CN112208013B - Dressing method - Google Patents

Abstract

Provided is a trimming method capable of suppressing the time required for planarization trimming. The trimming method has the following steps: a position detection step (ST 4) for shooting the trimming plate held on the holding table by a shooting unit and detecting the position of the outer periphery of the trimming plate; a positioning step (ST 6) of positioning the direction from one end of the trimming plate toward the other end in parallel with the axis of the spindle, and positioning the lower end of the cutting tool outside one end of the trimming plate at the cutting depth of the cutting into the trimming plate according to the position of the outer peripheral edge of the trimming plate detected by the position detection step (ST 4); and a dressing step (ST 7) in which, after the positioning step (ST 6) is performed, the cutting tool is moved relative to the dressing plate so as to cut from one end of the dressing plate to the other end, thereby flattening the tip of the cutting tool.

Description

Trimming method

Technical Field

The invention relates to a planarization and finishing method for a cutting tool.

Background technique

A cutting device uses a cutting tool to cut various plate-shaped workpieces such as semiconductor substrates made of silicon, gallium arsenide, SiC (silicon carbide), sapphire, or resin packaging substrates, ceramic substrates, etc. When the cutting device cuts the workpiece, sometimes the front end of the cutting edge of the cutting tool will be deformed into a circular arc cross-section.

Some cutting devices perform flattening and trimming regularly, flattening the front end of the cutting edge of the cutting tool along the axis of the main shaft (for example, see Patent Document 1). In the trimming method shown in Patent Document 1, the cutting tool is moved from one end to the other end of a trimming plate attached to a belt and mounted on a frame in the axis direction of the main shaft, and the trimming plate is cut by the cutting tool to perform flattening and trimming. Therefore, the cutting device stores the size of the trimming plate in advance, and sets the moving distance of the cutting tool according to the size of the trimming plate.

Patent Document 1: Japanese Patent Application Publication No. 2010-588

The trimming method shown in Patent Document 1 holds the frame by a conveying unit and conveys it in a manner that the center of the frame overlaps the center of the holding table. Therefore, in the trimming method, due to the error of the pasting position of the trimming plate relative to the frame and the conveying error, the center of the chuck and the center of the trimming plate may not be consistent, so the cutting tool is moved between positions closer to the outside from the outer periphery of the trimming plate according to the excess width. However, in the trimming method shown in Patent Document 1, the moving distance of the cutting tool increases accordingly with the excess width, so the time required for trimming becomes longer, and it is urgently desired to shorten the time required for trimming. In particular, compared with the case where the cutting tool is relatively moved in the X-axis direction to cut the workpiece as in normal cutting, flattening trimming applies a load to the cutting tool, so the relative moving speed is set to a low speed. Therefore, with respect to flattening trimming, it is urgently desired to set the excess width as short as possible.

Summary of the invention

The present invention has been made in view of the above problem, and an object of the present invention is to provide a trimming method capable of reducing the time required for planarization trimming.

In order to solve the above-mentioned problems and achieve the purpose, the dressing method of the present invention is a flattening dressing method for a cutting tool fixed to the front end of a spindle, characterized in that the dressing method has the following steps: a position detection step, using a shooting component to shoot a dressing plate held on a workbench to detect the position of the outer peripheral edge of the dressing plate; a positioning step, positioning the direction from one end of the dressing plate toward the other end to be parallel to the axis of the spindle, and according to the position of the outer peripheral edge of the dressing plate detected by the position detection step, positioning the lower end of the cutting tool outside one end of the dressing plate at a specified height position for cutting into the dressing plate; and a dressing step, after implementing the positioning step, the cutting tool is relatively moved relative to the dressing plate to cut from the one end of the dressing plate to the other end, thereby flattening the front end of the cutting tool.

Alternatively, the trimming method comprises the following steps: a cutting completion area storage step, storing information related to the cutting completion area of the trimming plate that has been cut by the trimming step; a processing step, after the trimming step is implemented, moving the trimming plate from the holding worktable, holding the workpiece by the holding worktable, and cutting the workpiece on the holding worktable by the cutting tool; a second positioning step, after the processing step is implemented, moving the workpiece from the holding worktable, holding the trimming plate by the holding worktable, positioning the lower end of the cutting tool at a prescribed height position for cutting into the trimming plate outside one end of the trimming plate based on the position of the outer peripheral edge of the trimming plate detected by the position detection step and the information related to the cutting completion area of the trimming plate stored by the cutting completion area storage step; and a second trimming step, after the second positioning step is implemented, moving the cutting tool relative to the trimming plate to cut from the one end of the trimming plate to the other end.

The trimming method of the present invention has the effect of being able to reduce the time required for planarization trimming.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view showing a configuration example of a cutting device for carrying out a dressing method according to a first embodiment.

FIG. 2 is a perspective view showing an example of a dressing plate for performing planarization dressing on the cutting blade of the cutting device shown in FIG. 1 .

3 is an example of a cross-sectional view of the tip of the cutting edge of the cutting tool before planarization dressing in the dressing method according to the first embodiment.

FIG. 4 is an example of a cross-sectional view of the tip of the cutting edge of the cutting tool after the planarization and trimming of the cutting tool shown in FIG. 3 .

FIG. 5 is a plan view of the trimming plate, and shows a trimming start position and a trimming end position, etc., of the trimming method according to the first embodiment.

FIG. 6 is a side cross-sectional view of the trimming plate, illustrating the cutting depth and the like of the trimming method according to the first embodiment.

FIG. 7 is a flowchart showing the flow of the trimming method according to the first embodiment.

FIG. 8 is a side view showing a processing step of the trimming method shown in FIG. 7 in partial cross-section.

FIG. 9 is a plan view of the workpiece in a position detection step of the dressing method shown in FIG. 7 .

