CN222160024U - A coating glass vacuum chamber pressurizing device - Google Patents
A coating glass vacuum chamber pressurizing device Download PDFInfo
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- CN222160024U CN222160024U CN202420932618.0U CN202420932618U CN222160024U CN 222160024 U CN222160024 U CN 222160024U CN 202420932618 U CN202420932618 U CN 202420932618U CN 222160024 U CN222160024 U CN 222160024U
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Abstract
The utility model relates to the field of glass processing, in particular to a coated glass vacuum chamber pressurizing device, which comprises a shell and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber and a first air pressure sensor are arranged in the shell, the air inlet end of the mixing chamber is respectively communicated with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, the air outlet end of the mixing chamber is communicated with the vacuum chamber, the second air inlet chamber is connected with the pumping device, a first control valve is arranged at the air outlet end of the first air inlet chamber, a second control valve is arranged at the air outlet end of the second air inlet chamber, a third control valve is arranged at the air outlet end of the mixing chamber, and the first air pressure sensor is arranged in the mixing chamber.
Description
Technical Field
The utility model relates to the field of glass processing, in particular to a coated glass vacuum chamber pressurizing device.
Background
After the vacuum sputtering process of the glass, the vacuum chamber needs to be pressurized to match the external air pressure, and then the coated glass is taken out. In the prior art, only one air inlet valve is adopted to introduce external air, and the external air is directly injected into the vacuum chamber to realize pressurization so as to balance the air pressure inside and outside the vacuum chamber, but the mode still has the condition that the pressure difference between the introduced external air and the inside of the vacuum chamber is overlarge, so that glass is damaged.
Disclosure of utility model
The utility model aims to solve the technical problem of providing a coated glass vacuum chamber pressurizing device for avoiding glass damage caused by overlarge pressure difference between pressurized gas and a vacuum chamber.
In order to solve the technical problems, the technical scheme includes that the coated glass vacuum chamber pressurizing device comprises a shell and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber and a first air pressure sensor are arranged in the shell, the air inlet end of the mixing chamber is respectively communicated with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, the air outlet end of the mixing chamber is communicated with the vacuum chamber, the first air inlet chamber is filled with outside air, the second air inlet chamber is connected with the pumping device, the pumping device pumps air with controllable pressure into the second air inlet chamber, a first control valve is arranged on the air outlet end of the first air inlet chamber, a second control valve is arranged on the air outlet end of the second air inlet chamber, a third control valve is arranged on the air outlet end of the mixing chamber, and the first air pressure sensor is arranged in the mixing chamber and is electrically connected with the first control valve, the second control valve and the third control valve.
Further, the part of the shell, which is correspondingly provided with the mixing cavity, is in a flat plate shape, and a plurality of air outlet ends are uniformly arranged at the bottom of the vacuum chamber.
Further, the shell comprises a fixed shell and a rotating shell, a first air inlet cavity and a second air inlet cavity are arranged in the fixed shell, a mixing cavity is arranged in the rotating shell, and the rotating shell is rotationally connected with the fixed shell.
Further, a rotating shaft is connected between the fixed shell and the rotating shell, the rotating shaft is arranged on the side wall of the vacuum chamber, the rotating shaft is hollow, and the fixed shell and the rotating shell are communicated with the inside of the rotating shaft.
The rotary shaft is provided with a hollow structure along the circumferential direction of the rotary shaft at the connecting part corresponding to the fixed shell and the rotary shell, a through hole is arranged in the connecting part of the fixed shell and the rotary shaft and covers the hollow structure, and the through hole is opposite to the hollow structure and is communicated with the fixed shell and the rotary shell.
Further, the number of the rotating shells is two, and the rotating shells are symmetrically arranged on two sides of the vacuum chamber.
The vacuum chamber is characterized in that one end of the rotating shaft extends to the outer side of the vacuum chamber and is sleeved with a driving gear, the vacuum chamber is further provided with a rotation control device, the rotation control device comprises a linear reciprocating mechanism, a moving guide rail, a moving rack and a first connecting rod, the moving guide rail is arranged on the outer side of the vacuum chamber, the moving rack moves along the moving guide rail, the moving rack is meshed with the driving gear, the output end of the linear reciprocating mechanism linearly reciprocates along the length direction perpendicular to the moving guide rail, and the first connecting rod is connected between the output end of the linear reciprocating mechanism and the moving rack.
