CN112809108B - Ion/molecule oscillation discharge machining device and machining method - Google Patents

Abstract

The invention relates to the technical field of material processing, and particularly discloses an ion/molecule oscillation discharge processing device and a processing method for a material difficult to conduct, wherein the method is not influenced by the conductivity of a workpiece material, discharge can be generated only by communicating a tool electrode with a processing power supply, a main shaft rotating speed control system controls the rotating speed of the tool electrode, a liquid supply unit continuously conveys a working medium to a gap between the material difficult to conduct and the tool electrode, and a high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through an electric inlet system, so that the working medium and the tool electrode continuously generate ion/molecule oscillation and generate discharge to melt and erode the material difficult to conduct. And the feedback control system adjusts the position of the rotating spindle according to the force signal of the force sensor, so that the machining gap between the tool electrode and the material difficult to conduct electricity is kept at a preset value, and continuous machining is realized. The hole machining, the plane machining, the three-dimensional shape machining and the like can be performed on the material which is difficult to conduct electricity, and the machining precision and the machining quality are improved.

Description

Ion/molecular oscillatory electrical discharge machining device and machining method

technical field

The invention relates to the technical field of material processing, and particularly discloses an ion/molecular oscillating electrical discharge processing device and a processing method for difficult conductive materials.

Background technique

Difficult-to-conductive materials such as semiconductors, optical glass, and engineering ceramics have become more and more popular in many fields such as electronics, optics, instrumentation, aerospace, national defense, and civil industry due to their excellent properties such as strong wear resistance, high hardness, and good insulation. more and more applications. The characteristics of difficult conductive materials: high brittleness, high hardness, low fracture toughness, elastic limit and strength are very close. At present, there are the following special processing methods for processing difficult-to-conduct materials:

(1) Ultrasonic vibration processing:

Principle: The abrasive in the suspension is mechanically impacted and polished under the action of high-frequency ultrasonic waves and ultrasonic cavitation, which impacts the surface of the workpiece and peels off the material of the workpiece, thereby achieving the result of removing the material;

Features: high precision, easy control, low production efficiency, different tools need to be processed according to different shapes of objects to be processed, which increases cost and processing time.

(2) Laser processing:

Principle: Photothermal effect

Features: expensive equipment, high cost, prone to cracks, heat affected layer.

(3) Abrasive flow processing

Principle: The abrasive medium flows over the machined surface required by the workpiece under high pressure, and processes such as deburring, rounding, and deburring are performed to reduce the waviness and roughness of the workpiece surface and achieve the surface roughness of precision machining. .

Features: The abrasive medium can be reused and has a long service life, but the nozzle is easily blocked, and the processing scene is single, so it cannot be processed like other processing methods.

(4) Electric discharge machining

Principle: The effect of electric spark discharge.

Features: fast speed and low cost.

Compared with other machining methods, electrical discharge machining has many advantages:

(1) The machining process is non-contact machining, and there is no macro cutting force during the machining process that can be used for micro hole machining, etc.;

(2) EDM equipment is simple, low cost, can obtain better surface quality, and has a good application prospect in micromachining.

At present, there are three main methods of EDM for difficult-to-conduct materials: high-voltage EDM, auxiliary electrode EDM and electrolytic EDM composite machining.

(1) High-voltage EDM: The hard and brittle materials that are difficult to conduct electricity are directly used as the medium, and the high voltage between the tip electrode and the flat plate is used to generate a strong glow discharge to erode the difficult-to-conduct materials. This method is only suitable for drilling thin-walled and difficult-to-conduct materials. Although the processing speed is fast and the cost is low, it can only be used for rough machining because the machined surface is too rough.

(2) Auxiliary electrode EDM: directly press conductive materials such as metal plates and metal meshes on the surface of hard and brittle materials, or form conductive layers such as metal and carbon on the surface of difficult-to-conduct materials by methods such as evaporation and coating. Using kerosene as the working fluid, the high temperature generated by the spark and the instantaneous discharge makes the carbon thermally decomposed from the kerosene, the metal sputtered from the tool electrode and other compounds form a discharge circuit between the difficult conductive material and the tool electrode, so that the EDM can be carried out continuously. This method is affected by the formation speed of the conductive layer, and the processing efficiency is generally low.

