CN103008807B - Electrochemical discharge machining device and method based on force feedback control feeding system - Google Patents
Electrochemical discharge machining device and method based on force feedback control feeding system Download PDFInfo
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Abstract
本发明公开了一种特种加工领域的基于力反馈控制进给系统的电化学放电加工装置与方法，其中：工具电极通过夹具固定在机床的Z轴上，在机床的Z轴上安装一个力传感器，力传感器与数据采集卡相连，数据采集卡引入到机床数控系统，机床数控系统通过机床伺服系统对电化学放电进给控制；力传感器检测工具电极与工件的接触力信号，经过相关处理后，由数据采集卡采集信号并接入数控系统，数控系统根据此信号来控制电化学放电加工的进给或回退。若接触力小于设定的参考力，则系统按照设置的进给速度进给；若接触力大于参考力，则系统按照设置的回退速度回退一定距离。
The invention discloses an electrochemical discharge machining device and method based on a force feedback control feed system in the field of special processing, wherein: the tool electrode is fixed on the Z-axis of the machine tool through a clamp, and a force sensor is installed on the Z-axis of the machine tool , the force sensor is connected to the data acquisition card, and the data acquisition card is introduced into the CNC system of the machine tool. The CNC system of the machine tool controls the electrochemical discharge feed through the machine tool servo system; the force sensor detects the contact force signal between the tool electrode and the workpiece, and after relevant processing, The signal is collected by the data acquisition card and connected to the numerical control system, and the numerical control system controls the feed or retraction of the electrochemical discharge machining according to the signal. If the contact force is smaller than the set reference force, the system will feed at the set feed speed; if the contact force is greater than the reference force, the system will retreat a certain distance at the set retract speed.
Description
技术领域technical field
本发明涉及一种特种加工领域内对非导电脆性材料进行微细加工的装置与方法，尤其涉及一种基于力反馈控制进给系统的电化学放电加工装置与方法。The invention relates to a device and method for micromachining non-conductive brittle materials in the field of special processing, in particular to an electrochemical discharge processing device and method based on force feedback control feed system.
背景技术Background technique
近年来，非导电脆性材料，例如，各种玻璃、陶瓷等都得到了广泛的应用，玻璃材料具有耐化学腐蚀、透明、低导电率和良好的生物相容性等特征，从而被应用在微加速器、微反应器、微型泵、医疗器械和光学系统中；而陶瓷材料具有高强度、高硬度、耐高温、耐磨损、抗腐蚀、绝缘性好等优异性能，在机械电子、航空航天、化工机械、陶瓷发动机、生物陶瓷和精密仪表等领域日益显示出广泛的应用前景，对非导电脆性材料加工技术的开发与研究已经受到世界各国的高度重视。与非导电脆性材料的其它加工方法相比，电化学放电加工(Electrochemical DischargeMachining，ECDM)技术具有较高的加工效率、宏观作用力小、表面质量高等优点，从而成为非导电脆性材料微细加工的理想方法。In recent years, non-conductive brittle materials, such as various glasses and ceramics, have been widely used. Glass materials have the characteristics of chemical corrosion resistance, transparency, low conductivity and good biocompatibility, so they are used in micro Accelerators, micro-reactors, micro-pumps, medical devices and optical systems; and ceramic materials have excellent properties such as high strength, high hardness, high temperature resistance, wear resistance, corrosion resistance, and good insulation. They are used in mechanical electronics, aerospace, The fields of chemical machinery, ceramic engines, bioceramics and precision instruments are increasingly showing broad application prospects. The development and research of non-conductive brittle material processing technology has been highly valued by countries all over the world. Compared with other processing methods for non-conductive brittle materials, Electrochemical Discharge Machining (ECDM) technology has the advantages of high processing efficiency, small macroscopic force, and high surface quality, so it has become an ideal for micro-machining of non-conductive brittle materials. method.
