CN114411237B - Flexible induction heating system with variable screw pitch and single crystal furnace - Google Patents
Flexible induction heating system with variable screw pitch and single crystal furnace Download PDFInfo
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- CN114411237B CN114411237B CN202210063831.8A CN202210063831A CN114411237B CN 114411237 B CN114411237 B CN 114411237B CN 202210063831 A CN202210063831 A CN 202210063831A CN 114411237 B CN114411237 B CN 114411237B
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- induction coil
- sliding blocks
- heating system
- induction heating
- screw rod
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- 230000006698 induction Effects 0.000 title claims abstract description 66
- 238000010438 heat treatment Methods 0.000 title claims abstract description 21
- 239000013078 crystal Substances 0.000 title claims abstract description 19
- 230000001360 synchronised effect Effects 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- General Induction Heating (AREA)
Abstract
The invention discloses a flexible induction heating system with variable pitch, which comprises a spiral induction coil; the induction coil spirally extends from bottom to top to form a plurality of layers of ring bodies, and the induction coil adjusting device is further included; the induction coil adjusting device comprises sliding blocks which are respectively fixed on a plurality of layers of ring bodies and are arranged from bottom to top, and a driving device for driving the sliding blocks to move up and down; all the sliding blocks rise or fall simultaneously to adjust the magnetic field distribution of the induction coil, the coil size and the effective turns and the distance are changed by precisely adjusting the pitch of the coil, and the temperature gradient required by crystal generation is precisely established.
Description
Technical Field
The invention belongs to the technical field of silicon single crystal furnaces.
Background
Most of the semiconductor single crystal furnaces are high temperature furnaces, taking silicon carbide and silicon single crystal furnaces as examples, the core temperature of a thermal field is 2300 ℃ and 1400 ℃ respectively, and the temperature gradient in the axial direction of the thermal field directly influences the growth quality and defects of the crystal in the high temperature growth process of the crystal.
In the Chinese patent application with publication number 113136618A, a single crystal furnace is disclosed. The induction coil is used as a heating device in the single crystal furnace, and the induction coil surrounds the heat preservation component in a spiral mode. The induction coil is used for generating an alternating magnetic field to enable the crucible to generate eddy current so as to enable the crucible to generate heat, and accurate adjustment and quality control are needed for heating the raw materials in the crucible along the axial direction of the thermal field. However, in this prior art, the size, number of turns, and induction coil diameter of the rigid spiral coil affect the magnetic field distribution, so that the fixed coil size and number of turns are unfavorable for adjusting the magnetic field distribution, resulting in difficulty in adjusting the temperature gradient in the axial direction of the thermal field, making it difficult to establish the temperature gradient of the thermal field required for crystal growth with precision, resulting in high defect rate of the produced crystal.
For example, a new technical solution is needed to solve the above technical problems.
Disclosure of Invention
The invention aims to: the invention provides a flexible induction heating system capable of realizing the change of the length dimension of a spiral induction coil and the number of turns of the coil in an effective area and a single crystal furnace with the same.
The technical scheme is as follows: in order to solve the problems, the invention adopts the following technical scheme:
a variable pitch flexible induction heating system comprising a helical induction coil; the induction coil spirally extends from bottom to top to form a plurality of layers of ring bodies, and the induction coil adjusting device is further included;
the induction coil adjusting device comprises sliding blocks which are respectively fixed on the layers of ring bodies and are arranged from top to bottom, and a driving device which drives the sliding blocks to move up and down; the top of the induction coil is fixed; all the sliding blocks ascend or descend simultaneously, and the distance between every two adjacent sliding blocks is always the same.
Further, the induction coil adjusting device further comprises a folding expansion joint, the folding expansion joint comprises a plurality of connecting rods with hinged centers and mutually crossed, the end points of the upper connecting rod and the lower connecting rod are also mutually hinged, and the hinge shafts of the central hinge points of the mutually crossed connecting rods are simultaneously fixed on the sliding blocks, so that the distance between every two adjacent sliding blocks is always the same; the top of the folding telescopic joint is fixed with the top of the induction coil, and when the bottom of the folding telescopic joint moves downwards, the distance between two adjacent center hinge points is increased, so that the distance between two adjacent sliding blocks is increased.
