CN114543523B - Graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply - Google Patents
Graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply Download PDFInfo
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- CN114543523B CN114543523B CN202210060870.2A CN202210060870A CN114543523B CN 114543523 B CN114543523 B CN 114543523B CN 202210060870 A CN202210060870 A CN 202210060870A CN 114543523 B CN114543523 B CN 114543523B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
- F27B17/0016—Chamber type furnaces
- F27B17/0083—Chamber type furnaces with means for circulating the atmosphere
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
- F27D2007/063—Special atmospheres, e.g. high pressure atmospheres
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27M—INDEXING SCHEME RELATING TO ASPECTS OF THE CHARGES OR FURNACES, KILNS, OVENS OR RETORTS
- F27M2003/00—Type of treatment of the charge
- F27M2003/04—Sintering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Exhaust Gas After Treatment (AREA)
- Furnace Details (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention relates to an aluminum nitride powder preparation graphite furnace capable of precisely controlling nitrogen supply, which comprises a gas distribution system and two reaction devices, wherein the gas distribution system is provided with a gas distribution power piece and two linked gas distribution devices, each gas distribution device comprises a gas distribution inlet and a gas distribution outlet, each gas distribution device comprises a gas distribution box body, an active gas distribution piston and an air inlet and outlet control assembly, the gas distribution box body is provided with a gas compression cavity, the gas distribution power piece pushes the active gas distribution pistons on the two adjacent gas distribution devices to slide along the gas compression cavity, the air inlet and outlet control assembly comprises an air inlet and outlet control rod, when the volume of the gas compression cavity is maximum, the air inlet and outlet control rod opens the gas distribution inlet to seal the gas distribution outlet, and when the volume of the gas compression cavity is gradually reduced from maximum, the air inlet and outlet control rod seals the gas distribution inlet to open the gas distribution outlet, so that the same gas supply quantity of each reaction device is ensured, and the same product quality is ensured.
Description
Technical Field
The invention relates to the technical field of aluminum nitride preparation, in particular to a graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply.
Background
The reaction sintering furnace is a vacuum resistance furnace using graphite as a heating element, is a sintering furnace for processing aluminum nitride powder, is a large-sized graphite box, places a workpiece to be fired in the graphite box, then vacuumizes the graphite box and heats the graphite box to sinter and shape the workpiece, in the prior art, in order to improve the temperature uniformity, a plurality of small-sized graphite boxes are usually arranged to improve the temperature uniformity, an air inlet pipeline and an air outlet pipeline are required to be connected with the graphite boxes, the connection is inconvenient, and in the working process of the air inlet pipeline and the air outlet pipeline, the air pressure inside each graphite box is unbalanced, the introduced nitrogen amount is difficult to control accurately, and the quality of sintered products is influenced.
Disclosure of Invention
In order to overcome the technical defects in the prior art, the invention provides the graphite furnace for preparing the aluminum nitride powder by accurately controlling the nitrogen supply, which ensures the same air supply quantity of each reaction device and the same product quality.
