CN104928645A - Double-door gate valve device and film coating equipment with same - Google Patents
Double-door gate valve device and film coating equipment with same Download PDFInfo
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- CN104928645A CN104928645A CN201510160155.6A CN201510160155A CN104928645A CN 104928645 A CN104928645 A CN 104928645A CN 201510160155 A CN201510160155 A CN 201510160155A CN 104928645 A CN104928645 A CN 104928645A
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- 239000007888 film coating Substances 0.000 title 1
- 238000009501 film coating Methods 0.000 title 1
- 238000000034 method Methods 0.000 claims description 26
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 25
- 230000000694 effects Effects 0.000 abstract description 7
- 238000002955 isolation Methods 0.000 abstract 1
- 238000007747 plating Methods 0.000 description 8
- 230000009977 dual effect Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
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- Sliding Valves (AREA)
Abstract
The invention discloses a double-door gate valve device which comprises a base, two gate units and a conveying unit, wherein the base comprises a ring cavity wall, an inlet end wall which is positioned at one end of the ring cavity wall and provided with a valve inlet opening, an outlet end wall which is positioned at the other end of the ring cavity wall and provided with a valve outlet opening, an interval wall which is positioned between the inlet end wall and the outlet end wall and provided with an interval valve opening, and an air exhaustion opening. A buffer cavity is co-defined by the ring cavity wall, the inlet end wall and the interval wall. A joining cavity is co-defined by the ring cavity wall, the interval wall and the outlet end wall. The gate units are correspondingly arranged in the buffer cavity and the joining cavity respectively, and are used for opening and closing the valve inlet opening and the interval valve opening respectively to generate dual-isolation effect; besides, a distance between the inlet end wall and the outlet end wall is not greater than 500 mm, so that the equipment cost is reduced.
Description
Technical field
The present invention relates to a kind of gate-valve device, particularly relate to the filming equipment of a kind of two-door gate-valve device and the two-door gate-valve device of tool.
Background technology
Physical vapor deposition (Physical Vapor Deposition, PVD) is a kind of in the sedimentary environment of condition of high vacuum degree, utilizes the technology of physical change deposit film on an object.Wherein, be able to allow this workpiece pass in and out this sedimentary environment by normal pressure, filming equipment must carry out progressive vacuum by a gate-valve device and completely cut off, and utilizes the state that this gate-valve device makes the recovery of this sedimentary environment highly airtight, and can continue to carry out vacuum plating processing procedure.But this gate-valve device easily plating and accumulation thick film because being subject to for a long time overflowing, thus reduces isolated effect, causing this sedimentary environment vacuum tightness deterioration, and then having influence on coating quality.
In addition, there is a kind of filming equipment as disclosed in fig 1, comprise one for carrying out the cushion chamber 93 of 92, one, removal chamber, 91, one, processing procedure chamber between this processing procedure chamber 91 and this removal chamber 92 of deposition plating, and multiple gate valve 94 be arranged between described cavity.By the setting of this cushion chamber 93, although the gate valve 94 in this removal chamber 92 contiguous can be avoided to be subject to plating of overflowing, to maintain, the airtight of this processing procedure chamber 91 is completely cut off, but described cavity needs individually to connect a negative pressure source (not shown) with the gradual subnormal ambient of construction, and what thus add this filming equipment builds cost and floor space.
Summary of the invention
The object of the present invention is to provide a kind of dual resisteance to maintain the two-door gate-valve device of airtight effect.
Two-door gate-valve device of the present invention, comprises a pedestal, two shuttle element, and a supply unit.
This pedestal comprise a ring cavity wall, one in this ring cavity wall one end and have an entrance end wall entering valve port, one at this ring cavity wall the other end and have an outlet end wall valve port, one between this entrance end wall and this outlet end wall there is the spaced walls of valve port between, an and aspirating hole.This ring cavity wall, between this entrance end wall and this spaced walls, jointly define a cushion chamber.Jointly define one between this ring cavity wall, this spaced walls with this outlet end wall and be connected chamber.The distance of this entrance end wall and this outlet end wall is not more than 500mm.This cushion chamber communicates with this aspirating hole.
