CN115201531A - Probe card device and spring-like probe - Google Patents

Abstract

The invention discloses a probe card device and a spring-like probe. The spring-like probe defines a length direction and a separation plane parallel to the length direction, and includes a transition end and a testing end. The spring-like probe is formed with: two stroke arms which are arranged at intervals and are respectively positioned at two opposite sides of the separation surface. Each stroke arm is bent, and the two stroke arms are respectively orthographically projected to two projection areas formed by the separation surfaces and provided with at least one intersection point. In the cross section of the two stroke arms perpendicular to the longitudinal direction, the cross sectional area of any one of the stroke arms is 95% to 105% of the cross sectional area of the other stroke arm. Accordingly, the spring-like probe can provide a spring-like function through the structural design of the two stroke arms between the switching end part and the testing end part, and further realize a brand-new conductive probe structure.

Description

Probe card device and spring-like probe

technical field

The invention relates to a probe card, in particular to a probe card device and a spring-like probe.

Background technique

The existing probe card device uses a plurality of conductive probes for signal and current transmission, but the existing conductive probes are gradually limited by the existing structural design framework, so it is difficult to generate a new structure. For example, existing conductive probes (eg, pogo pins) have a spring function through a multi-piece structure.

Therefore, the inventor believes that the above-mentioned defects can be improved. Nate has devoted himself to research and application of scientific principles, and finally proposes an invention with reasonable design and effective improvement of the above-mentioned defects.

SUMMARY OF THE INVENTION

The embodiments of the present invention provide a probe card device and a spring-like probe, which can effectively improve the defects that may be caused by the existing conductive probes.

An embodiment of the present invention discloses a probe card device, which includes a first guide plate unit and a second guide plate unit, which are arranged spaced apart from each other; and a plurality of spring-like probes, which pass through the first guide plate unit and the second guide plate unit. Guide plate unit; each spring-like probe is defined with a length direction and a separation plane parallel to the length direction; wherein, each spring-like probe includes: a transfer end located at the first guide plate unit away from the second guide plate unit and a test end, located on an outer side of the second guide plate unit away from the first guide plate unit, and the test end is used to detachably abut an object to be tested; wherein, each spring-like probe The part between the transfer end and the test end is formed with: two travel arms spaced apart and located on opposite sides of the separation surface; in each spring-like probe, each travel arm is curved, and The two projection areas formed by the orthographic projection of the two stroke arms to the separation plane respectively have at least one intersection point; wherein, in the cross section of the two stroke arms of each spring-like probe in the vertical length direction, any stroke The cross-sectional area of the arm is 95% to 105% of the cross-sectional area of the other stroke arm.

Preferably, each spring-like probe includes a first section with an adapter end and a second section with a test end; in each spring-like probe, the two ends of any one of the stroke arms are respectively connected to the first segment and the second segment.

Preferably, in each spring-like probe, the two travel arms are located in a space between the first section and the second section.

Preferably, the first guide plate unit is not dislocated relative to the second guide plate unit, and any one of the spring-like probes can be pressed along the length direction to deform its two travel arms toward the outside of the space.

Preferably, each spring-like probe defines a layout plane parallel to the length direction and perpendicular to the separation plane; in each spring-like probe, two ends of any one travel arm are located on opposite sides of the layout plane, respectively.

Preferably, each spring-like probe has a needle length in the length direction; in each spring-like probe, any one of the stroke arms corresponds to a length in the length direction, which is 50% to 90% of the needle length .

Preferably, the needle length of each spring-like probe is no greater than 4 millimeters (mm), and the number of at least one intersection of each travel arm is an odd number.

Preferably, the outer surface of each spring-like probe includes two broad sides that are parallel to the length direction and located on opposite sides, respectively; in each spring-like probe, the separating surface is perpendicular to either broad side.

The embodiment of the present invention also discloses a spring-like probe, which defines a separation surface with a length direction and a parallel length direction, and the spring-like probe includes: an adapter end for abutting against a signal adapter board; and a test end, used for detachably abutting against an object to be tested; wherein, the spring-like probe is formed at a position between the transfer end and the test end: spaced apart and respectively located on opposite sides of the separation surface The two stroke arms of the Among the cross-sections of the two stroke arms of the needle, the cross-sectional area of any one of the stroke arms is 95% to 105% of the cross-sectional area of the other stroke arm.

