CN1598598A - Checking device of display panel - Google Patents
Checking device of display panel Download PDFInfo
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- CN1598598A CN1598598A CNA2004100791042A CN200410079104A CN1598598A CN 1598598 A CN1598598 A CN 1598598A CN A2004100791042 A CNA2004100791042 A CN A2004100791042A CN 200410079104 A CN200410079104 A CN 200410079104A CN 1598598 A CN1598598 A CN 1598598A
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- 238000007689 inspection Methods 0.000 claims abstract description 31
- 230000007246 mechanism Effects 0.000 claims description 42
- 239000000969 carrier Substances 0.000 claims description 11
- 238000012423 maintenance Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 25
- 239000000758 substrate Substances 0.000 description 11
- 230000014759 maintenance of location Effects 0.000 description 10
- 229920001971 elastomer Polymers 0.000 description 8
- 239000000806 elastomer Substances 0.000 description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 6
- 238000005452 bending Methods 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- -1 amido formate Chemical compound 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000035876 healing Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/69—Arrangements or methods for testing or calibrating a device
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Nonlinear Science (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biochemistry (AREA)
- Optics & Photonics (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Abstract
本发明提供一种显示面板的检查装置，其目的在于可稳定地搬送大型面板而不会造成损伤。检查装置包括：用以接收矩形的显示面板的检查平台；及进行相对于该检查平台的搬送面板的搬送装置，搬送装置包括至少一个承载架，该承载架在X方向的两缘部及Y方向的两缘部以可卸除的方式支持面板以进行搬送。
The present invention provides an inspection device for a display panel, which aims at transporting a large panel stably without causing damage. The inspection device includes: an inspection platform for receiving a rectangular display panel; and a transport device for transporting the panel relative to the inspection platform. The two edges of the panel removably support the panel for transportation.
Description
Technical field
The invention relates to device in order to display panels such as inspection display panels.
The definition of term: among the present invention, a direction and other direction in the face that will be parallel with the display panel that testing fixture is received are called directions X and Y direction, and direction that will be vertical with directions X and Y direction (direction vertical with display panel) is called the Z direction.
Background technology
Be used for checking the device of display panel, in order to prevent the breakage of energising, be respectively equipped with: the delivery position (panel arrangement portion) that panel is handed off to testing fixture usually with probe (probe); And use to check that platform carries out the inspection position that lights a lamp and check of panel, and with unchecked panel from the delivery position conveyance to checking the position, the panel after maybe will checking from inspection position conveyance to joining the position.
An example of this testing fixture has two transport mechanisms (carrier (carrier)) of use, panel is moved to from delivery position check position and (patent documentation 1) that panel is oppositely moved.
[patent documentation 1] Japanese kokai publication hei 11-14957 communique
In this testing fixture, each transport mechanism is a pair of slide block (slider) that can move in the Y direction, keeping state at interval to be linked in the Y direction, and with two retainers (holder) directions X keep at interval and towards the outstanding state configuration of the slide block of opposite side in each slide block.
In this kind carrier, controlling of panel is by making two slide blocks move towards direction close to each other, carries out jointly with the retainer of two slide blocks.With respect to this, the removal of controlling is by making two slide blocks move towards direction separated from one another, the retainer of two slide blocks is broken away from from panel carry out.
Yet existing testing fixture is only controlled the relative a pair of edge portion of panel, so when carrying out the inspection of large-scale panel, panel can be crooked at the zone line of slide block detaching direction, and causes the panel can't conveyance or the situation of damage.
Summary of the invention
[problem that invention institute desire solves]
The objective of the invention is to the large-scale panel of conveyance stably and can not cause damage.
[solving the technological means of problem]
Testing fixture of the present invention comprises: in order to the inspection platform of the display panel that receives rectangle; And carry out carrying device with respect to the above-mentioned panel conveyance of this inspection platform, and above-mentioned carrying device comprises at least one carrier, this carrier is that two edge portions in two edge portions of directions X and Y direction support above-mentioned panel to carry out conveyance in demountable mode.
[effect of invention]
When four edge portions on four limits corresponding respectively to rectangle support panel, even large-scale panel, also can be by in the support of the edge portion of Y direction and in the support of the edge portion of directions X, and prevent that panel is in the bending at Y direction middle section of the bending of directions X middle section and panel.Therefore, the large-scale panel of conveyance stably and can not cause damage.