The technical scheme adopted by the invention is as follows:
the utility model provides an aluminum nitride powder preparation graphite furnace of accurate control nitrogen gas supply, includes air inlet fan, exhaust fan, gas distribution system and two reaction unit, gas distribution system has gas distribution power spare and two gas distribution devices of linkage, each gas distribution device all includes gas distribution air inlet and gas distribution gas outlet, each gas distribution air inlet all communicates with air inlet fan, each gas distribution gas outlet communicates with corresponding reaction unit, each reaction unit communicates with exhaust fan, each gas distribution device all includes gas distribution box, initiative gas distribution piston and advances exhaust control assembly, the gas distribution box has the gas compression chamber, gas distribution power spare promotes the initiative gas distribution piston on two adjacent gas distribution devices and slides along the gas compression chamber, advance exhaust control assembly includes advance exhaust control lever and advances exhaust control gear, the air inlet and exhaust control rod is located the air compressing cavity and slides along the air distribution air inlet and the air distribution air outlet, the air inlet and exhaust control gear is in transmission connection with the active air distribution piston, the air inlet and exhaust control gear is provided with lifting threads connected with the air inlet and exhaust control rod thread pair, the active air distribution piston is provided with an active air distribution rack meshed with the air inlet and exhaust control gear, the air inlet and exhaust control gear is provided with a limit baffle matched with the active air distribution rack, the axial movement of the air inlet and exhaust control gear is limited by the limit baffle, the air distribution piston slides along the air compressing cavity to enable the air inlet to be opened by the air inlet and seal the air distribution air outlet when the volume of the air compressing cavity is maximum, and the air distribution piston slides along the air compressing cavity to enable the volume of the air compressing cavity to be gradually reduced from maximum, and the air inlet is sealed by the air inlet to open the air distribution air outlet.
Preferably, the reaction device is provided with a plurality of graphite feed boxes, a plurality of graphite feed boxes are connected in series through connecting pipelines to form a row, an air inlet of each row of graphite feed boxes is communicated with an air distribution outlet of the corresponding air distribution device, and an air outlet of each row of graphite feed boxes is communicated with an air exhaust fan.
Preferably, a plurality of fillers are arranged in the air compressing cavity.
Preferably, the air distribution device further comprises a passive air distribution piston, wherein the passive air distribution piston slides along the air compression cavity, and a passive air distribution rack meshed with the air inlet and outlet control gear is arranged on the passive air distribution piston.
Preferably, the air distribution power piece is a double-acting air cylinder, and two output ends of the air distribution power piece respectively extend into the air pressing cavity of the corresponding air distribution box body and are in transmission connection with the corresponding active air distribution piston.
Preferably, the air inlet and outlet control rod comprises a rod body, and an air inlet support rod group, an air inlet sealing plug, an air outlet sealing plug and an air outlet support rod group which are sequentially arranged on the rod body, wherein the air inlet support rod group slides along an air distribution air inlet, the air outlet support rod group slides along an air distribution air outlet, and the distance between the air inlet sealing plug and the furthest end of the air outlet sealing plug is larger than the inner diameter of the air compression cavity.
Preferably, the air inlet support rod group and the air outlet support rod group are respectively provided with three support rods distributed at equal angles.
Preferably, the air distribution box body consists of an air distribution cylinder body and sealing covers for sealing two ends of the air distribution cylinder body.
The beneficial effects of the invention are as follows:
the gas distribution system is provided with a gas distribution power piece and two linked gas distribution devices, each gas distribution device comprises a gas distribution inlet and a gas distribution outlet, each gas distribution inlet is communicated with a gas inlet fan, the gas inlet fan blows nitrogen into each gas distribution inlet, each gas distribution outlet is communicated with a corresponding reaction device, nitrogen blown by the gas inlet fan enters the corresponding reaction device through the gas distribution outlet, each reaction device is communicated with an exhaust fan, and then reaction products are pumped out.
Each air distribution device comprises an air distribution box body, an active air distribution piston and an air inlet and outlet control assembly, the air distribution box body is provided with an air compression cavity, the air distribution power piece pushes the active air distribution pistons on two adjacent air distribution devices to slide along the air compression cavity, the volume in the air compression cavity is further changed, the air inlet and outlet control assembly is used for controlling the communication and the sealing of an air distribution air inlet and an air distribution air outlet, the air inlet and outlet control assembly is in transmission connection with the active air distribution pistons, that is, the action of the active air distribution pistons drives the air inlet and outlet control assembly to move.