Preferably, the spring-like probe includes a first section with a transfer end and a second section with a test end, and both ends of any one of the stroke arms are respectively connected to the first section and the second section, and the two The two stroke arms are located in a space between the first section and the second section; the spring-like probe defines a layout plane with parallel length directions and vertical separation planes, and the two ends of any stroke arm are located on opposite sides of the layout plane. On both sides, and any one of the stroke arms includes a plurality of arc-shaped portions connected in sequence, and the plurality of arc-shaped portions are respectively staggered and located on opposite sides of the layout surface.

To sum up, the probe card device and the spring-like probe disclosed in the embodiments of the present invention adopt the structural design ( For example: the two travel arms are arranged at intervals and are located on opposite sides of the separation surface; two projection areas formed by the orthographic projection of the two travel arms to the separation surface respectively have at least one intersection point) , and can provide a spring-like function, thereby realizing a new conductive probe architecture.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and accompanying drawings of the present invention, but these descriptions and drawings are only used to illustrate the present invention, rather than make any claims to the protection scope of the present invention. limit.

Description of drawings

FIG. 1 is a schematic plan view of the probe card device according to the first embodiment of the present invention.

FIG. 2 is a schematic plan view of the plurality of spring-like probes of FIG. 1 when they are compressed along the length direction.

FIG. 3 is a schematic perspective view of the spring-like probe according to the first embodiment of the present invention.

FIG. 4 is a schematic cross-sectional view taken along line IV-IV of FIG. 3 .

FIG. 5 is a schematic perspective cross-sectional view corresponding to FIG. 3 .

FIG. 6 is a schematic cross-sectional view along the section line VI-VI of FIG. 3 .

FIG. 7 is a schematic perspective cross-sectional view corresponding to FIG. 6 .

FIG. 8 is a schematic cross-sectional view taken along line VIII-VIII of FIG. 3 .

FIG. 9 is a schematic perspective cross-sectional view corresponding to FIG. 8 .

FIG. 10 is a schematic perspective view of the spring-like probe according to the second embodiment of the present invention.

FIG. 11 is a schematic plan view of FIG. 10 .

FIG. 12 is a schematic cross-sectional view taken along line XII-XII of FIG. 10 .

FIG. 13 is a schematic perspective cross-sectional view corresponding to FIG. 12 .

Detailed ways

The following are specific embodiments to illustrate the embodiments of the "probe card device and spring-like probe" disclosed in the present invention, and those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present invention in detail, but the disclosed contents are not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", "third" and the like may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component, or one signal from another. In addition, the term "or", as used herein, should include any one or a combination of more of the associated listed items, as the case may be.

[Example 1]

Please refer to FIG. 1 to FIG. 9 , which are Embodiment 1 of the present invention. This embodiment discloses a probe card device 1000 , which includes a probe head 100 and a signal adapter board 200 abutting on one side of the probe head 100 (eg, the top side of the probe head 100 in FIG. 1 ). , and the other side of the probe head 100 (eg: the bottom side of the probe head 100 in FIG. 1 ) is used to test a device under test (DUT) (not shown in the figure, such as: semiconductor wafer).

It should be noted that, in order to facilitate the understanding of this embodiment, the drawings only show the partial structure of the probe card device 1000, so as to clearly show the structure and connection relationship of each component of the probe card device 1000, but The present invention is not limited by the accompanying drawings. The structure of each component of the probe head 100 and the connection relationship thereof will be introduced separately below.

As shown in FIG. 1 and FIG. 2 , the probe head 100 includes a first guide plate unit 1 , a second guide plate unit 2 arranged spaced apart from the first guide plate unit 1 , and clamped on the first guide plate A spacer 3 between the unit 1 and the second guide plate unit 2 and a plurality of spring-like probes 4 passing through the first guide plate unit 1 and the second guide plate unit 2 .

It should be noted that the spring-like probes 4 are described in combination with the first guide plate unit 1 , the second guide plate unit 2 and the spacer plate 3 in this embodiment, but the present invention is not limited to here. For example, in other embodiments not shown in the present invention, the spring-like probe 4 can also be used independently (eg, sold) or used in conjunction with other components. Furthermore, the probe head 100 can be designed by the structure of the spring-like probe 4, so that the first guide plate unit 1 can be arranged in a non-displacement position relative to the second guide plate unit 2, but the present invention does not This is the limit.