Above-mentioned carrier can have: several positions at Y direction maintenance interval that are connected to each edge portion of above-mentioned directions X, and be connected to above-mentioned Y direction each edge portion keep several positions at interval at directions X, and support above-mentioned panel to carry out the structure of conveyance in demountable mode.So, the support meeting of panel is very stable.
Above-mentioned carrier can comprise: in order to the X retainer of the edge portion of the above-mentioned directions X of supporting above-mentioned panel; Y retainer in order to the edge portion of the above-mentioned Y direction of supporting above-mentioned panel; Make above-mentioned X retainer in X travel mechanism that directions X moves; And make above-mentioned Y retainer in Y travel mechanism that the Y direction moves.
Above-mentioned carrier can comprise: several X retainers keep several positions at interval in order to two edge portions of the above-mentioned directions X of supporting above-mentioned panel in the Y direction; Also comprise simultaneously: several Y retainers keep several positions at interval in order to two edge portions of the above-mentioned Y direction of supporting above-mentioned panel at directions X.So, the support of panel is more stable.
Above-mentioned carrier comprises again: the X arm that above-mentioned X retainer can be installed and can move at directions X by above-mentioned X travel mechanism; And the Y arm that above-mentioned Y retainer can be installed and can move in the Y direction by above-mentioned Y travel mechanism.So, the mobile of X retainer and Y retainer becomes sliding suitable, and the support meeting of panel is more stable.
One side of above-mentioned X travel mechanism and above-mentioned Y travel mechanism also can prop up and be held in the opposing party.
One side of above-mentioned X travel mechanism and above-mentioned Y travel mechanism comprises: the 1st drive source; The 1st pulley that rotates by the 1st drive source; In the opposing party of directions X and Y direction, keep the 2nd pulley at interval with the 1st pulley; And around being hung on the above-mentioned the 1st and the 2nd pulley, and with the belt of the side binding of above-mentioned X arm and above-mentioned Y arm, the opposing party of above-mentioned X travel mechanism and above-mentioned Y travel mechanism comprises: the 2nd drive source; Rotate and extend by the 2nd drive source, and have the ball screw of the opposite threaded portion of direction at a side's of Y direction and directions X two places along a side of directions X and Y direction; And the nut that is screwed together in each threaded portion and links with the opposing party of above-mentioned X arm and above-mentioned Y arm.
Testing fixture can comprise in addition: keep panel arrangement portion at interval in directions X and above-mentioned inspection platform, and above-mentioned carrier is the handing-over of carrying out the above-mentioned display panel of above-mentioned inspection platform and above-mentioned panel arrangement portion.Moreover above-mentioned carrying device can comprise two above-mentioned carriers.
Above-mentioned carrying device can comprise again: the mode that can move individually with above-mentioned two carriers is supported the support platform of above-mentioned two carriers; And two carrier driving mechanisms that two carriers are moved individually.
Description of drawings
Fig. 1 is the front view (FV) of an embodiment that shows the testing fixture of use electrical connection device of the present invention;
Fig. 2 is the front view (FV) of testing fixture shown in Figure 1, for removing the figure that carrying device shows;
Fig. 3 is the cut-open view of cutting open along the 3-3 line of Fig. 1;
Fig. 4 is the vertical view that shows an embodiment of the carrying device that uses in the testing fixture shown in Figure 1;
Fig. 5 is the being seen figure of carrying device that sees Fig. 4 from the 5-5 direction of Fig. 4;
Fig. 6 is the oblique view that shows an embodiment of the carrier that uses in the carrying device shown in Figure 4;
Fig. 7 is the front view (FV) of carrier shown in Figure 6;
Fig. 8 is the cut-open view of cutting open along the 8-8 line of Fig. 7;
Fig. 9 is in order to the figure of key diagram 6 to the action of carrier shown in Figure 8, (A) is the state that panel is controlled in expression, (B) is the state of expression removal panel;
Figure 10 (A) to (C) is the figure that shows the embodiment of the retainer that uses in the carrying device.
