CN115462566A - Anti-dry burning ceramic heating body and its preparation method and aerosol generating device - Google Patents
Anti-dry burning ceramic heating body and its preparation method and aerosol generating device Download PDFInfo
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 107
- 239000000919 ceramic Substances 0.000 title claims abstract description 88
- 239000000443 aerosol Substances 0.000 title claims abstract description 15
- 238000002360 preparation method Methods 0.000 title claims abstract description 8
- 239000010409 thin film Substances 0.000 claims description 28
- 239000010408 film Substances 0.000 claims description 27
- 238000004544 sputter deposition Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 9
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 229910001120 nichrome Inorganic materials 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 238000009529 body temperature measurement Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000008367 deionised water Substances 0.000 claims description 4
- 229910021641 deionized water Inorganic materials 0.000 claims description 4
- 229910021484 silicon-nickel alloy Inorganic materials 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 229910000929 Ru alloy Inorganic materials 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000013461 design Methods 0.000 claims description 3
- 229910003437 indium oxide Inorganic materials 0.000 claims description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- CFQCIHVMOFOCGH-UHFFFAOYSA-N platinum ruthenium Chemical compound [Ru].[Pt] CFQCIHVMOFOCGH-UHFFFAOYSA-N 0.000 claims description 3
- 238000005202 decontamination Methods 0.000 claims description 2
- 230000003588 decontaminative effect Effects 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 2
- 238000007605 air drying Methods 0.000 claims 1
- 238000009841 combustion method Methods 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000004080 punching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 238000000889 atomisation Methods 0.000 description 11
- 239000011159 matrix material Substances 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 8
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 5
- 229910005883 NiSi Inorganic materials 0.000 description 4
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 4
- 238000013021 overheating Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000005477 sputtering target Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- DBUTVDSHVUGWOZ-UHFFFAOYSA-N [Si].[Ni].[Cr].[Ni] Chemical compound [Si].[Ni].[Cr].[Ni] DBUTVDSHVUGWOZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
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- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
- A24F40/46—Shape or structure of electric heating means
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/03—Electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
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- Surface Heating Bodies (AREA)
Abstract
Description
技术领域technical field
本发明属于电子雾化器领域,具体涉及一种防干烧陶瓷加热体及其制备方法。The invention belongs to the field of electronic atomizers, and in particular relates to an anti-dry burning ceramic heating body and a preparation method thereof.
背景技术Background technique
目前,在雾化技术领域中使用的雾化装置的雾化芯,通常由陶瓷基体和发热丝构成,形成陶瓷加热体,气溶胶基质流入陶瓷基体后被发热丝加热雾化,而当气溶胶基质快要用完时,或者当气溶胶基质发生倒吸时,陶瓷加热体就会发生干烧,现有技术方案采用检测电阻的方式防止干烧,利用具有明显温度效应的大TCR(电阻温度系数)的发热材料作为测温手段,当发热材料温度升高,电阻发生可检测的显著变化,利用芯片进行线路电阻值的检测,进行电路的开关切换,起到防止干烧超温的作用,在无油状态下,温度急剧升高,电阻发生变化,电源管理系统内的阻值模块检测到阻值变化超过预定值和超出次数后,停止加热。但是现有技术需要使用TCR大的发热材料,在发热材料上有较多限制,耐用性稳定性更强的发热材料镍铬合金的TCR达不到要求,无法使用;并且陶瓷加热体主要有钢片嵌入陶瓷芯和厚膜印刷陶瓷芯两种,对于钢片加热的TCR较为稳定,而厚膜印刷发热材料的TCR因材料工艺差异较大,TCR不够稳定,在防干烧稳定性方面无法保障。At present, the atomization core of the atomization device used in the field of atomization technology is usually composed of a ceramic substrate and a heating wire to form a ceramic heating body. After the aerosol matrix flows into the ceramic substrate, it is heated and atomized by the heating wire. When the aerosol When the matrix is about to be used up, or when the aerosol matrix is sucked back, the ceramic heating body will dry-burn. The existing technical scheme adopts the method of detecting resistance to prevent dry-burning, and utilizes a large TCR (temperature coefficient of resistance) with obvious temperature effect ) heating material as a means of temperature measurement, when the temperature of the heating material rises, the resistance changes significantly, and the chip is used to detect the resistance value of the line and switch the circuit to prevent dry burning from overheating. In the oil-free state, the temperature rises sharply and the resistance changes. The resistance module in the power management system detects that the resistance value changes exceed the predetermined value and the number of times, and stops heating. However, the prior art needs to use a heating material with a large TCR, and there are many restrictions on the heating material. The TCR of the heating material nickel-chromium alloy with stronger durability and stability cannot meet the requirements and cannot be used; and the ceramic heating body mainly has steel There are two types of embedded ceramic cores and thick film printed ceramic cores. The TCR of steel sheet heating is relatively stable, while the TCR of thick film printed heating materials is not stable enough due to the large difference in material technology, and the stability of anti-dry burning cannot be guaranteed. .