在电化学放电加工装置中，工具电极接电源的负极，辅助电极接电源的正极，电解质溶液多采用氢氧化钠(NaOH)或者氢氧化钾(KOH)等碱性电解质溶液，加工工件浸没在电解质溶液中，电解质溶液液面高于工件表面2mm左右，工具电极位于加工工件的上方并且工具电极的端部与工件表面保持接触或者位于工件表面的附近，工具电极的端部和辅助电极也同时浸入在电解质溶液中，当在工具电极和辅助电极之间施加电压之后，电解质溶液中便会有电解反应发生，在辅助电极发生的反应为：In the electrochemical discharge machining device, the tool electrode is connected to the negative pole of the power supply, and the auxiliary electrode is connected to the positive pole of the power supply. The electrolyte solution is mostly alkaline electrolyte solution such as sodium hydroxide (NaOH) or potassium hydroxide (KOH), and the processed workpiece is immersed in the electrolyte. In the solution, the liquid level of the electrolyte solution is about 2mm higher than the surface of the workpiece, the tool electrode is located above the workpiece and the end of the tool electrode is kept in contact with the surface of the workpiece or is located near the surface of the workpiece, and the end of the tool electrode and the auxiliary electrode are also immersed at the same time In the electrolyte solution, when a voltage is applied between the tool electrode and the auxiliary electrode, there will be an electrolytic reaction in the electrolyte solution, and the reaction at the auxiliary electrode is:
4(OH)-→2H2O+2O2↑+4e-，4(OH) - →2H 2 O+2O 2 ↑+4e - ,
在辅助电极上生成氧气；在工具电极上发生的反应为：Oxygen is generated at the auxiliary electrode; the reaction at the tool electrode is:
2H2O+2e-→2(OH)-+H2↑2H 2 O+2e - →2(OH) - +H 2 ↑
在工具电极上产生氢气泡，氢气泡生成以后会附着在工具电极的表面，并且随着气泡的增多而不断进行合并，最终在工具电极表面形成一个氢气膜，氢气膜对电极产生绝缘作用，因此在工具电极和电解质溶液之间形成电势差，当该电势差超过电火花放电的临界电压值以后，电火花放电现象就会发生。当工具电极和工件之间的距离小于25μm的时候，工件材料就会在不断放电产生的热量和化学腐蚀的作用下被蚀除。Hydrogen bubbles are generated on the tool electrode. After the hydrogen bubbles are generated, they will adhere to the surface of the tool electrode, and will continue to merge as the bubbles increase. Finally, a hydrogen film will be formed on the surface of the tool electrode. The hydrogen film will insulate the electrode, so A potential difference is formed between the tool electrode and the electrolyte solution, and when the potential difference exceeds the critical voltage value of the spark discharge, the spark discharge phenomenon occurs. When the distance between the tool electrode and the workpiece is less than 25 μm, the workpiece material will be etched away under the action of heat and chemical corrosion generated by continuous discharge.
在利用电化学放电加工对非导电脆性材料进行打孔过程中，氢气膜不具有一个恒定的状态，加工不同深度表现出不一样的状态，从而导致材料去除率一直发生变化。为了提高电化学放电加工的加工效率和加工质量，需尽量保证工具电极进给速度等于孔深的加工速度，这对进给系统提出了重要的要求。In the process of drilling non-conductive brittle materials by electrochemical discharge machining, the hydrogen film does not have a constant state, and different states are displayed at different depths of processing, resulting in constant changes in the material removal rate. In order to improve the processing efficiency and processing quality of electrochemical discharge machining, it is necessary to ensure that the tool electrode feed speed is equal to the processing speed of the hole depth, which puts forward important requirements for the feed system.
电化学放电加工的常规进给方式一般包括恒速进给和重力进给，这些进给方式存在不少弊端。恒速进给，即机床主轴带动工具电极以恒定的速度进给。电化学放电加工的工作过程中，孔的加工速度不是恒定的，而是随着加工深度的增加不断下降。加工一定深度以后，当恒速进给设置的速度大于孔深的加工速度时，会造成工具电极的变形、破损以及工件的破裂；当恒速进给设置的速度过小时，加工效率低，而且会造成侧面放电剧烈、孔径扩大等不良现象，严重影响电化学放电加工的质量，因此恒速进给无法满足电化学放电加工的要求。重力进给是指施加一个恒定的力使工具电极和工件紧密接触的一种进给方式。虽然重力进给能保证进给速度等于孔加工的速度，但加工一定深度后，重力进给中工具电极紧贴工件，而电化学放电加工的放电发生在工具电极与电解质溶液之间，需要加工孔中工具电极端面与工件上孔底面之间有一定的电解质溶液和绝缘气膜间隙，重力进给无法提供电化学放电加工所需要的新鲜的电解质溶液和绝缘气膜间隙，工具电极端面加工很难继续进行，加工速度大幅度降低，工具电极侧面放电加剧，加工孔的质量下降。The conventional feeding methods of EDM generally include constant speed feeding and gravity feeding, and these feeding methods have many disadvantages. Constant speed feed, that is, the machine tool spindle drives the tool electrode to feed at a constant speed. During the working process of electrochemical discharge machining, the machining speed of the hole is not constant, but decreases continuously with the increase of the machining depth. After processing a certain depth, when the speed set by the constant feed is greater than the processing speed of the hole depth, it will cause deformation and damage of the tool electrode and the rupture of the workpiece; when the speed set by the constant feed is too small, the processing efficiency is low, and It will cause adverse phenomena such as severe side discharge and enlarged aperture, which will seriously affect the quality of electrochemical discharge machining. Therefore, constant feed rate cannot meet the requirements of electrochemical discharge machining. Gravity feeding refers to a feeding method that applies a constant force to make the tool electrode and the workpiece come into close contact. Although gravity feed can ensure that the feed rate is equal to the speed of hole processing, after a certain depth of machining, the tool electrode is close to the workpiece in gravity feed, while the discharge of electrochemical discharge machining occurs between the tool electrode and the electrolyte solution, requiring machining There is a certain electrolyte solution and insulating gas film gap between the end surface of the tool electrode in the hole and the bottom surface of the hole on the workpiece. Gravity feeding cannot provide the fresh electrolyte solution and insulating gas film gap required for electrochemical discharge machining, and the machining of the tool electrode end surface is very difficult. It is difficult to continue, the processing speed is greatly reduced, the side discharge of the tool electrode is intensified, and the quality of the processed hole is reduced.