Further, the linear reciprocating mechanism comprises a sliding block, a fixed sliding rail, a second connecting rod, a third connecting rod and a rotating motor, wherein the fixed sliding rail is perpendicular to the movable guide rail, the sliding block moves along the fixed sliding rail, two sides of the sliding block are respectively connected with the first connecting rod with an adjacent movable rack, and the lower side of the sliding block is sequentially connected with the second connecting rod, the third connecting rod and the rotating motor.
The utility model has the advantages that air with different pressure can be formed by mixing the air in the first air inlet cavity and the air in the second air inlet cavity in the mixing cavity, so that the condition that the pressure difference is overlarge and glass is damaged possibly caused by directly inputting external air can be avoided by inputting the air with gradually increased pressure into the vacuum chamber, meanwhile, the temperature of the mixed air can be more similar to the external temperature compared with the air with different pressure which is directly input, and the air pressure after mixing in the mixing cavity is identified by the first air pressure sensor so as to ensure that the air is input into the vacuum chamber by matching with the control of the first control valve, the second control valve and the third control valve under the designed pressure condition.
Drawings
FIG. 1 is a schematic view of a coated glass vacuum chamber pressurizing apparatus according to an embodiment of the present utility model in a first state of a rotary housing;
FIG. 2 is a schematic view of a structure of a rotary housing of a vacuum chamber pressurizing apparatus for coated glass according to an embodiment of the present utility model in a second state;
FIG. 3 is a schematic view of the structure of the rotating shaft of the vacuum chamber pressurizing device for coated glass according to the embodiment of the utility model;
Fig. 4 is a schematic structural view of a rotation control device of a vacuum chamber pressurizing device for coated glass according to an embodiment of the present utility model.
Description of the reference numerals:
1. A fixed housing; 2, a rotating shell, 21, a mixing cavity, 3, a rotating shaft, 31, a hollow structure, 4, a driving gear, 5, a movable guide rail, 6, a movable rack, 7, a sliding block, 8, a fixed slide rail, 9, a first connecting rod, 10, a second connecting rod, 11, a third connecting rod, 12 and a vacuum chamber.
Detailed Description
In order to describe the technical contents, the achieved objects and effects of the present utility model in detail, the following description will be made with reference to the embodiments in conjunction with the accompanying drawings.
Referring to fig. 1 to 4, a pressurizing device for a coated glass vacuum chamber 12 includes a housing and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber 21 and a first air pressure sensor are disposed in the housing, the air inlet end of the mixing chamber 21 is respectively communicated with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, the air outlet end of the mixing chamber 21 is communicated with the vacuum chamber 12, the first air inlet chamber is filled with external air, the second air inlet chamber is connected with the pumping device, the pumping device pumps air with controllable pressure into the second air inlet chamber, a first control valve is disposed on the air outlet end of the first air inlet chamber, a second control valve is disposed on the air outlet end of the second air inlet chamber, a third control valve is disposed on the air outlet end of the mixing chamber 21, and the first air pressure sensor is disposed in the mixing chamber 21 and electrically connected with the first control valve, the second control valve and the third control valve.
From the above description, the utility model has the advantages that air with different pressure can be formed by mixing the air in the first air inlet cavity and the air in the second air inlet cavity in the mixing cavity 21, so that air with gradually increased pressure can be input into the vacuum chamber 12, the condition that the pressure difference is overlarge and glass is damaged possibly caused by directly inputting external air is avoided, meanwhile, the temperature of the mixed air can be more similar to the outside than that of the air with different pressure directly input, and the air pressure after mixing in the mixing cavity 21 is identified by the first air pressure sensor so as to ensure that the air is input into the vacuum chamber 12 under the designed pressure condition by matching with the control of the first control valve, the second control valve and the third control valve.
Further, the portion of the housing corresponding to the mixing chamber 21 is flat, and a plurality of air outlet ends are uniformly arranged at the bottom of the vacuum chamber 12.
As is clear from the above description, by the flat plate-like design of the part of the housing corresponding to the mixing chamber 21, it is possible to flow uniformly to the glass when air is fed in, ensuring uniform distribution of air having pressure.
Further, the shell comprises a fixed shell 1 and a rotating shell 2, a first air inlet cavity and a second air inlet cavity are arranged in the fixed shell 1, a mixing cavity 21 is arranged in the rotating shell 2, and the rotating shell 2 is rotationally connected with the fixed shell 1.