In this embodiment, the first guide plate unit 1 includes a first guide plate, and the second guide plate unit 2 includes a second guide plate. However, in other embodiments not shown in the present invention, the first guide plate unit 1 may include a plurality of first guide plates (and spacers sandwiched between two adjacent first guide plates) , and the second guide plate unit 2 may also include a plurality of second guide plates (and spacers sandwiched between two adjacent second guide plates), and a plurality of the first guide plates can be displaced from each other If arranged, a plurality of the second guide plates can also be dislocated from each other.

Furthermore, the spacer plate 3 may be an annular structure, and the spacer plate 3 is clamped at the corresponding peripheral parts of the first guide plate unit 1 and the second guide plate unit 2, but the present invention is not limited here. For example, in other embodiments not shown in the present invention, the spacer 3 of the probe card device 1000 may also be omitted or replaced by other components.

It should be noted first that a plurality of the spring-like probes 4 have substantially the same structure in this embodiment. Therefore, for the convenience of description, a single spring-like probe 4 will be introduced first, but the present invention does not use this as a limit. For example, in other embodiments not shown in the present invention, the structures of the plurality of spring-like probes 4 included in the probe head 100 may also be slightly different.

As shown in FIGS. 1 and 3 , in this embodiment, the spring-like probe 4 is an integrally formed single-piece structure, and the spring-like probe 4 is substantially linear and defines a length direction L. As shown in FIG. The spring-like probe 4 has a needle length L4 in the length direction L, and the needle length L4 is described as being less than 4 millimeters (mm) in this embodiment.

The outer surface of the spring-like probe 4 includes two wide sides 4a and two narrow sides 4b, the two wide sides 4a and the two narrow sides 4b are both parallel to the length direction L, and the two The wide side surfaces 4 a are located on opposite sides of the spring-like probe 4 , respectively, and the two narrow side surfaces 4 b are located on opposite sides of the spring-like probe 4 , respectively.

Furthermore, as shown in FIG. 1 , FIG. 3 and FIG. 4 , in order to facilitate the description of the specific structure of the spring-like probe 4 in this embodiment, the spring-like probe 4 may be further defined to be parallel to the length direction. A partition surface P1 of L and a layout surface P2 parallel to the longitudinal direction L and perpendicular to the partition surface P1. In this embodiment, the separation plane P1 is perpendicular to any one of the wide side surfaces 4a, and the separation plane P1 can be a vertical bisector of any of the wide side surfaces 4a; the layout plane P2 is perpendicular to any one. The narrow side surface 4b and the layout plane P2 may be any vertical bisector of the narrow side surface 4b, but the present invention is not limited to the above. For example, in other embodiments not shown in the present invention, the separation plane P1 may be perpendicular to any of the narrow side surfaces 4b, and the layout plane P2 may be perpendicular to any of the wide side surfaces 4a .

From another perspective, the spring-like probe 4 includes a first segment 41, a second segment 42 spaced from the first segment 41 along the length direction L, and a second segment 42 connecting the first segment 41 and the length direction L. The two stroke arms 43 of the second segment 42 (eg, the two ends 431 of any one of the stroke arms 43 are respectively connected to the first segment 41 and the second segment 42 ).

The first section 41 has a transfer end 411 and a first extension 412 connected to the transfer end 411 , and the transfer end 411 includes two opposite sides of the transfer end 411 . Limiting bumps 4111; the second segment 42 has a test end 421 and a second extension 422 connected to the test end 421, and the first extension 412 and the second extension The portions 422 are disposed adjacent to each other.

Furthermore, any one of the stroke arms 43 corresponds to a length L43 in the longitudinal direction L, which is 50% to 90% of the needle length L4, and two of the stroke arms 43 of any one of the stroke arms 43 The ends 431 are respectively connected to the end faces 413 and 423 of the first extension part 412 and the second extension part 422 facing each other; in this embodiment, the two travel arms 43 are located between the first section 41 and the In a space S between the second segments 42, and the spring-like probe 4 can be pressed along the length direction L to cause the two stroke arms 43 to deform toward the outside of the space S , but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, when the spring-like probe 4 is in an uncompressed initial state, any one of the stroke arms 43 may also be partially located outside the space S .

In more detail, a part of the first extension part 412 is located in the first guide plate unit 1 , and the rest of the first extension part 412 is disposed in the first guide plate unit 1 and the second guide plate between the units 2, and the transfer end 411 is located on an outer side of the first guide plate unit 1 away from the second guide plate unit 2 (eg, the upper side of the first guide plate unit 1 in FIG. 1 ). ). Wherein, the two limiting bumps 4111 of the transfer end portion 411 are used to abut against the outer surface of the first guide plate unit 1 , and the transfer end portion 411 (the end) is used to abut against the outer surface of the first guide plate unit 1 . on the signal transfer board 200 .