(3) Electrolytic EDM (ECDM): ECDM is a new technology in the field of special processing in recent years, which is often used in the processing of non-conductive materials such as heat-resistant glass, ceramics, industrial diamond, and quartz. This method requires an auxiliary anode when processing non-conductive materials. During the processing, the tool electrode is connected to the negative electrode of the processing power supply, and the auxiliary anode is connected to the positive electrode of the processing power supply. Electrochemical reaction, bubbles are generated on the surface of the tool electrode (negative electrode), the bubbles aggregate to form a gas film, and the gas film blocks the conduction between the electrode and the electrolyte. When the voltage between the electrode and the electrolyte exceeds a certain critical value, it will Discharge is generated by the breakdown of the gas film, and the workpiece material close to the tool electrode will be affected by the high temperature generated by the electrochemical discharge and the chemical etching at high temperature, and the material will be removed to achieve the purpose of processing. Since the auxiliary anode is far away from the tool electrode, the energy consumption during the processing of this method is relatively large, and the processing process is unstable.

SUMMARY OF THE INVENTION

In order to overcome the shortcomings and deficiencies in the prior art, the purpose of the present invention is to provide an ion/molecular oscillating electrical discharge machining device and a processing method for difficult-to-conduct materials, so as to realize efficient processing of difficult-to-conduct materials, and to facilitate the processing of difficult-to-conduct materials. Hole processing, plane processing, and three-dimensional shape processing are performed on materials to improve the processing accuracy and processing quality of difficult-to-conduct materials.

In order to achieve the above purpose, the ion/molecular oscillating electrical discharge machining device for difficult conductive materials of the present invention includes a working medium container, a working medium, a liquid supply unit, a spindle speed control system, a feedback control system, a high frequency/radio frequency power supply, a rotating The spindle, the power feeding system and the tool electrode, the hard-to-conduct material is placed in the working medium container, the tool electrode is installed on the rotating spindle, the spindle speed control system controls the working speed of the rotating spindle, and the liquid supply unit continuously feeds the difficult-to-conduct material and the tool electrode. The working medium is conveyed in the machining gap between the two, and the high frequency/radio frequency power supply applies high frequency/radio frequency waves to the tool electrode through the power feeding system, so that the contact between the working medium and the tool electrode continuously generates ion/molecular oscillation and discharge, and the discharge effect will make the discharge The difficult-to-conduct materials in the area are melted, thereby realizing the removal of difficult-to-conduct materials; a force sensor is installed in the rotating spindle, and the force sensor transmits the force signal to the feedback control system, and the feedback control system adjusts the position of the rotating spindle according to the transmitted force signal. The tool electrode and the hard-to-conduct material are in elastic contact, and the machining gap is dynamically maintained at a predetermined value for continuous electrical discharge machining.

Among them, it also includes a linear drive for driving the rotating spindle to move up and down. The force sensor transmits the force signal to the feedback control system. The feedback control system regulates the linear drive according to the transmitted force signal, so that the linear drive drives the rotating spindle to drive the tool. The electrode moves intermittently, specifically: the feedback control system adjusts the position of the rotating spindle by regulating the linear drive according to the transmitted force signal: when the tool electrode contacts the workpiece, the contact force signal will be transmitted to the feedback control system, and the feedback control The system will control the linear drive part to drive the tool electrode back to a certain distance, so that a discharge gap is formed between the tool and the workpiece. After a period of EDM, the linear drive part will drive the tool to continue to feed the workpiece at a certain speed until the tool meets the workpiece again. The workpiece is in contact, and the reciprocation makes the tool electrode and the hard-to-conduct material in elastic contact, and the machining gap is dynamically maintained at a predetermined value for continuous electrical discharge machining.

Among them, the rotation speed of the rotating spindle is 0～20000r/min, the rotation axis of the tool electrode is extended in the vertical direction, the rotating spindle can drive the tool electrode to rotate at a high speed, and use the centrifugal force of the high-speed rotation of the tool electrode to discharge and melt the hard-to-conduct materials. The product is discharged from the processing gap.

