CN115999341B - A device and method for deep decomposition and adsorption of SF6 gas in a limited space - Google Patents
A device and method for deep decomposition and adsorption of SF6 gas in a limited space Download PDFInfo
- Publication number
- CN115999341B CN115999341B CN202310048066.7A CN202310048066A CN115999341B CN 115999341 B CN115999341 B CN 115999341B CN 202310048066 A CN202310048066 A CN 202310048066A CN 115999341 B CN115999341 B CN 115999341B
- Authority
- CN
- China
- Prior art keywords
- adsorption
- gas
- catalytic
- tower
- adsorption tower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Treating Waste Gases (AREA)
Abstract
一种有限空间内SF6气体深度分解吸附装置及方法，装置包括：颗粒过滤器，催化吸附塔，热交换器，中和吸附设备，第一无油吸气泵，分子筛吸附床，以及控制系统；颗粒过滤器用于过滤吸入混有SF6的大气时，阻挡环境中的灰层颗粒和其它物质；催化吸附塔接颗粒过滤器，用于将吸进来的混在空气中SF6在催化吸附塔内进行加热分解并吸附分解物；热交换器接催化吸附塔；中和吸附设备接热交换器，中和吸收催化吸附塔产生的酸性物质；第一无油吸气泵接中和吸附设备，为气体流动提供动力；分子筛吸附床用于在排放前吸附不宜排放的残余物；控制系统用于控制催化吸附塔温度，利用催化吸附塔“飞温”，将催化吸附塔内温度控制在第一设定值与第二设定值之间。
A device and method for deep decomposition and adsorption of SF6 gas in a limited space, the device comprising: a particle filter, a catalytic adsorption tower, a heat exchanger, a neutralization adsorption device, a first oil-free air suction pump, a molecular sieve adsorption bed, and a control system; the particle filter is used to filter and absorb the atmosphere mixed with SF6 , and block the ash particles and other substances in the environment; the catalytic adsorption tower is connected to the particle filter, and is used to heat and decompose the SF6 mixed in the air in the catalytic adsorption tower and adsorb the decomposed products; the heat exchanger is connected to the catalytic adsorption tower; the neutralization adsorption device is connected to the heat exchanger, and neutralizes and absorbs the acidic substances generated by the catalytic adsorption tower; the first oil-free air suction pump is connected to the neutralization adsorption device, and provides power for gas flow; the molecular sieve adsorption bed is used to adsorb the residues that are not suitable for discharge before discharge; the control system is used to control the temperature of the catalytic adsorption tower, and the temperature in the catalytic adsorption tower is controlled between a first set value and a second set value by using the "flying temperature" of the catalytic adsorption tower.
Description
Technical Field
The invention belongs to the technical field of operation and maintenance safety guarantee of power equipment, and particularly relates to an SF 6 gas deep decomposition and adsorption device in a limited space.
Background
Since the twentieth century, the world has been developing technology and economy at unprecedented speeds, leading to increasingly significant environmental and resource starvation problems, among which the global warming problem caused by the greenhouse effect is one of its typical problems. SF 6, one of the major greenhouse gases regulated by Paris and Kyoto protocols, is a greenhouse gas that can remain in the atmosphere for up to 3200 years, with GWP (Global Warming Potential ) being about 23900 times the equivalent amount of CO 2. At present, SF 6 is used as an insulating arc extinguishing gas which must be used for electric high-voltage, extra-high-voltage and extra-high-voltage electric appliances, and is one of very important materials in the fields of high-voltage power transmission and transformation and electric appliance manufacturing in China. According to the statistics, about 8100 tons of SF 6 (from the electric industry) are discharged every year worldwide, equivalent to 2 hundred million tons of MtCO e (Metric tons of carbon dioxide equivalent, carbon dioxide equivalent)
SF 6 gas in China is generally used as electric appliance insulating and arc extinguishing medium gas such as a high-voltage switch, a transformer, a high-voltage power transmission and transformation pipeline and the like, is widely applied to the electric power operation and electric appliance manufacturing industries, the use amount of SF 6 is increased year by 8000 tons/year, and the accumulated amount of repeatedly used SF 6 of an electric appliance manufacturing enterprise is not included.
Leakage is inevitably generated from the operation and maintenance of the electric appliance or the manufacturing process, and the leakage is quickly diffused after being mixed and diluted with the atmosphere in the atmosphere around the electric appliance and the manufacturing workshop, so that SF 6 cannot be recovered by utilizing a recovery method, and the recovery and storage volume is huge due to the fact that a large amount of air is mixed, so that the recovery and storage volume is quite uneconomical.
In addition, some equipment manufacturers adopt two modes of treatment by collecting and purifying SF 6, namely, the SF 6 is liquefied by a high-pressure refrigeration method and then air is separated, but the method has the requirement that the SF 6 content in the mixed gas cannot be less than 70 percent, and the possibility is extremely low. Secondly, the SF 6 and the air are separated by adopting the modern permeable membrane technology, and the method also has the requirement that the SF 6 content cannot be less than 30 percent and requires constant temperature and constant pressure. In terms of leakage, the atmosphere contains SF 6 or more than 30%, and it is not substantially possible to seal the space. Meanwhile, the permeable membrane has high price, long service life and is not suitable for unfixed places. And both methods have residual SF 6 tail gas emissions. The China government has sent out the strategic targets of carbon peak and carbon neutralization, and the carbon emission reduction of SF 6 is an important work, so that the research on the safety emission reduction of SF 6 is a problem to be solved urgently.
At present, no research institutions or enterprises in which country have specific products and applicability research on the degradation of SF 6 under the atmosphere are found internationally, and in the domestic power industry, some experts study the decomposition mechanism of SF 6 in the laboratory for simulating the situation that SF 6 is decomposed by arc striking in a high-voltage switch, published papers for researching the decomposition of SF 6 mainly by electric shock or heating in a carrier gas (such as argon) atmosphere, generating decomposition products similar to the decomposition of SF 6 under the arc striking in the high-voltage switch, and describing some methods for adsorbing and treating the decomposition products, but fail to further study the general applicability of SF 6 used under the atmosphere and the decomposition of SF 6 suitable under the atmosphere, in particular, the research on equipment which is simple and low-cost to operate under non-laboratory conditions.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides an SF 6 gas decomposition and adsorption device in a limited space, which can implement decomposition and adsorption of SF 6 -containing gas from 1ppm to 70% under the atmosphere, further provide an extremely low-energy catalytic adsorption tower structure for completely decomposing and adsorbing SF 6 at a certain temperature (600-800 ℃) range, and avoid high-energy-consumption transfer high-carbon emission due to extremely low electric energy consumption, and avoid secondary pollution caused by the fact that no carrier gas is used, and avoid secondary pollutants and secondary toxic substances generated in the device process by pumping the atmosphere containing SF 6 by using an oil pump, and the performance index accords with national standard 'all harmful factors of working field occupational contact limit', and the high-efficiency treatment of dead catalyst solid waste and dangerous waste, so that harmless emission is truly realized.