因此，本领域的技术人员致力于开发一种可以提高加工质量的电化学放电加工的方法。Therefore, those skilled in the art are devoting themselves to developing a method for electrochemical discharge machining that can improve machining quality.
发明内容Contents of the invention
有鉴于现有技术的上述缺陷，本发明提出了一种基于力反馈控制进给系统的电化学放电加工装置与方法。本发明使用力传感器检测工具电极与工件的接触力信号，以检测到的接触力信号为进给系统的输入信号来控制电化学放电加工的进给过程。In view of the above-mentioned defects in the prior art, the present invention proposes an electrochemical discharge machining device and method based on force feedback control feed system. The invention uses a force sensor to detect the contact force signal between the tool electrode and the workpiece, and uses the detected contact force signal as the input signal of the feed system to control the feed process of the electrochemical discharge machining.
为实现上述目的，本发明提供了一种基于力反馈控制进给系统的电化学放电加工装置，包括电解质溶液、加工工件、工具电极、辅助电极、加工电源、机床数控系统、机床伺服系统，该加工工件为非导电脆性材料，如玻璃或者陶瓷，还包括力传感器、数据采集卡、工具电极与力传感器的安装夹具，所述力传感器的输出端与所述数据采集卡的输入端相连，所述数据采集卡的输出端连接到所述机床数控系统，所述力传感器用于检测所述工具电极和加工工件之间的接触力，并输出对应于所述接触力的电压信号到所述数据采集卡，所述数据采集卡用于对所述电压信号进行采样并将经过采样的所述电压信号传送到所述机床数控系统，所述机床数控系统将所述经过采样的所述电压信号转换为所述接触力，所述机床数控系统根据所述接触力控制所述机床伺服系统的进给速度。In order to achieve the above object, the present invention provides an electrochemical discharge machining device based on force feedback control feed system, including electrolyte solution, workpiece, tool electrode, auxiliary electrode, processing power supply, machine tool numerical control system, machine tool servo system, the The processed workpiece is a non-conductive brittle material, such as glass or ceramics, and also includes a force sensor, a data acquisition card, a tool electrode and a mounting fixture for the force sensor. The output end of the force sensor is connected to the input end of the data acquisition card. The output terminal of the data acquisition card is connected to the numerical control system of the machine tool, and the force sensor is used to detect the contact force between the tool electrode and the workpiece, and output a voltage signal corresponding to the contact force to the data An acquisition card, the data acquisition card is used to sample the voltage signal and transmit the sampled voltage signal to the machine tool numerical control system, and the machine tool numerical control system converts the sampled voltage signal For the contact force, the CNC system of the machine tool controls the feed speed of the servo system of the machine tool according to the contact force.
优选地，加工电源为脉冲直流电源。Preferably, the processing power supply is a pulsed DC power supply.
优选地，工具电极通过工具电极与力传感器的安装夹具安装在机床的Z轴的进给端。Preferably, the tool electrode is installed on the feed end of the Z-axis of the machine tool through the installation fixture of the tool electrode and the force sensor.
优选地，力传感器安装在机床的Z轴上。Preferably, the force sensor is mounted on the Z-axis of the machine tool.
优选地，还包括放大器，所述力传感器的输出信号经放大器处理后接入数控系统。Preferably, an amplifier is also included, and the output signal of the force sensor is processed by the amplifier and then connected to the numerical control system.
