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CN114204396A - All-solid-state blue-green laser based on thulium-doped ion crystal - Google Patents

All-solid-state blue-green laser based on thulium-doped ion crystal Download PDF

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CN114204396A
CN114204396A CN202010979169.1A CN202010979169A CN114204396A CN 114204396 A CN114204396 A CN 114204396A CN 202010979169 A CN202010979169 A CN 202010979169A CN 114204396 A CN114204396 A CN 114204396A
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mirror
plano
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杭寅
杨依伦
房倩楠
朱影
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Shanghai Institute of Optics and Fine Mechanics of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/1601Solid materials characterised by an active (lasing) ion
    • H01S3/1603Solid materials characterised by an active (lasing) ion rare earth
    • H01S3/1616Solid materials characterised by an active (lasing) ion rare earth thulium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
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    • H01S3/0815Configuration of resonator having 3 reflectors, e.g. V-shaped resonators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
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Abstract

一种基于掺铥离子晶体的全固态蓝绿光激光器,包括激发源,增益介质、非线性倍频晶体、腔镜系统和调谐元件。沿激发源的激光输出方向依次是平面镜、增益介质、调谐元件、平凹腔镜;与之前光路呈一定角度的,在该平凹腔镜的反射光路方向依次安置着非线性倍频晶体与平凹后腔镜;所述的平面镜、平凹腔镜与平凹后腔镜共同组成了折叠型的谐振腔。激发源发射出的泵浦光经过准直聚焦注入到增益介质中,输出的1.85~2.1μm中红外激光经过非线性倍频晶体的转换,输出462.5~525nm波段的蓝绿激光。该激光器具有发射波长丰富、激光波长可调谐、输出功率高、稳定性高、结构简单和体积小等优点。

Figure 202010979169

An all-solid-state blue-green laser based on a thulium-doped ion crystal includes an excitation source, a gain medium, a nonlinear frequency-doubling crystal, a cavity mirror system and a tuning element. The laser output direction of the excitation source is followed by a plane mirror, a gain medium, a tuning element, and a plano-concave cavity mirror; if it is at a certain angle with the previous optical path, a nonlinear frequency-doubling crystal and a plane-concave cavity mirror are placed in order in the direction of the reflected light path of the plano-concave cavity mirror. A concave cavity mirror; the plane mirror, the plano-concave cavity mirror and the plano-concave cavity mirror together form a folded resonant cavity. The pump light emitted by the excitation source is injected into the gain medium through collimation and focusing, and the output 1.85-2.1μm mid-infrared laser is converted by a nonlinear frequency-doubling crystal to output a blue-green laser in the 462.5-525nm band. The laser has the advantages of rich emission wavelength, tunable laser wavelength, high output power, high stability, simple structure and small size.

Figure 202010979169

Description

基于掺铥离子晶体的全固态蓝绿光激光器All-solid-state blue-green laser based on thulium ion crystal

技术领域technical field

本发明涉及激光器,特别是一种基于掺铥离子晶体的全固态蓝绿光激光器。The invention relates to a laser, in particular to an all-solid-state blue-green laser based on a thulium-doped ion crystal.

背景技术Background technique

462~525nm波段的蓝绿光激光处于海水的低损耗窗口,在水下探测、传输、传感和通信等方面具有重要的应用。特别是其中位于486.1nm波长处的蓝光由于氢原子的吸收而形成了太阳辐射光谱中的夫琅禾费暗线,利用此波长进行激光传输或通讯可有效规避环境噪声,提高信噪比。蓝光激光以其波长短、光斑小等优点可以显著提升光存储中的信息容量,成为了高密度光存储研究中的热点方向。此外蓝绿激光也对应于含氧血红蛋白的吸收波段,在激光血管内照射治疗仪方面也有重要的应用前景。目前现有技术主要利用半导体技术和非线性光学效应来获得蓝绿光激光,比如利用钕离子波长间的和频获得(LaserPhysics,21,2011),掺铥晶体上转换获得(CN109873292A),掺铥光纤四倍频获得(CN103311782A)。但是现有技术获得的蓝绿光激光往往存在效率不高、系统复杂等不足,难以满足现代信息社会对高效率、高集成蓝绿光激光器的要求。因此,亟需一种能够获得高效率、高功率、高集成蓝绿光激光器的方法来满足高效率水下信息传递、地貌探测光存储及医疗等方面的需求。The blue-green laser in the 462-525nm band is in the low-loss window of seawater, and has important applications in underwater detection, transmission, sensing and communication. In particular, the blue light at the wavelength of 486.1 nm forms the Fraunhofer dark line in the solar radiation spectrum due to the absorption of hydrogen atoms. Using this wavelength for laser transmission or communication can effectively avoid environmental noise and improve the signal-to-noise ratio. Blue laser has the advantages of short wavelength and small spot, which can significantly increase the information capacity in optical storage, and has become a hot spot in high-density optical storage research. In addition, blue-green laser also corresponds to the absorption band of oxygenated hemoglobin, and also has important application prospects in laser intravascular irradiation therapy instruments. At present, the existing technology mainly uses semiconductor technology and nonlinear optical effects to obtain blue-green laser, such as the use of the sum frequency between the wavelengths of neodymium ions (LaserPhysics, 21, 2011), the up-conversion of thulium-doped crystals (CN109873292A), the thulium-doped Optical fiber quadruple obtained (CN103311782A). However, the blue-green lasers obtained by the existing technology often have shortcomings such as low efficiency and complex systems, and it is difficult to meet the requirements of the modern information society for high-efficiency, high-integration blue-green lasers. Therefore, there is an urgent need for a method that can obtain high-efficiency, high-power, high-integration blue-green lasers to meet the needs of high-efficiency underwater information transmission, topographic detection optical storage, and medical treatment.

