CN1925110A - Vacuum processing device - Google Patents
Vacuum processing device Download PDFInfo
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- CN1925110A CN1925110A CNA2006101289137A CN200610128913A CN1925110A CN 1925110 A CN1925110 A CN 1925110A CN A2006101289137 A CNA2006101289137 A CN A2006101289137A CN 200610128913 A CN200610128913 A CN 200610128913A CN 1925110 A CN1925110 A CN 1925110A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- Condensed Matter Physics & Semiconductors (AREA)
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Provided is a vacuum processing device which can prevent mixing of moisture into a vacuum processing chamber certainly. Gate valves 30a and 30b having valve elements 31a and 31b, respectively, are arranged doubly between a vacuum processing chamber 10 and a load lock chamber 20. The load lock chamber 20 is connected with three exhaust pipes 21, 22 and 23 having different conductances which are connected with a vacuum pump 60 through open/close valves 62, 63 and 64, respectively. An N<SB>2</SB>gas supply 26 for introducing N<SB>2</SB>gas into the load lock chamber 20 is also connected.
Description
Technical field
The present invention relates to the vacuum treatment technology, particularly can be to liquid crystal indicator (LCD) or plasma scope etc. being the technology of using effectively in the FPD (flat-panel monitor) of the representative vacuum treated vacuum treatment installation that carries out dry ecthing etc. with glass substrate etc. etc.
Background technology
For example, in the LCD manufacture process, adopt mostly and carry out dry ecthing or splash the vacuum treatment of CVD (chemical vapor deposition) etc. as the LCD of processed substrate is on glass.
In carrying out this vacuum treated vacuum treatment installation, be provided with and keep vacuum, carry out the adjacent loadlock may of vacuum processing chamber (processing module) of above-mentioned processing, make processed substrate is moved into when taking out of, the indoor atmosphere change of vacuum treatment is minimum.
Specifically, for example at the box that is configured in atmospheric side with carry out between the vacuum processing chamber of etch processes, the load locking room that the interface interaction with atmospheric side and inlet side is set is as loadlock may.
In this load locking room, each processed substrate by the time, carry out atmosphere opening state and the exhaust that reaches the high vacuum identical repeatedly with vacuum processing chamber.Thus, at load locking room with often keep the gate valve (for example, patent documentation 1) that the sealing of two Room is guaranteed in configuration between the vacuum processing chamber of vacuum state.
But under the inadequate situation of the seal that utilizes gate valve, it is indoor that the moisture in the atmosphere can be gone into the vacuum treatment of high vacuum state from the load locking room side leakage of atmosphere opening state.Sneaking into vacuum treatment when indoor when moisture, promptly is trace, and the vacuum treatment of etching or film forming etc. is also contained adverse effect, might reduce the reliability of products such as FPD of manufacturing.
In addition, as existing gate valve structure, proposed in order to ensure vacuum processing chamber with move into the sealing of taking out of with vacuum chamber (load locking room), seal the gate valve (for example, patent documentation 2) of a pair of valve body of the opening of each chamber respectively in the configuration of the both sides of movable body.But, the gate valve of patent documentation 2, because moving into from above-mentioned movable body towards atmospheric side taken out of with both of the peristome of the peristome of vacuum chamber and vacuum processing chamber, move each valve body in diametical direction, it is the structure that seals two peristomes simultaneously, move into the valve body of taking out of with vacuum chamber side be pressed towards with from the differential pressure side of high side to low side in the opposite direction, therefore can not fully guarantee the seal of this part.
[patent documentation 1] TOHKEMY 2005-12185 communique (Fig. 3 etc.).
[patent documentation 2] Japanese kokai publication hei 5-99348 communique (Fig. 1 etc.).
As mentioned above, under the situation of the seal that can't fully guarantee load locking room and vacuum processing chamber, the air that comprises moisture is sneaked into vacuum processing chamber from the load locking room side, might the processing of processed substrate be had a negative impact.
In addition, even can guarantee the seal of gate valve, because the indoor atmosphere opening state that is in repeatedly of load-lock, load-lock after the moisture that contains in the atmosphere remains in exhaust is indoor, open gate valve, when processed substrate was passed through, it is indoor that remaining moisture can move to vacuum treatment.Particularly, carry out in to load locking room under the situation of high speed exhaust, along with sharply reducing of pressure, the moisture in the atmosphere atomizes, and adheres to and remain in the inside of load locking room easily, and this moisture is sneaked in the vacuum processing chamber by the gate opening easily.
Summary of the invention
The present invention considers the problems referred to above and proposes that its purpose is to provide a kind of moisture that can prevent reliably to sneak into the vacuum treatment installation of vacuum processing chamber.
That is: first purpose is to provide a kind of gate valve that can fully guarantee the sealing between load locking room and the vacuum processing chamber.Second purpose is to provide a kind of and prevents in the indoor process of carrying out exhaust to load-lock the technology of the remaining or atomizing of moisture.
In order to address the above problem, first viewpoint of the present invention provides a kind of vacuum treatment installation, it is characterized in that possessing:
In a vacuum substrate is carried out the vacuum processing chamber of predetermined processing;
Aforesaid substrate being moved in the process of taking out of above-mentioned vacuum processing chamber, temporarily take in aforesaid substrate, its inside alternately remains the loadlock may of atmosphere opening state and vacuum state; With
The gate valve of duplex configuration between above-mentioned vacuum processing chamber and above-mentioned loadlock may.