10 is a side view of the cutting unit and the trimming plate showing a positioning step of the trimming method shown in FIG. 7 in partial cross-section.

FIG. 11 is a top view of the cutting unit and the trimming plate shown in FIG. 10 .

12 is a side view showing a cutting unit and a dressing plate in a dressing step of the dressing method shown in FIG. 7 in a partial cross-section.

FIG. 13 is a top view of the cutting unit and the trimming plate shown in FIG. 12 .

14 is a top view of the trimmed plate after the trimming step of the trimming method shown in FIG. 7 .

15 is a top view of the cutting unit and the trimming plate in the second positioning step of the trimming method shown in FIG. 7 .

FIG. 16 is a plan view of a cutting unit and a dressing plate in a second dressing step of the dressing method shown in FIG. 7 .

Description of symbols

1: cutting device; 10: holding table; 21: cutting tool; 22: spindle; 30: imaging unit (imaging component); 90: trimming plate; 91: one end; 92: the other end; 200: workpiece; 304: cutting depth (specified height position); 601: cutting completion area; ST2: processing step; ST4: position detection step; ST6: positioning step; ST7: trimming step; ST8: cutting completion area storage step; ST10: second positioning step; ST11: second trimming step.

Detailed ways

With reference to the accompanying drawings, the mode (embodiment) for implementing the present invention is described in detail. The present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include contents that can be easily thought of by those skilled in the art, and substantially the same contents. In addition, the structures described below can be appropriately combined. In addition, various omissions, substitutions or changes in the structure can be made within the scope of the gist of the present invention.

[Implementation Method 1]

The dressing method of embodiment 1 of the present invention is described with reference to the accompanying drawings. FIG. 1 is a perspective view showing a structural example of a cutting device that implements the dressing method of embodiment 1. FIG. 2 is a perspective view showing an example of a dressing plate for flattening and dressing the cutting tool of the cutting device shown in FIG. 1. FIG. 3 is an example of a cross-sectional view of the front end of the cutting edge of the cutting tool before flattening and dressing of the dressing method of embodiment 1. FIG. 4 is an example of a cross-sectional view of the front end of the cutting edge of the cutting tool after flattening and dressing of the cutting tool shown in FIG. 3. FIG. 5 is a top view of a dressing plate, showing the dressing start position and dressing end position, etc., of the dressing method of embodiment 1. FIG. 6 is a side cross-sectional view of a dressing plate, showing the cutting depth, etc. of the dressing method of embodiment 1.

The trimming method of embodiment 1 is implemented by the cutting device 1 shown in Figure 1. The cutting device 1 shown in Figure 1 is a device for cutting (processing) a workpiece 200 that is a plate-like object. In embodiment 1, the workpiece 200 is a wafer such as a circular plate-shaped semiconductor wafer or an optical device wafer with silicon, sapphire, gallium, etc. as a base material. The workpiece 200 has a device 203 formed on the front side 201 in an area divided in a grid shape by a plurality of predetermined dividing lines 202 formed in a grid shape. The workpiece 200 of the present invention can be a so-called TAIKO (registered trademark) wafer that is thinned in the central portion and has a thick wall portion formed in the outer peripheral portion. In addition to the wafer, it can also be a rectangular packaging substrate, a ceramic plate, a glass plate, etc. having a plurality of resin-sealed devices. The workpiece 200 has a disk-shaped adhesive tape 206 attached to its back surface 204 , and a ring-shaped annular frame 205 having an inner diameter larger than the outer diameter of the workpiece 200 is attached to the outer periphery of the adhesive tape 206 , so that the workpiece 200 is supported by an inner opening of the annular frame 205 .

The cutting device 1 shown in FIG1 is a device that holds a workpiece 200 having a predetermined dividing line 202 by a holding table 10 and cuts the workpiece 200 along the predetermined dividing line 202 by a cutting tool 21. As shown in FIG1, the cutting device 1 comprises: a holding table 10 that attracts and holds the workpiece 200 by a holding surface 11; a cutting unit 20 that cuts the workpiece 200 held by the holding table 10 by a cutting tool 21 mounted on a spindle 22; a photographing unit 30 as a photographing member that photographs the workpiece 200 held by the holding table 10; and a control unit 100 as a control member.

In addition, as shown in Figure 1, the cutting device 1 has at least: an X-axis moving unit 41, which holds the worktable 10 for processing and feeding in the X-axis direction parallel to the horizontal direction and the width direction of the device body 2; a Y-axis moving unit 42, which indexes and feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and the length direction of the device body 2 and perpendicular to the X-axis direction; a Z-axis moving unit 43, which cuts and feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction; and a rotation moving unit 44, which rotates the holding worktable 10 around an axis parallel to the Z-axis direction, and performs processing and feeding in the X-axis direction together with the holding worktable 10 through the X-axis moving unit 41.

The holding table 10 is in the shape of a disk, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. In addition, the holding table 10 is configured to be movable by an X-axis moving unit and to be rotatable by a rotary drive source. The holding table 10 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 200. In addition, a plurality of clamping portions 12 for clamping the annular frame 211 are provided around the holding table 10.

The cutting unit 20 has a spindle 22 on which a cutting tool 21 is mounted for cutting a workpiece 200 held by the holding table 10. The cutting unit 20 is arranged to be movable in the Y-axis direction by a Y-axis moving unit 42 and in the Z-axis direction by a Z-axis moving unit 43 relative to the workpiece 200 held by the holding table 10.

As shown in Fig. 1, the cutting unit 20 is provided on a support frame 3 erected from the device body 2 by means of a Y-axis moving unit 42, a Z-axis moving unit 43, etc. The cutting unit 20 can position the cutting tool 21 at any position of the holding surface 11 of the holding table 10 by means of the Y-axis moving unit 42 and the Z-axis moving unit 43.