本发明所涉及的基于力反馈控制进给系统的电化学放电加工方法，是通过力传感器检测工具电极与工件之间的接触力，机床数控系统将此接触力与事先设定的参考力进行比较，进而通过机床伺服系统控制工具电极的进给或回退。这种控制方法既能保证进给速度近似等于孔深加工的速度，又能在加工速度很小的时候提供电化学放电加工所需要的新鲜的电解质和绝缘气膜间隙。The electrochemical discharge machining method based on the force feedback control feed system involved in the present invention uses a force sensor to detect the contact force between the tool electrode and the workpiece, and the machine tool numerical control system compares the contact force with a preset reference force , and then control the feed or retreat of the tool electrode through the machine tool servo system. This control method can not only ensure that the feed rate is approximately equal to the speed of deep hole machining, but also provide the fresh electrolyte and insulating gas film gap required by electrochemical discharge machining when the machining speed is small.
本发明上述方法包括以下步骤：Said method of the present invention comprises the following steps:
(1)将力传感器安装在机床的Z轴上，将工具电极通过工具电极与力传感器的安装夹具固定在所述机床的Z轴的进给端，所述工具电极向加工工件以设定的速度进给，所述力传感器检测所述工具电极与所述加工工件之间的接触力，并输出与所述接触力对应的电压信号到数据采集卡；(1) The force sensor is installed on the Z-axis of the machine tool, and the tool electrode is fixed on the feed end of the Z-axis of the machine tool through the installation fixture of the tool electrode and the force sensor, and the tool electrode is set to the machining workpiece. speed feed, the force sensor detects the contact force between the tool electrode and the workpiece, and outputs a voltage signal corresponding to the contact force to the data acquisition card;
(2)所述数据采集卡对所述力传感器输出的所述电压信号进行采样；(2) The data acquisition card samples the voltage signal output by the force sensor;
(3)所述数据采集卡将经过采样的所述电压信号传送到所述机床的机床数控系统中，所述机床数控系统把经过所述采样的所述电压信号转换成所述接触力；(3) The data acquisition card transmits the sampled voltage signal to the machine tool numerical control system of the machine tool, and the machine tool numerical control system converts the sampled voltage signal into the contact force;
(4)将所述接触力与设置的参考力进行比较，若所述接触力小于所述参考力，则所述机床伺服系统按照设置的进给速度控制所述机床的Z轴的进给；若所述接触力大于所述参考力，则所述机床伺服系统按照设置的回退速度控制所述机床的Z轴回退；(4) comparing the contact force with a set reference force, if the contact force is smaller than the reference force, the machine tool servo system controls the feed of the Z-axis of the machine tool according to the set feed speed; If the contact force is greater than the reference force, the machine tool servo system controls the Z-axis retraction of the machine tool according to the set retraction speed;
(5)所述机床的Z轴的进给深度达到目标深度，进给系统停止；若所述机床的Z轴的进给深度未达到所述目标深度，则重复步骤(1)-(4)，直至达到所述目标深度。(5) The feed depth of the Z-axis of the machine tool reaches the target depth, and the feed system stops; if the feed depth of the Z-axis of the machine tool does not reach the target depth, then repeat steps (1)-(4) , until the target depth is reached.
优选地，步骤(4)中，将该接触力与设置的参考力进行比较，若该接触力小于所述参考力，则机床伺服系统按照设置的进给速度控制机床Z轴的进给；若该接触力大于参考力，则机床伺服系统按照设置的回退速度控制机床Z轴回退，机床Z轴回退的距离为10-20μm。Preferably, in step (4), the contact force is compared with a set reference force, and if the contact force is less than the reference force, the machine tool servo system controls the feed of the Z-axis of the machine tool according to the set feed speed; if If the contact force is greater than the reference force, the servo system of the machine tool controls the Z-axis retraction of the machine tool according to the set retraction speed, and the Z-axis retraction distance of the machine tool is 10-20 μm.
与电化学放电加工的常规进给系统相比，基于力反馈控制进给系统的电化学放电加工装置与方法的优点主要在于：Compared with the conventional feed system of electrochemical discharge machining, the advantages of the electrochemical discharge machining device and method based on force feedback control feed system mainly lie in:
通过力反馈控制进给系统，避免了工具电极与工件之间接触力过大而引起工具电极变形、断裂而损坏，也能保证加工通孔时工件不会因为接触力过大而发生破裂等不良现象，这样很大程度上提高了电化学放电加工的工件表面质量。The feed system is controlled by force feedback, which avoids the deformation and breakage of the tool electrode caused by excessive contact force between the tool electrode and the workpiece, and also ensures that the workpiece will not be broken due to excessive contact force when processing through holes. Phenomenon, which greatly improves the surface quality of the workpiece by electrochemical discharge machining.