According to above-mentioned first viewpoint, because duplex configuration has gate valve between vacuum processing chamber and loadlock may, under the state of closing gate valve, isolated vacuum preparation room and vacuum processing chamber can do one's utmost to reduce moisture from sneaking into vacuum processing chamber for the loadlock may of atmospheric condition and high vacuum state repeatedly reliably.
In above-mentioned first viewpoint, preferably also possess:
First gate valve of the opening that switching forms in above-mentioned vacuum processing chamber; With
With this first gate valve disposed adjacent, open and close and this first gate valve between second gate valve of the opening that forms.
In addition, preferred above-mentioned first gate valve and above-mentioned second gate valve open and close synchronously.
In addition, when preferred above-mentioned first gate valve and above-mentioned second Gate-valve sealing, with valve body from the loadlock may side pressure of relatively high pressure vacuum processing chamber side to low pressure.Like this, press to the vacuum processing chamber of inlet side owing to be pressed towards the differential pressure direction during valve seal of each gate valve from the loadlock may of atmospheric pressure side, so can seal reliably.
In addition, be preferred for the blast pipe that carries out decompression exhaust in the lock container is connected with above-mentioned first gate valve.
Thus, even in the loadlock may be state to atmosphere opening, the valve container that is decompressed to first gate valve of authorized pressure is present between the vacuum processing chamber, can prevents air more reliably, can prevent that moisture from sneaking in the vacuum processing chamber from the leakage of loadlock may to vacuum processing chamber.
In addition, many different blast pipes of preferred flow path conductance are connected with above-mentioned loadlock may.
Moreover the purge gas supply source that preferably imports purge gas is connected with above-mentioned loadlock may.
Second viewpoint of the present invention provides a kind of vacuum treatment installation, it is characterized in that possessing:
In a vacuum substrate is carried out the vacuum processing chamber of predetermined process;
Aforesaid substrate being moved in the process of taking out of above-mentioned vacuum processing chamber, temporarily take in aforesaid substrate, its inside alternately keeps the loadlock may of atmosphere opening state and vacuum state;
Many different blast pipes of stream conductance with above-mentioned loadlock may connection; With
Be connected with above-mentioned blast pipe, to carrying out the exhaust unit of vacuum exhaust in the above-mentioned loadlock may.
In above-mentioned second viewpoint, preferred above-mentioned many blast pipes possess:
Downtake pipe;
The second exhaust pipe that the stream conductance is bigger than above-mentioned downtake pipe; With
The 3rd blast pipe that the stream conductance is bigger than above-mentioned second exhaust pipe.
In the vacuum treatment installation of above-mentioned second viewpoint,, can constitute exhaust pathway with a plurality of figures of these blast pipe combinations by the different blast pipe of configuration stream conductance.In process,, can prevent that pressure from sharply reducing the atomizing of the moisture that brings by switching exhaust pathway to the loadlock may exhaust.
In addition, the present invention's the 3rd viewpoint provides a kind of method for exhausting of loadlock may, it is characterized in that, loadlock may is vented to described vacuum state, described loadlock may is being moved into substrate in the process of taking out of vacuum processing chamber, temporarily take in substrate, inside alternately keeps atmosphere opening state and vacuum state simultaneously;
Use the many different blast pipes of stream conductance that connect with above-mentioned loadlock may, switch exhaust velocity, increase exhaust velocity by stages, carry out exhaust.
In above-mentioned the 3rd viewpoint, when loadlock may is vented to vacuum state, by utilizing many different blast pipes of stream conductance, switch exhaust velocity, increase exhaust velocity by stages, carry out exhaust, can prevent to reduce sharp and make moisture atomizing along with the loadlock may internal pressure.
In above-mentioned the 3rd viewpoint, be benchmark preferably with the pressure in the above-mentioned loadlock may, carry out the switching of above-mentioned exhaust velocity.In addition, preferably in the stage that above-mentioned loadlock may is decompressed to authorized pressure, continue exhaust, and at the appointed time, purge gas is imported in this loadlock may.
The 4th viewpoint of the present invention provides a kind of method for exhausting of loadlock may, it is characterized in that, loadlock may is vented to described vacuum state, described loadlock may is being moved into substrate in the process of taking out of vacuum processing chamber, temporarily take in substrate, inside alternately keeps atmosphere opening state and vacuum state simultaneously
In the stage that above-mentioned loadlock may is decompressed to authorized pressure, continue exhaust, and at the appointed time, purge gas is imported in this loadlock may.
According to above-mentioned the 4th viewpoint, by importing purge gas, the atmosphere under can reducing pressure with the purge gas displacement in the loadlock may.Thus, can remove the moisture that remains in the loadlock may reliably.
The 5th viewpoint of the present invention in addition provides a kind of step-up method of loadlock may, it is characterized in that, loadlock may is boosted from above-mentioned vacuum state, described loadlock may is being moved into substrate in the process of taking out of vacuum processing chamber, temporarily take in substrate, inside alternately keeps atmosphere opening state and vacuum state simultaneously
In making above-mentioned loadlock may, when atmosphere opening,, make above-mentioned loadlock may under the atmosphere opening state, become malleation by importing the purge gas of regulation flow.
According to above-mentioned the 5th viewpoint, by with atmosphere opening in, the purge gas of regulation flow is imported in the loadlock may, make inside become malleation, can suppress atmosphere and in clean room, enter, can prevent that moisture or particle from entering in the loadlock may.