When the air compression cavity is in air, the air inlet and outlet control assembly opens the air distribution air inlet and the air distribution air outlet are synchronously closed, the air distribution power piece drives the active air distribution piston to slide along the air compression cavity so as to increase the volume of the air compression cavity, the air inlet fan sends nitrogen into the air compression cavity, and when the air compression cavity is out of air, the air inlet and outlet control assembly closes the air distribution air inlet and synchronously opens the air distribution air outlet, the air distribution power piece drives the active air distribution piston to slide along the air compression cavity so as to reduce the volume of the air compression cavity, and the air inlet fan pumps the nitrogen out of the air distribution air outlet from the air compression cavity so as to send the nitrogen into each reaction device.
The method for controlling the opening and closing states of the air distribution air inlet and the air distribution air outlet by the air inlet and the air outlet is as follows: the air inlet and exhaust control assembly comprises an air inlet and exhaust control rod and an air inlet and exhaust control gear, wherein the air inlet and exhaust control rod is positioned in an air compressing cavity, the air inlet and exhaust control rod slides along an air distribution air inlet and an air distribution air outlet, the air inlet and exhaust control gear is in transmission connection with an active air distribution piston, the air inlet and exhaust control rod is provided with lifting threads connected with an air inlet and exhaust control rod thread pair, the active air distribution piston is provided with an active air distribution rack meshed with the air inlet and exhaust control gear, the air inlet and exhaust control gear is provided with a limit baffle matched with the active air distribution rack, the limit baffle limits the axial movement of the air inlet and exhaust control gear, the active air distribution rack drives the air inlet and exhaust control gear to rotate when the active air distribution piston moves, the lifting threads on the air inlet and exhaust control gear drive the air inlet and the air distribution control rod to lift, and the air distribution air outlet are provided with long grooves for limiting the rotation of the air inlet and exhaust control rod, when the active air distribution piston slides along the air compressing cavity to enable the volume of the air compressing cavity to be maximum, the air inlet is sealed, the active air distribution piston slides along the air compressing cavity to enable the volume of the air compressing cavity to be gradually reduced from maximum, the air inlet is sealed, the air outlet is opened, the air inlet is limited by the air outlet is sealed by the active air distribution rod, the air inlet, the axial movement is limited by the lifting threads, the lifting control gear, the air control rod, and the air control rod is rotated, and the air control and the air outlet is driven.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention.
Fig. 2 is a schematic diagram of a gas distribution system.
Fig. 3 is a schematic diagram of a gas distribution device.
Fig. 4 is a schematic diagram of the structure of the active air distribution rack and the air inlet and outlet control gear.
Fig. 5 is a schematic view of the structure of the intake and exhaust control lever.
Reference numerals illustrate:
1. an air intake fan;
2. an exhaust fan;
3. a gas distribution system; 31. a gas distribution device; 311. a gas distribution inlet; 312. a gas distribution outlet; 313. an air distribution box body; 3131. a gas distribution cylinder; 3132. sealing cover; 314. an active air distribution piston; 3141. an active gas distribution rack; 315. an air intake and exhaust control assembly; 3151. an air inlet and outlet control rod; 31511. a rod body; 31512. an air inlet support rod group; 31513. an air inlet sealing plug; 31514. an air outlet sealing plug; 31515. an air outlet support rod group; 3152. an air inlet and outlet control gear; 31521. a limit baffle; 32. a gas distribution power piece; 33. a plenum chamber;
4. a graphite feed box;
5. a filler;
6. a passive valve piston.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 1-5, this embodiment provides a graphite furnace for preparing aluminum nitride powder, which includes an air inlet fan 1, an air outlet fan 2, a gas control and distribution system 3 and two reaction devices, wherein the gas control and distribution system 3 includes a gas distribution power piece 32 and two linked gas distribution devices 31, each gas distribution device 31 includes a gas distribution inlet 311 and a gas distribution outlet 312, each gas distribution inlet 311 is communicated with the air inlet fan 1, the air inlet fan 1 blows nitrogen into each gas distribution inlet 311, each gas distribution outlet 312 is communicated with the corresponding reaction device, the nitrogen blown by the air inlet fan 1 enters the corresponding reaction device through the gas distribution outlet 312, each reaction device is communicated with the air outlet fan 2, and then the reaction product is extracted.
