CN115963300A - Probe card device and double-arm probe - Google Patents

Abstract

The invention discloses a probe card device and a double-arm probe, wherein the double-arm probe has a needle length and comprises a bifurcation end part and a testing end part which are respectively positioned at two ends. The outer surface of the dual-arm probe includes two broad sides on opposite sides, respectively. The double-arm probe extends from the bifurcation of the bifurcated end part to the testing end part to form a separation groove penetrating from one of the two wide side surfaces to the other one, so that two arms separated from each other by a distance are defined by the separation groove. A groove length of the separation groove of the dual-arm probe is between 50% and 90% of the needle length. In the cross sections of the two support arms of the double-arm probe, the cross section area of any one support arm is 90-110% of the cross section area of the other support arm. Accordingly, the dual-arm probe can be designed by the structure of the two support arms, so that the multiple dual-arm probes can have similar electrical conduction characteristics and similar mechanical characteristics.

Description

Probe card device and dual-arm probe

technical field

The invention relates to a probe card, in particular to a probe card device and a double-armed probe.

Background technique

In order to comply with the circuit layout of the signal adapter board, the existing probe card device includes a variety of different types of conductive probes; Various conductive probes have different electrical conduction characteristics (such as: resistance value) and different mechanical characteristics (such as: contact force).

Therefore, the inventor believes that the above-mentioned defects can be improved, Naite devoted himself to research and combined with the application of scientific principles, and finally proposed an invention with reasonable design and effective improvement of the above-mentioned defects.

Contents of the invention

The purpose of the embodiments of the present invention is to provide a probe card device and a double-armed probe, which can effectively improve the possible defects of the conventional conductive probes.

The embodiment of the present invention discloses a probe card device, which includes: a first guide plate unit and a second guide plate unit, which are arranged at intervals from each other; and a plurality of double-armed probes, which pass through the first guide plate unit and the The second guide plate unit; each double-armed probe defines a length direction and has a needle length in the length direction, and the outer surface of each double-armed probe includes two needles parallel to the length direction and located on opposite sides respectively. a wide side; wherein each double-armed probe comprises: a bifurcated end located on an outer side of the first guide plate unit away from the second guide plate unit, and the bifurcated end has a bifurcated opening; and a The test end is located on an outer side of the second guide plate unit far away from the first guide plate unit, and the test end is used to detachably abut against an object to be tested; wherein each double-armed probe extends from the fork along the length The direction extends toward the test end and is formed with a separation groove penetrating from one of the two broad sides to the other, so that each double-armed probe passes through the separation groove to define two branches separated by a distance from each other. arm; wherein, the length of a groove in the length direction of the separation groove of each double-armed probe is between 50% and 90% of the needle length, and one of the double-armed probes of the plurality of double-armed probes The distance is different from that of the other dual-armed probe; wherein, in the cross-section of the two arms of each dual-armed probe in the vertical length direction, the cross-sectional area of any one arm is equal to that of the other arm 90% to 110% of the cross-sectional area.

Preferably, at least one double-armed probe is formed with at least one protruding spacer rib on one of the two inner surfaces of the two arms facing each other; wherein, when the first guide plate unit and the second guide plate When the units are obliquely displaced relative to each other, the two limbs of at least one double-armed probe having at least one spacer rib are kept spaced apart from each other by the at least one spacer rib.

Preferably, in at least one double-armed probe having at least one spacer rib, the other inner surface of the two inner surfaces is concavely formed with at least one position-limiting notch corresponding to the at least one spacer rib, and at least one The depth of the limiting notch is smaller than the height of at least one spacer rib.

Preferably, the portion of each double-armed probe located in the first guide plate unit is defined as a first connection, and the portion of each double-armed probe located in the second guide plate unit is defined as a second connection part; in at least one double-armed probe, the separation groove extends from the bifurcation to the second connection part.

Preferably, the position of each double-armed probe located between the first guide plate unit and the second guide plate unit is defined as a stroke portion; in each double-armed probe, the two end portions of the stroke portion are respectively at any The width on one broad side is greater than the width on either wide side of the main body portion of the stroke portion located between the two end portions.

Preferably, the probe card device further includes a signal adapter plate adjacent to the first guide plate unit; in at least one double-armed probe, the two arms have different lengths in the length direction, and the two arms Only one of the arms is against the signal adapter board.

