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CN112596318A - 一种电致变色智能玻璃复合薄膜及其制备方法 - Google Patents

一种电致变色智能玻璃复合薄膜及其制备方法 Download PDF

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CN112596318A
CN112596318A CN202011467865.0A CN202011467865A CN112596318A CN 112596318 A CN112596318 A CN 112596318A CN 202011467865 A CN202011467865 A CN 202011467865A CN 112596318 A CN112596318 A CN 112596318A
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汤永康
甘治平
李刚
沈洪雪
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CNBM Bengbu Design and Research Institute for Glass Industry Co Ltd
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Abstract

本发明公开一种电致变色智能玻璃复合薄膜，包括玻璃基底，玻璃基底顶面依次层叠有下电极层、2～5组的复合膜层、TiO2层、NiO层以及上电极层；所述复合膜层由WO3层与LiTaO3层叠加构成；在制备时，通过磁控溅射工艺依次沉积各个膜层即得到复合薄膜；本发明通过阴极变色材料WO3层与电解质LiTaO3层作为复合膜层，同时引入TiO2作为电子阻滞层，阳极变色NiO层；能够提升电致变色膜系的变色效率与保色性能。

Description

一种电致变色智能玻璃复合薄膜及其制备方法
技术领域
本发明涉及功能薄膜技术领域，具体是一种电致变色智能玻璃复合薄膜及其制备方法。
背景技术
电致变色玻璃是将电致变色材料和离子导体层/电解质层应用在透明导电层上，形成的是一种典型的电子学薄膜和光学薄膜相结合的光电子器件。对该玻璃施加较低的外界电压就能实现颜色的可逆变化。电致变色器件是实现电致变色材料价值的载体，而电致变色组件的性能又决定了电致变色材料的应用价值。电致变色智能窗由于具有高效节能、绿色环保、智能化等特点，其在建筑上的应用有着非常诱人的前景。随着科技的不断进步，一些节能玻璃逐渐被开发并得到应用，如低辐射玻璃、吸热玻璃、热反射玻璃、中空玻璃及真空玻璃等。
但这些节能玻璃只能静态地控制玻璃的光学性能，即节能玻璃产品完成后，只能改变固定的光的性能，不能随着人的意愿或外界环境动态地调节光的性能。这些节能玻璃的应用具有很大的局限性，而电致变色材料具有动态调节光学性能的特点，它能够高效地改变光的透过率，而且这种透光性是可以随着人们的意愿进行调控，进而实现对太阳光的动态调节。通过施加不同电压将其光学性能调节到不同级别，且在不同的级别上具有双稳态的性能，即在着色和褪色状态时，不需要外加电压维持，只在变色过程中需要能量，即利用了电致变色组件的保色性，从而进一步节约了能源。
因此，电致变色智能窗不仅节能环保，也是智能生活的重要组成部分。然而当下的电致变色玻璃组件存在变色效率较低，着色时间较长，同时保色性也有待进一步提升。
发明内容
本发明的目的在于提供一种电致变色智能玻璃复合薄膜及其制备方法，该薄膜能够提升电致变色膜系的变色效率与保色性能。
本发明解决其技术问题所采用的技术方案是：
一种电致变色智能玻璃复合薄膜，包括玻璃基底，所述玻璃基底顶面依次层叠有下电极层、2～5组的复合膜层、TiO2层、NiO层以及上电极层；所述复合膜层由WO3层与LiTaO3层叠加构成。
进一步的，所述下电极层与上电极层为ITO或FTO。
进一步的，所述复合膜层中WO3层的厚度为20～200nm，LiTaO3层的厚度为5～50nm。
进一步的，所述TiO2层的厚度为10～100nm。
本发明还提供一种电致变色智能玻璃复合薄膜的制备方法，包括以下步骤：
S1、取玻璃基底，在玻璃基底顶面制备透明导电薄膜，作为下电极层；
S2、采用磁控溅射工艺，以金属钨为靶材，在透明导电薄膜表面沉积WO3层；然后以LiTaO3陶瓷靶，在WO3层表面沉积LiTaO3层，完成一组复合膜层的制备；
S3、重复1～4次步骤S2，再制备1～4组复合膜层；
S4、采用磁控溅射工艺，以金属钛为靶材，在最上面的复合膜层表面沉积TiO2层；
S5、采用磁控溅射工艺，以金属镍为靶材，在TiO2层表面沉积NiO层；
S6、在NiO层表面制备透明导电薄膜作为上电极层，得到上述方案所述的电致变色智能玻璃复合薄膜。
进一步的，所述下电极层与上电极层为ITO或FTO；WO3层的厚度为20～200nm，LiTaO3层的厚度为5～50nm；TiO2层的厚度为10～100nm。
本发明的有益效果是，本发明通过阴极变色材料WO3层与电解质LiTaO3层作为复合膜层，循环堆叠的复合膜层结构实现电致变色膜系通电与断电时离子的分级输入与抽出，提高着色效率；同时引入TiO2作为电子阻滞层，当膜系通电时，电势驱动下的电子透过TiO2层注入阳极变色NiO层，产生变色，而断电时，电子或离子受到TiO2层阻滞，使得回迁变得困难并长时间停留于NiO层内，使得膜系在断电时亦能长时间处于着色状态，从而提升了膜系的保色性能。
附图说明
下面结合附图和实施例对本发明进一步说明：
图1是本发明的结构示意图。
具体实施方式
如图1所示，本发明提供一种电致变色智能玻璃复合薄膜，包括玻璃基底，所述玻璃基底顶面依次层叠有下电极层2、2～5组的复合膜层3、TiO2层4、NiO层5以及上电极层6；所述复合膜层3由WO3层31与LiTaO3层32叠加构成。
所述下电极层与上电极层均为ITO或FTO；复合膜层中WO3层的厚度为20～200nm，LiTaO3层的厚度为5～50nm；TiO2层4的厚度为10～100nm。
本发明还提供一种电致变色智能玻璃复合薄膜的制备方法，包括以下步骤：
S1、取玻璃基底1，在玻璃基底1顶面制备透明导电薄膜，作为下电极层2；
下电极层为ITO或FTO，表面方阻为3～20 Ω/□；
S2、采用磁控溅射工艺，以金属钨为靶材，在透明导电薄膜表面沉积WO3层；
溅射功率为80W，氩气流量为30sccm，氧气流量为2.0sccm，溅射压强为0.8Pa，制备厚度20～200nm；然后以LiTaO3陶瓷靶，在WO3层表面沉积LiTaO3层，溅射功率为100W，氩气流量为30sccm，溅射压强为1.0Pa，制备厚度5～50nm，完成一组复合膜层的制备；
S3、重复1～4次步骤S2，再制备1～4组复合膜层；
S4、采用磁控溅射工艺，以金属钛为靶材，在最上面的复合膜层表面沉积TiO2层；溅射功率为50W，氩气流量为30sccm，氧气流量为1.5sccm，溅射压强为0.5Pa；制备厚度为10～100nm；TiO2层作为电子阻滞层；
S5、采用磁控溅射工艺，以金属镍为靶材，在TiO2层表面沉积NiO层；溅射功率为100W，氩气流量为30sccm，氧气流量为1.5sccm，溅射压强为1.0 Pa，制备厚度200nm；
S6、在NiO层表面制备透明导电薄膜作为上电极层，以ITO靶材直流溅射，玻璃基底加热为100℃，溅射功率为150W，氩气流量为30sccm，氧气流量为0.2sccm，溅射压强为0.1Pa，表面方阻为3～20 Ω/□；得到上述方案所述的电致变色智能玻璃复合薄膜。
以上所述，仅是本发明的较佳实施例而已，并非对本发明作任何形式上的限制；任何熟悉本领域的技术人员，在不脱离本发明技术方案范围情况下，都可利用上述揭示的方法和技术内容对本发明技术方案做出许多可能的变动和修饰，或修改为等同变化的等效实施例。因此，凡是未脱离本发明技术方案的内容，依据本发明的技术实质对以上实施例所做的任何简单修改、等同替换、等效变化及修饰，均仍属于本发明技术方案保护的范围内。