The cutting unit 20 includes, in addition to the cutting tool 21 and a spindle 22 with the cutting tool 21 mounted at the front end, a spindle housing 23 that moves in the Y-axis direction and the Z-axis direction via a Y-axis moving unit 42 and a Z-axis moving unit 43 and accommodates the spindle 22 in a manner that allows it to rotate freely around its axis; and a spindle motor (not shown) that is accommodated in the spindle housing 23 and allows the spindle 22 to rotate around its axis.

The cutting tool 21 is an extremely thin cutting tool having a substantially ring shape. The spindle 22 rotates the cutting tool 21 to cut the workpiece 200. The spindle 22 is housed in a spindle housing 23, and the spindle housing 23 is supported by a Z-axis moving unit 43. The axis of the spindle 22 and the cutting tool 21 of the cutting unit 20 is set to be parallel to the Y-axis direction.

The X-axis moving unit 41 moves the holding table 10 in the X-axis direction as the machining feed direction, thereby performing machining feed relative to the holding table 10 and the cutting unit 20 along the X-axis direction. The Y-axis moving unit 42 moves the cutting unit 20 in the Y-axis direction as the indexing feed direction, thereby performing indexing feed relative to the holding table 10 and the cutting unit 20 along the Y-axis direction. The Z-axis moving unit 43 moves the cutting unit 20 in the Z-axis direction as the cutting feed direction, thereby performing cutting feed relative to the holding table 10 and the cutting unit 20 along the Z-axis direction.

The X-axis moving unit 41, the Y-axis moving unit 42 and the Z-axis moving unit 43 have: a well-known ball screw, which is configured to rotate freely around the axis; a well-known pulse motor, which causes the ball screw to rotate around the axis; and a well-known guide rail, which supports the workbench 10 or the cutting unit 20 to be able to move freely in the X-axis direction, the Y-axis direction or the Z-axis direction.

In addition, the cutting device 1 has: an X-axis direction position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction; a Y-axis direction position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction; and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale and a reading head parallel to the X-axis direction or the Y-axis direction. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction using the pulse of the pulse motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the position of the holding table 10 in the X-axis direction, the Y-axis direction, or the Z-axis direction of the cutting unit 20 to the control unit 100. In addition, in the first embodiment, each position is predetermined using the distance from the reference position in the X-axis direction, the Y-axis direction, and the Z-axis direction.

In addition, the cutting device 1 has: a box elevator 50, which carries a box 51 for storing the workpiece 200 before and after cutting and moves the box 51 in the Z-axis direction; a cleaning unit 60, which cleans the workpiece 200 after cutting; and a conveying unit (not shown) which allows the workpiece 200 to enter and exit the box 51 and conveys the workpiece 200.

The box 51 stores a plurality of workpieces 200 supported by the annular frame 205 at intervals in the Z-axis direction. In addition, the box 51 stores a dressing plate 90 shown in FIG. 2 . The dressing plate 90 shown in FIG. 2 is used to flatten the cutting tool 21 whose cutting edge 24 has a cross-sectional arc shape, for example, as shown in FIG. 3 by repeatedly cutting the workpiece 200. Flattening means that the cutting tool 21 shown in FIG. 3 is moved in the Y-axis direction parallel to the axis of the spindle while cutting into the dressing plate 90, so that the front end of the cutting edge 24 is formed flat along the Y-axis direction as shown in FIG. 4 .

In the first embodiment, the planar shape of the trimming plate 90 is formed into a rectangular flat plate. The trimming plate 90 is formed by mixing abrasive grains such as WA (white corundum, alumina system) and GC (green silicon carbide, silicon carbide system) into a resin or ceramic bonding material. The trimming plate 90 has a circular plate-shaped adhesive tape 206 attached to one surface similarly to the workpiece 200, and a ring frame 205 is attached to the outer periphery of the adhesive tape 206, so that the trimming plate 90 is supported by the opening inside the ring frame 205. In addition, the trimming plate 90 is arranged at the center of the ring frame 205, but sometimes the relative position with respect to the ring frame 205 is set to a preset position, but it may deviate from the preset position.

The trimming plate 90 is supported by the annular frame 205 and stored in a predetermined position in the Z-axis direction of the box 51. When flattening and trimming are performed, the trimming plate 90 is sucked and held on the holding table 10 after being carried out of the box 51, and the annular frame 205 is clamped by the clamping portion 12. During flattening and trimming, the cutting blade 24 of the cutting tool 21 of the cutting unit 20 moving in the Y-axis direction is cut while the trimming plate 90 is held on the holding table 10, so that a cutting groove 95 (shown by a dotted line in FIG. 5 ) recessed from the upper surface is formed on the trimming plate 90, thereby flattening and trimming the cutting tool 21.

In the flattening trimming, the cutting tool 21 moves relatively in the Y-axis direction from one end 91 toward the other end 92 of the trimming plate 90 held by the holding table 10, or from the other end 92 toward one end 91, relative to the trimming plate 90, thereby forming the cut groove 95. In the flattening trimming, after forming the cut groove 95, the cutting tool 21 moves in the X-axis direction, and moves relatively in the Y-axis direction from the other end 92 toward the one end 91 of the trimming plate 90 held by the holding table 10, or from the one end 91 toward the other end 92, relative to the trimming plate 90, thereby forming the cut groove 95.

In the first embodiment, in the flattening trimming, the cutting tool 21 sequentially forms cutting grooves 95 parallel to the Y-axis direction from one end 93 in the X-axis direction toward the other end 94. In addition, compared with the usual trimming in which the cutting tool 21 is relatively moved in the X-axis direction relative to the trimming plate 90, the flattening trimming moves the cutting tool 21 in the Y-axis direction, so the relative movement speed of the cutting tool 21 relative to the trimming plate 90 is slower.