The invention adopts the following technical scheme. The invention provides a SF 6 gas deep decomposition adsorption device in a limited space, which comprises a particle filter, a catalytic adsorption tower, a heat exchanger, a neutralization adsorption device, a first oil-free suction pump, a molecular sieve adsorption bed and a control system, wherein the particle filter is used for filtering ash particles and other substances in the environment when the SF 6 mixed air is sucked in, the catalytic adsorption tower is connected with the particle filter and used for heating and decomposing the SF 6 mixed in the air in the catalytic adsorption tower and adsorbing decomposition products through a special adsorbent filled in the catalytic adsorption tower, the heat exchanger is connected with the catalytic adsorption tower and used for cooling high-temperature gas discharged by the catalytic adsorption tower, the neutralization adsorption device is connected with the heat exchanger and used for neutralizing and absorbing acidic substances which are not completely adsorbed in the catalytic adsorption tower, the first oil-free pump is connected with the neutralization adsorption device and used for providing power for gas flow, the molecular sieve adsorption bed is used for adsorbing residues which are not suitable for being discharged before being discharged, the control system is used for controlling the temperature of the catalytic adsorption tower, the catalytic adsorption tower is used for utilizing the temperature of the catalytic adsorption tower to 'temperature', the catalytic adsorption tower is used for controlling the temperature of the catalytic adsorption tower, the temperature in the catalytic adsorption tower is used for controlling the first adsorption tower and the second adsorption system is used for controlling the relative operation between the first adsorption device and a set value and a second adsorption device is used for controlling operation and set value.
Preferably, the catalytic adsorption tower comprises an air inlet, a pull rod, a barrel body and a material seat, wherein the outer side of the barrel body is provided with an annular air supply channel.
Preferably, the compressed air is connected with the control system, when the temperature is higher than a first set value, the air supply and cooling of the barrel body of the catalytic adsorption tower are started, and the control system dynamically controls the ventilation amount of the compressed air based on the temperature rise of the catalytic adsorption tower caused by 'flying temperature'.
Preferably, the neutralization adsorption equipment comprises a solid alkali neutralization tower and a liquid alkali neutralization adsorption tower;
The solid alkali neutralization tower is arranged between the heat exchanger and the first oil-free suction pump and is used for pre-neutralizing some decomposed acidic substances which are not completely absorbed by the catalyst after decomposition and absorption in the solid alkali;
The liquid alkali neutralization adsorption tower is arranged between the molecular sieve adsorption beds by a first oilless suction pump and is used for thoroughly eliminating acidic substances generated after SF 6 is decomposed and adsorbed.
Preferably, the liquid alkali neutralization adsorption tower is provided with a stirring device for improving the neutralization adsorption speed and effect.
Preferably, the SF 6 gas deep decomposition and adsorption device in the limited space further comprises a second oil-free suction pump;
the second oil-free suction pump is connected with the molecular sieve adsorption bed and is used for providing power for the gas flowing in the molecular sieve adsorption bed.
Preferably, the SF 6 gas deep decomposition and adsorption device in the limited space further comprises a tail gas measuring bin;
The tail gas measuring bin is connected to the outlet end of the second suction pump.
Preferably, the tail gas measuring bin is provided with a detector for substances HF, SO 2、H2S、SF4 generated after the decomposition of SF 6 and residual SF 6 which cannot be decomposed, and the measured values of the detector are sent to the control system.
Preferably, the SF 6 gas deep decomposition and adsorption device in the limited space is a vehicle-mounted device which can move in the limited space, can move to a required SF 6 gas decomposition and adsorption scene on the vehicle, and can also move in the limited space to be arranged to a required working point.
The second aspect of the invention provides a method for deep decomposition and adsorption of SF 6 gas in a limited space, which utilizes the SF 6 gas deep decomposition and adsorption device in the limited space, and comprises the following steps:
Step 1, air containing SF 6 enters a SF 6 gas deep decomposition adsorption device in a limited space, and is filtered at a particle filter;
Step 2, the gas filtered in the step 1 enters a catalytic adsorption tower, SF 6 mixed in the air is thermally degraded in the catalytic decomposition tower, the temperature required by the continuous operation of the catalytic adsorption tower is kept by utilizing the 'temperature flying' phenomenon of the catalytic adsorption tower without adding electric energy consumption, and the temperature in the catalytic adsorption tower is controlled between a first set value and a second set value;
step 3, sending the gas flow with higher temperature after the flow of the catalytic absorption tower in the step 2 into a heat exchanger, and then sending the gas flow into a neutralization adsorption device to neutralize and absorb the acidic substances which are not completely adsorbed in the catalytic absorption tower;
Step 4, continuing to flow through the molecular sieve adsorption bed to adsorb out fluoride and sulfide which cannot be adsorbed in the previous steps, and adsorbing out all harmful substances;
and step 5, monitoring the exhaust emission according to a real-time online detection method, and sending the data into a control system for comparison, and then displaying, judging and controlling.
Preferably, step 1 comprises using one or more SF 6 content sensors in the environment, when the SF 6 content is not detected or is smaller than the set SF 6 content value, the device is in a standby state, when the SF 6 content is detected to reach the set value, the device is automatically started, enters a heating preparation state of the catalytic adsorption tower, when the catalytic adsorption tower reaches a catalytic temperature, and the heat exchanger, the spray adsorption tower, the first oil-free suction pump and the second oil-free suction pump are automatically started in sequence.
Preferably, the step 3 comprises the steps of sending the gas flow with higher temperature after the flow of the catalytic absorption tower in the step 2 into a heat exchanger, cooling to be within 100 ℃, sending the gas flow into a solid alkali neutralization tower, neutralizing the acid substances which are not completely adsorbed after the catalysis in the alkali neutralization tower, and sending the gas after the solid alkali neutralization tower into a liquid alkali neutralization adsorption tower.
Preferably, in the step 3, the liquid alkali neutralization adsorption tower is a liquid alkali stirring neutralization tower, and the liquid alkali stirring neutralization tower is provided with a PH value sensor for detecting the PH value of the alkali liquid in real time.
Preferably, in step 4, a second oil-free suction pump is used between the molecular adsorption bed and the tail gas measuring bin, and the pressure difference between the inlet and the outlet of the molecular sieve adsorption bed is increased by the suction force of the pump, so that the gas smoothly flows through the molecular sieve adsorption bed.
Preferably, in step 5, the tail gas measuring bin is provided with a detector for substances HF, SO 2、H2S、SF4 and residual SF 6 which are mainly generated after SF 6 is decomposed, the measured value of the detector is sent to the PLC, the detector is compared with a preset upper limit value, when the measured value exceeds the upper limit value, an alarm for high content of a certain substance is displayed on the industrial personal computer, the automatic shutdown is performed, and meanwhile, a prompt is given out that the catalyst is invalid, the spraying is saturated, the molecular sieve is adsorbed saturated and other information is given to judge maintenance or replacement parts.
Compared with the prior art, the invention has the beneficial effects that at least:
1) The technical scheme solves the problems that SF 6 leaked and diffused into the atmosphere is difficult to recover and extract, SF 6 leaked and diffused into the atmosphere is very large in recovery and extraction difficulty, high in cost and unable to exist, and more importantly solves the serious greenhouse effect caused by SF 6 leaked and diffused into the atmosphere, and solves the problem that SF 6 needs 3000-5000 years in the atmosphere to be naturally degraded.
2) According to the technical scheme, the problem of large energy consumption required by incineration and degradation of SF 6 is solved, the energy consumption required by the SF 6 for heating and degradation in the technical scheme is extremely low, the device only needs to heat the catalytic adsorption tower to 600-800 ℃ and then does not need electric energy consumption, only extremely low electric energy is required to be consumed to maintain the operation of an electric appliance control and an oil-free suction pump, the energy consumption of the parts only needs 2-3kW, and the energy consumption of the device is converted into the energy consumption of the power generation carbon emission only corresponding to 1 household cabinet air conditioner, so that the energy consumption of industrial equipment which runs uninterruptedly is far less than that of the industrial equipment. The running cost is extremely low.