Furthermore, a part of the second extension part 422 is located in the second guide plate unit 2 , and the rest of the second extension part 422 is disposed in the first guide plate unit 1 and the second guide plate unit 2 and the test end portion 421 is located at an outer side of the second guide plate unit 2 away from the first guide plate unit 1 (eg, the lower side of the second guide plate unit 2 in FIG. 1 ). Wherein, the test end portion 421 (the end) is used to detachably press against the object to be tested.

In addition, the two travel arms 43 are located between the first guide plate unit 1 and the second guide plate unit 2 in this embodiment. It should be noted that the two travel arms 43 must be located at the position of the spring-like probe 4 between the transfer end 411 and the test end 421 , but the first section 41 and the The specific structure of the second section 42 can be adjusted and changed according to design requirements, and is not limited to what is described in this embodiment. For example, in other embodiments not shown in the present invention, the first extension portion 412 may be omitted from the first segment 41 , and the second extension portion 422 may also be omitted from the second segment 42 .

In order to enable the spring-like probe 4 to have a spring-like function, the two travel arms 43 preferably include at least part of the following technical features. As shown in FIG. 3 to FIG. 9 , each of the stroke arms 43 is curved, and the two stroke arms 43 are spaced apart and located on opposite sides of the partition surface P1 (eg, FIG. 4 , FIG. 6 and FIG. 4 ). 8), and the two ends 431 of any one of the stroke arms 43 are respectively located on opposite sides of the layout surface P2 (eg, in FIG. 4 and FIG. 6 ).

In other words, the end surface 413 of the first extension part 412 and the end surface 423 of the second extension part 422 can be regarded as being divided into four parts by the partition plane P1 and the layout plane P2. The four quadrants of the first extending portion 412 respectively correspond to the four quadrants of the second extending portion 422 along the length direction L.

Wherein, the end face 413 of the first extension part 412 is connected to the two stroke arms 43 with its two diagonally opposite quadrants, and the end face 423 of the second extension part 422 is connected to the two stroke arms 43 respectively. The two diagonally opposite quadrants are respectively connected to the two travel arms 43 . Furthermore, the two quadrants of the first extension portion 412 connected to the two stroke arms 43 along the length direction L do not correspond to the first extension parts connected to the two stroke arms 43 . Two of the quadrants of the two extensions 422 .

In more detail, two projection areas formed by orthographic projection of the two travel arms 43 to the partition plane P1 respectively have an intersection point C, and each of the travel arms 43 has a position corresponding to the An inflection point of the intersection point C. That is to say, any one of the stroke arms 43 includes two arc-shaped portions 432 connected in sequence, and the connecting point of the two arc-shaped portions 432 is the inflection point, and the two arc-shaped portions 432 432 are respectively located on opposite sides of the layout plane P2, but the present invention is not limited to the above. For example, the number of the intersection points C of the two projection regions and the number of the inflection points of each of the travel arms 43 may each be at least one.

In addition, in the cross-section of the two stroke arms 43 of the spring-like probe 4 perpendicular to the length direction L, the cross-sectional area of any one of the stroke arms 43 is the cross-sectional area of the other stroke arm 43 95% to 105% (eg, the cross-sectional areas of the two stroke arms 43 are equal), so that the two stroke arms 43 have similar electrical conduction characteristics (eg, resistance values).

[Example 2]

Please refer to FIG. 10 to FIG. 13 , which is the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned first embodiment are generally described as follows:

In this embodiment, two projection areas formed by orthographic projection of the two stroke arms 43 to the partition plane P1 respectively have a plurality of intersection points C; and each of the stroke arms 43 has a position corresponding to A plurality of inflection points at a plurality of the intersection points C. Wherein, the number of the plurality of intersection points C of each of the travel arms 43 is an odd number in this embodiment, and any one of the travel arms 43 includes a plurality of arc-shaped portions 432 connected in sequence, and A plurality of the arc-shaped portions 432 are alternately located on opposite sides of the layout plane P2, respectively.

[Technical effects of the embodiments of the present invention]

To sum up, the probe card device and the spring-like probe disclosed in the embodiments of the present invention adopt the structural design ( For example: the two travel arms are arranged at intervals and are located on opposite sides of the separation surface; two projection areas formed by the orthographic projection of the two travel arms to the separation surface respectively have at least one intersection point) , and can provide a spring-like function, thereby realizing a new conductive probe architecture.