Described shuttle element respectively correspondence is arranged in this cushion chamber and is connected in chamber with this, and is respectively used to open and close this and enters valve port between valve port and this.
This supply unit comprises a conveying roller that can be pivotally installed in this cushion chamber.
Preferably, each shuttle element comprises a rotation axis, that can be installed on this pedestal pivotally and fans the flashboard be combined linkedly with this rotation axis, and one is installed on this pedestal and is linked to the driving mechanism of this rotation axis.This driving mechanism can drive this rotation axis to rotate between a detent position and an open site.When the rotation axis of shuttle element being arranged at this cushion chamber is at this detent position, the flashboard of this shuttle element is closed this and is entered valve port.When this rotation axis is in this open site, this flashboard is opened this and is entered valve port.When the rotation axis of shuttle element being arranged at this linking chamber is at this detent position, this valve port closed by the flashboard of this shuttle element.When this rotation axis is in this open site, this valve port opened by this flashboard.
Preferably, this ring cavity wall has a wall body, a slice cushion chamber shrouding, and a slice is connected chamber shrouding.This wall body comprises one and is communicated with this cushion chamber and the cushion chamber service ports closed by this cushion chamber shrouding, and one is communicated with this linking chamber and the linking chamber service ports closed by this linking chamber shrouding.
Preferably, the driving mechanism of each shuttle element is the combination of a cylinder pressure and a connecting rod.A cylinder body of this cylinder pressure is articulated in this pedestal.This connecting rod is articulated between this rotation axis and a piston rod of this cylinder pressure.
Preferably, this supply unit also comprises a motor for driving this conveying roller to produce rotation.
The filming equipment that another object of the present invention is to provide a kind of energy thin device and reduces the two-door gate-valve device of the tool building cost.
The filming equipment of the two-door gate-valve device of tool of the present invention, comprises a Cavity unit, a two-door gate-valve device, and one group of vacuum-lines.
This Cavity unit comprise a processing procedure chamber, one with spaced removal chamber, this processing procedure chamber, first negative pressure source making this processing procedure chamber keep negative pressure, and one makes this removal chamber keep the second negative pressure source of negative pressure.
This two-door gate-valve device comprises a pedestal, two shuttle element, and a supply unit.This pedestal have a ring cavity wall, one in this ring cavity wall one end and comprise an entrance end wall entering valve port, one at this ring cavity wall the other end and comprise an outlet end wall valve port, one between this entrance end wall and this outlet end wall, comprise the spaced walls of valve port between, an and aspirating hole.This ring cavity wall, between this entrance end wall and this spaced walls, jointly define a cushion chamber.Jointly define one between this ring cavity wall, this spaced walls with this outlet end wall and be connected chamber.The distance of this entrance end wall and this outlet end wall is not more than 500mm.This entrance end wall is connected to this processing procedure chamber airtightly.This outlet end wall is connected to this removal chamber airtightly.This cushion chamber communicates with this aspirating hole.Described shuttle element respectively correspondence is arranged in this cushion chamber and is connected in chamber with this, and is respectively used to open and close this and enters valve port between valve port and this.This supply unit has a conveying roller that can be pivotally installed in this cushion chamber.
This vacuum-lines one end is connected to this aspirating hole, and the other end is connected to this second negative pressure source.
Preferably, each shuttle element has a rotation axis, that can be installed on this pedestal pivotally and fans the flashboard be combined linkedly with this rotation axis, and one is installed on this pedestal and is linked to the driving mechanism of this rotation axis.This driving mechanism can drive this rotation axis to rotate between a detent position and an open site.When the rotation axis of shuttle element being arranged at this cushion chamber is at this detent position, the flashboard of this shuttle element is closed this and is entered valve port.When this rotation axis is in this open site, this flashboard is opened this and is entered valve port.When the rotation axis of shuttle element being arranged at this linking chamber is at this detent position, this valve port closed by the flashboard of this shuttle element.When this rotation axis is in this open site, this valve port opened by this flashboard.
Preferably, this ring cavity wall comprises a wall body, a slice cushion chamber shrouding, and a slice is connected chamber shrouding.This wall body comprises one and is communicated with this cushion chamber and the cushion chamber service ports closed by this cushion chamber shrouding, and one is communicated with this linking chamber and the linking chamber service ports closed by this linking chamber shrouding.
