The utility model content
The technical purpose of the utility model solves the problem that exists in the prior art, in the middle of many silver layers coated glass, sets up dielectric layer at interval, offsets because the visible light transmissivity that the increase of silver thickness reduces through its Overlay.
The technical scheme of the utility model is:
A kind of four silver low radiation coated glasses; On glass substrate, be provided with plated film; It is characterized in that the film layer structure of said plated film outwards is followed successively by from glass substrate: first dielectric combination layer, first silver layer, first wall dielectric combination layer, second silver layer, second wall dielectric combination layer, the 3rd silver layer, the 3rd wall dielectric combination layer, the 4th silver layer, second dielectric combination layer.
As preferably, said first dielectric combination layer, second dielectric combination layer, first wall dielectric combination layer, second wall dielectric combination layer, the 3rd wall dielectric combination layer are by SSTOx, CrNx, CdO, MnO
2, InSbO, TxO, SnO
2, ZnO, ZnSnOx, ZnSnPbOx, ZrO
2, AZO, Si
3N
4, SiO
2, SiOxNy, BiO
2, Al
2O
3, Nb
2O
5, Ta
2O
5, In
2O
3, MoO
3, TiO
2One or more compositions in the film layer.
The thickness of said first dielectric combination layer, second dielectric combination layer is 10-80nm.
The thickness of said first wall dielectric combination layer, second wall dielectric combination layer, the 3rd wall dielectric combination layer is 10-200nm.
The thickness of said first silver layer, second silver layer, the 3rd silver layer, the 4th silver layer is 5-40nm.
Above-mentioned four silver low radiation coated glasses can adopt the vacuum magnetic-control sputtering plated film, specifically may further comprise the steps:
With glass substrate process cleaning-drying; In vacuum magnetic-control sputtering equipment, carry out the forevacuum transition, on glass substrate, be coated with first dielectric combination layer, first silver layer, first wall dielectric combination layer, second silver layer, second wall dielectric combination layer, the 3rd silver layer, the 3rd wall dielectric combination layer, the 4th silver layer, second dielectric combination layer then successively.
Said first dielectric combination layer, second dielectric combination layer, first wall dielectric combination layer, second wall dielectric combination layer, the 3rd wall dielectric combination layer can adopt the mode depositional coating of dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode or planar cathode, magnetically controlled DC sputtering.
Said first silver layer, second silver layer, the 3rd silver layer, the 4th silver layer adopt the mode depositional coating of planar cathode, d.c. sputtering.
The mode of said dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering is carried out in argon oxygen, argon nitrogen or argon oxygen nitrogen atmosphere.
The mode of said planar cathode, d.c. sputtering is carried out in argon oxygen, argon nitrogen or straight argon atmosphere.
Four silver low radiation coated glass and the manufacturing process thereof that the utility model provided; Has the unique film layer structure; Low radiation coated glass to traditional improves; Solve problems such as traditional low emissivity glass reduces at the visible light transmissivity of silver thickness and number of plies increase back generation, appearance color presents interference colour, the color selection is limited; Particularly use the dielectric layer of new material to replace the protective effect that stops of metal barrier, thereby cancelled metal barrier, make visible light transmissive significantly promote.The glass of the utility model has the very high visible light transmissivity of tool, extremely low radiance, good photo-thermal ratio; It is various to have good optical stability, weatherability and color; Can satisfy different clients' demand; Heat insulation and preservation effect is good, and ultraviolet ray stops that rate is high, suitable vehicle glass and the building glass market of being widely applied to.
The specific embodiment
For technical scheme and the technical purpose of illustrating the utility model, the utility model is done further introduction below in conjunction with the accompanying drawing and the specific embodiment.