The imaging unit 30 is fixed so as to move integrally with the cutting unit 20. The imaging unit 30 has an imaging element for imaging the area to be segmented of the workpiece 200 before cutting held by the holding table 10. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 30 images the workpiece 200 held by the holding table 10 to obtain an image for performing alignment (i.e., aligning the workpiece 200 with the cutting tool 21), and outputs the obtained image to the control unit 100.

In addition, when performing the flattening trimming, the photographing unit 30 photographs the outer periphery of the trimming plate 90 held by the holding table 10, and outputs the photographed image to the control unit 100. In addition, in the first embodiment, the photographing unit 30 photographs the center of the length direction of all the outer peripheries of the trimming plate 90. The relative position of the photographing unit 30 with respect to the holding table 10 when photographing the outer periphery of the trimming plate 90 is preset, and the field of view of the photographing unit 30 is set to a range in which the outer periphery can be photographed even if the trimming plate 90 is displaced relative to the annular frame 205.

The control unit 100 controls the above-mentioned components of the cutting device 1 respectively so that the cutting device 1 performs the processing and flattening of the workpiece 200. In addition, the control unit 100 is a computer, and the control unit 100 has: an operation processing device having a microprocessor such as a CPU (central processing unit); a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory); and an input/output interface device.

The control unit 100 is connected to a display unit (not shown) composed of a liquid crystal display device or the like that displays the state or image of the processing operation, an input unit used by the operator to register the processing content information, etc., and a notification unit 110. The input unit is composed of at least one of an external input device such as a touch panel and a keyboard provided in the display unit. The notification unit 110 emits at least one of light and sound under the control of the control unit 100 to notify the operator.

The storage device of the control unit 100 registers the processing conditions from the input unit. The operation processing device of the control unit 100 performs operation processing according to the processing conditions and computer programs stored in the storage device, and outputs the control signal for controlling the cutting device 1 to the above-mentioned components of the cutting device 1 via the input and output interface device. In the first embodiment, the processing conditions include the X-axis direction margin width 301, the Y-axis direction margin width 302, the X-axis direction feed width 303, the number of movements of the cutting tool 21 relative to the trimming plate 90 shown in FIG. 5, and the cutting depth 304 shown in FIG. These X-axis direction margin width 301, the Y-axis direction margin width 302, the X-axis direction feed width 303, the number of movements of the cutting tool 21 relative to the trimming plate 90, and the cutting depth 304 are processing conditions when the cutting device 1 performs flattening trimming.

The X-axis direction margin width 301 is the distance in the X-axis direction from one end 93 in the X-axis direction of the trimming plate 90 that has not yet been subjected to flattening trimming to the trimming start position 401 or the trimming end position 402 when the flattening trimming is first performed. In addition, the trimming start position 401 is the position of the lower end of the cutting edge 24 of the cutting tool 21 when the trimming plate 90 held by the holding table 10 is outside and the cutting unit 20 starts to move relative to the trimming plate 90 in the Y-axis direction when the flattening trimming is performed. The trimming end position 402 is the position of the lower end of the cutting edge 24 of the cutting tool 21 when the trimming plate 90 held by the holding table 10 is outside and the cutting unit 20 ends its movement relative to the trimming plate 90 in the Y-axis direction when the flattening trimming is performed.

The Y-axis direction margin width 302 is the distance in the Y-axis direction from the end of the trimming plate 90 in the Y-axis direction to the trimming start position 401 or the trimming end position 402. In addition, in order to make the relative moving speed of the cutting tool 21 in the flattening trimming relative to the trimming plate 90 slower than the relative moving speed of the cutting tool 21 in the normal trimming relative to the trimming plate 90, the Y-axis direction margin width 302 is preferably an extremely short distance.

The X-axis direction feed width 303 is the distance in the X-axis direction between the trimming start position 401 and the trimming end position 402, that is, the distance when the cutting tool 21 is moved in the X-axis direction relative to the trimming plate 90 after being moved in the Y-axis direction relative to the trimming plate 90 during flattening trimming.

The number of times the cutting tool 21 moves relative to the trimming plate 90 indicates the number of times and the direction in which the cutting tool 21 is moved relative to the trimming plate 90 in the Y-axis direction in one flattening trimming. In the first embodiment, the number of times the cutting tool 21 moves relative to the trimming plate 90 indicates the number of times and the direction in which the cutting tool 21 is moved from one end 91 toward the other end 92 in the Y-axis direction of the trimming plate 90 held by the holding table 10 and then from the other end 92 toward one end 91 relative to the trimming plate 90 in the Y-axis direction, but the present invention is not limited thereto.

The cutting depth 304 is a predetermined height position at which the cutting tool 21 cuts into the trimming plate 90, and indicates the distance from the lower end of the cutting edge 24 of the cutting tool 21 that cuts into the trimming plate 90 to the upper surface of the trimming plate 90 during flattening trimming. In addition, the control unit 100 stores information related to the outer diameter of the cutting edge 24 of the cutting tool 21. The information related to the outer diameter of the cutting edge 24 of the cutting tool 21 is registered from the input unit or registered in the storage device by the reference position setting mechanism (not shown) of the cutting device 1.

1, the control unit 100 includes a cutting completion area storage unit 101, a trimming range setting unit 102, and a control unit 103. The cutting completion area storage unit 101 stores information related to a cutting completion area 601 (shown in FIG. 14) of the trimming plate 90 formed by the cutting edge 24 of the cutting tool 21 in the flattening trimming. In the first embodiment, as information related to the cutting completion area 601, the cumulative number of times the cutting tool 21 moves relative to the trimming plate 90 in the Y-axis direction during the flattening trimming is stored.