Preferably, the driving mechanism of each shuttle element is the combination of a cylinder pressure and a connecting rod.A cylinder body of this cylinder pressure is articulated in this pedestal.This connecting rod is articulated between this rotation axis and a piston rod of this cylinder pressure.
Preferably, this supply unit also has a motor for driving this conveying roller to produce rotation.
Beneficial effect of the present invention is: described shuttle element opens and closes this respectively and enters valve port between valve port and this, produces dual resisteance to maintain airtight effect.In addition, the distance of this entrance end wall and this outlet end wall is not more than 500mm, and the floor space of this filming equipment is reduced, and shares this second negative pressure source to simplify negative pressure equipment by this cushion chamber, and the cost that builds of this filming equipment is minimized.
Accompanying drawing explanation
Of the present invention other feature and effect, clearly present in reference to graphic embodiment, wherein:
Fig. 1 is a frontview, and an existing filming equipment is described;
Fig. 2 is a frontview, and an embodiment of the filming equipment of the two-door gate-valve device of tool of the present invention is described;
Fig. 3 is a sectional view, a workpiece is described in this embodiment, when moving to a cushion chamber by a processing procedure chamber, and the open/close states of two shuttle element;
Fig. 4 is a sectional view, this workpiece is described in this embodiment, when moving to a removal chamber by this cushion chamber, and the open/close states of described shuttle element;
Fig. 5 is a part sectioned view along the cutting line V-V in Fig. 2, and a shuttle element in an embodiment of the two-door gate-valve device of the present invention and a supply unit are described;
Fig. 6 is a part sectioned view along the cutting line VI-VI in Fig. 5, illustrates that two shuttle element in this embodiment are installed in a cushion chamber and in a linking chamber respectively;
Fig. 7 be one along the sectional view of the cutting line VII-VII in Fig. 5, this embodiment is described.
Embodiment
Consult Fig. 5 and Fig. 7, an embodiment of the two-door gate-valve device 2 of the present invention comprises a pedestal 3, two shuttle element 4, and a supply unit 5.
Consult Fig. 7, this pedestal 3 comprises 31, one, a ring cavity wall in this ring cavity wall 31 one end to be had an entrance end wall 32, entering valve port 321 at this ring cavity wall 31 the other end and has an outlet end wall 33, valve port 331 between this entrance end wall 32 and this outlet end wall 33 and have a spaced walls 34 of valve port 341 between, and an aspirating hole 35.This entrance end wall 32 is not more than 500mm with the distance of this outlet end wall 33.This ring cavity wall 31, between this entrance end wall 32 and this spaced walls 34, jointly define a cushion chamber 71.This ring cavity wall 31, jointly define one between this spaced walls 34 with this outlet end wall 33 and be connected chamber 72.This ring cavity wall 31 has a wall body 311, a slice cushion chamber shrouding 312, and a slice is connected chamber shrouding 313.This wall body 311 comprises one and is communicated with this cushion chamber 71 and the cushion chamber service ports 314 closed by this cushion chamber shrouding 312, and one is communicated with this linking chamber 72 and the linking chamber service ports 315 closed by this linking chamber shrouding 313.This cushion chamber 71 communicates with this aspirating hole 35.
Consult Fig. 2 and Fig. 6, described shuttle element 4 respectively correspondence is arranged in this cushion chamber 71 and is connected in chamber 72 with this, and is respectively used to open and close this and enters valve port 321 and valve port 341 between this.Each shuttle element 4 comprises a rotation axis 41, that can be installed on this pedestal 3 pivotally and fans the flashboard 42 be combined linkedly with this rotation axis 41, and one is installed on this pedestal 3 and is linked to the driving mechanism 43 of this rotation axis 41.The driving mechanism 43 of each shuttle element 4 is the combination of a cylinder pressure 431 and a connecting rod 432.A cylinder body 433 of this cylinder pressure 431 is articulated in this pedestal 3, and this connecting rod 432 is articulated between this rotation axis 41 and a piston rod 434 of this cylinder pressure 431.This driving mechanism 43 can drive this rotation axis 41 to rotate between a detent position and an open site.