Preferably, the probe card device further includes a signal adapter plate adjacent to the first guide plate unit; in at least one double-armed probe, the two arms have the same length in the length direction, and the two arms Together against the signal adapter board.

Preferably, the outer surface of each double-armed probe includes two narrow sides parallel to the length direction and located on opposite sides respectively; in each double-armed probe, the thickness of any arm on the wide side is 20% to 100% of the width of any narrow side.

The embodiment of the present invention also discloses a double-armed probe, which defines a length direction and has a needle length in the length direction, and the outer surface of the double-armed probe includes needles parallel to the length direction and located on opposite sides. Two wide sides; wherein, the double-armed probe includes: a bifurcated end with a bifurcated opening; and the test end are respectively located at the two ends of the double-armed probe; wherein, the double-armed probe extends from the bifurcation along the length direction toward the test end to form a hole that penetrates from one of the two wide sides to the other. A separation groove, so that the double-armed probe passes through the separation groove to define two arms spaced apart from each other; wherein, the length of a groove in the length direction of the separation groove of the double-armed probe is between the length of the needle 50%-90% of that; wherein, in the cross-section of the two arms of the double-armed probe in the vertical length direction, the cross-sectional area of any one arm is 90%-110% of the cross-sectional area of the other arm.

Preferably, the double-armed probe is formed with at least one protruding spacer rib on one of the two inner surfaces of the two arms facing each other, and the other inner surface is concavely formed with a position corresponding to at least At least one limiting notch of one spacer rib, and the depth of at least one spacer rib is smaller than the height of at least one spacer rib.

To sum up, in the probe card device disclosed in the embodiment of the present invention, the multiple double-armed probes included in it can include different structures (such as: multiple double-armed probes) under the same structural design principle. The distance of one of the double-armed probes of the arm probes is different from the distance of the other of the double-armed probes), so as to conform to the circuit layout on the signal adapter board.

Furthermore, the double-armed probe disclosed in the embodiments of the present invention can be designed through the structure of the two arms (such as: the cross-sectional area of any one of the arms is the cross-sectional area of the other arm. 90%-110%) of the double-armed probes can have similar electrical conduction characteristics (such as: resistance value) and similar mechanical characteristics (such as: contact force).

In order to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention, but these descriptions and drawings are only used to illustrate the present invention, rather than to make any statement on the scope of protection of the present invention. limit.

Description of drawings

FIG. 1 is a schematic plan view of a probe card device according to Embodiment 1 of the present invention.

2 is a schematic plan view of the probe card device in FIG. 1 when the first guide plate and the second guide plate are misaligned.

FIG. 3 is a schematic perspective view of the double-armed probe in FIG. 1 .

FIG. 4 is a schematic cross-sectional view of FIG. 1 along section line IV-IV.

FIG. 5 is a schematic perspective view of another mode of the double-armed probe according to Embodiment 1 of the present invention.

FIG. 6 is an enlarged schematic view of part VI in FIG. 1 .

FIG. 7 is an enlarged schematic view of part VII in FIG. 2 .

FIG. 8 is an enlarged schematic view of part VIII in FIG. 1 .

FIG. 9 is a three-dimensional schematic diagram of a double-armed probe according to Embodiment 2 of the present invention.

FIG. 10 is an enlarged schematic view of a portion X in FIG. 9 .

FIG. 11 is a schematic perspective view of a double-armed probe according to Embodiment 3 of the present invention.

FIG. 12 is a schematic perspective view of another mode of the double-armed probe according to Embodiment 3 of the present invention.

Detailed ways

The following are specific examples to illustrate the implementation of the "probe card device and dual-arm probe" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

[Example 1]

Please refer to FIG. 1 to FIG. 8 , which are the first embodiment of the present invention. As shown in FIG. 1 and FIG. 2, the present embodiment discloses a probe card device 1000, which includes a probe head 100 and abutting on one side of the probe head 100 (such as: the top of the probe head 100 in FIG. side), and the other side of the probe head 100 (such as: the bottom side of the probe head 100 in FIG. 1 ) is used to test a DUT (device under test, DUT) (not shown in the figure, such as: semiconductor wafer).

