracavity frequency doubling, which can use the high power density in the cavity to obtain a larger frequency-doubling laser output, but this This method is prone to poor stability caused by longitudinal mode competition. In order to meet the selective processing of different materials, lasers with different wavelengths are usually required. Especially when the fundamental frequency laser and frequency doubled laser are required to be alternately processed, two lasers have to be used alternately. The complexity of the system is high, which not only increases the cost, but also increases the process. The dual-wavelength laser made by using the spectral characteristics of the laser crystal itself can obtain two fundamental-frequency laser wavelength outputs, but cannot obtain frequency-doubled laser output, and cannot output two wavelength lasers in an alternate switching manner. A small number of high-energy dual-wavelength or multi-wavelength lasers use extra-cavity frequency doubling and sum-frequency methods to generate laser outputs of two or more wavelengths, but generally the output paths of different wavelengths are different, and various wavelengths are generated simultaneously. The rate is lower. the

实用新型内容 Utility model content

本实用新型的目的正是为了解决上述现有技术中所存在的诸如稳定性较差、效率不足和光束不同轴等问题而提供一种端面泵浦双波长同轴切换输出激光器。该激光器结构灵活简单,不受激光谐振腔设计结构的约束,采用聚焦倍频方式弥补了腔外倍频功率密度低于腔内倍频方式的缺点,可自由选择基频激光在倍频晶体上的聚焦束腰尺寸,以获得最佳的倍频转换效率。以基频激光偏振方向的方式控制倍频过程是否发生,不改变光束传播路径,不同波长以同轴方式传播,光束参数一致。  The purpose of this utility model is to provide an end-pumped dual-wavelength coaxial switching output laser in order to solve the problems in the above-mentioned prior art such as poor stability, insufficient efficiency and misalignment of beams. The structure of the laser is flexible and simple, and it is not constrained by the design structure of the laser resonator. The focus frequency doubling method is used to make up for the shortcomings of the external frequency doubling power density lower than the intracavity frequency doubling method, and the fundamental frequency laser can be freely selected on the frequency doubling crystal. The waist size of the focusing beam to obtain the best frequency doubling conversion efficiency. Whether the frequency doubling process occurs is controlled by the polarization direction of the fundamental frequency laser, without changing the beam propagation path, different wavelengths propagate in a coaxial manner, and the beam parameters are consistent. the

本实用新型的目的是通过以下方案实现的:利用脉冲输出的线偏振调Q的基频激光通过聚焦透镜聚焦后可以获得更小的激光束腰尺寸,从而大大增加激光功率密度。通光透镜聚焦后的基频激光束腰位置与非线性倍频晶体的入射端面重合,从而获得最佳的倍频转换效率。以偏振旋转器改变基频激光的偏振方向,控制倍频过程是否发生,配合谐波分离镜,切换基频激光和倍频激光的交替输出。  The purpose of the utility model is achieved by the following scheme: after the fundamental frequency laser with pulse output linear polarization Q-switching is focused by the focusing lens, a smaller laser beam waist size can be obtained, thereby greatly increasing the laser power density. The waist position of the fundamental frequency laser beam after the light-passing lens is focused coincides with the incident end face of the nonlinear frequency doubling crystal, so as to obtain the best frequency doubling conversion efficiency. Use a polarization rotator to change the polarization direction of the fundamental frequency laser to control whether the frequency doubling process occurs, and cooperate with the harmonic separator to switch the alternate output of the fundamental frequency laser and the frequency doubling laser. the

