CN113777368B - Vertical probe card and cantilever type probe thereof - Google Patents

Abstract

The invention discloses a vertical probe card and a cantilever probe thereof, wherein the cantilever probe comprises a main body section, two side wing sections formed by extending from two opposite sides of the main body section respectively, and a needle measuring section and a fixing section formed by extending from two ends of the main body section in the height direction respectively. The needle section comprises a suspended abutting part and a needle cantilever connecting the abutting part and the main body section. The needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutment is spaced from the body section in the height direction by a distance smaller than the moment arm length. Therefore, the cantilever type probe can be applied to the vertical type probe card by the structural design of the cantilever type probe, so that the implantation, maintenance and replacement of the cantilever type probe are facilitated, and the production and maintenance cost is reduced.

Description

Vertical probe card and cantilever probe therefor

Technical Field

The invention relates to a probe card, in particular to a vertical probe card and a cantilever probe thereof.

Background technique

Existing cantilever probes are mainly used for testing peripheral chips, but the existing cantilever probes have a relatively complicated needle implantation method (such as manual soldering) and also require circuit fan-out design. Therefore, existing cantilever probes are not easy to implant and maintain, making it difficult to reduce production and maintenance costs.

Therefore, the inventors believe that the above defects can be improved, and have devoted themselves to research and applied scientific principles, and finally proposed the present invention which has a reasonable design and effectively improves the above defects.

Summary of the invention

The embodiment of the present invention provides a vertical probe card and a cantilever probe thereof, which can effectively improve the defects that may be produced by the existing cantilever probe.

The embodiment of the present invention discloses a vertical probe card, which includes a plurality of guide plates and a plurality of cantilever probes. The plurality of guide plates are stacked one on another along a height direction; the plurality of cantilever probes are positioned on the plurality of guide plates, and each cantilever probe includes a main body section, two wing sections, a needle measuring section and a fixed section. The main body section is inserted into the plurality of guide plates; the two wing sections are formed by extending from opposite sides of the main body section, and the two wing sections are clamped by at least two guide plates among the plurality of guide plates; a needle measuring section and a fixed section are formed by extending from both ends of the main body section in the height direction, respectively; the needle measuring section includes a suspended abutting portion and a needle measuring cantilever connecting the abutting portion and the main body section; wherein the abutting portions of the plurality of cantilever probes are used to detachably abut against an object to be tested; wherein the needle measuring section has a force arm length in a length direction in the vertical height direction, and the abutting portion is spaced from the main body section in the height direction by a distance less than the force arm length.

Preferably, a guide plate away from the plurality of probe sections can pass through the plurality of cantilever probes along a height direction or along a width direction perpendicular to the height direction and the length direction, and press against two side wing sections of each cantilever probe.

Preferably, in each cantilever probe, the fixed section includes a suspended connecting portion and a buffer cantilever connecting the connecting portion and the main section; wherein the vertical probe card includes an adapter plate, and the connecting portions of the plurality of cantilever probes are fixed to the adapter plate.

Preferably, in at least one cantilever probe of the plurality of cantilever probes, the abutting portion and the connecting portion are not both located in the height direction, and the abutting portion and the connecting portion are spaced apart from each other in the length direction by a misalignment distance greater than the spacing.

Preferably, in at least one cantilever probe of the plurality of cantilever probes, the abutting portion and the connecting portion are both located in the height direction, and when the connecting portion abuts against the object to be measured, the probe cantilever and the buffer cantilever are elastically bent so that the abutting portion and the connecting portion abut against the main section.

Preferably, among two adjacent cantilever probes of the plurality of cantilever probes, the abutting portion and the connecting portion of one of the cantilever probes are not both located in the height direction, while the abutting portion and the connecting portion of the other cantilever probe are both located in the height direction.

Preferably, in each cantilever probe, the probe cantilever is recessed along the length direction to form at least one slit.

Preferably, in each cantilever probe, the probe section and the fixing section are located within a projection area formed by the orthographic projection of the main body section along the height direction.