When the number of movements as information related to the cutting completion area 601 is stored as zero in the cutting completion area storage unit 101, the trimming range setting unit 102 calculates the position of the outer peripheral edge of the trimming plate 90 based on the image obtained by the imaging unit 30 of the outer peripheral edge of the trimming plate 90 that has not undergone flattening trimming, and sets the trimming start position 401 and the trimming end position 402 during flattening trimming based on the margin widths 301 and 302, the X-axis direction feed width 303, the number of movements of the cutting tool 21 relative to the trimming plate 90 during flattening trimming, and the cutting depth 304.

When the number of movements as information related to the cutting completion area 601 is stored as more than one time in the cutting completion area storage unit 101, the trimming range setting unit 102 sets the trimming start position 401 and the trimming end position 402 during the flattening trimming according to the cumulative number of movements of the cutting tool 21 relative to the trimming plate 90 in the Y-axis direction during the flattening trimming, the margin widths 301 and 302, the X-axis direction feed width 303, the number of movements of the cutting tool 21 relative to the trimming plate 90 during the flattening trimming, and the cutting depth 304 stored in the cutting completion area storage unit 101.

The control unit 103 controls the components of the cutting device 1 to cause the cutting device 1 to perform a machining operation and a planarization process on the workpiece 200 .

The functions of the cut area storage unit 101 are realized by a storage device. The functions of the dressing range setting unit 102 and the control unit 103 are realized by a computer program stored in the storage device being executed by a processing unit.

Next, this specification describes the processing action of the cutting device 1, that is, the dressing method of Embodiment 1. Fig. 7 is a flow chart showing the flow of the dressing method of Embodiment 1. The processing action of the cutting device 1 of Embodiment 1, that is, the dressing method, is a method for flattening the cutting tool 21 that divides the workpiece 200 into individual components 203 and is fixed to the front end of the spindle 22.

In the cutting device 1 of the above structure, the operator registers the processing conditions in the control unit 100, and sets the box 51 containing the workpiece 200 before cutting and the dressing plate 90 on the box elevator 50. Then, when the cutting device 1 receives the start instruction of the processing operation from the operator via the input unit, the processing operation, i.e., the dressing method of Embodiment 1, starts. When the cutting device 1 starts the processing operation, the control unit 103 of the control unit 100 drives the spindle motor to rotate the spindle 22 around the axis at the rotation speed set in the processing conditions, and determines whether it is the flattening dressing time (step ST1).

The flattening timing refers to the timing of flattening the cutting tool 21 of the cutting unit 20. In the first embodiment, the flattening timing is, for example, every time a preset number of workpieces 200 are cut, and the flattening timing is registered in the control unit 100 as a part of the processing conditions. In addition, the flattening timing of the present invention is not limited to every time a preset number of workpieces 200 are cut. When the control unit 103 of the control unit 100 of the cutting device 1 determines that it is not the flattening timing (step ST1: No), it enters the processing step ST2.

(Processing steps)

Fig. 8 is a side view showing a processing step of the dressing method shown in Fig. 7 in partial cross section. Processing step ST2 is a step of holding the workpiece 200 on the holding table 10 with the cutting tool 21 while holding the workpiece 200 on the holding table 10 .

In the processing step ST2, the control unit 103 of the control unit 100 controls the conveying unit to take out the workpiece 200 before cutting from the box 51 and place the back side 204 on the holding surface 11 of the holding table 10 via the adhesive tape 206. The control unit 103 of the control unit 100 controls the vacuum suction source and the like to suck and hold the back side 204 of the workpiece 200 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and clamps the annular frame 205 with the clamping unit 12. The control unit 103 of the control unit 100 controls the X-axis moving unit 41 to move the holding table 10 toward the bottom of the cutting unit 20, controls the imaging unit 30 to capture the workpiece 200, and performs alignment based on the image captured by the imaging unit 30.

In the processing step ST2, the control unit 103 of the control unit 100 controls the cutting unit 20 and each moving unit 41, 42, 43, 44 to move the workpiece 200 and the cutting unit 20 relatively along the predetermined dividing line 202, and as shown in FIG8, the cutting tool 21 cuts into each predetermined dividing line 202 to divide the workpiece 200 into each device 203. In the processing step ST2, the control unit 103 of the control unit 100 controls the conveying unit to convey the workpiece 200 divided into each device 203 to the cleaning unit 60, controls the cleaning unit 60 to clean the workpiece 200, and then controls the conveying unit to store the workpiece 200 in the box 51, and enters step ST13.

In addition, when the control unit 103 of the control unit 100 determines that it is time for flattening (step ST1: yes), it is determined whether information related to the cutting completion area 601 is stored in the cutting completion area storage unit 101, that is, it is determined whether the number of movements of the information related to the cutting completion area 601 stored in the cutting completion area storage unit 101 is stored as zero (step ST3).

When the control unit 103 of the control unit 100 determines that the cutting completion area storage unit 101 does not store information related to the cutting completion area 601, that is, when it determines that the number of movements of the information related to the cutting completion area 601 stored in the cutting completion area storage unit 101 is stored as zero times (step ST3: No), it enters the position detection step ST4.

(Position detection step)

Fig. 9 is a plan view of the workpiece in the position detection step of the trimming method shown in Fig. 7. The position detection step ST4 is a step of detecting the position of the outer peripheral edge of the trimming plate 90 by imaging the trimming plate 90 held on the holding table 10 using the imaging unit 30.

In the position detection step ST4, the control unit 103 of the control unit 100 controls the conveying unit to take out the trimming plate 90 from the cassette 51 and place the trimming plate 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206. The control unit 103 of the control unit 100 controls the vacuum suction source and the like to suck and hold the trimming plate 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and clamps the annular frame 205 with the clamping unit 12. The control unit 103 of the control unit 100 controls the X-axis moving unit 41 to move the holding table 10 toward the bottom of the cutting unit 20, and controls the imaging unit 30 to capture the outer periphery of the trimming plate 90.

In the first embodiment, in the position detection step ST4, the photographing unit 30 photographs the central portion of each outer periphery in the photographing range 501 shown by the dotted line in FIG. 9, obtains an image of the central portion of each outer periphery in the photographing range 501, and outputs the obtained image to the control unit 100. In the position detection step ST4, the control unit 103 of the control unit 100 calculates the position of the outer periphery of the trimming plate 90 held by the holding table 10 based on the image in the photographing range 501, the detection results of each position detection unit, etc., and stores it in the storage device, and enters the trimming range setting step ST5.

(Trimming range setting steps)

The trimming range setting step ST5 is a step of setting the trimming start position 401 and the trimming end position 402 of the flattening trimming. In the trimming range setting step ST5, the trimming range setting unit 102 of the control unit 100 calculates the trimming start position 401 and the trimming end position 402 with reference to the position of the outer peripheral edge of the trimming plate 90, the margin widths 301 and 302 of the machining conditions, the X-axis direction feed width 303, the number of movements of the cutting tool 21 relative to the trimming plate 90 during the flattening trimming, and the cutting depth 304.

In the first embodiment, in the trimming range setting step ST5, the trimming range setting unit 102 calculates a position from one end 93 in the X-axis direction of the trimming plate 90 to the other end 94 according to the X-axis direction margin width 301 and a position from one end 91 in the Y-axis direction of the trimming plate 90 to the outside of the trimming plate 90 according to the Y-axis direction margin width 302 as the initial trimming start position 401. In the first embodiment, in the trimming range setting step ST5, the trimming range setting unit 102 calculates a position from one end 93 in the X-axis direction of the trimming plate 90 to the other end 94 according to the X-axis direction margin width 301 and a position from the other end 92 in the Y-axis direction of the trimming plate 90 to the outside of the trimming plate 90 according to the Y-axis direction margin width 302 as the initial trimming end position 402. When the trimming range setting step ST5 calculates the trimming start position 401 and the trimming end position 402, the process proceeds to the positioning step ST6.

(Positioning steps)

Fig. 10 is a side view of the cutting unit and the trimming plate showing the positioning step of the trimming method shown in Fig. 7 in partial cross-section. Fig. 11 is a top view of the cutting unit and the trimming plate shown in Fig. 10 .

The positioning step ST6 is a step in which the direction from one end 91 of the trimming plate 90 toward the other end 92 is positioned parallel to the axis of the spindle 22, i.e., the Y-axis direction, according to the position of the outer peripheral edge of the trimming plate 90 stored in the storage device, and the lower end of the cutting edge 24 of the cutting tool 21 is positioned at a cutting depth 304 into the trimming plate 90 on the outside of one end 91 of the trimming plate 90 according to the position of the outer peripheral edge of the trimming plate 90 detected by the position detection step ST4.

In the positioning step ST6, the control unit 103 of the control unit 100 controls the rotation moving unit 44 to adjust the direction of the worktable 10 around the axis so that the direction from one end 91 to the other end 92 of the trimming plate 90 is parallel to the Y-axis direction. In the positioning step ST6, the control unit 103 of the control unit 100 controls each moving unit 41, 42, 43 to position the lower end of the cutting edge 24 of the cutting tool 21 of the cutting unit 20 at the initial trimming start position 401 calculated in the trimming range setting step ST5, and enters the trimming step ST7.

(Finishing steps)

Fig. 12 is a side view of a cutting unit and a trimming plate showing a trimming step of the trimming method shown in Fig. 7 in partial cross-section. Fig. 13 is a top view of the cutting unit and the trimming plate shown in Fig. 12. Fig. 14 is a top view of the trimming plate after the trimming step of the trimming method shown in Fig. 7.

The dressing step ST7 is a step in which the cutting tool 21 is relatively moved relative to the dressing plate 90 after the positioning step ST6 is implemented, and the cutting tool 21 is cut from one end 91 to the other end 92 of the dressing plate 90, thereby flattening the front end of the cutting edge 24 of the cutting tool 21. In the dressing step ST7, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 from one end 91 to the other end 92 of the dressing plate 90 in the Y-axis direction, as shown in FIG. 12 and FIG. 13, so that the cutting edge 24 of the cutting tool 21 cuts into the dressing plate 90 to form a cutting groove 95. In the dressing step ST7, the control unit 103 of the control unit 100 controls the X-axis moving unit 41 and the Y-axis moving unit 42 to stop the movement of the cutting tool 21 in the Y-axis direction at the dressing end position 402, and then moves the cutting tool 21 to the other end 94 side in the X-axis direction according to the X-axis direction feed width 303 and positions it at the next dressing start position 401.

In the dressing step ST7, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 in the Y-axis direction from the other end 92 to the one end 91 of the dressing plate 90, so that the cutting edge 24 of the cutting tool 21 cuts into the dressing plate 90 to form the cutting groove 95. In the first embodiment, in the dressing step ST7, the control unit 103 of the control unit 100 moves the cutting tool 21 in the Y-axis direction according to the number of movements of the cutting tool 21 relative to the dressing plate 90 during the flattening dressing of the processing conditions, and flattens the front end of the cutting edge 24 of the cutting tool 21. In the first embodiment, when two cutting grooves 95 are formed as shown in FIG. 14 in the dressing step ST7, the process proceeds to the cutting completion area storage step ST8.

