CN117241622A - Display panel and manufacturing method thereof - Google Patents
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Abstract
Description
技术领域Technical field
本申请主要涉及显示技术领域,特别是涉及一种显示面板及其制作方式。This application mainly relates to the field of display technology, and in particular to a display panel and its manufacturing method.
背景技术Background technique
OLED(Organic Light-Emitting Diode),即有机发光二极管,其自发光原理是用ITO透明电极和金属电极分别作为器件的阳极(Anode)和阴极(Cathode),在一定电压驱动下,电子和空穴分别从阴极和阳极经移动到有机发光层复合后发出可见光。因其无需背光源、可视角度大、色彩更丰富、节能显著等优势,广泛的应用于各个领域之中。OLED (Organic Light-Emitting Diode), that is, organic light-emitting diode, its self-luminous principle is to use ITO transparent electrode and metal electrode as the anode (Anode) and cathode (Cathode) of the device respectively. Under a certain voltage drive, electrons and holes From the cathode and anode respectively, they move to the organic light-emitting layer and combine to emit visible light. Because it does not require a backlight, has a large viewing angle, richer colors, and significant energy saving, it is widely used in various fields.
在相关技术之中,为了实现无源矩阵OLED的高分辨率和彩色化,更好地解决阴极模板分辨率低和器件成品率低等问题,实际研究中引入了阴极隔离柱结构并采用FMM(FineMetal Mask,金属掩膜版)工艺进行沉积,即在器件制备中不使用金属模板,而是在蒸镀有机薄膜和金属阴极之前,在基板上制作绝缘的间壁,最终实现将器件的不同像素隔开,实现像素阵列。Among related technologies, in order to achieve high resolution and colorization of passive matrix OLEDs and better solve the problems of low cathode template resolution and low device yield, the cathode isolation pillar structure was introduced in actual research and FMM ( FineMetal Mask (Metal Mask) process is deposited, that is, no metal template is used in device preparation, but insulating partitions are made on the substrate before evaporating the organic film and metal cathode to ultimately separate different pixels of the device. On, implement pixel array.
采用上述的方式会造成阴极的整面均一性较差,由此造成的IR Drop(电阻压降)明显,显示出现亮度不均等问题的出现。Using the above method will cause the uniformity of the entire cathode to be poor, resulting in an obvious IR Drop (resistance voltage drop), and problems such as uneven brightness in the display.
发明内容Contents of the invention
本申请的是主要目的是提出一种显示面板及其制作方式,能够在面板中的阴极顶部形成辅助阴极,并使阴极与辅助阴极连接,增大阴极面积提升整面阴极的均一性,降低IRDrop,改善显示亮度不均的问题。The main purpose of this application is to propose a display panel and its manufacturing method, which can form an auxiliary cathode on the top of the cathode in the panel, connect the cathode to the auxiliary cathode, increase the cathode area, improve the uniformity of the entire cathode, and reduce IRDrop , improve the problem of uneven display brightness.
为解决上述问题,本申请提供一种显示面板,该显示面板包括如下结构:基板;多个子像素,设置于基板上;像素限定层,设置于基板上,像素限定层用于限定多个子像素的位置;隔离结构,设置于像素限定层上,隔离结构用于隔离多个子像素,隔离结构包括依次层叠的第一导电层、第一绝缘层、第二导电层和第二绝缘层,相邻两个子像素的阴极层通过第一导电层连接,第一绝缘层上设有过孔,第一导电层和第二导电层通过过孔连接;阴极辅助层,设置于隔离结构上,阴极辅助层连接第二导电层。In order to solve the above problems, the present application provides a display panel, which includes the following structure: a substrate; a plurality of sub-pixels arranged on the substrate; a pixel defining layer arranged on the substrate, and the pixel defining layer is used to define the pixels of the multiple sub-pixels. position; the isolation structure is provided on the pixel defining layer. The isolation structure is used to isolate multiple sub-pixels. The isolation structure includes a first conductive layer, a first insulating layer, a second conductive layer and a second insulating layer stacked in sequence. Two adjacent layers The cathode layer of the sub-pixel is connected through the first conductive layer, the first insulating layer is provided with a via hole, the first conductive layer and the second conductive layer are connected through the via hole; the cathode auxiliary layer is provided on the isolation structure, and the cathode auxiliary layer is connected second conductive layer.
在一实施例中,第一绝缘层包括主体部和设置于主体部上的顶部,顶部延伸出主体部的上表面以形成第一悬垂部;第二绝缘层延伸出第二导电层的上表面以形成第二悬垂部。In one embodiment, the first insulating layer includes a main body and a top disposed on the main body. The top extends out of the upper surface of the main body to form a first overhang; the second insulating layer extends out of the upper surface of the second conductive layer. to form a second overhang.
在一实施例中,过孔贯穿主体部和顶部。In one embodiment, the via holes extend through the main body and the top.
在一实施例中,阴极辅助层覆盖第二悬垂部的上表面、侧面和下表面,第二导电层的侧面,以及第一悬垂部的上表面和侧面。In one embodiment, the cathode auxiliary layer covers the upper surface, side surfaces, and lower surfaces of the second overhang portion, the side surfaces of the second conductive layer, and the upper surface and side surfaces of the first overhang portion.
在一实施例中,第一悬垂部的侧面还设置有有机层,阴极辅助层覆盖有机层。In one embodiment, an organic layer is further provided on the side of the first overhanging portion, and the cathode auxiliary layer covers the organic layer.
在一实施例中,子像素包括依次层叠的阳极层、发光层和阴极层,发光层搭接于像素限定层的上表面,阴极层延伸至发光层和第一导电层之间并接触像素限定层的上表面。In one embodiment, the sub-pixel includes an anode layer, a luminescent layer and a cathode layer stacked in sequence, the luminescent layer overlaps the upper surface of the pixel defining layer, and the cathode layer extends between the luminescent layer and the first conductive layer and contacts the pixel defining layer. the upper surface of the layer.
在一实施例中,显示面板还包括:保护层,保护层覆盖阴极层、第一导电层、第一绝缘层、阴极辅助层;第一封装层,第一封装层覆盖保护层和第二绝缘层,第一封装层的上表面为平坦结构;第二封装层,设置于第一封装层上。In one embodiment, the display panel further includes: a protective layer covering the cathode layer, the first conductive layer, the first insulating layer, and the cathode auxiliary layer; a first encapsulation layer covering the protective layer and the second insulation layer layer, the upper surface of the first encapsulation layer is a flat structure; the second encapsulation layer is disposed on the first encapsulation layer.
