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CN113341350A - Vector magnetic field sensor orthogonal error calibration device and correction method - Google Patents

Vector magnetic field sensor orthogonal error calibration device and correction method Download PDF

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CN113341350A
CN113341350A CN202110610290.1A CN202110610290A CN113341350A CN 113341350 A CN113341350 A CN 113341350A CN 202110610290 A CN202110610290 A CN 202110610290A CN 113341350 A CN113341350 A CN 113341350A
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magnetic field
field sensor
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vector magnetic
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CN113341350B (en
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罗佳铭
张明吉
李航丞
张家俊
彭程远
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Shenzhen Technology University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0023Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0035Calibration of single magnetic sensors, e.g. integrated calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0017Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206Three-component magnetometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/10Plotting field distribution ; Measuring field distribution
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

本发明公开一种矢量磁场传感器正交误差标定装置,具有两个同心设置,安装于装置底座上,且左右方向可调的亥姆赫兹线圈,用于产生定量磁场环境。在装置底座中部设计有升降台,其上安装有校准角度器;校准角度器上安装有矢量磁场传感器;由升降台调节矢量磁传感器的垂直位置,由校准角度器控制矢量磁场传感器朝向与两个亥姆赫兹线圈间产生的磁场方向呈现指定偏向角。矢量磁场传感器用于获取不同磁场环境下的三轴磁测数据,并根据三轴磁测数据,通过标定三阶灵敏度矩阵并进行逆灵敏度矩阵反演,修正矢量磁场测量结果的非正交误差。本发明实现对矢量磁场测量结果非正交误差的修正,以保障磁矢量测量的精度。

Figure 202110610290

The invention discloses a quadrature error calibration device of a vector magnetic field sensor, which has two concentrically arranged Helm Hertz coils installed on the base of the device and adjustable in left and right directions for generating a quantitative magnetic field environment. A lifting platform is designed in the middle of the base of the device, on which a calibration angle device is installed; a vector magnetic field sensor is installed on the calibration angle device; the vertical position of the vector magnetic sensor is adjusted by the lifting platform, and the direction of the vector magnetic field sensor is controlled by the calibration angle device. The direction of the magnetic field generated between the Helmhertz coils exhibits a specified deflection angle. The vector magnetic field sensor is used to obtain three-axis magnetic measurement data in different magnetic field environments, and according to the three-axis magnetic measurement data, by calibrating the third-order sensitivity matrix and inverting the inverse sensitivity matrix, the non-orthogonal error of the vector magnetic field measurement results is corrected. The invention realizes the correction of the non-orthogonal error of the vector magnetic field measurement result, so as to ensure the accuracy of the magnetic vector measurement.

Figure 202110610290

Description

Vector magnetic field sensor orthogonal error calibration device and correction method
Technical Field
The invention belongs to the field of vector magnetic field measurement, and relates to a calibration device and a correction method, in particular to a vector magnetic field sensor orthogonal error calibration device and a correction method.
Background
Magnetic measurement is a vector physical field, and measurement of a high-precision magnetic field vector is usually realized by synthesizing three-axis orthogonal components of the vector.
The orthogonality of three sensitive axes of the vector magnetic field sensor determines the accuracy of magnetic vector measurement, and is influenced by the non-orthogonal anisotropy of the magnetic sensitive material, the acquired magnetic field components are not completely orthogonal actually, and the error generated by the acquired magnetic field components can cause the accuracy of vector magnetic measurement of the magnetic field sensor to be reduced.
In order to reduce the decrease of magnetic measurement accuracy caused by the orthogonality error of the sensitive axes of the magnetic field sensor, the magnetic measurement accuracy is generally realized by strictly adjusting the orthogonal relation of the three sensitive axes of the magnetic probe or by using a hardware correction circuit at present. However, these methods generally involve problems of great difficulty in operation, low reliability and increased cost, and also do not have good applicability to packaged vector magnetic probes.
Disclosure of Invention
Aiming at the defects of the existing vector magnetic field sensor orthogonality error correction method, the invention provides a vector magnetic field sensor orthogonality error calibration device which can fix a magnetic field sensor for orthogonality correction at a specified deflection angle for the magnetic field sensor to execute calibration work; according to the correction method provided by the invention, the three-order sensitivity matrix of the vector magnetic field sensor is calibrated through the acquisition and calibration device, and inverse sensitivity matrix inversion is carried out, so that the correction of the non-orthogonal error of the vector magnetic field measurement result is realized, and the magnetic vector measurement precision is ensured.
The orthogonal error calibration device of the vector magnetic field sensor is provided with two Helmholtz coils which are concentrically arranged, are arranged on a device base and can be adjusted in the left-right direction, an adjustable calibration angle device in the vertical direction and the vector magnetic field sensor arranged on the calibration angle device.