Embodiment
Referring to figs. 1 to Fig. 3, testing fixture 10 is the testing fixtures of lighting a lamp of rectangular display panel 12.In the example of icon, panel 12 possesses several electrodes respectively on three limits (corresponding two minor faces and a long limit) of rectangle.The electrode that is arranged at each limit is that the direction (being length direction) on this limit is keeping at interval, and extends towards the direction perpendicular to this limit.
Testing fixture 10 is in the framework 14 made by several long elements and several board members, and containing lights a lamp checks required various machines.The front upper of testing fixture 10 is to form the dip plane 16 that the rear side of more healing toward top retreats.The tabular component that is formed with this dip plane 16 is as tabular body substrate 18.
In the example of icon, the left and right directions among Fig. 1 is a directions X, and the above-below direction of inclination is the Y direction.The Z direction is the vertical direction of the panel that tilts to receive with testing fixture 10 12.
Testing fixture 10 comprises: carry out the panel arrangement portion to panel 12 handing-over of testing fixture 10; And the inspection portion that carries out display panel 12 inspections.In the body substrate 18, the rectangular aperture 20 and 22 that ratio panels 12 is big is to be formed at the corresponding part with panel arrangement portion and inspection portion respectively.
Panel arrangement portion disposes: inclination receives the handing-over platform 24 of panel 12 and the panel 12 that is received is aimed in advance two groups of pushers (pusher) 26 of (pre-alignment).With respect to this, inspection portion disposes: inclination receives the inspection platform 28 (with reference to figure 3) of panel 12 and is used as probe (probe) device 30 of electrical connection device.
Handing-over platform 24 is the modes that receive panel 12 with tiltable, and the formed panel bed 32 of several long elements is installed on Z platform 34.Panel bed 32 can move in the Z direction by Z platform 34 when carrying out the handing-over of panel 12.
Keep pusher 26 at interval at directions X, be configured to can be on the long element that extends along directions X towards mutually near or the direction (directions X) of separating move, and move at directions X by the travel mechanism of icon not.With respect to this, keep pusher 26 at interval in the Y direction, be configured to can be on the long element that extends along the Y direction towards mutually near or the direction (Y direction) of separating move, and move in the Y direction by the travel mechanism of icon not.
Lighting a lamp in the example of icon checks it is the visual inspection of being carried out with visual type by the operator of lighting a lamp, yet, also can be and use the not inspection of lighting a lamp automatically of video cameras of icon (video camera) and portrait treating apparatus etc.
Check that platform 28 is so that the panel sorption face of chuck head (chuck top) 38 can receive the mode of the panel 12 that is tilted to, make panel sorption face relative with opening 22.
The panel sorption mask of chuck head 38 has and is used for several sorption ditches of vacuum adsorption panel 12 vacuum adsorptions, and the inside of chuck head 38 has the back light unit that illuminates panel 12 from the back side of panel 12.
Check that platform 28 has three-dimensional (X, Y and Z) platform 40,42 and 44, order is tilted to the panel 12 of reception, moves with the Z direction vertical with panel 12 towards X in parallel and Y two directions; Simultaneously also have theta stage 46, make panel 12 around the axis rotation of extending in the Z direction.
Check that platform 28 is the states that descend at chuck head 38, receive panel 12, when carrying out the inspection of panel 12, make chuck head 38 rise from carrying device 36.Again, check that platform 28 is after panel 12 is handover to carrying device 36, standby under the state that chuck head 38 descends.
Probe unit 30 comprises: corresponding to four basal components 48 on each limit of imaginary rectangle; Be disposed at three probe units 50 of three basal components 48 respectively; And in order to carry out the location of probe unit 50 with respect to the electrode of panel 12, and can make three basal components 48 respectively along its pairing limit (that is the length direction on limit) mobile travel mechanism's (not icon).
Each basal component 48 is the long shaped plate shapes that have along the length direction of its corresponding sides, and is held in the rear side of body substrate 18, and its part is exposed from opening 22.Adjacent basal component 48 is not abutted against mutually and is keeping at interval.
Probe unit 50 is to be disposed in opposite directions pair of substrates member 48, an and basal component 48 adjacent with these basal components 48.With respect to this, travel mechanism is arranged in opposite directions another to basal component 48, an and basal component 48 adjacent with these basal components 48.
The basal component 48 that links with travel mechanism is not by several fixing tools (not icon) such as pad (spacer) (not icon) and bolt, can not be installed on body substrate 18 movably and is supported by body substrate 18.