通过力反馈控制进给系统，设置了工具电极回退程序，保证了工具电极端面与工件上孔底面之间有一定的间隙，电解质溶液能在此间隙中循环，绝缘气膜也能在此间隙形成，加工过程中产生的加工屑在电解质溶液循环运动的作用下能够比较容易地排出，可以大大提高电化学放电加工的稳定性。The feed system is controlled by force feedback, and the tool electrode retraction program is set to ensure a certain gap between the end surface of the tool electrode and the bottom surface of the hole on the workpiece. The electrolyte solution can circulate in this gap, and the insulating gas film can also be in this gap. Formation, the machining chips generated during the machining process can be easily discharged under the action of the electrolyte solution circulation, which can greatly improve the stability of electrochemical discharge machining.
采用力反馈控制进给后，采样频率比较高，系统的进给速度近似等于孔深的加工速度，而且使得电化学放电加工稳定进行，所以电化学放电加工的效率得到了很大提高。After using force feedback to control the feed, the sampling frequency is relatively high, the feed speed of the system is approximately equal to the processing speed of the hole depth, and the electrochemical discharge machining is carried out stably, so the efficiency of the electrochemical discharge machining has been greatly improved.
本发明的基于力反馈控制进给系统的电化学放电加工装置与方法在打孔过程中，当加工孔到达一定深度后，工具电极端面火花放电加工仍然能够比较稳定地进行，这样保证了加工区域的高温以及化学刻蚀加工稳定地进行，从而提高了加工的稳定性，加工孔的最大深度也得到了增加。In the electrochemical discharge machining device and method based on the force feedback control feed system of the present invention, during the drilling process, when the machining hole reaches a certain depth, the spark discharge machining on the end surface of the tool electrode can still be carried out relatively stably, thus ensuring the machining area. The high temperature and chemical etching process are carried out stably, thereby improving the stability of the process, and the maximum depth of the process hole has also been increased.
根据本发明提供的方法，工具电极的端面与加工工件的表面保持位于加工工件上孔底面25μm以内，保持了一定的加工间隙。本发明提出的基于力反馈控制进给系统的电化学放电加工装置与方法中，用力反馈控制进给系统来保证工具电极端面与工件上孔底面之间的间隙是本发明的核心。采用力反馈控制进给系统，保证了工具电极端面与工件上孔底面之间有一定的间隙，新鲜的电解质溶液容易进入此间隙中，绝缘气膜也能在此间隙形成，提高了工具电极端面气膜的稳定性，电化学放电加工端面放电能稳定地进行；采用力反馈控制进给系统，加工过程中产生的加工屑在电解质溶液循环运动的作用下能够比较容易地排出。在工具电极和辅助电极之间施加电压以后，工具电极上便有火花放电产生，采用力反馈控制进给系统，使工件始终处于电化学放电加工的范围之内，随着加工过程的不断进行，工件的材料不断被去除，当加工孔的深度超过常规进给方式的电化学放电加工所能到达的深度以后，工具电极端面放电仍能继续稳定进行，并且对工具电极侧面也有所抑制，从而有效地增加了电化学放电加工的稳定性和加工孔的最大深度。According to the method provided by the present invention, the end surface of the tool electrode and the surface of the processed workpiece are kept within 25 μm of the bottom surface of the upper hole of the processed workpiece, and a certain processing gap is maintained. In the electrochemical discharge machining device and method based on the force feedback control feed system proposed by the present invention, it is the core of the present invention to use the force feedback control feed system to ensure the gap between the end surface of the tool electrode and the bottom surface of the hole on the workpiece. The force feedback control feed system ensures a certain gap between the end surface of the tool electrode and the bottom surface of the hole on the workpiece. Fresh electrolyte solution can easily enter this gap, and an insulating gas film can also be formed in this gap, which improves the end surface of the tool electrode. The stability of the gas film, the end surface discharge of electrochemical discharge machining can be carried out stably; the feed system is controlled by force feedback, and the machining chips generated during the machining process can be discharged relatively easily under the action of the electrolyte solution circulation. After the voltage is applied between the tool electrode and the auxiliary electrode, spark discharge will be generated on the tool electrode. The feed system is controlled by force feedback, so that the workpiece is always within the range of electrochemical discharge machining. As the machining process continues, The material of the workpiece is continuously removed. When the depth of the machining hole exceeds the depth that can be reached by the electrochemical discharge machining of the conventional feeding method, the end surface discharge of the tool electrode can still continue to be stable, and the side of the tool electrode is also suppressed, thus effectively The stability of electrochemical discharge machining and the maximum depth of processed holes are greatly increased.