Each air distribution device 31 comprises an air distribution box 313, an active air distribution piston 314 and an air inlet and outlet control assembly 315, the air distribution box 313 is provided with an air compression cavity 33, the air distribution power piece 32 pushes the active air distribution pistons 314 on two adjacent air distribution devices 31 to slide along the air compression cavity 33, the air distribution power piece 32 is a double-acting air cylinder, two output ends of the air distribution power piece 32 respectively extend into the air compression cavity 33 of the corresponding air distribution box 313 and are in transmission connection with the corresponding active air distribution pistons 314, the volume in the air distribution cavity 33 is changed, the air inlet and outlet control assembly 315 is used for controlling the communication and the closure of the air distribution air inlet 311 and the air distribution air outlet 312, and the air inlet and outlet control assembly 315 is in transmission connection with the active air distribution pistons 314, that is, the action of the active air distribution pistons 314 drives the air inlet and outlet control assembly 315 to move.
When the air pressing cavity 33 is in air, the air inlet and outlet control assembly 315 opens the air distribution inlet 311 and the air distribution outlet 312 to be synchronously closed, the air distribution power piece 32 drives the active air distribution piston 314 to slide along the air pressing cavity 33 so as to increase the volume of the air pressing cavity 33, the air inlet fan 1 sends nitrogen into the air pressing cavity 33, when the air pressing cavity 33 is out of air, the air inlet and outlet control assembly 315 closes the air distribution inlet 311 and the air distribution outlet 312 to be synchronously opened, the air distribution power piece 32 drives the active air distribution piston 314 to slide along the air pressing cavity 33 so as to reduce the volume of the air pressing cavity 33, and the air inlet fan 1 pumps the nitrogen out of the air distribution outlet 312 from the air pressing cavity 33 so as to be sent into each reaction device.
The motion of the active air distribution piston 314 drives the air inlet and outlet control assembly 315, and the air inlet and outlet control assembly 315 controls the opening and closing states of the air distribution inlet 311 and the air distribution outlet 312 as follows: the air inlet and exhaust control assembly 315 comprises an air inlet and exhaust control rod 3151 and an air inlet and exhaust control gear 3152, wherein the air inlet and exhaust control rod 3151 is positioned in the air pressing cavity 33, the air inlet and exhaust control rod 3151 slides along the air inlet 311 and the air outlet 312, the air inlet and exhaust control gear 3152 is in transmission connection with the active air distribution piston 314, the air inlet and exhaust control gear 3152 is provided with lifting threads connected with a thread pair of the air inlet and exhaust control rod 3151, the active air distribution piston 314 is provided with an active air distribution rack 3141 meshed with the air inlet and exhaust control gear 3152, the air inlet and exhaust control gear 3152 is provided with a limit baffle 31521 matched with the active air distribution rack 3141, the limit baffle 31521 limits the axial movement of the air inlet and exhaust control gear 3152, the active air distribution rack 3141 drives the air inlet and exhaust control gear 3152 to rotate when the active air distribution piston 314 moves, the air inlet and exhaust control gear 3152 and the lifting screw threads on the air inlet and exhaust control gear 3152 drive the air inlet and exhaust control rod 3151 to lift, and it is worth noting that the air inlet 311 and the air outlet 312 are provided with elongated slots (not shown in the figure) for limiting the rotation of the air inlet and exhaust control rod 3151, when the active air distribution piston 314 slides along the air compression cavity 33 to make the volume of the air compression cavity 33 maximum, the air inlet and exhaust control rod 3151 opens the air inlet 311 and seals the air outlet 312, and when the active air distribution piston 314 slides along the air compression cavity 33 to make the volume of the air compression cavity 33 gradually become smaller from maximum, the air inlet and exhaust control rod 3151 seals the air inlet 311 and opens the air outlet 312, and the volumes of the air compression cavities 33 are the same, so that the air supply amounts of the air compression cavities 33 are kept equal, the same air supply amounts of the reaction devices are ensured, and the same product quality is ensured.