Claims (6)

1.一种电致变色智能玻璃复合薄膜，包括玻璃基底，其特征在于，所述玻璃基底顶面依次层叠有下电极层、2～5组的复合膜层、TiO2层、NiO层以及上电极层；
所述复合膜层由WO3层与LiTaO3层叠加构成。
2.根据权利要求1所述的一种电致变色智能玻璃复合薄膜，其特征在于，所述下电极层与上电极层为ITO或FTO。
3.根据权利要求1所述的一种电致变色智能玻璃复合薄膜，其特征在于，所述复合膜层中WO3层的厚度为20～200nm，LiTaO3层的厚度为5～50nm。
4.根据权利要求1所述的一种电致变色智能玻璃复合薄膜，其特征在于，所述TiO2层的厚度为10～100nm。
5.一种电致变色智能玻璃复合薄膜的制备方法，其特征在于，包括以下步骤：
S1、取玻璃基底，在玻璃基底顶面制备透明导电薄膜，作为下电极层；
S2、采用磁控溅射工艺，以金属钨为靶材，在透明导电薄膜表面沉积WO3层；然后以LiTaO3陶瓷靶，在WO3层表面沉积LiTaO3层，完成一组复合膜层的制备；
S3、重复1～4次步骤S2，再制备1～4组复合膜层；
S4、采用磁控溅射工艺，以金属钛为靶材，在最上面的复合膜层表面沉积TiO2层；
S5、采用磁控溅射工艺，以金属镍为靶材，在TiO2层表面沉积NiO层；
S6、在NiO层表面制备透明导电薄膜作为上电极层，得到权利要求1所述的电致变色智能玻璃复合薄膜。
6.根据权利要求5所述的一种电致变色智能玻璃复合薄膜的制备方法，其特征在于，所述下电极层与上电极层为ITO或FTO；WO3层的厚度为20～200nm，LiTaO3层的厚度为5～50nm；TiO2层的厚度为10～100nm。
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