以下将结合附图对本发明的构思、具体结构及产生的技术效果作进一步说明，以充分地了解本发明的目的、特征和效果。The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.
附图说明Description of drawings
图1是本发明的一个较佳实施例中基于力反馈控制进给系统的电化学放电加工装置的结构示意图；Fig. 1 is a schematic structural view of an electrochemical discharge machining device based on force feedback control feed system in a preferred embodiment of the present invention;
图2是本发明的一个较佳实施例中的工具电极和加工工件接触的示意图；Fig. 2 is a schematic diagram of the contact between the tool electrode and the workpiece in a preferred embodiment of the present invention;
图3是本发明的一个较佳实施例中方法的流程图。Fig. 3 is a flowchart of the method in a preferred embodiment of the present invention.
具体实施方式Detailed ways
如图1所示，在本实施例中，本发明的基于力反馈控制进给系统的电化学放电加工装置包括电解质溶液1、工具电极2、加工工件3、辅助电极4、电解液槽5、工具电极与传感器的安装夹具6、加工电源7、力传感器8、机床Z轴9、机床伺服系统10、机床数控系统11、数据采集卡12。其中，B处表示工具电极与加工工件的接触部(距离为25μm左右)，电解质溶液1为氢氧化钠(NaOH)电解质溶液，工具电极2接电源负极，辅助电极4接电源正极，工具电极2和加工工件3同时浸没在氢氧化钠(NaOH)电解质溶液1中。在本实施例中使用脉冲直流电源作为加工电源7，加工电压为50V，频率为500Hz，占空比设置为50％，氢氧化钠(NaOH)溶液的质量浓度为30％，工具电极2材料为钨，电极直径为200μm，力传感器8采用高精度应变传感器，并接上与之配套的放大器来处理信号，工件材料为1mm厚度的石英玻璃或微晶云母陶瓷。As shown in Figure 1, in this embodiment, the electrochemical discharge machining device based on the force feedback control feed system of the present invention includes an electrolyte solution 1, a tool electrode 2, a workpiece 3, an auxiliary electrode 4, an electrolyte tank 5, Tool electrode and sensor installation jig 6 , processing power supply 7 , force sensor 8 , machine tool Z axis 9 , machine tool servo system 10 , machine tool numerical control system 11 , and data acquisition card 12 . Among them, B represents the contact part between the tool electrode and the workpiece (the distance is about 25 μm), the electrolyte solution 1 is sodium hydroxide (NaOH) electrolyte solution, the tool electrode 2 is connected to the negative pole of the power supply, the auxiliary electrode 4 is connected to the positive pole of the power supply, and the tool electrode 2 is connected to the negative pole of the power supply. Simultaneously with the processed workpiece 3, it is immersed in the sodium hydroxide (NaOH) electrolyte solution 1. In this embodiment, a pulsed DC power supply is used as the processing power supply 7, the processing voltage is 50V, the frequency is 500Hz, the duty cycle is set to 50%, the mass concentration of the sodium hydroxide (NaOH) solution is 30%, and the material of the tool electrode 2 is Tungsten, the electrode diameter is 200μm, the force sensor 8 adopts a high-precision strain sensor, and is connected with the matching amplifier to process the signal, and the workpiece material is quartz glass or microcrystalline mica ceramics with a thickness of 1mm.