为解决上述问题,本申请还提供一种显示面板的制作方法,该制作方法的步骤包括:提供一基板;在基板上形成阳极层和像素限定层;在像素限定层上依次形成第一导电层、第一绝缘层、第二导电层和第二绝缘层,第一绝缘层上设有过孔,第一导电层和所述第二导电层通过过孔连接;在阳极层上依次形成发光层和阴极层,并在隔离结构上形成阴极辅助层,阴极辅助层连接第二导电层,阳极层、发光层和阴极层形成子像素,相邻两个子像素的阴极层通过第一导电层连接。In order to solve the above problems, the present application also provides a method for manufacturing a display panel. The steps of the manufacturing method include: providing a substrate; forming an anode layer and a pixel defining layer on the substrate; and sequentially forming a first conductive layer on the pixel defining layer. , a first insulating layer, a second conductive layer and a second insulating layer, the first insulating layer is provided with a via hole, the first conductive layer and the second conductive layer are connected through the via hole; a light-emitting layer is formed on the anode layer in sequence and a cathode layer, and a cathode auxiliary layer is formed on the isolation structure, the cathode auxiliary layer is connected to the second conductive layer, the anode layer, the light-emitting layer and the cathode layer form a sub-pixel, and the cathode layers of two adjacent sub-pixels are connected through the first conductive layer.
在一实施例中,在像素限定层上依次形成第一导电层、第一绝缘层、第二导电层和第二绝缘层,包括:在像素限定层上依次形成第一导电层和第一绝缘层,第一绝缘层包括主体部和设置于主体部上的顶部,顶部延伸出主体部的上表面以形成第一悬垂部;在第一绝缘层上形成贯穿主体部和顶部的过孔;在第一绝缘层上形成第二导电层,第二导电层通过过孔连接第一导电层;在第二导电层上形成第二绝缘层,第二绝缘层延伸出第二导电层的上表面以形成第二悬垂部。In one embodiment, forming the first conductive layer, the first insulating layer, the second conductive layer and the second insulating layer on the pixel defining layer in sequence includes: forming the first conductive layer and the first insulating layer on the pixel defining layer in sequence. layer, the first insulating layer includes a main body part and a top part disposed on the main body part, the top part extends from the upper surface of the main body part to form a first overhang part; a via hole penetrating the main body part and the top part is formed on the first insulating layer; A second conductive layer is formed on the first insulating layer, and the second conductive layer is connected to the first conductive layer through a via hole; a second insulating layer is formed on the second conductive layer, and the second insulating layer extends out of the upper surface of the second conductive layer. A second overhang is formed.
在一实施例中,在阳极层上依次形成发光层和阴极层,并在隔离结构上形成阴极辅助层,包括:在阳极层上形成发光层、并在第一悬垂部的侧面形成有机层;在发光层上形成阴极层、并在第二悬垂部的上表面、侧面和下表面,第二导电层的侧面,以及第一悬垂部的上表面和侧面形成阴极辅助层。In one embodiment, sequentially forming a luminescent layer and a cathode layer on the anode layer, and forming a cathode auxiliary layer on the isolation structure includes: forming a luminescent layer on the anode layer, and forming an organic layer on the side of the first overhang; A cathode layer is formed on the light-emitting layer, and a cathode auxiliary layer is formed on the upper surface, side surfaces, and lower surfaces of the second overhanging portion, the side surfaces of the second conductive layer, and the upper surface and side surfaces of the first overhanging portion.
通过上述显示面板以及利用上述制作方法制作的显示面板,在悬垂结构底座上增加双悬垂结构,使得阴极在顶部悬垂结构上形成的辅助阴极,以使底部阴极与辅助阴极通过金属柱实现连接,从而提升了整面阴极的均一性,增大了阴极的面积从而降低了阴极电阻,进而减弱因阴极电阻较大而造成的IR Drop,以改善显示亮度不均匀的现象。Through the above display panel and the display panel made by the above manufacturing method, a double suspension structure is added to the suspension structure base, so that the cathode forms an auxiliary cathode on the top suspension structure, so that the bottom cathode and the auxiliary cathode are connected through the metal pillar, thereby It improves the uniformity of the entire cathode, increases the area of the cathode, thereby reducing the cathode resistance, thereby weakening the IR Drop caused by the large cathode resistance to improve the uneven display brightness.
附图说明Description of drawings
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。其中:In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without exerting creative efforts. in:
图1是本申请提供的显示面板一实施例的结构示意图;Figure 1 is a schematic structural diagram of an embodiment of a display panel provided by this application;
图2是本申请提供的显示面板一实施例的中间结构示意图;Figure 2 is an intermediate structural schematic diagram of an embodiment of a display panel provided by this application;
图3是背板阳极、阴极、辅助阴极的位置俯视图;Figure 3 is a top view of the positions of the anode, cathode, and auxiliary cathode of the backplate;
图4是本申请提供的显示面板制作方法一实施例的流程示意图;Figure 4 is a schematic flow chart of an embodiment of a display panel manufacturing method provided by this application;
图5是图4中步骤S14的子步骤流程示意图;Figure 5 is a schematic flowchart of the sub-steps of step S14 in Figure 4;
图6是图4中步骤S16的子步骤流程示意图;Figure 6 is a schematic flowchart of the sub-steps of step S16 in Figure 4;
图7a~图7k是图4中提供的显示面板制作方法中各步骤对应的结构示意图;Figures 7a to 7k are structural schematic diagrams corresponding to each step in the display panel manufacturing method provided in Figure 4;
图8是本申请提供的显示装置一实施例的结构示意图。FIG. 8 is a schematic structural diagram of an embodiment of a display device provided by this application.
附图标记:100、显示面板;10、基板;20、子像素;21、阳极层;22、发光层;23、阴极层;30、像素限定层;40、隔离结构;41、第一导电层;42、第一绝缘层;421、主体部;422、顶部;43、第二导电层;44、第二绝缘层;50、阴极辅助层;60、保护层;70、第一封装层;80、第二封装层;a、第一悬垂部;b、第二悬垂部;c、有机层;A、过孔;1、阳极区域;2、阴极区域;3、辅助阴极区域;200、显示装置。Reference signs: 100, display panel; 10, substrate; 20, sub-pixel; 21, anode layer; 22, light-emitting layer; 23, cathode layer; 30, pixel defining layer; 40, isolation structure; 41, first conductive layer ; 42. First insulating layer; 421. Main body; 422. Top; 43. Second conductive layer; 44. Second insulating layer; 50. Cathode auxiliary layer; 60. Protective layer; 70. First packaging layer; 80 , the second encapsulation layer; a, the first overhang part; b, the second overhang part; c, organic layer; A, via hole; 1, anode area; 2, cathode area; 3, auxiliary cathode area; 200, display device .