Remaining each basal component 48 is by linear guide spare guides (not icon) such as (linear guide), is held in body substrate 18 and can install movably to prop up at the length direction of its corresponding sides.
Each probe unit 50 has: the long plate shape probe base 52 that is installed on this basal component 48 with the state that extends at the length direction of pairing basal component 48; Be disposed at several probe blocks 54 of probe base 52; And be disposed at several probes 56 of probe block 54.
Probe base 52 is by several screw components (not icon), firmly is installed on the edge portion outside of the central side (being front) of rectangle in the edge portion of Width of basal component 48.
Each probe block 54 is by several screw components (not icon), firmly is installed on the outside of the Width front end side edge part of probe base 52.Each probe 56 is with the just outstanding forward state of front, utilizes suitable means to be installed on below the leading section of probe block 54.
Each travel mechanism of basal component 48 usefulness can use to comprise: be installed on the motor of body substrate 18, the lead screw (lead screw) that rotates by this motor and the general mechanism that is screwed together in the guide screw cap of lead screw.
Each probe 56 is the risings by chuck head (chuck top) 38, and presses on the electrode of panel 12 when carrying out conveyance to the inspection of the panel 12 of checking platform 28.Under this state, counter plate 12 energisings through the electrode of panel 12.
To shown in Figure 10, carrying device 36 is to possess: the framework 60 that is installed on body substrate 18 rear side as Fig. 4; Moving and keep state configuration at interval in a pair of carrier 62,64 of framework 60 at directions X at directions X; And make carrier 62,64 respectively in a pair of carrier travel mechanism 66,68 that directions X moves.
Framework 60 is that four long elements 70 are combined into rectangle, again, with the state of two guide rails 72,74 to keep the interval and to extend at directions X in the Y direction, is installed on respectively at Y direction a pair of long element in opposite directions.
Being embedded in the guiding piece (guide) 76,78 of guide rail 72,74 movably, is the two ends that are installed on carrier 62 and 64 respectively.Therefore, carrier 62 is by guide rail 72 and guiding piece 76 and prop up movably and be held in framework 60, and carrier 64 is by guide rail 74 and guiding piece 78 and prop up movably and be held in framework 60.
One side 62 (64) of carrier 62,64 is to shown in Figure 8 as Fig. 6, making in the Z direction keeps the compartment of terrain to extend the carrier pedestal 80 of Y direction, by guide rail 72 (74) and guiding piece 76 (78) and can prop up movably at directions X and be held in framework 60, and make in the Y direction to keep the compartment of terrain to extend a pair of supporting arm 82 of directions X, can be disposed at carrier pedestal 80 movably in the Y direction.
Guiding piece 76 (78) is the end that is installed on carrier pedestal 80.Carrier pedestal 80 possesses parallel with the Y direction and guide rail 84 that extend.Being embedded in the guiding piece 86 of guide rail 84 movably, is an end that is installed on supporting arm 82.Therefore, each supporting arm 82 is to prop up with the form of semi-girder to be held in carrier pedestal 80.
On each supporting arm 82, a pair of X arm 88 that keeps the interval at directions X is installed, the Y arm also is installed simultaneously.Two X arms 88 and Y arm 90 are that extend at the center towards the Y direction from supporting arm 82, are held in supporting arm 82 and prop up with the form of semi-girder.
Each X arm 88 is by suitable combining mechanisms 92 such as linear guide spares, keeps the interval and can be installed on each supporting arm 82 movably towards mutual direction (directions X) close or that separate at directions X.
Leading section at each X arm 88 has X retainer 94.With respect to this, have at directions X at the leading section of Y arm 90 and to keep a pair of Y retainer 96 at interval.Two X retainers 94 and Y retainer 96 are the edge portions that are connected to the panel 12 of the edge portion of panel 12 of directions X and Y direction respectively, and support this panel 12 jointly.
Each carrier travel mechanism the 66, the 68th, the ball screw (ball screw) 100 that order extends directions X rotatably props up and is held in framework 60, and the nut (not icon) that will be screwed together in ball screw 100 is installed on carrier pedestal 80.Ball screw 100 is to rotate with motor 104 by carrier.