Adopt the present invention, can do one's utmost to reduce moisture from sneaking into the vacuum processing chamber for the loadlock may of atmospheric condition and high vacuum state repeatedly.
Description of drawings
Fig. 1 is the stereogram of the outward appearance of the vacuum treatment installation of expression one embodiment of the present invention.
Fig. 2 is the loadlock may of vacuum treatment installation of presentation graphs 1 and the horizontal sectional view of vacuum processing chamber.
Fig. 3 is the summary sectional view of expression gate valve open mode.
Fig. 4 is the summary sectional view of expression gate valve closed condition.
Fig. 5 discharges the figure of the summary of system and gas delivery system for the gas of expression load locking room.
Fig. 6 is the flow chart of the exhaust order of expression load locking room.
Symbol description
10 vacuum processing chambers; 20 load locking rooms; 21,22,23 blast pipes; 24 N
2The gas supply pipe road; 26N
2The gas supply source; 27 blast pipes; 30a, 30b, 40 gate valves; 50 atmospheric side transport mechanisms; 60 vacuum pumps; 70 base board delivery devices; 74 slide plates (slide plate); 74a slip pick-up (slide pick); 80 substrate exchange mechanisms; 81,82 buffer boards; 100 vacuum treatment installations; The G substrate
Embodiment
Below, with reference to accompanying drawing, specifically describe embodiments of the present invention.
Fig. 1 is the stereogram of schematic configuration of the vacuum treatment installation 100 of expression an embodiment of the invention, and Fig. 2 is the horizontal sectional view of major part of the vacuum treatment installation 100 of presentation graphs 1.Vacuum treatment installation 100 has in vacuum atmosphere, to the substrate G of transparent LCD glass substrate etc., carries out plasma etch process or film and forms desired vacuum treated vacuum processing chambers 10 such as processing; Be connected setting with vacuum processing chamber 10, play the load locking room 20 of loadlock may effect; Gate valve 30a, the 30b of dual setting between vacuum processing chamber 10 and load locking room 20; The gate valve 40 that load locking room 20 and outside atmosphere side transport mechanism 50 are separated.
As shown in Figure 2, the vacuum pump 60 as exhaust unit is connected the vacuum necessary degree that vacuum exhaust is handled to the specified vacuum of substrate G with vacuum processing chamber 10 by gas exhausting valve 61.In addition, handle gas supply part 12 and be connected with vacuum processing chamber 10, can form the processing gas atmosphere of authorized pressure in the inside of vacuum processing chamber 10 by gas control valve 11.Be provided with treatment bench 13 in the inside of vacuum processing chamber 10, the substrate G of mounting process object.
Different three blast pipes 21,22,23 of conductance are connected with load locking room 20, and open and close valve 62,63,64 is configured in the centre of each blast pipe 21,22,23 respectively.Each blast pipe 21,22,23 is connected with vacuum pump 60 respectively, load locking room 20 inner vacuum can be vented to the vacuum degree equal with vacuum processing chamber 10.
Importing is as the N of purge gas
2The N of gas
2 Gas supply source 26 is connected with load locking room 20 by gas control valve 25, can be with N
2Gas imports the inside of load locking room 20.
As shown in the figure, in the vacuum treatment installation of present embodiment, between vacuum processing chamber 10 and load locking room 20, form the gate valve 30a of duplex configuration, the structure of 30b.Gate valve 30a has and is communicated with vacuum processing chamber 10 and load locking room 20, carries out the valve body 31a of size for the on-off action of opening 90 (with reference to Fig. 3, aftermentioned) that can be by substrate G.In addition, same, gate valve 30b also tool is communicated with vacuum processing chamber 10 and load locking room 20, carries out the valve body 31b of size for the on-off action of the opening 94 (referring to Fig. 3, aftermentioned) of the size that can be passed through by base board delivery device 70 substrate supported G.Wherein, Fig. 2 represents gate valve 30a, 30b both closing state.
In addition, blast pipe 27 is configured on the gate valve 30a of vacuum processing chamber 10 sides.Blast pipe 27 is connected with vacuum pump 60, wherein is provided with gas exhausting valve 65.By blast pipe 27 is set, can under the state of closing gate valve 30a, 30b, carry out exhaust to the gas in the valve buckle body 95a of gate valve 30a, be decompressed to the pressure of regulation.Thus, by exhaust unit is connected with gate valve 30a, even at closing gate valve 30a, 30b, making becomes under the atmosphere opening state in the load locking room 20, because existing between vacuum processing chamber 10 to make the inside of valve buckle body 95a all become the gate valve 30a of decompression state, therefore can prevent air more reliably from the leakage of load locking room 20, can prevent that moisture from sneaking in the vacuum processing chamber 10 to vacuum processing chamber 10.
Be provided with base board delivery device 70 in load locking room 20 inside.This base board delivery device 70 has the base (not shown) that is fixed on load locking room 20 bottoms and is stacked on this base, supports the slide plate 74 of platform as the substrate of mounting substrate G.Slide plate 74 is provided with the following slip pick-up that is approximately the コ font (slide pick) 74a of portion of the substrate G that supports mounting.