3) The consumption of the device for the catalyst is low, the catalyst consumption is SF 6, the catalyst=1.2-1.5:1, the emission equivalent of 1kg SF 6 is equivalent to 23900kg CO 2 (about 24 tons), and the carbon emission cost is quite large. And the cost of 1kg of catalyst is lower than 80 yuan of RMB. Corresponding to 1/24 of the carbon emission cost.
4) The device does not produce secondary pollution and no toxic or harmful substances after decomposing and adsorbing SF 6, and the catalyst after the desorption can be secondarily utilized to the additive of buildings, battery electrode materials and other metal alloy materials. The exhaust emission meets the professional contact limit standard of all harmful factors in the working field.
5) The device is suitable for the existing indoor, outdoor and underground substation, and is suitable for electric appliance manufacturing workshops, test halls of electric appliance testing institutions and other places using SF 6 gas. The device is small in size, does not need to be installed, is placed in a movable mode, and is started to enter a working state.
6) The device has high automation degree, and all operation parameters can be monitored and data can be remotely monitored.
Drawings
FIG. 1 is a flow chart of the present invention;
FIG. 2 is a front view of a SF 6 gas deep decomposition and adsorption device in a confined space according to the present invention;
FIG. 3 is a rear view of a SF 6 gas deep-decomposition adsorption device in a confined space in accordance with the present invention;
fig. 4 is a diagram of a catalytic adsorption tower of the SF 6 gas deep decomposition adsorption device in a limited space.
In the figure:
1-a particle filter, 2-a catalytic adsorption tower, 3-a heat exchanger, 4-a solid alkali neutralization tower, 5-a first oil-free suction pump, 6-a liquid alkali neutralization adsorption tower, 7-a molecular sieve adsorption bed, 8-a second oil-free suction pump, 9-a tail gas measuring bin, 10-an annular air supply channel, 20-a pull rod, 30-a barrel body and 40-a material seat.
Detailed Description
The application is further described below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical aspects of the present application, and are not intended to limit the scope of the present application.
As shown in fig. 1, 2 and 3, embodiment 1 of the present invention provides a device for deep decomposition and adsorption of SF 6 gas in a limited space, which comprises a particulate filter 1, a catalytic adsorption tower 2, a heat exchanger 3, a solid alkali neutralization tower 4, a first oil-free suction pump 5, a liquid alkali neutralization adsorption tower 6, a molecular sieve adsorption bed 7, a second oil-free suction pump 8 and a tail gas measurement bin 9.
It can be understood that the limited space referred to in the present invention refers to the application scenario of the SF 6 gas deep desorption device, and in engineering practice, the present invention is applicable to any case where SF 6 gas may leak and discharge and SF 6 gas desorption is required, and the following main cases are described by way of example but exhaustion:
1) The high voltage electrical appliance itself has defects in the material or in the sealing of the joints, and after inflation, micro leakage is generated due to the relation of pressure and temperature, generally within 10-100 ppm, and of course, the larger situation is, the hidden, long-term and not easily found leakage, the leakage detector is not easy to detect the leakage point, and after a period of operation, the leakage detector is deposited around the electrical appliance, particularly in the lower part SF 6 of the electrical appliance and slowly diffuses into the surrounding environment. Has certain infringement to operation and maintenance personnel.
2) In-situ electrical equipment is overhauled due to faults, SF 6 in the air chamber is recovered firstly, but the recovery is impossible thoroughly, and when the air chamber is opened, the residual SF 6 in the air chamber is discharged to the surrounding environment. Meanwhile, uncontrollable leakage is caused by operation in the SF 6 recovery process, and in addition, the check density meter and other works are discharged in the surrounding environment. The most serious situation is a sudden failure in the field, requiring rapid maintenance, but without recovery equipment in the field, which is highly likely to be considered to be the discharge of large amounts of gas into the surrounding atmosphere.
3) In an electrical appliance manufacturing workshop, according to an electrical appliance manufacturing process, SF 6 is filled, high-pressure test is carried out, gas is recovered and reused, connecting pipelines and connectors are frequently replaced, recovery is incomplete, the concentration of an actual workshop is relatively high, and ventilation is adopted to discharge the gas into the atmosphere at present.
4) The high-voltage electrical appliance testing institute is the most severe case of doing experiments on the quality of electrical appliances, and some products with poor quality control often generate extreme discharge during high-voltage testing to cause the damage of an air chamber and leak a large amount of SF 6 gas, and the gas is doped with the decomposer of SF 6, so that the influence on personnel and environment is relatively large.
5) With the requirement of economic development, underground switch stations, transformer substations and GIL pipe galleries are newly built in places with relatively short grounds, and all belong to the situation of closed limited space, and the situation seriously affects the safety and environment of operation and maintenance personnel.
6) Other manufacturing, use, location and situation where SF 6 is handled, and so forth.
The particulate filter 1 is used for filtering and sucking the air mixed with SF 6, blocking ash layer particles and other substances in the environment, and preventing the substances from entering the catalytic adsorption tower 2 to affect the catalytic function and efficiency.
The catalytic adsorption tower 2 is used for carrying out thermal decomposition on the SF 6 mixed in the air which is sucked in the catalytic adsorption tower 2 and adsorbing decomposition products by a special adsorbent filled in the catalytic adsorption tower, and the decomposition products are one of core parts of the device function, as shown in fig. 2.
In a preferred but non-limiting embodiment of the present invention, as shown in fig. 4, the catalytic adsorption tower comprises an air inlet, a pull rod 20, a barrel 30, a material seat 40 and other structures, and an annular air supply channel 10 is arranged outside the barrel 30. The inventor creatively invents annular air supply to the catalytic adsorption tower by compressed air between the hearth and the catalytic adsorption tower, thereby leading out a main improvement and an obtained beneficial technical effect of the invention to the prior art, and how to obtain the optimal control effect when annular air supply is carried out to the outside of the catalytic adsorption tower by the compressed air. The technical difficulties at least include that in view of the characteristic of the 'flying temperature' phenomenon, after the internal temperature of the catalytic adsorption tower is read, the control effect is not ideal only by taking the temperature as a variable controlled in real time, and hysteresis is provided, so that the balance of ensuring that the temperature runs in a reasonable interval, not wasting the heat of the flying temperature, and reducing the power consumption of the air compressor is difficult to achieve. The beneficial technical effects of high-efficiency treatment of SF 6 catalytic adsorption and energy consumption reduction can be more highlighted only if good balance is achieved, because the temperature exceeds the working range after the temperature is flown due to small ventilation of compressed air, the ventilation is too high, on one hand, energy is wasted, and on the other hand, the temperature is easily dropped out of the working range.