Consult Fig. 5, this supply unit 5 comprises a conveying roller 51 that can be pivotally installed in this cushion chamber 71, and one produces for driving this conveying roller 51 motor 52 rotated.
Whereby, when the piston rod 434 of the shuttle element 4 being arranged at this cushion chamber 71 regains this cylinder body 433, this rotation axis 41 of the related rotation of connecting rod 432 being articulated in this piston rod 434, to this detent position, makes the flashboard 42 of this shuttle element 4 close this and enters valve port 321; When this piston rod 434 stretches out this cylinder body 433, this rotation axis 41 of the related rotation of this connecting rod 432, to this open site, makes this flashboard 42 open this and enters valve port 321.When the rotation axis 41 of shuttle element 4 being arranged at this linking chamber 72 is at this detent position, this valve port 341 closed by the flashboard 42 of this shuttle element 4; When this rotation axis 41 is in this open site, this valve port 341 opened by this flashboard 42.Therefore, even if the flashboard 42 being arranged at this cushion chamber 71 cannot close corresponding valve port because overflowing plating or mechanical fault, what also have another flashboard 42 can maintain between this entrance end wall 32 and this outlet end wall 33 is airtight isolated, and produces the effect of dual resisteance.
Consult Fig. 3, an embodiment of the filming equipment of the two-door gate-valve device of tool of the present invention comprises a Cavity unit 1, two-door gate-valve device 2, and one group of vacuum-lines 6.
Consult Fig. 3, this Cavity unit 1 comprises the first negative pressure source 13 that 11, one, a processing procedure chamber makes this processing procedure chamber 11 keep negative pressure with 12, one, spaced removal chamber, this processing procedure chamber 11, and second negative pressure source 14 making this removal chamber 12 keep negative pressure.It is worth mentioning that, this processing procedure chamber 11 is because need the sedimentary environment of condition of high vacuum degree, so the pressure in this processing procedure chamber 11 is not more than the pressure in this removal chamber 12.
This two-door gate-valve device 2 is the embodiment of this two-door gate-valve device 2 aforementioned, therefore, about the dependency structure of this two-door gate-valve device 2 will repeat no more.Wherein, as shown in Figure 3, the entrance end wall 32 of this two-door gate-valve device 2 is connected to this processing procedure chamber 11 airtightly, and the outlet end wall 33 of this two-door gate-valve device 2 is connected to this removal chamber 12 airtightly.
Consult Fig. 3, this vacuum-lines 6 one end communicates with this cushion chamber 71 via this aspirating hole 35, and the other end is connected to this second negative pressure source 14.Be noted that, because the chamber volume of this cushion chamber 71 is significantly reduced compared to existing, reduce the demand of this cushion chamber 71 pairs of negative pressure equipments, be thus able to share this second negative pressure source 14 with this removal chamber 12, simplify negative pressure equipment whereby, the cost that builds of this filming equipment is minimized.
Whereby, as shown in Figure 3, after a workpiece 8 completes film-plating process in this processing procedure chamber 11, the flashboard 42 be arranged in this cushion chamber 71 is opened this and is entered valve port 321, and this valve port 341 opened by the flashboard 42 be arranged in this linking chamber 72 simultaneously, make this workpiece 8 enter valve port 321 enter this cushion chamber 71 via this, and accept this this linking chamber 72 of workpiece 8 migration of conveying by this conveying roller 51.
Then, as shown in Figure 4, after this workpiece 8 moves into this removal chamber 12 completely, the flashboard 42 be arranged in this cushion chamber 71 is closed this and is entered valve port 321, and the flashboard 42 be arranged in this linking chamber 72 closes this valve port 341 simultaneously.Wherein, the flashboard 42 be arranged in this cushion chamber 71 can make this processing procedure chamber 11 recover highly airtight state immediately, and vacuum plating processing procedure can be carried out to next workpiece 8, meanwhile, this removal chamber 12 vacuum breaker is got back to an atmospheric environment and is taken out by this workpiece 8, if when the flashboard 42 in this cushion chamber 71 leaks because the flashboard 42 in excessive plating inefficacy maybe this linking chamber 72 produces, this cushion chamber 71 still can be bled by this second negative pressure source 14 constantly, to keep the vacuum state of this cushion chamber 71, outside atmosphere is avoided to lose efficacy because of described flashboard 42, and directly leak in this processing procedure chamber 11, plated film is caused to pollute.In addition, because this cushion chamber 71 shares the second negative pressure source 14 with this removal chamber 12, make the pressure gap of flashboard 42 both sides be arranged in this linking chamber 72 little, thus reduce the stress imposed on this flashboard 42, and this flashboard 42 can be opened and closed relatively easily, improve driving mechanism 43 operational paradigm being linked to this flashboard 42.