The motor 104 and 104 of carrier travel mechanism 66,68 is rotation in the opposite direction and synchronously mutually.By this mode, two carriers 62 and 64 can move to from handing-over platform 24 respectively checks platform 28, or respectively from checking that platform 28 moves to handing-over platform 24.
In each arm (arm), at first Y arm 90 and 90 is by Y travel mechanism 108 and 108 and in the same moved further of Y direction.Then, X arm 88 and 88 is to be synchronized with directions X by X travel mechanism 106 and 106 respectively to move.
Each X travel mechanism 106 comprises: reversible X drive source 110 as motor; The 1st pulley 112 that rotates by X drive source 110; Keep the 2nd pulley 114 at interval with the 1st pulley 112 in directions X; And around the endless strap 116 that is hung on the 1st and the 2nd pulley 112 and 114.
The X arm 88 of upside is the upside position that is installed on endless strap 116, and the X arm 88 of downside is the downside position that is installed on endless strap 116.Therefore, when X drive source 110 rotated on a direction, two X arms 88 and 88 can move towards direction close to each other, then move towards direction separated from one another when rotating on other direction.By this mode, two X arms 88 and 88 just can carry out controlling and removing of panel 12.
In the example of icon, ball screw 122 is with the threaded bar as threaded portion 122a and 122b, links by linking tool 122c, is held in carrier pedestal 80 propping up around the mode of the axis rotation that extends the Y direction again.Each nut 124 is to be installed on supporting arm 82.
Linear guide spare can be used in guide rail 72,74,84 and guiding piece 76,78 and 78,86.
In testing fixture 10, during checking platform 28 inspection panel, carry out: utilize carrier 62 (or 64) that the panel that checks out is displaced to handing-over platform 24; Remove the panel that checks out from handing-over platform 24; Unchecked panel 12 is configured to handing-over platform 24; The aligning in advance of this unchecked panel; And with this not inspection panel be handover to carrier 62 (or 64).
Check when finishing, the not inspection panel of handing-over platform 24 sides is the carriers 62 (or 64) that remain in a side, check that the panel that checks out of platform 28 sides then remains in the opposing party's carrier 64 (or 62), then with these panels respectively conveyance to checking platform 28 and handing-over platform 24.
The panel that utilizes carrier 62 and 64 to come conveyance not check and check out is by carrier travel mechanism 66 and 68 is carried out towards the opposite directions rotation.
Utilize carrier 62 and 64 to control panel 12, be by making X drive source 110,110 and Y drive source 120 rotate towards a direction, and make X retainer 94,94 and Y retainer 96,96 shown in Fig. 9 (A) move towards close direction mutually, prop up with the edge portion that makes panel 12 to be held in retainer 94,94,96,96 and to carry out.
Utilize carrier 62 and 64 to come conveyance panel 12, be to make X retainer 94 and Y retainer 96, be connected to several positions of each edge portion of directions X respectively at Y direction maintenance interval, and each edge portion of Y direction keep several positions at interval at directions X, and under the state of supporting panel 12 liftedly, carry out.Therefore, the support meeting of panel 12 is very stable.
The removal of panel 12 is by making X drive source 110,110 and Y drive source 120 towards other direction rotation, carries out and make X retainer 94,94 and Y retainer 96,96 move towards direction separated from one another shown in Fig. 9 (B).
As testing fixture 10 when corresponding with four limits of rectangle four edge portions support panel 12 respectively, even then large-scale panel, also the support of Y direction edge portion and the support of directions X edge portion be can pass through, and the panel bending of directions X middle section and the panel bending of Y direction middle section prevented.As a result, the large-scale panel of conveyance stably and can not cause damage.
With reference to Figure 10, retainer 130 shown in Figure 10 (A), be the retention tab 132 of L font to be become panel that panel supports the state of side to be installed on X arm 88 or Y arm 90 with the recess of L font buckle and end side, and will prevent that a pair of the falling that panel 12 falls from preventing sheet 134, the panel that is arranged at retention tab 132 is buckled and is ended side, and will be installed on the recess of the L font of retention tab 132 in order to the elastomer block 136 of butt panel 12.
Falling the gauge (with the size of paper vertical direction) that prevents sheet 134 and 144, is respectively less than retention tab 132 and 142.Elastomer block the 136,146, the 156th utilizes rubber materials such as amido formate (urethane) rubber to make.The employed retainer the 94, the 96th of the embodiment of Fig. 1 to Fig. 9, retainer 130.