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述。可以理解的是,此处所描述的具体实施例仅用于解释本申请,而非对本申请的限定。另外还需要说明的是,为了便于描述,附图中仅示出了与本申请相关的部分而非全部结构。基于本申请中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. It can be understood that the specific embodiments described here are only used to explain the present application, but not to limit the present application. In addition, it should be noted that, for convenience of description, only some but not all structures related to the present application are shown in the drawings. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of this application.
本申请中的术语“第一”、“第二”等是用于区别不同对象,而不是用于描述特定顺序。此外,术语“包括”和“具有”以及它们任何变形,意图在于覆盖不排他的包含。例如包含了一系列步骤或单元的过程、方法、系统、产品或设备没有限定于已列出的步骤或单元,而是可选地还包括没有列出的步骤或单元,或可选地还包括对于这些过程、方法、产品或设备固有的其它步骤或单元。The terms "first", "second", etc. in this application are used to distinguish different objects, rather than describing a specific sequence. Furthermore, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units that are not listed, or optionally also includes Other steps or units inherent to such processes, methods, products or devices.
在本文中提及“实施例”意味着,结合实施例描述的特定特征、结构或特性可以包含在本申请的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例,也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是,本文所描述的实施例可以与其它实施例相结合。Reference herein to "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The appearances of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those skilled in the art understand, both explicitly and implicitly, that the embodiments described herein may be combined with other embodiments.
目前,为了更好地解决阴极模板分辨率低和器件成品率低等问题,实际研究中引入了阴极隔离柱结构以实现将不同像素隔离,用以解决相邻像素间有机发光层短路等问题,由于实际设计中,像素之间的开口间距较小,悬垂体宽度有限,故受限于导电氧化物柱体的宽度较小且接触电阻较大,从而导致其阴极的整面均一性较差,由此造成的IR Drop明显,显示出现亮度不均等问题的出现。At present, in order to better solve the problems of low cathode template resolution and low device yield, the cathode isolation pillar structure is introduced in actual research to isolate different pixels and solve problems such as short circuit of the organic light-emitting layer between adjacent pixels. In actual design, the opening spacing between pixels is small and the width of the pendant is limited. Therefore, the width of the conductive oxide cylinder is small and the contact resistance is large, resulting in poor uniformity of the entire cathode. The resulting IR Drop is obvious, and problems such as uneven brightness appear on the display.
参阅图1和图2,图1是本申请提供的显示面板一实施例的结构示意图。图2是本申请提供的显示面板一实施例的中间结构示意图。该显示面板包括:基板10、子像素20、像素限定层30、隔离结构40、阴极辅助层50。Referring to Figures 1 and 2, Figure 1 is a schematic structural diagram of an embodiment of a display panel provided by the present application. FIG. 2 is a schematic structural diagram of an embodiment of a display panel provided by this application. The display panel includes: a substrate 10, a sub-pixel 20, a pixel defining layer 30, an isolation structure 40, and a cathode auxiliary layer 50.
具体地,多个子像素20,设置于基板10上,子像素20包括依次层叠的阳极层21、发光层22和阴极层23;像素限定层30,设置于基板10上,像素限定层30用于限定多个子像素20的位置;隔离结构40,设置于像素限定层上,隔离结构40用于隔离多个子像素20,隔离结构40包括依次层叠的第一导电层41、第一绝缘层42、第二导电层43和第二绝缘层44,相邻两个子像素20的阴极层23通过第一导电层41连接,第一绝缘层42上设有过孔A,第一导电层41和第二导电层43通过过孔连接;阴极辅助层50,设置于隔离结构40上,阴极辅助层50连接第二导电层43。Specifically, a plurality of sub-pixels 20 are provided on the substrate 10. The sub-pixels 20 include an anode layer 21, a light-emitting layer 22 and a cathode layer 23 stacked in sequence; a pixel defining layer 30 is provided on the substrate 10, and the pixel defining layer 30 is used to Define the positions of the plurality of sub-pixels 20; the isolation structure 40 is provided on the pixel definition layer. The isolation structure 40 is used to isolate the plurality of sub-pixels 20. The isolation structure 40 includes a first conductive layer 41, a first insulating layer 42, and a first layer 42 stacked in sequence. Two conductive layers 43 and a second insulating layer 44, the cathode layers 23 of two adjacent sub-pixels 20 are connected through the first conductive layer 41, the first insulating layer 42 is provided with a via A, the first conductive layer 41 and the second conductive layer The layers 43 are connected through via holes; the cathode auxiliary layer 50 is provided on the isolation structure 40, and the cathode auxiliary layer 50 is connected to the second conductive layer 43.
其中,第一导电层41和第二导电层43可以采用金属氧化物、过度金属氧化物或其他导电材料制成;具体地,第一导电层41和第二导电层43的材料相同,也可以不相同,具体根据实际情况进行设定。Among them, the first conductive layer 41 and the second conductive layer 43 can be made of metal oxide, transition metal oxide or other conductive materials; specifically, the materials of the first conductive layer 41 and the second conductive layer 43 can be the same. Not the same, the specific setting should be based on the actual situation.
可选地,在一实施例中,第一绝缘层42包括主体部421和设置于主体部421上的顶部422,顶部422延伸出主体部421的上表面以形成第一悬垂部a;第二绝缘层44延伸出第二导电层43的上表面以形成第二悬垂部b。其中,第一绝缘层42的主体部421和顶部422的结构分别采用一氧化硅(SiO)、二氧化硅(SiO2)、氮化硅(SiNx)、氮氧化硅(SiNO)等材料,利用不同的材料的刻蚀速率不同以形成倒梯形的蘑菇形状。在一实施例中,第一绝缘层42采用一氧化硅(SiO)和氮化硅(SiNx)双层结构在第一导电层41上方形成第一悬垂部a,以构成第一倒梯形的蘑菇状结构;第二绝缘层44采用无机SiNx材料在第二导电层43上方形成第二悬垂部b,以构成第二倒梯形的蘑菇状结构,第一倒梯形结构与第二倒梯形结构一起构成双悬垂结构。Optionally, in one embodiment, the first insulating layer 42 includes a main body part 421 and a top part 422 disposed on the main body part 421. The top part 422 extends from the upper surface of the main body part 421 to form a first overhang part a; a second The insulating layer 44 extends out of the upper surface of the second conductive layer 43 to form a second overhang b. Among them, the structures of the main body 421 and the top 422 of the first insulating layer 42 are respectively made of silicon monoxide (SiO), silicon dioxide (SiO2), silicon nitride (SiNx), silicon oxynitride (SiNO) and other materials, using different materials. The materials are etched at different rates to form an inverted trapezoidal mushroom shape. In one embodiment, the first insulating layer 42 adopts a double-layer structure of silicon monoxide (SiO) and silicon nitride (SiNx) to form a first overhang a above the first conductive layer 41 to form a first inverted trapezoid mushroom. -like structure; the second insulating layer 44 uses inorganic SiNx material to form a second overhang b above the second conductive layer 43 to form a second inverted trapezoidal mushroom-shaped structure. The first inverted trapezoidal structure and the second inverted trapezoidal structure are formed together. Double overhang construction.
