CN105174697B - Quartz glass system cuts or polish jade with an emery wheel machine and quartz glass preparation system - Google Patents

Abstract

The invention relates to a quartz glass mound making machine and a quartz glass preparation system, and relates to the field of quartz glass preparation. Uniformity. The main technical solution is: quartz glass mound making machine, including base, lifting seat, lifting mechanism, first sliding seat, first driving device, second sliding seat, second driving device and main shaft. The lifting mechanism is set on the base, and the output end of the lifting mechanism is connected to the lifting seat; the first sliding seat is set on the lifting seat; the first driving device is connected to the first sliding seat; the second sliding seat is set on the first sliding seat ; The second driving device is driven and connected with the second sliding seat; the direction of the second track is perpendicular to the direction of the first track; the main shaft is rotatably vertically arranged on the second sliding seat, and the top of the main shaft is provided with a mounting for quartz glass Deposit the connection of the substrate; the connection is placed on top of the quartz glass ingot.

Description

Quartz glass mound making machine and quartz glass preparation system

technical field

The invention relates to the technical field of mechanical equipment, in particular to a quartz glass mound making machine and a quartz glass preparation system.

Background technique

Quartz glass has special spectral transmission properties, low thermal expansion coefficient, high temperature resistance, laser damage resistance, radiation resistance, and chemical corrosion resistance. It is widely used in solar semiconductor industry, VLSI lithography, laser engineering, aerospace industry and other fields. It has irreplaceable application advantages. With the continuous improvement of the requirements for the size and optical uniformity of quartz glass in optical systems in various fields, the demand for developing large-size, high-uniform quartz glass has increased dramatically.

The optical uniformity of quartz glass directly affects the imaging quality of the optical system. The degree of inhomogeneity of the internal refractive index of the material can be characterized by the optical uniformity value and distribution diagram. If there is optical inhomogeneity in the glass, there will be a phase difference after the light passes through the medium, which can cause the optical system to fail to achieve the expected function, or even fail to work.

Quartz glass mound making machine is the key equipment for quartz glass production, its structure and performance directly affect the size and optical uniformity of quartz glass. Synthetic quartz glass is prepared from silicon-containing precursors (usually using SiCl ₄ ) as raw materials, which undergo hydrolysis or oxidation reactions in an oxygen-hydrogen flame to generate SiO ₂ nanoparticles, which are deposited and melted on the surface of the quartz glass substrate.

The prior art discloses a synthetic quartz glass mound making machine, which is sequentially provided with a drive motor, a spindle box, a column and a base from top to bottom. A ball screw is vertically arranged inside the column, the top of the ball screw is connected with the headstock, and the bottom end is fixed with a bearing seat. The ball screw is covered with a lifting seat, and the lifting seat is provided with a main shaft and a main shaft motor. The main shaft motor is connected with the main shaft drive to drive the main shaft to rotate. The main shaft is provided with a connecting part for installing an external deposition base, and the melting process of the synthetic quartz glass is carried out on the deposition base.

In the process of realizing the above-mentioned technical solution, the inventor found that there are at least the following problems in the prior art: (1) the column of the existing mound making machine will restrict the size of the deposition base connected to the main shaft, due to the size of the deposition base Due to the limitation of the column, the diameter of the glass that can be melted and formed by the deposition substrate is also limited, so that it is impossible to prepare large-sized quartz glass. (2) The existing mound making machine only has the functions of lifting along the Z axis and rotating around the Z axis, resulting in a small deposition surface, uneven structure of the synthesized quartz glass, and poor optical uniformity.

Contents of the invention

In view of this, the present invention provides a quartz glass ingot-making machine and a quartz glass preparation system, the main purpose of which is to enable the ingot-making machine to produce large-sized quartz glass, and to improve the optical uniformity of the quartz glass produced by the ingot-making machine .

In order to achieve the above object, the present invention mainly provides the following technical solutions:

On the one hand, an embodiment of the present invention provides a quartz glass mound making machine, comprising:

base;

lifting seat;

The lifting mechanism is arranged on the base, and the output end of the lifting mechanism is connected with the lifting seat to drive the lifting seat to go up and down;

The first sliding seat is arranged on the lifting seat;

A first driving device, the output end of which is drivingly connected to the first sliding seat, and is used to drive the first sliding seat to move linearly along the first track on the lifting seat;

the second sliding seat is arranged on the first sliding seat;

The second driving device, whose output end is connected to the second sliding seat, is used to drive the second sliding seat to move linearly along the second track on the first sliding seat; the direction of the second track is the same as that of the second track. The direction of the first trajectory is vertical;

The main shaft is rotatably arranged vertically on the second sliding seat, and the top end of the main shaft is provided with a connecting part, and the connecting part is used for installing a deposition substrate for preparing quartz glass;

Wherein, the connecting part is placed on the top of the quartz glass mound making machine.

On the other hand, an embodiment of the present invention also provides a quartz glass preparation system, comprising:

A quartz glass ingot-making machine, the quartz glass ingot-making machine is any one of the above-mentioned quartz glass ingot-making machines;

A reaction furnace, the lower end of which has an opening;

The deposition base includes a base rod and a base film, one end of the base rod is connected to the base film, and the other end of the base rod is fixedly connected to the connecting part on the main shaft of the quartz glass mound making machine; the base The negative film is inserted into the reaction furnace from the opening at the lower end of the reaction furnace for depositing quartz glass;

The burner is arranged on the reaction furnace, and is used for inputting the hydrogen-oxygen flame into the reaction furnace.