Above-mentioned retainer 130,140,150 all is connected to elastomer block 136,146,156 by the edge portion that makes panel 12, and the mode that makes panel 12 frictions be fastened on elastomer block 136,146,156 is supported panel 12.Yet retainer also can be use and receives panel 12 and other type of support panel 12 grades with receiving sheet.
Utilize possibility on the industry
Carrying device 36 also can be the formation of using a carrier 62 or 64. Again, in the X side that checks platform 28 To both sides configuration handing-over platform 24 and consist of in the situation of testing fixture, carrying device 36 also can possess: with panel tote To a side handing-over platform and the carrier of inspection platform; And with panel tote to the opposing party's handing-over platform with check platform The carrying device of carrier.
The present invention is not only applicable to display panels, applicable to glass substrate, organic electric field luminescence (EL) panel yet Electrical connection device Deng other display floater. In addition, the present invention is not only applicable to display floater is checked under heeling condition Device, also applicable to display floater towards above state under the testing fixture of other types such as device of checking.
The present invention is not limited to above-described embodiment, only otherwise break away from order of the present invention, can carry out various changes.
The element numbers explanation
10 testing fixtures, 12 panels
14 frameworks, 16 inclined planes
18 body substrates 20,22 openings
24 handing-over platforms, 26 pushers
28 check platform 30 probe units
32 panel beds, 34 Z platforms
36 carrying devices, 38 chuck heads
40,42,44 three-dimensional platforms, 46 theta stages
48 basal components, 50 probe units
52 probe base, 54 probe blocks
56 probes, 60 frameworks
62,64 carriers, 66,68 carrier travel mechanisms
70 long elements, 72,74,84 guide rails
76,78,86 guiding pieces, 80 carrier pedestals
82 supporting arms, 88 X arms
90 Y arms, 92 combining mechanisms
94 X retainers, 96 Y retainers
100,122 ball screws, 104 motors
108 Y travel mechanisms of 106 X travel mechanisms
110 X drive sources, 112,114 pulleys
The source is moved in 116 endless straps, 120 Y districts
122a, 122b threaded portion 122c link tool
124 nuts, 130,140,150 retainers
132,142 retention tabs 134,144 fall and prevent sheet
136,146,156 elastomer block
Claims (10)
1. the testing fixture of a display panel comprises: in order to the inspection platform of the display panel that receives rectangle; And carry out carrying device with respect to the conveyance of the above-mentioned panel of this inspection platform,
Above-mentioned carrying device is to comprise at least one carrier, and this carrier is that two edge portions in two edge portions of directions X and Y direction support above-mentioned panel to carry out conveyance in demountable mode.
2. testing fixture as claimed in claim 1, wherein, above-mentioned carrier is several positions at Y direction maintenance interval that are connected to each edge portion of above-mentioned directions X, and each edge portion of above-mentioned Y direction keep several positions at interval at directions X, and support above-mentioned panel to carry out conveyance in demountable mode.
3. testing fixture as claimed in claim 1, wherein, above-mentioned carrier is to comprise: in order to the X retainer of the edge portion of the above-mentioned directions X of supporting above-mentioned panel; Y retainer in order to the edge portion of the above-mentioned Y direction of supporting above-mentioned panel; Make above-mentioned X retainer in X travel mechanism that directions X moves; And make above-mentioned Y retainer in Y travel mechanism that the Y direction moves.
4. testing fixture as claimed in claim 3, wherein, above-mentioned carrier is to comprise: several X retainers keep several positions at interval in order to two edge portions of the above-mentioned directions X of supporting above-mentioned panel in the Y direction; Also comprise simultaneously: several Y retainers keep several positions at interval in order to two edge portions of the above-mentioned Y direction of supporting above-mentioned panel at directions X.
5. testing fixture as claimed in claim 3, wherein, above-mentioned carrier comprises again: the X arm that above-mentioned X retainer can be installed and can move at directions X by above-mentioned X travel mechanism; And the Y arm that above-mentioned Y retainer can be installed and can move in the Y direction by above-mentioned Y travel mechanism.