The embodiment of the present invention also discloses a cantilever probe of a vertical probe card, which includes a main body section, two side wing sections, a needle detection section and a fixed section. The two side wing sections are formed by extending from opposite sides of the main body section respectively; a needle detection section and a fixed section are formed by extending from two ends of the main body section in a height direction respectively; the needle detection section includes a suspended abutment portion and a needle detection cantilever connecting the abutment portion and the main body section; wherein the needle detection section has a force arm length in a length direction perpendicular to the height direction, and the abutment portion is spaced from the main body section in the height direction by a distance less than the force arm length.

Preferably, the needle measuring section and the fixing section are located within a projection area formed by the orthographic projection of the main body section along the height direction.

In summary, the vertical probe card disclosed in the embodiment of the present invention can be applied to the vertical probe card through the structural design of the cantilever probe, thereby facilitating the implantation and maintenance and replacement of the cantilever probe and reducing production and maintenance costs.

To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and are not intended to limit the scope of protection of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a three-dimensional schematic diagram of a vertical probe card according to a first embodiment of the present invention.

FIG. 2 is a perspective exploded schematic diagram of a probe head according to the first embodiment of the present invention.

FIG. 3 is a schematic cross-sectional view of a vertical probe card according to the first embodiment of the present invention.

FIG. 4 is a three-dimensional schematic diagram of a cantilever probe according to the first embodiment of the present invention.

FIG. 5 is a schematic plan view of a first embodiment of the cantilever probe of FIG. 4 .

FIG. 6 is a schematic plan view of a second embodiment of the cantilever probe of FIG. 4 .

FIG. 7 is a schematic plan view of a third embodiment of the cantilever probe of FIG. 4 .

FIG. 8 is a perspective exploded schematic diagram of a probe head according to the second embodiment of the present invention.

FIG. 9 is a schematic cross-sectional view of a vertical probe card according to a third embodiment of the present invention.

FIG. 10 is a schematic cross-sectional view of a vertical probe card according to a fourth embodiment of the present invention.

FIG. 11 is a schematic diagram of the cantilever probe of FIG. 10 abutting against an object with a needle side section.

FIG. 12 is a cross-sectional schematic diagram of another embodiment of the vertical probe card of FIG. 10 .

FIG. 13 is a schematic diagram of the cantilever probe of FIG. 12 abutting against an object with a needle side section.

FIG. 14 is a three-dimensional schematic diagram of a vertical probe card according to a fifth embodiment of the present invention.

FIG. 15 is a schematic top view of the vertical probe card of FIG. 14 .

FIG. 16 is a perspective schematic diagram of another embodiment of the cantilever probe of the first embodiment of the present invention.

Detailed ways

The following is an explanation of the implementation of the "vertical probe card and its cantilever probe" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following embodiments will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention.

It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[Example 1]

Please refer to Figures 1 to 7 and 16, which are the first embodiment of the present invention. This embodiment discloses a vertical probe card 1000, including a probe head 100 and a transfer plate 200 (space transformer) abutting against one side of the probe head 100 (e.g., the top side of the probe head 100 in Figure 1), and the other side of the probe head 100 (the bottom side of the probe head 100 in Figure 1) can be used to abut against a device under test (DUT) (not shown in the figure, such as a semiconductor chip) for testing.

It should be noted that, in order to facilitate understanding of this embodiment, the attached drawings only present a partial structure of the vertical probe card 1000, so as to clearly present the structure and connection relationship of each component of the vertical probe card 1000, but the present invention is not limited to the attached drawings. The following will introduce the structure and connection relationship of each component of the probe head 100.

The probe head 100 includes a plurality of guide plates 1 stacked one on another in a height direction H and a plurality of cantilever probes 2 positioned on the plurality of guide plates 1. Specifically, for ease of description, the plurality of guide plates 1 in this embodiment are respectively named as the first guide plate 1a, the second guide plate 1b and the third guide plate 1c, and the plurality of guide plates 1 are stacked from bottom to top in the height direction H to form the second guide plate 1b, the third guide plate 1c and the first guide plate 1a. In addition, to facilitate the construction of the following components, this embodiment further defines a length direction L perpendicular to the height direction H and a width direction D perpendicular to the height direction H and the length direction L.