In sum, the filming equipment of the two-door gate-valve device of the present invention 2 and the two-door gate-valve device 2 of tool, open and close this respectively by described shuttle element 4 and enter valve port 321 and valve port 341 between this, and produce dual resisteance, to maintain the airtight effect to this processing procedure chamber 11, in addition, the distance of this entrance end wall and this outlet end wall is not more than 500mm, the floor space of this filming equipment is not only made to reduce, and can negative pressure equipment be simplified, the cost that builds of this filming equipment is minimized, so really object of the present invention can be reached.
In addition, the two-door gate-valve device 2 of the present invention independently can manufacture and sells, and also can become the filming equipment of a two-door gate-valve device 2 of tool in conjunction with this Cavity unit 1 and this vacuum-lines 6.
As described above, be only embodiments of the invention, and when not limiting scope of the invention process with this, namely all simple equivalences done according to claims of the present invention and description change and modify, and all still belong to scope of the present invention.
Claims (10)
1. a two-door gate-valve device, comprises a pedestal, two shuttle element, and a supply unit; It is characterized in that:
This pedestal comprises a ring cavity wall, one is positioned at this ring cavity wall one end and has the entrance end wall that enters valve port, one is positioned at this ring cavity wall the other end and has the outlet end wall that goes out valve port, one has a spaced walls of valve port between this entrance end wall and this outlet end wall, and an aspirating hole, this ring cavity wall, a cushion chamber is jointly defined between this entrance end wall and this spaced walls, this ring cavity wall, jointly define one between this spaced walls with this outlet end wall and be connected chamber, the distance of this entrance end wall and this outlet end wall is not more than 500mm, this cushion chamber communicates with this aspirating hole,
Described shuttle element respectively correspondence is arranged in this cushion chamber and is connected in chamber with this, and is respectively used to open and close this and enters valve port between valve port and this; And
This supply unit comprises a conveying roller that can be pivotally installed in this cushion chamber.
2. two-door gate-valve device according to claim 1, it is characterized in that: each shuttle element comprises the rotation axis that can be installed on this pedestal pivotally, the flashboard that one fan and this rotation axis are combined linkedly, and one is installed on this pedestal and is linked to the driving mechanism of this rotation axis, this driving mechanism can drive this rotation axis to rotate between a detent position and an open site, when the rotation axis of shuttle element being arranged at this cushion chamber is at this detent position, the flashboard of this shuttle element is closed this and is entered valve port, when this rotation axis is in this open site, this flashboard is opened this and is entered valve port, when the rotation axis of shuttle element being arranged at this linking chamber is at this detent position, this valve port closed by the flashboard of this shuttle element, when this rotation axis is in this open site, this valve port opened by this flashboard.
3. two-door gate-valve device according to claim 1, it is characterized in that: this ring cavity wall has a wall body, a slice cushion chamber shrouding, and a slice is connected chamber shrouding, this wall body comprises one and is communicated with this cushion chamber and the cushion chamber service ports closed by this cushion chamber shrouding, and one is communicated with this linking chamber and the linking chamber service ports closed by this linking chamber shrouding.
4. two-door gate-valve device according to claim 2, it is characterized in that: the driving mechanism of each shuttle element is the combination of a cylinder pressure and a connecting rod, a cylinder body of this cylinder pressure is articulated in this pedestal, and this connecting rod is articulated between this rotation axis and a piston rod of this cylinder pressure.
5. two-door gate-valve device according to claim 1, is characterized in that: this supply unit also comprises one and produces for driving this conveying roller the motor rotated.