By virtue of the above technical solution, the quartz glass mound making machine of the present invention has at least the following beneficial effects:

In the technical solution provided by the embodiment of the present invention, on the one hand, since the connecting part is placed on the top of the quartz glass mound making machine of the present invention, when the connecting part is connected to the deposition substrate of quartz glass, the deposition substrate is also placed on the top of the quartz glass mound making machine of the present invention. The top of the quartz glass mound making machine. Compared with the prior art, the quartz glass mound making machine of the present invention is not limited by columns and other components, and the external dimensions of the deposition substrate can be made infinitely large in theory, so that the quartz glass mound making machine can be prepared Theoretically, there is no limit to the size, and the purpose of preparing large-sized quartz glass by the quartz glass ingot making machine of the present invention can be realized.

On the other hand, since the first driving device can drive the first sliding seat to move linearly along the first track on the lifting seat, the second driving device can drive the second sliding seat to move linearly along the second track on the first sliding seat, and Because the main shaft is rotatably arranged vertically on the second sliding seat, the main shaft can not only move up and down through the lifting seat, but also can move linearly along the first track through the first sliding seat, and can also move along the second track through the second sliding seat. It can move in a straight line and can also rotate, so that the deposition substrate connected to the main shaft can also move in the corresponding direction, the deposition surface of the deposition substrate is enlarged, the distribution of SiO ₂ particles is more uniform, and the temperature field is also more uniform, so that the prepared quartz The optical uniformity of the glass product is better.

The above description is only an overview of the technical solutions of the present invention. In order to understand the technical means of the present invention more clearly and implement them according to the contents of the description, the preferred embodiments of the present invention and accompanying drawings are described in detail below.

Description of drawings

Fig. 1 is the structural representation of a kind of quartz glass mound making machine that an embodiment of the present invention provides;

Fig. 2 is a structural schematic diagram of a transmission box of a quartz glass mound making machine provided by an embodiment of the present invention;

Fig. 3 is a schematic diagram of an enlarged structure at A in Fig. 2;

Fig. 4 is a diagram of the relative position relationship between the lifting seat and the first sliding seat of a quartz glass mound making machine provided by an embodiment of the present invention;

Fig. 5 is a partial structural schematic diagram of the lubrication system of the transmission box of a quartz glass mound making machine provided by an embodiment of the present invention;

Fig. 6 is a partial structural schematic diagram of a quartz glass preparation system provided by an embodiment of the present invention.

detailed description

In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the specific implementation, structure, features and effects of the application according to the present invention will be described in detail below in conjunction with the accompanying drawings and preferred embodiments. . In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.

As shown in Figure 1, a quartz glass mound making machine proposed by an embodiment of the present invention includes a base 1, a lifting seat 8, a lifting mechanism, a first sliding seat 91, a first driving device, a second sliding seat 92, The second driving device and the main shaft 17 .

The lifting mechanism is arranged on the base 1, and the output end of the lifting mechanism is connected with the lifting base 8 to drive the lifting base 8 to go up and down. The first sliding seat 91 is arranged on the lifting seat 8 . The output end of the first driving device is drivingly connected with the first sliding seat 91 , and the first driving device can drive the first sliding seat 91 to move linearly along the first trajectory on the lifting base 8 . The second sliding seat 92 is arranged on the first sliding seat 91, and the output end of the second driving device is connected with the driving of the second sliding seat 92, and the second driving device can drive the second sliding seat 92 on the first sliding seat 91 along the first sliding seat 91. Two trajectory linear motion. The direction of the second trajectory is perpendicular to the direction of the first trajectory. The main shaft 17 is rotatably arranged vertically on the second sliding seat 92, and the top end of the main shaft 17 is provided with a connecting portion 18, which is used for installing a deposition substrate of quartz glass. Wherein, the connecting portion 18 is placed on the top of the quartz glass mound making machine.

It should be noted here that: the above-mentioned connecting portion 18 may be a chuck, etc., and the deposition substrate for preparing quartz glass may be mounted on the chuck.

In the above embodiment, it can be defined that the direction of the first track is the direction of the X axis, the direction of the second track is the direction of the Y axis, and the direction of the lift is the direction of the Z axis. The X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other.

In the technical solution provided by the above embodiment, on the one hand, since the connection part 18 is placed on the top of the quartz glass mound making machine of the present invention, when the connection part 18 is connected with the deposition substrate of quartz glass, the deposition substrate is also placed on this Invent the top of the quartz glass mound making machine. Compared with the prior art, the quartz glass mound making machine of the present invention is not limited by columns and other components, and the external dimensions of the deposition base can be made infinitely large in theory, so that the quartz glass mound making machine can be prepared The size of the glass is not limited in theory, and the purpose of preparing large-sized quartz glass by the quartz glass ingot making machine of the present invention can be achieved.

On the other hand, since the first driving device can drive the first sliding seat 91 to move linearly along the first track on the lifting seat 8, the second driving device can drive the second sliding seat 92 to move along the second track on the first sliding seat 91. Linear motion, and because the main shaft 17 is rotatably vertically arranged on the second sliding seat 92, so the main shaft 17 can move up and down through the lifting seat 8, and can move linearly along the first track through the first sliding seat 91, and can also The second sliding seat 92 moves linearly along the second track, and can also rotate, so that the deposition substrate connected to the main shaft 17 can move along the XYZ axis and rotate around the Z axis. The deposition surface of the deposition substrate is enlarged, and the synthetic quartz glass is melted. During the process, the distribution of _SiO2 particles is more uniform, and the temperature field is also more uniform, so that the optical uniformity of the prepared quartz glass product is better. Among them, the optical uniformity of the quartz glass synthesized by the quartz glass ingot making machine in the embodiment of the present invention is increased from 1×10 ^-5 to (2-5)×10 ^-6 .

What needs to be explained here is: in order to achieve the above-mentioned purpose that the main shaft 17 is rotatably arranged vertically on the second sliding seat 92, the embodiment of the present invention can provide the following implementation: as shown in FIG. 1 , the second sliding seat 92 A spindle box 12 can be set on the spindle box 12, and a worm gear reducer (not shown in the figure) and a rotating electric machine 13 can be set on the spindle box 12. This worm gear reducer comprises input end and output end, and the output end of rotary motor 13 is connected with the input end drive of worm gear reducer, and the output end of worm gear reducer is connected with main shaft 17 drivingly, to drive main shaft 17 to rotate. Wherein, the spindle box 12 may be provided with an oil filling hole 15 , an oil drain hole 16 and an oil level gauge 14 , so as to lubricate the internal mechanism of the spindle box 12 .

Specifically, during implementation, as shown in FIGS. 2 and 3 , the above-mentioned lifting mechanism may include a lifting screw 5 , a screw nut 23 and a lifting power device. The lifting lead screw 5 is vertically arranged on the base 1 in a liftable manner. The lifting lead screw 5 is connected with the lifting seat 8 as the output end of the lifting mechanism. Preferably, the top end of the lifting screw 5 is connected to the lifting seat 8 (as shown in FIG. 1 ). The lead screw nut 23 is sleeved on the lift lead screw 5 and is threadedly connected with the outer wall of the lift lead screw 5 . The screw nut 23 is rotatably arranged on the base 1, and the screw nut 23 includes a rotary power input end. The output end of the lifting power device is drivingly connected with the rotation power input end. Wherein, the lifting lead screw 5 and the lead screw nut 23 form a lead screw nut pair. Since the screw nut 23 is rotatably arranged on the base 1, when the lifting power device drives the screw nut 23 to rotate, the lifting screw 5 moves up and down, and then drives the lifting seat 8 to move up and down together.

Of course, in an alternative embodiment, the aforementioned lifting mechanism may not include the lifting lead screw 5, the lead screw nut 23 and the lifting power device. In this alternative embodiment, the aforementioned lifting mechanism may include a driving cylinder, and the driving cylinder may be a hydraulic cylinder or a pneumatic cylinder or the like. The output shaft of drive cylinder is connected with lifting base 8, to drive lifting base 8 lifting. Wherein, the specific structure of the lifting mechanism can be set according to the actual needs of the user, as long as the lifting mechanism can drive the lifting seat 8 to move up and down.

In practice, as shown in FIGS. 2 and 3 , the aforementioned base 1 may include a base 102 and a transmission box 101 . The transmission box 101 is arranged on the base 102 . The transmission case 101 has an inner cavity. The screw nut 23 is placed inside the transmission box 101 , and the lifting screw 5 passes through the transmission box 101 . The base 102 has a lift space for the lift screw 5 to lift. In one embodiment, the lead screw nut 23 can be integrally formed as a single part, and the side wall at the lower end of the lead screw nut 23 is radially inwardly recessed to form a first clamping platform (not shown in the figure). A first shaft hole (not shown in the figure) adapted to the upper end of the lead screw nut 23 is provided on the upper wall of the inner cavity. A second shaft hole (not shown in the figure) adapted to the lower end of the lead screw nut 23 is provided on the lower cavity wall of the inner cavity. The upper end of the lead screw nut 23 is inserted into the first shaft hole, and the lower end of the lead screw nut 23 is inserted into the second shaft hole. The first card platform is rotatably matched with the upper end surface of the second shaft hole. Lead screw nut 23 is provided with driving connection structure on the outer ring wall between two ends, and this driving connection structure is as aforementioned rotary power input end. Wherein, the first shaft hole and the second shaft hole can ensure the free rotation of the screw nut 23 and can also provide stable radial support for the screw nut 23 . The upper end surface of the second shaft hole provides axial support for the lead screw nut 23 through the first clamping platform.

It should be noted here that: the base 102 above can be made of heavy materials such as cement and steel, and the base 102 is heavy and can provide stable support for the entire device. The cement base can be buried in the ground, and the cement base is provided with a guide cylinder (not marked) for inserting the lifting screw 5 in the cement base. The guide cylinder can guide the lifting screw 5 to improve the lifting of the lifting screw 5. precision.

Further, in order to reduce the frictional resistance between the first clamping table and the upper end surface of the second shaft hole when the screw nut 23 rotates, the quartz glass mound making machine of the embodiment of the present invention may further include a thrust ball bearing 231 . The thrust ball bearing 231 is arranged in the transmission case 101, the inner ring of the thrust ball bearing 231 serves as the aforementioned second shaft hole, and the end face of the upper ring of the thrust ball bearing 231 serves as the upper end face of the second shaft hole. Through the thrust ball bearing 231 provided, when the lead screw nut 23 rotates, the lead screw nut 23 drives the upper ring of the thrust ball bearing 231 to rotate together through the first card table, so that the lead screw nut 23 can be connected with the upper end surface of the second shaft hole. The sliding friction between them is transformed into the rolling friction of the thrust ball bearing 231, so as to reduce the frictional resistance.

Thrust ball bearings 231 are designed to withstand thrust loads during high-speed operation, and consist of washer-like rings with raceway grooves for ball rolling. The thrust ball bearing 231 can bear the axial load to support the lead screw nut 23 .

As shown in FIGS. 1 and 2 , the aforementioned lifting power device may include a harmonic reducer 4 , a first lifting motor 2 and a second lifting motor 3 . The harmonic reducer 4 is arranged on the transmission box 101, and the harmonic reducer 4 includes a first input end, a second input end and an output end. The output end of the harmonic speed reducer 4 is used as the output end of the aforementioned lifting power device. The output end of the first lifting motor 2 is drivingly connected to the first input end. The output end of the second lifting motor 3 is drivingly connected to the second input end. Wherein, the specific structure of the harmonic reducer 4 is a commonly used technology in the prior art, which can be selected from the prior art according to needs, and will not be repeated here.

The above-mentioned harmonic reducer 4 can be a double-speed ratio harmonic reducer, through which the first lifting motor 2 and the second lifting motor 3 control the fast lifting and slow lifting of the lifting base 8 respectively. In a specific application example, the fast reduction ratio of the harmonic reducer 4 is 20, and the slow reduction ratio is 100,000.

The above-mentioned first lifting motor 2 and second lifting motor 3 can be set on the harmonic reducer 4, or can be set separately on one side. Specifically, they can be set according to the actual needs of users, as long as the output end of the first lifting motor 2 is guaranteed It is only required to be drivingly connected to the first input end, and the output end of the second lifting motor 3 to be connected to the second input end.

The above-mentioned first lifting motor 2 and second lifting motor 3 can be both servo motors, and the user can control the servo motors through PLC and industrial computer, and can flexibly program the running track of the deposition base. Wherein, the first lifting motor 2 is equipped with a brake for emergency stop control.

As shown in FIG. 2 , the output end of the harmonic reducer 4 is connected with an output shaft. A driving gear 21 is fixedly sleeved on the output shaft. The driving connection structure on the aforementioned lead screw nut 23 is a gear structure. The output end of the harmonic reducer 4 is drivingly connected to the driving connection structure through the driving gear 21 . Among them, the gear drive connection is adopted, and the transmission precision is high.

As shown in FIGS. 2 and 3 , the quartz glass mound making machine of the embodiment of the present invention may include a rotary encoder 24 . The rotary encoder 24 is provided on the transmission case 101 . The output end of the harmonic reducer 4 is drivingly connected to the input shaft of the rotary encoder 24 . Because the harmonic reducer 4 is also used as the power input device of the lifting mechanism, the lifting position of the lifting mechanism is measured and positioned by the rotary encoder 24 .

The rotary encoder 24 is a device that can realize high-precision speed and displacement testing. The photoelectric rotary encoder 24 can convert mechanical quantities such as angular displacement and angular velocity of the output shaft into corresponding electrical pulses and output them digitally (REP ). The rotary encoder 24 is high in precision, small in size, easy to seal, and has a long service life in an industrial environment. The specific structure of the rotary encoder 24 is a commonly used technology in the prior art, which can be selected in the prior art according to needs, and will not be repeated here.

What needs to be explained here is that the above-mentioned rotary encoder can be an incremental rotary encoder. The incremental rotary encoder converts the displacement into a periodic electrical signal, and then converts the electrical signal into a counting pulse. The number represents the size of the displacement. When the incremental rotary encoder does not move or loses power, it relies on the internal memory of the counting device to remember the position. The above-mentioned rotary encoder can also be an absolute rotary encoder, which has uniqueness corresponding to each position and does not need power-off memory.

Specifically, during implementation, as shown in FIGS. 2 and 3 , the input shaft of the above-mentioned rotary encoder 24 may be fixedly sleeved with a first distance measuring gear 262 . The drive gear 21 on the harmonic reducer 4 is drivingly connected to the first distance measuring gear 262 .

From the above description, as shown in FIG. 2 and FIG. 3 , the quartz glass mound making machine according to the embodiment of the present invention may include a first transmission shaft 25 , and the first transmission shaft 25 is rotatably arranged on the transmission box 101 . A first transmission gear 222 and a second distance-measuring gear 261 are respectively fixedly sleeved on the first transmission shaft 25 . The second distance measuring gear 261 is engaged with the first distance measuring gear 262 for transmission. The first transmission gear 222 is placed between the driving gear 21 and the gear structure, the driving gear 21 is in transmission connection with the first transmission gear 222, and the first transmission gear 222 is meshed with the gear structure for transmission.

Further, as shown in FIG. 2 and FIG. 3 , the quartz glass block making machine of the above embodiment may further include a second transmission shaft (not shown in the figure), which is rotatably arranged on the transmission box 101 . A second transmission gear 221 is fixedly sleeved on the second transmission shaft, and the second transmission gear 221 is placed between the first transmission gear 222 and the driving gear 21 . The driving gear 21 is engaged with the second transmission gear 221 for transmission, and the second transmission gear 221 is engaged with the first transmission gear 222 for transmission. Wherein, on the one hand, the driving gear 21 can drive the rotary encoder 24 to rotate through the second transmission gear 221 , the first transmission gear 222 , the second distance-measuring gear 261 and the first distance-measuring gear 262 in sequence. On the other hand, the driving gear 21 can sequentially drive the lead screw nut 23 to rotate through the second transmission gear 221 , the first transmission gear 222 and the gear structure. In this embodiment, gears are used for transmission, and the transmission precision is high.

As shown in FIG. 1 and FIG. 2 , the quartz glass mound making machine of the embodiment of the present invention may further include a guide column 6 . The transmission box 101 is provided with a through guide hole (not shown in the figure). The guide column 6 is vertically inserted into the guide hole, and the upper end of the guide column 6 is connected with the lifting seat 8 . In this embodiment, the guide column 6 can be a guide for lifting the lifting base 8 to improve the lifting precision of the lifting base 8 .

Further, the quartz glass block making machine in the embodiment of the present invention may also include a linear guide rail, which is arranged in the transmission box 101, and the inner ring of the linear guide rail may be used as the aforementioned guide hole. The guide column 6 is inserted into the inner ring of the linear guide rail, and can be raised and lowered relative to the linear guide rail. Wherein, the specific structure of the linear guide rail is a commonly used technology in the prior art, which can be selected in the prior art according to needs, and will not be repeated here.

It should be noted here that: as shown in FIG. 5 , the number of the aforementioned guide columns 6 may be multiple, and the plurality of guide columns 6 are evenly distributed around the lifting screw 5 . The plurality of guide columns 6 guide the lifting base 8 together, and the guiding precision is better.

As shown in FIG. 1 , the outer wall of the lifting screw 5 and the outer wall of the guide column 6 are covered with aluminum foil 7 at the part between the lifting base 8 and the transmission box 101 . The aluminum foil cloth 7 can be made into a sleeve by sewing, so as to be set on the lifting screw 5 and the guide column 6, which has the technical effect of fire prevention and dust prevention, can reduce equipment failures, and prolong the service life of the equipment. This foil cloth 7 shield is easy to replace.

In practice, as shown in FIGS. 1 and 5 , the quartz glass mound making machine of the present invention may also include an automatic lubricating pump 19 and an oil separator 27 . The output port of the automatic lubricating pump 19 is connected with the input port of the oil separator 27 for pumping the lubricating oil in the automatic lubricating pump 19 to the inside of the oil separator 27 . The output port of the oil separator 27 transmits lubricating oil to the lifting screw 5 and the guide column 6 respectively through the oil pipe 20 . The automatic lubricating pump 19 can automatically fill the lead screw 5 and the guide column 6 with oil intermittently through the oil separator 27, and the operation is simple, manual operation is omitted, and the lubricating effect is good.

In practice, as shown in FIG. 4 , the aforementioned first driving device may include a first translation screw 28 and a first translation motor 10 . The first translation lead screw 28 is rotatably arranged on the lifting base 8 . The first translation motor 10 is arranged on the lifting base 8 . The output end of the first translation motor 10 is drivingly connected with the first translation screw 28 for driving the first translation screw 28 to rotate. The aforementioned first sliding seat 91 is sheathed on the outer wall of the first translation screw 28 and screwed to the first translation screw 28 , and the first translation screw 28 forms the aforementioned first trajectory. In this embodiment, the first sliding seat 91 and the first translation lead screw 28 cooperate with each other to form a lead screw nut pair structure. When the first translation motor 10 drives the first translation screw 28 to rotate, the first sliding seat 91 moves along the first translation screw 28 .

Of course, in an alternative embodiment, the aforementioned first driving device may not include the first translation lead screw 28 and the first translation motor 10 . In this alternative embodiment, the first driving device may include a first driving cylinder, and the first driving cylinder may be a hydraulic cylinder or a pneumatic cylinder or the like. The output shaft of the first driving cylinder is connected with the first sliding seat 91 to drive the first sliding seat 91 to move linearly along the first track, which is the telescopic direction of the output shaft of the first driving cylinder. Wherein, the specific structure of the first driving device can be set according to the actual needs of the user, as long as the first driving device can drive the first sliding seat 91 to move linearly along the first trajectory on the lifting base 8 .

What needs to be added here is: as shown in FIG. 4 , the quartz glass mound making machine of the embodiment of the present invention may further include a first linear slide rail 30 . The first linear slide rail 30 is arranged on the lifting base 8 , and the direction of the first linear slide rail 30 is parallel to the direction of the first track. The first sliding seat 91 is connected with the slider of the first linear slide rail 30 . The first linear slide rail 30 can assist the first translation lead screw 28 to provide support and guide for the first sliding seat 91 , so that the first sliding seat 91 can run more smoothly. Preferably, the number of the first linear slide rails 30 may be an even number, and the even number of first linear slide rails 30 are arranged symmetrically with respect to the first translation screw 28 to further provide support and guidance for the first sliding seat 91 .

In order to achieve the above-mentioned purpose that the first translation screw 28 is rotatably arranged on the lifting base 8 , the embodiment of the present invention provides the following implementation: the lifting base 8 is provided with a first bearing seat (not shown in the figure). One end of the first translation screw 28 is inserted into the shaft hole of the first bearing seat. The first translation motor 10 includes a first output shaft, and the first output shaft serves as an output end of the first translation motor 10 . The other end of the first translation screw 28 is connected with the first output shaft through a coupling. In this embodiment, the first bearing seat can provide support for the first translation screw 28 so that the first translation screw 28 can rotate relative to the lifting base 8 . Wherein, the specific structure of the first bearing seat is a common technology in the prior art, which can be selected from the prior art according to needs, and will not be repeated here.

Specifically, during implementation, as shown in FIG. 4 , the aforementioned second driving device may include a second translation screw 29 and a second translation motor 11 . The second translation lead screw 29 is rotatably arranged on the first sliding seat 91 . The second translation motor 11 is arranged on the first sliding seat 91 . The output end of the second translation motor 11 is drivingly connected with the second translation screw 29 for driving the second translation screw 29 to rotate. The second sliding seat 92 is sleeved on the outer wall of the second translation screw 29 and screwed to the second translation screw 29 . Specifically, the second sliding seat 92 is sheathed on the second translation screw 29 through the nut seat 32 , and is threadedly connected with the second translation screw 29 . The second translation screw 29 forms the aforementioned second trajectory. In this embodiment, the second sliding seat 92 cooperates with the second translation screw 29 to form a screw nut pair structure. When the second translation motor 11 drives the second translation screw 29 to rotate, the second sliding seat 92 moves along the second translation screw 29.

Certainly, in an alternative embodiment, the aforementioned second driving device may not include the second translation lead screw 29 and the second translation motor 11 . In this alternative embodiment, the second driving device may include a second driving cylinder, and the second driving cylinder may be a hydraulic cylinder or a pneumatic cylinder or the like. The output shaft of the second driving cylinder is connected with the second sliding seat 92 to drive the second sliding seat 92 to move linearly along the second track, which is the telescopic direction of the output shaft of the second driving cylinder. Wherein, the specific structure of the second driving device can be set according to the actual needs of the user, as long as the second driving device can drive the second sliding seat 92 to move linearly along the second track on the lifting base 8 .

What needs to be added here is: as shown in FIG. 4 , the quartz glass mound making machine of the embodiment of the present invention may further include a second linear slide rail 31 . The second linear slide rail 31 is arranged on the first slide seat 91 , and the direction of the second linear slide rail 31 is parallel to the direction of the second track. The second slide seat 92 is connected with the slide block of the second linear slide rail 31 . The second linear slide rail 31 can assist the second translation lead screw 29 to provide support and guide for the second sliding seat 92 , so that the second sliding seat 92 can run more smoothly. Preferably, the number of the second linear slide rails 31 may be an even number, and the even number of second linear slide rails 31 are arranged symmetrically with respect to the second translation screw 29 to further provide support and guidance for the second slide seat 92 .

In order to achieve the aforementioned second translation screw 29 rotatably arranged on the first sliding seat 91, the embodiment of the present invention provides the following implementation: as shown in Figure 4, the first sliding seat 91 is provided with a second bearing Seat 33. One end of the second translation screw 29 is inserted into the shaft hole of the second bearing seat 33 . The second translation motor 11 includes a second output shaft, and the second output shaft serves as an output end of the second translation motor 11 . The other end of the second translation screw 29 is connected with the second output shaft through a coupling. In this embodiment, the second bearing seat 33 can provide support for the second translation screw 29 so that the second translation screw 29 can rotate relative to the first sliding seat 91 . Wherein, the specific structure of the second bearing seat 33 is a commonly used technology in the prior art, which can be selected in the prior art according to needs, and will not be repeated here.

Specifically, during implementation, as shown in FIG. 1 , the quartz glass mound making machine of the embodiment of the present invention may further include a weight sensor 40 . The weight sensor 40 is arranged on the lifting base 8, and the weight sensor 40 can sense the weight on the first sliding base 91 and output a signal. The weight sensor 40 can monitor the weight of the quartz glass product in the deposition substrate on the first slide 91 in real time, so as to facilitate the user to control the state of the quartz glass product.

Further, the number of the above-mentioned weight sensors 40 may be four, and the four weight sensors are evenly distributed at the four corners of the first sliding seat 91 .

As shown in FIG. 6 , an embodiment of the present invention also provides a quartz glass preparation system, including a quartz glass ingot making machine. Wherein, the quartz glass mound making machine includes a base, a lifting seat, a lifting mechanism, a first sliding seat, a first driving device, a second sliding seat, a second driving device and a main shaft. The lifting mechanism is arranged on the base, and the output end of the lifting mechanism is connected with the lifting seat to drive the lifting seat to rise and fall; the first sliding seat is arranged on the lifting seat; the output end of the first driving device is connected to the first sliding seat for driving Drive the first sliding seat to move linearly along the first trajectory on the lifting seat; the second sliding seat is set on the first sliding seat; the output end of the second driving device is connected to the second sliding seat for driving the second sliding seat Move linearly along the second track on the first sliding seat; the direction of the second track is perpendicular to the direction of the first track; the main shaft is rotatably arranged vertically on the second sliding seat, and the top of the main shaft is provided with a hole for installing quartz glass The connecting part of the deposition substrate; wherein, the connecting part is placed on the top of the quartz glass mound making machine.

What needs to be explained here is that the quartz glass ingot-making machine involved in the quartz glass preparation system provided in this embodiment can adopt the structure of the quartz glass ingot-making machine described in the above embodiment, and the specific implementation and working principle can be found in Corresponding content in the foregoing embodiments will not be repeated here.

As shown in FIG. 6 , the quartz glass preparation system provided in the above embodiment further includes a reaction furnace 201 , a deposition substrate (not shown in the figure), and a burner 204 . The lower end of the reaction furnace 201 has an opening. The deposition substrate includes a base rod 202 and a base plate 203 . One end of the basic rod 202 is connected with the basic film 203, and the other end of the basic rod 202 is fixedly connected with the connecting part 18 on the main shaft of the quartz glass mound making machine. The base film 203 is inserted into the reaction furnace 201 from the opening at the lower end of the reaction furnace 201 for depositing quartz glass. The burner 204 is arranged on the reaction furnace 201 and is used for inputting the oxyhydrogen flame into the reaction furnace 201 .

Further, the aforementioned quartz glass preparation system may further include another burner 205 , the burner 205 is arranged on the reaction furnace 201 , and the burner 205 and the burner 204 are arranged at intervals for inputting the oxyhydrogen flame into the reaction furnace 201 .

In the above embodiment, the silicon-containing precursor (usually using SiCl ₄ ) raw material is hydrolyzed or oxidized in the oxyhydrogen flame in the reaction furnace 201 to generate SiO ₂ nanoparticles, and the SiO ₂ nanoparticles are deposited and melted on the base of the deposition substrate The desired quartz glass is formed on the negative.

The SiO ₂ particles are deposited and fused on the base film 203 to form quartz glass, and the falling point of the SiO ₂ particle beam on the base film 203 is called "material point".

In a specific application example, as shown in FIG. 6 , the base film 203 is cylindrical, and the outer diameter of the base film 203 is 600 mm. The material point of the burner 204 is located at the center of the base plate 203 , and the material point of the burner 205 is located 120 mm from the center of the base plate 203 . When the basic film 203 rotates around the Z axis and translates at a constant speed along the X and Y axes, the two material points take the center of the basic film 203 as the center, and the material point of the burner 204 takes the center of the basic film 203 as the starting point to spiral around. Moving, the material point of the burner 205 moves spirally around the starting point at 120 mm from the center of the base film 203 . This method ensures the distribution of material points and high-temperature surfaces at the same time, which is beneficial to the preparation of large-sized, highly uniform quartz glass.

What needs to be explained here is that the number of the above-mentioned burners can be more than two, not limited to two, and the number of burners can be determined according to the actual needs of users and the specific size of the reaction furnace.

The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still belong to the present invention. within the scope of the technical solution of the invention.

Claims (15)