After extensive research and experimentation, the inventors have obtained a better control of the balance of the three, expressed in the following formula,
Wherein:
V cda denotes the compressed air ventilation per unit time, for controlling the temperature range of catalytic adsorption between 600 and 800C,
K represents a catalytic adsorption column heat rejection adjustment coefficient for scaling the catalytic adsorption column for different heat rejection conditions, such as, but not limited to, stainless steel catalytic adsorption columns that are resistant to high temperatures, and catalytic adsorption columns having different heat rejection surface areas, with the catalytic adsorption column heat rejection adjustment coefficient k being adjusted, such as, but not limited to, setting up different specifications of equipment during an operational test;
v gas represents the volume of SF 6 -containing gas passing through the catalytic adsorption tower per unit time, for representing the flow rate of the gas to be catalytically adsorbed, controlled by the first oilless getter pump,
V tower represents the volume of space within the catalytic adsorption column for catalytic adsorption of SF 6 -containing gas,
T represents the real-time temperature in the catalytic adsorption tower, the real-time temperature is read in the catalytic adsorption tower through a temperature sensor, closed-loop control is carried out,
C sf6 represents the percentage of SF 6 in SF 6 -containing gas introduced into the catalytic adsorption tower, and it is notable that the invention is directed to the decomposition adsorption of SF 6 -containing gas from 1ppm to 70%, namely the value range of C sf6,
Η 1 denotes a first weight coefficient, η 2 denotes a second weight coefficient, satisfying the following relationship,
More preferably, the inventor creatively invents a double structure of annular air supply to the catalytic adsorption tower and annular air supply to the catalyst in the catalytic adsorption tower by compressed air between the hearth and the catalytic adsorption tower, and achieves a structure of simultaneously air supply and cooling when the temperature inside and outside the catalytic adsorption tower flies, and the air supply is controlled by the temperature sensor, so that the temperature of 600-800 ℃ required by the catalytic adsorption tower is ensured on one hand, and the air supply is uniformly carried out when the temperature flies on the other hand, and heat dissipation and cooling are balanced, so that the catalytic adsorption tower always keeps normal operation within a set temperature range. When the invention uses compressed air to control the temperature of the flying temperature, the beneficial technical effects of the invention can be obtained only by adjusting the parameters in the formula in the operation test period, and the applicability of the invention is greatly improved by putting the control strategy into the control program.
The heat exchanger 3 is used for cooling the high-temperature gas from the catalytic adsorption tower 2 to a temperature which does not affect the operation of the rear end component.
The solid alkali neutralization tower 4 is used for pre-neutralizing some decomposed acidic substances which are not completely absorbed by the catalyst after decomposition and absorption in the solid alkali, so that the acidic substances in the gas are sufficiently reduced.
The first oilless suction pump 5 is used for providing power for the gas flowing in the SF 6 gas deep decomposition and adsorption device, more specifically, the gas flowing needs a certain power, and the gas can flow in the SF 6 gas deep decomposition and adsorption device in the limited space by sucking and extruding the gas through the first oilless suction pump 5, and meanwhile, the processing speed of the SF 6 gas deep decomposition and adsorption device in the limited space is determined by the speed of the pump. The choice of the oil-free pump is to avoid the oil pollution of the pump lubricating oil to the gas and the discharged gas.
The liquid alkali neutralization adsorption tower 6 is used for thoroughly eliminating acidic substances generated after SF 6 is decomposed and adsorbed, and is further processed through the liquid alkali neutralization adsorption tower 6, in addition, because the SF 6 content is uncertain in the application scene of the SF 6 gas deep decomposition adsorption device in the limited space, if the content is large, the decomposition products are more, the front-stage solid alkali can not be completely neutralized, and the SF 6 gas deep decomposition adsorption device in the limited space is added with the liquid alkali neutralization adsorption tower and a stirring device in the design and test process, so that the neutralization adsorption speed and effect are further effectively enhanced, and the safe discharge effect is achieved.
The molecular sieve adsorption bed 7 is used for adsorbing residues which are not suitable for discharge, more specifically, after neutralization and adsorption of liquid alkali, some gases possibly cannot be completely contacted with alkali liquid, and a very small part of low-fluorine substances leak out and flow out along with the air flow in the spraying process, so that the molecular sieve can play a role in re-adsorption, and the residual acidic substances and the unknown trace harmful substances are further neutralized and adsorbed by mixed loading such as calcium oxide, so that the discharged gases can reach and be better than national standard discharge standards.
The second oil-free suction pump 8 is used for providing power for the gas flowing in the molecular sieve adsorption bed 7, more specifically, a certain pressure difference is needed for the gas flowing in the molecular sieve adsorption bed, the molecular sieve is granular, and although a certain gap exists between the molecular sieves of the molecular sieve adsorption bed, a certain air resistance exists, at this time, the second oil-free suction pump 8 gives a certain suction force at the outlet end of the molecular sieve adsorption bed, a certain pressure difference exists between the inlet and the outlet, and the gas flow can smoothly pass through the molecular sieve adsorption bed and cannot cause air blocking.
The tail gas measuring bin 9 is connected to the outlet end of the second suction pump, and the gas at the outlet of the suction pump with a certain exhaust pressure is discharged into the tail gas measuring bin, so that a meter measuring environment of a flow cell type is manufactured, after the gas at the outlet of the pump with a certain pressure is diffused in the measuring bin, the pressure is slightly higher than the atmospheric pressure, and the gas can be smoothly discharged out of the bin and the diffusion force slightly higher than the atmospheric pressure is also provided, so that the gas can smoothly enter a sensing cell of the measuring meter, and the meter can smoothly detect corresponding data.
More preferably, the tail gas measuring bin is provided with a detector for substances HF, SO 2、H2S、SF4 mainly generated after the SF 6 is decomposed and residual SF 6 which cannot be decomposed, and the measured value of the detector is sent to the PLC.
It is worth noting that the particle filter 1, the catalytic adsorption tower 2, the heat exchanger 3, the solid alkali neutralization tower 4, the first oilless suction pump 5, the liquid alkali neutralization adsorption tower 6, the molecular sieve adsorption bed 7, the second oilless suction pump 8 and the tail gas measuring bin 9 are the main parts for realizing the core functions of the SF 6 gas deep decomposition adsorption device in the limited space, namely the deep decomposition and adsorption functions. As a further contribution to the prior art, the SF 6 gas deep decomposition adsorption device in the limited space is provided with an automatic control part, namely a control system, such as but not limited to a PLC controller, and a remote information data transmission part, and a movable rack part, so that a device which can realize the function requirement and meet the field use, is convenient to install, safe and environment-friendly is formed.
The SF 6 gas deep decomposition and adsorption device in the limited space is equipment which can be carried on a vehicle and can move in the limited space, can move to a required SF 6 gas decomposition and adsorption scene along with the vehicle, and can also move in the limited space and be arranged to a required working point.
The second aspect of the present invention provides a method for deep decomposition and adsorption of SF 6 gas in a confined space, wherein air containing SF 6 is sucked into a catalytic adsorption tower through a particulate filter to perform SF 6 decomposition catalysis and adsorb SF 6 decomposition products, specifically comprising the steps of:
step 1, air containing SF 6 enters a SF 6 gas deep decomposition adsorption device in a limited space, and is filtered at a particle filter 1 to block particle dust in ambient gas and prevent the particle dust from entering a catalytic adsorption tower to reduce efficiency.
In a preferred but non-limiting embodiment of the invention, the monitoring data is transmitted to the PLC control system of the device via one or more sensors for SF 6 content in the environment and the real-time data is displayed on the industrial computer of the system. When the SF 6 content is not detected or is smaller than the set SF 6 content value, the device is in a standby state, when the SF 6 content is detected to reach the set value, the device starts to be started automatically, enters a heating preparation state of the catalytic adsorption tower, when the catalytic adsorption tower reaches the catalytic temperature, the device enters the next step, the air containing SF 6 enters the SF 6 deep gas decomposition adsorption device in the limited space, and the air is filtered at the particulate filter 1.