一种端面泵浦双波长同轴切换输出激光器,它包括激光源、偏振旋转器、聚焦透镜、倍频晶体、准直透镜、小孔光阑、谐波分离镜、第一转向镜、第二转向镜、第三转向镜、第四转向镜,其特征在于,激光源脉冲输出的基频激光为线偏振调Q脉冲激光,第一转向镜、第二转向镜、第三转向镜、第四转向镜、偏振旋转器、聚焦透镜、倍频晶体、准直透镜、小孔 光阑、谐波分离镜放置在谐振腔外;由激光源脉冲输出的基频激光经过第一转向镜和第二转向镜调整入射方向,通过设置在谐振腔外的聚焦透镜聚焦到倍频晶体的入射端面并产生倍频激光和剩余的基频激光再经过准直透镜准直,然后经过第三转向镜和第四转向镜调整出射方向;谐波分离镜反射剩余的基频激光并透过倍频激光;小孔光阑吸收被反射的剩余基频激光,避免反射光损伤其他元件;偏振旋转器控制基频激光的偏振方向,插入偏振旋转器后,基频激光的偏振方向绕光束传播方向旋转45度或90度。  An end-pumped dual-wavelength coaxial switching output laser, which includes a laser source, a polarization rotator, a focusing lens, a frequency doubling crystal, a collimating lens, a small aperture diaphragm, a harmonic separation mirror, a first steering mirror, a second The steering mirror, the third steering mirror, and the fourth steering mirror are characterized in that the fundamental frequency laser output by the laser source pulse is a linearly polarized Q-switched pulse laser, and the first steering mirror, the second steering mirror, the third steering mirror, and the fourth steering mirror Steering mirrors, polarization rotators, focusing lenses, frequency doubling crystals, collimating lenses, pinhole diaphragms, and harmonic separation mirrors are placed outside the resonator; the fundamental frequency laser pulsed by the laser source passes through the first steering mirror and the second The steering mirror adjusts the incident direction, and focuses on the incident end face of the frequency doubling crystal through the focusing lens arranged outside the resonator to generate the frequency doubling laser and the remaining fundamental frequency laser, which are then collimated by the collimating lens, and then pass through the third steering mirror and the first The four steering mirrors adjust the output direction; the harmonic separation mirror reflects the remaining fundamental frequency laser and transmits the frequency doubled laser; the pinhole diaphragm absorbs the reflected remaining fundamental frequency laser to prevent the reflected light from damaging other components; the polarization rotator controls the fundamental frequency The polarization direction of the laser, after inserting the polarization rotator, the polarization direction of the fundamental frequency laser rotates 45 degrees or 90 degrees around the beam propagation direction. the

本实用新型所述的一种端面泵浦双波长同轴切换输出激光器,其偏振旋转器为1/4波片、或1/2波片、或45度石英旋光晶体、或90度石英旋光晶体。  An end-pumped dual-wavelength coaxial switching output laser described in the utility model, its polarization rotator is a 1/4 wave plate, or a 1/2 wave plate, or a 45-degree quartz optical crystal, or a 90-degree quartz optical crystal . the

本实用新型所述的一种端面泵浦双波长同轴切换输出激光器的激光为线性偏振调Q的脉冲激光。  The laser light of the end-pumped dual-wavelength coaxial switching output laser described in the utility model is a linearly polarized Q-switched pulse laser. the

本实用新型所述的一种端面泵浦双波长同轴切换输出激光器,其偏振旋转器插入非线性倍频晶体之前的光路中,线偏振基频激光的偏振方向旋转45度或90度,倍频过程不发生;或偏振旋转器不插入倍频晶体之前的光路中,倍频过程不发生:  In the end-pumped dual-wavelength coaxial switching output laser described in the utility model, its polarization rotator is inserted into the optical path before the nonlinear frequency-doubling crystal, and the polarization direction of the linearly polarized fundamental-frequency laser is rotated by 45 degrees or 90 degrees. The frequency process does not occur; or the polarization rotator is not inserted in the optical path before the frequency doubling crystal, the frequency doubling process does not occur:

根据非线性光学原理,不同波长、不同偏振方向以及不同入射方向的激光在非线性晶体内部传播时的折射率不同。对于倍频过程,只有当基频激光和倍频激光在非线性晶体内部传播时的折射率相等时,即满足相位匹配条件时,倍频过程才能发生。  According to the principle of nonlinear optics, lasers with different wavelengths, different polarization directions, and different incident directions have different refractive indices when propagating inside a nonlinear crystal. For the frequency doubling process, the frequency doubling process can only occur when the refractive index of the fundamental frequency laser and the frequency doubling laser are equal when propagating inside the nonlinear crystal, that is, when the phase matching condition is satisfied. the

对满足相位匹配条件的倍频过程,分为I类相位匹配和II类相位匹配。当采用I类相位匹配时,线偏振调Q的基频激光的偏振方向旋转90度,倍频过程发生或不发生;当采用II类相位匹配时,线偏振调Q的基频激光的偏振方向旋转45度,倍频过程发生或不发生。  For the frequency multiplication process that meets the phase matching conditions, it is divided into type I phase matching and type II phase matching. When type I phase matching is used, the polarization direction of the fundamental frequency laser with linear polarization Q-switching is rotated by 90 degrees, and the frequency doubling process occurs or not; when type II phase matching is used, the polarization direction of the fundamental frequency laser with linear polarization Q-switching Rotated by 45 degrees, the frequency doubling process occurs or does not occur. the