Wherein, the working medium can be solid, viscous liquid, liquid or solid-liquid mixture.

The liquid supply unit transports the liquid working medium to the machining gap between the tool electrode and the difficult-to-conduct material, and makes the liquid working medium infiltrate the tool electrode and the difficult-to-conduct material, and the working medium container is used to accommodate the liquid working medium.

The liquid supply unit is equipped with an atomizing nozzle, and the working medium conveyed by the liquid supply unit is atomized and sprayed into the machining gap between the tool electrode and the difficult-to-conduct material through the atomizing nozzle.

Among them, the working medium container is used to accommodate the working medium in liquid or solid-liquid mixed state, the liquid supply unit is equipped with a filter unit, and the working medium contained in the working medium container is filtered by the filter unit and then recycled and transported to the tool electrode and the hard-to-conduct. The infiltration of tool electrodes and difficult-to-conduct machining materials is realized in the machining gap between the machining materials.

Among them, the power feeding system includes a conductive column and a power feeding module. The power feeding module is composed of a conductive roller bearing and an insulating bearing seat. The conductive roller bearing is placed in the insulating bearing seat, and the insulating bearing seat is fixed on the outer shell of the rotating spindle. The conductive column is fixed on the power-in module, and the conductive column is connected with the conductive roller bearing through a screw connection.

To achieve the above object, the ion/molecular oscillating electrical discharge machining method for difficult-to-conduct materials of the present invention comprises the following steps:

The high-frequency/radio frequency power supply applies high-frequency/radio frequency waves to the tool electrode through the power feeding system, so that the contact between the working medium and the tool electrode generates ion/molecular oscillation and discharge, and the discharge effect will melt the difficult-to-conduct materials in the discharge area, thereby achieve material removal. To realize this electric discharge machining process, the tool electrode is connected with the high frequency/radio frequency power supply, and the workpiece and the working medium may not be connected with the high frequency/radio frequency power supply, or may be connected with the high frequency/radio frequency power supply.

Among them, it also includes the following steps:

There is a force sensor inside the rotating spindle, and the force sensor transmits the force signal to the feedback control system. The feedback control system regulates the linear drive according to the transmitted force signal to drive the rotating spindle to drive the tool electrode to move, so that the tool electrode and the hard-to-conduct material are in elastic contact. The machining gap is dynamically maintained at a predetermined value for continuous electrical discharge machining, and the hard-to-conduct materials are continuously melted and eroded by the high frequency/radio frequency discharge between the tool electrode and the working medium.

The beneficial effects of the present invention are as follows: the materials that are difficult to conduct electricity are placed in the working medium container, the tool electrode is installed on the rotating spindle, the spindle speed control system controls the working speed of the rotating spindle, and the rotating spindle speed range is continuously adjustable from 0-20000 r/min, The liquid supply unit continuously delivers the working medium to the machining gap between the difficult conductive material and the tool electrode. /Molecules oscillate and generate discharge, and the discharge effect will melt and erode the difficult-to-conduct materials near the discharge area, thereby realizing the discharge removal of the difficult-to-conduct materials. In addition, the rotating spindle has a built-in force sensor, and the force sensor during the machining process transmits the force signal to the feedback control system. Elastic contact, so that the machining gap between the tool electrode and the hard-to-conduct material is kept within the preset value range of the optimal machining gap, and the hard-to-conduct material is continuously processed. It can perform hole processing, plane processing, three-dimensional shape processing, etc. on difficult-to-conduct materials, which greatly improves the processing accuracy and processing quality; simplifies the structural design, reduces the manufacturing and processing costs of difficult-to-conduct materials, and realizes efficient processing of difficult-to-conduct materials.

