CN115961336A - Single crystal furnace and secondary feeding method - Google Patents

Abstract

The invention provides a single crystal furnace and a secondary charging method, wherein the single crystal furnace comprises: a furnace body comprising a furnace chamber; and each group of stop block mechanisms comprises a stop block and a lifting unit, wherein the stop block is arranged on the inner peripheral wall of the furnace chamber, is connected to the lifting unit and can move along the axial direction of the furnace chamber under the driving of the lifting unit. The embodiment of the disclosure provides a single crystal furnace and a secondary feeding method, which can flexibly adjust the height of a feeding pipe in the feeding process of the feeding pipe.

Description

A kind of single crystal furnace and secondary feeding method

technical field

The invention relates to the technical field of crystal pulling, in particular to a single crystal furnace and a secondary feeding method.

Background technique

Single crystal furnace is a professional equipment for producing single crystal silicon rods. In the traditional production process, the polysilicon raw material is put into a quartz crucible once and melted for production. The effective mass of monocrystalline silicon rods is limited by the maximum feeding amount, which is determined by the size of the quartz crucible, and the weight of the bulk silicon material filled with the quartz crucible is the maximum feeding amount. During the melting process of silicon material, the bulk solid silicon becomes liquid, and the space occupied by the gaps between the material blocks is released. The one-time feeding cannot achieve a sufficient amount of feeding, which reduces the maximum feeding amount to a certain extent, and the utilization rate of the crucible is not good. high. Therefore, the secondary charging technology is widely used, which can improve the utilization rate of the crucible and reduce the cost.

In the related art, a typical secondary feeding system through a feeding pipe is widely used. The feeding tube is mainly composed of a guide device, a tube body, a central molybdenum rod and a conical base; the top of the central molybdenum rod can be connected to the lifting head of the single crystal furnace, the bottom is connected to the conical base through screws, and the central molybdenum rod passes through the tube body and The guide device, the bottom of the tube body and the conical base are closed to form a space for storing silicon materials. The feeding tube needs to be positioned and limited by the stopper at the corresponding position in the single crystal furnace, and then the lifting head is lowered, the conical base is gradually separated from the tube body, and the silicon material falls to realize feeding.

However, there are certain limitations in the conventional feeding method: the stopper used for positioning and limiting the feeding tube cannot be moved. As the feeding progresses, the silicon liquid level will rise and get closer to the feeding tube, causing splash The high temperature will damage the feeding pipe, so the feeding amount can only be reduced; if the feeding amount needs to be increased, the height of the stopper should be increased, so that it is inevitable that the solution splash will be more serious at the initial stage of feeding, and the heater and heat will be damaged. The risk of the field will also reduce the service life of the guide tube.

In some technologies, a telescopic quartz feeding device is designed, which can realize the movement of the feeding pipe, but this solution needs to redesign the feeding pipe, the structure of the feeding pipe is more complicated, the cost of replacement and maintenance is higher, and the radial dimension of the overall structure is too large , it is not easy to implement in the slender furnace chamber, and it cannot be adjusted in real time. It is necessary to take out the feeding pipe to adjust, and there are certain limitations.

Contents of the invention

Embodiments of the present disclosure provide a single crystal furnace and a secondary charging method, which can flexibly adjust the height of the feeding tube during the charging process of the feeding tube.

The technical scheme provided by the present invention is as follows:

A single crystal furnace, comprising:

the furnace body, which includes the furnace chamber; and

At least one set of stopper mechanisms, each set of stopper mechanisms includes a stopper and a lifting unit, the stoppers are arranged on the inner peripheral wall of the furnace chamber, and the stoppers are connected to the lifting unit, and Driven by the lifting unit, it can move axially along the furnace chamber.

Exemplarily, there are at least two groups of stopper mechanisms, and at least two groups of stopper mechanisms are distributed along the inner peripheral wall of the furnace chamber.

Exemplarily, the inner peripheral wall of the furnace chamber is provided with a chute extending axially along the furnace chamber, and the inside of the side wall of the furnace chamber is also provided with an installation cavity communicating with the chute. The side wall of the chamber is also provided with a radial channel radially penetrating the outer peripheral wall of the installation cavity and the furnace chamber;

Wherein, the lifting unit includes a transmission assembly and a drive assembly, the stopper is arranged corresponding to the chute, the drive assembly is at least partially exposed to the furnace chamber, and is connected to the transmission assembly through the radial channel , the transmission assembly is installed in the installation cavity and connected to the stopper through the chute, and the drive assembly drives the stopper to move axially along the furnace chamber through the transmission assembly.