铥离子能级3F4-3H6的跃迁可以发射2μm附近的激光,再结合非线性光学晶体PPLN、LBO、KTP等可以获得蓝绿光激光的输出。目前掺铥晶体已经在2μm波段获得了百瓦级的输出功率(Appl Phys B(2009)94:195–198,Laser Phys.29(2019)115004(4pp)),再利用倍频技术,可以获得较高转换效率、较高输出功率的蓝绿光激光。相比于掺铥光纤,掺铥晶体品种丰富,中红外发射波长多样,有利于实现倍频后多种波长的蓝绿光激光发射。同光纤相比,掺铥晶体的发射光谱较宽,有利于实现激光输出波长的可调谐以及产生超快激光。此外,晶体还具有优良的热性能与损伤阈值,高功率泵浦下具有较弱的非线性效应,在产生大能量、短脉冲、高峰值功率激光方面具有显著优势。The transition of thulium ion energy level 3 F 4 - 3 H 6 can emit laser light around 2 μm, and combined with nonlinear optical crystals PPLN, LBO, KTP, etc., the output of blue-green laser can be obtained. At present, thulium-doped crystals have obtained 100-watt output power in the 2μm band (Appl Phys B (2009) 94:195–198, Laser Phys. 29 (2019) 115004 (4pp)), and then using frequency doubling technology, it can be obtained Blue-green laser with higher conversion efficiency and higher output power. Compared with thulium-doped fibers, thulium-doped crystals are rich in varieties and have various mid-infrared emission wavelengths, which is conducive to the realization of blue-green laser emission of various wavelengths after frequency doubling. Compared with optical fibers, the emission spectrum of thulium-doped crystals is wider, which is conducive to the tunability of laser output wavelengths and the generation of ultrafast lasers. In addition, the crystal also has excellent thermal properties and damage threshold, and has weak nonlinear effects under high-power pumping, and has significant advantages in generating large-energy, short-pulse, and high-peak power lasers.

发明内容SUMMARY OF THE INVENTION

针对现有技术的不足,本发明提供一种基于掺铥离子晶体的全固态蓝绿光激光器,利用掺铥离子的晶体获得1.85~2.1μm附近的中红外基频光,再利用非线性倍频技术获得462.5~525nm左右蓝绿光激光输出,具有波长可调谐、结构简单、输出功率高、转换效率高和稳定性高等优点。In view of the deficiencies of the prior art, the present invention provides an all-solid-state blue-green laser based on a thulium ion crystal, which uses the thulium ion crystal to obtain mid-infrared fundamental frequency light around 1.85-2.1 μm, and then uses nonlinear frequency doubling. The technology obtains blue-green laser output around 462.5-525nm, which has the advantages of tunable wavelength, simple structure, high output power, high conversion efficiency and high stability.

本发明的技术解决方案如下:The technical solution of the present invention is as follows:

一种基于掺铥离子晶体的全固态蓝绿光激光器,能够输出462.5~525nm蓝绿光激光,其特点在于:包括激发源、增益介质、非线性倍频晶体、腔镜系统和调谐元件,所述的腔镜系统包括平面镜、平凹腔镜和平凹后腔镜;An all-solid-state blue-green laser based on thulium-doped ion crystals, capable of outputting 462.5-525 nm blue-green lasers, is characterized in that it includes an excitation source, a gain medium, a nonlinear frequency-doubling crystal, a cavity mirror system and a tuning element. The cavity mirror system described above includes a plane mirror, a plano-concave cavity mirror, and a plano-concave posterior cavity mirror;

沿所述的激发源的激光输出方向依次是所述的平面镜、增益介质、调谐元件、平凹腔镜;与之前光路呈一定角度的,在所述的平凹腔镜的反射光路方向依次安置着所述的非线性倍频晶体与平凹后腔镜;所述的平面镜、平凹腔镜与平凹后腔镜共同组成了折叠型的谐振腔;Along the laser output direction of the excitation source, the plane mirror, the gain medium, the tuning element, and the plano-concave cavity mirror are sequentially arranged; those that are at a certain angle with the previous optical path are arranged in order in the direction of the reflected light path of the plano-concave cavity mirror. the non-linear frequency doubling crystal and the plano-concave back cavity mirror; the plane mirror, the plano-concave cavity mirror and the plano-concave back cavity mirror together form a folded resonant cavity;

所述的平面镜、平凹腔镜和平凹后腔镜分别对其工作波长进行了镀膜优化,所述的平面镜镀以1.85~2.1μm高反射和793nm高透过的介质膜;所述的平凹腔镜镀以1.85~2.1μm高反射、0.925~1.05μm高反射、793nm高反射和462.5~525nm高透过的介质膜;所述的平凹后腔镜镀以1.85~2.1μm高反射、0.925~1.05μm高反射和462.5~525nm高反射的介质膜。The plane mirror, the plano-concave cavity mirror and the plano-concave back cavity mirror are respectively optimized for their working wavelengths. The cavity mirror is coated with a dielectric film of 1.85-2.1μm high reflection, 0.925-1.05μm high reflection, 793nm high reflection and 462.5-525nm high transmission; ~1.05μm high reflection and 462.5~525nm high reflection dielectric film.