Description of drawings

Fig. 1 is the structural representation of the ion/molecular oscillatory electrical discharge machining device of the present invention;

2 is a schematic diagram of the skin effect of the tool electrode and electrical machining of the present invention;

Fig. 3 is a schematic diagram of ion/molecular oscillating discharge machining;

Fig. 4 is another schematic diagram of ion/molecular oscillatory discharge machining;

Fig. 5 is a partial enlarged view of part A in Fig. 3;

6 is a schematic diagram of ion/molecular oscillating electrical discharge machining in an ordinary liquid fluid supply mode;

FIG. 7 is a schematic diagram of ion/molecular oscillating electrical discharge machining in the mode of liquid supply to the atomizing nozzle.

Reference numerals include:

1—Working medium container 2—First working medium 3—Second working medium

4—Tool electrode 5—Conductive column 6—High frequency/RF power supply

7—Spindle speed control system 8—Clamp 9—Difficult conductive materials

10—Atomizing Nozzle 11—Inlet System 12—Rotating Spindle

13—Liquid supply unit 14—Linear drive 15—Feedback control system

101—Electronics 102—Erosion products

Detailed ways

In order to facilitate the understanding of those skilled in the art, the present invention will be further described below with reference to the embodiments and the accompanying drawings, and the contents mentioned in the embodiments are not intended to limit the present invention.

Please refer to FIG. 1 to FIG. 7 , the present invention innovatively proposes an ion/molecular oscillating electrical discharge machining device and a machining method for difficult-to-conduct materials. When a high-frequency alternating current passes through the conductor, the The ions/molecules generate high-frequency oscillating discharge for electrical machining, and there is basically no ion migration during the machining process, which makes it have the high efficiency of ECDM (ie electrolytic electrical discharge composite machining) and the high machining accuracy of traditional EDM. .

The ion/molecular oscillating electrical discharge machining device for difficult conductive materials of the present invention includes a working medium container 1, a first working medium 2, a second working medium 3, a tool electrode 4, a conductive column 5, a high frequency/radio frequency power supply 6, Spindle speed control system 7, fixture 8, difficult conductive material 9, atomizing nozzle 10, power feeding system 11, rotating spindle 12, liquid supply unit 13, linear drive 14, feedback control system 15, the working medium container 1 is roughly hollow The working medium container 1 is used to accommodate the first working medium 2, the second working medium 3 and the difficult conductive material 9. The first working medium 2 is located in the working medium container 1, and the second working medium 3 is placed in the difficult conductive material. Material 9 on. Preferably, a clamp 8 is placed in the working medium container 1, the hard-to-conduct material 9 is placed on the fixture 8, and the hard-to-conduct material 9 is stably placed in the required position in the working medium container 1 with the help of the clamp 8, so as to prevent the difficult-to-conduct material 9 from facing each other. The working medium container 1 is moved and processing is poor.

The high frequency/radio frequency power supply 6 applies high frequency/radio frequency waves to the tool electrode 4 through the power feed system 11 (conductive column 5 and power feed module), and the frequency of the high frequency/radio frequency waves is between 100KHz-10MHz. According to actual needs, you can Adjust and change the frequency value of the high frequency/radio frequency wave, so that the contact between the second working medium 3 and the tool electrode 4 produces ion/molecular oscillation and discharge, and the discharge effect will melt and erode the difficult conductive material 9 near the discharge area, Thereby, the discharge removal of the hard-to-conduct material 9 is realized.

During the actual use of the ion/molecular oscillating electrical discharge machining device for difficult-to-conduct materials, according to actual needs, the positive and negative electrodes of the high-frequency/radio frequency power supply 6 can be electrically connected to the tool electrode 4 and the second wire respectively through two wires. Working medium 3. In order to simplify the structural design, the high frequency/radio frequency power supply 6 can also conduct the tool electrode 4 through only one wire. At this time, the high frequency/radio frequency power supply 6 is not electrically connected to the second working medium 3, which improves the assembly efficiency and reduces the complexity of the structure. properties and reduce manufacturing costs.

The present invention uses a solid medium as the second working medium 3, such as soap, alkaline solid electrolyte (NaOH, KOH, etc., preferably containing 20% alkaline electrolyte) and other solid media as the second working medium 3.