Further, the heat exchanger, the spray adsorption tower, the first oilless suction pump 5 and the second oilless suction pump 8 are automatically started in sequence, the mixed gas containing SF 6 passes through the device according to the process, SF 6 is decomposed and adsorbed, and the decomposed product residues are completely absorbed.
And 2, allowing the gas filtered in the step 1 to enter a catalytic adsorption tower 2, thermally degrading SF 6 mixed in the air in the catalytic decomposition tower, injecting a special catalyst into the catalytic adsorption tower, thermally decomposing SF 6 into ions containing S and F, absorbing the ions by the catalyst to generate stable fluoride and sulfide, and absorbing the stable fluoride and sulfide by the catalyst. Air cannot be decomposed in the catalytic adsorption tower, but oxygen contained in the air is partially combined with fluoride and sulfide to form oxygen-containing compounds in the catalytic process. The temperature of catalytic adsorption ranges from 600 ℃ to 800 ℃.
As one of the most important contributions to the prior art, SF 6 is a very stable inert gas, has a gem molecular structure, releases a large amount of heat during high-temperature degradation, so that once SF 6 enters a catalytic adsorption tower, the temperature of the catalytic adsorption tower is always increased from 600 ℃ to 800 ℃ when the SF 6 is preheated, the temperature of the catalytic adsorption tower is not increased again, the safety of the catalytic adsorption tower is not facilitated, the temperature is increased more quickly when the SF 6 content is higher, the temperature rise exceeds 1300 ℃ when 30% of SF 6 content is found in an experiment of the inventor, and the temperature rise exceeds 1500 ℃ when 40% of SF 6 content is found, so that the inventor concludes that the higher the content is, the higher the temperature rise is in the catalytic process. However, this phenomenon is disadvantageous for the catalytic adsorption tower itself, and cannot withstand this temperature as a general-purpose metal material and stainless steel.
It is worth noting that one of the technical difficulties overcome by the technical scheme of the invention is that the inventor refers to the articles and technical data about gas degradation by adopting the catalyst, does not find descriptions about SF 6 temperature flying phenomenon, but describes some cooling methods, such as methods for cooling water mist, cooling air and spraying cooling of a reaction tank, which are unsuitable for cooling the temperature of SF 6, on the one hand, the inventor describes that SF 6 is strictly forbidden in high-voltage electrical equipment room, transformer substation, manufacturing workshop and test hall, and the water mist and spraying are unsuitable. In addition, the air cooling is only aimed at the surface of the catalytic adsorption tower, and has a certain effect, but the structural effect of the catalytic adsorption tower in a high-temperature furnace is not ideal.
After a great deal of research and experiments, the inventor obtains a better control mode which not only ensures that the temperature runs in a reasonable interval, but also can not waste heat of the flying temperature, and reduces the balance of the power consumption of the air compressor, and the control mode is expressed by the following formula,
Wherein:
V cda denotes the compressed air ventilation per unit time, for controlling the temperature range of catalytic adsorption between 600 and 800C,
K represents a catalytic adsorption column heat rejection adjustment coefficient for scaling the catalytic adsorption column for different heat rejection conditions, such as, but not limited to, possibly using a high temperature resistant stainless steel catalytic adsorption column, and a catalytic adsorption column having different heat rejection surface areas, by which the adjustment is made, such as, but not limited to, setting up different specifications of equipment during an operation test;
v gas represents the volume of SF 6 -containing gas passing through the catalytic adsorption tower per unit time, for representing the flow rate of the gas to be catalytically adsorbed, controlled by the first oilless getter pump,
V tower represents the volume of space within the catalytic adsorption column for catalytic adsorption of SF 6 -containing gas,
T represents the real-time temperature in the catalytic adsorption tower, the real-time temperature is read in the catalytic adsorption tower through a temperature sensor, closed-loop control is carried out,
C sf6 represents the percentage of SF 6 in SF 6 -containing gas introduced into the catalytic adsorption tower, and it is notable that the invention is directed to the decomposition adsorption of SF 6 -containing gas from 1ppm to 70%, namely the value range of C sf6,
Η 1 denotes a first weight coefficient, η 2 denotes a second weight coefficient, satisfying the following relationship,
The method is characterized in that the proportional relation between the flow rate-temperature weight and the concentration weight is limited, the method is one of the core concepts of the inventor for controlling the catalytic adsorption process, the air compressor is controlled based on the relation between the ventilation amount of the compressed air and the weight, the full utilization of the flying temperature and the energy consumption of the device are realized to the greatest extent, all the parameters can be obtained through sensors, and the parameters are sent into a control system of the SF 6 gas deep decomposition adsorption device in a limited space to perform closed-loop control, for example, but not limited to, the catalytic adsorption tower is internally and externally provided with temperature sensors, and the external sensors are used for judging the working state of a heater and are controlled at a set temperature by a PLC.
Furthermore, for the high-temperature catalysis and the temperature flying phenomenon, the 310S high-temperature resistant stainless steel material is adopted to manufacture the catalytic adsorption tower, the highest temperature resistance is up to 1100 ℃, and the safety operation of the equipment is ensured by the combined structure of the inner annular air supply and the outer annular air supply.
The invention has the advantages that the invention can avoid the explosion phenomenon of normal temperature or low temperature water generated by water mist cooling and the unsafe factor of increasing the environmental humidity caused by the fact that water mist is suddenly added on the high-temperature metal surface and water low temperature or water low temperature water mist is generated when compressed air is used for cooling the internal and external annular air supply of the catalytic adsorption tower during the temperature flying of the catalytic adsorption tower, and can reasonably use the characteristic of flying temperature to ensure that the catalytic adsorption tower is not required to be heated by consuming electric energy during the operation of the equipment and only is required to be preheated before the operation of the equipment, thereby greatly reducing the energy consumption.
And 3, sending the gas flow with higher temperature after the flow of the catalytic absorption tower in the step2 into a heat exchanger, cooling to be within 100 ℃, entering a solid alkali neutralization tower, and neutralizing the acid substances which are not completely adsorbed in the catalytic part in the alkali neutralization tower.
As one of the improvements and contributions to the prior art of the present invention, solid base neutralization is chosen to have the following characteristics,
1. The gaps among the solid granular alkali are large, which is beneficial to the gas flow, has small resistance and does not influence the speed.
2. The solid alkali has strong neutralization capability, is set to be the first stage for the neutralization of most acid and alkali, is used as the first barrier for the subsequent treatment, reduces the pressure of the subsequent treatment, and is also beneficial to the treatment of a large amount of gas.
In a preferred but non-limiting embodiment of the invention, a first oil-free suction pump is used for providing power for the circulation of gas in the device, more specifically, the first oil-free pump plays a role of suction on one hand, provides suction power for the inflow of gas at the front end of the pump, provides a certain gas pressure for the gas to enter a liquid caustic neutralization tower in the subsequent step, and enables the gas after catalytic adsorption to smoothly flow into the stirring liquid caustic neutralization tower. It is worth noting that the oil-free lubrication suction pump is selected, so that the alkali liquor and the subsequent pipelines, parts and the like are prevented from being polluted by oil stains generated by the operation of the oil pump. Additional pollution is effectively avoided.