It should be noted that, in order to facilitate the understanding of this embodiment, the drawings only show the partial structure of the probe card device 1000, so as to clearly show the structure and connection relationship of each component of the probe card device 1000, but The present invention is not limited by the accompanying drawings. The structure of each component of the probe head 100 and its connection relationship will be introduced respectively below.

As shown in FIG. 1 , the probe head 100 includes a first guide plate unit 1, a second guide plate unit 2 spaced apart from the first guide plate unit 1, and clamped between the first guide plate unit 1 and the first guide plate unit 1. A spacer plate 3 between the second guide plate unit 2 and a plurality of double-armed probes 4 passing through the first guide plate unit 1 and the second guide plate unit 2 .

It should be noted that, in this embodiment, the double-armed probe 4 is illustrated by matching the first guide plate unit 1, the second guide plate unit 2 and the spacer plate 3, but the present invention is not limited limited to this. For example, in other embodiments not shown in the present invention, the double-armed probe 4 can also be used independently (for example: sold) or used in conjunction with other components.

In this embodiment, the first guide plate unit 1 includes a first guide plate, and the second guide plate unit 2 includes a second guide plate. However, in other embodiments not shown in the present invention, the first guide plate unit 1 may include a plurality of first guide plates (and spacers clamped between two adjacent first guide plates) , and the second guide plate unit 2 may also include a plurality of second guide plates (and a spacer clamped between two adjacent second guide plates), and a plurality of the first guide plates can be displaced from each other It is provided that a plurality of the second guide plates can also be arranged in offsets with each other, and the first guide plate unit 1 can be arranged in offsets with respect to the second guide plate unit 2 .

Furthermore, the spacer plate 3 may be in a ring structure, and the spacer plate 3 is clamped on the corresponding peripheral parts of the first guide plate unit 1 and the second guide plate unit 2, but the present invention is not limited thereto. here. For example, in other embodiments of the present invention not shown, the spacer plate 3 of the probe card device 1000 may also be omitted or replaced by other components.

It should be explained that although the plurality of double-armed probes 4 in this embodiment include at least two different structures, the structural design principles of at least two of the double-armed probes 4 are roughly the same. Therefore, for the convenience of description, the part with the same structural design principle of a single double-armed probe 4 will be introduced below, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the probe head 100 may also include at least two types of double-armed probes 4 and at least one existing linear conductive probe.

Furthermore, in order to facilitate the understanding of the structure of the double-armed probe 4, the first guide plate unit 1 has not been misplaced relative to the second guide plate unit 2 to carry out the double-armed probe 4 below. 4 construction instructions.

As shown in FIG. 1 and FIG. 3 , the double-armed probe 4 is a single-piece structure integrally formed, and the double-armed probe 4 is roughly linear and defines a length direction L. As shown in FIG. Wherein, the double-armed probe 4 has a needle length L4 in the length direction L, and the outer surface of the double-armed probe 4 includes two wide sides 4 a and two narrow sides 4 b. The two broad sides 4a and the two narrow sides 4b are parallel to the length direction L, and the two wide sides 4a are respectively located on opposite sides of the double-armed probe 4, and the two wide sides 4a The narrow sides 4b are respectively located on opposite sides of the double-armed probe 4 .

From another point of view, the double-armed probe 4 includes a bifurcated end portion 41 and a testing end portion 42 respectively located at its two ends, a first connecting portion 43 connected to the bifurcated end portion 41, A second connecting portion 44 connected to the testing end portion 42 and a stroke portion 45 connecting the first connecting portion 43 and the second connecting portion 44 . That is to say, the double-armed probe 4 sequentially includes the bifurcated end portion 41, the first connecting portion 43, the stroke portion 45, and the second connecting portion along the length direction L. 44 and the test end 42, but the present invention is not limited thereto.

Wherein, the bifurcated end portion 41 is located on an outer side of the first guide plate unit 1 away from the second guide plate unit 2 (such as: the upper side of the first guide plate unit 1 ), and is used to abut against the adjacent The signal adapter plate 200 of the first guide plate unit 1; the test end 42 is located on an outer side of the second guide plate unit 2 away from the first guide plate unit 1 (such as: the second guide plate the lower side of the unit 2), and is used to detachably abut against the object under test adjacent to the second guide plate unit 2. Moreover, the first connecting portion 43 is located in the first guide plate unit 1, the second connecting portion 44 is located in the second guide plate unit 2, and the stroke portion 45 is located in the first guide plate unit. between the guide plate unit 1 and the second guide plate unit 2 .

In more detail, the bifurcated end 41 has a bifurcated opening 411, and the double-armed probe 4 is formed extending from the bifurcated opening 411 along the length direction L toward the testing end 42. There is a separation groove 4c penetrating from one of the two broad sides 4a to the other, so that the double-armed probe 4 passes through the separation groove 4c to define two sides separated by a distance D4d from each other. A support arm 4d.

Wherein, the distance D4d of one of the double-armed probes 4 of the plurality of double-armed probes 4 is different from the distance D4d of the other double-armed probe 4; that is to say A plurality of double-armed probes 4 may include different structures under the same structural design principle, so as to conform to the circuit layout on the signal adapter board 200 .

Furthermore, a groove length L4c of the separation groove 4c in the longitudinal direction L is between 50%-90% of the needle length L4. Furthermore, as shown in Figure 1 and Figure 4, in the cross section of the two arms 4d of each of the double-armed probes 4 perpendicular to the length direction L, any one of the arms 4d The cross-sectional area is 90%～110% (such as: 100%) of the cross-sectional area of the other said support arm 4d, and the thickness T4d of any one of said support arms 4d on said wide side 4a is any one of said narrow 20% to 100% of the width W4b of the side surface 4b. It should be noted that the cross-sectional area in this embodiment does not include the spacer rib 4d2 and the limiting notch 4d3 described below.

Accordingly, a plurality of double-armed probes 4 formed with different structures can be provided with similar electrical properties due to the fact that the sum of the cross-sectional areas of the two arms 4d of each double-armed probe 4 is similar. Conductive properties (such as: resistance value) and similar mechanical properties (such as: contact force). Wherein, the cross-sectional area of any one of the arms 4d of each of the double-armed probes 4 is preferably equal to the cross-sectional area of the other arm 4d, so that a plurality of the double-armed probes 4 have approximately the same electrical conductivity and mechanical properties.

It should be noted that any one of the double-armed probes 4 can be adjusted in the detailed structure of the two arms 4d, so as to meet different design requirements. For example, at least one of the double-armed probes 4 may include at least one of the following technical features, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the double-armed probe 4 may not include any of the following technical features.

As shown in FIG. 1 and FIG. 3 , the two support arms 4 d have the same length in the length direction L, and the two support arms 4 d abut against the signal adapter board 200 together. That is to say, the bifurcated opening 411 is recessed on the end surface of the bifurcated end portion 41 , and the bifurcated opening 411 communicates with the separation groove 4 c substantially along the length direction L. As shown in FIG.

Wherein, the separation groove 4c in this embodiment extends from the bifurcation opening 411 to the second connecting portion 44; that is to say, the end of the separation groove 4c is located at the second guide plate unit 2 within, but the present invention is not limited thereto. For example, as shown in FIG. 5 , the separation groove 4 c of at least one of the double-armed probes 4 may also extend from the bifurcated opening 411 to approximately the center of the stroke portion 45 .

More specifically, as shown in FIG. 1 , FIG. 6 and FIG. 7 , the double-armed probe 4 is on one of the inner surfaces 4d1 of the two inner surfaces 4d1 of the two arms 4d facing each other. At least one spacer rib 4d2 is formed in a protruding shape, while the other inner surface 4d1 is recessed and formed with at least one position-limiting notch 4d3 corresponding to at least one spacer rib 4d2, and at least one position limit The depth D4d3 of the notch 4d3 is smaller than the height H4d2 of at least one of said spacer ribs 4d2.

In this embodiment, as shown in FIG. 1 and FIG. 6, the inner surface 4d1 of one of the arms 4d of the double-armed probe 4 is formed with a plurality of The spacer rib 4d2, and the other arm 4d is recessed on its inner surface 4d1 to form a plurality of limiting notches 4d3 facing the plurality of spacer ribs 4d2, but the present invention does not This is the limit. For example, in other embodiments not shown in the present invention, the double-armed probe 4 may be formed with at least one spacer rib 4d2 and at least one position-limiting gap on each arm 4d. 4d3, and the position of any one of the spacer ribs 4d2 corresponds to one of the limiting notches 4d3; or, the double-armed probe 4 may only have at least one of the spacers formed on at least one of the support arms 4d Rib 4d2, but no limiting gap 4d3 is formed.