"Skin effect" is also called skin effect. "Skin effect" means that when current or voltage is conducted in a conductor with higher frequency electrons 101, it will gather on the outer surface of the total conductor, rather than evenly distributed over the entire conductor In the cross section of , the higher the frequency of the current or voltage, the more significant the skin effect is. The "skin effect" makes the outer surface of the tool electrode 4 gather a large number of electrons 101, so that the discharge current is mainly concentrated at the interface between the tool electrode and the working medium, The high temperature generated during discharge achieves melting and etching of the hard-to-conduct material 9 . Of course, the larger the current or the voltage, the higher the frequency of the current or the voltage, that is, the higher the machining energy of the tool electrode 4 during machining, and the faster the machining speed.

It also includes a linear drive member 14 for driving the tool electrode 4 to move up and down intermittently. A force sensor is installed in the rotating spindle 12. During the machining process of the tool electrode 4 on the hard-to-conduct material 9, the force sensor transmits the force signal to the feedback control. System 15, the feedback control system 15 adjusts and controls the linear drive 14 to drive the rotating spindle 12 to drive the tool electrode 4 to move up and down according to the force signal sent by the force sensor, so as to ensure that the size of the machining gap between the tool electrode 4 and the difficult-to-conduct material 9 is always dynamic. It is kept within the optimal preset value range, so that the high frequency/radio frequency discharge between the tool electrode 4 and the second working medium 3 can continuously melt and erode the hard-to-conduct material 9 .

During the actual processing of the hard-to-conduct material 9 by the tool electrode 4 , the spindle speed control system 7 adjusts and changes the speed of the rotating spindle 12 . The axis is extended along the vertical direction. Through the setting of the rotating spindle 12, during the actual use of the ion/molecular oscillating electrical discharge machining device, the rotating spindle 12 drives the centrifugal force when the tool electrode 4 rotates, so that the tool electrode 4 is connected to the hard conductive material. The melting and etching products 102 generated in the processing gap between 9 are automatically discharged, so as to avoid the melting and etching products 102 generated by the difficult-to-conduct materials 9 from interfering with the subsequent continuous processing of the difficult-to-conduct materials 9, and to ensure the processing efficiency and processing quality of the difficult-to-conduct materials 9 .

The first working medium 2 is usually a liquid, and the second working medium 3 can be a solid, a viscous liquid or a solid-liquid mixture. Both the first working medium 2 and the second working medium 3 contain sufficient ions, so that the discharge between the second working medium 3 and the tool electrode 4 can be sufficiently sustained and stable.

The liquid supply unit 13 is used to transport the first working medium 2 into the processing gap between the tool electrode 4 and the difficult-to-conduct material 9, so that the first working medium 2 infiltrates the tool electrode 4 and the difficult-to-conduct material 9, and the working medium container 1 is used for The first working medium 2 is accommodated. Through the setting of the liquid supply unit 13, the first working medium 2 can be continuously replenished between the tool electrode 4 and the difficult-to-conduct material 9, so that the high-frequency/radio frequency discharge can continue to be carried out, so that the difficult-to-conduct material 9 can be continuously used. processing.

According to actual needs, the liquid supply unit 13 can supply the first working medium 2 in the form of ordinary liquid fluid into the processing gap between the tool electrode 4 and the hard-to-conduct material 9, that is, the liquid supply unit 13 draws out the first working medium 2 And flow into the machining gap between the tool electrode 4 and the hard-to-conduct material 9 in the form of water flow, so that sufficient first working medium 2 is kept in the machining gap.

The liquid supply unit 13 is equipped with an atomizing nozzle 10 , and the first working medium 2 conveyed by the liquid supply unit 13 is atomized and sprayed between the tool electrode 4 and the hardly conductive material 9 through the atomizing nozzle 10 . With the arrangement of the atomizing nozzle 10, the first working medium 2 can be uniformly and fully sprayed between the tool electrode 4 and the hard-to-conduct material 9, so that the uniformity of high-frequency/radio frequency discharge between the tool electrode 4 and the hard-to-conduct material 9 , thereby improving the EDM quality and EDM consistency of the difficult-to-conduct material 9 .