Exemplarily, the transmission assembly includes a lead screw set, and the lead screw set includes:

a lead screw disposed axially along the furnace chamber, the lead screw having a first end and a second end axially opposite to each other; and

a slider, the slider is connected to the lead screw and can move along the lead screw as the lead screw rotates;

Wherein, the driving assembly is directly or indirectly connected to the lead screw to drive the lead screw to rotate, and the stopper is connected to the slider to move synchronously with the slider.

Exemplarily, the drive assembly includes a rotating shaft and a driving member, the rotating shaft extends radially along the furnace chamber and passes through the radial channel, the rotating shaft has a third end opposite to the axial direction of itself and a fourth end, the third end is placed in the installation cavity, the fourth end extends to the outside of the outer peripheral wall of the furnace body, and the fourth end is connected to the driving member;

The transmission assembly also includes: a bevel gear transmission group, the bevel gear transmission group connects the second end of the lead screw and the third end of the rotating shaft, and is used to rotate the rotating shaft around its own axis. The rotational movement is converted into a rotational movement of the lead screw about its own axis.

Exemplarily, the driving member includes a hand wheel or a driving motor.

Exemplarily, the bevel gear transmission group includes:

a first bevel gear coaxially connected to the second end of the lead screw;

a second bevel gear coaxially connected to the third end of the shaft;

Wherein, the bevel gears of the first bevel gear and the second bevel gear mesh with each other.

Exemplarily, the gear outer diameter of the first bevel gear is smaller than or equal to the gear outer diameter of the second bevel gear.

Exemplarily, the installation chamber includes a first chamber extending axially along the furnace chamber and a second chamber separated from the first chamber, wherein the first chamber is connected to the slide The grooves are connected, the screw group is installed in the sliding groove, the second end of the screw extends from the first chamber to the second chamber, and the third end of the rotating shaft extends from the The furnace outside extends to the second chamber, and the bevel gear transmission group is installed to the second chamber.

A method for secondary charging of a single crystal furnace, applied to the above single crystal furnace, said method comprising the following steps:

During the secondary feeding process into the single crystal furnace through the feeding pipe, the feeding pipe is positioned and limited by the stopper, and the stopper is moved along the axial direction of the furnace chamber according to predetermined rules , to adjust the relative distance between the feeding pipe and the crucible in the furnace chamber in the axial direction of the furnace chamber.

The beneficial effects brought by the embodiments of the present disclosure are as follows:

In the above scheme, the stopper used for positioning and limiting the feeding tube in the single crystal furnace is designed as a structure that can move freely along the furnace chamber axis. In this way, since the stopper can move freely along the furnace chamber axis, Therefore, the distance between the feeding pipe and the liquid surface of the crucible can be adjusted, so as to ensure that the feeding amount is sufficient each time, and also ensure the safety of the heater, thermal field and feeding pipe; moreover, since the distance between the feeding pipe and the liquid surface can be adjusted according to the actual situation, It can better cope with various emergencies and ensure the safety of the equipment; in addition, it only needs to improve the structure of the stopper to achieve its lifting purpose, the structure is simple and the operation is convenient; in addition, when pulling multiple ingots, the stopper can be directly adjusted Height, free to switch between single and multiple pulls, not limited by other external factors. Based on the above, macroscopically, the output of single crystal furnace in a single cycle and the utilization rate of quartz crucible are improved, and the manufacturing cost of preparing single crystal is reduced.

Description of drawings

Figure 1 shows the appearance of a single crystal furnace in an embodiment of the present disclosure;

Figure 2 shows a cross-sectional view of a single crystal furnace in an embodiment of the present disclosure;

Fig. 3 shows an enlarged view of the partial structure of the dotted line box A in Fig. 2 .

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. Apparently, the described embodiments are some of the embodiments of the present disclosure, not all of them. Based on the described embodiments of the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without creative effort fall within the protection scope of the present disclosure.