本实用新型所述的倍频晶体为磷酸二氢钾(KDP)、或三硼酸锂(LBO)、或磷酸氧钛钾(KTP)或偏硼酸钡(BBO)非线性光学晶体。  The frequency doubling crystal described in the utility model is potassium dihydrogen phosphate (KDP), or lithium triborate (LBO), or potassium titanyl phosphate (KTP) or barium metaborate (BBO) nonlinear optical crystal. the

本实用新型所述的一种端面泵浦双波长同轴切换输出激光器,其第一转向镜、第二转向镜、第三转向镜和第四转向镜可以不使用或只使用其中的若干片,放置的方式和转向角度可以变化。  In the end-pumped dual-wavelength coaxial switching output laser described in the utility model, the first steering mirror, the second steering mirror, the third steering mirror and the fourth steering mirror may not be used or only some of them may be used. The placement and steering angle can vary. the

本实用新型所述的一种端面泵浦双波长同轴切换输出激光器,其切换输出的基频激光和倍频激光具有同轴输出特性。  An end-pumped dual-wavelength coaxial switching output laser described in the utility model has a coaxial output characteristic of the fundamental frequency laser and the frequency doubled laser switching output. the

本实用新型适于激光打标、激光刻线、激光划片、其他激光的泵浦源、激光医疗和科研等领域的应用。  The utility model is suitable for applications in the fields of laser marking, laser marking, laser scribing, other laser pumping sources, laser medical treatment and scientific research. the

附图说明 Description of drawings

图1是激光器结构示意图;  Fig. 1 is a schematic diagram of laser structure;

图2是非线性晶体倍频原理示意图;  Figure 2 is a schematic diagram of the principle of nonlinear crystal frequency doubling;

图3是偏振旋转器工作原理示意图;  Fig. 3 is a schematic diagram of the working principle of the polarization rotator;

具体实施方式 Detailed ways

本实用新型所涉及的一种端面泵浦双波长同轴切换输出激光器,其技术方案结合附图1、2和3详细叙述如下:  An end-pumped dual-wavelength coaxial switching output laser related to the utility model, its technical scheme is described in detail in conjunction with accompanying drawings 1, 2 and 3 as follows:

本实用新型的激光源1脉冲输出线偏振调Q的基频激光2;脉冲输出的基频激光2经过转向镜4和5(均镀基频光高反膜)改变传播方向;脉冲输出的基频激光2由放置在谐振腔外的聚焦透镜6(镀基频光增透膜)聚焦到倍频晶体7(LBO,双面均镀基频光和倍频光增透膜)的入射端面上,并在倍频晶体7内部形成非线性频率变换过程;由倍频晶体7产生的倍频激光13和剩余的基频激光2经过透镜8(双面均镀基频光和倍频光增透膜)准直后,再由转向镜9和10(均镀基频光和倍频光高反膜)改变传播方向,并通过小孔光阑11;谐波分离镜12(镀0度倍频光增透膜和基频光高反膜)输出倍频激光并反射基频激光;当在光路中插入偏振旋转器3(双面镀基频光增透膜)时,基频激光的偏振方向旋转45度或90度,倍频过程或不发生,在光路上移出谐波分离镜12,只有基频激光输出。  The laser source 1 of the utility model pulses the fundamental frequency laser 2 of linear polarization Q-switching; the fundamental frequency laser 2 of the pulse output changes the propagation direction through the turning mirrors 4 and 5 (both coated with the fundamental frequency light high reflection film); the fundamental frequency laser 2 of the pulse output The frequency laser 2 is focused by the focusing lens 6 (coated with anti-reflection coating for fundamental frequency light) placed outside the resonator to the incident end surface of frequency doubling crystal 7 (LBO, both sides are coated with antireflection coating for fundamental frequency light and frequency doubling light) , and form a nonlinear frequency conversion process inside the frequency doubling crystal 7; the frequency doubling laser 13 produced by the frequency doubling crystal 7 and the remaining fundamental frequency laser 2 pass through the lens 8 (both sides are coated with the fundamental frequency light and the frequency doubling light antireflection film) after collimation, the direction of propagation is changed by turning mirrors 9 and 10 (both coated with fundamental frequency light and frequency doubled light high-reflection film), and pass through the aperture diaphragm 11; harmonic separation mirror 12 (coated with 0 degree frequency doubled Optical anti-reflection coating and base frequency optical high-reflection coating) output frequency-doubled laser and reflect base frequency laser; Rotate 45 degrees or 90 degrees, the frequency doubling process may not occur, and the harmonic separator 12 is removed on the optical path, only the fundamental frequency laser output. the