Base board delivery device 70 is by making not shown drive motor work, make the slide plate 74 of the state of mounting substrate G, from the state of shrinking back shown in Figure 2, move towards right, the substrate G that is supported on the slip pick-up 74a of portion can be moved into vacuum processing chamber 10 from load locking room 20 with the paper of figure.In addition, on the contrary, taking out of from vacuum processing chamber 10 under the situation of substrate G, after utilizing the slip pick-up 74a of portion in vacuum processing chamber 10, to receive substrate G,, can become the state of shrinking back shown in Figure 2 by making not shown drive motor counter-rotating.
Inside at load locking room 20, the position of chucking substrate carrying device 70 is provided with buffer board 81 and 82, substrate exchange mechanism 80 with not shown buffering elevating mechanism with this buffer board 81 of lifting and 82, can be positioned in the periphery of the substrate G on the slide plate 74 of base board delivery device 70 from supported underneath by buffer board 81 and 82, make the action that substrate G floats from this slide plate 74 and make the substrate G that accepts from atmospheric side transport mechanism 50 drop to the substrate exchange action of action on the slide plate 74 etc.
Referring to Fig. 1 as can be known, atmospheric side transport mechanism 50 has the carrying arm 51 that can rotate and stretch, can carry out following actions: take out untreated 1 substrate from the frame substrate 55 that accommodates a plurality of substrate G, be sent to the action of the base board delivery device 70 in the load locking room 20 by gate valve 40; Substrate G after accepting to handle with the base board delivery devices 7 in load locking room 20 is taken out to atmospheric side by gate valve 40, is contained in the action in the frame substrate 55.
The cross section structure of expression gate valve 30a, 30b in Fig. 3 and Fig. 4.
The never illustrated control air supply source of control air is dispensed to cylinder 35a, 35b equably, and simultaneously, the actuating force of cylinder 35a passes to piston rod 36a, and the actuating force of cylinder 35b passes to piston rod 36b.Therefore, valve body 31a, the 31b of gate valve 30a, 30b are synchronous respectively, sealed open 90 and opening 94 or depressurization.As shown in Figure 3, as gate valve 30a, when 30b opens, valve body 31a, 31b are at the low position of readiness of ratio open 90,94, and valve body 34a, 34b are in the position of readiness standby lower than valve body 31a, 31b.
When closing gate valve 30a, 30b, make cylinder 35a, 35b state action from Fig. 3, with the stroke of stipulating piston rod 36a, 36b are advanced.Again as shown in Figure 4, valve body 34a, 34b and valve body 31a, 31b be the vertical lifting parallel to each other from the origin-location respectively, roller 38a, the 38b of valve body 31a, 31b contacts with end face 91a, 91b, and secondly, valve body 34a, 34b contact with block (stopper) 39a, 39b.
In addition, crank 32a, 33a and crank 32b, 33b work is pressed to opening 90,94 with valve body 31a, 31b, be pressed into opening 90 around (sidewall 10a) and opening 94 around (next door 92).When this moves, by roller 38a, 38b, on end face 91a, 91b, rotate in the horizontal direction, valve body 31a, 31b move horizontally, and press at transverse direction on the wall on every side of above-mentioned opening 90,94.Because seal (not shown) such as O shape circle grade is installed around opening 90,94, and valve body 31a, 31b have high leakproofness, push down opening 90,94 around, can sealed open 90,94.
When the closed condition of Fig. 4 is opened gate valve 30a, 30b, make cylinder 35a, 35b action, by identical stroke with reciprocating motion the time piston rod 36a, 36b are descended, utilize the negative actuation of seal process action, valve body 34a, 34b and valve body 31a, 31b are back to original position of readiness respectively, remove the sealing of opening 90,94.
Wherein, utilize Fig. 3 and gate valve 30a, 30b shown in Figure 4, the control air of a system can be distributed to cylinder 35a, 35b equably, make gate valve 30a, 30b action simultaneously, also the control air supply source can be set on cylinder 35a, 35b in addition respectively, supply with control air, make gate valve 30a, 30b work at a certain time interval respectively.
Secondly, the processing sequence of substrate G in the vacuum treatment installation 100 of present embodiment is described.At first, base board delivery device 70 becomes the state of shrinking back to load locking room 20, and valve body 31a, the 31b of closing gate valve 30a, 30b are vented to the vacuum necessary degree with the inside of vacuum processing chamber 10 with vacuum pump 60.In addition, under this state, open gas exhausting valve 65,, carry out decompression exhaust in the valve buckle body 95a to gate valve 30a by blast pipe 27.
Atmospheric side transport mechanism 50 utilizes carrying arm 51, takes out untreated substrate G from frame substrate 55, by the peristome 41 of gate valve 40, moves in the load locking room 20, is positioned the positive top of the slide plate 74 of base board delivery device 70.
Then, buffer board 81 and 82 rises, and from the periphery of sandwich substrate G, substrate G is floated from carrying arm 51.
Then, extract carrying arm 51, keep out of the way to the outside of the tight chamber 20 of load, buffer board 81 and 82 is descended, substrate G is moved on the slide plate 74 (the slip pick-up 74a of portion) of base board delivery device 70 mounting at atmospheric side.
In addition, the valve body 42 of closing gate valve 40, make load locking room 20 become air-tight state, open in the open and close valve 62,63,64 more than any, make vacuum pump 60 work simultaneously, thus, in load locking room 20, be vented to the vacuum degree with vacuum processing chamber 10 same degree after, remove valve body 31a, the 31b of gate valve 30a, 30b sealing to opening 90,94.At this moment, because load locking room 20 by vacuum exhaust, can not damage the vacuum degree or the atmosphere of vacuum processing chamber 10.