As shown in the figure, the structure and the thicknesses of layers of the four silver low radiation coated glasses of the utility model are:
Glass/first dielectric combination layer (10-80nm)/first silver layer (5-40nm)/first wall dielectric combination layer (10-200nm)/second silver layer (5-40nm)/second wall dielectric combination layer (10-200nm)/3rd silver layer (5-40nm)/the 3rd wall dielectric combination layer (10-200nm)/4th silver layer (5-40nm)/second dielectric combination layer (10-80nm).
Wherein first, second dielectric makes up layer, and first, second, third wall dielectric combination layer is by SSTOx, CrNx, CdO, MnO
2, InSbO, TxO, SnO
2, ZnO, ZnSnOx, ZnSnPbOx, ZrO, AZO, Si
3N
4, SiO, SiOxNy, BiO
2, Al
2O
3, Nb
2O
5, Ta
2O
5, In
2O
3, MoO
3, TiO
2Deng one or more compositions in the rete of material formation.
Embodiment 1:
The magnetron sputtering coater that the utility model practical implementation is used; Comprise that 23 exchange the Rotating Double negative electrode, 8 direct current planar negative electrodes adopt following table to list technological parameter; Use 17 to exchange the Rotating Double negative electrode; 4 direct current planar negative electrodes are coated with according to the sequencing of rete successively, make the utility model four silver low radiation coated glasses.Glass substrate will pass through cleaning-drying before plated film, in the vacuum magnetic-control sputtering coating machine, carry out the forevacuum transition then, begins filming process then, and the list of locations of its technological parameter and target is following:
All silicon nitride (Si of last table
3N
4) layer use sial (92: 8) target, adopting dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, nitrogen atmosphere, power is 20-110kw, supply frequency is 20-40kHz;
Last all silicon oxynitrides of table (SiOxNy) layer uses sial (92: 8) target, adopts dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, nitrogen, oxygen atmosphere, and power is 20-80kw, and supply frequency is 20-40kHz;
Zinc oxide (ZnO) layer uses zinc-aluminium (98: 2) target in the last table, adopts dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, oxygen atmosphere, and power is 10-50kw, and supply frequency is 20-40kHz;
All AZO layers of last table use the AZO target, adopt dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in the straight argon atmosphere, and power is 2-10kw, and supply frequency is 20-40kHz;
The all functional layer Ag layers of last table are the silver-colored target of use, employing planar cathode, magnetically controlled DC sputtering mode sputtering sedimentation in the straight argon atmosphere, and power is 2-10kw.
Use glass optical property that above-mentioned technological parameter makes (glass is 6mm common white glass) as follows:
A, glass visible light transmissivity T=68.1%;
Visible light glass reflectivity=10.1%;
Visible light glass chromaticity coordinates a* value=-3.0;
Visible light glass chromaticity coordinates b* value=-6.0;
Visible light face reflectivity=7.6%;
Visible light face chromaticity coordinates a*=-1.9;
Visible light face chromaticity coordinates b*=-3.0;
Glass radiance E=0.015.
B, use the utility model to process the double glazing of 6mm+12A+6mm (rete outdoor inner face) structure, following according to the data of ISO10292 standard test:
Visible light transmissivity T=62%;
Visible light glass reflectivity (out)=12%;
Visible light glass reflectivity (in)=9.5%;
Solar energy transmitance T=20%;
Solar reflectance (out)=48%;
G-value=0.248;
Shading coefficient SC=0.285;
U value=1.53W/m2K;
Photo-thermal compares LSG=2.5.
Embodiment 2:
Use magnetron sputtering coater, adopt following table to list technological parameter, use 17 to exchange the Rotating Double negative electrode, 4 direct current planar negative electrodes are made the utility model four silver low radiation coated glasses, and the list of locations of its technological parameter and target is following:
Last table niobium oxide (Nb
2O
5) layer use niobium oxide target, adopting dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, oxygen atmosphere, power is 50-100kw, supply frequency is 20-40kHz;
Last table titanium oxide (TiO
2) the ceramic titanium oxide target of layer use, adopting dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, oxygen atmosphere, power is 50-100kw, supply frequency is 20-40kHz;
Last table zinc oxide (ZnO) layer uses zinc-aluminium (98: 2) target, adopts dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, oxygen atmosphere, and power is 10-50kw, and supply frequency is 20-40kHz;
Last all silicon nitrides of table (Si3N4) layer uses sial (92: 8) target, adopts dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, nitrogen atmosphere, and power is 20-110kw, and supply frequency is 20-40kHz;
Last all silicon oxynitrides of table (SiOxNy) layer uses sial (92: 8) target, adopts dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, nitrogen, oxygen atmosphere, and power is 20-80kw, and supply frequency is 20-40kHz;
All AZO layers of last table use the AZO target, adopt dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in the straight argon atmosphere, and power is 2-10kw, and supply frequency is 20-40kHz;
Last epoxy zinc-tin (ZnSnOx) layer uses zinc-aluminium (50: 50) target, adopts dual rotary negative electrode, intermediate frequency reaction magnetocontrol sputtering mode sputtering sedimentation in argon, oxygen atmosphere, and power is 10-50kw, and frequency is 20-40kHz;
Last table all functions layer Ag layer adopts planar cathode, magnetically controlled DC sputtering mode sputtering sedimentation in the straight argon atmosphere for using silver-colored target, and power is 2-10kw.
Use glass optical property that above-mentioned technological parameter makes (glass is 6mm common white glass) as follows:
A, glass visible light transmissivity T=70.8%;
Visible light glass reflectivity=10.0%;
Visible light glass chromaticity coordinates a* value=-2.0;
Visible light glass chromaticity coordinates b* value=-5.0;
Visible light face reflectivity=8.1%;
Visible light face chromaticity coordinates a*=-2.0;
Visible light face chromaticity coordinates b*=-3.0;
Glass radiance E=0.018.
B, use the utility model to process the double glazing of 6mm+12A+6mm (rete outdoor inner face) structure, following according to the data of ISO10292 standard test:
Visible light transmissivity T=65%;
Visible light glass reflectivity (out)=13%;
Visible light glass reflectivity (in)=10%;
Solar energy transmitance T=20%;
Solar reflectance (out)=58%;
G-value=0.25;
Shading coefficient SC=0.287;
U value=1.52W/m2K;
Photo-thermal compares LSG=2.58.
The characteristics and the superiority thereof of the utility model four silver low radiation coated glasses are:
1), traditional with the low radiation coated glass of Ag as the infrared external reflection rete, before and after the Ag layer, increase metal barrier usually, be etched to prevent the Ag layer; Yet because the adding of metal barrier makes transmitance obviously reduce; Particularly three silver medals or four silver low radiation coated glasses, along with the increase of Ag layer, transmitance has been subjected to very big influence; If increase the coat of metal of 3-6 layer again, the visible light transmissivity of composite film just more is difficult to be protected.The utility model has been cancelled the metal barrier in traditional three silver medals or the four silver low radiation retes, and adopts the dielectric layer (like the AZO layer) of new material that silver layer is protected, just can reduce influence like this to transmitance, thus good thermal property obtained;
2), the utility model is not owing to use metal barrier, thereby avoided the generation of interference colour to a certain extent, add control to the film layer spectrum curve, can guarantee that the color that the plated film product observes 0-45 ° of scope is pure, no red, purple interference;
3), the utility model adopts the high hardness material close with glass material as interval dielectric layer combination layer; Not only can between glass substrate and function Ag layer, play good bonding effect; And can offset the internal stress of composite film, particularly scratch resistance, wear-resisting and anticorrosive aspect effect more obvious;
4), all can reach standard, and be superior to like product according to each item performance indications of the product of present embodiment manufacturing.
Below disclose the utility model with preferred embodiment, so it is not in order to restriction the utility model, and all employings are equal to replacement or the technical scheme that obtained of equivalent transformation mode, all drop within the protection domain of the utility model.