Wherein two Helmholtz coils are used to create a quantitative magnetic field environment. The calibration angle gauge is used to control the vector magnetic field sensor to assume a specified angle of deflection toward the direction of the magnetic field generated between the two Helmholtz coils. The vector magnetic field sensor is used for acquiring triaxial magnetic measurement data in different magnetic field environments.
The data required for correcting the quadrature error can be acquired by the device, and the method comprises the following steps:
step 1: the two helmholtz coils are positioned at a vertical distance from the center of the base of the device of 1/2 radius helmholtz coils.
Step 2: and a vector magnetic field sensor is arranged on the calibration angle gauge.
And step 3: and adjusting the vertical position of the calibration angle device to enable the center of the vector magnetic field sensor probe to be collinear with the circle centers of the two Helmholtz coil groups.
And 4, step 4: and placing the vector magnetic field sensor orthogonal error calibration device set through the steps in a magnetic shielding environment.
And 5: and calibrating the x, y and z axes of the vector magnetic field sensor.
And (3) calibrating an x axis: enabling the positive direction of the x axis of the vector magnetic field sensor to be positioned on a connecting line of circle centers of the two Helmholtz coils; quantitative magnetic fields were then applied through the two helmholtz coil sets, and vector magnetic field sensor readings were recorded under different magnetic field environments.
y-axis calibration: enabling the positive direction of the y axis of the vector magnetic field sensor to be positioned on the common connection line of the circle centers of the two Helmholtz coil groups; quantitative magnetic fields were then applied through two Helmholtz coils, and vector magnetic field sensor readings were recorded under different magnetic field environments.
Calibrating the z axis: enabling the positive direction of the z axis of the vector magnetic field sensor to be positioned on the common connection line of the circle centers of the two Helmholtz coil groups; quantitative magnetic fields were then applied through two Helmholtz coils, and vector magnetic field sensor readings were recorded under different magnetic field environments.
According to the reading of the vector magnetic field sensor, correcting the non-orthogonal error of the vector magnetic field measurement result by calibrating a third-order sensitivity matrix and carrying out inverse sensitivity matrix inversion, and the specific method comprises the following steps:
step 1: and obtaining a magnetic field-current relation curve by using the current source and the fluxgate sensor.
Step 2: calibrating the result V according to the x-axisxAnd simultaneously, by referring to a magnetic field-current relation curve of the Helmholtz coil group, calculating to obtain a corresponding magnetic field true value HxFinally by linear fitting Vx—HxRelation to obtain the sensitivity coherence matrix S of the x-axis of the magnetic sensorx
Figure BDA0003095519020000021
Wherein S isxx,Syx,SzxThe magnetic field data of the three axes of x, y and z are respectively obtained when the positive direction of the axis x is consistent with the direction of the magnetic field generated by the Helmholtz coil group.
And step 3: according to the y-axis calibration result VyAnd simultaneously, by referring to a magnetic field-current relation curve of the Helmholtz coil group, calculating to obtain a corresponding magnetic field true value HyAnd finally by linear fitting of "Vy—Hy"relationship, the sensitivity coherence matrix S of the y-axis of the magnetic sensor can be obtainedy
Figure BDA0003095519020000022
Wherein S isxy,Syy,SzyAnd the magnetic field data of three axes of x, y and z are respectively obtained when the positive direction of the y axis is consistent with the direction of the magnetic field generated by the Helmholtz coil group.
And 4, step 4: according to the z-axis calibration result VzSimultaneously, the magnetic field-current relation curve of the Helmholtz coil group is referred to obtain a corresponding magnetic field true value HzAnd finally by linear fitting of "Vz—Hz"relationship, the sensitivity coherence matrix S of the z-axis of the magnetic sensor can be obtainedz
Figure BDA0003095519020000031
Wherein S isxz,Syz,SzzThe magnetic field data of three axes x, y and z when the positive direction of the z axis is consistent with the direction of the magnetic field generated by the Helmholtz coil group 3.
And 5: integration of Sx,Sy,SzAnd obtaining a sensitivity coherence matrix S of the magnetic sensor.
Figure BDA0003095519020000032
Step 6: performing inverse sensitivity matrix inversion H by using the obtained sensitivity coherent matrix ST=S-1HmThe sensitivity coherence matrix of the vector magnetic field sensor is S. Wherein HTIs the corrected vector magnetic field data, HmThe magnetic field data measured by the vector magnetic field sensor has orthogonality errors.
The invention has the advantages that:
1. according to the orthogonal error calibration device of the vector magnetic field sensor, all parts are made of pure copper materials, the material characteristics of metal copper cannot interfere with a magnetic field within an allowable error range, and normal calibration work is guaranteed.