当加工电源7在工具电极2和辅助电极4之间施加电压以后，工具电极2表面有氢气泡产生，随着气泡的不断增多，气泡通过不断合并，在工具电极2表面形成气膜，由于气膜的绝缘作用使得在工具电极2和氢氧化钠(NaOH)溶液之间形成电势差，当该电势差超过临界电压值以后，在工具电极2和氢氧化钠溶液(NaOH)之间就会有火花放电发生，放电产生的热能和化学腐蚀将工件材料蚀除。此时，启动基于力反馈控制进给系统，在加工中保持工具电极端面和工件加工面的距离为25μm左右。力传感器8检测检测工具电极与工件的接触力信号，并输出与所述接触力对应的电压信号；数据采集卡12对力传感器输出的电压信号进行采样，采样频率为18kHz；采样得到的电压信号引入到机床数控系统11中，机床数控系统11把此信号转换成原接触力的大小，传感器测量的接触力和机床数控系统转换得到的接触力误差范围在±5mN内，因此可认为二者等同；并将该接触力与设置的参考力进行比较，机床伺服系统10根据机床数控系统11提供的指令控制机床Z轴9的进给或回退，从而带动工具电极的进给或回退。When the processing power supply 7 applies a voltage between the tool electrode 2 and the auxiliary electrode 4, hydrogen bubbles are generated on the surface of the tool electrode 2, and as the bubbles continue to increase, the bubbles merge continuously to form a gas film on the surface of the tool electrode 2. The insulating effect of the film makes a potential difference between the tool electrode 2 and the sodium hydroxide (NaOH) solution. When the potential difference exceeds the critical voltage value, there will be a spark discharge between the tool electrode 2 and the sodium hydroxide solution (NaOH) Occurs, the thermal energy and chemical corrosion generated by the discharge will etch away the workpiece material. At this time, start the feed system based on force feedback control, and keep the distance between the tool electrode end surface and the workpiece processing surface at about 25 μm during processing. The force sensor 8 detects the contact force signal between the detection tool electrode and the workpiece, and outputs a voltage signal corresponding to the contact force; the data acquisition card 12 samples the voltage signal output by the force sensor, and the sampling frequency is 18kHz; the voltage signal obtained by sampling Introduced into the machine tool numerical control system 11, the machine tool numerical control system 11 converts this signal into the size of the original contact force, the error range of the contact force measured by the sensor and the contact force converted by the machine tool numerical control system is within ±5mN, so the two can be considered equivalent and comparing the contact force with the set reference force, the machine tool servo system 10 controls the feed or retreat of the Z-axis 9 of the machine tool according to the instructions provided by the machine tool numerical control system 11, thereby driving the feed or retreat of the tool electrode.
如图2所示，是本发明的一个较佳实施例中的工具电极和加工工件接触的示意图，包括工具电极2、加工工件3、气膜13、气泡14、加工屑15。工具电极2表面有氢气泡14产生，随着气泡的不断增多，气泡通过不断合并，在工具电极2表面形成气膜13；本实施例中工具电极2端面与工件3上孔底面之间有一定的间隙，新鲜的电解质溶液容易进入此间隙中，绝缘气膜13也能在此间隙形成，提高了工具电极端面气膜的稳定性，电化学放电加工端面放电能稳定地进行；另一方面，加工过程中产生的加工屑15在电解质溶液循环运动的作用下能够比较容易地排出。As shown in FIG. 2 , it is a schematic diagram of the contact between the tool electrode and the workpiece in a preferred embodiment of the present invention, including the tool electrode 2 , the workpiece 3 , the gas film 13 , the air bubble 14 , and the machining chips 15 . Hydrogen bubbles 14 are generated on the surface of the tool electrode 2. As the bubbles increase continuously, the bubbles merge continuously to form a gas film 13 on the surface of the tool electrode 2; The gap, fresh electrolyte solution can easily enter this gap, and the insulating gas film 13 can also be formed in this gap, which improves the stability of the gas film on the end face of the tool electrode, and the end face discharge of electrochemical discharge machining can be carried out stably; on the other hand, The machining debris 15 produced during the machining process can be discharged relatively easily under the action of the electrolyte solution circulation.
如图3所示，基于力反馈控制进给系统的电化学放电加工方法的控制流程图中，力传感器检测工具电极与工件之间的接触力F，并输出与所述接触力对应的电压信号；数据采集卡对力传感器输出的电压信号进行采样；采样得到的电压信号引入到机床数控系统中，把该电压信号转换成对应的接触力，并将其与设置的参考力进行比较；若该接触力小于参考力，则系统按照设置的进给速度进给；若该接触力大于参考力，则系统按照设置的回退速度回退一定距离，机床Z轴回退的距离为10-20μm；当进给深度达到目标深度，进给系统停止；若系统的进给深度未达到目标深度，则继续加工，重复进给控制步骤，直至达到目标深度。As shown in Figure 3, in the control flow chart of the electrochemical discharge machining method based on force feedback control feed system, the force sensor detects the contact force F between the tool electrode and the workpiece, and outputs a voltage signal corresponding to the contact force ; The data acquisition card samples the voltage signal output by the force sensor; the sampled voltage signal is introduced into the CNC system of the machine tool, and the voltage signal is converted into the corresponding contact force, and compared with the set reference force; if the If the contact force is smaller than the reference force, the system will feed at the set feed speed; if the contact force is greater than the reference force, the system will retreat a certain distance according to the set retraction speed, and the Z-axis retraction distance of the machine tool is 10-20μm; When the feed depth reaches the target depth, the feed system stops; if the feed depth of the system does not reach the target depth, the processing continues and the feed control steps are repeated until the target depth is reached.