Secondly, by opening 93,90,94, the slide plate 74 that makes base board delivery device 70 enters towards the inside of vacuum processing chamber 10, substrate G is moved into the positive top of the treatment bench 13 of vacuum processing chamber 10, by being located at not shown protrudent pin in the vacuum processing chamber 10 etc., be positioned on the treatment bench 13.Then, slide plate 74 is kept out of the way to load locking room 20, utilized valve body 31a, the 31b sealed open 90,94 of gate valve 30a, 30b, airtight vacuum process chamber 10.
Then, the gas of necessity is imported in the enclosed vacuum process chambers 10 from handling gas supply part 12, form and handle gas atmosphere, substrate is carried out necessary processing.
Through behind the official hour, stop to import and handle gas, valve body 31a, the 31b of gate valve 30a, 30b are descended, remove the sealing of opening 90,94.Inside at vacuum processing chamber 10, slide plate 74 elongations that make the base board delivery device 70 in the load locking room 20 are for multistage, according to the above-mentioned opposite order of action of moving into, with the substrate G that handles in the vacuum processing chamber 10, move on the slide plate 74 from treatment bench 13, slide plate 74 is shunk back, take out of to load locking room 20.Then, utilize valve body 31a, the 31b of gate valve 30a, 30b, close opening 90,94, airtight vacuum process chamber 10.In addition,, open gas exhausting valve 65,, carry out decompression exhaust in the valve buckle body 95a to gate valve 30a by blast pipe 27 with above-mentioned same.
Then, stop the exhaust of load locking room 20, buffer board 81,82 is risen, the periphery of supporting substrate G floats it, is slowly importing N by pressure adjustment pipeline 28,29 described later (referring to Fig. 5)
2Deng, reach near behind the atmospheric pressure, open the valve body 42 of gate valve 40, the carrying arm 51 of atmospheric side transport mechanism 50 is inserted in the downside of the substrate G that floats, under this state, buffer board 81,82 is descended, substrate G is moved on the carrying arm 51.
By carrying arm 51 is led to atmospheric side, can the substrate G that handle be taken out of to atmospheric side from load locking room 20, be accommodated on the frame substrate 55.
In the vacuum treatment installation 100 of above structure, because gate valve 30a, 30b that configuration is dual, under the state of closing gate valve 30a, 30b, the isolation of load locking room 20 and vacuum processing chamber 10 can be formed reliably, moisture can be done one's utmost to reduce from sneaking into vacuum processing chamber 10 for the load locking room 20 of atmospheric condition and high vacuum state repeatedly.
In addition, because valve body 31a, the 31b of gate valve 30a, the 30b differential pressure direction during from sealing, promptly press to the direction of the vacuum processing chamber 10 of inlet side, therefore can seal reliably by valve body 31a, 31b from the load locking room 20 of atmospheric pressure side.
In addition, owing to be provided with the blast pipe 27 that the inside of the valve buckle body 95a of exhaust gate valve 30a is carried out decompression exhaust, even be the atmosphere opening state in load locking room 20, also can between vacuum processing chamber 10, clip the valve buckle body 95a of inner pressure relief to the gate valve 30a of authorized pressure, can prevent reliably that air from leaking to vacuum processing chamber 10 from load cell 20, can prevent that moisture from sneaking in the vacuum processing chamber 10.
Secondly, sneak into vacuum processing chamber 10, the exhaust of load locking room 20 and the order of gas displacement with reference to Fig. 5 and Fig. 6 explanation in order to prevent moisture more reliably.Schematically show the schematic configuration of the exhaust pathway and the purge gas feed path of load locking room 20 among Fig. 5.As mentioned above, the different blast pipe 21,22,23 of conductance is connected with load locking room 20 respectively.Particularly, in the not shown hole (restriction) of the intermediate configurations of each blast pipe 21,22,23,, adjust blast pipe 21,22,23 stream conductances by making the diameter difference in each hole.Wherein, also can change the diameter of each blast pipe 21,22,23, be adjusted to desirable conductance.
In the centre of blast pipe 21 open and close valve 62 is set respectively, open and close valve 63 is set, open and close valve 64 is set in the centre of blast pipe 23 in the centre of blast pipe 22.Each blast pipe 21,22,23 is connected with dry pump (DP) 60b (vacuum pump 60) with mechanical booster pump (MBP) 60a, can be to carrying out vacuum exhaust in the load locking room 20.
In addition, N
2 Gas supply source 26 passes through N
2 Gas feeding pipe 24 is connected with load locking room 20, will be as the N of purge gas
2Gas is supplied in the load locking room 20.
Wherein, load locking room 20 is by the big pressure adjustment of conductance pipeline 28 and the little pressure adjustment pipeline 29 of conductance, with N
2 Gas supply source 26 connects, and by switching open and close valve 65 and open and close valve 66, slowly imports N
2Gas can suppress the load locking room 20 interior rapid risings to pressure when air to open is put of vacuum state.
In the present embodiment,, open under the state of open and close valve 63, utilize the minimal openings diameter to carry out exhaust, constitute the exhaust pathway (being called " first exhaust pathway ") of stream conductance minimum for the blast pipe 22 of 10mm closing open and close valve 62,64.