2. According to the orthogonal error calibration device of the vector magnetic field sensor, disclosed by the invention, the orthogonal error calibration device of the vector magnetic field sensor and the vector magnetic field sensor are placed in a magnetic shielding environment, so that the interference of an external environment, particularly a geomagnetic field, can be effectively shielded, and the accuracy of calibration work is improved.
3. The orthogonal error calibration device of the vector magnetic field sensor utilizes the Helmholtz coil group to apply a quantitative magnetic field condition, and also provides a stable and accurate magnetic field environment for the development of calibration work.
5. The correction method for the orthogonal error calibration of the vector magnetic field sensor can realize the orthogonal error correction of the vector magnetic field sensor under the condition of not changing the hardware structure of the vector magnetic field sensor, and ensure the magnetic measurement precision of the vector magnetic field sensor.
6. The correction method for the orthogonal error calibration of the vector magnetic field sensor has strong compatibility and is suitable for the orthogonal error correction of various linear vector magnetic sensors.
7. The correction method for orthogonal error calibration of the vector magnetic field sensor realizes orthogonal error correction of the magnetic field sensor on a software level by using a correction algorithm, and has low cost and strong stability compared with correction on a hardware level.
8. The correction method for the orthogonal error calibration of the vector magnetic field sensor can perform specific correction aiming at different special application scenes, including environmental factors influencing the measurement of the magnetic field sensor, such as high temperature, high pressure, weightlessness and the like, so that the magnetic field sensor can work normally in the special environments.
9. When the method is used for correcting the orthogonality error of the vector magnetic field sensor, the zero calibration work of the magnetic field sensor can be completed at the same time.
Drawings
Fig. 1 is a schematic view of the overall structure of the quadrature error calibration device of the vector magnetic field sensor of the present invention.
Fig. 2 is a schematic diagram of a helmholtz coil structure in the device for calibrating quadrature error of vector magnetic field sensor according to the present invention.
FIG. 3 is a schematic diagram of a calibration angle device in the device for calibrating the quadrature error of the vector magnetic field sensor according to the present invention.
In the figure:
1-device base 2-lifting table 3-Helmholtz coil group
4-calibrating the goniometer 101-slide A201-slide B
301-slider A401-outer ring 402-vector magnetic field sensor mounting table
403-connecting shaft
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The orthogonal error calibration device of the vector magnetic field sensor comprises a device base 1, a lifting platform 2, a Helmholtz coil group 3, a calibration angle device 4 and the vector magnetic field sensor, and is shown in figure 1.
The device base 1 is of a rectangular plate-shaped structure, and a slide way A101 is designed along the left-right direction in a parting line mode. Meanwhile, a lifting platform 2 perpendicular to the device base 1 is installed at one side of the middle of the device base 1, and the lifting platform 2 is provided with a slide way B201 perpendicular to the device base 1.
The Helmholtz coil group 3 comprises two Helmholtz coils with the same size parameters and is used for generating a quantitative magnetic field environment. The diameter size of the helmholtz coil assembly 3 is determined according to the size of the vector magnetic field sensor, the larger the vector magnetic field sensor is, the larger the uniform magnetic field environment is required, and the larger the diameter size of the helmholtz coil assembly 3 is, the larger the uniform magnetic field environment is generated. As shown in fig. 2, the sliding blocks a301 are mounted on the side portions of the two helmholtz coils, and are in fit sliding connection with the sliding ways a101 on the device base 1 through the sliding blocks a301, and the two helmholtz coils are ensured to be coaxial.
As shown in fig. 3, the calibration goniometer 4 comprises an outer ring 401, a vector magnetic field sensor mounting stage 402 and a connecting shaft 403. Wherein, the outer ring 401 is a circular ring, the axis is perpendicular to the device base 1, and the inner ring side wall is grooved circumferentially. The lateral part of the outer ring 401 is provided with a sliding block B405, and the sliding block B405 is matched and slidably connected with the sliding way B201 on the lifting platform 2, so that the vertical position of the angle calibrating device 4 can be adjusted.
The vector magnetic field sensor mounting table 402 is a disk, a concentric rectangular recess 404 is designed in the middle of the vector magnetic field sensor mounting table to serve as a bearing area of the vector magnetic field sensor, the size of the bearing area is the same as that of the vector magnetic field sensor mounting surface, and the vector magnetic field sensor is mounted and positioned through the area. The vector magnetic field sensor mounting table 402 is concentrically arranged in the outer ring 401, connecting shafts 403 are arranged at opposite positions on two sides of the outer ring 401, and the connecting shafts 403 on the two sides are respectively matched with the grooves in the side wall of the inner ring of the outer ring 401 and inserted into the grooves, so that the vector magnetic field sensor mounting table 402 can rotate around the axis of the connecting shafts 403, and the vector magnetic field sensor can turn over on a vertical plane by 360 degrees; meanwhile, the vector magnetic field sensor mounting table 402 can also rotate along the groove of the side wall of the inner ring of the outer ring 401, so that the vector magnetic field sensor can rotate 360 degrees in the horizontal plane; thereby causing the vector magnetic field sensor to assume a specified angle of deflection toward the direction of the magnetic field generated between the two helmholtz coils.