The liquid supply unit 13 is also equipped with a filter unit, and the first working medium 2 contained in the working medium container 1 is filtered by the filter unit and then recycled and transported to the processing gap between the tool electrode 4 and the difficult conductive material 9, thereby infiltrating the tool electrode 4. with difficult conductive materials 9. By means of the setting of the filter unit, the corrosion product 102 produced by the melting of the difficult conductive material 9 in the first working medium 2 is filtered out, and the corrosion products mixed in the second working medium 3 are avoided while ensuring the circulating use of the first working medium 2. Except that the product 102 interferes with the normal processing of the hard-to-conduct material 9 , the EDM efficiency and EDM quality of the hard-to-conduct material 9 are improved.

The ion/molecular oscillating electrical discharge machining device for difficult-to-conduct materials of the present invention greatly simplifies the structural design, reduces the manufacturing and processing costs of the difficult-to-conduct materials 9 , realizes efficient processing of the difficult-to-conduct materials 9 , and facilitates holes for the difficult-to-conduct materials 9 . Processing, plane processing, three-dimensional shape processing and other processing requirements, improve processing accuracy and processing quality.

When the tool electrode 4 moves downwards, it will first contact the second working medium 3 and dissolve the second working medium 3 to form a groove that can accommodate the molten working medium, and the ions in the molten working medium will remain in the concave In the tank, as the processing continues, the solid medium (ie the second working medium 3) will be broken down by the tool electrode 4, and at this time, the conductive ions in the molten working medium will be immersed on the surface of the difficult conductive material 9, Under the effect of high frequency/radio frequency waves, ion/molecular oscillating discharge is continuously formed. Since the discharge temperature is extremely high, the temperature is much higher than the melting point of the difficult conductive material 9, so the surface of the difficult conductive material 9 can be eroded.

At the same time, the tool electrode 4 and the hard-to-conduct material 9 also undergo electrolytic etching in the processing area. Since this method is a rotary machining method, the machining and erosion products 102 can be extruded from the machining gap by means of the centrifugal force when the tool electrode 4 rotates at a high speed, so as to ensure continuous and stable processing.

The power feeding system 11 includes a conductive column 5 and a power feeding module. The power feeding module is composed of a conductive roller bearing and an insulating bearing seat. The conductive roller bearing is placed in the insulating bearing seat, and the insulating bearing seat is fixed on the outer shell of the rotating spindle 12. , the conductive column 5 is fixed on the power-in module, and the conductive column 5 is connected with the conductive roller bearing through a screw connection.

The ion/molecular oscillating electrical discharge machining method for difficult-to-conduct materials of the present invention comprises the following steps:

The high frequency/radio frequency power supply 6 is used to apply high frequency/radio frequency electric waves to the tool electrode 4 through the power feeding system, so that the contact between the working medium and the tool electrode 4 generates ion/molecular oscillation and discharge, so as to realize the melting erosion of the difficult conductive material 9 In addition, to realize the electrical discharge machining of difficult conductive materials 9, due to the "skin effect" (also called skin effect) of high frequency/radio frequency waves, the discharge current is mainly concentrated at the interface between the tool electrode and the working medium.

The ion/molecular oscillating electrical discharge machining method further comprises the following steps:

A force sensor is installed in the rotating spindle 12. During the processing of the difficult-to-conduct material 9 by the tool electrode 4, the force sensor transmits the force signal to the feedback control system 15, and the feedback control system 15 regulates the linear drive according to the transmitted force signal. The tool 14 drives the rotating spindle 12 to drive the tool electrode 4 to move, so that the tool electrode 4 and the hard-to-conduct material are in elastic contact (that is, to avoid direct contact between the tool electrode 4 and the hard-to-conduct material 9, and also to avoid the gap between the tool electrode 4 and the hard-to-conduct material 9). The gap size is too large), keep the machining gap at the optimal predetermined value for continuous electrical discharge machining, and continue to melt and etch the difficult conductive material 9 by means of high frequency/radio frequency discharge between the tool electrode 4 and the working medium.