As can be seen from the above description, the mixing chamber 21 is provided in the rotary housing 2, and the rotary housing 2 can rotate relative to the fixed housing 1, so that the rotary housing 2 can be rotated to avoid during the coating processing stage.
Further, a rotating shaft 3 is connected between the fixed shell 1 and the rotating shell 2, the rotating shaft 3 is arranged on the side wall of the vacuum chamber 12, the rotating shaft 3 is hollow, and the fixed shell 1 and the rotating shell 2 are communicated with the inside of the rotating shaft 3.
As is apparent from the above description, the rotation shaft 3 serves as a hinge structure and also serves as a structure in which the stationary housing 1 communicates with the rotation housing 2.
Further, the rotating shaft 3 is provided with a hollow structure 31 along the circumferential direction thereof at the connection position corresponding to the fixed casing 1 and the rotating casing 2, the connection position of the fixed casing 1 and the rotating casing 2 and the rotating shaft 3 is internally provided with a through hole and covers the hollow structure 31, and the through hole is opposite to the hollow structure 31 and is communicated with the fixed casing 1 and the rotating casing 2.
It can be seen from the above description that the through holes of the connecting parts of the hollow structure 31 on the rotating shaft 3, the fixed housing 1 and the rotating housing 2 are matched and communicated with the fixed housing 1 and the rotating housing 2, and meanwhile, the non-hollow structure 31 on the connecting part of the rotating shaft 3 is used as a supporting structure for rotating and matching.
Further, there are two rotating shells 2 symmetrically arranged at two sides of the vacuum chamber 12.
As can be seen from the above description, by the symmetrical design of the rotating housing 2, a uniform distribution of the air output by the mixing chamber 21 is ensured.
Further, one end of the rotating shaft 3 extends to the outer side of the vacuum chamber 12 and is sleeved with a driving gear 4, the vacuum chamber further comprises a rotation control device, the rotation control device comprises a linear reciprocating mechanism, a moving guide rail 5, a moving rack 6 and a first connecting rod 9, the moving guide rail 5 is arranged on the outer side of the vacuum chamber 12, the moving rack 6 moves along the moving guide rail 5, the moving rack 6 is meshed with the driving gear 4, and the output end of the linear reciprocating mechanism linearly reciprocates along the length direction perpendicular to the moving guide rail 5 and is connected with the first connecting rod 9 between the moving rack 6.
As is apparent from the above description, the rotation control device is employed to perform the rotation operation of the rotation housing 2. Specifically, the linear reciprocating mechanism and the first connecting rod 9 are matched to drive the movable rack 6 to reciprocate on the movable guide rail 5, and the movable rack 6 is matched with the driving gear 4 to realize the rotation control of the rotating shaft 3 and the rotating shell 2.
Further, the linear reciprocating mechanism comprises a sliding block 7, a fixed sliding rail 8, a second connecting rod 10, a third connecting rod 11 and a rotating motor, wherein the fixed sliding rail 8 is perpendicular to the moving guide rail 5, the sliding block 7 moves along the fixed sliding rail 8, two sides of the sliding block 7 are respectively connected with a first connecting rod 9 with an adjacent moving rack 6, and the lower side of the sliding block 7 is sequentially connected with the second connecting rod 10, the third connecting rod 11 and the rotating motor.
As can be seen from the above description, the linear reciprocating mechanism drives the third link 11 through the rotary motor, the third link 11 drives the second link 10 and the slide block 7 to move, the slide block 7 reciprocates along the fixed slide rail 8, and the moving slide block 7 drives the first link 9 and the moving rack 6 to move.
Embodiment one:
The application scene is that after the vacuum sputtering processing of the glass, the vacuum chamber needs to be pressurized to match with the external air pressure, and then the coated glass is taken out. In the prior art, only one air inlet valve is adopted to introduce external air, and the external air is directly injected into the vacuum chamber to realize pressurization so as to balance the air pressure inside and outside the vacuum chamber, but the mode still has the condition that the pressure difference between the introduced external air and the inside of the vacuum chamber is overlarge, so that glass is damaged.
As shown in fig. 1 to 4, the pressurizing device for the coated glass vacuum chamber 12 in this embodiment includes a housing and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber 21 and a first air pressure sensor are provided in the housing, the air inlet end of the mixing chamber 21 is respectively communicated with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, the air outlet end of the mixing chamber 21 is communicated with the vacuum chamber 12, the first air inlet chamber is filled with external air, the second air inlet chamber is connected with the pumping device, the pumping device pumps air with controllable pressure into the second air inlet chamber, a first control valve is provided on the air outlet end of the first air inlet chamber, a second control valve is provided on the air outlet end of the second air inlet chamber, a third control valve is provided on the air outlet end of the mixing chamber 21, and the first air pressure sensor is provided in the mixing chamber 21 and electrically connected with the first control valve, the second control valve and the third control valve.