所述的激发源为输出波长在793nm附近的激光二极管激光器;The excitation source is a laser diode laser with an output wavelength near 793 nm;

所述的增益介质为掺铥离子晶体;The gain medium is a thulium ion crystal;

所述的非线性倍频晶体可以选取一级倍频晶体和二级倍频晶体组合的方式,或单一非线性晶体直接输出的方式;The nonlinear frequency doubling crystal can be a combination of a first-order frequency-doubling crystal and a second-order frequency-doubling crystal, or a direct output method of a single nonlinear crystal;

当所述的非线性倍频晶体选择采用一级倍频晶体和二级倍频晶体组合的方式时,所述的一级倍频晶体选取自KTP、PPLN或LBO晶体,所述的二级倍频晶体选取自KTP、LBO或BBO晶体;When the nonlinear frequency doubling crystal is selected in the combination of a first-order frequency doubling crystal and a second-order frequency doubling crystal, the first-order frequency-doubling crystal is selected from KTP, PPLN or LBO crystal, and the second-order frequency doubling crystal is selected from KTP, PPLN or LBO crystal. The frequency doubling crystal is selected from KTP, LBO or BBO crystal;

当所述的非线性倍频晶体选择采用单一非线性晶体直接输出的方式时,所述的非线性倍频晶体为一具有多周期光学超晶格结构的周期极化铌酸锂晶体,在同一晶体中具有多种极化周期,能够实现在同一块晶体中完成激光的四倍频。When the nonlinear frequency doubling crystal is selected as the direct output mode of a single nonlinear crystal, the nonlinear frequency doubling crystal is a periodically polarized lithium niobate crystal with a multi-period optical superlattice structure. There are various polarization periods in the crystal, which can realize the quadruple frequency of the laser in the same crystal.

本发明基于掺铥离子晶体的全固态蓝绿光激光器,包括激发源、增益介质、非线性倍频晶体、腔镜系统和调谐元件,首先产生波长1.85~2.1μm附近的中红外激光输出,随后通过非线性倍频技术将其转换为波长462.5~525nm的蓝绿光激光输出。The all-solid-state blue-green laser based on the thulium-doped ion crystal of the present invention includes an excitation source, a gain medium, a nonlinear frequency-doubling crystal, a cavity mirror system and a tuning element, and firstly generates a mid-infrared laser output with a wavelength of around 1.85-2.1 μm, and then It is converted into blue-green laser output with a wavelength of 462.5-525 nm by nonlinear frequency doubling technology.

所述的增益介质为掺铥离子晶体,选自铥掺杂氟化钇锂、氟化镥锂、氟化钆锂、氟化镧、氟化铅、LiCaAlF6、LiSrAlF6、钇铝石榴石、铝酸钇、铝酸钇钙、氧化钇、氧化镥、氧化钪等晶体。The gain medium is a thulium-doped ion crystal selected from thulium-doped yttrium lithium fluoride, lutetium lithium fluoride, gadolinium lithium fluoride, lanthanum fluoride, lead fluoride, LiCaAlF 6 , LiSrAlF 6 , yttrium aluminum garnet, Yttrium aluminate, yttrium calcium aluminate, yttrium oxide, lutetium oxide, scandium oxide and other crystals.

所述的掺铥离子晶体在工作时根据具体使用需求,加工成通光方向1~30mm长的棒,通光面为圆柱形、矩形或其他形式。The thulium-doped ion crystal is processed into a rod with a length of 1-30 mm in the light-transmitting direction according to specific use requirements during operation, and the light-transmitting surface is cylindrical, rectangular or other forms.

在基频光激光腔内加入调谐元件,从而实现输出波长可调谐的蓝绿光激光。优选的,调谐元件可以从如下方案中选取:棱镜、光栅、双折射滤波片或法布里-珀罗标准具。A tuning element is added in the fundamental frequency laser cavity, so as to realize the output wavelength tunable blue-green laser. Preferably, the tuning element can be selected from the following schemes: prism, grating, birefringent filter or Fabry-Perot etalon.