Accordingly, as shown in FIG. 1 and FIG. 2, when the first guide plate unit 1 and the second guide plate unit 2 are obliquely misaligned with each other, at least one of the double-arm type with at least one of the spacer ribs 4d2 The two arms 4d of the probe 4 are kept spaced apart from each other by at least one spacer rib 4d2 (or matched with at least one position-limiting notch 4d3 corresponding thereto).

In addition, as shown in FIG. 1 and FIG. 8, in any one of the double-armed probes 4, the width W451 of the two end parts 451 of the stroke part 45 on any one of the wide side surfaces 4a is larger than that on the two sides. The width W452 of the main body part 452 of the stroke part 45 between the two end parts 451 on any one of the wide side faces 4a.

[Example 2]

Please refer to FIG. 9 and FIG. 10 , which is the second embodiment of the present invention. Since this embodiment is similar to the first embodiment above, the same features of the two embodiments will not be repeated, and the differences between this embodiment and the first embodiment are roughly described as follows:

In at least one of the double-armed probes 4 of this embodiment, the two arms 4d have different lengths in the length direction L, and only one of the two arms 4d has a different length. The arm 4d is against the signal adapter board 200 . That is to say, the bifurcated opening 411 of the bifurcated end portion 41 is recessed in one of the narrow side surfaces 4b, so that the bifurcated opening 411 is along the other direction perpendicular to the length direction L. It communicates with the separation groove 4c.

[Embodiment three]

Please refer to FIG. 11 and FIG. 12 , which is the third embodiment of the present invention. Since this embodiment is similar to the first embodiment above, the same features of the two embodiments will not be repeated, and the differences between this embodiment and the first embodiment are roughly described as follows:

In FIG. 11 of this embodiment, the double-armed probe 4 is formed with at least one protruding shape on one of the inner surfaces 4d1 of the two inner surfaces 4d1 of the two arms 4d facing each other. spacer rib 4d2, but the double-armed probe 4 is not formed with any limiting gap 4d3.

In addition, in FIG. 12 of this embodiment, the double-armed probe 4 is formed with at least one protruding spacer rib 4d2 on the two inner surfaces 4d1 of the two arms 4d facing each other, but The double-armed probe 4 is also not formed with any limiting gap 4d3.

[Technical effects of the embodiments of the present invention]

To sum up, in the probe card device disclosed in the embodiment of the present invention, the multiple double-armed probes included in it can include different structures (such as: multiple double-armed probes) under the same structural design principle. The distance of one of the double-armed probes of the arm probes is different from the distance of the other of the double-armed probes), so as to conform to the circuit layout on the signal adapter board.

Furthermore, the double-armed probe disclosed in the embodiments of the present invention can be designed through the structure of the two arms (such as: the cross-sectional area of any one of the arms is the cross-sectional area of the other arm. 90%-110%) of the double-armed probes can have similar electrical conduction characteristics (such as: resistance value) and similar mechanical characteristics (such as: contact force).

In addition, in the probe card device disclosed in the embodiment of the present invention, the double-armed probe can be formed with at least one of the spacer ribs (or matched with at least one of the corresponding limit gaps), and In this way, when the first guide plate unit and the second guide plate unit are obliquely displaced from each other, the double-armed probes can keep a distance from each other, thereby avoiding changing the mechanical characteristics provided by the two arms.

The content disclosed above is only the preferred feasible embodiment of the present invention, and does not limit the patent scope of the present invention, so all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention Inside.