In order to increase the reaction speed, the reaction device is provided with a plurality of graphite feed boxes 4, the graphite feed boxes 4 are connected in series through connecting pipelines to form a row, the air inlet of each row of graphite feed boxes 4 is communicated with the air distribution outlet 312 of the corresponding air distribution device 31, the air outlet of each row of graphite feed boxes 4 is communicated with the air exhaust fan 2, and each graphite feed box can be filled with reaction raw materials, so that the reaction speed is increased.
The air distribution device 31 further comprises a passive air distribution piston 6, the air distribution box 313 is composed of an air distribution cylinder 3131 and sealing covers 3132 for sealing two ends of the air distribution cylinder 3131, the sealing covers 3132 are arranged to facilitate installation of the passive air distribution piston 6 and the active air distribution piston 314, the passive air distribution piston 6 slides along the air distribution cavity 33, a passive air distribution rack meshed with an air inlet and outlet control gear 3152 is arranged on the passive air distribution piston 6, a plurality of fillers 5 are arranged in an area, which cannot be reached by the active air distribution piston 314, in the air distribution cavity 33, because the passive air distribution rack and the active air distribution rack 3141 have a certain length, the passive air distribution piston 6 and the active air distribution piston 314 are blocked from being close to each other, and when the passive air distribution piston 6 and the active air distribution piston 314 are close to each other to the nearest positions, the fillers 5 can ensure air exhaustion in the air distribution cavity 33, and the air displacement is ensured to be accurate.
The air inlet and exhaust control rod 3151 comprises a rod body 31511, and an air inlet support rod group 31512, an air inlet sealing plug 31513, an air outlet sealing plug 31514 and an air outlet support rod group 31515 which are sequentially arranged on the rod body 31511, wherein the air inlet support rod group 31512 slides along a long groove in the air distribution air inlet 311 to prevent axial rotation, the air outlet support rod group 31515 slides along the air distribution air outlet 312, the air inlet support rod group 31512 and the air outlet support rod group 31515 are respectively provided with three support rods distributed at equal angles, so that the integral stability of the rod body 31511 is ensured, and the distance between the farthest ends of the air inlet sealing plug 31513 and the air outlet sealing plug 31514 is larger than the inner diameter of the air compression cavity 33, thereby avoiding inaccurate air supply caused by simultaneous communication of the air distribution air inlet 311 and the air distribution air outlet 312.
While the basic principles and main features of the invention and advantages of the invention have been shown and described, it will be understood by those skilled in the art that the present invention is not limited by the foregoing embodiments, which are described in the foregoing description merely illustrate the principles of the invention, and various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides an aluminum nitride powder preparation graphite furnace of accurate control nitrogen gas supply, its characterized in that includes air inlet fan, exhaust fan, gas distribution system and two reaction unit, gas distribution system has gas distribution power spare and two gas distribution devices of linkage, each gas distribution device all includes gas distribution air inlet and gas distribution gas outlet, each gas distribution air inlet all communicates with air inlet fan, each gas distribution gas outlet communicates with corresponding reaction unit, each reaction unit communicates with exhaust fan, each gas distribution device all includes gas distribution box, initiative gas distribution piston and advances the exhaust control assembly, the gas distribution box has the gas compression chamber, gas distribution power spare promotes the initiative piston on two adjacent gas distribution devices and slides along the gas compression chamber, advance the exhaust control assembly and include advance exhaust control lever and advance exhaust control gear, the air inlet and exhaust control rod is positioned in the air compressing cavity and slides along the air distributing inlet and the air distributing outlet, the air inlet and exhaust control gear is in transmission connection with the active air distributing piston, the air inlet and exhaust control gear is provided with lifting threads connected with the thread pair of the air inlet and exhaust control rod, the active air distributing piston is provided with an active air distributing rack meshed with the air inlet and