通过非线性倍频晶体将增益介质所输出的1.85~2.1μm激光转换为波长462.5~525nm的蓝绿光激光,根据非线性倍频晶体的选择,有如下两种优选的实施方法:The 1.85-2.1μm laser output from the gain medium is converted into a blue-green laser with a wavelength of 462.5-525nm through a nonlinear frequency doubling crystal. According to the choice of the nonlinear frequency doubling crystal, there are two preferred implementation methods as follows:

根据本发明,方法一为,分别选取两块非线性倍频晶体,通过一级倍频晶体将1.85~2.1μm基频激光先转换为0.925~1.05μm的一级倍频光,再通过二级倍频晶体将其转换为462.5~525nm蓝绿光激光。According to the present invention, the first method is to select two nonlinear frequency doubling crystals respectively, and firstly convert the 1.85-2.1 μm fundamental frequency laser into 0.925-1.05 μm first-order frequency-doubling light through the first-order frequency-doubling crystal, and then pass the second-order frequency doubling crystal. The frequency doubling crystal converts it into 462.5~525nm blue-green laser.

在方法一中,一级倍频晶体选取KTP、PPLN或LBO晶体,二级倍频晶体选取KTP、LBO或BBO晶体。In method 1, KTP, PPLN or LBO crystal is selected for the first frequency doubling crystal, and KTP, LBO or BBO crystal is selected for the second frequency doubling crystal.

在方法一中,腔镜系统包括M1镜、M2镜和M3镜,并且对其工作波长进行了镀膜优化。M1镜镀以1.85~2.1μm高反射和793nm高透过的介质膜,M2镜镀以1.85~2.1μm高反射、0.925~1.05μm高反射、793nm高反射和462.5~525nm高透过的介质膜,M3镜镀以1.85~2.1μm高反射、0.925~1.05μm高反射和462.5~525nm高反射的介质膜。In the first method, the cavity mirror system includes M 1 mirror, M 2 mirror and M 3 mirror, and the coating is optimized for its working wavelength. M 1 mirror is coated with 1.85-2.1μm high reflection and 793nm high transmission dielectric film, M 2 mirror is coated with 1.85~2.1μm high reflection, 0.925~1.05μm high reflection, 793nm high reflection and 462.5~525nm high transmission Dielectric film, M 3 mirror is coated with 1.85~2.1μm high reflection, 0.925~1.05μm high reflection and 462.5~525nm high reflection dielectric film.

在方法一中,激光器工作流程为:In method 1, the laser workflow is:

[1]激发源发射的泵浦光经过M1镜入射到增益介质,产生1.85~2.1μm基频激光;[1] The pump light emitted by the excitation source is incident on the gain medium through the M 1 mirror to generate a fundamental frequency laser of 1.85-2.1 μm;

[2]1.85~2.1μm基频激光经过M2镜反射入一级倍频晶体中,产生0.925~1.05μm一级倍频光;[2] The 1.85-2.1μm fundamental frequency laser is reflected into the first-order frequency doubling crystal through the M 2 mirror to generate 0.925-1.05μm first-order frequency-doubling light;

[3]0.925~1.05μm一级倍频光入射到二级倍频晶体中,从而产生462.5~525nm蓝绿光激光;[3] 0.925~1.05μm first-order frequency-doubling light is incident into the second-order frequency-doubling crystal, thereby generating 462.5~525nm blue-green laser light;

[4]462.5~525nm蓝绿光激光经过M2镜的反射,经由M2镜输出。[4] The 462.5-525nm blue-green laser is reflected by the M 2 mirror, and then output through the M 2 mirror.

根据本发明,方法二为,选取单一的非线性倍频晶体,能够直接将增益介质所输出的1.85~2.1μm基频激光转换为波长462.5~525nm的蓝绿光激光。According to the present invention, the second method is to select a single nonlinear frequency doubling crystal, which can directly convert the 1.85-2.1 μm fundamental frequency laser output by the gain medium into a blue-green laser with a wavelength of 462.5-525 nm.

在方法二中,非线性倍频晶体为一具有多周期光学超晶格结构的周期极化铌酸锂晶体,在同一晶体中具有多种极化周期,能够实现在同一块晶体中完成激光的四倍频。In the second method, the nonlinear frequency doubling crystal is a periodically polarized lithium niobate crystal with a multi-period optical superlattice structure, and the same crystal has multiple polarization periods, which can realize the laser beam laser in the same crystal. Quadruple frequency.

在方法二中,腔镜系统包括M1镜、M2镜和M3镜,其镀膜优化与方法一中的相同。In method 2, the cavity mirror system includes M 1 mirror, M 2 mirror and M 3 mirror, and its coating optimization is the same as that in method 1.

在方法二中,激光器工作流程为:In Method 2, the laser workflow is:

[1]激发源发射的泵浦光经过M1镜入射到增益介质,产生1.85~2.1μm基频激光;[1] The pump light emitted by the excitation source is incident on the gain medium through the M 1 mirror to generate a fundamental frequency laser of 1.85-2.1 μm;

[2]1.85~2.1μm激光通过M2镜反射入非线性倍频晶体中,产生462.5~525nm蓝绿光激光;[2] The 1.85~2.1μm laser is reflected into the nonlinear frequency doubling crystal through the M 2 mirror to generate 462.5~525nm blue-green laser;

[3]462.5~525nm蓝绿光在M2与M3组成的腔体中震荡后,最终激光经过M2镜输出。[3] After 462.5~525nm blue-green light oscillates in the cavity composed of M 2 and M 3 , the final laser is output through the M 2 mirror.