Unless otherwise defined, the technical terms or scientific terms used in the present disclosure shall have the usual meanings understood by those skilled in the art to which the present disclosure belongs. "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Likewise, words like "a", "an" or "the" do not denote a limitation of quantity, but mean that there is at least one. "Comprising" or "comprising" and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right" and so on are only used to indicate the relative positional relationship. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

As shown in FIGS. 1 to 3 , the single crystal furnace provided by the embodiment of the present invention includes a furnace body 10 and at least one set of stop mechanisms 20 . The furnace body 10 includes a furnace chamber, and the furnace chamber can be provided with a crucible, a crucible shaft, a heater, etc.;

Each set of stopper mechanisms 20 includes a stopper 21 and a lifting unit 22, the stopper 21 is arranged on the inner peripheral wall of the furnace chamber, and the stopper 21 is connected to the lifting unit 22, and The lifting unit 22 is driven to move axially along the furnace chamber.

In the above scheme, the stopper 21 used for positioning and limiting the feeding tube in the single crystal furnace is designed to be a structure that can move freely along the axial direction of the furnace chamber. In this way, the stopper 21 can freely move along the axial direction of the furnace chamber. Therefore, the distance between the feeding pipe and the liquid surface of the crucible can be adjusted, so as to ensure that the feeding amount is sufficient each time, and also ensure the safety of the heater, thermal field and feeding pipe; and, because the distance between the feeding pipe and the liquid surface can be adjusted according to the actual situation Adjustment can better deal with various emergencies and ensure the safety of the equipment; in addition, it only needs to improve the structure of the stopper 21 to achieve its purpose of lifting, the structure is simple, and the operation is convenient; in addition, when pulling multiple ingots, it can be directly Adjust the height of the stopper 21, and freely switch between single and multiple pulls without being restricted by other external factors. Based on the above, macroscopically, the output of single crystal furnace in a single cycle and the utilization rate of quartz crucible are improved, and the manufacturing cost of preparing single crystal is reduced.

As an exemplary embodiment, as shown in Fig. 1 and Fig. 2, there may be at least two groups of the stopper mechanisms 20, and at least two groups of the stopper mechanisms 20 are distributed along the inner peripheral wall of the furnace chamber. . In a more specific embodiment, as shown in Fig. 1 and Fig. 2, there may be two groups of the stop mechanism 20, and the two groups of the stop mechanism 20 are symmetrically arranged on two radially opposite side walls of the furnace chamber. Of course, it can be understood that the specific number of the stop mechanism 20 is not limited, and there may be two or more groups.

As some exemplary embodiments, as shown in Figure 3, the inner peripheral wall of the furnace chamber is provided with a chute 11 extending axially along the furnace chamber, and the inside of the side wall of the furnace chamber is also provided with a The installation cavity 12 communicated with the chute 11, the side wall of the furnace chamber is also provided with a radial passage 13 radially passing through the installation cavity 12 and the outer peripheral wall of the furnace chamber; wherein, the lifting unit 22 includes A transmission assembly 221 and a drive assembly 222 , the stopper 21 is disposed corresponding to the chute 11 , the drive assembly 222 is at least partially exposed to the furnace chamber, and is connected to the transmission assembly 221 via the radial channel 13 , the transmission assembly 221 is installed in the installation cavity 12 and connected to the stopper 21 through the chute 11, and the drive assembly 222 drives the stopper 21 along the furnace through the transmission assembly 221 The chamber moves axially.

In the above solution, the transmission assembly 221 is used as a power transmission component between the drive assembly 222 and the block 21, and it undertakes the task of driving the block 21 up and down driven by the power of the drive assembly 222. effect. The driving assembly 222 is at least partly exposed outside the furnace chamber, so that the operator can control its work so as to change the position of the stopper 21 at any time.

Exemplarily, as shown in FIG. 3 , the transmission assembly 221 includes a lead screw set, and the lead screw set includes:

A lead screw 2211 arranged axially along the furnace chamber, the lead screw 2211 having a first end and a second end opposite to each other along its own axial direction; and

a slider 2212, the slider 2212 is connected to the lead screw 2211, and can move along the lead screw 2211 as the lead screw 2211 rotates;

Wherein, the driving assembly 222 is directly or indirectly connected to the lead screw 2211 to drive the lead screw 2211 to rotate, and the stopper 21 is connected to the slider 2212 to move synchronously with the slider 2212 .

In the above solution, the transmission assembly 221 uses a lead screw 2211 group, and the movement of the slider 2212 on the lead screw 2211 drives the movement of the stopper 21. In this way, the structure is simple, and the stopper The movement precision of 21 is higher.

It should be noted here that the lead screw 2211 screw-drives the movement of the slider 2212 , and the threaded rubber of the lead screw 2211 needs to meet the self-locking condition, so that the slider 2212 can be locked to a desired position.

Of course, it can be understood that the transmission assembly 221 is not limited to the lead screw 2211 group, but can also be any other structure that can drive the stopper 21 up and down.

In addition, for example, as shown in FIG. 3 , the lead screw assembly further includes a guide rod 2213 , and the slider 2212 can move along the guide rod 2213 to improve the stability of the movement of the block.

In addition, exemplary, as shown in FIG. 3 , the driving assembly 222 includes a rotating shaft 2221 and a driving member 2222, the rotating shaft 2221 extends radially along the furnace chamber and passes through the radial passage 13, so A bearing is provided between the rotating shaft 2221 and the radial channel 13, so that the rotating shaft 2221 can rotate freely in the radial channel 13, and the bearing cover seals the space between the rotating shaft 2221 and the radial channel 13 the gap; the rotating shaft 2221 has a third end and a fourth end opposite to its own axial direction, the third end is placed in the installation cavity 12, and the fourth end extends to the furnace body 10 Outside the peripheral wall, the fourth end is connected to the driving member 2222; the transmission assembly 221 also includes: a bevel gear transmission group, and the bevel gear transmission group is connected to the second end of the lead screw 2211 and the The third end of the rotating shaft 2221 is used to convert the rotating motion of the rotating shaft 2221 around its own axis into the rotating motion of the lead screw 2211 around its own axis.

In the above solution, the driving member 2222 can drive the rotating shaft 2221 to rotate, the rotating shaft 2221 is axially arranged to extend radially along the furnace chamber, and the screw 2211 axially extends axially along the furnace chamber, therefore The transmission assembly 221 also adopts a bevel gear transmission group that can transmit the vertical rotation motion, so as to change the radial rotation motion of the rotating shaft 2221 into the axial rotation motion of the lead screw 2211, and then convert the rotation motion of the lead screw 2211 into the stopper 21 The axial linear motion of the bevel gear transmission group can also bear part of the axial force at the same time, and the speed at which the block 21 moves can be controlled by changing the transmission ratio of the bevel gear transmission group.

Exemplarily, the driving part 2222 can be selected as a handwheel to realize manual operation; the driving part 2222 can also be selected as a driving motor to realize automatic operation.

In addition, as an exemplary embodiment, as shown in Figure 3, the bevel gear transmission group includes:

a first bevel gear 223, the first bevel gear 223 is coaxially connected to the second end of the lead screw 2211;

a second bevel gear 224, the second bevel gear 224 is coaxially connected to the third end of the rotating shaft 2221;

Wherein, the bevel gears of the first bevel gear 223 and the second bevel gear 224 mesh with each other.

Exemplarily, the gear outer diameter of the first bevel gear 223 is smaller than or equal to the gear outer diameter of the second bevel gear 224 . With such a solution, the larger torque of the driving member 2222 can be converted into a smaller torque of the lead screw 2211 , so as to achieve the purpose of adjusting the height of the stopper 21 more precisely.

In addition, exemplary, the installation chamber 12 includes a first chamber 121 extending axially along the furnace chamber and a second chamber 122 separated from the first chamber 121, wherein the first The cavity 121 communicates with the chute 11, the screw 2211 is installed in the chute 11, and the second end of the screw 2211 extends from the first cavity 121 to the second cavity chamber 122 , the third end of the rotating shaft 2221 extends from the furnace chamber to the second chamber 122 , and the bevel gear transmission set is installed in the second chamber 122 . With the above solution, the second chamber 122 can provide a relatively clean space for the bevel gear transmission group, so as to avoid contamination by impurities such as particles and improve its service life.

In addition, the embodiment of the present disclosure also provides a secondary charging method of the single crystal furnace, which is applied to the single crystal furnace in the embodiment of the present disclosure, and the method includes the following steps:

During the secondary charging process through the feeding pipe into the single crystal furnace, the feeding pipe is positioned and limited by the stopper 21, and the stopper is moved along the axial direction of the furnace chamber according to predetermined rules. block 21 to adjust the relative distance between the feeding pipe and the crucible in the furnace chamber in the axial direction of the furnace chamber.

The following points need to be explained:

(1) The drawings of the embodiments of the present disclosure only relate to the structures involved in the embodiments of the present disclosure, and other structures may refer to general designs.

(2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thicknesses of layers or regions are exaggerated or reduced, that is, the drawings are not drawn in actual scale. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element, or Intermediate elements may be present.

(3) In the case of no conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims (10)

1. A single crystal furnace, comprising:

a furnace body including a furnace chamber; and

the furnace chamber is provided with a furnace chamber, the furnace chamber is arranged in the furnace chamber, the furnace chamber is provided with a plurality of baffle block mechanisms, each baffle block mechanism comprises a baffle block and a lifting unit, the baffle blocks are arranged on the inner peripheral wall of the furnace chamber, are connected to the lifting units and can move along the axial direction of the furnace chamber under the driving of the lifting units.

2. The single crystal furnace of claim 1,

the stop block mechanisms are at least two groups, and the stop block mechanisms are distributed along the circumferential direction of the inner circumferential wall of the furnace chamber.

3. The single crystal furnace of claim 1,

the inner peripheral wall of the furnace chamber is provided with a sliding chute extending along the axial direction of the furnace chamber, the side wall of the furnace chamber is internally provided with an installation cavity communicated with the sliding chute, and the side wall of the furnace chamber is also provided with a radial channel radially penetrating through the installation cavity and the outer peripheral wall of the furnace chamber;

the lifting unit comprises a transmission assembly and a driving assembly, the stop block is arranged corresponding to the sliding groove, the driving assembly is at least partially exposed out of the furnace chamber and is connected to the transmission assembly through the radial channel, the transmission assembly is installed in the installation cavity and is connected with the stop block through the sliding groove, and the driving assembly drives the stop block to move axially along the furnace chamber through the transmission assembly.

4. The single crystal furnace of claim 3,

the transmission assembly comprises a lead screw group, and the lead screw group comprises:

a lead screw axially disposed along the furnace chamber, the lead screw having axially opposed first and second ends along the lead screw; and

the sliding block is connected to the lead screw and can move along the lead screw along with the rotation of the lead screw;

the driving assembly is directly or indirectly connected to the lead screw to drive the lead screw to rotate, and the stop block is connected to the sliding block to move synchronously with the sliding block.

5. The single crystal furnace of claim 4,

the driving assembly comprises a rotating shaft and a driving piece, the rotating shaft extends along the radial direction of the furnace chamber and penetrates through the radial channel, the rotating shaft is provided with a third end and a fourth end which are opposite along the axial direction of the rotating shaft, the third end is arranged in the installation cavity, the fourth end extends to the outer side of the peripheral wall of the furnace body, and the fourth end is connected with the driving piece;

the transmission assembly further includes: the bevel gear transmission group is connected with the second end of the lead screw and the third end of the rotating shaft and used for converting the rotating motion of the rotating shaft around the self axis into the rotating motion of the lead screw around the self axis.

6. The single crystal furnace of claim 5,

the driving part comprises a handwheel or a driving motor.

7. The single crystal furnace of claim 5,

the bevel gear transmission set comprises:

a first bevel gear coaxially connected to the second end of the lead screw;

a second bevel gear coaxially connected to the third end of the rotating shaft;

wherein the bevel gears of the first and second bevel gears mesh with each other.

8. The single crystal furnace of claim 7,

the gear outer diameter size of the first bevel gear is smaller than or equal to that of the second bevel gear.

9. The single crystal furnace of claim 5,

the mounting cavity comprises a first cavity and a second cavity, the first cavity extends along the axial direction of the furnace chamber, the second cavity is separated from the first cavity, the first cavity is communicated with the chute, the screw rod group is mounted in the chute, the second end of the screw rod extends from the first cavity to the second cavity, the third end of the rotating shaft extends from the outside of the furnace chamber to the second cavity, and the bevel gear transmission group is mounted to the second cavity.

10. A secondary charging method of a single crystal furnace, characterized by being applied to the single crystal furnace according to any one of claims 1 to 8, the method comprising the steps of:

in the process of secondary feeding into the single crystal furnace through the feeding pipe, the feeding pipe is positioned and limited through the stop block, and the stop block is moved in the axial direction of the furnace chamber according to a preset rule so as to adjust the relative distance between the feeding pipe and the crucible liquid level in the furnace chamber in the axial direction of the furnace chamber.

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