可选地,在一实施例中,第一悬垂部a和第二悬垂部b的长度相等,在另一实施例中,第一悬垂部a的长度小于第二悬垂部b的长度,通过构建第一悬垂部a和第二悬垂部b的方式,使得隔离结构40呈现出蘑菇体的结构,以解决相邻像素之间的有机发光层短路的问题。Optionally, in one embodiment, the lengths of the first overhanging portion a and the second overhanging portion b are equal. In another embodiment, the length of the first overhanging portion a is smaller than the length of the second overhanging portion b. By constructing The manner of the first overhanging portion a and the second overhanging portion b causes the isolation structure 40 to exhibit a mushroom body structure to solve the problem of short circuit of the organic light-emitting layer between adjacent pixels.
可选地,在一实施例中,过孔A贯穿主体部421和顶部422,通过对第一绝缘层42进行刻蚀打孔的方式,实现后续对底部第一导电层41和顶部第二导电层43通过过孔A进行连接,并且第二导电层43与阴极辅助层50相连接,第一导电层41与阴极层23连接,从而实现四者的连接导通,形成整面的阴极导通。Optionally, in one embodiment, the via A penetrates the main body part 421 and the top part 422, and the first insulating layer 42 is etched and punched to realize subsequent conductive processing of the bottom first conductive layer 41 and the top second conductive layer 42. Layer 43 is connected through via A, and the second conductive layer 43 is connected to the cathode auxiliary layer 50, and the first conductive layer 41 is connected to the cathode layer 23, thereby achieving connection and conduction between the four, forming a cathode conduction on the entire surface. .
可选地,在一实施例中,阴极辅助层50覆盖第二悬垂部b的上表面、侧面和下表面,第二导电层43的侧面,以及第一悬垂部a的上表面和侧面。Optionally, in one embodiment, the cathode auxiliary layer 50 covers the upper surface, side surfaces and lower surfaces of the second overhang part b, the side surfaces of the second conductive layer 43, and the upper surface and side surfaces of the first overhang part a.
可选地,在一实施例中,第一悬垂部a的侧面还设置有有机层c,阴极辅助层50覆盖有机层c。Optionally, in one embodiment, an organic layer c is further provided on the side of the first overhang a, and the cathode auxiliary layer 50 covers the organic layer c.
其中,在蒸发沉积的过程中,由于隔离结构40中的延伸出的悬垂部的存在,导致阴极层23和发光层22在形成的过程,会在延伸突出悬垂部的发生断裂,以在悬垂部上形成阴极辅助层50和有机层c。具体地,在一实施例中,通过改变阴极层23和发光层22的蒸发沉积角度,使其在第二绝缘层44的第二悬垂部b处断裂,以形成阴极辅助层50和有机层c,其中有机层c覆盖第一绝缘层42中的第一悬垂部a的上表面及侧面的一部分;阴极辅助层50覆盖在第一绝缘层42中的第一悬垂部a的上表面及侧面和第二绝缘层44中的第二悬垂部b的上表面及侧面,将有机层c表面覆盖,并且沉积覆盖在第二导电层43的侧面,与第二导电层43接触连接,实现阴极辅助层50与第二导电层43的导通。During the evaporation deposition process, due to the existence of the extended overhang in the isolation structure 40, the cathode layer 23 and the luminescent layer 22 may break during the formation process of the extended overhang, so that the overhang is The cathode auxiliary layer 50 and the organic layer c are formed thereon. Specifically, in one embodiment, the cathode auxiliary layer 50 and the organic layer c are formed by changing the evaporation deposition angle of the cathode layer 23 and the light-emitting layer 22 so that they are broken at the second overhang b of the second insulating layer 44 , wherein the organic layer c covers part of the upper surface and side surfaces of the first overhanging portion a in the first insulating layer 42; the cathode auxiliary layer 50 covers the upper surface and side surfaces of the first overhanging portion a in the first insulating layer 42 and The upper surface and side surfaces of the second overhang b in the second insulating layer 44 cover the surface of the organic layer c, and are deposited and covered on the side surfaces of the second conductive layer 43 to be in contact with the second conductive layer 43 to form a cathode auxiliary layer. 50 and the second conductive layer 43.
可选地,在一实施例中,子像素20包括依次层叠的阳极层21、发光层22和阴极层23,发光层22搭接于像素限定层30的上表面,阴极层23延伸至发光层22和第一导电层41之间并接触像素限定层30的上表面。由于上述第一悬垂部a和第二悬垂部b的原因,在沉积阴极层23和发光层22的过程中,阴极层23覆盖在发光层22的上表面和侧面,与第一导电层41接触连接,从而实现阴极层23和第一导电层41的导通,并且通过阴极层23将发光层22与第一导电层41之间隔断,防止发光层22与第一导电层41导通,以使相邻间子像素发生有机发光层短路的问题。Optionally, in one embodiment, the sub-pixel 20 includes an anode layer 21, a luminescent layer 22 and a cathode layer 23 stacked in sequence. The luminescent layer 22 overlaps the upper surface of the pixel defining layer 30, and the cathode layer 23 extends to the luminescent layer. 22 and the first conductive layer 41 and in contact with the upper surface of the pixel defining layer 30 . Due to the above-mentioned first overhang a and second overhang b, during the deposition of the cathode layer 23 and the luminescent layer 22 , the cathode layer 23 covers the upper surface and side surfaces of the luminescent layer 22 and is in contact with the first conductive layer 41 connection, thereby achieving conduction between the cathode layer 23 and the first conductive layer 41, and isolating the light-emitting layer 22 from the first conductive layer 41 through the cathode layer 23, preventing the light-emitting layer 22 from being conductive with the first conductive layer 41, so as to The problem of short-circuiting the organic light-emitting layer between adjacent sub-pixels occurs.
其中子像素20为多个且间隔分布在隔离结构40之间,阳极层21的材料包括但不限于铬、钛、金、银、铜、铝、ITO、它们的组合或其他合适的导电材料及其组合。There are multiple sub-pixels 20 and are spaced between the isolation structures 40. The material of the anode layer 21 includes but is not limited to chromium, titanium, gold, silver, copper, aluminum, ITO, combinations thereof or other suitable conductive materials. its combination.