Claims (10)

1. A probe card apparatus, characterized in that the probe card apparatus comprises:

a first guide plate unit and a second guide plate unit which are arranged at intervals; and

the double-arm probes penetrate through the first guide plate unit and the second guide plate unit; each double-arm probe is defined with a length direction and has a needle length in the length direction, and the outer surface of each double-arm probe comprises two wide side surfaces which are parallel to the length direction and are respectively positioned at two opposite sides; wherein each of the dual-arm probes comprises:

a bifurcated end located on an outer side of said first guide plate unit remote from said second guide plate unit, said bifurcated end having a bifurcated mouth; and

the test end part is positioned on the outer side of the second guide plate unit far away from the first guide plate unit and is used for detachably abutting against an object to be tested;

wherein each of the double-arm probes extends from the bifurcation along the length direction toward the testing end to form a separation groove penetrating from one of the two wide side surfaces to the other thereof, so that each of the double-arm probes defines two arms separated from each other by a distance through the separation groove; wherein a groove length of the separation groove of each of the two-arm probes in the length direction is between 50% and 90% of the needle length, and the distance of one of the two-arm probes is different from the distance of another one of the two-arm probes;

in the cross section of the two support arms of each double-arm probe perpendicular to the length direction, the cross section area of any one support arm is 90-110% of the cross section area of the other support arm.

2. The probe card apparatus of claim 1, wherein at least one of said two-arm probes is formed with at least one spacing rib in a protruding shape on one of two inner surfaces of said two arms facing each other; wherein, when the first guide plate unit and the second guide plate unit are diagonally misaligned with each other, the two arms of at least one of the two-arm probes having at least one of the spacer ribs are kept spaced apart from each other by at least one of the spacer ribs.

3. The probe card apparatus of claim 2, wherein in at least one of said dual-arm probes having at least one of said spacer ribs, the other of said inner surfaces is recessed to form at least one spacing notch corresponding in position to at least one of said spacer ribs, and the depth of at least one of said spacing notches is less than the height of at least one of said spacer ribs.

4. The probe card apparatus of claim 1, wherein the location of each of the dual-arm probes in the first guide plate unit defines a first connection portion, and the location of each of the dual-arm probes in the second guide plate unit defines a second connection portion; in at least one of the dual-arm probes, the separation groove extends from the bifurcation to the second junction.

5. The probe card apparatus of claim 1, wherein a portion of each of the dual-arm probes located between the first guide plate unit and the second guide plate unit defines a stroke portion; in each of the two-arm probes, a width of each of the two end portions of the stroke part on either one of the wide side surfaces is larger than a width of the main body portion of the stroke part located between the two end portions on either one of the wide side surfaces.

6. The probe card apparatus of claim 1, wherein the probe card apparatus further comprises a signal adapter plate adjacent to the first guide plate unit; in at least one of the two-arm probe, the two support arms have different lengths in the length direction, and only one of the two support arms abuts against the signal adapter plate.

7. The probe card apparatus of claim 1, wherein said probe card apparatus further comprises a signal adapter plate adjacent to said first guide plate unit; in at least one of the double-arm probes, the two support arms have the same length in the length direction, and the two support arms abut against the signal adapter plate together.

8. The probe card apparatus of claim 1, wherein the outer surface of each of the dual-arm probes comprises two narrow sides parallel to the length direction and on opposite sides, respectively; in each of the two-arm probes, a thickness of any one of the arms on the wide side is 20% to 100% of a width of any one of the narrow sides.

9. A double-arm probe is characterized in that the double-arm probe is defined with a length direction and has a needle length in the length direction, and the outer surface of the double-arm probe comprises two wide side surfaces which are parallel to the length direction and are respectively positioned at two opposite sides; wherein the dual-arm probe comprises:

a bifurcated end having a bifurcated mouth; and

the test end part is detachably abutted against an object to be tested, and the bifurcate end part and the test end part are respectively positioned at two ends of the double-arm probe;

wherein the double-arm probe extends from the bifurcation toward the testing end along the length direction to form a separation groove penetrating from one of the two wide side surfaces to the other wide side surface, so that the double-arm probe defines two arms separated from each other by a distance through the separation groove; wherein a groove length of the separation groove of the double-arm probe in the length direction is 50-90% of the needle length;

wherein, in the cross-sections of the two support arms of the double-arm probe perpendicular to the length direction, the cross-sectional area of any one support arm is 90-110% of the cross-sectional area of the other support arm.

10. The dual-arm probe as claimed in claim 9, wherein the dual-arm probe has at least one spacing rib formed on one of two inner surfaces of the two arms facing each other in a protruding manner, wherein the other inner surface is recessed to form at least one spacing notch corresponding to the at least one spacing rib, and wherein the depth of the at least one spacing notch is smaller than the height of the at least one spacing rib.

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