It should be noted that the plurality of guide plates 1 are arranged corresponding to each other in this embodiment, and the probe head 100 excludes the mode of only including a single guide plate 1. Furthermore, the cantilever probe 2 is described in this embodiment by being matched with the above-mentioned components (such as: the plurality of guide plates 1), but in other embodiments not shown in the present invention, the cantilever probe 2 can also be matched with other components or used alone (such as: sold).

The third guide plate 1c is clamped between the first guide plate 1a and the second guide plate 1b. The first guide plate 1a is formed with a first elongated hole 10a, and the first elongated hole 10a (the long axis direction) is formed perpendicular to the width direction D. In this embodiment, the shape of the first elongated hole 10a is substantially rectangular, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, a plurality of the first elongated holes 10a can also be formed on the first guide plate 1a, and the plurality of the first elongated holes 10a are respectively recessed along the width direction D.

The second guide plate 1b is formed with a second elongated hole 10b, and the position of the second elongated hole 10b corresponds to the first elongated hole 10a along the height direction H (e.g., the second elongated hole 10b is located directly below the first elongated hole 10a in this embodiment). However, in other embodiments not shown in the present invention, a plurality of second elongated holes 10b can be formed on the second guide plate 1b, and a plurality of first elongated holes 10a can also be formed on the first guide plate 1a, and the positions of the plurality of second elongated holes 10b correspond to the plurality of first elongated holes 10a, respectively, but the present invention is not limited thereto.

The third guide plate 1c is formed with a plurality of third elongated holes 10c, each of which (the long axis direction) is parallel to the length direction L, and is respectively recessed along the width direction D. Specifically, the plurality of third elongated holes 10c are respectively located between the first elongated hole 10a and the second elongated hole 10b along the height direction H, and the length of the third elongated hole 10c in the length direction L is greater than the length of the first elongated hole 10a and the second elongated hole 10b in their long axis directions. In this embodiment, the shape of any of the third elongated holes 10c is rectangular, but the present invention is not limited thereto.

The third guide plate 1c can be adjusted according to user needs. For example, in other embodiments not shown in the present invention, the second guide plate 1b can be protruding from a side adjacent to the first guide plate 1a and abut against the first guide plate 1a, thereby replacing the third guide plate 1c. Accordingly, the third guide plate 1c of the probe head 100 can also be omitted or replaced by other components, but the present invention is not limited thereto.

One end of the plurality of cantilever probes 2 passes through the first elongated hole 10a of the first guide plate 1a, and the other end of the plurality of cantilever probes 2 passes through the second elongated hole 10b of the second guide plate 1b. Specifically, a part of each cantilever probe 2 (e.g., the main body section 21 described below) is located in the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c. In this embodiment, the cantilever probe 2 is a one-piece structure that is conductive and integrally formed, and the cantilever probe 2 can be manufactured by micro-electromechanical system (MEMS) technology, but the present invention is not limited thereto.

It should be additionally explained that the multiple cantilever probes 2 are illustrated as being arranged in a row along one side of the probe head 100 in FIG. 1 of this embodiment, but in the parts not shown in this embodiment, the multiple cantilever probes 2 may be arranged along at least two sides of the probe head 100, and the multiple cantilever probes 2 arranged along any side of the probe head 100 may also be arranged in at least two rows. In other words, the arrangement of the multiple cantilever probes in the probe head 100 may be adjusted according to design requirements and is not limited to this embodiment.

Since the structures of the multiple cantilever probes 2 of the probe head 100 are substantially the same in this embodiment, the following description takes a single cantilever probe 2 as an example, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the multiple cantilever probes 2 of the probe head 100 may also have different structures from each other. Furthermore, in order to facilitate understanding of the structure of the cantilever probe 2, the following description will be based on the cantilever probe 2 when the probe head 100 is in the needle implantation position.