发光层22用于在通电时发射红光、蓝光或绿光。发光层22可包括HIL(HoleInjection Layer,空穴注入层)、HTL(Hole Transfer Layer,空穴传输层)、EML(EmittingLayer,发射层)和ETL(Electron Transfer Layer,电子转移层)中的一种或多种。The light-emitting layer 22 is used to emit red light, blue light or green light when energized. The light-emitting layer 22 may include one of HIL (Hole Injection Layer, hole injection layer), HTL (Hole Transfer Layer, hole transport layer), EML (Emitting Layer, emission layer), and ETL (Electron Transfer Layer, electron transfer layer). or more.
阴极层23的两端与隔离结构40中的第一导电层41接触连接,以使得相邻间的子像素通过第一导电层41将彼此的阴极层23连接在一起从而实现整面的阴极连接导通,其中的阴极层23的材料包括但不限于铬、钛、金、银、铜、铝、ITO、它们的组合或其他合适的导电材料及其组合。阴极层23的材料可以与阳极层21的材料相同,也可以不相同,具体根据实际情况进行设定。Both ends of the cathode layer 23 are in contact with the first conductive layer 41 in the isolation structure 40, so that adjacent sub-pixels connect the cathode layers 23 of each other through the first conductive layer 41 to achieve cathode connection across the entire surface. The material of the cathode layer 23 includes but is not limited to chromium, titanium, gold, silver, copper, aluminum, ITO, combinations thereof or other suitable conductive materials and combinations thereof. The material of the cathode layer 23 may be the same as the material of the anode layer 21 , or may be different, and is specifically set according to the actual situation.
具体地,在一实施例中,上述阴极辅助层50如图3所示,图3是背板阳极、阴极、辅助阴极的位置俯视图。中间位置为阳极区域1,开口阴极区域2通过阳极周围的悬垂结构的导电层连接成整面,悬垂结构顶部的辅助阴极区域3在各个开口外围形成环形的整面导电层,通过与顶部导电层的搭接实现整面辅助阴极的连接面,从而提高以及的整面搭接的可靠性。Specifically, in one embodiment, the above-mentioned cathode auxiliary layer 50 is as shown in Figure 3. Figure 3 is a top view of the positions of the anode, cathode and auxiliary cathode of the backplane. The middle position is the anode area 1, the open cathode area 2 is connected to the entire surface through the conductive layer of the overhang structure around the anode, and the auxiliary cathode area 3 at the top of the overhang structure forms an annular entire surface conductive layer around each opening, and is connected to the top conductive layer The overlapping connection realizes the connection surface of the entire auxiliary cathode, thereby improving the reliability of the overlapping connection over the entire surface.
可选地,在一实施例中,如图1所示,显示面板还包括:保护层60、第一封装层70和第二封装层80,保护层60覆盖阴极层23、第一导电层41、第一绝缘层42、阴极辅助层50;第一封装层70覆盖保护层60和第二绝缘层44,第一封装层70的上表面为平坦结构;第二封装层80设置于第一封装层70上。Optionally, in an embodiment, as shown in FIG. 1 , the display panel further includes: a protective layer 60 , a first encapsulation layer 70 and a second encapsulation layer 80 . The protective layer 60 covers the cathode layer 23 and the first conductive layer 41 , the first insulating layer 42, the cathode auxiliary layer 50; the first encapsulation layer 70 covers the protective layer 60 and the second insulating layer 44, the upper surface of the first encapsulation layer 70 is a flat structure; the second encapsulation layer 80 is provided on the first encapsulation On level 70.
其中,在经过单次刻蚀完成形成单个子像素后,采用无机封装的方式对单色OLED材料和阴极进行封装保护形成刻蚀保护层,再逐个进行其他发光层和阴极的制备,在三色发光层和阴极均制备完成后采用有机封装和无机封装的形式进行整体封装,在一实施例中,保护层60采用无机封装的方式,第一封装层70采用有机封装,第二封装层80采用无机封装。Among them, after a single sub-pixel is formed through a single etching, the single-color OLED material and cathode are encapsulated and protected using inorganic packaging to form an etching protective layer, and then other light-emitting layers and cathodes are prepared one by one. In the three-color After both the light-emitting layer and the cathode are prepared, they are integrally packaged in the form of organic packaging or inorganic packaging. In one embodiment, the protective layer 60 uses inorganic packaging, the first packaging layer 70 uses organic packaging, and the second packaging layer 80 uses Inorganic packaging.
可选地,在一实施例中,保护层60、第一封装层70和第二封装层80可采用任一封装材料,例如无机封装、有机封装和无机有机复合封装,其中,无机有机复合封装材料兼具了无机封装材料水氧阻隔性好和有机封装材料成膜性好的优势。Optionally, in an embodiment, the protective layer 60 , the first encapsulation layer 70 and the second encapsulation layer 80 may adopt any encapsulation material, such as inorganic encapsulation, organic encapsulation and inorganic-organic composite encapsulation, wherein, inorganic-organic composite encapsulation The material combines the advantages of good water and oxygen barrier properties of inorganic packaging materials and good film-forming properties of organic packaging materials.
本申请还提供一种显示面板100的制作方法以解决上述问题,该制作方法具体包括如下步骤:This application also provides a manufacturing method of the display panel 100 to solve the above problems. The manufacturing method specifically includes the following steps:
参阅图4和图7a~图7k,图4是本申请提供的显示面板制作方法一实施例的流程示意图。图7a~图7k是图4中提供的显示面板制作方法中各步骤对应的结构示意图。Referring to Figure 4 and Figures 7a to 7k, Figure 4 is a schematic flow chart of an embodiment of a display panel manufacturing method provided by the present application. Figures 7a to 7k are schematic structural diagrams corresponding to each step in the display panel manufacturing method provided in Figure 4.
步骤S10:提供一基板。Step S10: Provide a substrate.
具体地,基板10在整个显示面板中起到支撑的作用,用于承载各种元器件及材料。Specifically, the substrate 10 plays a supporting role in the entire display panel and is used to carry various components and materials.
可选地,在一实施例中,基板10包括衬底(图未示)和驱动电路(图未示),其显示面板100为有源OLED;在另一实施例中,基板只包括衬底,不包括驱动电路,其显示面板100为无源OLED。Optionally, in one embodiment, the substrate 10 includes a substrate (not shown) and a driving circuit (not shown), and the display panel 100 is an active OLED; in another embodiment, the substrate only includes a substrate. , excluding the driving circuit, the display panel 100 is a passive OLED.
具体地,在一实施例中该衬底的材料采用玻璃基板,而玻璃基板一般被用作载板来使用;在另一实施例中,该衬底的材料采用柔性基板,其中,柔性基板采用柔性PI(聚酰亚胺)薄膜作为基板。Specifically, in one embodiment, the material of the substrate is a glass substrate, and the glass substrate is generally used as a carrier; in another embodiment, the material of the substrate is a flexible substrate, wherein the flexible substrate is Flexible PI (polyimide) film serves as the substrate.