Further, the driving device is a screw rod and a guide rod, the screw rods and the guide rod extend up and down, the sliding blocks are equidistantly arranged on the guide rod, the screw rod guide block arranged on the screw rod is fixed at the bottom of the folding telescopic joint, and the screw rod guide block rises or falls along with the rotation of the screw rod to drive the bottom of the folding telescopic joint to move upwards or downwards.
Further, the induction coil is provided with a plurality of guide rods and a plurality of screw rods, the guide rods are equidistantly and parallelly arranged outside the induction coil along the circumference, and each guide rod is provided with a sliding block which is fixed with the ring body; each screw rod is arranged corresponding to one folding expansion joint.
Further, the driving device also comprises a rotating wheel and a driving motor which respectively drive each screw rod to rotate; one of the rotating wheels is a driving wheel, the other rotating wheels are driven wheels, the driving wheel and the driven wheels are transmitted through a synchronous belt, and a driving motor is coaxially connected with the driving wheel and drives the driving wheel to rotate.
Further, the motor also comprises a mounting frame, wherein the induction coil, the screw rod and the wheel shafts of the rotating wheels are all mounted on the frame, and the driving motor is mounted below the frame.
The beneficial effects are that: compared with the prior art, the flexible induction heating system with the variable screw pitch can adjust the magnetic field distribution of the induction coil when the temperature gradient of the thermal field is unsuitable, change the size of the coil and the effective turns and the distance by accurately adjusting the screw pitch of the coil, and accurately establish the temperature gradient required by crystal generation.
The invention also discloses a single crystal furnace, which is provided with the flexible induction heating system.
Drawings
Fig. 1 is a block diagram of a flexible induction heating system of the present invention.
Detailed Description
Referring to fig. 1, a flexible induction heating system is provided according to the present invention, which includes a spiral induction coil 1, an induction coil adjusting device, and a frame 8. The induction coil 1 spirally extends from bottom to top to form a plurality of layers of ring bodies. The induction coil 1 is used for generating an alternating magnetic field, so that a crucible member (not shown) located within the surrounding area of the induction coil 1 generates eddy current, and the crucible member generates heat.
The induction coil adjusting device comprises sliding blocks 4, guide rods 2 and folding expansion joints 3, wherein the sliding blocks 4 are respectively fixed on a plurality of layers of ring bodies and are arranged in a lower-upper mode, and the guide rods 2 bear the sliding blocks 4 to move up and down. A plurality of sliding blocks 4 are equidistantly arranged on the guide rod 2. The folding telescopic joint 3 comprises a plurality of connecting rods with hinged centers and crossed mutually, endpoints of the upper connecting rod and the lower connecting rod are hinged mutually, and a hinge shaft of a central hinge point of each of the crossed connecting rods is simultaneously fixed on the sliding blocks 4, so that the distance between every two adjacent sliding blocks 4 is always the same. All the sliders 4 are raised or lowered simultaneously and the distance between every two adjacent sliders is always the same. The top of the folding telescopic joint 3 is fixed with the top of the induction coil 1, such as a fixed block 9 at the uppermost layer in fig. 1, the fixed block 9 is sleeved on the uppermost layer of the induction coil 1 and the side surface of the fixed block 9 is connected with the top of the folding telescopic joint 3. The fixed block 9 is fixed, namely the telescopic joint 3 and the induction coil 1 are in a hanging installation mode. The folding telescopic joint 3 can make the screw pitch of the induction coil 1 become larger by making the several sliding blocks 4 move downwards simultaneously by moving the bottom downwards.
In the present embodiment, 4 guide rods 2 are used to be located outside the induction coil, respectively. The 4 guide rods 2 are equidistantly and parallelly arranged on the outer side of the induction coil 1 along the circumference so that each layer of ring body of the induction coil 1 can not incline when ascending or descending to be controlled more accurately.
The driving device is a screw rod 11 extending up and down, a screw rod guide block 13 arranged on the screw rod 11 is fixed at the bottom of the folding telescopic joint 3, and the screw rod guide block 13 rises or falls along with the rotation of the screw rod 11 to drive the bottom of the folding telescopic joint 3 to move upwards or downwards. When the bottom of the folding telescopic joint 3 moves downwards, the screw pitch of the induction coil 1 becomes larger; when the bottom of the telescopic joint 3 moves upward, the pitch of the induction coil 1 becomes smaller. The lead screws 11 are arranged outside the induction coil at equal intervals and in parallel along the circumference, and each lead screw 11 corresponds to one folding expansion joint 3.
The driving device also comprises a rotating wheel 12 and a driving motor 10 which respectively drive each screw rod 11 to rotate. The rotating wheel 12 is positioned below the screw rod 11 and is coaxially connected with the screw rod 11. One of the rotating wheels is a driving wheel, the other rotating wheels are driven wheels, and the driving wheel and the driven wheels are driven through a synchronous belt 7. The driving motor 10 is coaxially connected with the driving wheel and drives the driving wheel to rotate. The frame 8 is also provided with a tensioning wheel mechanism 6 and an auxiliary guide wheel mechanism 5 to prevent the synchronous belt 7 from slipping, so that a driving motor 10 drives the driving wheel and the driven wheel to rotate at the same speed, and the rotation speed of each screw rod 2 is consistent. The screw rod 2, the wheel shaft of the rotating wheel 12, the tensioning wheel mechanism 6 and the auxiliary guide wheel mechanism 5 are all arranged on the frame, and the driving motor 10 is arranged below the frame.
When the flexible induction heating system is used, if the temperature gradient of a thermal field is not suitable, the screw pitch of the coil can be accurately adjusted to change the effective turns and the screw pitch of the coil when the magnetic field distribution of the induction coil needs to be adjusted, so that the magnetic field distribution condition can be adjusted, and the temperature gradient required by crystal generation can be established.
In other embodiments, the number of the screw rods may be 3, 5, etc., which will not be described herein.
The flexible induction heating system is applied to a single crystal furnace. Therefore, another embodiment of the invention is a single crystal furnace comprising the flexible induction heating system of the above embodiment.
There are many ways in which the invention may be embodied, and the above description is only of a preferred embodiment of the invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be comprehended within the scope of the present invention. The components not explicitly described in this embodiment can be implemented by using the prior art.
Claims (7)
1. A variable pitch flexible induction heating system comprising a helical induction coil; the induction coil spirally extends from bottom to top to form a plurality of layers of ring bodies, and is characterized by further comprising an induction coil adjusting device;
the induction coil adjusting device comprises sliding blocks which are respectively fixed on the layers of ring bodies and are arranged from top to bottom, and a driving device which drives the sliding blocks to move up and down; the top of the induction coil is fixed; all the sliding blocks ascend or descend simultaneously, and the distance between every two adjacent sliding blocks is always the same;
the induction coil adjusting device further comprises a folding telescopic joint, the top of the folding telescopic joint is fixed with the top of the induction coil, and when the bottom of the folding telescopic joint moves downwards, the distance between two adjacent center hinge points is increased, so that the distance between two adjacent sliding blocks is increased.
2. The flexible induction heating system of claim 1, wherein the folding telescopic joint comprises a plurality of connecting rods which are hinged at the center and are mutually intersected, the end points of the upper connecting rod and the lower connecting rod are also mutually hinged, and the hinge shafts of the central hinge points of the mutually intersected connecting rods are simultaneously fixed on the sliding blocks, so that the distance between every two adjacent sliding blocks is always the same.
3. The flexible induction heating system of claim 1 or 2, wherein the driving device is a screw rod and a guide rod which extend up and down, the sliding blocks are equidistantly arranged on the guide rod, a screw rod guide block arranged on the screw rod is fixed at the bottom of the folding expansion joint, and the screw rod guide block rises or falls along with the rotation of the screw rod to drive the bottom of the folding expansion joint to move upwards or downwards.
4. A flexible induction heating system according to claim 3, comprising a plurality of guide rods and a plurality of screw rods, wherein the plurality of guide rods are circumferentially equidistantly and parallelly arranged outside the induction coil, and each guide rod is provided with a slide block and a ring body for fixing; each screw rod is arranged corresponding to one folding expansion joint.