发明内容Contents of the invention
本发明的目的是提供一种具有较好的牢靠性和耐用性的防干烧陶瓷加热体及其制备方法和气溶胶发生装置。The object of the present invention is to provide a dry-burning-proof ceramic heating body with good reliability and durability, a preparation method thereof and an aerosol generating device.
为实现上述目的,本发明是通过以下技术方案实现的:提供一种防干烧陶瓷加热体,包括陶瓷基体及发热膜,所述发热膜设于所述陶瓷基体的外表面上,所述发热膜上设有薄膜热电偶,所述薄膜热电偶包括第一热电极以及与所述第一热电极电连接的第二热电极。In order to achieve the above object, the present invention is achieved through the following technical solutions: provide an anti-dry ceramic heating body, including a ceramic base and a heating film, the heating film is arranged on the outer surface of the ceramic base, the heating A thin-film thermocouple is provided on the membrane, and the thin-film thermocouple includes a first thermal electrode and a second thermal electrode electrically connected to the first thermal electrode.
进一步的,所述第一热电极和第二热电极的材料分别为镍铬合金和镍硅合金,或铂钌合金和铂,或氧化铟锡和氧化铟。Further, the materials of the first thermal electrode and the second thermal electrode are nickel-chromium alloy and nickel-silicon alloy, or platinum-ruthenium alloy and platinum, or indium tin oxide and indium oxide, respectively.
进一步的,所述发热膜的两端均设有线路焊盘,所述薄膜热电偶的厚度为2-10μm。Further, both ends of the heating film are provided with wiring pads, and the thickness of the thin-film thermocouple is 2-10 μm.
进一步的,所述陶瓷基体的下端设有中空的凹槽。Further, the lower end of the ceramic substrate is provided with a hollow groove.
还提供了一种如上所述的防干烧陶瓷加热体的制备方法,包括以下步骤:Also provided is a preparation method of the anti-dry burning ceramic heating body as described above, comprising the following steps:
S1、在印刷了发热膜的陶瓷加热体的设计位置处打孔;S1. Punch holes at the design position of the ceramic heating body printed with the heating film;
S2、对打完孔的陶瓷加热体进行超声清洗;S2. Ultrasonic cleaning is performed on the ceramic heating body that has been drilled;
S3、对清洗后的陶瓷加热体进行烘干;S3, drying the cleaned ceramic heating body;
S4、在干燥后的陶瓷加热体上进行掩膜遮挡,放入磁控溅射炉内的基台上,进行表面除污,然后溅射第一热电极和第二热电极;S4. Carry out a mask on the dried ceramic heating body, put it on the base platform in the magnetron sputtering furnace, perform surface decontamination, and then sputter the first thermode and the second thermode;
S5、去掉S5中的掩膜,在第一热电极和第二热电极上分别连接补偿导线,完成整个防干烧陶瓷加热体的制备过程。S5. Remove the mask in S5, and respectively connect compensation wires to the first thermal electrode and the second thermal electrode to complete the entire preparation process of the anti-dry burning ceramic heating body.
进一步的,在所述S1中打孔的孔径0.5mm-0.7mm,孔深0.5mm-1mm。Further, the diameter of the hole punched in the S1 is 0.5mm-0.7mm, and the hole depth is 0.5mm-1mm.
进一步的,在所述S2中,将所述陶瓷加热体依次置于无水乙醇和去离子水中超声清洗,且清洗时长均为5-10分钟。Further, in S2, the ceramic heating body is placed in absolute ethanol and deionized water for ultrasonic cleaning in sequence, and the cleaning time is 5-10 minutes.
进一步的,在所述S3中,将所述陶瓷加热体置于150℃的鼓风干燥箱内烘干,且烘干时间为1-2小时。Further, in the S3, the ceramic heating body is dried in a blast drying oven at 150° C., and the drying time is 1-2 hours.