上述中的驱动电路可分为像素驱动电路和外围驱动电路,其中的像素驱动电路主要为面板的持续点亮提供实现条件,而外围电路则是为面板的矩阵电路提供准确的输入信号,例如,如为有源矩阵电路提供逐行选通的扫描信号(行驱动信号),为选通行的各OLED像素提供带有显示信息的数据信号(列驱动信号)。因此,像素驱动电路和外围驱动电路相辅相成、紧密配合,共同完成驱动有源OLED显示屏的正常工作。The above drive circuits can be divided into pixel drive circuits and peripheral drive circuits. The pixel drive circuit mainly provides conditions for continuous lighting of the panel, while the peripheral circuits provide accurate input signals for the matrix circuit of the panel. For example, For example, the active matrix circuit is provided with row-by-row scanning signals (row driving signals), and data signals (column driving signals) with display information are provided for each OLED pixel in the selected row. Therefore, the pixel drive circuit and the peripheral drive circuit complement each other and work closely together to complete the normal operation of driving the active OLED display.
步骤S12:在基板上形成阳极层和像素限定层。Step S12: Form an anode layer and a pixel defining layer on the substrate.
具体地,如图7a所示,在基板上形成对应所需的金属层作为阳极层材料,其中,金属层的材料采用包括但不限于铬、钛、金、银、铜、铝、ITO、它们的组合或其他合适的导电材料及其组合。Specifically, as shown in Figure 7a, a corresponding required metal layer is formed on the substrate as the anode layer material, wherein the material of the metal layer includes but is not limited to chromium, titanium, gold, silver, copper, aluminum, ITO, and others. or other suitable conductive materials and combinations thereof.
可选地,在一实施例中,如图7a所示,通过在金属层上方涂覆第一层光刻胶并图案化光刻胶,保留对应所需的结构,以在基板上形成所需的阳极层21;在完成刻蚀的阳极层21的上方制备像素限定层30,用于隔断相邻子像素20的阳极层21,同样地,在像素限定层30上方涂覆第二层光刻胶并图案化光刻胶以保留对应所需结构形成像素限定层30;在一实施例中,像素限定层30垂直于基板方向的高度高于阳极层21。其中,像素限定层30采用有机材料包括但不限于聚酰亚胺,像素限定层30的无机材料包括但不限于氧化硅(SiO2)、氮化硅(Si3N4)、氮氧化硅(Si2N2O)、氟化镁(MgF2)或它们的组合。在另一实施例中,采用PDL材料作为像素限定层30的材料,PDL是一种像素定义材料,用于定义每个子像素以便其中的发光层之间的颜色不会互相干扰。Optionally, in one embodiment, as shown in FIG. 7a , by coating a first layer of photoresist on the metal layer and patterning the photoresist, the corresponding required structure is retained to form the required structure on the substrate. The anode layer 21; prepare a pixel defining layer 30 above the etched anode layer 21 to isolate the anode layer 21 of adjacent sub-pixels 20. Similarly, apply a second layer of photolithography on top of the pixel defining layer 30. Glue and pattern the photoresist to retain the corresponding required structure to form the pixel definition layer 30; in one embodiment, the height of the pixel definition layer 30 perpendicular to the direction of the substrate is higher than the anode layer 21. Among them, the pixel defining layer 30 uses organic materials including but not limited to polyimide, and the inorganic materials of the pixel defining layer 30 include but are not limited to silicon oxide (SiO2), silicon nitride (Si3N4), silicon oxynitride (Si2N2O), fluorine Magnesium oxide (MgF2) or their combination. In another embodiment, a PDL material is used as the material of the pixel defining layer 30. PDL is a pixel defining material used to define each sub-pixel so that colors between the light-emitting layers therein do not interfere with each other.
其中的刻蚀方法包括湿法刻蚀或干法刻蚀(Dry etch)的方式,其中,干法刻蚀包括激光刻蚀或等离子体刻蚀。湿法刻蚀包括化学法刻蚀。The etching method includes wet etching or dry etching, wherein dry etching includes laser etching or plasma etching. Wet etching includes chemical etching.
步骤S14:在像素限定层上依次形成第一导电层、第一绝缘层、第二导电层和第二绝缘层,第一绝缘层上设有过孔,第一导电层和所述第二导电层通过过孔连接。Step S14: Form a first conductive layer, a first insulating layer, a second conductive layer and a second insulating layer on the pixel defining layer in sequence, with via holes provided on the first insulating layer, the first conductive layer and the second conductive layer. The layers are connected via vias.
参阅图5,图5是图4中步骤S14的子步骤流程示意图。Refer to Figure 5, which is a schematic flowchart of the sub-steps of step S14 in Figure 4.
步骤S14的子步骤,具体包括如下步骤:The sub-steps of step S14 specifically include the following steps:
步骤S140:在像素限定层上依次形成第一导电层和第一绝缘层,第一绝缘层包括主体部和设置于主体部上的顶部,顶部延伸出主体部的上表面以形成第一悬垂部。Step S140: Form a first conductive layer and a first insulating layer on the pixel defining layer in sequence. The first insulating layer includes a main body and a top disposed on the main body. The top extends from the upper surface of the main body to form a first overhang. .
可选地,在一实施例中,如图7b所示,在像素限定层30上利用物理气相沉积、化学气相沉积或真空溅射等方式沉积导电层,在导电层上涂覆第三层光刻胶并图形化光刻胶,以保留在像素限定层上的第一导电层41结构,其中第一导电层41的材料采用金属氧化物或过度金属氧化物或其他导电材料制成,例如金属钼(MO)、氮化铝(AlN)等材料。Optionally, in one embodiment, as shown in FIG. 7b , a conductive layer is deposited on the pixel defining layer 30 using physical vapor deposition, chemical vapor deposition or vacuum sputtering, and a third layer of light is coated on the conductive layer. Resist and pattern the photoresist to retain the structure of the first conductive layer 41 on the pixel defining layer, where the material of the first conductive layer 41 is made of metal oxide or transition metal oxide or other conductive materials, such as metal Materials such as molybdenum (MO) and aluminum nitride (AlN).
可选地,在一实施例中,如图7c所示,在第一导电层41的上方制备第一绝缘层42,并通过利用不同材料的刻蚀速率的不同,在第一绝缘层42上形成第一悬垂部a,以构成悬垂结构。其中,第一绝缘层42的材料可以为非导电有机材料,非导电有机材料包括负性感光有机材料。例如,负性感光有机材料包括但不限于负性光刻胶。Optionally, in an embodiment, as shown in FIG. 7c, a first insulating layer 42 is prepared above the first conductive layer 41, and by utilizing the difference in etching rates of different materials, the first insulating layer 42 is formed on the first insulating layer 42. A first overhang part a is formed to form an overhang structure. The material of the first insulating layer 42 may be a non-conductive organic material, and the non-conductive organic material includes a negative photosensitive organic material. For example, negative photosensitive organic materials include, but are not limited to, negative photoresists.