Currently, there are three types of electrical machining methods applied to the difficult-to-conduct material 9: high-voltage electrical discharge machining, auxiliary electrode electrical discharge machining, and electrolytic electrical discharge composite machining. The characteristics of EDM are (1) the machining process is non-contact machining, and there is no macro cutting force during the machining process that can be used for micro-hole machining; (2) the electrolytic EDM composite machining equipment is simple and low-cost, and a better surface can be obtained. It has a good application prospect in microfabrication. However, high-voltage EDM uses a high-voltage power supply, which has large power generation energy and is difficult to control, resulting in poor surface quality of the processed samples. For samples with high precision requirements, one-time processing cannot be performed, and it is only suitable for thin-walled hard-to-finish samples. The conductive material 9 is punched. Although the processing speed is fast and the cost is low, it can only be used for rough machining because the machined surface is too rough; the auxiliary electrode EDM is to use the high temperature generated by the spark discharge instantaneously to thermally decompose the kerosene. The carbon, the metal sputtered from the tool electrode 4, and other compounds can always form a discharge circuit between the difficult-to-conduct material 9 and the tool electrode 4, so that the EDM can be carried out continuously. The surface quality is low, and the processing process is complicated; Electrolytic EDM (ECDM), because it adopts a combination of electrolytic process and EDM process, controls the machining process by controlling electrical parameters, although the two The combination can make the machining accuracy high, but the electrical parameters are not easy to control, resulting in low machining efficiency.

The method combines the characteristics of traditional electrical machining and the advantages of ECDM, and innovatively proposes an ion/molecular oscillatory electrical discharge machining method applied to difficult-to-conduct materials. The method is not affected by the electrical conductivity of the workpiece material, and only needs to connect the tool electrode with the machining power source to generate discharge. During the machining process, only the frequency of the high-frequency/radio frequency power source 6 needs to be controlled, and the machining parameters can be well controlled. In turn, it can quickly adapt to different processing situations. In addition, in order to ensure that the alkaline dielectric can be continuously replenished to the processing area, so that the ion/molecular oscillating electrical discharge machining can continue, the present invention proposes two liquid supply methods, the first method is for ordinary liquid fluid supply, and the other It is the method of atomization liquid supply, which can ensure the progress of processing well.

Compared with the prior art, the advantages of the present invention are:

1) It can efficiently process hard and brittle materials that are difficult to conduct electricity, such as engineering ceramics, semiconductors, etc.;

2) It can be applied to a variety of cutting occasions, such as hole processing, plane cutting, and three-dimensional shape processing, and it is easy to operate;

3) The solid medium (ie the second working medium 3) has a variety of choices and low cost, and can be matched according to different applications;

4) High processing efficiency and good precision.

Since EDM is also carried out in the electrolyte, it has the advantages of inheriting the advantages of ECDM and traditional EDM, and at the same time, the machining process can be controlled only by adjusting the frequency. Since most of the solid electrolytes are alkaline dielectrics, the raw materials are cheap, which greatly reduces the processing cost. At the same time, there are various types of dielectrics, which can be matched according to different needs. In addition, the tool electrode of the method can be made into various shapes, and the processing of various three-dimensional cavities can be realized.

The above contents are only preferred embodiments of the present invention. For those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific embodiments and application scope. limits.

Claims (9)

1. An ion/molecule oscillation discharge processing device for a material difficult to conduct electricity is characterized in that: the device comprises a working medium container, a first working medium, a second working medium, a liquid supply unit, a main shaft rotating speed control system, a feedback control system, a high-frequency/radio-frequency power supply, a rotating main shaft, a power inlet system and a tool electrode, wherein a difficult-to-conduct material is placed in the working medium container, the tool electrode is installed on the rotating main shaft, the main shaft rotating speed control system controls the working rotating speed of the rotating main shaft, the liquid supply unit continuously conveys the first working medium to a machining gap between the difficult-to-conduct material and the tool electrode, the high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through the power inlet system, so that the contact part of the second working medium and the tool electrode continuously generates ion/molecule oscillation and generates discharge, and the discharge effect melts the difficult-to-conduct material in a discharge area, thereby removing the difficult-to-conduct material; a force sensor is arranged in the rotating main shaft and transmits a force signal to a feedback control system, and the feedback control system adjusts the position of the rotating main shaft according to the transmitted force signal, so that a tool electrode is in elastic contact with a material difficult to conduct electricity, and a machining gap is kept at a preset value for continuous discharge machining; the first working medium is positioned in the working medium container, and the second working medium is placed on the difficult conductive material; the power feeding system comprises a conductive column and a power feeding module, the power feeding module is composed of a conductive roller bearing and an insulating bearing seat, the conductive roller bearing is arranged in the insulating bearing seat, the insulating bearing seat is fixed on the outer shell of the rotating main shaft, the conductive column is fixed on the power feeding module and is communicated with the conductive roller bearing through threaded connection, and a high-frequency/radio-frequency power supply transmits high-frequency/radio-frequency electric waves to the rotating tool electrode through the conductive column.

2. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the linear driving part is used for driving the rotary main shaft to move up and down, the force sensor transmits a force signal to the feedback control system, and the feedback control system regulates and controls the linear driving part according to the transmitted force signal, so that the linear driving part drives the rotary main shaft to drive the tool electrode to move intermittently, and the machining gap between the tool electrode and the material difficult to conduct electricity is dynamically kept at a required preset value.

3. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the rotating speed of the rotating main shaft is 0-20000 r/min, the rotating axis of the tool electrode extends in the vertical direction, the rotating main shaft can drive the tool electrode to rotate at a high speed, and the corrosion removal products of the discharge melting of the material difficult to conduct electricity are discharged from the machining gap by means of the centrifugal force generated by the high-speed rotation of the tool electrode.

4. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the first working medium is liquid, and the second working medium is any one of solid, viscous liquid or solid-liquid mixture.

5. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the liquid supply unit is used for conveying a liquid first working medium to a machining gap between the tool electrode and the material difficult to conduct electricity, so that the liquid first working medium infiltrates the tool electrode and the material difficult to conduct electricity, and the working medium container is used for containing the first working medium.

6. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the liquid supply unit is provided with an atomizing nozzle, and the first working medium conveyed by the liquid supply unit is atomized and sprayed to a machining gap between the tool electrode and the material difficult to conduct through the atomizing nozzle.

7. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the working medium container is used for containing a first working medium, the liquid supply unit is provided with a filter unit, the first working medium contained in the working medium container is filtered by the filter unit and then recycled and is conveyed to a machining gap between the tool electrode and the material which is difficult to conduct electricity to infiltrate the tool electrode and the material which is difficult to conduct electricity.

8. The ion/molecule oscillation discharge processing method for the hardly conductive material is characterized by comprising the following steps of:

the liquid supply unit continuously conveys a first working medium to a machining gap between the material which is difficult to conduct electricity and the tool electrode, the first working medium is located in a working medium container, a second working medium is placed on the material which is difficult to conduct electricity, a high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through an electricity inlet system, so that ions/molecules at the contact position of the second working medium and the tool electrode are vibrated and discharge is generated, the discharge effect enables the material which is difficult to conduct electricity in a discharge area to be molten, and therefore material removal is achieved; the power feeding system comprises a conductive column and a power feeding module, the power feeding module is composed of a conductive roller bearing and an insulating bearing seat, the conductive roller bearing is arranged in the insulating bearing seat, the insulating bearing seat is fixed on the outer shell of the rotating main shaft, the conductive column is fixed on the power feeding module and communicated with the conductive roller bearing through threaded connection, and a high-frequency/radio-frequency power supply transmits high-frequency/radio-frequency electric waves to the rotating tool electrode through the conductive column.

9. The ion/molecule oscillating electric discharge machining method for a hardly conductive material according to claim 8, characterized by further comprising the steps of:

and a force sensor is arranged in the rotating main shaft, the force sensor transmits a force signal to a feedback control system, the feedback control system regulates and controls a linear driving piece according to the transmitted force signal to drive the rotating main shaft to drive a tool electrode to move, so that the tool electrode is in elastic contact with the material difficult to conduct electricity, a machining gap is dynamically kept at a preset value for continuous discharge machining, and the material difficult to conduct electricity is continuously melted and removed by means of high-frequency/radio-frequency discharge between the tool electrode and a second working medium.

Images