In addition, closing open and close valve 62,63, open under the state of open and close valve 64, utilize the minimal openings diameter to carry out exhaust, constitute the stream conductance exhaust pathway (be called " second exhaust pathway ") bigger slightly than first exhaust pathway of the formation of blast pipe 22 for the blast pipe 23 of 15mm.
In addition, closing open and close valve 62, open under the state of open and close valve 63 and open and close valve 64, because the minimal openings diameter of blast pipe 22 and blast pipe 23 adds up to 25mm (10mm+15mm), formation is compared the exhaust pathway that the stream conductance is big slightly (being called " the 3rd exhaust pathway ") with second exhaust pathway that blast pipe 23 constitutes.
In addition,, only open under the state of open and close valve 62, utilize the blast pipe 21 of minimal openings diameter 40mm to carry out exhaust, constitute the big high speed exhaust pathway (being called " the 4th exhaust pathway ") of stream conductance closing open and close valve 63,64.
Thus, by configuration stream conductance different blast pipe 21,22,23, the switching of transfer valve 62,63,64 can constitute the exhaust pathway of various modes.In the process of load locking room 20 exhausts,, can prevent that rapid pressure from reducing the moisture atomizing that brings by switching first～the 4th exhaust pathway.Therefore, the switching of the exhaust pathway of preferred exhaust process is carried out as index with the pressure in the load locking room 20.For example, begin to carry out exhaust from atmospheric 101325Pa (760Torr), to carrying out in the load locking room 20 in the process of exhaust, owing to below 26664Pa (200Torr), cause the atomizing of moisture easily, therefore in the preferred step-down process before reaching this pressure, the high speed exhaust of avoiding the 4th exhaust pathway to cause.
Expression is interior from be vented to the preference of high vacuum state order to atmosphere opening with load locking room 20 among Fig. 6.Carry out not being subjected to the restriction of following example, can suitably set from the force value of the switching of first exhaust pathway to the, four exhaust pathways.In addition, also can be not with pressure, and with the time as target, carry out switching from first exhaust pathway to the, four exhaust pathways.
At first, in step S11, opening gate valve 40, making load locking room 20 under the atmosphere opening state, with atmosphere opening simultaneously, as required, open gas control valve 25, with regulation flow N
2In the purge of gas load cell 20.Thus,, can suppress atmosphere and in clean room, enter, can prevent that moisture or particle from entering in the load locking room 20 owing to be malleation in the load locking room 20.At this moment, gate valve 30a, 30b close.
Secondly, in step S12, from atmosphere opening state closing gate valve 40, sealing load locking room 20.
Secondly, in step S13, close open and close valve 62,64, open open and close valve 63, make mechanical booster pump (MBP) 60a and dry pump (DP) 60b work, utilize first exhaust pathway to carry out exhaust in the load locking room 20.The exhaust of step S13, being reduced to about 79992Pa (600Torr) with the pressure in the load locking room 20 is that target is carried out.
If the pressure in the load locking room 20 are reduced to 79992Pa (600Torr), then,, close open and close valve 63 from the state of step S13 for example after 3 seconds, open open and close valve 64, utilize second exhaust pathway to carry out exhaust (step S14).The exhaust of step S14, being reduced to about 53328Pa (400Torr) with the pressure in the load locking room 20 is that target is carried out.
If the pressure in the load locking room 20 are reduced to 53328Pa (400Torr), then,, open open and close valve 63 from the state of step S14 for example after 5 seconds, switch to the 3rd exhaust pathway and carry out exhaust (step S15).The exhaust of step S15, being reduced to 26664Pa (200Torr) with the pressure in the load locking room 20 is that target is carried out.
If the pressure in the load locking room 20 are reduced to about 26664Pa (200Torr), then,, close open and close valve 63,64 from the state of step S15 for example after 1 second, only open open and close valve 62, switch to the 4th exhaust pathway and carry out high speed exhaust (step S16).The exhaust of step S16, with the pressure in the load locking room 20, the high vacuum state that is reduced to regulation from about 26664Pa (200Torr) carries out.
Thus, in step S13～step S16, by according to the pressure in the load locking room 20, switch from first exhaust pathway to the, four exhaust pathways, in exhaust process, in near below the 26664Pa (200Torr) that moisture in atmosphere atomizes easily the step-down process, because exhaust slowly, exhaust velocity is raise at leisure, be difficult to cause below about 26664Pa (200Torr) of moisture atomizing, by moving to the high speed exhaust, can remove the moisture in the load locking room 20 reliably, can prevent that moisture from sneaking in the vacuum processing chamber 10.
Enter the exhaust among the step S16 again, reach stage of 53.328Pa (400mTorr), open gas control valve 25,, be preferably 7000mL/min, N with the flow of regulation 6000～8000mL/min for example in load locking room 20 pressure inside
2Gas imports in the load locking room 20 (step S17).The N that imports
2The flow of gas can be set according to the exhaust capacity of vacuum pump 60, preferably from air and N
2Voltage ratio, making flow is above-mentioned illustrative degree.This N
2Purge of gas by under reduced pressure, is replaced into N with the atmosphere in the load locking room 20
2, finally remove and remain in the moisture in the load locking room 20 and implement.Preferred N
2When the cleaning of gas, the pressure in load locking room 20 for example reached 13.332Pa (100mTorr), for example 15～30 seconds at the appointed time preferably approximately was to carry out about 23 seconds.
In the order of above step S13～step S16, switch first～the 4th exhaust pathway, to carrying out exhaust in the load locking room 20, and by carrying out the N of step S17
2Purge of gas can suppress moisture atomizing in the load locking room 20 and residual, can will be decompressed to high vacuum state in the load locking room 20.Therefore, in load locking room 20 behind the decompression exhaust, when opening gate valve 30a, 30b, and vacuum processing chamber 10 between during exchange substrate G, can prevent reliably that moisture from sneaking in the vacuum processing chamber 10.
The present invention not only is limited in above-mentioned execution mode, in the scope of thought of the present invention, can do various distortion.
For example, in the above-described embodiment, as substrate, being example with the vacuum treatment installation of handling the LCD substrate, but being not limited only to this, also can be to handle other the FPD substrate or the vacuum treatment installation of semiconductor wafer.In addition, as FPD, except LCD (LCD), but illustration light-emitting diode (LED) display also, electroluminescence (EL:electroluminescence) display, fluorescence display (VFD:vacuum Fluorescent Display), plasma display panel (PDP) (PDP) etc.
In addition, in the above-described embodiment, disposing different three blast pipes 21,22,23 of stream conductance in load locking room 20, also can be the structure of configuration more than 4.
In addition, in the above-described embodiment, the vacuum treatment installation 100 that is close to the structure of vacuum processing chambers 10 configurations with loadlock may 20 is that example describes, but in the vacuum treatment installation that the vacuum carrying room is configured between vacuum processing chamber and the loadlock may, the present invention is also applicable.
Utilize possibility on the industry
The present invention can be sharp in the vacuum treatment installation with application of vacuum chamber and vacuum preparation room With.
Claims (14)
1. vacuum treatment installation is characterized in that possessing:
In a vacuum substrate is carried out the vacuum processing chamber of predetermined process;
Described substrate being moved in the process of taking out of described vacuum processing chamber, temporarily take in described substrate, its inside alternately keeps the loadlock may of atmosphere opening state and vacuum state; With
The gate valve of duplex configuration between described vacuum processing chamber and described loadlock may.
2. vacuum treatment installation as claimed in claim 1 is characterized in that also possessing:
First gate valve of the opening that switching forms in described vacuum processing chamber; With
And this first gate valve disposed adjacent, open and close and this first gate valve between second gate valve of the opening that forms.
3. vacuum treatment installation as claimed in claim 2 is characterized in that, described first gate valve and described second gate valve open and close synchronously.
4. vacuum treatment installation as claimed in claim 3 is characterized in that, described first gate valve and described second gate valve, when sealing with valve body from the loadlock may side pressure of relatively high pressure vacuum processing chamber side to low pressure.
5. as each described vacuum treatment installation in the claim 2～4, it is characterized in that, be used for the blast pipe of decompression exhaust in the valve container is connected with described first gate valve.
6. as each described vacuum treatment installation in the claim 1～5, it is characterized in that many different blast pipes of stream conductance are connected with described loadlock may.
7. as each described vacuum treatment installation in the claim 1～6, it is characterized in that the purge gas supply source that imports purge gas is connected with described loadlock may.
8. vacuum treatment installation is characterized in that possessing:
In a vacuum substrate is carried out the vacuum processing chamber of predetermined process;
Described substrate being moved in the process of taking out of described vacuum processing chamber, temporarily take in described substrate, its inside alternately keeps the loadlock may of atmosphere opening state and vacuum state;
Many different blast pipes of stream conductance with described loadlock may connection; With
Be connected with described blast pipe, to carrying out the exhaust unit of vacuum exhaust in the described loadlock may.
9. vacuum treatment installation as claimed in claim 8 is characterized in that, described many blast pipes possess:
Downtake pipe;
The second exhaust pipe that the stream conductance is bigger than described downtake pipe; With
The 3rd blast pipe that the stream conductance is bigger than described second exhaust pipe.
10. the method for exhausting of a loadlock may, it is characterized in that, loadlock may is vented to described vacuum state, described loadlock may is being moved into substrate in the process of taking out of vacuum processing chamber, temporarily take in substrate, inside alternately keeps atmosphere opening state and vacuum state simultaneously;
Use the many different blast pipes of stream conductance that connect with described loadlock may, switch exhaust velocity, increase exhaust velocity by stages, carry out exhaust.
11. the method for exhausting of loadlock may as claimed in claim 10 is characterized in that, is benchmark with the pressure in the described loadlock may, carries out the switching of described exhaust velocity.
12. the method for exhausting as claim 10 or 11 described loadlock may is characterized in that, in the stage that described loadlock may is decompressed to authorized pressure, continues exhaust, and at the appointed time purge gas is imported in this loadlock may.
13. the method for exhausting of a loadlock may, it is characterized in that, loadlock may is vented to described vacuum state, described loadlock may is being moved into substrate in the process of taking out of vacuum processing chamber, temporarily take in substrate, inside alternately keeps atmosphere opening state and vacuum state simultaneously;
In the stage that described loadlock may is decompressed to authorized pressure, continue exhaust, and at the appointed time purge gas is imported in this loadlock may.
14. the step-up method of a loadlock may, it is characterized in that, loadlock may is boosted from described vacuum state that described loadlock may is being moved into substrate in the process of taking out of vacuum processing chamber, temporarily take in substrate, inside alternately keeps atmosphere opening state and vacuum state simultaneously;
In making described loadlock may, when atmosphere opening,, make described loadlock may under the atmosphere opening state, become malleation by importing purge gas with the regulation flow.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005255293 | 2005-09-02 | ||
| JP2005255293A JP5078243B2 (en) | 2005-09-02 | 2005-09-02 | Vacuum processing apparatus and method for exhausting vacuum preparatory chamber |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101857774A Division CN101441995B (en) | 2005-09-02 | 2006-09-01 | Vacuum processing apparatus |
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| CN1925110A true CN1925110A (en) | 2007-03-07 |
| CN100463105C CN100463105C (en) | 2009-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006101289137A Expired - Fee Related CN100463105C (en) | 2005-09-02 | 2006-09-01 | Vacuum processing device |
| CN2008101857774A Active CN101441995B (en) | 2005-09-02 | 2006-09-01 | Vacuum processing apparatus |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008101857774A Active CN101441995B (en) | 2005-09-02 | 2006-09-01 | Vacuum processing apparatus |
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| Country | Link |
|---|---|
| JP (1) | JP5078243B2 (en) |
| KR (1) | KR100810804B1 (en) |
| CN (2) | CN100463105C (en) |
| TW (1) | TWI398921B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101471241B (en) * | 2007-12-26 | 2011-07-13 | 东京毅力科创株式会社 | Vacuum apparatus, vacuum processing system and pressure control method of vacuum chamber |
| CN103597214A (en) * | 2011-06-16 | 2014-02-19 | 爱德华兹有限公司 | Evacuating a chamber |
| WO2023151184A1 (en) * | 2022-02-10 | 2023-08-17 | 长鑫存储技术有限公司 | Air pressure balance valve, air pressure balance method, and load lock chamber |
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| JP4965358B2 (en) * | 2007-06-25 | 2012-07-04 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP5322254B2 (en) * | 2007-06-29 | 2013-10-23 | 東京エレクトロン株式会社 | Vacuum processing apparatus, vacuum processing method, and storage medium |
| JP5028193B2 (en) * | 2007-09-05 | 2012-09-19 | 株式会社日立ハイテクノロジーズ | Method for conveying object to be processed in semiconductor manufacturing apparatus |
| JP5005512B2 (en) * | 2007-11-07 | 2012-08-22 | 東京エレクトロン株式会社 | A gate valve device, a vacuum processing device, and a method for opening a valve body in the gate valve device. |
| JP5123820B2 (en) * | 2008-10-27 | 2013-01-23 | 東京エレクトロン株式会社 | Vacuum exhaust method for substrate processing apparatus and substrate processing apparatus |
| KR200473996Y1 (en) * | 2008-12-22 | 2014-08-13 | 주식회사 테스 | Slit Valve |
| JP5546395B2 (en) * | 2010-09-07 | 2014-07-09 | キヤノン株式会社 | Deposited film forming method and deposited film forming apparatus |
| CN102842637A (en) * | 2011-06-20 | 2012-12-26 | 理想能源设备(上海)有限公司 | Substrate treatment device and substrate treatment method |
| CN104928645A (en) * | 2015-04-07 | 2015-09-23 | 凌嘉科技股份有限公司 | Double-door gate valve device and film coating equipment with same |
| JP2017112237A (en) * | 2015-12-17 | 2017-06-22 | 株式会社ディスコ | Decompression processing apparatus |
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| KR20230001280A (en) * | 2021-06-28 | 2023-01-04 | 주식회사 원익아이피에스 | Processing method inside chamber and processing method for substrate |
| WO2025009345A1 (en) * | 2023-07-05 | 2025-01-09 | 東京エレクトロン株式会社 | Plasma processing system, substrate processing system, and gate valve unit |
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- 2006-09-01 CN CNB2006101289137A patent/CN100463105C/en not_active Expired - Fee Related
- 2006-09-01 KR KR1020060084292A patent/KR100810804B1/en active IP Right Grant
- 2006-09-01 TW TW095132459A patent/TWI398921B/en active
- 2006-09-01 CN CN2008101857774A patent/CN101441995B/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101471241B (en) * | 2007-12-26 | 2011-07-13 | 东京毅力科创株式会社 | Vacuum apparatus, vacuum processing system and pressure control method of vacuum chamber |
| TWI471896B (en) * | 2007-12-26 | 2015-02-01 | Tokyo Electron Ltd | Vacuum device, vacuum treatment system and vacuum chamber pressure control method |
| CN103597214A (en) * | 2011-06-16 | 2014-02-19 | 爱德华兹有限公司 | Evacuating a chamber |
| CN103597214B (en) * | 2011-06-16 | 2016-12-07 | 爱德华兹有限公司 | Evacuate room |
| US9695814B2 (en) | 2011-06-16 | 2017-07-04 | Edwards Limited | Evacuating a chamber |
| WO2023151184A1 (en) * | 2022-02-10 | 2023-08-17 | 长鑫存储技术有限公司 | Air pressure balance valve, air pressure balance method, and load lock chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007073541A (en) | 2007-03-22 |
| JP5078243B2 (en) | 2012-11-21 |
| TW200729331A (en) | 2007-08-01 |
| KR20070026241A (en) | 2007-03-08 |
| TWI398921B (en) | 2013-06-11 |
| KR100810804B1 (en) | 2008-03-06 |
| CN101441995B (en) | 2013-09-11 |
| CN100463105C (en) | 2009-02-18 |
| CN101441995A (en) | 2009-05-27 |
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