可选地,在一实施例中,第一绝缘层42所构成的第一悬垂结构可以通过在曝光制程中,负性光刻胶被光照的部分会聚合交联固化,未被光照的部分不发生交联聚合。负性光刻胶的表面更容易聚合交联,负性光刻胶远离表面的部分的光照强度逐渐减弱,负性光刻胶从表面到远离表面的方向,负性光刻胶的聚合交联程度逐渐减弱。在显影制程中,未发生交联聚合的负性光刻胶会被洗除,得到倒梯形结构的悬垂结构。Optionally, in an embodiment, the first overhang structure composed of the first insulating layer 42 can be polymerized and cross-linked by polymerizing and cross-linking the illuminated portion of the negative photoresist during the exposure process, and the unilluminated portion is not. Cross-linking polymerization occurs. The surface of the negative photoresist is more likely to be polymerized and cross-linked. The light intensity of the negative photoresist away from the surface gradually weakens. The negative photoresist is polymerized and cross-linked from the surface to the direction away from the surface. The degree gradually weakened. During the development process, the negative photoresist that has not undergone cross-linking and polymerization will be washed away, resulting in an overhanging structure with an inverted trapezoidal structure.
步骤S142:在第一绝缘层上形成贯穿主体部和顶部的过孔。Step S142: Form a via hole penetrating the main body and the top of the first insulating layer.
可选地,在一实施例中,如图7d所示,可利用蚀刻等方式在第一绝缘层42上形成过孔A,通过过孔A将后续的第二导电层43与第一导电层41进行连接,增加阴极和辅助阴极的搭接界面个数,提高搭接界面的可靠性。Optionally, in an embodiment, as shown in FIG. 7d , etching or other methods can be used to form a via A on the first insulating layer 42 , and the subsequent second conductive layer 43 and the first conductive layer are connected through the via A. 41 for connection, increasing the number of overlapping interfaces between the cathode and the auxiliary cathode, and improving the reliability of the overlapping interface.
步骤S144:在第一绝缘层上形成第二导电层,第二导电层通过过孔连接第一导电层。Step S144: Form a second conductive layer on the first insulating layer, and connect the second conductive layer to the first conductive layer through the via hole.
可选地,在一实施例中,如图7e所示,在形成过孔A的第一绝缘层42上方再通过物理气相沉积、化学气相沉积或真空溅射等方式沉积导电层,以形成第二导电层43,第二导电层43通过过孔A与底部第一导电层41进行搭接。在一实施例中,考虑到阴极蒸发沉积的坡度角,第二导电层43在横截面的宽度上应小于或等于第一导电层41。Optionally, in one embodiment, as shown in FIG. 7e , a conductive layer is deposited on the first insulating layer 42 where the via A is formed by physical vapor deposition, chemical vapor deposition or vacuum sputtering to form a third insulating layer. Two conductive layers 43, the second conductive layer 43 overlaps with the bottom first conductive layer 41 through the via hole A. In one embodiment, considering the slope angle of cathode evaporation deposition, the width of the second conductive layer 43 should be smaller than or equal to the first conductive layer 41 in cross-section.
步骤S146:在第二导电层上形成第二绝缘层,第二绝缘层延伸出第二导电层的上表面以形成第二悬垂部。Step S146: Form a second insulating layer on the second conductive layer, and the second insulating layer extends out of the upper surface of the second conductive layer to form a second overhang.
可选地,在一实施例中,如图7f所示,在第二导电层43的上方通过沉积等方式形成第二绝缘层44,其中,第二绝缘层44的形成方式与第一绝缘层42的形成方式相同,在此不再赘述。在一实施例中,第二绝缘层44的第二悬垂部b的长度与第一绝缘层42的第一悬垂部a的长度相等。Optionally, in one embodiment, as shown in FIG. 7f , a second insulating layer 44 is formed above the second conductive layer 43 by deposition or other methods, wherein the second insulating layer 44 is formed in the same manner as the first insulating layer. 42 is formed in the same way and will not be repeated here. In one embodiment, the length of the second overhanging portion b of the second insulating layer 44 is equal to the length of the first overhanging portion a of the first insulating layer 42 .
步骤S16:在阳极层上依次形成发光层和阴极层,并在隔离结构上形成阴极辅助层,阴极辅助层连接第二导电层,阳极层、发光层和阴极层形成子像素,相邻两个子像素的阴极层通过第一导电层连接。Step S16: Form a luminescent layer and a cathode layer on the anode layer in sequence, and form a cathode auxiliary layer on the isolation structure. The cathode auxiliary layer is connected to the second conductive layer. The anode layer, luminescent layer and cathode layer form a sub-pixel, and two adjacent sub-pixels are formed. The cathode layers of the pixels are connected through the first conductive layer.
参阅图6,图6是图4中步骤S16的子步骤流程示意图。Refer to Figure 6, which is a schematic flowchart of the sub-steps of step S16 in Figure 4.
步骤S16的子步骤,具体包括如下步骤:The sub-steps of step S16 specifically include the following steps:
步骤S160:在阳极层上形成发光层、并在第一悬垂部的侧面形成有机层。Step S160: Form a light-emitting layer on the anode layer, and form an organic layer on the side of the first overhang.
具体的,由于不同子像素20发出的光的颜色不同,因此不同子像素20中发光层22的材料不同,需要在不同步骤中制得发出不同颜色光的子像素20。发光层22包括但不限于红色发光层(图未示)、绿色发光层(图未示)和蓝色发光层(图未示)。其中,具体形成的红色发光层、绿色发光层和蓝色发光层的顺序根据实际情况自行设定。例如,首先形成红色发光层、然后形成绿色发光层,最后形成蓝色发光层。Specifically, since the colors of light emitted by different sub-pixels 20 are different, the materials of the light-emitting layers 22 in different sub-pixels 20 are different, and the sub-pixels 20 that emit light of different colors need to be manufactured in different steps. The light-emitting layer 22 includes, but is not limited to, a red light-emitting layer (not shown), a green light-emitting layer (not shown), and a blue light-emitting layer (not shown). Among them, the specific order of forming the red luminescent layer, the green luminescent layer and the blue luminescent layer is set according to the actual situation. For example, a red light-emitting layer is formed first, then a green light-emitting layer, and finally a blue light-emitting layer.