The cantilever probe 2 includes a main body section 21, two side wing sections 22 extending from opposite sides of the main body section 21, a fixing section 23 extending from the top edge of the main body section 21, and a probe section 24 extending from the bottom edge of the main body section 21. Specifically, the main body section 21 is inserted through the corresponding first elongated hole 10a, the second elongated hole 10b, and the third elongated hole 10c, the fixing section 23 is exposed on the upper surface of the first guide plate 1a, the probe section 24 is exposed on the lower surface of the second guide plate 1b, and the two side wing sections 22 are correspondingly arranged on the third guide plate 1c.

From another perspective, in this embodiment, one end edge of the fixed section 23 facing the first guide plate 1a (such as the top edge of the fixed section 23 in Figure 3) is extended in sequence to form the main section 21 and the two side wing sections 22 (such as the left and right sides of the main section 21 in Figure 3) and the needle detection section 24.

Specifically, the main body section 21 is inserted through the plurality of guide plates 1 (e.g., the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c), and the two side wing sections 22 are clamped on at least two of the plurality of guide plates 1 (e.g., clamped between the first guide plate 1a and the second guide plate 1b and fixed to the third guide plate 1c). Accordingly, the plurality of guide plates 1 can stably fix the cantilever probe 2 by clamping the two side wing sections 22 corresponding to each other, thereby preventing the cantilever probe 2 from falling out when the probe head 100 is moved or flipped.

In this embodiment, the shape of the main body section 21 perpendicular to the width direction D is substantially trapezoidal, and the cross-section of the main body section 21 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the shape of the main body section 21 perpendicular to the width direction D may be non-trapezoidal (e.g., rectangular).

The two side wing sections 22 extend from the main body section 21 along opposite sides of the length direction L, and the cross-section of any one of the side wing sections 22 perpendicular to the height direction H is roughly rectangular, and the two side wing sections 22 are roughly connected to the center position of the main body section 21 (left and right sides) in the height direction H. The length of any one of the side wing sections 22 in the length direction L is roughly 1/10 to 1/20 of the length of the main body section 21 in the length direction L. The thickness of the two side wing sections 22 along the width direction D is roughly equal to the thickness of the main body section 21, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the thickness of the side wing section 22 may not be equal to the thickness of the main body section 21.

It should be additionally explained that the two side wing sections 22 of the cantilever probe 2 are formed according to its purpose, so that the cantilever probe 2 is relatively stably clamped among the multiple guide plates 1, so the cantilever probe 2 excludes the mode including only a single side wing section 22.

The fixing section 23 is formed by extending from the top edge of the main section 21 in the height direction H toward a direction away from the main section 21. The fixing section 23 is exposed on the surface of a plurality of the guide plates 1 (eg, the first guide plate 1a in FIG. 3).

The fixing section 23 includes a connecting portion 231 in a suspended state and a buffer cantilever 232 connecting the connecting portion 231 and the main section 21. The connecting portion 231 is approximately trapezoidal in shape perpendicular to the width direction D, and the cross-section of the connecting portion 231 perpendicular to the height direction H is approximately rectangular, but the present invention is not limited thereto. For example, as shown in FIG16 , the fixing section 23 may also be formed with only the connecting portion 231, and the connecting portion 231 is directly formed on the main section 21; or, in other embodiments not shown in the present invention, the connecting portion 231 may be non-trapezoidal (e.g., rectangular) in shape perpendicular to the width direction D.

In this embodiment, the buffer cantilever 232 is substantially in the shape of a straight line in the direction perpendicular to the width direction D (as shown in FIG. 4 ), one end of the buffer cantilever 232 is connected to the main body section 21 (the top edge), and the other end of the buffer cantilever 232 is connected to the connecting portion 231. In more detail, the buffer cantilever 232 can be deformed by force and continue to have a rebound force, and the cross-section of the buffer cantilever 232 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the buffer cantilever 232 can be an arc-shaped structure.

That is to say, the connecting portion 231 is arranged on the main section 21 at intervals through the buffer cantilever 232, so that the connecting portion 231 can be arranged on the top side of multiple guide plates 1 (such as: above the first guide plate 1a in Figure 3), and the top end of the connecting portion 231 is used to be fixed to the adapter plate 200.

The probe section 24 is formed along the height direction H and extends from the bottom edge of the main section 21 toward a direction away from the main section 21 , and the probe section 24 is exposed on the surface of a plurality of the guide plates 1 (eg, the second guide plate 1 b in FIG. 3 ).

The needle detection section 24 includes a suspended abutment portion 241 and a needle detection cantilever 242 connecting the abutment portion 241 and the main body section 21. The shape of the abutment portion 241 perpendicular to the width direction D is generally trapezoidal (as shown in FIG. 4 ) or convex (as shown in FIG. 5 ), and the cross-section of the abutment portion 241 perpendicular to the height direction H is generally rectangular, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the shape of the abutment portion 241 perpendicular to the width direction D may be non-trapezoidal (e.g., rectangular).

In this embodiment, the shape of the needle detection cantilever 242 perpendicular to the width direction D is roughly in the shape of a straight line (such as shown in Figure 4) or a stepped structure (such as shown in Figure 6), and one of the two ends of the needle detection cantilever 242 is connected to the main body section 21 (the bottom edge), and the other end of the needle detection cantilever 242 is connected to the abutment portion 241. In more detail, the needle detection cantilever 242 can be deformed by force and continue to have a rebound force, thereby providing the stroke required for the cantilever probe 2 to operate. The cross-section of the needle detection cantilever 242 perpendicular to the height direction H is roughly rectangular, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the needle detection cantilever 242 can be an arc-shaped structure.

In addition, the needle detection cantilever 242 can also be adjusted and changed according to design requirements; for example, referring to FIG. 7 , the needle detection cantilever 242 can be provided with a slit 2421 along the length direction L on the surface perpendicular to the width direction H, and the slit 2421 is substantially rectangular in shape perpendicular to the width direction D, and the slit 2421 runs through both sides of the needle detection cantilever 242 along the width direction D. In addition, in other embodiments not shown in the present invention, the needle detection cantilever 242 can also be provided with a plurality of slits 2421 along the length direction L, but the present invention is not limited thereto.

Furthermore, the abutment portion 241 is arranged on the main section 21 through the probe cantilever 242, so that the abutment portion 241 can be arranged at intervals on the bottom sides of multiple guide plates 1 (such as: below the second guide plate 1b in Figure 3), and the abutment portion 241 is used to detachably abut against the object to be tested.

The probe section 24 has a lever arm length L24 in the length direction L. That is, the length of the probe cantilever 242 in the length direction L is substantially equal to the lever arm length L24, and the abutment portion 241 is spaced from (the bottom side of) the main section 21 in the height direction H by a distance G that is less than the lever arm length L24. In this embodiment, the distance G is substantially 1/5 to 1/10 of the lever arm length L24, but the present invention is not limited thereto.

The cantilever probe 2 is sequentially arranged on the first guide plate 1a, the third guide plate 1c and the second guide plate 1b. The main body section 21 is fixed to the corresponding first elongated hole 10a and the second elongated hole 10b, and the two side wing sections 22 are correspondingly arranged on the third elongated hole 10c, so that the two side wing sections 22 are clamped between the first guide plate 1a and the second guide plate 1b.

The fixing section 23 passes through the first elongated hole 10a, and the connecting portion 231 of the fixing section 23 is exposed on the surface of the first guide plate 1a. The probe section 24 passes through the second elongated hole 10b, and the contact portion 241 of the probe section 24 is exposed on the surface of the second guide plate 1b.

In this embodiment, the probe section 24 and the fixing section 23 in each of the cantilever probes 2 are located within a projection area formed by the orthographic projection of the main section 21 along the height direction H, so that each of the cantilever probes 2 is arranged along the height direction H on a plurality of the guide plates 1 .

When the abutting portion 241 of each cantilever probe 2 abuts against the object to be tested, the probe cantilever 242 provides elasticity so that the abutting portion 241 actually contacts the object to be tested, thereby making the connection between the abutting portion 241 and the object to be tested more stable.

It should be additionally explained that in this embodiment, one of the guide plates 1 (such as the first guide plate 1a) away from the plurality of probe sections 24 can pass through the plurality of cantilever probes 2 along the height direction H and press against the two wing sections 22 of each cantilever probe 2, so that each of the main sections 21 (the side adjacent to the fixing section 23) of the first elongated hole 10a receiving portion is fixed. In detail, the two wing sections 22 of each cantilever probe 2 are pressed against the first guide plate 1a, so that the main section 21 of each cantilever probe 2 is fixed to the plurality of guide plates 1.

According to the above, the cantilever probe 2 of the vertical probe card 1000 can be positioned between the first guide plate 1a and the second guide plate 1b by the two side wing sections 22, and the needle detection section 24 can provide the cantilever probe 2 with the required stroke for detecting force without misalignment, thereby providing a vertical probe card and cantilever probe thereof that are different from the past. Furthermore, since the plurality of guide plates 1 (such as the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c) do not need to be misaligned to position the cantilever probe 2, the length of the cantilever probe 2 can be effectively shortened, thereby enabling the cantilever probe 2 to effectively improve the test performance results, and help improve the efficiency of needle implantation or facilitate the maintenance and replacement of the cantilever probe 2.

[Example 2]

Please refer to FIG. 8 , which is a second embodiment of the present invention. Since this embodiment is similar to the first embodiment, the similarities between the two embodiments will not be described in detail. The differences between this embodiment and the first embodiment are roughly described as follows:

In the vertical probe card 1000 of the present embodiment, the first elongated hole 10a is recessed along the width direction D, and the first guide plate 1a passes through the plurality of cantilever probes 2 along the width direction D, so that the first elongated hole 10a can pass through the plurality of cantilever probes 2 along the width direction D, and the first elongated hole 10a accommodates each of the main body segments 21 (the side adjacent to the fixed segment 23), and the first guide plate 1a is pressed against the two side wing segments 22 of each of the cantilever probes 2.

In detail, the two wing sections 22 of each cantilever probe 2 are pressed against each other by the first guide plate 1 a , so that the main section 21 of each cantilever probe 2 is fixed among the plurality of guide plates 1 .

As described above, when the cantilever probes 2 of the vertical probe card 1000 are arranged on the second guide plate 1b and the third guide plate 1c, the first guide plate 1a can pass through a plurality of the cantilever probes 2 along the width direction D. The arrangement of the first guide plate 1a can be adjusted according to design requirements, so that the cantilever probes 2 can help improve the efficiency of needle implantation or facilitate the maintenance and replacement of the cantilever probes 2.

[Example 3]

Please refer to FIG. 9 , which is a third embodiment of the present invention. Since this embodiment is similar to the first embodiment, the similarities between the two embodiments will not be described in detail. The differences between this embodiment and the first embodiment are roughly described as follows:

In the vertical probe card 1000 of the present embodiment, the contact portion 241 and the connecting portion 231 of the cantilever probe 2 are not both located in the height direction H. In other words, the probe cantilever 242 of the probe section 24 and the buffer cantilever 232 of the fixed section 23 extend in different directions in the length direction L, and the contact portion 241 and the connecting portion 231 are spaced apart by a misalignment distance L100 greater than the spacing G in the length direction L, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the misalignment distance L100 is spaced apart by a distance not greater than the spacing G in the length direction L, but the present invention is not limited thereto.

As described above, the abutment portion 241 and the connection portion 231 of one of the cantilever probes 2 in the vertical probe card 1000 are not both located in the height direction H, so that the connection portion 231 of the cantilever probe 2 can cooperate with different adapter plates 200, thereby increasing the application range of the cantilever probe 2.

[Example 4]

Please refer to FIG. 10 to FIG. 13 , which are the fourth embodiment of the present invention. Since this embodiment is similar to the first embodiment, the similarities between the two embodiments will not be described in detail. The differences between this embodiment and the first embodiment are roughly described as follows:

As shown in FIGS. 10 and 11 , in the vertical probe card 1000 of this embodiment, the abutting portion 241 and the connecting portion 231 of the cantilever probe 2 are both located in the height direction H, and the connecting portion 231 of the buffer cantilever 232 abuts against the main body section 21. Furthermore, when the abutting portion 241 is used to abut against the object to be tested, the probe cantilever 242 is elastically bent so that the abutting portion 241 abuts against both sides of the main body section 21.

In detail, the main body section 21 may protrude and form a trapezoidal structure 211 at the position adjacent to the abutting portion 241 and the connecting portion 231 along the height direction H. Accordingly, when the cantilever probe 2 abuts against the object to be tested with the abutting portion 241, the abutting portion 241 abuts against the adjacent trapezoidal structure 211. For example, in other embodiments not shown in the present invention, one of the abutting portion 241 and the connecting portion 231 may also be the trapezoidal structure 211 that does not abut against the main body section 21, but the present invention is not limited thereto.

In addition, referring to FIG. 12 and FIG. 13 , one of the two trapezoidal structures 211 may be formed on the side of the abutment portion 241 adjacent to (the bottom side of) the main body section 21, and the other trapezoidal structure 211 may be formed on the side of the connection portion 231 adjacent to (the top side of) the main body section 21, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, one of the two trapezoidal structures 211 may be formed on the abutment portion 241 or the connection portion 231 adjacent to the main body section 21, and the other trapezoidal structure 211 may be formed on the main body section 21, but the present invention is not limited thereto.

As described above, the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 of the vertical probe card 1000 abut against two sides of the main section 21 respectively, so that the cantilever probe 2 can shorten the transmission path and help improve the transmission effect.

[Example 5]

Please refer to FIG. 14 and FIG. 15 , which are the fifth embodiment of the present invention. Since this embodiment is similar to the first embodiment, the similarities between the two embodiments will not be described in detail. The differences between this embodiment and the first embodiment are roughly described as follows:

In the vertical probe card 1000 of the present embodiment, among two adjacent cantilever probes 2 of the plurality of cantilever probes 2 along the width direction D, the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 are not both located in the height direction H, while the abutting portion 241 and the connecting portion 231 of the other cantilever probe 2 are both located in the height direction H.

Accordingly, the plurality of cantilever probes 2 of the vertical probe card 1000 are distributed as described above, so that the connection portion 231 can be matched with different adapter plates 200, thereby increasing the applicable range of the cantilever probe 2. Furthermore, the probe head 100 can effectively expand the distance between two adjacent connection portions 231 through the configuration of the plurality of connection portions 231 (as shown in FIG. 14), thereby affecting the distance setting of the adapter plate 200. For example, as shown in FIG. 14, the probe head 100 only needs to be further matched with a circuit board to improve the electrical quality and reduce the manufacturing cost.

[Technical Effects of Embodiments of the Invention]

In summary, the vertical probe card disclosed in the embodiment of the present invention can be applied to the vertical probe card through the structural design of the cantilever probe, thereby facilitating the implantation and maintenance and replacement of the cantilever probe and reducing production and maintenance costs.

In addition, the vertical probe card disclosed in the embodiment of the present invention can move and fix the cantilever probe along the height direction or width direction by opening a hole or a groove in the guide plate (such as the first guide plate), so that the cantilever probe can provide the required stroke of the needle measuring section when it is under force without misalignment, so the length of the cantilever probe can be effectively shortened to effectively improve the test performance. In addition, each cantilever probe can go straight up and down in the height direction, which is conducive to the implantation and maintenance and replacement of the cantilever probe of the vertical probe card, and reduces the production and maintenance costs.

Furthermore, in the vertical probe card disclosed in the embodiment of the present invention, the abutment portion and the connection portion of the cantilever probe may not both be located in the height direction, so that the connection portion of the cantilever probe can cooperate with different adapter plates, thereby increasing the application range of the cantilever probe.

In addition, during the detection process of the vertical probe card disclosed in the embodiment of the present invention, the abutting portion and the connecting portion of the cantilever probe can respectively abut the two sides of the main section, so that the cantilever probe can shorten the transmission path and help improve the transmission effect.

In addition, in the vertical probe card disclosed in the embodiment of the present invention, in two adjacent cantilever probes along the width direction, the abutment portion and the connection portion of one of the cantilever probes may not both be located in the height direction, while the abutment portion and the connection portion of the other cantilever probe are both located in the height direction, so that the connection portions can achieve a cross-setting effect, thereby enabling the fixing section to be compatible with different adapter plates and the interval between the connection portions of the two cantilever probes can be expanded.

The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the patent scope of the present invention.

Claims (7)

1. A vertical probe card, the vertical probe card comprising:

a plurality of guide plates stacked on each other along a height direction; and

A plurality of cantilevered probes positioned on a plurality of said guide plates, each of said cantilevered probes being of electrically conductive and integrally formed one-piece construction, and each of said cantilevered probes comprising:

The main body section is penetrated in the guide plates;

Two side wing sections formed to extend from opposite sides of the main body section, respectively, and to be clamped to at least two of the plurality of guide plates; and

A needle section and a fixing section extending from both ends of the main body section in the height direction; the needle section comprises a hanging abutting part and a needle cantilever for connecting the abutting part and the main body section, the fixing section comprises a hanging connecting part and a buffer cantilever for connecting the connecting part and the main body section, and the abutting part and the connecting part are both positioned in the height direction; the abutting parts of the cantilever probes are used for detachably abutting against an object to be tested;

Wherein the needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutment is spaced from the main body section in the height direction by a distance smaller than the moment arm length;

Wherein, in each cantilever probe, the main body section is protruded to form a trapezoid structure at the position adjacent to the abutting part and the connecting part along the height direction;

when the abutting part of any cantilever type probe abuts against the object to be detected, the needle detection cantilever and the buffer cantilever are elastically bent, so that the abutting part abuts against the adjacent trapezoid structure, and the connecting part abuts against the adjacent trapezoid structure.

2. The vertical probe card of claim 1, wherein one of said guide plates, remote from a plurality of said probing segments, is capable of pressing against two of said side wing segments of each of said cantilever probes through a plurality of said cantilever probes along said height direction or along a width direction perpendicular to said height direction and said length direction.

3. The vertical probe card of claim 1, wherein in each of the cantilever probes, the vertical probe card comprises an adapter plate, and the connection portions of the plurality of cantilever probes are fixed to the adapter plate.

4. The vertical probe card of claim 1, wherein in each of the cantilever-type probes, the probing cantilever is concavely formed with at least one slit along the length direction.

5. The vertical probe card of claim 1, wherein in each cantilever probe, the probe section and the fixed section are located within a projection area formed by orthographic projection of the main body section along the height direction.

6. A cantilever probe of a vertical probe card, wherein the cantilever probe of the vertical probe card is of a conductive and integrally formed one-piece construction and comprises:

a main body section;

Two flank sections extending from opposite sides of the main body section, respectively; and

A needle section and a fixing section extending from two ends of the main body section in a height direction; the needle section comprises a hanging abutting part and a needle cantilever for connecting the abutting part and the main body section, the fixing section comprises a hanging connecting part and a buffer cantilever for connecting the connecting part and the main body section, and the abutting part and the connecting part are both positioned in the height direction;

Wherein the needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutment is spaced from the main body section in the height direction by a distance smaller than the moment arm length;

Wherein, the main body section is provided with a trapezoid structure in a protruding way at the position adjacent to the abutting part and the connecting part along the height direction;

When the abutting part abuts against an object to be detected, the needle detection cantilever and the buffer cantilever are elastically bent, so that the abutting part abuts against the adjacent trapezoid structure, and the connecting part abuts against the adjacent trapezoid structure.

7. The cantilever probe of a vertical probe card of claim 6, wherein the stylus section and the fixed section are located within a projection area formed by orthographic projection of the main body section in the height direction.