A reference scale line is designed on the outer ring 401 and is designed along the direction of the connection line of the centers of the two Helmholtz coil groups; meanwhile, the outer edge of the vector magnetic field sensor mounting table 402 is provided with a zero-position scale mark, when the zero-position scale mark is aligned with the reference scale mark, the horizontal rotation angle of the vector magnetic field sensor mounting table 402 is 0 degree, and at the moment, the vertical position of the calibration angle device 4 is adjusted to enable the center of the vector magnetic field sensor probe to be collinear with the centers of the two Helmholtz coils.
In order to avoid introducing material interference factors, all the components are made of pure copper materials, the material characteristics of metal copper cannot cause interference on a magnetic field within an allowable error range, and normal operation of calibration is guaranteed.
The method for calibrating the orthogonal error of the orthogonal error calibration device of the vector magnetic field sensor with the structure comprises the following steps:
step 1: the position of the helmholtz coil group 3 is adjusted to make two helmholtz coils respectively located on two sides of the middle portion of the device base 1, and the distance between the two helmholtz coils and the center point of the slide a101 on the device base 1 is 1/2 of the radius of the helmholtz coils.
Step 2: mounting a vector magnetic field sensor on a rectangular bearing area of a calibration goniometer 4; before the vector magnetic field sensor is installed, the attitude of a vector magnetic field sensor installation table 402 of the calibration angle device 4 is adjusted, so that the vector magnetic field sensor installation table 402 is parallel to the device base 1; at this time, the turning angle of the vector magnetic field sensor mounting table 402 is 0 degree; meanwhile, the zero-position scale mark on the vector magnetic field sensor mounting table 402 is aligned with the reference scale mark on the outer ring 401, and the horizontal rotation angle of the vector magnetic field sensor mounting table 402 is 0 °.
And step 3: and adjusting the height of the calibration angle device 4 to enable the center of the vector magnetic field sensor probe to be collinear with the circle centers of the two Helmholtz coil groups.
And 4, step 4: and placing the vector magnetic field sensor orthogonal error calibration device set through the steps in a magnetic shielding environment.
And 5: and calibrating the x, y and z axes of the vector magnetic field sensor.
And (3) calibrating an x axis: the turning angle of the vector magnetic field sensor mounting table 402 is 0 degrees, and the rotating angle of the vector magnetic field sensor mounting table 402 is adjusted, so that the positive direction of the x axis of the vector magnetic field sensor is positioned on the connection line of the circle centers of the two Helmholtz coils; a quantitative magnetic field is then applied through the helmholtz coil assembly 3 and the vector magnetic field sensor readings are recorded for different magnetic field environments.
y-axis calibration: the turning angle of the vector magnetic field sensor mounting table 402 is 0 degrees, and the rotating angle of the vector magnetic field sensor mounting table 402 is adjusted, so that the positive direction of the y axis of the vector magnetic field sensor is positioned on the common connection line of the centers of the two Helmholtz coil groups; a quantitative magnetic field is then applied through the helmholtz coil assembly 3 and the vector magnetic field sensor readings are recorded for different magnetic field environments.
Calibrating the z axis: the horizontal rotation angle of the vector magnetic field sensor mounting table 402 is 0 degrees, the turning angle of the vector magnetic field sensor is adjusted, and the positive direction of the z axis of the vector magnetic field sensor is positioned on the common connection line of the centers of the two Helmholtz coil groups; a quantitative magnetic field is then applied through the helmholtz coil assembly 3 and the vector magnetic field sensor readings are recorded for different magnetic field environments.
The vector magnetic field sensor orthogonal error calibration device obtains data required by correcting the orthogonal error, corrects the non-orthogonal error of the vector magnetic field measurement result by calibrating a third-order sensitivity matrix and performing inverse sensitivity matrix inversion according to the data, and guarantees the magnetic vector measurement precision, and comprises the following specific steps:
step 1: and obtaining a magnetic field-current relation curve of the Helmholtz coil group by using the mu A-level precision current source and the fluxgate sensor.
Step 2: the orientation of the vector magnetic field sensor is adjusted to ensure that the positive direction of the x axis of the vector magnetic field sensor is consistent with the direction of the magnetic field generated by the Helmholtz coil group 3, and the triaxial magnetic measurement data V of the vector magnetic field sensor under different magnetic field environments is recordedxAnd simultaneously, by referring to a 'magnetic field-current relation curve' of the Helmholtz coil group, calculating to obtain a corresponding magnetic field true value HxAnd finally by linear fitting of "Vx—Hx"relationship, the sensitivity coherence matrix S of the x-axis of the magnetic sensor can be obtainedx
Figure BDA0003095519020000061
Wherein S isxx,Syx,SzxThe magnetic field data of three axes x, y and z when the positive direction of the axis x is consistent with the direction of the magnetic field generated by the Helmholtz coil assembly 3.