(Storage step of the cutting completed area)

The cutting completed area storage step ST8 is a step in which the cutting completed area storage unit 101 stores information related to the cutting completed area 601 of the trimming plate 90 cut by the flattening trimming in the trimming step ST7. In the first embodiment, in the cutting completed area storage step ST8, the cutting completed area storage unit 101 stores the cumulative number of times as the information related to the cutting completed area 601, which is the number of times already stored plus the number of times the cutting tool 21 moves relative to the trimming plate 90 in the Y-axis direction in the trimming step ST7. When the cutting completed area storage unit 101 stores the cumulative number of times the cutting tool 21 moves relative to the trimming plate 90 in the Y-axis direction during the flattening trimming as the information related to the cutting completed area 601 in the cutting completed area storage step ST8, the process proceeds to step ST13.

In addition, when the control unit 103 of the control unit 100 determines that information related to the cutting completion area 601 is stored in the cutting completion area storage unit 101, that is, when it determines that the number of movements of the information related to the cutting completion area 601 stored in the cutting completion area storage unit 101 is stored more than once (step ST3: yes), it enters the second trimming range setting step ST9.

(Second trimming range setting step)

The second trimming range setting step ST9 is a step of setting a trimming start position 401 and a trimming end position 402 of planarization trimming when the trimming completed area 601 , ie, the cut groove 95 is formed on the trimming plate 90 .

In the second trimming range setting step ST9, the trimming range setting unit 102 of the control unit 100 calculates the trimming start position 401 and the trimming end position 402 with reference to the cumulative number of movements of the cutting tool 21 relative to the trimming plate 90 in the Y-axis direction during flattening trimming stored in the cutting completion area storage unit 101, the position of the outer peripheral edge of the trimming plate 90 stored in the storage device, the allowance widths 301 and 302 of the processing conditions, the X-axis direction feed width 303, the number of movements of the cutting tool 21 relative to the trimming plate 90 during flattening trimming, and the cutting depth 304.

In the first embodiment, in the second trimming range setting step ST9, the trimming range setting unit 102 calculates the position of the center in the width direction of the cut groove 95 formed most recently in the trimming step ST7 or the second trimming step ST11, and calculates the position from the calculated center in the width direction of the cut groove 95 formed most recently to the position of the other end 94 according to the feed width 303 in the X-axis direction and from the one end 91 in the Y-axis direction of the trimming plate 90 to the outside of the trimming plate 90 according to the margin width 302 in the Y-axis direction as the initial trimming start position 401. In the first embodiment, in the second trimming range setting step ST9, the trimming range setting unit 102 calculates the position from the calculated center in the width direction of the cut groove 95 formed most recently to the position of the other end 94 according to the feed width 303 in the X-axis direction and from the other end 92 in the Y-axis direction of the trimming plate 90 to the outside of the trimming plate 90 according to the margin width 302 in the Y-axis direction as the initial trimming end position 402. When the trimming start position 401 and the trimming end position 402 are calculated in the second trimming range setting step ST9 , the process proceeds to the second positioning step ST10 .

(Second positioning step)

Fig. 15 is a top view of the cutting unit and the trimming plate in the second positioning step of the trimming method shown in Fig. 7. The second positioning step ST10 is a step of holding the trimming plate 90 by the holding table 10, and positioning the lower end of the cutting edge 24 of the cutting tool 21 at a predetermined height position of the cutting edge 24 into the trimming plate 90 outside one end 91 of the trimming plate 90 based on the position of the outer peripheral edge of the trimming plate 90 detected in the position detection step ST4 and the information related to the cutting completion area of the trimming plate 90 stored in the cutting completion area storage step ST8.

In the first embodiment, in the second positioning step ST10, the control unit 103 of the control unit 100 controls the conveying unit to take out the trimming plate 90 from the cassette 51 and place the trimming plate 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206. The control unit 103 of the control unit 100 controls the vacuum suction source and the like to suck and hold the trimming plate 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and clamps the annular frame 205 using the clamping unit 12.

In the second positioning step ST10, the control unit 103 of the control unit 100 controls the rotation moving unit 44 according to the position of the outer peripheral edge of the trimming plate 90 stored in the storage device, and adjusts the direction of the holding table 10 around the axis so that the direction from one end 91 to the other end 92 of the trimming plate 90 is parallel to the Y-axis direction. In the second positioning step ST10, the control unit 103 of the control unit 100 controls each moving unit 41, 42, 43 to position the lower end of the cutting edge 24 of the cutting tool 21 of the cutting unit 20 at the initial trimming start position 401 calculated in the second trimming range setting step ST9, and enters the second trimming step ST11.

(Second trimming step)

Fig. 16 is a top view of the cutting unit and the dressing plate in the second dressing step of the dressing method shown in Fig. 7. The second dressing step ST11 is a step of flattening the front end of the cutting edge 24 of the cutting tool 21 by moving the cutting tool 21 relative to the dressing plate 90 to cut from one end 91 to the other end 92 of the dressing plate 90 after the second positioning step ST10 is performed.

In the second dressing step ST11, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 from one end 91 to the other end 92 of the dressing plate 90 in the Y-axis direction, and as shown in FIG16 , a cutting groove 95 is formed on the dressing plate 90. In the second dressing step ST11, the control unit 103 of the control unit 100 controls the X-axis moving unit 41 and the Y-axis moving unit 42 to stop the movement of the cutting tool 21 in the Y-axis direction at the dressing end position 402. Then, the cutting tool 21 is moved to the other end 94 side in the X-axis direction according to the X-axis direction feed width 303, and positioned at the next dressing start position 401.

In the second trimming step ST11, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 in the Y-axis direction from the other end 92 to the one end 91 of the trimming plate 90, so that the cutting tool 21 cuts into the trimming plate 90 to form the cutting groove 95. In the first embodiment, in the second trimming step ST11, the control unit 103 of the control unit 100 moves the cutting tool 21 in the Y-axis direction according to the number of movements of the cutting tool 21 relative to the trimming plate 90 during the flattening trimming of the processing conditions, and flattens the front end of the cutting edge 24 of the cutting tool 21. In the first embodiment, when two cutting grooves 95 are formed in the second trimming step ST11, the process proceeds to the second cutting completion area storage step ST12.