5. The flexible induction heating system of claim 4, wherein the driving means further comprises a rotating wheel and a driving motor for driving each screw rod to rotate respectively; one of the rotating wheels is a driving wheel, the other rotating wheels are driven wheels, the driving wheel and the driven wheels are transmitted through a synchronous belt, and a driving motor is coaxially connected with the driving wheel and drives the driving wheel to rotate.
6. The flexible induction heating system of claim 5, further comprising a mounting frame, wherein the induction coil, the lead screw, and the axle of the rotating wheel are all mounted on the frame, and wherein the drive motor is mounted below the frame.
7. A single crystal furnace having a flexible induction heating system as claimed in any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210063831.8A CN114411237B (en) | 2022-01-20 | 2022-01-20 | Flexible induction heating system with variable screw pitch and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210063831.8A CN114411237B (en) | 2022-01-20 | 2022-01-20 | Flexible induction heating system with variable screw pitch and single crystal furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114411237A CN114411237A (en) | 2022-04-29 |
| CN114411237B true CN114411237B (en) | 2023-11-28 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210063831.8A Active CN114411237B (en) | 2022-01-20 | 2022-01-20 | Flexible induction heating system with variable screw pitch and single crystal furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN114411237B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2641406A1 (en) * | 1988-12-30 | 1990-07-06 | Thomson Csf | Variable inductance coil with central slider |
| CN1309196A (en) * | 2000-11-06 | 2001-08-22 | 西北工业大学 | Heating method and equipment for crystal growth |
| CN203065642U (en) * | 2013-01-06 | 2013-07-17 | 河北同光晶体有限公司 | Insulation bracket of induction coil for growth of silicon carbide crystals |
| CN105200515A (en) * | 2015-09-24 | 2015-12-30 | 山东大学 | Induction coil for SiC single-crystal growth furnace and application thereof |
| CN207193437U (en) * | 2017-05-22 | 2018-04-06 | 山东大学 | The adjusting apparatus that temperature field is adjusted in real time can be realized in a kind of SiC single crystal grower |
| CN212270278U (en) * | 2019-10-25 | 2021-01-01 | 浙江晶盛机电股份有限公司 | Device for automatically adjusting temperature field gradient of silicon carbide furnace |
| CN115807264A (en) * | 2021-09-15 | 2023-03-17 | 中国电子科技集团公司第四十八研究所 | Interval adjustable silicon carbide epitaxial equipment induction heating device |
-
2022
- 2022-01-20 CN CN202210063831.8A patent/CN114411237B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2641406A1 (en) * | 1988-12-30 | 1990-07-06 | Thomson Csf | Variable inductance coil with central slider |
| CN1309196A (en) * | 2000-11-06 | 2001-08-22 | 西北工业大学 | Heating method and equipment for crystal growth |
| CN203065642U (en) * | 2013-01-06 | 2013-07-17 | 河北同光晶体有限公司 | Insulation bracket of induction coil for growth of silicon carbide crystals |
| CN105200515A (en) * | 2015-09-24 | 2015-12-30 | 山东大学 | Induction coil for SiC single-crystal growth furnace and application thereof |
| CN207193437U (en) * | 2017-05-22 | 2018-04-06 | 山东大学 | The adjusting apparatus that temperature field is adjusted in real time can be realized in a kind of SiC single crystal grower |
| CN212270278U (en) * | 2019-10-25 | 2021-01-01 | 浙江晶盛机电股份有限公司 | Device for automatically adjusting temperature field gradient of silicon carbide furnace |
| CN115807264A (en) * | 2021-09-15 | 2023-03-17 | 中国电子科技集团公司第四十八研究所 | Interval adjustable silicon carbide epitaxial equipment induction heating device |
Non-Patent Citations (1)
| Title |
|---|
| 大尺寸SiC单晶生长炉温场分布的研究;张兆星;中国优秀硕士学位论文全文数据库信息科技辑(第12期);I135-111 * |
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| Publication number | Publication date |
|---|---|
| CN114411237A (en) | 2022-04-29 |
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