exhaust control gear, the air inlet and exhaust control gear is provided with a limit baffle matched with the active air distributing rack, the limit baffle limits the axial movement of the air inlet and exhaust control gear, the active air distributing piston slides along the air compressing cavity to enable the air inlet to be opened by the air inlet and seal the air distributing outlet when the volume of the air compressing cavity is maximum, the active piston slides along the air compressing cavity to enable the volume of the air compressing cavity to be gradually reduced from maximum, the air inlet is sealed by the air inlet to open the air distributing outlet, the volumes of the air compressing cavities are the same, the air supply amount of each air pressing cavity is kept equal, the same air supply amount of each reaction device is guaranteed, the same product quality is guaranteed, the air inlet and outlet control rod comprises a rod body, and an air inlet support rod group, an air inlet sealing plug, an air outlet sealing plug and an air outlet support rod group which are sequentially arranged on the rod body, the air inlet support rod group slides along an air distribution air inlet, the air outlet support rod group slides along an air distribution air outlet, the distance between the farthest ends of the air inlet sealing plug and the air outlet sealing plug is larger than the inner diameter of the air pressing cavity, and the air inlet support rod group and the air outlet support rod group are provided with three support rods distributed at equal angles.
2. The graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply according to claim 1, wherein the reaction device is provided with a plurality of graphite feed boxes, the graphite feed boxes are connected in series through connecting pipelines to form a row, an air inlet of each row of graphite feed boxes is communicated with an air distribution outlet of a corresponding air distribution device, and an air outlet of each row of graphite feed boxes is communicated with an air exhaust fan.
3. The graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply according to claim 1, wherein a plurality of fillers are arranged in the air compressing cavity.
4. The graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply according to claim 1, wherein the gas distribution device further comprises a passive gas distribution piston, the passive gas distribution piston slides along the gas compression cavity, and a passive gas distribution rack meshed with the gas inlet and outlet control gear is arranged on the passive gas distribution piston.
5. The graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply according to claim 1, wherein the gas distribution power piece is a double-acting cylinder, and two output ends of the gas distribution power piece respectively extend into a gas pressing cavity of a corresponding gas distribution box body and are in transmission connection with a corresponding active gas distribution piston.
6. The graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply according to claim 1, wherein the gas distribution box body consists of a gas distribution cylinder body and sealing covers for sealing two ends of the gas distribution cylinder body.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210060870.2A CN114543523B (en) | 2022-01-19 | 2022-01-19 | Graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply |
| CN202311537969.8A CN117387368A (en) | 2022-01-19 | 2022-01-19 | Gas distribution system of graphite furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210060870.2A CN114543523B (en) | 2022-01-19 | 2022-01-19 | Graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311537969.8A Division CN117387368A (en) | 2022-01-19 | 2022-01-19 | Gas distribution system of graphite furnace |
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| Publication Number | Publication Date |
|---|---|
| CN114543523A CN114543523A (en) | 2022-05-27 |
| CN114543523B true CN114543523B (en) | 2023-10-24 |
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| CN202210060870.2A Active CN114543523B (en) | 2022-01-19 | 2022-01-19 | Graphite furnace for preparing aluminum nitride powder by accurately controlling nitrogen supply |
| CN202311537969.8A Pending CN117387368A (en) | 2022-01-19 | 2022-01-19 | Gas distribution system of graphite furnace |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202311537969.8A Pending CN117387368A (en) | 2022-01-19 | 2022-01-19 | Gas distribution system of graphite furnace |
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| CN116358314A (en) * | 2023-04-06 | 2023-06-30 | 福建华清电子材料科技有限公司 | Energy-saving graphite furnace and method for sintering high-purity aluminum nitride powder |
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| CN114543523A (en) | 2022-05-27 |
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