进一步的,在所述S4中,磁控溅射炉真空为0.83Pa,溅射功率为300W,基台温度200-300℃,溅射时间60-120分钟。Further, in S4, the vacuum of the magnetron sputtering furnace is 0.83Pa, the sputtering power is 300W, the base temperature is 200-300°C, and the sputtering time is 60-120 minutes.
还提供了一种气溶胶发生装置,包括如上所述的防干烧陶瓷加热体,还包括温控模块以及与所述温控模块电连接的电源控制模块,所述薄膜热电偶与所述温控模块电连接。Also provided is an aerosol generating device, which includes the above-mentioned anti-dry ceramic heating body, and also includes a temperature control module and a power control module electrically connected to the temperature control module, and the thin film thermocouple is connected to the temperature control module. Control module electrical connection.
本发明具有以下有益效果:The present invention has the following beneficial effects:
本发明实施例的防干烧陶瓷加热体上自带薄膜热电偶,通过薄膜热电偶能够对发热膜进行实时测温,实现了结构功能一体化,陶瓷加热体在雾化舱内工作,当雾化舱里的气溶胶基质快要用完时,或者当雾化舱里的气溶胶基质倒吸时,发热膜依旧持续工作,便能够导致陶瓷加热体快速升温,位于陶瓷加热体上端的薄膜热电偶能够检测到升温的信号并最终停止发热膜的加热,有效防止了陶瓷加热体的超温干烧;薄膜热电偶能够快速且准确的测出发热膜的温度,具有良好的可靠性,并且薄膜热电偶直接设置在陶瓷基体的表面,不影响整体结构的厚度,不影响雾化器内的气流路径,不会产生气流扰动,具有良好的耐用性。The anti-dry burning ceramic heating body of the embodiment of the present invention is equipped with a thin-film thermocouple, and the temperature of the heating film can be measured in real time through the thin-film thermocouple, which realizes the integration of structure and function. The ceramic heating body works in the atomization cabin. When the aerosol matrix in the atomization chamber is about to be used up, or when the aerosol matrix in the atomization chamber is sucked back, the heating film continues to work, which can cause the ceramic heating body to heat up rapidly. The thin film thermocouple located at the upper end of the ceramic heating body It can detect the signal of temperature rise and finally stop the heating of the heating film, effectively preventing the ceramic heating body from overheating and dry burning; the thin-film thermocouple can quickly and accurately measure the temperature of the heating film, with good reliability, and the thin-film thermoelectric The coupler is directly placed on the surface of the ceramic base, which does not affect the thickness of the overall structure, does not affect the airflow path in the atomizer, does not generate airflow disturbance, and has good durability.
附图说明Description of drawings
为了更清楚地说明本发明实施例技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present invention. Ordinary technicians can also obtain other drawings based on these drawings on the premise of not paying creative work.
图1为本发明实施例提供的防干烧陶瓷加热体的示意图;Fig. 1 is the schematic diagram of the anti-dry burning ceramic heating body that the embodiment of the present invention provides;
图2为本发明实施例提供的防干烧陶瓷加热体另一角度的示意图;Fig. 2 is a schematic diagram of another angle of the anti-dry-burning ceramic heating body provided by the embodiment of the present invention;
图3为本发明实施例提供的防干烧陶瓷加热体的俯视图。Fig. 3 is a top view of the anti-dry burning ceramic heating body provided by the embodiment of the present invention.
图中标识说明:Instructions for identification in the figure:
1、陶瓷基体;2、发热膜;3、薄膜热电偶;11、主体;12、凸缘;13、凹槽;21、线路焊盘;31、第一热电极;32、第二热电极;33、第一焊盘;34、第二焊盘。1. Ceramic substrate; 2. Heating film; 3. Thin film thermocouple; 11. Main body; 12. Flange; 13. Groove; 21. Circuit pad; 31. First thermal electrode; 32. Second thermal electrode; 33. The first pad; 34. The second pad.
具体实施方式detailed description
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
应当理解,当在本说明书和所附权利要求书中使用时,术语“包括”和“包含”指示所描述特征、整体、步骤、操作、元素和/或组件的存在,但并不排除一个或多个其它特征、整体、步骤、操作、元素、组件和/或其集合的存在或添加。It should be understood that when used in this specification and the appended claims, the terms "comprising" and "comprises" indicate the presence of described features, integers, steps, operations, elements and/or components, but do not exclude one or Presence or addition of multiple other features, integers, steps, operations, elements, components and/or collections thereof.