1. A quartz glass mound making machine is characterized in that, comprising: base; lifting seat; The lifting mechanism is arranged on the base, and the output end of the lifting mechanism is connected with the lifting seat to drive the lifting seat to go up and down; The first sliding seat is arranged on the lifting seat; A first driving device, the output end of which is drivingly connected to the first sliding seat, and is used to drive the first sliding seat to move linearly along the first track on the lifting seat; the second sliding seat is arranged on the first sliding seat; The second driving device, whose output end is connected to the second sliding seat, is used to drive the second sliding seat to move linearly along the second track on the first sliding seat; the direction of the second track is the same as that of the second track. The direction of the first trajectory is vertical; The main shaft is rotatably arranged vertically on the second sliding seat, and the top end of the main shaft is provided with a connecting part, and the connecting part is used for installing a deposition substrate for preparing quartz glass; Wherein, the connecting part is placed on the top of the quartz glass mound making machine. 2. The quartz glass mound making machine according to claim 1, wherein the lifting mechanism comprises: The lifting screw is vertically arranged on the base in a liftable manner, and the lifting screw is used as the output end of the lifting mechanism; The lead screw nut is sleeved on the lifting lead screw and is threadedly connected with the outer wall of the lift lead screw, the lead screw nut is rotatably arranged on the base, and the lead screw nut includes a rotating power input end; As for the lifting power device, its output end is drivingly connected with the rotation power input end. 3. quartz glass mound making machine as claimed in claim 2, is characterized in that, The base includes a base and a transmission box arranged on the base, and the transmission box has an inner cavity; The lifting screw passes through the transmission box; The upper cavity wall of the inner cavity is provided with a first shaft hole adapted to the upper end of the screw nut, and the lower cavity wall of the inner cavity is provided with a shaft hole adapted to the lower end of the screw nut. the second shaft hole; The lead screw nut is placed inside the transmission box, the upper end of the lead screw nut is inserted into the first shaft hole, and the lower end of the lead screw nut is inserted into the second shaft hole; The side wall of the lower end of the screw nut is radially inwardly recessed to form a first clamping platform, and the first clamping platform is rotatably matched with the upper end surface of the second shaft hole; The screw nut is provided with a driving connection structure on the outer ring wall between two ends, and the driving connection structure serves as the input end of the rotating power. 4. quartz glass mound making machine as claimed in claim 3, is characterized in that, also comprises: The thrust ball bearing is arranged in the transmission case, the inner ring of the thrust ball bearing serves as the second shaft hole, and the end surface of the upper ring of the thrust ball bearing serves as the upper end surface of the second shaft hole. 5. quartz glass mound making machine as claimed in claim 3 or 4, is characterized in that, The lift power unit includes: The harmonic reducer is arranged on the transmission box, and the harmonic reducer includes a first input end, a second input end and an output end; the output end of the harmonic reducer is used as the output of the lifting power device end; a first lifting motor, the output end of which is drivingly connected to the first input end; The output end of the second lifting motor is drivingly connected to the second input end. 6. quartz glass mound making machine as claimed in claim 5, is characterized in that, The output end of the harmonic reducer is connected with an output shaft; A driving gear is fixedly sleeved on the output shaft; The driving connection structure is a gear structure; The output end of the harmonic reducer is drivingly connected to the driving connection structure through the driving gear. 7. The quartz glass mound making machine according to claim 6, further comprising a rotary encoder; The rotary encoder is arranged on the transmission box; A first distance measuring gear is fixedly sleeved on the input shaft of the rotary encoder; The driving gear is drivingly connected with the first distance measuring gear. 8. quartz glass mound making machine as claimed in claim 7, is characterized in that, also comprises: The first transmission shaft is rotatably arranged on the transmission box, and the first transmission gear and the second distance-measuring gear are respectively fixedly sleeved on the first transmission shaft; the second distance-measuring gear and the The meshing transmission of the first ranging gear; the meshing transmission of the first transmission gear and the gear structure; The second transmission shaft is rotatably arranged on the transmission box, the second transmission shaft is fixedly sleeved with a second transmission gear, and the second transmission gear is placed between the first transmission gear and the Between the driving gears, the driving gear meshes with the second transmission gear for transmission, and the second transmission gear meshes with the first transmission gear for transmission. 9. The quartz glass mound making machine according to any one of claims 3 to 4, 6 to 8, further comprising: A guide column, the transmission box is provided with a through guide hole, the guide column is vertically inserted into the guide hole, and the upper end of the guide column is connected with the lifting seat; Wherein, the number of the guide columns is multiple, and the plurality of guide columns are evenly distributed around the lifting screw. 10. quartz glass mound making machine as claimed in claim 9, is characterized in that, Both the outer wall of the lifting lead screw and the outer wall of the guide column are covered with aluminum foil cloth at the part between the lifting seat and the transmission box. 11. The quartz glass mound making machine as claimed in claim 9, further comprising an automatic lubricating pump and an oil separator; The output port of the automatic lubrication pump is connected with the input port of the oil separator; The output port of the oil separator respectively extends to the lifting screw and the guide column through a plurality of oil pipes. 12. The quartz glass mound making machine according to any one of claims 1 to 4, 6 to 8, 10 to 11, characterized in that the first driving device comprises: The first translation lead screw is rotatably arranged on the lifting seat; The first translation motor is arranged on the lifting seat, and the output end of the first translation motor is drivingly connected to the first translation screw for driving the rotation of the first translation screw; Wherein, the first sliding seat is sleeved on the outer wall of the first translation screw and is screwed to the first translation screw, and the first translation screw forms the first track. 13. The quartz glass mound making machine according to any one of claims 1 to 4, 6 to 8, 10 to 11, characterized in that the second driving device comprises: the second translation lead screw is rotatably arranged on the first sliding seat; The second translation motor is arranged on the first sliding seat, and the output end of the second translation motor is drivingly connected to the second translation screw for driving the rotation of the second translation screw; Wherein, the second sliding seat is sleeved on the outer wall of the second translation screw and is screwed to the second translation screw, and the second translation screw forms the second track. 14. The quartz glass mound making machine according to any one of claims 1 to 4, 6 to 8, 10 to 11, further comprising: The weight sensor is arranged on the lifting seat, and is used for sensing the weight on the first sliding seat and feeding back the growth weight of the quartz glass. 15. A quartz glass preparation system, characterized in that, comprising: Quartz glass mound making machine, the quartz glass mound making machine is the quartz glass mound making machine described in any one of claims 1 to 14; A reaction furnace, the lower end of which has an opening; The deposition base includes a base rod and a base film, one end of the base rod is connected to the base film, and the other end of the base rod is fixedly connected to the connecting part on the main shaft of the quartz glass mound making machine; the base The negative film is inserted into the reaction furnace from the opening at the lower end of the reaction furnace for depositing quartz glass; The burner is arranged on the reaction furnace, and is used for inputting the hydrogen-oxygen flame into the reaction furnace.