6. testing fixture as claimed in claim 5, wherein, a side of above-mentioned X travel mechanism and above-mentioned Y travel mechanism is held in the opposing party.
7. testing fixture as claimed in claim 5, wherein, a side of above-mentioned X travel mechanism and above-mentioned Y travel mechanism comprises: the 1st drive source; The 1st pulley that rotates by the 1st drive source; In the opposing party of directions X and Y direction, keep the 2nd pulley at interval with the 1st pulley; And around being hung on the above-mentioned the 1st and the 2nd pulley, and with the belt of the side binding of above-mentioned X arm and above-mentioned Y arm,
The opposing party of above-mentioned X travel mechanism and above-mentioned Y travel mechanism comprises: the 2nd drive source; Rotate and extend by the 2nd drive source, and have the ball screw of the opposite threaded portion of direction at a side's of Y direction and directions X two places along a side of directions X and Y direction; And the nut that is screwed together in each threaded portion and links with the opposing party of above-mentioned X arm and above-mentioned Y arm.
8. as each described testing fixture in the claim 1 to 7, wherein, comprise again: keep panel arrangement portion at interval in directions X and above-mentioned inspection platform, and above-mentioned carrier is the handing-over of carrying out the above-mentioned display panel of above-mentioned inspection platform and above-mentioned panel arrangement portion.
9. testing fixture as claimed in claim 8, wherein, above-mentioned carrying device comprises two above-mentioned carriers.
10. testing fixture as claimed in claim 9, wherein, above-mentioned carrying device comprises again: the mode that can move individually with above-mentioned two carriers is supported the support platform of above-mentioned two carriers; And two carrier driving mechanisms that two carriers are moved individually.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003326124 | 2003-09-18 | ||
| JP2003326124A JP4490066B2 (en) | 2003-09-18 | 2003-09-18 | Display panel inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1598598A true CN1598598A (en) | 2005-03-23 |
| CN100401495C CN100401495C (en) | 2008-07-09 |
Family
ID=34456394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100791042A Expired - Lifetime CN100401495C (en) | 2003-09-18 | 2004-09-07 | Inspection device for display panel |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4490066B2 (en) |
| KR (1) | KR100634059B1 (en) |
| CN (1) | CN100401495C (en) |
| TW (1) | TWI272234B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100507641C (en) * | 2005-12-29 | 2009-07-01 | 乐金显示有限公司 | Inspection apparatus for liquid crystal display panels |
| CN101876679A (en) * | 2009-05-01 | 2010-11-03 | 日本麦可罗尼克斯股份有限公司 | Test device for flat plate-shaped object to be inspected |
| CN102998823A (en) * | 2012-12-06 | 2013-03-27 | 京东方科技集团股份有限公司 | Polarizer supporting part for lighting check equipment and lighting check equipment |
| CN103728505A (en) * | 2012-10-15 | 2014-04-16 | 日本麦可罗尼克斯股份有限公司 | Detection device |
| CN103808983A (en) * | 2012-11-08 | 2014-05-21 | 三星显示有限公司 | Guide assembly for inspecting panel and tray having the same |
| CN111747116A (en) * | 2019-03-29 | 2020-10-09 | 日本电产三协株式会社 | Panel conveying device and panel conveying system |
| CN111747117A (en) * | 2019-03-29 | 2020-10-09 | 日本电产三协株式会社 | Panel carrying system |
| CN111999919A (en) * | 2020-08-31 | 2020-11-27 | 晟光科技股份有限公司 | LCD display screen positioning detection mechanism |
| CN113348057A (en) * | 2018-12-05 | 2021-09-03 | 尼柯斯有限公司 | Holding mechanism and conveyed object conveying device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006317332A (en) * | 2005-05-13 | 2006-11-24 | Micronics Japan Co Ltd | Lighting inspection device |