And (3) sending the gas passing through the solid alkali neutralization tower into a liquid alkali neutralization adsorption tower. Specifically, the liquid alkali neutralization adsorption tower is a liquid alkali stirring neutralization tower and is used for stirring and alkali washing the gas from the oil-free pump pressure under alkali liquid, and acid substances in the process are neutralized to the greatest extent so as to meet the emission requirement.
In a preferred but non-limiting embodiment of the invention, the caustic soda stirring neutralization tower is equipped with a pH sensor for detecting in real time whether the pH of the caustic soda meets design requirements to determine whether caustic soda addition is required.
In a further preferred but non-limiting embodiment of the invention, the liquid caustic agitation neutralization tower is fitted with a caustic level sensor that ensures the amount of liquid necessary for the operation of the caustic so that the liquid level is not below and not above the level of the caustic control.
In another preferred but non-limiting embodiment of the invention, the liquid caustic soda stirring neutralization tower is provided with a temperature sensor, the temperature of the alkali liquor in the liquid caustic soda neutralization tower is detected, the alkali liquor is easily evaporated due to the over-high temperature, and the device automatically stops running when the temperature is over-high and then automatically runs after natural cooling. The temperature is too low and is easy to cause lye to freeze, if in extremely cold areas, lye is lower than a certain temperature and can freeze, a liquid heater is additionally arranged in the neutralization tower, the lye is heated to a certain temperature by combining a temperature sensor through a PLC, and the device fully considers the use in different geographic positions and has very strong applicability.
It is worth noting that as one of the improvement and the beneficial technical effects of the invention to the prior art, the alkali liquor neutralization tower is internally provided with a mechanical stirring function, when the pumped gas enters the alkali liquor for neutralization, the alkali liquor is neutralized at the position of the gas outlet, the alkalinity is easily reduced, the alkali liquor is enabled to flow continuously through stirring, on one hand, alkali substances are not precipitated in the solution, on the other hand, the concentration of the alkali liquor at the position of the gas outlet under the alkali liquor due to the flow of the alkali liquor can be maintained, and the neutralization capacity is ensured.
And step 4, after the gas neutralized by the liquid alkali rises to the liquid level of the alkali liquid, the gas flows through a molecular sieve adsorption bed to adsorb the fluoride and sulfide which cannot be adsorbed in the previous steps, so that all harmful substances are thoroughly and cleanly adsorbed. Molecular sieves have the ability to strongly and effectively adsorb these materials.
In a preferred but non-limiting embodiment of the invention, the molecular sieve selected is a F-series molecular sieve with a strong adsorption of specific acidic species, while having a certain capacity of SF 6 adsorption capacity, such as SF 6 residue, will be absorbed by the molecular sieve.
In a further preferred but non-limiting embodiment of the invention, the molecular sieve adsorption bed adopts a structure of layering and filling the molecular sieve and solid calcium oxide, and besides the effect of the molecular sieve, the solid calcium oxide is used as a substance which is not neutralized or is special and can not be neutralized in the secondary absorption alkali liquor to be neutralized and adsorbed by the solid calcium oxide, so that the ideal exhaust effect is achieved.
And 5, sending the gas passing through the molecular sieve adsorption bed to a tail gas measuring bin, monitoring the tail gas discharge condition according to a real-time on-line detection method, and sending the data to a computer system for comparison and then displaying, judging and controlling.
In a preferred but non-limiting embodiment of the invention, the tail gas measuring bin is provided with a detector for substances HF, SO 2、H2S、SF4 and residual SF 6 which are mainly generated after SF 6 is decomposed, the measured value of the detector is sent to the PLC, and compared with a preset upper limit value, when the measured value exceeds the upper limit value, an alarm for high content of a certain substance is displayed on an industrial computer, the automatic shutdown is performed, and meanwhile, a jump prompt is provided for judging maintenance or replacement parts by information such as catalyst failure, spray saturation, molecular sieve adsorption saturation and the like.
In a preferred but non-limiting embodiment of the invention, a second oil-free getter pump is used between the molecular adsorption bed and the tail gas measurement cartridge. Specifically, because the molecular sieve and the calcium oxide which are filled in a mixing way have certain density, certain pressure difference is needed for gas to flow through, and if the pump is not used for sucking, the gas flows smoothly, so that the front end is blocked. The second oil-free suction pump has the function of increasing the pressure difference between the inlet and the outlet of the molecular sieve adsorption bed through the suction force of the pump, so that the gas smoothly flows through the molecular sieve adsorption bed.
It is noted that one of the core ideas of the SF 0 gas deep decomposition and adsorption device in a limited space provided by the invention is that energy consumption is reduced through systematic design of the device, and it can be understood by those skilled in the art that the special catalyst and adsorbent in the invention refer to the catalyst and adsorbent special for SF 6 gas catalytic adsorption in the prior art, and the technical effects of reducing energy consumption and reducing catalyst consumption can be obtained under the condition of using the special catalyst and adsorbent in the prior art. Obviously, under the systematic design of the device, the person skilled in the art can further develop the special catalyst and the adsorbent to replace the special catalyst and the adsorbent in the prior art, thereby achieving the effects of reducing the energy consumption and optimizing the catalyst. These ways of implementing the invention fall within the scope of the core concept of the invention.
It is worth noting that as one of the improvements and beneficial technical effects of the present invention in the prior art, the exhaust gas measuring bin constructs an environment for online real-time monitoring data, and is a measuring flow cell which is smooth to flow and is close to the atmospheric pressure. According to experimental detection, the main decomposition products after SF 6 is harmful substances such as hydrogen sulfide, sulfur dioxide, hydrogen fluoride and sulfur tetrafluoride, whether the catalyst is invalid or not and whether neutralization adsorption is invalid or not are controlled and judged through detection of the parameters, the data are remotely transmitted to a main control room, and equipment automatically prompts the working state, the effect and whether replacement of the catalyst is needed or not, and judgment such as whether alkali addition or liquid addition is needed for solid alkali neutralization or liquid alkali neutralization is needed or not. I.e., the control system determines if the catalyst is spent based on the data.
It is noted that the present invention is significantly different from the prior art at least in that it comprises:
1. the process design is different from the current most harmful gas thermal degradation treatment process, the most obvious performance is in the flying temperature specificity of SF 6 during thermal degradation and the multiplicity and complexity of decomposed substances after thermal degradation, and the effective treatment process is designed by a method convenient to realize, so that the method has the advantages of feasibility, economy, environmental protection and safety.
2. Unlike some methods in which thermal degradation is required by a carrier gas environment, the inventors have developed a method in which the degradation is performed in a completely natural state without any carrier gas, without the need for processing other components such as moisture, etc. on the gas to be degraded. The practicability and the universal applicability of the device are realized.
3. The characteristic of the flying temperature is effectively utilized, the characteristic of the flying temperature is developed to reduce the energy consumption, and as long as the preheating equipment consumes a small amount of electric energy when the equipment is started, the degradation efficiency and effect of a large amount of SF 6 are ensured, and the carbon emission transferred due to the large consumption of electric energy is avoided. Is very creative and innovative.
4. After multiple neutralization treatment and adsorption, harmless emission is realized, and the national standard has the professional contact limit value standard of all harmful factors of a working field aiming at the working environment. The equipment completely accords with the standard, so that the environmental protection problem is solved, and the professional health guarantee problem is also solved.
5. The device is provided with multiple sensors, and the PLC automatically controls, judges and prompts whether the running state of the device is good or not, so that the device has extremely strong applicability.