还应当理解,在此本发明说明书中所使用的术语仅仅是出于描述特定实施例的目的而并不意在限制本发明。如在本发明说明书和所附权利要求书中所使用的那样,除非上下文清楚地指明其它情况,否则单数形式的“一”、“一个”及“该”意在包括复数形式。It should also be understood that the terminology used in the description of the present invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the present invention. As used in this specification and the appended claims, the singular forms "a", "an" and "the" are intended to include plural referents unless the context clearly dictates otherwise.
还应当进一步理解,在本发明说明书和所附权利要求书中使用的术语“和/或”是指相关联列出的项中的一个或多个的任何组合以及所有可能组合,并且包括这些组合。It should also be further understood that the term "and/or" used in the description of the present invention and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations .
实施例1Example 1
请参阅图1-3所示,本实施例提供的防干烧陶瓷加热体,包括陶瓷基体1和发热膜2,陶瓷基体1包括主体11以及凸出设于主体11上端的凸缘12,发热膜2设置在在凸缘12的顶部,在发热膜2上设有薄膜热电偶3,薄膜热电偶3包括第一热电极31以及与第一热电极31电连接的第二热电极32。Please refer to Figures 1-3, the anti-dry-burning ceramic heating body provided in this embodiment includes a
通过上述结构,在实际应用中,本实施例所示的防干烧陶瓷加热体上自带薄膜热电偶3,通过薄膜热电偶3能够对发热膜2进行实施测温,实现了结构功能一体化,陶瓷加热体在雾化舱(图中未视出)内工作,当雾化舱里的气溶胶基质快要用完时,或者当雾化舱里的气溶胶基质倒吸时,发热膜2依旧持续工作,便能够导致陶瓷基体1快速升温,位于陶瓷基体1上端的薄膜热电偶3将信号传递到外接控制管理系统,并对电源进行切断,有效防止了陶瓷加热体的超温干烧,薄膜热电偶3能够快速且准确的测出发热膜2的温度,具有较好的牢靠性。Through the above structure, in practical application, the anti-dry burning ceramic heating body shown in this embodiment has its own thin-film thermocouple 3, and the temperature measurement of the
进一步的,第一热电极31和第二热电极32的材料可以分别为镍铬合金和镍硅合金,或铂钌合金和铂,或氧化铟锡和氧化铟,在本实施例中,出于从成本考虑的角度,选取第一热电极31和第二热电极32的材料分别为镍铬合金和镍硅合金。Further, the materials of the first
进一步的,薄膜热电偶3的厚度均为2-10μm,使得薄膜热电偶3与陶瓷基体1的表面结合为一体,结构尺寸薄,不影响雾化器内的气流路径,不会产生气流扰动,安装使用方便,不需要特殊的固定传感器的空间和方法,耐用性能优良,还具有响应速度快、准确度高和牢靠性好的优点,可实现大规模量产。Further, the thickness of the thin-film thermocouple 3 is 2-10 μm, so that the thin-film thermocouple 3 is integrated with the surface of the
作为一种优选地实施方式,参见图2,在主体11的下端设有中空的凹槽13,凹槽13能够加快导油的速度。As a preferred embodiment, referring to FIG. 2 , a
在本实施例中,在发热膜2的两端均设有线路焊盘21,外接导线(图中未视出)可在线路焊盘21处与发热膜2电连接;在第一热电极31和第二热电极32的末端分别设有第一焊盘33和第二焊盘34,在第一焊盘33和第二焊盘34上可分别为第一热电极31和第二热电极32连接补偿导线(图中未视出),从而可以连接外接控温模块。In this embodiment, both ends of the
实施例2Example 2
本实施例提供了一种如实施例1所述的防干烧陶瓷加热体的制备方法,包括以下步骤:This embodiment provides a method for preparing the anti-dry burning ceramic heating body as described in
S1、在印刷了发热膜的陶瓷加热体的设计位置处打孔,打孔的孔径0.5mm-0.7mm,孔深0.5mm-1mm;S1. Punch a hole at the design position of the ceramic heating body printed with the heating film, the hole diameter of the hole is 0.5mm-0.7mm, and the hole depth is 0.5mm-1mm;
S2、将打完孔的陶瓷加热体先后置于无水乙醇、去离子水中进行超声清洗,陶瓷加热体于无水乙醇和去离子水中超声清洗的时长均为5-10分钟;S2. The ceramic heating body that has been drilled is placed in absolute ethanol and deionized water for ultrasonic cleaning, and the ultrasonic cleaning time of the ceramic heating body in absolute ethanol and deionized water is 5-10 minutes;
S3、将清洗后的陶瓷加热体在鼓风干燥箱内烘干,鼓风干燥箱内温度为150℃,且陶瓷加热体在鼓风干燥箱内烘干时间为1-2小时。S3. Dry the cleaned ceramic heating body in a blast drying oven. The temperature in the blast drying oven is 150° C., and the drying time of the ceramic heating body in the blast drying oven is 1-2 hours.