6. a filming equipment for the two-door gate-valve device of tool, comprises a Cavity unit, and one group of vacuum-lines; This Cavity unit comprise a processing procedure chamber, one with spaced removal chamber, this processing procedure chamber, first negative pressure source making this processing procedure chamber keep negative pressure, and one makes this removal chamber keep the second negative pressure source of negative pressure; It is characterized in that:
The filming equipment of the two-door gate-valve device of this tool also comprises a two-door gate-valve device, this two-door gate-valve device comprises a pedestal, two shuttle element, and a supply unit, this pedestal has a ring cavity wall, one is positioned at this ring cavity wall one end and comprises the entrance end wall that enters valve port, one is positioned at this ring cavity wall the other end and comprises the outlet end wall that goes out valve port, one comprises the spaced walls of valve port between this entrance end wall and this outlet end wall, and an aspirating hole, this ring cavity wall, a cushion chamber is jointly defined between this entrance end wall and this spaced walls, this ring cavity wall, jointly define one between this spaced walls with this outlet end wall and be connected chamber, the distance of this entrance end wall and this outlet end wall is not more than 500mm, this entrance end wall is connected to this processing procedure chamber airtightly, this outlet end wall is connected to this removal chamber airtightly, this cushion chamber communicates with this aspirating hole, described shuttle element respectively correspondence is arranged in this cushion chamber and is connected in chamber with this, and be respectively used to open and close this and enter valve port between valve port and this, this supply unit has a conveying roller that can be pivotally installed in this cushion chamber, and
This vacuum-lines one end is connected to this aspirating hole, and the other end is connected to this second negative pressure source.
7. the filming equipment of the two-door gate-valve device of tool according to claim 6, it is characterized in that: each shuttle element has the rotation axis that can be installed on this pedestal pivotally, the flashboard that one fan and this rotation axis are combined linkedly, and one is installed on this pedestal and is linked to the driving mechanism of this rotation axis, this driving mechanism can drive this rotation axis to rotate between a detent position and an open site, when the rotation axis of shuttle element being arranged at this cushion chamber is at this detent position, the flashboard of this shuttle element is closed this and is entered valve port, when this rotation axis is in this open site, this flashboard is opened this and is entered valve port, when the rotation axis of shuttle element being arranged at this linking chamber is at this detent position, this valve port closed by the flashboard of this shuttle element, when this rotation axis is in this open site, this valve port opened by this flashboard.
8. the filming equipment of the two-door gate-valve device of tool according to claim 6, it is characterized in that: this ring cavity wall comprises a wall body, a slice cushion chamber shrouding, and a slice is connected chamber shrouding, this wall body comprises one and is communicated with this cushion chamber and the cushion chamber service ports closed by this cushion chamber shrouding, and one is communicated with this linking chamber and the linking chamber service ports closed by this linking chamber shrouding.
9. the filming equipment of the two-door gate-valve device of tool according to claim 7, it is characterized in that: the driving mechanism of each shuttle element is the combination of a cylinder pressure and a connecting rod, a cylinder body of this cylinder pressure is articulated in this pedestal, and this connecting rod is articulated between this rotation axis and a piston rod of this cylinder pressure.
10. the filming equipment of the two-door gate-valve device of tool according to claim 6, is characterized in that: this supply unit also has one and produces for driving this conveying roller the motor rotated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510160155.6A CN104928645A (en) | 2015-04-07 | 2015-04-07 | Double-door gate valve device and film coating equipment with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510160155.6A CN104928645A (en) | 2015-04-07 | 2015-04-07 | Double-door gate valve device and film coating equipment with same |
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| Publication Number | Publication Date |
|---|---|
| CN104928645A true CN104928645A (en) | 2015-09-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510160155.6A Pending CN104928645A (en) | 2015-04-07 | 2015-04-07 | Double-door gate valve device and film coating equipment with same |
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| Country | Link |
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| CN (1) | CN104928645A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101441995A (en) * | 2005-09-02 | 2009-05-27 | 东京毅力科创株式会社 | Vacuum processing apparatus |
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2015
- 2015-04-07 CN CN201510160155.6A patent/CN104928645A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101441995A (en) * | 2005-09-02 | 2009-05-27 | 东京毅力科创株式会社 | Vacuum processing apparatus |
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Application publication date: 20150923 |