可选地,在一实施例中,如图7g所示,通过蒸发沉积的方式形成发光层22,但由于悬垂结构的突出部分第一悬垂部a和第二悬垂部b的原因,导致发光层在突出部分发生膜层断裂,使得下断裂面处的发光层搭接在像素限定层30上,但不与第一导电层41接触连接,上断裂面处在第一绝缘层的42的第一悬垂部a处形成有机层c。Optionally, in one embodiment, as shown in FIG. 7g , the luminescent layer 22 is formed by evaporation deposition. However, due to the first overhanging portion a and the second overhanging portion b of the overhanging structure, the luminescent layer 22 is formed by evaporation deposition. The film layer breaks at the protruding part, so that the light-emitting layer at the lower break surface overlaps the pixel defining layer 30 but is not in contact with the first conductive layer 41 , and the upper break surface is at the first edge of the first insulating layer 42 An organic layer c is formed at the overhanging portion a.
步骤S162:在发光层上形成阴极层、并在第二悬垂部的上表面、侧面和下表面,第二导电层的侧面,以及第一悬垂部的上表面和侧面形成阴极辅助层。Step S162: Form a cathode layer on the light-emitting layer, and form a cathode auxiliary layer on the upper surface, side surfaces and lower surfaces of the second overhanging part, the side surfaces of the second conductive layer, and the upper surface and side surfaces of the first overhanging part.
可选地,在一实施例中,如图7h所示,在发光层22的上方通过蒸发沉积的方式形成阴极层23和阴极辅助层50。与发光层22形成原因相同,由于悬垂结构的突出部分第一悬垂部a和第二悬垂部b的原因,导致阴极在突出部分发生膜层断裂,在一实施例中,通过改变蒸发角度的方式,使得阴极在下断裂处包裹住发光层22,使发光层22与第一导电层41隔离开来,并且阴极层23与第一导电层41直接连接,以实现不同子像素20的阴极层23通过第一导电层41进行连接形成不同子像素间阴极的网状连接,其中,第一导电层41的在垂直于基板的方向上高于阴极层23。上断裂处的阴极沿着第一绝缘层42和第二绝缘层44所构建的双悬垂结构进行沉积,以在第二悬垂部b的上表面、侧面和下表面,第二导电层43的侧面,以及第一悬垂部a的上表面和侧面形成阴极辅助层50,并且阴极辅助层50与第二导电层43的侧面搭接导通,由此实现阴极辅助层50与第二导电层43、第一导电层41以及阴极层23的整体导通,增加了阴极连接的可靠性,有效的降低阴极的整面电阻,从而提升阴极的整面均一性。Optionally, in one embodiment, as shown in FIG. 7h , the cathode layer 23 and the cathode auxiliary layer 50 are formed above the light-emitting layer 22 by evaporation deposition. The same reason as the formation of the light-emitting layer 22 is due to the first overhang part a and the second overhang part b of the protruding parts of the overhang structure, causing the cathode to have film layer breakage in the protruding part. In one embodiment, by changing the evaporation angle , so that the cathode wraps the luminescent layer 22 at the lower break, so that the luminescent layer 22 is isolated from the first conductive layer 41, and the cathode layer 23 is directly connected to the first conductive layer 41, so that the cathode layer 23 of different sub-pixels 20 can pass through The first conductive layer 41 is connected to form a network connection of cathodes between different sub-pixels, wherein the first conductive layer 41 is higher than the cathode layer 23 in a direction perpendicular to the substrate. The cathode at the upper break is deposited along the double overhang structure constructed by the first insulating layer 42 and the second insulating layer 44, so that on the upper surface, side and lower surface of the second overhang b, the side of the second conductive layer 43 , and the upper surface and side surfaces of the first overhang a form a cathode auxiliary layer 50, and the cathode auxiliary layer 50 overlaps and conducts with the side surfaces of the second conductive layer 43, thereby realizing the cathode auxiliary layer 50 and the second conductive layer 43, The overall conduction of the first conductive layer 41 and the cathode layer 23 increases the reliability of the cathode connection, effectively reduces the overall resistance of the cathode, thereby improving the uniformity of the entire cathode.
可选地,在一实施例中,上述制备方法还包括对显示面板的封装,如图7i所示,首先通过对单色OLED材料及阴极进行封装保护,再逐个制备其他发光层和阴极,如图7j和图7k所示,当三色有机发光层和阴极均完成图案化的制备后,对其进行有机封装和无机封装结合的方式进行整体封装,其中保护层60采用无机封装,第一封装层70采用有机封装,第二封装层80采用无机封装。Optionally, in one embodiment, the above preparation method also includes packaging the display panel. As shown in Figure 7i, the monochromatic OLED material and cathode are first protected by packaging, and then other light-emitting layers and cathodes are prepared one by one, such as As shown in Figure 7j and Figure 7k, after the three-color organic light-emitting layer and the cathode have been patterned and prepared, they are integrally packaged using a combination of organic packaging and inorganic packaging. The protective layer 60 uses inorganic packaging. The first packaging The layer 70 adopts organic encapsulation, and the second encapsulation layer 80 adopts inorganic encapsulation.
本申请提供一种显示面板。通过上述显示面板以及利用上述制作方法制作的显示面板,在悬垂结构底座上增加双悬垂结构,使得阴极在顶部悬垂结构上形成网状的辅助阴极,以使底部阴极与辅助阴极通过金属柱实现连接,从而提升了整面阴极的均一性,增大了阴极的面积从而降低了阴极电阻,进而减弱因阴极电阻较大而造成的IR Drop,以改善显示亮度不均匀的现象。This application provides a display panel. Through the above display panel and the display panel made by the above manufacturing method, a double suspension structure is added to the suspension structure base, so that the cathode forms a mesh-shaped auxiliary cathode on the top suspension structure, so that the bottom cathode and the auxiliary cathode are connected through metal pillars , thus improving the uniformity of the entire cathode, increasing the area of the cathode to reduce the cathode resistance, thereby weakening the IR Drop caused by the large cathode resistance, so as to improve the uneven display brightness.
参阅图8,图8是本申请提供的显示装置一实施例的结构示意图。该显示装置200包括如上述实施例中介绍的任一显示面板100或通过上述制作方法制造的显示面板100,以通过该显示面板100对该显示装置200提供稳定的画面输出。Refer to FIG. 8 , which is a schematic structural diagram of an embodiment of a display device provided by the present application. The display device 200 includes any of the display panels 100 introduced in the above embodiments or the display panel 100 manufactured by the above manufacturing method, so as to provide stable image output to the display device 200 through the display panel 100 .
以上对本申请实施例进行了详细介绍,本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想;同时,对于本领域的技术人员,依据本申请的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本申请的限制。The embodiments of the present application have been introduced in detail above. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method and the core idea of the present application; at the same time, for Those skilled in the art may make changes in the specific implementation and application scope based on the ideas of the present application. In summary, the contents of this description should not be understood as limiting the present application.
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