And step 3: regulating deviceThe orientation of the whole vector magnetic field sensor is adjusted to ensure that the positive direction of the y axis of the vector magnetic field sensor is consistent with the direction of the magnetic field generated by the Helmholtz coil group, and the triaxial magnetic measurement data V of the vector magnetic field sensor under different magnetic field environments is recordedyAnd simultaneously, by referring to a 'magnetic field-current relation curve' of the Helmholtz coil group, calculating to obtain a corresponding magnetic field true value HyAnd finally by linear fitting of "Vy—Hy"relationship, the sensitivity coherence matrix S of the y-axis of the magnetic sensor can be obtainedy
Figure BDA0003095519020000062
Wherein S isxy,Syy,SzyThe magnetic field data of three axes x, y and z when the positive direction of the y axis is consistent with the direction of the magnetic field generated by the Helmholtz coil group 3.
And 4, step 4: the orientation of the vector magnetic field sensor is adjusted to ensure that the positive direction of the z axis of the vector magnetic field sensor is consistent with the direction of the magnetic field generated by the Helmholtz coil group, and the triaxial magnetic measurement data V of the vector magnetic field sensor under different magnetic field environments is recordedzAnd simultaneously, by referring to a 'magnetic field-current relation curve' of the Helmholtz coil group, calculating to obtain a corresponding magnetic field true value HzAnd finally by linear fitting of "Vz—Hz"relationship, the sensitivity coherence matrix S of the z-axis of the magnetic sensor can be obtainedz
Figure BDA0003095519020000063
Wherein S isxz,Syz,SzzThe magnetic field data of three axes x, y and z when the positive direction of the z axis is consistent with the direction of the magnetic field generated by the Helmholtz coil group 3.
And 5: integration of Sx,Sy,SzAnd obtaining a sensitivity coherence matrix S of the magnetic sensor.
Figure BDA0003095519020000071
Step 6: performing inverse sensitivity matrix inversion H by using the obtained sensitivity coherent matrix ST=S-1HmThe vectors can be solvedThe sensitivity coherence matrix of the magneto-metric field sensor is S. Wherein HTIs the corrected vector magnetic field data, HmThe magnetic field data measured by the vector magnetic field sensor has an orthogonality error, and therefore, correction is required.
Examples
In this embodiment, the device and the method for calibrating and correcting the quadrature error of the vector magnetic field sensor provided by the invention are used for calibrating and correcting the quadrature error of the vector magnetic field sensor HMC2003 of Honeywell under the surface environmental conditions of 25 ℃ and 101 kPa.
The permalloy magnetic shielding barrel with vinpocetine electromagnetic power is used for providing a magnetic shielding environment required by vector magnetic field sensor orthogonal error calibration and correction.
Step 1: according to the size of the probe of the vector magnetic field sensor HMC2003, a Helmholtz coil group with the radius of 30cm is selected, and the Helmholtz coil group is installed on the device base 1, wherein the circular surfaces of the two Helmholtz coils are required to be concentric and parallel, and the distance between the two circular coils and the central point is 1/2 which is equal to the radius of the coil, namely 15 cm.
Step 2: and (3) installing the calibration angle device 4 on the lifting platform 2, adjusting to a proper height position, and screwing a fixing bolt for limiting.
And step 3: and the rotating shaft of the calibration angle device 4 is adjusted to enable the turning angle to be 0 degree, so that the vector magnetic field sensor is convenient to mount.
And 4, step 4: and mounting the vector magnetic field sensor on a rectangular bearing area of the calibration angle device 4, and adjusting the height of the calibration angle device 4 to enable the vector magnetic field sensor and the circle center of the Helmholtz coil group 3 to be on the same straight line.
And 5: according to the operation specification of the magnetic shielding barrel, the magnetic shielding barrel is demagnetized, so that the internal remanence environment meets the experimental magnetic shielding requirement.
Step 6: and placing the vector magnetic field sensor orthogonal error calibration device arranged in an installation way and the vector magnetic field sensor in a magnetic shielding environment.
And 7: and obtaining a magnetic field-current relation curve of the Helmholtz coil group by using the mu A-level precision current source and the fluxgate sensor.