S4、选取第一热电极的材料为NiCr,在干燥后的陶瓷加热体上将不需要溅射NiCr的区域进行掩膜遮挡,然后放入磁控溅射炉内的基台上,抽真空至本底真空4*10-4Pa,然后关闭电离硅单元,开氩气主阀,开氩气减压阀至氩气出口压力为0.2-0.25MPa,调节流量至真空为0.83Pa,开启溅射电源,起辉预溅射1分钟,对NiCr溅射靶材的表面进行除污,然后打开NiCr溅射靶材的挡板,调整溅射功率为300W,基台温度200-300℃,溅射时间60-120分钟,进行溅射,完成溅射后关闭溅射电源,关闭加热,关闭氩气,待磁控溅射炉内的基台自然降温至100℃以下,开启炉门并取出陶瓷加热体;S4, select the material of the first thermal electrode to be NiCr, cover the area that does not need to sputter NiCr on the dried ceramic heating body, then put it on the base platform in the magnetron sputtering furnace, and evacuate to The background vacuum is 4*10-4Pa, then close the ionized silicon unit, open the argon main valve, open the argon pressure reducing valve until the argon outlet pressure is 0.2-0.25MPa, adjust the flow rate to a vacuum of 0.83Pa, and turn on the sputtering power supply , starting pre-sputtering for 1 minute, decontaminating the surface of the NiCr sputtering target, then opening the baffle of the NiCr sputtering target, adjusting the sputtering power to 300W, the base temperature to 200-300°C, and the sputtering time Sputtering for 60-120 minutes. After sputtering, turn off the sputtering power supply, turn off the heating, and turn off the argon gas. After the base in the magnetron sputtering furnace cools down naturally to below 100°C, open the furnace door and take out the ceramic heating body. ;
S5、选取第二热电极的材料为NiSi,去掉步骤S4中陶瓷加热体上的掩膜,将不需要溅射NiSi的区域进行掩膜遮挡,确保裸露的部分与NiCr的结合点重合,然后放入磁控溅射炉内的基台上,抽真空至本底真空4*10-4Pa,然后关闭电离硅单元,开氩气主阀,开氩气减压阀至氩气出口压力为0.2-0.25MPa,调节流量至真空为0.83Pa,开启溅射电源,起辉预溅射1分钟,对NiSi溅射靶材的表面进行除污,然后打开NiSi溅射靶材的挡板,调整溅射功率为300W,基台温度200-300℃,溅射时间90-180分钟,进行溅射,完成溅射后关闭溅射电源,关闭加热,关闭氩气,待磁控溅射炉内的基台自然降温至100℃以下,开启炉门并取出陶瓷加热体;S5, select the material of the second thermal electrode as NiSi, remove the mask on the ceramic heating body in step S4, cover the area that does not need to be sputtered with NiSi, ensure that the exposed part overlaps with the NiCr joint, and then put Put it on the base table in the magnetron sputtering furnace, evacuate to the background vacuum of 4*10-4Pa, then close the ionized silicon unit, open the argon main valve, and open the argon pressure reducing valve until the argon outlet pressure is 0.2- 0.25MPa, adjust the flow rate to a vacuum of 0.83Pa, turn on the sputtering power supply, start the pre-sputtering for 1 minute, decontaminate the surface of the NiSi sputtering target, and then open the baffle of the NiSi sputtering target to adjust the sputtering The power is 300W, the base temperature is 200-300°C, and the sputtering time is 90-180 minutes. After sputtering, turn off the sputtering power supply, turn off the heating, turn off the argon gas, and wait for the base in the magnetron sputtering furnace. Naturally cool down to below 100°C, open the furnace door and take out the ceramic heating body;
S6、去掉S5中陶瓷加热体上的掩膜,用低温固化的导电银浆作为连接材料,在第一热电极和第二热电极上分别连接补偿导线,完成整个防干烧陶瓷加热体的制备过程。S6, remove the mask on the ceramic heating body in S5, use the conductive silver paste cured at low temperature as the connecting material, connect the compensation wires respectively on the first thermal electrode and the second thermal electrode, and complete the preparation of the whole anti-dry ceramic heating body process.