在本发明中提出的基于力反馈控制进给的电化学放电加工装置与方法中，采用力反馈系统控制进给速度，保证了工具电极端面与工件上孔底面之间有一定的间隙，电解质溶液能在此间隙中循环，绝缘气膜也能在此间隙形成，提高了工具电极端面气膜的稳定性，让电化学放电加工的端面放电和化学刻蚀稳定地进行，并且加工过程中产生的加工屑在电解质溶液循环运动的作用下能够容易地排出。采用力反馈系统控制进给，使工件始终处于火花放电的加工范围之内，随着加工过程的不断进行，工件的材料便被不断被去除，当加工孔的深度超过常规电化学放电加工所能达到的深度以后，工具电极端面放电仍能继续稳定进行，而且对工具电极侧面也有所抑制，从而有效地增加了电化学放电加工的稳定性和加工深度。In the electrochemical discharge machining device and method based on force feedback control feed proposed in the present invention, the force feedback system is used to control the feed speed, which ensures that there is a certain gap between the end surface of the tool electrode and the bottom surface of the hole on the workpiece, and the electrolyte solution It can circulate in this gap, and the insulating gas film can also be formed in this gap, which improves the stability of the gas film on the end face of the tool electrode, allows the end face discharge and chemical etching of electrochemical discharge machining to proceed stably, and the The processing chips can be easily discharged under the action of the circulation of the electrolyte solution. The force feedback system is used to control the feed, so that the workpiece is always within the processing range of spark discharge. As the processing continues, the material of the workpiece is continuously removed. When the depth of the processed hole exceeds the conventional electrochemical discharge machining After reaching a certain depth, the end surface discharge of the tool electrode can continue to proceed stably, and the side surface of the tool electrode is also suppressed, thus effectively increasing the stability and processing depth of electrochemical discharge machining.
实施过程中发现，0-300μm深度范围内基于力反馈控制进给的电化学放电加工方法与常规电化学放电加工方法的加工速度相差无几。但是当加工深度超过400μm以后，常规进给方式电化学放电加工中，由于加工间隙几乎为0，由于很难提供电化学放电加工所需要的新鲜的电解质溶液和绝缘气膜间隙，工具电极端面电化学放电加工很难继续进行，加工速度大幅度降低，工具电极侧面放电加剧，加工孔的质量下降。然而基于力反馈控制进给的电化学放电加工深度超过400μm以后，由于具备电化学放电加工所需的新鲜的电解质溶液和绝缘气膜间隙，工具电极端面放电仍能继续稳定进行。During the implementation process, it was found that the electrochemical discharge machining method based on force feedback control feed in the depth range of 0-300 μm is almost the same as the conventional electrochemical discharge machining method. However, when the machining depth exceeds 400 μm, in the conventional feed mode electrochemical discharge machining, since the machining gap is almost 0, it is difficult to provide the fresh electrolyte solution and insulating gas film gap required by electrochemical discharge machining, and the end surface of the tool electrode is electrically charged. Chemical discharge machining is difficult to continue, the processing speed is greatly reduced, the side discharge of the tool electrode is intensified, and the quality of the processed hole is reduced. However, after the depth of EDM based on force feedback control feed exceeds 400 μm, the tool electrode end surface discharge can continue to be stable due to the fresh electrolyte solution and insulating gas film gap required for EDM.
以上详细描述了本发明的较佳具体实施例。应当理解，本领域的普通技术无需创造性劳动就可以根据本发明的构思作出诸多修改和变化。因此，凡本技术领域中技术人员依本发明的构思在现有技术的基础上通过逻辑分析、推理或者有限的实验可以得到的技术方案，皆应在由权利要求书所确定的保护范围内。The preferred specific embodiments of the present invention have been described in detail above. It should be understood that those skilled in the art can make many modifications and changes according to the concept of the present invention without creative efforts. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning or limited experiments on the basis of the prior art shall be within the scope of protection defined by the claims.
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| TW201034779A (en) * | 2009-03-27 | 2010-10-01 | Univ Nat Central | Apparatus and method for magnetic field assisted electrochemical discharge machining |
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| CN102528187A (en) * | 2012-01-16 | 2012-07-04 | 上海交通大学 | Reversed alignment electrochemical discharge machining method and device |
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| 六维力/加工电流模糊控制电解加工间隙的方法;陆永华等;《南京航空航天大学学报》;20090228;第41卷(第1期);第97-101页 * |
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