And 8: adjusting the horizontal rotation angle of the calibration angle gauge to adjust the orientation of the vector magnetic field sensor, enabling the positive direction of the x axis of the vector magnetic field sensor to be consistent with the direction of a magnetic field generated by the Helmholtz coil group, recording three-axis magnetic measurement data Vx of the vector magnetic field sensor under different magnetic field environments, simultaneously referring to a 'magnetic field-current relation curve' of the Helmholtz coil group to obtain a corresponding magnetic field true value through operation, and finally obtaining a sensitivity coherent matrix S of the x axis of the magnetic sensor through linear fitting of the 'Vx-Hx' relationx
Figure BDA0003095519020000081
And step 9: adjusting the horizontal rotation angle of the calibration angle gauge to adjust the orientation of the vector magnetic field sensor, enabling the positive direction of the y axis of the vector magnetic field sensor to be consistent with the direction of the magnetic field generated by the Helmholtz coil group, and recording the triaxial magnetic measurement data of the vector magnetic field sensor under different magnetic field environments
Figure BDA0003095519020000085
Meanwhile, by referring to a 'magnetic field-current relation curve' of a Helmholtz coil group, a corresponding magnetic field true value Hy is obtained through operation, and finally, a sensitivity coherence matrix S of a y axis of the magnetic sensor can be obtained through linear fitting 'Vy-Hy' relationy
Figure BDA0003095519020000082
Step 10: adjusting the turning angle of the calibration angle gauge to adjust the orientation of the vector magnetic field sensor, enabling the positive direction of the z axis of the calibration angle gauge to be consistent with the direction of the magnetic field generated by the Helmholtz coil group, and recording triaxial magnetic measurement data V of the vector magnetic field sensor in different magnetic field environmentszAnd simultaneously, by referring to a 'magnetic field-current relation curve' of the Helmholtz coil group, calculating to obtain a corresponding magnetic field true value HzAnd finally by linear fitting of "Vz—Hz"relationship, the sensitivity coherence matrix S of the z-axis of the magnetic sensor can be obtainedz
Figure BDA0003095519020000083
Step 11: integration of Sx,Sy,SzAnd obtaining a sensitivity coherence matrix S of the magnetic sensor.
Figure BDA0003095519020000084
Step 12: performing inverse sensitivity matrix inversion H by using the obtained sensitivity coherent matrix ST=S-1HmAnd the vector magnetic measurement data corrected by the triaxial orthogonality can be obtained.

Claims (9)

1.矢量磁场传感器正交误差标定装置,其特征在于:具有两个同心设置,安装于装置底座上,且左右方向可调的亥姆赫兹线圈,一个竖直方向可调的校准角度器,以及校准角度器上安装的矢量磁场传感器;其中,两个亥姆赫兹线圈用于产生定量磁场环境;校准角度器用于控制矢量磁场传感器朝向与两个亥姆赫兹线圈间产生的磁场方向呈现指定偏向角;矢量磁场传感器用于获取不同磁场环境下的三轴磁测数据。1. A vector magnetic field sensor quadrature error calibration device, characterized in that it has two concentrically arranged Helmhertz coils, which are installed on the base of the device, and can be adjusted in the left and right directions, a calibration angle that can be adjusted in the vertical direction, and The vector magnetic field sensor installed on the calibration inclinometer; wherein, two Helmhertz coils are used to generate a quantitative magnetic field environment; the calibration inclinometer is used to control the direction of the vector magnetic field sensor to present a specified deflection angle with the direction of the magnetic field generated between the two Helmhertz coils ; The vector magnetic field sensor is used to obtain three-axis magnetic measurement data in different magnetic field environments. 2.如权利要求1所述矢量磁场传感器正交误差标定装置,其特征在于:亥姆赫兹线圈侧部安装有滑块,通过滑块滑动连接于与装置底座上的滑道上。2 . The quadrature error calibration device of the vector magnetic field sensor according to claim 1 , wherein a slider is installed on the side of the Helmhertz coil, and the slider is slidably connected to the slideway on the base of the device. 3 . 3.如权利要求1所述矢量磁场传感器正交误差标定装置,其特征在于:校准角度器包括外环、矢量磁场传感器安装台与连接轴;其中,外环轴线垂直于装置底座设置,内圈侧壁周向上开槽。