Furthermore, in the probe card device and the spring-like probe disclosed in the embodiments of the present invention, the two stroke arms have similar cross-sectional areas, so that the two stroke arms have similar electrical conduction characteristics (such as :resistance).

The contents disclosed above are only the preferred feasible embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, any equivalent technical changes made by using the contents of the description and drawings of the present invention are included in the scope of the present invention. Inside.

Claims (10)

1. A probe card device, wherein the probe card device comprises: a first guide plate unit and a second guide plate unit, which are spaced apart from each other; and A plurality of spring-like probes are passed through the first guide plate unit and the second guide plate unit; each of the spring-like probes defines a length direction and a separation plane parallel to the length direction; wherein, each Each of the spring-like probes includes: a transfer end located at an outer side of the first guide plate unit away from the second guide plate unit; and a test end portion located at an outer side of the second guide plate unit away from the first guide plate unit, and the test end portion is used for detachably abutting against an object to be tested; Wherein, each of the spring-like probes is formed at a position between the transfer end portion and the test end portion: two stroke arms arranged at intervals and respectively located on opposite sides of the separation surface; In each of the spring-like probes, each of the stroke arms is in a curved shape, and two projection areas formed by orthographic projection of the two stroke arms to the separation plane respectively have at least one intersection point; Wherein, in the cross-section of the two stroke arms of each of the spring-like probes perpendicular to the length direction, the cross-sectional area of any one of the stroke arms is 95% of the cross-sectional area of the other stroke arm ~105%. 2 . The probe card device according to claim 1 , wherein each of the spring-like probes comprises a first section with the transfer end and a first section with the test end. 3 . Two sections; in each of the spring-like probes, the two ends of any one of the stroke arms are respectively connected to the first section and the second section. 3 . The probe card device according to claim 2 , wherein in each of the spring-like probes, two of the travel arms are located between the first section and the second section. 4 . in a space. 4 . The probe card device according to claim 3 , wherein the first guide plate unit is not dislocated relative to the second guide plate unit, and any one of the spring-like probes can be along the The longitudinal direction is compressed to cause the two stroke arms to be deformed toward the outside of the space. 5. The probe card device according to claim 1, wherein each of the spring-like probes defines a layout plane parallel to the length direction and perpendicular to the separation plane; In the spring probe, the two ends of any one of the stroke arms are respectively located on opposite sides of the layout surface. 6 . The probe card device according to claim 1 , wherein each of the spring-like probes has a length of one needle in the length direction; among each of the spring-like probes, any one The stroke arm corresponds to a length in the longitudinal direction, which is 50% to 90% of the length of the needle. 7. The probe card device of claim 6, wherein the needle length of each of the spring-like probes is no greater than 4 mm, and wherein at least one of the intersection points of each of the travel arms is an odd number. 8. The probe card device according to claim 1, wherein the outer surface of each of the spring-like probes comprises two broad sides parallel to the length direction and located on opposite sides respectively; In each of the spring-like probes, the separation plane is perpendicular to any one of the broad sides. 9. A spring-like probe, wherein the spring-like probe defines a length direction and a separation plane parallel to the length direction, and the spring-like probe comprises: an adapter end for abutting against a signal adapter board; and a test end for detachably abutting against an object to be tested; Wherein, the spring-like probe is formed at the position between the transfer end portion and the test end portion: two stroke arms arranged at intervals and respectively located on opposite sides of the separation surface; The stroke arm is in a curved shape, and the two projection areas formed by the orthographic projection of the two stroke arms to the separation plane respectively have at least one intersection point; Wherein, in the cross-section of the two stroke arms of the spring-like probe perpendicular to the length direction, the cross-sectional area of any one of the stroke arms is 95% to 105 of the cross-sectional area of the other stroke arm %. 10 . The spring-like probe according to claim 9 , wherein the spring-like probe comprises a first section with the transfer end and a second section with the test end. 11 . , both ends of any one of the stroke arms are respectively connected to the first segment and the second segment, and the two stroke arms are located in a space between the first segment and the second segment The spring-like probe defines a layout plane parallel to the length direction and perpendicular to the separation plane, the two ends of any one of the stroke arms are located on opposite sides of the layout plane, and any one The travel arm includes a plurality of arc-shaped portions connected in sequence, and the plurality of arc-shaped portions are respectively staggered on opposite sides of the layout surface.

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