(Second cutting completed area storage step)

The second cutting completed area storage step ST12 is a step in which the cutting completed area storage unit 101 stores information related to the cutting completed area 601 of the trimming plate 90 cut by the flattening trimming in the second trimming step ST11. In the first embodiment, in the cutting completed area storage step ST8, the cutting completed area storage unit 101 stores the cumulative number of times as the information related to the cutting completed area 601, which is the number of times the cutting tool 21 moves relative to the trimming plate 90 in the Y-axis direction in the second trimming step ST11, added to the number of times the cutting tool 21 has been stored. When the cutting completed area storage unit 101 stores the information related to the cutting completed area 601 in the cutting completed area storage step ST8, the process proceeds to step ST13.

The control unit 103 of the control unit 100 determines in step ST13 whether the flattening trimming of the cutting tool 21 can be performed using the trimming plate 90 held by the holding table 10. In the first embodiment, the control unit 103 of the control unit 100 calculates the position of the center in the width direction of the cutting groove 95 formed most recently in the second trimming step ST11, and calculates the position close to the other end 94 according to the feed width 303 in the X-axis direction from the calculated center in the width direction of the cutting groove 95 formed most recently. When the distance from the position close to the other end 94 according to the feed width 303 in the X-axis direction to the other end 94 is less than the X-axis direction margin width 301, the control unit 103 of the control unit 100 determines that the flattening trimming of the cutting tool 21 cannot be performed using the trimming plate 90 held by the holding table 10 (step ST13: No), and operates the notification unit 110 to notify the operator (step ST14).

The control unit 103 of the control unit 100 returns to step ST1 when the distance from the position close to the other end 94 according to the X-axis direction feed width 303 to the other end 94 is greater than the X-axis direction margin width 301. Therefore, in the trimming method of the first embodiment, in the second and subsequent processing steps ST2, after at least one of the trimming step ST7 and the second trimming step ST11 is performed, the trimming plate 90 is moved out of the holding table 10 and stored in the box 51. In addition, in the trimming method of the first embodiment, in the second positioning step ST10, after the processing step ST2 is performed, the workpiece 200 is moved out of the holding table 10 and stored in the box 51, and the trimming plate 90 is held by the holding table 10.

As described above, the dressing method of the first embodiment includes the position detection step ST4 , the positioning step ST6 , the dressing step ST7 , the cut area storage step ST8 , the processing step ST2 , the second positioning step ST10 , and the second dressing step ST11 .

As described above, in the trimming method and cutting device 1 of the first embodiment, the position detection step ST4 for detecting the position of the outer peripheral edge of the trimming plate 90 is performed, so that the Y-axis direction margin width 302 itself can be suppressed without excessively setting the Y-axis direction margin width 302. As a result, the trimming method and cutting device 1 have the effect of suppressing the time required for flattening trimming.

In the trimming method and cutting device 1 of the first embodiment, after the trimming steps ST7 and ST11, information on the trimming completed area 601 of the trimming plate 90 is stored in the trimming completed area storage unit 101. As a result, the trimming method and cutting device 1 can perform flattening trimming while avoiding the trimming completed area 601.

In addition, the trimming method and the cutting device 1 of the first embodiment store the cumulative number of times the cutting tool 21 moves relative to the trimming plate 90 in the Y-axis direction during the flattening trimming as information related to the trimming completed area 601 of the trimming plate 90 in the trimming completed area storage unit 101. As a result, the trimming method and the cutting device 1 can reliably avoid the trimming completed area 601 and perform the flattening trimming.

In addition, the present invention is not limited to the above-mentioned embodiment. That is, various modifications can be made and implemented within the scope not departing from the gist of the present invention.

Claims (2)

1. A dressing method is a flattening dressing method for a cutting tool fixed to the front end of a spindle, wherein: The trimming method has the following steps: A position detection step of using a photographing member to photograph the trimming plate held on the holding table via the adhesive tape to detect the position of the outer peripheral edge of the trimming plate; a positioning step of positioning the direction from one end of the trimming plate toward the other end so as to be parallel to the axis of the spindle, and positioning the lower end of the cutting tool at a predetermined height position cut into the trimming plate and at a distance from the trimming plate by an allowance width included in the machining conditions outside the one end of the trimming plate based on the position of the outer peripheral edge of the trimming plate detected by the position detection step; and The trimming step comprises the following steps: after the positioning step is implemented, the cutting tool is relatively moved relative to the trimming plate and moved from one end of the trimming plate to the other end to a position where the distance from the trimming plate is the margin width included in the processing conditions and cutting is performed, thereby flattening the front end of the cutting tool. 2. The trimming method according to claim 1, wherein: The trimming method has the following steps: a cutting completed area storage step of storing information related to the cutting completed area of the trimming plate cut in the trimming step; A processing step, after the trimming step is implemented, the trimming plate is moved out from the holding workbench, the workpiece is held by the holding workbench, and the workpiece on the holding workbench is cut by the cutting tool; a second positioning step of moving the workpiece from the holding table after the processing step is performed, holding the trimming plate by the holding table, and positioning the lower end of the cutting tool at a predetermined height position cut into the trimming plate and at a distance from the trimming plate by the margin width included in the processing conditions on the outside of one end of the trimming plate, based on the position of the outer peripheral edge of the trimming plate detected by the position detection step and the information related to the cutting completed area of the trimming plate stored by the cutting completed area storage step; and In the second trimming step, after the second positioning step is performed, the cutting tool is moved relative to the trimming plate from one end to the other end of the trimming plate to a position at a distance from the trimming plate by the margin width included in the processing conditions and cutting is performed.