The shell comprises a fixed shell 1 and a rotating shell 2, wherein a first air inlet cavity and a second air inlet cavity are arranged in the fixed shell 1, a mixing cavity 21 is arranged in the rotating shell 2, the rotating shell 2 is rotationally connected with the fixed shell 1, the rotating shell 2 is in a flat plate shape, and a plurality of air outlet ends are uniformly arranged at the bottom of the rotating shell facing the vacuum chamber 12. The number of the rotating shells 2 is two, and the rotating shells are symmetrically arranged on two sides of the vacuum chamber 12.
A rotating shaft 3 is connected between the fixed shell 1 and the rotating shell 2, the rotating shaft 3 is arranged on the side wall of the vacuum chamber 12, the rotating shaft 3 is hollow, and the fixed shell 1 and the rotating shell 2 are communicated with the inside of the rotating shaft 3. Specifically, the rotating shaft 3 is provided with a hollow structure 31 along the circumferential direction thereof at the connection position corresponding to the fixed casing 1 and the rotating casing 2, the connection position of the fixed casing 1 and the rotating casing 2 with the rotating shaft 3 is internally provided with a through hole and covers the hollow structure 31, and the through hole is opposite to the hollow structure 31 and is communicated with the fixed casing 1 and the rotating casing 2.
The vacuum chamber comprises a vacuum chamber 12, a rotating shaft 3, a driving gear 4, a rotation control device and a first connecting rod 9, wherein one end of the rotating shaft 3 extends to the outer side of the vacuum chamber 12 and is sleeved with the driving gear 4, the rotation control device comprises a linear reciprocating mechanism, a moving guide rail 5, a moving rack 6 and the first connecting rod 9, the moving guide rail 5 is arranged on the outer side of the vacuum chamber 12, the moving rack 6 moves along the moving guide rail 5, the moving rack 6 is meshed with the driving gear 4, and the output end of the linear reciprocating mechanism linearly reciprocates along the length direction perpendicular to the moving guide rail 5 and is connected with the first connecting rod 9 between the moving rack 6. The linear reciprocating mechanism comprises a sliding block 7, a fixed sliding rail 8, a second connecting rod 10, a third connecting rod 11 and a rotating motor, wherein the fixed sliding rail 8 is perpendicular to the movable guide rail 5, the sliding block 7 moves along the fixed sliding rail 8, two sides of the sliding block 7 are respectively connected with a first connecting rod 9 with an adjacent movable rack 6, and the lower side of the sliding block 7 is sequentially connected with the second connecting rod 10, the third connecting rod 11 and the rotating motor.
The working principle is that a fixed shell 1 is arranged on the upper side of a vacuum chamber 12, and a rotary shell 2 is arranged in the vacuum chamber 12. During film coating processing, the driving gear 4 is controlled to rotate through the rotation control device, the rotation shaft 3 and the rotation shell 2 are driven to rotate, at the moment, the rotation shell 2 rotates towards the side wall of the vacuum chamber 12, one face provided with the air outlet end of the rotation shell faces the side wall of the vacuum chamber 12 to form avoidance, meanwhile, impurities generated during film coating processing are prevented from falling into the air outlet end, and the rotation shell 2 is in a first state. After the film plating process, pressurized gas is introduced to make the pressure in the vacuum chamber 12 consistent with the outside, and then the glass is taken out. Then, through the cooperation of the first air inlet cavity, the second air inlet cavity and the mixing cavity 21, the opening and closing of a plurality of control valves are controlled through the first air pressure sensor, air with different pressures is gradually input, so that the vacuum chamber 12 is gradually matched with the external air pressure environment to safely take out coated glass after approaching.
In summary, according to the coated glass vacuum chamber pressurizing device provided by the utility model, air with different pressures can be formed by mixing the air in the first air inlet chamber and the air in the second air inlet chamber in the mixing chamber, so that the condition that the pressure difference is overlarge and glass is damaged due to the fact that external air is directly input can be avoided by inputting the air with gradually increased pressure into the vacuum chamber, meanwhile, the temperature of the mixed air can be more approximate to the external temperature compared with the air with different pressures which is directly input, and the air pressure after mixing in the mixing chamber is identified through the first air pressure sensor so as to ensure that the air is input into the vacuum chamber under the designed pressure condition by matching with the control of the first control valve, the second control valve and the third control valve.
The foregoing description is only illustrative of the present utility model and is not intended to limit the scope of the utility model, and all equivalent changes made by the specification and drawings of the present utility model, or direct or indirect application in the relevant art, are included in the scope of the present utility model.
Claims (8)
1. A coated glass vacuum chamber pressurizing device is characterized by comprising a shell and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber and a first air pressure sensor are arranged in the shell, the air inlet end of the mixing chamber is respectively communicated with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, the air outlet end of the mixing chamber is communicated with a vacuum chamber, the first air inlet chamber is filled with outside air, the second air inlet chamber is connected with the pumping device, the pumping device pumps air with controllable pressure into the second air inlet chamber, a first control valve is arranged at the air outlet end of the first air inlet chamber, a second control valve is arranged at the air outlet end of the second air inlet chamber, a third control valve is arranged at the air outlet end of the mixing chamber, and the first air pressure sensor is arranged in the mixing chamber and is electrically connected with the first control valve, the second control valve and the third control valve.
2. The vacuum chamber pressurizing apparatus for coated glass according to claim 1, wherein the portion of the housing corresponding to the mixing chamber is plate-shaped, and a plurality of air outlet ends are uniformly provided facing the bottom of the vacuum chamber.
3. The coated glass vacuum chamber pressurizing device according to claim 2, wherein the housing comprises a fixed housing and a rotating housing, a first air inlet cavity and a second air inlet cavity are arranged in the fixed housing, a mixing cavity is arranged in the rotating housing, and the rotating housing is rotationally connected with the fixed housing.
4. The vacuum chamber pressurizing device for coated glass according to claim 3, wherein a rotating shaft is connected between the fixed shell and the rotating shell, the rotating shaft is arranged on the side wall of the vacuum chamber, the rotating shaft is hollow, and the fixed shell and the rotating shell are communicated with the inside of the rotating shaft.
5. The vacuum chamber pressurizing device for coated glass according to claim 4, wherein the rotating shaft is provided with a hollow structure along the circumferential direction thereof at a connection position corresponding to the fixed housing and the rotating housing, and the connection position of the fixed housing and the rotating housing with the rotating shaft is internally provided with a through hole and covers the hollow structure, and the through hole is opposite to the hollow structure and is communicated with the fixed housing and the rotating housing.
6. The vacuum chamber pressurizing device for coated glass according to claim 4, wherein the rotation housing is provided in two, symmetrically arranged at both sides of the vacuum chamber.
7. The vacuum chamber pressurizing device for coated glass according to claim 6, wherein one end of the rotating shaft extends to the outer side of the vacuum chamber and is sleeved with a driving gear, the vacuum chamber pressurizing device further comprises a rotation control device, the rotation control device comprises a linear reciprocating mechanism, a moving guide rail, a moving rack and a first connecting rod, the moving guide rail is arranged on the outer side of the vacuum chamber, the moving rack moves along the moving guide rail, the moving rack is meshed with the driving gear, and the output end of the linear reciprocating mechanism linearly reciprocates along the length direction perpendicular to the moving guide rail and is connected with the first connecting rod.
8. The vacuum chamber pressurizing device for coated glass according to claim 7, wherein the linear reciprocating mechanism comprises a sliding block, a fixed sliding rail, a second connecting rod, a third connecting rod and a rotating motor, the fixed sliding rail is perpendicular to the movable guide rail, the sliding block moves along the fixed sliding rail, two sides of the sliding block are respectively connected with the first connecting rod with adjacent movable racks, and the lower side of the sliding block is sequentially connected with the second connecting rod, the third connecting rod and the rotating motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420932618.0U CN222160024U (en) | 2024-04-30 | 2024-04-30 | A coating glass vacuum chamber pressurizing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420932618.0U CN222160024U (en) | 2024-04-30 | 2024-04-30 | A coating glass vacuum chamber pressurizing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN222160024U true CN222160024U (en) | 2024-12-13 |
Family
ID=93784272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202420932618.0U Active CN222160024U (en) | 2024-04-30 | 2024-04-30 | A coating glass vacuum chamber pressurizing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN222160024U (en) |
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2024
- 2024-04-30 CN CN202420932618.0U patent/CN222160024U/en active Active
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