S7、将防干烧陶瓷加热体放入120-300℃大气炉或干燥箱内并使得导电银浆固化;S7. Put the anti-dry burning ceramic heating body into a 120-300°C atmospheric furnace or a drying box and solidify the conductive silver paste;
S8、将防干烧陶瓷加热体置于恒温温度场,用测温仪表读出温度,再结合电热偶分度表得到输出的热电势,标定其测温准确度。S8. Place the anti-dry-burning ceramic heating body in a constant temperature field, read the temperature with a temperature measuring instrument, and then combine the thermocouple index to obtain the output thermoelectric potential, and calibrate its temperature measurement accuracy.
所测得的镍铬-镍硅薄膜热电偶的温度—热电势实测数据如下:The temperature of the measured nickel-chromium-nickel-silicon thin-film thermocouple—the measured data of thermoelectric potential are as follows:
通过温度—热电势的实测数据即可得出不同的热电势下发热膜的温度,当温度上升时,对应的热电势也会上升,当温度上升到一定的数值时,即可通过外接控制管理系统切断发热膜的工作电源,使其暂停工作,从而达到了防止陶瓷加热体超温干烧的目的。The temperature of the heating film under different thermoelectric potentials can be obtained through the measured data of temperature-thermoelectric potential. When the temperature rises, the corresponding thermoelectric potential will also rise. When the temperature rises to a certain value, it can be managed through external control The system cuts off the working power of the heating film and makes it stop working, thus achieving the purpose of preventing the ceramic heating body from overheating and dry burning.
与现有技术相比,本申请在陶瓷加热体上设置薄膜热电偶,通过薄膜热电偶能够对发热膜进行实施实时测温,实现了结构功能一体化,有效防止了陶瓷加热体的超温干烧;薄膜热电偶能够快速且准确的测出发热膜的温度,具有良好的可靠性,并且薄膜热电偶直接设置在陶瓷基体的表面,不影响整体结构的厚度,不影响雾化器内的气流路径,不会产生气流扰动,具有良好的耐用性。Compared with the prior art, the present application installs a thin-film thermocouple on the ceramic heating body, and the real-time temperature measurement of the heating film can be carried out through the thin-film thermocouple, which realizes the integration of structure and function, and effectively prevents the ceramic heating body from overheating and dryness. Burning; the thin film thermocouple can quickly and accurately measure the temperature of the heating film, which has good reliability, and the thin film thermocouple is directly installed on the surface of the ceramic substrate, which does not affect the thickness of the overall structure and does not affect the airflow in the atomizer Path, no airflow disturbance, good durability.
实施例3Example 3
本实施例提供了一种气溶胶发生装置,包括如实施例1中所述的防干烧陶瓷加热体,还包括温控模块以及与温控模块电连接的电源控制模块,薄膜热电偶与温控模块电连接,电源控制模块用于控制整个装置电源的通断。This embodiment provides an aerosol generating device, including the anti-dry-burning ceramic heating body as described in
通过上述结构,在实际应用中,当雾化舱里的气溶胶基质快要用完时,或者当雾化舱里的气溶胶基质倒吸时,发热膜2依旧持续工作,便能够导致陶瓷基体1快速升温,位于陶瓷基体1上端的薄膜热电偶3将信号传递到控温模块,温控模块与电源控制模块电连接,控温模块能够通过电源控制模块进行电源的切断,从而有效防止了陶瓷加热体的超温干烧。Through the above structure, in actual application, when the aerosol matrix in the atomization chamber is about to be used up, or when the aerosol matrix in the atomization chamber is sucked back, the
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到各种等效的修改或替换,这些修改或替换都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以权利要求的保护范围为准。The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person familiar with the technical field can easily think of various equivalents within the technical scope disclosed in the present invention. Modifications or replacements shall all fall within the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
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