上述的基于掺铥离子晶体的全固态蓝绿光激光器,所述的制冷系统为水循环制冷、风冷或半导体制冷,能够有效排散激光器工作中产生的热量,保障正常工作。In the above-mentioned all-solid-state blue-green laser based on thulium ion crystal, the refrigeration system is water cycle refrigeration, air-cooled or semiconductor refrigeration, which can effectively dissipate the heat generated during the operation of the laser and ensure normal operation.

上述的基于掺铥离子晶体的全固态蓝绿光激光器,所述的控制系统为电流控制与稳定系统,能够保障泵浦激光器的输出功率稳定,进而提高蓝绿光激光器工作的稳定性。In the above-mentioned all-solid-state blue-green laser based on thulium ion crystal, the control system is a current control and stabilization system, which can ensure the stability of the output power of the pump laser, thereby improving the working stability of the blue-green laser.

与现有的蓝绿光激光器相比,本发明的有益效果:Compared with the existing blue-green laser, the present invention has the following beneficial effects:

1.掺铥晶体品种丰富,中红外发射波长多样,有利于实现倍频后多种波长的蓝绿光激光发射;1. The variety of thulium-doped crystals is rich, and the mid-infrared emission wavelengths are diverse, which is conducive to the realization of blue-green laser emission of various wavelengths after frequency doubling;

2.掺铥晶体具有较宽的发射光谱,配合调谐元件可以实现激光的输出波长在一定范围内可调节;2. The thulium-doped crystal has a wide emission spectrum, and with the tuning element, the output wavelength of the laser can be adjusted within a certain range;

3.掺铥晶体具有优良的热性能与损伤阈值,在产生大能量、短脉冲、高峰值功率、高重频的激光上具有显著优势;3. Thulium-doped crystals have excellent thermal properties and damage thresholds, and have significant advantages in generating large-energy, short-pulse, high-peak power, and high-repetition lasers;

4.晶体能够实现高浓度的铥离子掺杂,可以有效降低所使用的激光增益介质尺寸,有利于激光器的小型化应用。4. The crystal can achieve high-concentration thulium ion doping, which can effectively reduce the size of the laser gain medium used, which is beneficial to the miniaturized application of the laser.

附图说明Description of drawings

图1为本发明基于掺铥离子晶体的全固态蓝绿光激光器实施例1的结构图1 is a structural diagram of Embodiment 1 of an all-solid-state blue-green laser based on thulium-doped ion crystals of the present invention

图2为本发明基于掺铥离子晶体的全固态蓝绿光激光器实施例2的结构图2 is a structural diagram of Embodiment 2 of an all-solid-state blue-green laser based on thulium-doped ion crystals of the present invention

图3为本发明基于掺铥离子晶体的全固态蓝绿光激光器实施例3的结构图。3 is a structural diagram of Embodiment 3 of an all-solid-state blue-green laser based on a thulium ion crystal according to the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清晰,以下结合附图及实施例具体说明本发明。此处实施例仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention is specifically described below with reference to the accompanying drawings and embodiments. The embodiments herein are only used to explain the present invention, and are not intended to limit the present invention.

实施例1Example 1

使用掺铥氧化钪晶体作为增益介质,利用两块非线性倍频晶体倍频的500~525nm可调谐蓝绿光激光器。A thulium-doped scandium oxide crystal is used as the gain medium, and a 500-525 nm tunable blue-green laser with frequency doubling of two nonlinear frequency doubling crystals is used.

结构如图1所示,由激发源1,增益介质2、非线性倍频晶体3、腔镜系统、调谐元件M4、制冷系统、控制系统按照光路顺序组成。The structure is shown in Figure 1, which consists of excitation source 1, gain medium 2, nonlinear frequency doubling crystal 3, cavity mirror system, tuning element M4, refrigeration system, and control system in the order of the optical path.

激发源1是发射波长为793nm的激光二极管。增益介质2为掺杂浓度为5at.%的Tm:Sc2O3晶体,沿着通光方向c向切割成3x3x5 mm的方形激光棒,端面抛光。非线性倍频晶体3分为一级倍频晶体31KTP和二级倍频晶体32LBO。Excitation source 1 is a laser diode with an emission wavelength of 793 nm. The gain medium 2 is a Tm:Sc 2 O 3 crystal with a doping concentration of 5 at.%, which is cut into a 3x3x5 mm square laser rod along the light passing direction c, and the end faces are polished. The nonlinear frequency doubling crystal 3 is divided into a primary frequency doubling crystal 31KTP and a secondary frequency doubling crystal 32LBO.

激光腔体采用折叠腔设计,使用三个带有镀膜的腔镜。平面镜M1镀以2.0~2.1μm高反射和793nm高透过的介质膜,平凹腔镜M2镀以2.0~2.1μm高反射、1.0~1.05μm高反射、793nm高反射和500~525nm高透过的介质膜,平凹后腔镜M3镀以2.0~2.1μm高反射、1.0~1.05μm高反射和500~525nm高反射的介质膜。The laser cavity adopts a folded cavity design and uses three cavity mirrors with coatings. The plane mirror M 1 is coated with a dielectric film of 2.0~2.1μm high reflection and 793nm high transmission, and the plano-concave cavity mirror M 2 is coated with 2.0~2.1μm high reflection, 1.0~1.05μm high reflection, 793nm high reflection and 500~525nm high reflection For the transmitted dielectric film, the plano-concave rear cavity mirror M 3 is coated with a dielectric film of 2.0-2.1μm high reflection, 1.0-1.05μm high reflection and 500-525nm high reflection.

调谐元件M4采用石英双折射滤波片,以布儒斯特角插入在平凹腔镜M2镜之前,通过转动石英片角度即可实现基频光波长的调谐,进而实现最终输出的蓝绿激光波长的调谐。 The tuning element M4 adopts a quartz birefringence filter, which is inserted before the plano-concave cavity mirror M2 mirror at the Brewster angle, and the wavelength of the fundamental frequency light can be tuned by rotating the angle of the quartz plate, thereby realizing the final output blue-green. Tuning of the laser wavelength.

激发源、增益介质、非线性倍频晶体、腔镜与调谐元件校准后摆放在同一准直轴线上。激发源发射的泵浦光经过准直与聚焦后通过M1镜入射到增益介质,产生2.0~2.1μm基频激光,基频激光通过调谐元件M4即可实现波长的调谐。基频激光经过输出M2镜反射入一级倍频晶体中,产生1.0~1.05μm一级倍频光。一级倍频光入射到二级倍频晶体中,从而产生500~525nm蓝绿光激光。最终,500~525nm蓝绿光激光经过M3镜的反射,经由平凹腔镜M2输出。The excitation source, gain medium, nonlinear frequency doubling crystal, cavity mirror and tuning element are placed on the same collimation axis after calibration. The pump light emitted by the excitation source is collimated and focused and then incident on the gain medium through the M 1 mirror to generate a 2.0-2.1 μm fundamental frequency laser. The wavelength of the fundamental frequency laser can be tuned by the tuning element M 4 . The fundamental frequency laser is reflected into the first-order frequency-doubling crystal through the output M 2 mirror to generate the first-order frequency-doubling light of 1.0-1.05μm. The first-order frequency-doubling light is incident on the second-order frequency-doubling crystal, thereby generating 500-525nm blue-green laser light. Finally, the 500-525nm blue-green laser is reflected by the M 3 mirror and output through the plano-concave cavity mirror M 2 .

实施例2Example 2

使用掺铥氟化镧晶体作为增益介质,利用一块具有多周期光学超晶格结构的周期极化铌酸锂晶体倍频的462.5~500nm可调谐蓝绿光激光器。A thulium-doped lanthanum fluoride crystal is used as the gain medium, and a 462.5-500 nm tunable blue-green laser with frequency doubling of a periodically polarized lithium niobate crystal with a multi-period optical superlattice structure is used.

结构如图2所示,由激发源1、增益介质2、非线性倍频晶体3、腔镜系统、调谐元件、制冷系统、控制系统按照光路顺序组成。The structure is shown in Figure 2, which consists of excitation source 1, gain medium 2, nonlinear frequency doubling crystal 3, cavity mirror system, tuning element, refrigeration system, and control system in the order of the optical path.

激发源1是发射波长为793nm的激光二极管。增益介质2为掺杂浓度为4at.%的Tm:LaF3晶体,沿着通光方向c向切割成3x3x8 mm的方形激光棒,端面抛光。非线性倍频晶体为一经过特殊极化周期设计的铌酸锂晶体,在同一晶体中具有两种极化周期,能够实现在同一块晶体中完成对1.85~2.0μm激光的四倍频,从而输出蓝绿光激光。Excitation source 1 is a laser diode with an emission wavelength of 793 nm. The gain medium 2 is a Tm:LaF 3 crystal with a doping concentration of 4 at.%, which is cut into a 3x3x8 mm square laser rod along the light-passing direction c, and the end faces are polished. The nonlinear frequency doubling crystal is a lithium niobate crystal designed with a special polarization period. It has two polarization periods in the same crystal, which can realize the four-frequency doubling of the 1.85-2.0μm laser in the same crystal. Output blue-green laser.

激光腔体采用折叠腔设计,使用三个带有镀膜的腔镜。平面镜M1镀以1.85~2.0μm高反射和793nm高透过的介质膜,平凹腔镜M2镀以1.85~2.0μm高反射、925~1000nm高反射、793nm高反射和462.5~500nm高透过的介质膜,平凹后腔镜M3镀以1.95~2.0μm高反射、925~1000nm高反射和462.5~500nm高反射的介质膜。The laser cavity adopts a folded cavity design and uses three cavity mirrors with coatings. The plane mirror M 1 is coated with a dielectric film with high reflection of 1.85-2.0μm and high transmission of 793nm, and the plano-concave cavity mirror M 2 is coated with high reflection of 1.85-2.0μm, high reflection of 925-1000nm, high reflection of 793nm and high transmission of 462.5-500nm. After passing through the dielectric film, the plano-concave rear cavity mirror M 3 is coated with a dielectric film of 1.95-2.0 μm high reflection, 925-1000 nm high reflection and 462.5-500 nm high reflection.

调谐元件M4采用石英双折射滤波片,以布儒斯特角插入在M2镜之前,通过转动石英片角度即可实现基频光波长的调谐,进而实现最终输出的蓝绿激光波长的调谐。Tuning element M 4 adopts quartz birefringence filter, which is inserted in front of M 2 mirror at the Brewster angle, and the wavelength of fundamental frequency light can be tuned by rotating the angle of the quartz plate, and then the final output blue-green laser wavelength can be tuned. .

激发源、增益介质、非线性倍频晶体与腔镜校准后摆放在同一准直轴线上。激发源发射的泵浦光经过准直与聚焦后通过M1镜入射到增益介质,产生1.85~2.0μm基频激光。基频激光经过M2镜反射后入射非线性倍频晶体中,在周期极化铌酸锂晶体中进行频率变化,输出462.5~500nm蓝绿光激光。最终,462.5~500nm蓝绿光激光经过M3镜的反射,经由平凹腔镜M2输出。The excitation source, gain medium, nonlinear frequency doubling crystal and cavity mirror are placed on the same collimation axis after calibration. The pump light emitted by the excitation source is collimated and focused and then incident on the gain medium through the M 1 mirror to generate a 1.85-2.0 μm fundamental frequency laser. After the fundamental frequency laser is reflected by the M 2 mirror, it is incident on the nonlinear frequency doubling crystal, and the frequency is changed in the periodically polarized lithium niobate crystal, and the blue-green laser of 462.5-500 nm is output. Finally, the 462.5-500nm blue-green laser is reflected by the M 3 mirror and output through the plano-concave cavity mirror M 2 .

上述蓝绿光激光产生装置实施例1和2的激发源、增益介质和非线性倍频晶体均通过水循环系统进行有效制冷,排散工作过程中产生的热量。激发源通过控制系统调节电流和输出功率。The excitation source, gain medium and nonlinear frequency-doubling crystal of the above blue-green laser generating device Embodiments 1 and 2 are all effectively cooled by the water circulation system to dissipate the heat generated during the working process. The excitation source regulates the current and output power through the control system.

实施例3Example 3

使用掺铥铝酸钇钙晶体作为增益介质2,利用两块非线性倍频晶体倍频的486.1nm蓝光激光器。Using thulium-doped yttrium calcium aluminate crystal as gain medium 2, a 486.1nm blue laser with frequency doubling of two nonlinear frequency doubling crystals is used.

结构如图3所示,由激发源1、增益介质2、非线性倍频晶体3、腔镜系统、制冷系统、控制系统按照光路顺序组成。The structure is shown in Figure 3, which consists of excitation source 1, gain medium 2, nonlinear frequency doubling crystal 3, cavity mirror system, refrigeration system, and control system in the order of the optical path.

激发源1是发射波长为793nm的激光二极管。增益介质2为掺杂浓度为4at.%的Tm:CaYAlO4晶体,沿着通光方向a向切割成3x3x6 mm的方形激光棒,端面抛光。非线性倍频晶体3分为一级倍频晶体31PPLN和二级倍频晶体32LBO。Excitation source 1 is a laser diode with an emission wavelength of 793 nm. The gain medium 2 is a Tm:CaYAlO 4 crystal with a doping concentration of 4 at.%, which is cut into a 3x3x6 mm square laser rod along the light-passing direction a, and the end faces are polished. The nonlinear frequency doubling crystal 3 is divided into a first-level frequency-doubling crystal 31PPLN and a second-level frequency-doubling crystal 32LBO.

激光腔体采用折叠腔设计,使用三个带有镀膜的腔镜。平面镜M1镀以1944.4nm高反射和793nm高透过的介质膜,平凹腔镜M2镀以1944.4nm高反射、972.2nm高反射、793nm高反射和486.1nm高透过的介质膜,平凹后腔镜M3镀以1944.4nm高反射、972.2nm高反射和486.1nm高反射的介质膜。The laser cavity adopts a folded cavity design and uses three cavity mirrors with coatings. The plane mirror M 1 is coated with a dielectric film with high reflection at 1944.4nm and high transmission at 793 nm, and the plano-concave cavity mirror M 2 is coated with a dielectric film with high reflection at 1944.4 nm, high reflection at 972.2 nm, high reflection at 793 nm and high transmission at 486.1 nm. The concave cavity mirror M 3 is coated with dielectric films with high reflection at 1944.4nm, high reflection at 972.2nm and high reflection at 486.1nm.

激发源、增益介质、非线性倍频晶体、腔镜与调谐元件校准后摆放在同一准直轴线上。激发源发射的泵浦光经过准直与聚焦后通过M1镜入射到增益介质,产生1944.4nm基频激光。基频激光经过输出M2镜反射入一级倍频晶体中,产生972.2nm一级倍频光。一级倍频光入射到二级倍频晶体中,从而产生486.1nm蓝光激光。最终,486.1nm蓝光激光经过平凹后腔镜M3的反射,经由平凹腔镜M2输出。The excitation source, gain medium, nonlinear frequency doubling crystal, cavity mirror and tuning element are placed on the same collimation axis after calibration. The pump light emitted by the excitation source is collimated and focused and then incident on the gain medium through the M 1 mirror to generate a 1944.4 nm fundamental frequency laser. The fundamental frequency laser is reflected into the first-order frequency-doubling crystal through the output M 2 mirror to generate the first-order frequency-doubling light of 972.2nm. The first-order frequency-doubling light is incident on the second-order frequency-doubling crystal, thereby producing a 486.1 nm blue light laser. Finally, the 486.1nm blue laser is reflected by the plano-concave rear cavity mirror M 3 and output through the plano-concave cavity mirror M 2 .

实验表明,本发明具有下列优点:Experiments show that the present invention has the following advantages:

1.掺铥晶体品种丰富,中红外发射波长多样,有利于实现倍频后多种波长的蓝绿光激光发射;1. The variety of thulium-doped crystals is rich, and the mid-infrared emission wavelengths are diverse, which is conducive to the realization of blue-green laser emission of various wavelengths after frequency doubling;

2.掺铥晶体具有较宽的发射光谱,配合调谐元件可以实现激光的输出波长在一定范围内可调节;2. The thulium-doped crystal has a wide emission spectrum, and with the tuning element, the output wavelength of the laser can be adjusted within a certain range;

3.掺铥晶体具有优良的热性能与损伤阈值,在产生大能量、短脉冲、高峰值功率、高重频的激光上具有显著优势;3. Thulium-doped crystals have excellent thermal properties and damage thresholds, and have significant advantages in generating large-energy, short-pulse, high-peak power, and high-repetition lasers;

4.晶体能够实现高浓度的铥离子掺杂,可以有效降低所使用的激光增益介质尺寸,有利于激光器的小型化应用。4. The crystal can achieve high-concentration thulium ion doping, which can effectively reduce the size of the laser gain medium used, which is beneficial to the miniaturized application of the laser.

该激光器具有发射波长丰富、激光波长可调谐、输出功率高、稳定性高、结构简单和体积小等优点。The laser has the advantages of rich emission wavelength, tunable laser wavelength, high output power, high stability, simple structure and small size.

Claims (6)

1. The utility model provides an all solid-state bluish-green laser based on thulium ion crystal of mixing, can output 462.5 ~ 525nm bluish-green laser, its characterized in that: comprises an excitation source (1), a gain medium (2) and a non-excitation sourceLinear frequency doubling crystal (3), cavity mirror system and tuning element (M)4) The cavity mirror system comprises a plane mirror (M)1) Plano-concave mirror (M)2) Plano-concave rear mirror (M)3);
The plane mirrors (M) are arranged along the laser output direction of the excitation source (1) in sequence1) Gain medium (2), tuning element (M)4) Plano-concave mirror (M)2) (ii) a At an angle to the previous light path in said plano-concave mirror (M)2) The non-linear frequency doubling crystal (3) and a plano-concave rear cavity mirror (M) are arranged in sequence in the direction of the reflection light path3) (ii) a The plane mirror (M)1) Plano-concave mirror (M)2) Plano-concave rear mirror (M)3) The folded resonant cavity is formed;
the plane mirror (M)1) Plano-concave mirror (M)2) Plano-concave rear mirror (M)3) Respectively coated at their operating wavelengths, said flat mirrors (M)1) Plating a dielectric film with high reflection of 1.85-2.1 mu m and high transmission of 793 nm; the plano-concave mirror (M)2) Plating a dielectric film with high reflection of 1.85-2.1 μm, high reflection of 0.925-1.05 μm, high reflection of 793nm and high transmission of 462.5-525 nm; the plano-concave rear cavity mirror (M)3) Plating a dielectric film with high reflection of 1.85-2.1 μm, high reflection of 0.925-1.05 μm and high reflection of 462.5-525 nm.
2. The thulium-doped ion crystal based all-solid-state blue-green laser according to claim 1, wherein the excitation source (1) is a laser diode laser with an output wavelength around 793 nm;
3. the thulium-doped ionic crystal-based all-solid-state blue-green laser according to claim 1, wherein the gain medium (2) is a thulium-doped ionic crystal;
4. the thulium-doped ion crystal-based all-solid-state blue-green laser according to claim 1, wherein the nonlinear frequency doubling crystal (3) can be selected from a combination of a first-order frequency doubling crystal and a second-order frequency doubling crystal, or a direct output mode of a single nonlinear crystal;
5. the thulium-doped crystal based all-solid-state blue-green laser according to claim 4, wherein when the nonlinear frequency doubling crystal (3) is selected to adopt a combination of a first frequency doubling crystal and a second frequency doubling crystal, the first frequency doubling crystal is selected from KTP, PPLN or LBO crystal, and the second frequency doubling crystal is selected from KTP, LBO or BBO crystal;
6. the all-solid-state blue-green laser based on thulium-doped ion crystal as claimed in claim 4, wherein when the nonlinear frequency doubling crystal (3) selects the mode of direct output of single nonlinear crystal, the nonlinear frequency doubling crystal is a periodically polarized lithium niobate crystal with a multi-period optical superlattice structure, and has multiple polarization periods in the same crystal, thereby achieving the quadruple frequency of laser in the same crystal.
CN202010979169.1A 2020-09-17 2020-09-17 All-solid-state blue-green laser based on thulium-doped ion crystal Pending CN114204396A (en)

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