3. The quadrature error calibration device of the vector magnetic field sensor according to claim 1, wherein the calibration angle device comprises an outer ring, a vector magnetic field sensor mounting platform and a connecting shaft; wherein, the axis of the outer ring is set perpendicular to the device base, and the inner ring The side walls are circumferentially grooved. 4.如权利要求3所述矢量磁场传感器正交误差标定装置,其特征在于:矢量磁场传感器安装台置于外环内,两侧相对位置设计有连接轴,且两侧连接轴分别与外环内圈侧壁开槽配合插入开槽内,使矢量磁场传感器安装台具有绕连接轴轴线的转动副,以及沿滑槽水平旋转的转动副。4. The quadrature error calibration device of the vector magnetic field sensor according to claim 3, wherein the vector magnetic field sensor installation platform is placed in the outer ring, the relative positions of both sides are designed with connecting shafts, and the connecting shafts on both sides are respectively connected with the outer ring. The sidewall of the inner ring is slotted and inserted into the slot, so that the vector magnetic field sensor mounting platform has a rotating pair around the axis of the connecting shaft and a rotating pair that rotates horizontally along the chute. 5.如权利要求3所述矢量磁场传感器正交误差标定装置,其特征在于:矢量磁场传感器安装台中部设计有矩形凹进,作为矢量磁场传感器的承载区,用于安装并定位矢量磁场传感器。5. The quadrature error calibration device of the vector magnetic field sensor according to claim 3, wherein a rectangular recess is designed in the middle of the vector magnetic field sensor installation platform, which is used as a bearing area of the vector magnetic field sensor for installing and positioning the vector magnetic field sensor. 6.如权利要求3所述矢量磁场传感器正交误差标定装置,其特征在于:外环上设计有基准度线,基准刻度线沿两个亥姆赫兹线圈组的圆心连线方向设计;同时矢量磁场传感器安装台外缘设计有零位刻度线,当零位刻度线与基准刻度线对准时,矢量磁场传感器安装台水平旋转角度为0°,此时调节校准角度器垂直位置可使矢量磁场传感器探头中心与两个亥姆赫兹线圈的圆心共线。6. The quadrature error calibration device of the vector magnetic field sensor according to claim 3, characterized in that: a reference scale line is designed on the outer ring, and the reference scale line is designed along the direction of the connection line between the centers of the two Helmhertz coil groups; at the same time, the vector The outer edge of the magnetic field sensor mounting table is designed with a zero scale line. When the zero scale line is aligned with the reference scale line, the horizontal rotation angle of the vector magnetic field sensor mounting table is 0°. At this time, adjusting the vertical position of the calibration angle can make the vector magnetic field sensor The center of the probe is collinear with the centers of the two Helmhertz coils. 7.如权利要求1所述矢量磁场传感器正交误差标定装置,其特征在于:用于获取修正正交误差所需要的数据,方法如下:7. The quadrature error calibration device of the vector magnetic field sensor as claimed in claim 1, characterized in that: for obtaining the data required for correcting the quadrature error, the method is as follows: 步骤1:使两个亥姆赫兹线圈距离装置底座中心的垂直距离为亥姆赫兹线圈半径的1/2;Step 1: Make the vertical distance of the two Helmhertz coils from the center of the base of the device to be 1/2 of the radius of the Helmhertz coils; 步骤2:在校准角度器上安装矢量磁场传感器;Step 2: Install the vector magnetic field sensor on the calibration angle; 步骤3:调整校准角度器竖直位置,令矢量磁场传感器探头中心与两个亥姆赫兹线圈组的圆心共线;Step 3: Adjust the vertical position of the calibration angle device so that the center of the vector magnetic field sensor probe is collinear with the center of the two Helmhertz coil sets; 步骤4:将通过前述步骤设置好的矢量磁场传感器正交误差标定装置放置于磁屏蔽环境中;Step 4: place the quadrature error calibration device of the vector magnetic field sensor set in the preceding steps in a magnetic shielding environment; 步骤5:矢量磁场传感器x、y、z三轴标定;Step 5: The three-axis calibration of the vector magnetic field sensor x, y, and z; x轴标定:使矢量磁场传感器x轴正方向位于两个亥姆赫兹线圈的圆心连线上;随后通过两个亥姆赫兹线圈组施加定量磁场,记录不同磁场环境下的矢量磁场传感器读数;Calibration of the x-axis: the positive direction of the x-axis of the vector magnetic field sensor is located on the line connecting the centers of the two Helmhertz coils; then a quantitative magnetic field is applied through the two Helmhertz coil sets to record the readings of the vector magnetic field sensor under different magnetic field environments; y轴标定:使矢量磁场传感器y轴正方向位于两个亥姆赫兹线圈组的圆心共连线上;随后通过两个亥姆赫兹线圈施加定量磁场,记录不同磁场环境下的矢量磁场传感器读数;Y-axis calibration: make the positive y-axis of the vector magnetic field sensor lie on the common connection line between the centers of the two Helmhertz coil groups; then apply a quantitative magnetic field through the two Helmhertz coils to record the readings of the vector magnetic field sensor under different magnetic field environments; z轴标定:使矢量磁场传感器z轴正方向位于两个亥姆赫兹线圈组的圆心共连线上;随后通过两个亥姆赫兹线圈施加定量磁场,记录不同磁场环境下的矢量磁场传感器读数。