The invention has the advantages that compared with the prior art,
1) The technical scheme solves the problems that SF 6 leaked and diffused into the atmosphere is difficult to recover and extract, SF 6 leaked and diffused into the atmosphere is very large in recovery and extraction difficulty, high in cost and unable to exist, and more importantly solves the serious greenhouse effect caused by SF 6 leaked and diffused into the atmosphere, and solves the problem that SF 6 needs 3000-5000 years in the atmosphere to be naturally degraded.
2) According to the technical scheme, the problem of large energy consumption required by incineration and degradation of SF 6 is solved, the energy consumption required by the SF 6 for heating and degradation in the technical scheme is extremely low, the device only needs to heat the catalytic adsorption tower to 600-800 ℃ and then does not need electric energy consumption, only extremely low electric energy is required to be consumed to maintain the operation of an electric appliance control and an oil-free suction pump, the energy consumption of the parts only needs 2-3kW, and the energy consumption of the device is converted into the energy consumption of the power generation carbon emission only corresponding to 1 household cabinet air conditioner, so that the energy consumption of industrial equipment which runs uninterruptedly is far less than that of the industrial equipment. The running cost is extremely low.
3) The consumption of the device for the catalyst is low, the catalyst consumption is SF 6, the catalyst=1.2-1.5:1, the emission equivalent of 1kg SF 6 is equivalent to 23900kg CO2 (about 24 tons), and the carbon emission cost is quite large. And the cost of 1kg of catalyst is lower than 80 yuan of RMB. Corresponding to 1/24 of the carbon emission cost.
4) The device does not produce secondary pollution and no toxic or harmful substances after decomposing and adsorbing SF 6, and the catalyst after the desorption can be secondarily utilized to the additive of buildings, battery electrode materials and other metal alloy materials. The exhaust emission meets the professional contact limit standard of all harmful factors in the working field.
5) The device is suitable for the existing indoor, outdoor and underground substation, and is suitable for electric appliance manufacturing workshops, test halls of electric appliance testing institutions and other places using SF 6 gas. The device is small in size, does not need to be installed, is placed in a movable mode, and is started to enter a working state.
6) The device has high automation degree, and all operation parameters can be monitored and data can be remotely monitored.
While the applicant has described and illustrated the embodiments of the present invention in detail with reference to the drawings, it should be understood by those skilled in the art that the above embodiments are only preferred embodiments of the present invention, and the detailed description is only for the purpose of helping the reader to better understand the spirit of the present invention, and not to limit the scope of the present invention, but any improvements or modifications based on the spirit of the present invention should fall within the scope of the present invention.
Claims (13)
1. The SF 6 gas deep decomposition and adsorption device in the limited space comprises a particle filter (1), a catalytic adsorption tower (2), a heat exchanger (3), a neutralization adsorption device, a first oilless suction pump (5), a molecular sieve adsorption bed (7) and a control system, and is characterized in that:
the particle filter (1) is used for filtering and sucking the air mixed with SF 6 to block ash layer particles and other substances in the environment;
The catalytic adsorption tower (2) is connected with the particle filter (1) and is used for carrying out heating decomposition on SF 6 mixed in air which is sucked in the catalytic adsorption tower (2) and adsorbing decomposition products by a special adsorbent filled in the catalytic adsorption tower, wherein the catalytic adsorption tower comprises an air inlet, a pull rod (20), a barrel body (30) and a material seat (40), and an annular air supply channel (10) is arranged outside the barrel body (30);
The heat exchanger (3) is connected with the catalytic adsorption tower (2), and the heat exchanger (3) is used for cooling high-temperature gas discharged by the catalytic adsorption tower (2);
the neutralization adsorption equipment is connected with the heat exchanger (3) and neutralizes and absorbs acidic substances which are not completely adsorbed in the catalytic adsorption tower (2);
The first oilless suction pump (5) is connected with the neutralization adsorption equipment and provides power for gas flow;
The molecular sieve adsorption bed (7) is used for adsorbing residues which are not suitable for discharge before discharge;
the control system is used for controlling the temperature of the catalytic adsorption tower (2), and controlling the temperature in the catalytic adsorption tower (2) between a first set value and a second set value by utilizing the 'flying temperature' of the catalytic adsorption tower (2);
The control system is connected with the control system, and starts to feed air to cool the barrel body (30) of the catalytic adsorption tower when the compressed air is higher than a first set value, and dynamically controls the ventilation amount of the compressed air based on the temperature rise caused by 'flying temperature' to the catalytic adsorption tower.
2. The apparatus for deep decomposition and adsorption of SF 6 gas in a confined space of claim 1, wherein:
the neutralization adsorption equipment comprises a solid alkali neutralization tower (4) and a liquid alkali neutralization adsorption tower (6);
the solid alkali neutralization tower (4) is arranged between the heat exchanger (3) and the first oil-free suction pump (5) and is used for pre-neutralizing some decomposed acidic substances which are not completely adsorbed after decomposition and adsorption in the solid alkali;
The liquid alkali neutralization adsorption tower (6) is arranged between the first oilless suction pump (5) and the molecular sieve adsorption bed (7) and is used for thoroughly eliminating acidic substances generated after SF 6 is decomposed and adsorbed.
3. The apparatus for deep decomposition and adsorption of SF 6 gas in a confined space according to claim 2, wherein:
the liquid alkali neutralization adsorption tower (6) is provided with a stirring device for improving the neutralization adsorption speed and effect.
4. The apparatus for deep decomposition and adsorption of SF 6 gas in a confined space of claim 1, wherein:
The SF 6 gas deep decomposition and adsorption device in the limited space also comprises a second oil-free suction pump (8);
the second oil-free suction pump (8) is connected with the molecular sieve adsorption bed (7) and is used for providing power for the gas flowing in the molecular sieve adsorption bed (7).
5. The apparatus for deep decomposition and adsorption of SF 6 gas in a confined space of claim 1, wherein:
The SF 6 gas deep decomposition and adsorption device in the limited space also comprises a tail gas measuring bin (9);
the tail gas measuring bin (9) is connected to the outlet end of the second suction pump.
6. The apparatus for deep decomposition and adsorption of SF 6 gas in confined space of claim 5, wherein:
The tail gas measuring bin (9) is provided with a detector for substances HF, SO 2、H2S、SF4 generated after SF 6 is decomposed and residual SF 6 which cannot be decomposed, and the measured value of the detector is sent to the control system.
7. The apparatus for deep decomposition and adsorption of SF 6 gas in a confined space of claim 1, wherein:
The SF 6 gas deep decomposition and adsorption device in the limited space is equipment which can be carried on a vehicle and can move in the limited space, can move to a required SF 6 gas decomposition and adsorption scene on the vehicle, and can also move and be arranged to a required working point in the limited space.
8. A method for deep gas decomposition and adsorption of SF 6 in a limited space using the device for deep gas decomposition and adsorption of SF 6 in a limited space according to any one of claims 1 to 7, comprising the steps of:
Step 1, air containing SF 6 enters a SF 6 gas deep decomposition adsorption device in a limited space, and is filtered at a particle filter (1);
Step 2, the gas filtered in the step 1 enters a catalytic adsorption tower (2), SF 6 mixed in the air is thermally degraded in the catalytic decomposition tower, the temperature required by the continuous operation of the catalytic adsorption tower (2) is kept by utilizing the 'temperature flying' phenomenon of the catalytic adsorption tower (2) without adding electric energy consumption, and the temperature in the catalytic adsorption tower (2) is controlled between a first set value and a second set value;
step 3, sending the gas flow with higher temperature after the flow of the catalytic adsorption tower in the step 2 into a heat exchanger, and then sending the gas flow into a neutralization adsorption device to neutralize and absorb the acidic substances which are not completely adsorbed in the catalytic adsorption tower (2);
Step 4, continuing to flow through the molecular sieve adsorption bed to adsorb out fluoride and sulfide which cannot be adsorbed in the previous steps, and adsorbing out all harmful substances;
and step 5, monitoring the exhaust emission according to a real-time online detection method, and sending the data into a control system for comparison, and then displaying, judging and controlling.