| JP4914702B2 (en) * | 2006-12-06 | 2012-04-11 | 新光電気工業株式会社 | Work positioning device |
| JP5111285B2 (en) * | 2008-08-06 | 2013-01-09 | 株式会社日立ハイテクノロジーズ | Sample transport mechanism |
| JP5631020B2 (en) * | 2009-05-01 | 2014-11-26 | 株式会社日本マイクロニクス | Test equipment for flat specimen |
| KR101868083B1 (en) * | 2011-04-13 | 2018-06-19 | 삼성디스플레이 주식회사 | Jig unit for inspecting a display panel |
| KR101367910B1 (en) * | 2011-12-30 | 2014-02-28 | 엘아이지에이디피 주식회사 | Substrate Aligner and Substrate Inspecting System With the Same |
| JP5978937B2 (en) * | 2012-11-13 | 2016-08-24 | 旭硝子株式会社 | Substrate transfer hand and substrate transfer method |
| KR101281075B1 (en) * | 2013-01-31 | 2013-07-09 | 주식회사 현성오토텍 | Inspection device of packge for vehicle of three-dimensional shape |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4217370B2 (en) * | 2000-06-30 | 2009-01-28 | 芝浦メカトロニクス株式会社 | Substrate transfer device |
| JP3914717B2 (en) * | 2001-04-13 | 2007-05-16 | 武秀 林 | Flat panel transfer system |
| JP4745536B2 (en) * | 2001-06-04 | 2011-08-10 | 株式会社日本マイクロニクス | Display substrate transfer device |
-
2003
- 2003-09-18 JP JP2003326124A patent/JP4490066B2/en not_active Expired - Lifetime
-
2004
- 2004-06-15 TW TW093117145A patent/TWI272234B/en not_active IP Right Cessation
- 2004-06-24 KR KR1020040047704A patent/KR100634059B1/en active IP Right Grant
- 2004-09-07 CN CNB2004100791042A patent/CN100401495C/en not_active Expired - Lifetime
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100507641C (en) * | 2005-12-29 | 2009-07-01 | 乐金显示有限公司 | Inspection apparatus for liquid crystal display panels |
| CN101876679B (en) * | 2009-05-01 | 2014-08-13 | 日本麦可罗尼克斯股份有限公司 | Testing device of a flat-plate shaped body to be tested |
| CN101876679A (en) * | 2009-05-01 | 2010-11-03 | 日本麦可罗尼克斯股份有限公司 | Test device for flat plate-shaped object to be inspected |
| CN103728505A (en) * | 2012-10-15 | 2014-04-16 | 日本麦可罗尼克斯股份有限公司 | Detection device |
| CN103728505B (en) * | 2012-10-15 | 2016-06-22 | 日本麦可罗尼克斯股份有限公司 | Check device |
| CN103808983B (en) * | 2012-11-08 | 2018-03-27 | 三星显示有限公司 | Guide assembly for inspection panel and the pallet with guide assembly |
| CN103808983A (en) * | 2012-11-08 | 2014-05-21 | 三星显示有限公司 | Guide assembly for inspecting panel and tray having the same |
| CN102998823B (en) * | 2012-12-06 | 2015-04-08 | 京东方科技集团股份有限公司 | Polarizer supporting part for lighting check equipment and lighting check equipment |
| US9207470B2 (en) | 2012-12-06 | 2015-12-08 | Boe Technology Group Co., Ltd. | Polarizer support member and lighting-inspection equipment having the same |
| CN102998823A (en) * | 2012-12-06 | 2013-03-27 | 京东方科技集团股份有限公司 | Polarizer supporting part for lighting check equipment and lighting check equipment |
| CN113348057A (en) * | 2018-12-05 | 2021-09-03 | 尼柯斯有限公司 | Holding mechanism and conveyed object conveying device |
| CN111747116A (en) * | 2019-03-29 | 2020-10-09 | 日本电产三协株式会社 | Panel conveying device and panel conveying system |
| CN111747117A (en) * | 2019-03-29 | 2020-10-09 | 日本电产三协株式会社 | Panel carrying system |
| CN111999919A (en) * | 2020-08-31 | 2020-11-27 | 晟光科技股份有限公司 | LCD display screen positioning detection mechanism |
| CN111999919B (en) * | 2020-08-31 | 2023-05-05 | 晟光科技股份有限公司 | LCD display screen positioning detection mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200512143A (en) | 2005-04-01 |
| CN100401495C (en) | 2008-07-09 |
| JP4490066B2 (en) | 2010-06-23 |
| KR20050028298A (en) | 2005-03-22 |
| TWI272234B (en) | 2007-02-01 |
| KR100634059B1 (en) | 2006-10-16 |
| JP2005091862A (en) | 2005-04-07 |
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Granted publication date: 20080709 |