Z-axis calibration: The positive z-axis of the vector magnetic field sensor is located on the common connection line between the centers of the two Helmhertz coil groups; then a quantitative magnetic field is applied through the two Helmhertz coils to record the readings of the vector magnetic field sensor in different magnetic field environments. 8.如权利要求1所述矢量磁场传感器正交误差标定装置,其特征在于:根据矢量磁场传感器读数,通过标定三阶灵敏度矩阵并进行逆灵敏度矩阵反演,修正矢量磁场测量结果的非正交误差。8. The quadrature error calibration device of the vector magnetic field sensor according to claim 1, characterized in that: according to the reading of the vector magnetic field sensor, by calibrating the third-order sensitivity matrix and inverting the inverse sensitivity matrix, the non-orthogonality of the measurement result of the vector magnetic field is corrected. error. 9.如权利要求8所述矢量磁场传感器正交误差标定装置,其特征在于:具体方法为:9. Vector magnetic field sensor quadrature error calibration device as claimed in claim 8, is characterized in that: the concrete method is: 步骤1:利用电流源和磁通门传感器获得磁场-电流关系曲线;Step 1: Use the current source and the fluxgate sensor to obtain the magnetic field-current relationship curve; 步骤2:根据x轴标定结果Vx,同时参考亥姆赫兹线圈组磁场-电流关系曲线,运算得到对应的磁场真值Hx,最后通过线性拟合Vx—Hx关系,得到磁传感器x轴的灵敏度相干矩阵Sx
Figure FDA0003095519010000021
其中,Sxx,Syx,Szx分别为x轴正方向与亥姆赫兹线圈组生成的磁场方向一致时,x,y,z三轴的磁场数据;
Step 2: According to the x-axis calibration result V x , and at the same time refer to the Helmhertz coil set magnetic field-current relationship curve, calculate the corresponding magnetic field true value H x , and finally obtain the magnetic sensor x by linearly fitting the V x -H x relationship axis sensitivity coherence matrix S x ,
Figure FDA0003095519010000021
Among them, S xx , S yx , S zx are the magnetic field data of the three axes of x, y and z when the positive direction of the x-axis is consistent with the direction of the magnetic field generated by the Helmhertz coil group;
步骤3:根据y轴标定结果Vy,同时参考亥姆赫兹线圈组磁场-电流关系曲线,运算得到对应的磁场真值Hy,最后通过线性拟合“Vy—Hy”关系,可得磁传感器y轴的灵敏度相干矩阵Sy
Figure FDA0003095519010000022
其中,Sxy,Syy,Szy分别为y轴正方向与亥姆赫兹线圈组生成的磁场方向一致时,x,y,z三轴的磁场数据;
Step 3: According to the y -axis calibration result V y , and at the same time referring to the magnetic field-current relationship curve of the Helmhertz coil group, the corresponding true value of the magnetic field Hy is obtained by operation. the sensitivity coherence matrix S y of the y-axis of the magnetic sensor,
Figure FDA0003095519010000022
Among them, S xy , S yy , S zy are the magnetic field data of the three axes of x, y and z when the positive direction of the y-axis is consistent with the direction of the magnetic field generated by the Helmhertz coil group;
步骤4:根据z轴标定结果Vz,同时参考亥姆赫兹线圈组磁场-电流关系曲线,得到对应的磁场真值Hz,最后通过线性拟合“Vz—Hz”关系,可得磁传感器z轴的灵敏度相干矩阵Sz
Figure FDA0003095519010000023
其中,Sxz,Syz,Szz分别为z轴正方向与亥姆赫兹线圈组3生成的磁场方向一致时,x,y,z三轴的磁场数据;
Step 4: According to the z-axis calibration result V z , and at the same time refer to the Helm Hertz coil set magnetic field-current relationship curve to obtain the corresponding magnetic field true value Hz , and finally obtain the magnetic field by linearly fitting the "V z - Hz " relationship. the sensitivity coherence matrix S z of the sensor z-axis,
Figure FDA0003095519010000023
Wherein, S xz , S yz , S zz are the magnetic field data of the three axes of x, y and z when the positive direction of the z-axis is consistent with the direction of the magnetic field generated by the Helmhertz coil group 3;
步骤5:整合Sx,Sy,Sz得到磁传感器的灵敏度相干矩阵S;Step 5: Integrate S x , S y , and S z to obtain the sensitivity coherence matrix S of the magnetic sensor;
Figure FDA0003095519010000031
Figure FDA0003095519010000031
步骤6:利用得到的灵敏度相干矩阵S,进行逆灵敏度矩阵反演HT=S-1Hm即可解出所用矢量磁场传感器的灵敏度相干矩阵为S;其中,HT是修正后的矢量磁场数据,Hm是矢量磁场传感器测到的磁场数据,存在正交性误差。Step 6: Using the obtained sensitivity coherence matrix S, perform inverse sensitivity matrix inversion H T =S -1 H m to solve the sensitivity coherence matrix of the used vector magnetic field sensor as S; where H T is the corrected vector magnetic field data, H m is the magnetic field data measured by the vector magnetic field sensor, and there is an orthogonality error.
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