9. The method for deep decomposition and adsorption of SF 6 gas in a confined space according to claim 8, wherein:
The method comprises the steps of using one or more SF 6 content sensors in the environment, when the SF 6 content is not detected or is smaller than a set SF 6 content value, enabling the device to be in a standby state, automatically starting the device when the SF 6 content is detected to reach a set value, entering a heating preparation state of a catalytic adsorption tower, and automatically and sequentially starting a heat exchanger, a spray adsorption tower, a first oilless suction pump (5) and a second oilless suction pump (8) when the catalytic adsorption tower reaches a catalytic temperature.
10. The method for deep decomposition and adsorption of SF 6 gas in a confined space according to claim 9, wherein:
step 3, sending the gas flow with higher temperature after the flow of the catalytic adsorption tower in the step 2 into a heat exchanger, cooling to be within 100 ℃, sending the gas flow into a solid alkali neutralization tower, neutralizing the acid substances which are not completely adsorbed after the catalysis in the alkali neutralization tower, and sending the gas after the solid alkali neutralization tower into a liquid alkali neutralization adsorption tower.
11. The method for deep decomposition and adsorption of SF 6 gas in a confined space according to claim 10, wherein:
In the step 3, the liquid alkali neutralization adsorption tower is a liquid alkali stirring neutralization tower, and the liquid alkali stirring neutralization tower is provided with a PH value sensor for detecting the PH value of the alkali liquor in real time.
12. The method for deep decomposition and adsorption of SF 6 gas in a confined space according to claim 11, wherein:
In the step 4, a second oil-free suction pump is used between the molecular adsorption bed and the tail gas measuring bin, and the pressure difference between the inlet and the outlet of the molecular sieve adsorption bed is increased by the suction force of the pump, so that the gas smoothly flows through the molecular sieve adsorption bed.
13. The method for deep decomposition and adsorption of SF 6 gas in a confined space according to claim 12, wherein:
In step 5, the tail gas measuring bin is provided with a detector for HF, SO 2、H2S、SF4 and residual SF 6 which are mainly generated after SF 6 is decomposed, the measured value of the detector is sent to the PLC controller, and compared with a preset upper limit value, when the measured value exceeds the limit value, an alarm for high content of a certain substance is displayed on an industrial control computer, the automatic shutdown is performed, and meanwhile, a prompt is given out that the catalyst is invalid, spraying saturation and molecular sieve adsorption saturation are related information, and judgment for maintaining or replacing a part is given.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310048066.7A CN115999341B (en) | 2023-01-31 | 2023-01-31 | A device and method for deep decomposition and adsorption of SF6 gas in a limited space |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310048066.7A CN115999341B (en) | 2023-01-31 | 2023-01-31 | A device and method for deep decomposition and adsorption of SF6 gas in a limited space |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115999341A CN115999341A (en) | 2023-04-25 |
| CN115999341B true CN115999341B (en) | 2025-03-18 |
Family
ID=86026721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310048066.7A Active CN115999341B (en) | 2023-01-31 | 2023-01-31 | A device and method for deep decomposition and adsorption of SF6 gas in a limited space |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115999341B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1887410A (en) * | 2005-06-29 | 2007-01-03 | 财团法人工业技术研究院 | Method and equipment for treating gas containing fluorine-containing compounds |
| CN101007237A (en) * | 2006-01-26 | 2007-08-01 | 高化环保技术有限公司 | Cleaning apparatus of exhaust gas produced from semiconductor production process and method thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101178918B1 (en) * | 2010-05-27 | 2012-09-03 | 주식회사 세미라인 | An apparatus for treatment of Fluorine compound and method of treating for Fluorine compound gas |
| KR20130085025A (en) * | 2013-05-20 | 2013-07-26 | 주식회사 코캣 | Apparatus for purifying or catalytically removing waste gas containing fluorinated compounds |
-
2023
- 2023-01-31 CN CN202310048066.7A patent/CN115999341B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1887410A (en) * | 2005-06-29 | 2007-01-03 | 财团法人工业技术研究院 | Method and equipment for treating gas containing fluorine-containing compounds |
| CN101007237A (en) * | 2006-01-26 | 2007-08-01 | 高化环保技术有限公司 | Cleaning apparatus of exhaust gas produced from semiconductor production process and method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115999341A (en) | 2023-04-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101288820B (en) | Active carbon fiber organic gas recovery method and system using nitrogen as desorption medium | |
| CN205760441U (en) | A kind of scattered adsorption, the organic exhaust gas purifying system of concentration desorption and regeneration | |
| CN113648825A (en) | Technical method for purifying high-humidity chemical medicine VOCs and peculiar smell tail gas | |
| CN104629084B (en) | A kind of cleaning method of waste and old polytetrafluoroethylene (PTFE) filter bag | |
| CN115999341B (en) | A device and method for deep decomposition and adsorption of SF6 gas in a limited space | |
| CN116459637A (en) | Fluorine chemical industry high-fluorine high-sulfur organic waste gas and waste liquid recycling environment-friendly treatment system and method | |
| CN101279194B (en) | Method for treating high-temperature industrial waste gas with ice water cool-neutralization wash and absorption method | |
| CN105823065A (en) | Treatment device for flammable and explosive high-concentration multi-component organic waste gas | |
| CN113996616A (en) | Hazardous chemical substance-related tank car green cleaning device and method based on VOCs separation and recovery technology | |
| CN103405997A (en) | Equipment for preparing sulfuric acid | |
| CN109499259A (en) | A kind of packed tower and the method using packed tower improvement low-concentration organic exhaust gas | |
| CN105864802A (en) | Treatment method of dioxin air pollutants in scrap copper smelting smoke | |
| CN101318124A (en) | A kind of preparation method of molecular sieve adsorbent for purifying low-concentration phosphine | |
| CN219272661U (en) | Super clean oxidation treatment system of volatile organic compounds | |
| CN116428599A (en) | Oily sewage open liquid level high concentration VOCs waste gas pollution reduction and carbon reduction system | |
| CN216171086U (en) | VOCs tail gas treatment device | |
| CN203061024U (en) | Organic waste gas adsorption and steam stripping recovery and treatment device | |
| KR101851437B1 (en) | HCl removal agent and methods for preparation thereof | |
| CN107008133B (en) | Comprehensive treatment device for waste gas and waste water in benzyl alcohol production | |
| CN215027596U (en) | Fire-proof material detects laboratory combustion exhaust gas treatment system | |
| CN203494364U (en) | Sulfuric acid preparing device | |
| CN204307511U (en) | Organic waste gas treatment device | |
| CN103785277B (en) | Process for cleaning flue gases by utilizing alkali resources in slag | |
| CN206676222U (en) | A kind of low-temperature oxidation denitrating system | |
| Li et al. | Parameter optimization of solution method of CO2 capture from aluminum electrolysis flue gas: Ammonia versus MEA |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |