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CN113938051A - Two parallel bending oscillator composite actuation stepping piezoelectric driver and its working method - Google Patents

Two parallel bending oscillator composite actuation stepping piezoelectric driver and its working method Download PDF

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CN113938051A
CN113938051A CN202111155880.6A CN202111155880A CN113938051A CN 113938051 A CN113938051 A CN 113938051A CN 202111155880 A CN202111155880 A CN 202111155880A CN 113938051 A CN113938051 A CN 113938051A
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bending
piezoelectric vibrator
mover
stepping
vibrator
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CN113938051B (en
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王良
王鹤然
郭丹丹
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Northeast Electric Power University
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Northeast Dianli University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/0015Driving devices, e.g. vibrators using only bending modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

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Abstract

本发明两平行弯曲振子复合致动步进式压电驱动器包括:第一弯曲压电振子、安装座、V形连杆、动子、第二弯曲压电振子、滑动副,通过两平行弯曲振子复合致动步进式压电驱动器交替工作,实现大行程步进式运动输出,具有运动行程大、动子不会产生运动回退现象,有效改善动子的输出特性;在其工作方法中,致动过程可实现大行程步进式运动输出,直线动子可实现向左或向右运动以及旋转动子顺时针或逆时针运动;有效改善动子的输出特性,具有行程大、无位移回退现象,压电陶瓷元件少、激励信号数少、控制系统简单。

Figure 202111155880

The compound actuation stepping piezoelectric driver of two parallel bending vibrators of the present invention comprises: a first bending piezoelectric vibrator, a mounting seat, a V-shaped connecting rod, a mover, a second bending piezoelectric vibrator, and a sliding pair. The compound actuation stepping piezoelectric driver works alternately to realize the large-stroke stepping motion output, which has a large motion stroke and no movement back of the mover, which effectively improves the output characteristics of the mover; in its working method, The actuation process can realize large-stroke step-by-step motion output, and the linear mover can move left or right, and the rotary mover can move clockwise or counterclockwise; it can effectively improve the output characteristics of the mover, with large stroke and no displacement return. There are fewer piezoelectric ceramic components, fewer excitation signals, and a simple control system.

Figure 202111155880

Description

Two-parallel bending vibrator composite actuation stepping piezoelectric driver and working method thereof
Technical Field
The invention relates to the technical field of piezoelectric drive, in particular to a compound actuation stepping piezoelectric driver with two parallel bending vibrators and a working method thereof.
Background
The piezoelectric driver utilizes the inverse piezoelectric effect of a piezoelectric ceramic material, excites the piezoelectric ceramic-metal composite stator to generate corresponding vibration or deformation by applying an electric signal in a specific form, further realizes mechanical motion output by the friction action between the stator and the rotor, and has the outstanding characteristics of no electromagnetic interference, direct drive, power failure self-locking and the like compared with an electromagnetic motor. According to different vibration states during working, the conventional piezoelectric drivers can be mainly divided into a resonance type and a non-resonance type, wherein the non-resonance type piezoelectric driver has the technical advantages of high resolution, small abrasion and the like.
The non-resonance type piezoelectric actuator mainly comprises three types, namely a direct-drive type piezoelectric actuator, an inertia type piezoelectric actuator and an inchworm type piezoelectric actuator, wherein the motion stroke of the direct-drive type piezoelectric actuator is limited by the maximum deformation of a piezoelectric ceramic element, is usually in the order of mum, and is limited in application in a large-stroke occasion; the inertial type piezoelectric driver and the inchworm type piezoelectric driver have the advantage of large movement stroke, but the inertial type piezoelectric driver usually causes the motion rollback phenomenon of the rotor in the working process due to the actuation principle of the inertial type piezoelectric driver, so that the output characteristic is degraded, while the inchworm type piezoelectric driver usually comprises at least three piezoelectric ceramic elements, so that the required excitation signals are more, the requirement on a driving power supply is high, and the integral structure and the control system are more complex.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention designs the two parallel bending vibrators for compositely actuating the stepping piezoelectric driver, and the two parallel bending vibrators are compositely actuated to actuate the stepping piezoelectric driver, so that the large-stroke stepping motion output can be realized in the actuating process, the output characteristic of the rotor can be effectively improved, and the output step pitch of the rotor is increased.
One technical scheme for realizing the invention is as follows: two parallel bending vibrator composite actuation marching type piezoelectric actuator, characterized by, it includes: first crooked piezoelectric vibrator 1, mount pad 2, V-arrangement connecting rod 3, active cell 4, the crooked piezoelectric vibrator 6 of second, slide pair 7 establish drive foot 3.1 in the intersection of two down tube of V-arrangement connecting rod 3, drive foot 3.1 appearance be the semi-cylindrical surface two down tube tip of V-arrangement connecting rod 3 set up the same connecting seat 3.3 respectively, first crooked piezoelectric vibrator 1 and the crooked piezoelectric vibrator 6 of second one end link firmly with connecting seat 3.3 respectively, first crooked piezoelectric vibrator 1 and the crooked piezoelectric vibrator 6 parallel arrangement of second, the other end of first crooked piezoelectric vibrator 1 and the crooked piezoelectric vibrator 6 of second link firmly with mount pad 2 slide pair 7 and drive foot 3.1 between set up active cell 4, the upper and lower track of active cell 4 contact slide pair 7 and drive foot 3.1 respectively.
Further, the first bending piezoelectric vibrator 1 or the second bending piezoelectric vibrator 6 includes: the piezoelectric vibrator comprises an even number of pieces of square piezoelectric ceramics 1.1 and a vibrator end cover 1.2, wherein the even number of pieces of square piezoelectric ceramics 1.1 comprise a left polarization subarea and a right polarization subarea which have opposite polarization directions.
Further, the V-shaped link 3 includes: the driving foot 3.1, the flexible hinge 3.2 and the connecting seat 3.3, and the flexible hinge 3.2 is respectively arranged on the two inclined rods of the V-shaped connecting rod 3.
Furthermore, the sliding pair 7 is a guide rail sliding block.
Further, the mover 4 may be a linear mover or a rotary mover.
The other technical scheme for realizing the invention is as follows: the working method of the two parallel bending vibrators combined actuation stepping piezoelectric driver is characterized by comprising the following steps:
1) the second bending piezoelectric vibrator 6 applies negative voltage and bends rightwards, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage and bends leftwards, and the driving foot 3.1 moves to the lowest point in the vertical direction to press the rotor 4;
2) the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, and meanwhile, the first bending piezoelectric vibrator 1 applies negative voltage to bend rightwards, and the driving foot 3.1 moves to the limit position on the right side in the horizontal direction;
3) the second bending piezoelectric vibrator 6 applies positive voltage to bend leftwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 keeps unchanged, and the driving foot 3.1 moves to the highest point in the vertical direction;
4) the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage to bend leftwards, and the driving foot 3.1 moves to the left limit position in the horizontal direction;
5) the second bending piezoelectric vibrator 6 applies positive voltage to bend rightwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 is kept unchanged, and the driving foot 3-1 moves to the lowest point in the vertical direction;
6) the steps 2) to 5) are a complete driving process, and the steps 2) to 5) are repeated to realize the large-stroke step-by-step driving of the rotor 4 to the right.
The two parallel bending vibrators of the invention are combined to actuate the stepping piezoelectric driver, and the beneficial effects are as follows:
the two parallel bending vibrators of the two parallel bending vibrator composite actuating stepping piezoelectric driver can realize large-stroke stepping motion output through the actuating process, and have the outstanding characteristics of large motion stroke, no motion rollback phenomenon of a rotor, effective improvement of the output characteristic of the rotor, few piezoelectric ceramic elements, few excitation signals, simple integral structure, simple control system and the like.
Drawings
FIG. 1 is a front view of a two parallel bending vibrator compound actuation step piezoelectric driver;
FIG. 2 is a schematic diagram of excitation signals required by the operation of a two-parallel bending vibrator composite actuation stepping piezoelectric driver;
in the figure: 1. the piezoelectric vibrator comprises a first bending piezoelectric vibrator, 1.1 even number pieces of square piezoelectric ceramics, 1.2 vibrator end covers, 2 an installation seat, 3V-shaped connecting rods, 3.1 driving feet, 3.2 flexible hinges, 3.3 connecting seats, 4 movers, 5 bolts, 6 second bending piezoelectric vibrators and 7 sliding pairs.
Detailed Description
The present invention will be described in further detail with reference to the accompanying fig. 1-2 and the embodiments described herein, which are provided for illustration only and are not intended to limit the invention.
As shown in fig. 1, the two-parallel bending vibrator composite actuation stepping piezoelectric driver comprises two bending piezoelectric vibrators 1 arranged in parallel, a mounting base 2, a V-shaped connecting rod 3 and a rotor 4; the bending piezoelectric vibrator 1 comprises an even number of square piezoelectric ceramics 1.1 and a vibrator end cover 1.2, the even number of square piezoelectric ceramics 1.1 comprises a left polarization subarea and a right polarization subarea which have opposite polarization directions, so that when electric signal excitation is applied, one side subarea becomes thin while the other side subarea becomes thick, the whole square piezoelectric ceramics 1.1 generates bending deformation, the polarization subareas corresponding to two adjacent square piezoelectric ceramics 1.1 have opposite polarization directions, so that the whole bending piezoelectric vibrator generates bending deformation when the same signal excitation is applied, and a through hole is formed in the center position of the square piezoelectric ceramics; the top and the bottom of the vibrator end cover 1.2 are respectively provided with a threaded hole; the mounting base 2 is provided with three through holes along the front and back directions thereof for realizing the integral mounting and fixing of the piezoelectric driver, and is provided with two through holes along the up and down directions thereof; the bolt 5 penetrates through holes in the vertical direction of the mounting seat 2 and through holes of even number of pieces of square piezoelectric ceramics 1.1 to be in threaded connection with the vibrator end cover 1.2, so that clamping and mounting of the even number of pieces of square piezoelectric ceramics 1.1 are realized, and the bending piezoelectric vibrator 1 is formed; the V-shaped connecting rod 3 is characterized in that through holes are formed in connecting seats 3.3 at the tops of two sides of the V-shaped connecting rod 3, bolts penetrate through the through holes to be in threaded connection with a vibrator end cover 1.2, installation of the V-shaped connecting rod is achieved, a driving foot 3.1 is arranged at the intersection of two inclined rods of the V-shaped connecting rod 3, the driving foot 3.1 is in contact with a rotor 4, a flexible hinge 3.2 is arranged on the two inclined rods of the V-shaped connecting rod 3 close to the intersection of the two inclined rods, the angle of the intersection of the V-shaped connecting rod 3 is larger than 0 degree and smaller than 180 degrees, a rotor 4 is arranged between the sliding pair 7 and the driving foot 3.1, upper and lower tracks of the rotor 4 are in contact with the sliding pair 7 and the driving foot 3.1 respectively, the rotor 4 is a linear rotor or a rotary rotor, linear or rotary motion output is correspondingly achieved, the driving foot 3.1 adopts an arc surface, the linear contact is in line contact with the rotor 4, and the sliding pair 7 is a guide rail slider.
As shown in fig. 2, the linear mover moves leftwards or rightwards and the rotary mover moves clockwise or anticlockwise, wherein the operation method of the linear mover is illustrated as the rightward movement,
a working method of a two-parallel bending vibrator composite actuation stepping piezoelectric driver comprises the following steps:
1) (0-1T/4): the second bending piezoelectric vibrator 6 applies negative voltage and bends rightwards, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage and bends leftwards, and the driving foot 3.1 moves to the lowest point in the vertical direction to press the rotor 4;
2) (1T/4-2T/4): the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, and meanwhile, the first bending piezoelectric vibrator 1 applies negative voltage to bend rightwards, and the driving foot 3.1 moves to the limit position on the right side in the horizontal direction;
3 (2T/4-3T/4)): the second bending piezoelectric vibrator 6 applies positive voltage to bend leftwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 keeps unchanged, and the driving foot 3.1 moves to the highest point in the vertical direction;
4) (3T/4-T): the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage to bend leftwards, and the driving foot 3.1 moves to the left limit position in the horizontal direction;
5) (T-5T/4): the second bending piezoelectric vibrator 6 applies positive voltage to bend rightwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 is kept unchanged, and the driving foot 3-1 moves to the lowest point in the vertical direction;
6) the steps 2) to 5) are a complete driving process, and the steps 2) to 5) are repeated to realize the large-stroke step-by-step driving of the rotor 4 to the right.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.

Claims (6)

1.两平行弯曲振子复合致动步进式压电驱动器,其特征是,它包括:第一弯曲压电振子(1)、安装座(2)、V形连杆(3)、动子(4)、第二弯曲压电振子(6)、滑动副(7),在所述V形连杆(3)两个斜杆交汇处设驱动足(3.1),在所述V形连杆(3)两个斜杆端部分别设置相同的连接座(3.3),所述的第一弯曲压电振子(1)和第二弯曲压电振子(6)的一端分别同连接座(3.3)固连,所述的第一弯曲压电振子(1)和第二弯曲压电振子(6)平行设置,所述的第一弯曲压电振子(1)和第二弯曲压电振子(6)的另一端与安装座(2)固连,在所述的滑动副(7)与驱动足(3.1)间设置动子(4),所述的动子(4)的上、下轨道分别接触滑动副(7)与驱动足(3.1)。1. The compound actuation stepping piezoelectric driver of two parallel bending vibrators is characterized in that it comprises: a first bending piezoelectric vibrator (1), a mounting seat (2), a V-shaped connecting rod (3), a mover ( 4), the second bending piezoelectric vibrator (6), the sliding pair (7), a driving foot (3.1) is provided at the intersection of the two inclined rods of the V-shaped connecting rod (3), and the V-shaped connecting rod (3) is provided with a driving foot (3.1). 3) The ends of the two inclined rods are respectively provided with the same connection seat (3.3), and one end of the first bending piezoelectric vibrator (1) and the second bending piezoelectric vibrator (6) are respectively fixed with the connection seat (3.3). connected, the first bending piezoelectric vibrator (1) and the second bending piezoelectric vibrator (6) are arranged in parallel, and the first bending piezoelectric vibrator (1) and the second bending piezoelectric vibrator (6) are The other end is fixedly connected with the mounting seat (2), a mover (4) is arranged between the sliding pair (7) and the driving foot (3.1), and the upper and lower rails of the mover (4) contact and slide respectively The pair (7) and the driving foot (3.1). 2.根据权利要求1所述的两平行弯曲振子复合致动步进式压电驱动器,其特征是,所述的第一弯曲压电振子(1)或第二弯曲压电振子(6)包括:偶数片方形压电陶瓷(1.1)和振子端盖(1.2),偶数片方形压电陶瓷(1.1)包括左、右两个极化方向相反的极化分区。2. The stepping piezoelectric driver for compound actuation of two parallel bending vibrators according to claim 1, wherein the first bending piezoelectric vibrator (1) or the second bending piezoelectric vibrator (6) comprises: : Even-numbered square piezoelectric ceramics (1.1) and vibrator end caps (1.2), even-numbered square piezoelectric ceramics (1.1) include left and right polarization zones with opposite polarization directions. 3.根据权利要求1所述的两平行弯曲振子复合致动步进式压电驱动器,其特征是,所述的V形连杆(3)包括:驱动足(3.1)、柔性铰链(3.2)、连接座(3.3),在所述V形连杆(3)两个斜杆上分别设置柔性铰链(3.2)。3. The stepping piezoelectric driver for compound actuation of two parallel bending oscillators according to claim 1, wherein the V-shaped link (3) comprises: a driving foot (3.1), a flexible hinge (3.2) and a connecting seat (3.3), wherein flexible hinges (3.2) are respectively arranged on the two inclined rods of the V-shaped connecting rod (3). 4.根据权利要求1所述的两平行弯曲振子复合致动步进式压电驱动器,其特征是,所述的滑动副(7)为导轨滑块。4 . The stepping piezoelectric driver for compound actuation of two parallel bending oscillators according to claim 1 , wherein the sliding pair ( 7 ) is a guide rail slider. 5 . 5.根据权利要求1、权利要求2、权利要求3或权利要求4所述的两平行弯曲振子复合致动步进式压电驱动器,其特征是,所述动子(4)可为直线动子或旋转动子。5. The composite actuation stepping piezoelectric driver according to claim 1, claim 2, claim 3 or claim 4, wherein the mover (4) can be linearly moved mover or spinner. 6.根据权利要求1所述的两平行弯曲振子复合致动步进式压电驱动器的工作方法,其特征是,它包括以下步骤:6. The working method of two parallel bending vibrators compound actuation stepping piezoelectric driver according to claim 1, is characterized in that, it comprises the following steps: 1)第二弯曲压电振子6施加负电压向右弯曲,同时,第一弯曲压电振子1施加正电压向左弯曲,驱动足(3.1)运动到竖直方向最低点压紧动子4;1) The second bending piezoelectric vibrator 6 applies a negative voltage to bend to the right, and at the same time, the first bending piezoelectric vibrator 1 applies a positive voltage to bend to the left, and the driving foot (3.1) moves to the lowest point in the vertical direction to compress the mover 4; 2)第二弯曲压电振子6的电压保持不变,同时,第一弯曲压电振子1施加负电压向右弯曲,驱动足(3.1)运动到水平方向右侧极限位置;2) The voltage of the second bending piezoelectric vibrator 6 remains unchanged, and at the same time, the first bending piezoelectric vibrator 1 applies a negative voltage to bend to the right, and drives the foot (3.1) to move to the right limit position in the horizontal direction; 3)第二弯曲压电振子6施加正电压向左弯曲,同时,第一弯曲压电振子1的电压保持不变,驱动足(3.1)运动到竖直方向最高点;3) The second bending piezoelectric vibrator 6 applies a positive voltage to bend to the left, and at the same time, the voltage of the first bending piezoelectric vibrator 1 remains unchanged, and the driving foot (3.1) moves to the highest point in the vertical direction; 4)第二弯曲压电振子6的电压保持不变,同时,第一弯曲压电振子1施加正电压向左弯曲,驱动足(3.1)运动到水平方向左侧极限位置;4) The voltage of the second bending piezoelectric vibrator 6 remains unchanged, and at the same time, the first bending piezoelectric vibrator 1 applies a positive voltage to bend to the left, and drives the foot (3.1) to move to the left limit position in the horizontal direction; 5)第二弯曲压电振子6施加正电压向右弯曲,同时,第一弯曲压电振子1的电压保持不变,驱动足(3.1)运动到竖直方向的最低点;5) The second bending piezoelectric vibrator 6 applies a positive voltage to bend to the right, and at the same time, the voltage of the first bending piezoelectric vibrator 1 remains unchanged, and the driving foot (3.1) moves to the lowest point in the vertical direction; 6)步骤2)至步骤5)为一个完整的驱动过程,重复上述步骤2)至步骤5)可实现动子(4)向右大行程步进式驱动。6) Steps 2) to 5) are a complete driving process, and repeating the above steps 2) to 5) can realize the stepwise driving of the mover (4) with a large stroke to the right.
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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN114938158A (en) * 2022-06-15 2022-08-23 吉林大学 Orthogonal parallel bimorph mobile driver
SE545844C2 (en) * 2022-10-17 2024-02-20 Precibeo Ab A drive element with two separate monolithic actuators for an electromechanical motor

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