具体设计实例如下:按照图1在光路上放置激光器各部分器件,包括激光源1,偏振旋转器3,聚焦透镜6,倍频晶体7,准直透镜8,小孔光阑11,谐波分离镜12和转向镜4、5、9、10。输出功率稳定的准连续脉冲基频激光2经过转向镜4和5改变传输路径并起到增加光程的作用,在距离激光源1的输出端实际光学路径长度约为300mm处放置焦距为50mm的聚焦透镜6,将基频激光2聚焦变换为束腰直径约为0.1mm聚焦光束,束腰位置在长度为10mm的倍频晶体7的入射端面处。产生的倍频激光与基频激光的偏振方向相互垂直——如图2所示;当在光路中插入偏振旋转器3后,基频激光的偏振方向绕传播方向旋转90度——如图3所示,倍频过程发生或不发生。谐波分离镜12放置在光路中时,只输出倍频激光,剩余的基频激光被反射并被小孔光阑11吸收;当在光路中去掉谐波分离镜12时,只输出基频激光,无倍频过程发生。  The specific design example is as follows: according to Fig. 1, place various components of the laser on the optical path, including laser source 1, polarization rotator 3, focusing lens 6, frequency doubling crystal 7, collimating lens 8, pinhole diaphragm 11, harmonic separation Mirror 12 and turning mirrors 4, 5, 9, 10. The quasi-continuous pulse fundamental frequency laser 2 with stable output power passes through the steering mirrors 4 and 5 to change the transmission path and increase the optical path. A laser with a focal length of 50 mm is placed at a distance of about 300 mm from the output end of the laser source 1. The focusing lens 6 is used to focus and transform the fundamental frequency laser 2 into a focused beam with a beam waist diameter of about 0.1 mm, and the beam waist position is at the incident end face of the frequency doubling crystal 7 with a length of 10 mm. The polarization directions of the generated frequency-doubled laser and the fundamental-frequency laser are perpendicular to each other—as shown in Figure 2; when a polarization rotator 3 is inserted into the optical path, the polarization direction of the fundamental-frequency laser rotates 90 degrees around the propagation direction—as shown in Figure 3 As shown, the multiplication process occurs or does not occur. When the harmonic separation mirror 12 is placed in the optical path, only frequency-doubled laser light is output, and the remaining fundamental frequency laser light is reflected and absorbed by the pinhole diaphragm 11; when the harmonic separation mirror 12 is removed from the optical path, only the fundamental frequency laser light is output , no multiplication process takes place. the

图2中,7为倍频晶体,2为线性偏振调Q的基频激光,13为线性偏振的倍频激光。线性偏振调Q的基频激光2和倍频激光13只有在满足非线性光学相位匹配条件时,非线性倍频过程才能发生。根据非线性光学原理,不同波长、不同偏振方向以及不同入射方向的激光在非线性晶体内部传播时的折射率不同。对于倍频过程,只有当基频激光2和倍频激光13在倍频晶体7内部传播时的折射率相等时,倍频过程才能发生。  In FIG. 2 , 7 is a frequency doubling crystal, 2 is a linearly polarized Q-switched fundamental frequency laser, and 13 is a linearly polarized frequency doubling laser. The nonlinear frequency doubling process can only occur when the linearly polarized Q-switched fundamental frequency laser 2 and the frequency doubled laser 13 meet the nonlinear optical phase matching conditions. According to the principle of nonlinear optics, lasers with different wavelengths, different polarization directions, and different incident directions have different refractive indices when propagating inside a nonlinear crystal. For the frequency doubling process, the frequency doubling process can only occur when the refractive indices of the fundamental frequency laser 2 and the frequency doubling laser 13 are equal when propagating inside the frequency doubling crystal 7 . the

图3中,3为偏振旋转器,可为波片或者石英旋光晶体,线性偏振调Q的基频激光2通过偏振旋转器后,偏振方向发生变化,绕传播方向旋转一定角度——45度或90度。基频激光2的偏振方向改变之后,不再满足(或刚好满足)非线性相位匹配条件,倍频过程不发生 (或发生)。  In Figure 3, 3 is a polarization rotator, which can be a wave plate or a quartz optical crystal. After the linearly polarized Q-switched fundamental frequency laser 2 passes through the polarization rotator, the polarization direction changes and rotates around the propagation direction by a certain angle—45 degrees or 90 degrees. After the polarization direction of the fundamental frequency laser 2 is changed, the nonlinear phase matching condition is no longer satisfied (or just satisfied), and the frequency doubling process does not occur (or occurs). the

显然,本领域的技术人员可以对本实用新型进行各种改动和变型而不脱离本实用新型的精神和范围。这样,倘若本实用新型的这些修改和变型属于本实用新型权利要求及其等同技术的范围之内,则本实用新型,也意图包含这些改动和变型在内。  Obviously, those skilled in the art can make various changes and modifications to the utility model without departing from the spirit and scope of the utility model. In this way, if these modifications and variations of the utility model fall within the scope of the claims of the utility model and their equivalent technologies, the utility model also intends to include these modifications and variations. the

本说明书中未作详细描述的内容属于本领域专业技术人员公知的现有技术。  The content not described in detail in this specification belongs to the prior art known to those skilled in the art. the

Claims (2)

1. an end-pumped dual-wavelength coaxial switches output laser, comprise lasing light emitter (1), polarization rotator (3), condenser lens (6), frequency-doubling crystal (7), collimating lens (8), aperture (11), harmonic separation mirror (12), the first deviation mirror (4), the second deviation mirror (5), the 3rd deviation mirror (9), the 4th deviation mirror (10), it is characterized in that: the basic frequency laser (2) of lasing light emitter (1) pulse output is the linear polarization adjusting Q pulse laser, the first deviation mirror (4), the second deviation mirror (5), the 3rd deviation mirror (9), the 4th deviation mirror (10), polarization rotator (3), condenser lens (6), frequency-doubling crystal (7), collimating lens (8), aperture (11), harmonic separation mirror (12) is placed on outside the resonant cavity; Basic frequency laser (2) by lasing light emitter (1) pulse output is adjusted incident direction through the first deviation mirror (4) and the second deviation mirror (5), focus on the incident end face of frequency-doubling crystal (7) and produce double-frequency laser (13) and remaining basic frequency laser (2) passes through collimating lens (8) collimation again by being arranged on the outer condenser lens (6) of resonant cavity, then through the 3rd deviation mirror (9) and the 4th deviation mirror (10) adjustment exit direction; Harmonic separation mirror (12) reflects remaining basic frequency laser (2) and sees through double-frequency laser (13); Aperture (11) absorbs the residue basic frequency laser that is reflected; After inserting polarization rotator (3), the polarization direction of basic frequency laser (2) rotates 45 degree or 90 degree around direction of beam propagation.
2. a kind of end-pumped dual-wavelength coaxial according to claim 1 switches output laser, it is characterized in that: described polarization rotator (3) is quarter wave plate or 1/2 wave plate or the 45 quartzy gyrotropi crystals of degree or the quartzy gyrotropi crystal of 90 degree.
CN 201220290040 2012-06-20 2012-06-20 End-pumped dual-wavelength coaxial switching output laser device Expired - Fee Related CN202749676U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107069405A (en) * 2017-03-24 2017-08-18 唐帆 A kind of neodymium-doped yttrium-aluminum garnet dual-wavelength laser exports medicine equipment
CN114498278A (en) * 2021-12-30 2022-05-13 深圳半岛医疗有限公司 Medical laser and laser system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107069405A (en) * 2017-03-24 2017-08-18 唐帆 A kind of neodymium-doped yttrium-aluminum garnet dual-wavelength laser exports medicine equipment
CN107069405B (en) * 2017-03-24 2018-05-18 唐帆 A kind of neodymium-doped yttrium-aluminum garnet dual-wavelength laser exports medical instrument
CN114498278A (en) * 2021-12-30 2022-05-13 深圳半岛医疗有限公司 Medical laser and laser system

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