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CN112086290A - Flexible extensible supercapacitor array based on mechanical buckling principle and preparation method thereof - Google Patents

Flexible extensible supercapacitor array based on mechanical buckling principle and preparation method thereof Download PDF

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CN112086290A
CN112086290A CN202010954543.2A CN202010954543A CN112086290A CN 112086290 A CN112086290 A CN 112086290A CN 202010954543 A CN202010954543 A CN 202010954543A CN 112086290 A CN112086290 A CN 112086290A
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CN112086290B (en
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张�诚
王军
李伟启
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Minjiang University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/84Processes for the manufacture of hybrid or EDL capacitors, or components thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/10Multiple hybrid or EDL capacitors, e.g. arrays or modules
    • H01G11/12Stacked hybrid or EDL capacitors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/24Electrodes characterised by structural features of the materials making up or comprised in the electrodes, e.g. form, surface area or porosity; characterised by the structural features of powders or particles used therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/78Cases; Housings; Encapsulations; Mountings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/13Energy storage using capacitors

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Abstract

The invention provides a flexible extensible supercapacitor array based on a mechanical buckling principle and a preparation method thereof, wherein the flexible extensible supercapacitor array comprises the following steps: the device comprises a flexible substrate of a silicone film, a plurality of rigid substrates which are fixed on the flexible substrate of the silicone film and form a dispersion array, a laser-induced graphene foam electrode array of an interdigital structure which is fixed on the rigid substrate, and a silicone film packaging layer which covers the surface of the laser-induced graphene foam electrode array of the interdigital structure. The flexible extension of the energy storage device can be realized, and the regulation and control of the output voltage and current of the energy storage device can also be realized through the regulation and control (series connection or parallel connection) of the connection mode of the interdigital electrodes, so that the application range and the field of the super capacitor array are greatly expanded; in the same space structure, the transition metal phosphide ultrathin nanosheets and the graphene are used for energy storage in a synergistic manner, so that the purpose of effectively improving the energy density of the supercapacitor on the premise of not sacrificing the cycle life and the power density of the supercapacitor is achieved.

Description

基于力学屈曲原理的柔性可延展超级电容器阵列及制备方法Flexible and extensible supercapacitor array based on mechanical buckling principle and preparation method

技术领域technical field

本发明属于电化学储能技术领域,尤其涉及一种基于力学屈曲原理的柔性可延展超级电容器阵列及制备方法。The invention belongs to the technical field of electrochemical energy storage, and in particular relates to a flexible and extensible supercapacitor array and a preparation method based on the mechanical buckling principle.

背景技术Background technique

便携式、可穿戴、可植入电子器件的快速发展极大地促进了现代社会对柔性可延展电化学储能器件及其集成微系统的需求。平面微型超级电容器由于其独特的平面叉指电极结构,具有无需隔膜、电极间距可无限接近(通常为数十至数百微米)弯折和扭曲条件下不易短路、易于和其它电子器件在柔性基底上直接集成等特点,已经成为柔性储能器件领域的研究热点之一。The rapid development of portable, wearable, and implantable electronic devices has greatly promoted the demand for flexible and stretchable electrochemical energy storage devices and their integrated microsystems in modern society. Due to its unique planar interdigitated electrode structure, planar micro-supercapacitors have no need for separators, and the electrode spacing can be infinitely close (usually tens to hundreds of microns), which is not easy to short-circuit under bending and twisting conditions, and is easy to integrate with other electronic devices on flexible substrates. It has become one of the research hotspots in the field of flexible energy storage devices.

然而,平面微型超级电容器受制于有限的电极面积、传统碳基电极活性材料较低的比电容以及柔性化需求造成的较小的电极厚度(弯曲应变和材料的厚度成正比)表现出了能量密度较低和延展性能有限等不足,严重地阻碍了其实际应用。However, planar micro-supercapacitors exhibit energy density due to limited electrode area, lower specific capacitance of conventional carbon-based electrode active materials, and smaller electrode thickness (bending strain proportional to material thickness) due to flexibility requirements. The low and limited ductility properties seriously hinder its practical application.

发明内容SUMMARY OF THE INVENTION

针对现有技术存在的缺陷和不足,本发明的目的在于提出基于力学屈曲原理的柔性可延展超级电容器阵列及制备方法,利用激光直写技术制备特定形貌的石墨烯基底,水热法制备过渡金属磷化物超薄纳米片并将其负载在石墨烯基底上,沉积固态电解质、埋线及封装,完成全固态柔性可延展超级电容器阵列的组装。其不仅可以实现储能器件的柔性可延展,也可以通过叉指电极联接方式的调控(串联或者并联)来实现其输出电压和电流的调控,从而极大拓展超级电容器阵列的应用范围和领域;在同样的空间结构中,本发明利用过渡金属磷化物超薄纳米片与石墨烯协同储能,从而实现在不牺牲超级电容器循环寿命和功率密度的前提下有效提高其能量密度的目的。In view of the defects and deficiencies existing in the prior art, the purpose of the present invention is to propose a flexible and extensible supercapacitor array based on the principle of mechanical buckling and a preparation method, using the laser direct writing technology to prepare a graphene substrate with a specific shape, and a hydrothermal method to prepare the transition Metal phosphide ultrathin nanosheets are loaded on graphene substrates, solid electrolytes, buried wires and encapsulation are deposited to complete the assembly of all-solid-state flexible and malleable supercapacitor arrays. It can not only realize the flexibility and extensibility of the energy storage device, but also realize the regulation of its output voltage and current through the regulation of the interdigital electrode connection (series or parallel), thereby greatly expanding the application scope and field of supercapacitor arrays; In the same spatial structure, the present invention utilizes transition metal phosphide ultrathin nanosheets and graphene to synergize energy storage, thereby achieving the purpose of effectively improving the energy density of the supercapacitor without sacrificing cycle life and power density.

本发明具体采用以下技术方案:The present invention specifically adopts the following technical solutions:

一种基于力学屈曲原理的柔性可延展超级电容器阵列,其特征在于,包括:硅树脂薄膜柔性基底、固定在所述硅树脂薄膜柔性基底上的构成分散阵列的多片刚性基底、固定在所述刚性基底上的叉指结构的激光诱导石墨烯泡沫电极阵列、以及覆盖在所述叉指结构的激光诱导石墨烯泡沫电极阵列表面的硅树脂薄膜封装层。A flexible and extensible supercapacitor array based on the principle of mechanical buckling, characterized in that it comprises: a flexible substrate of silicone resin film, a plurality of rigid substrates fixed on the flexible substrate of silicone resin film to form a dispersed array, An interdigitated structure laser-induced graphene foam electrode array on a rigid substrate, and a silicone resin film encapsulation layer covering the surface of the interdigitated structure laser-induced graphene foam electrode array.

优选地,所述刚性基底的材质为SiO2或Si。Preferably, the material of the rigid substrate is SiO 2 or Si.

优选地,所述叉指结构的激光诱导石墨烯泡沫电极阵列包括固定在刚性基底上的储能片单元和连接储能片单元的蛇形导线;所述电极片单元从下往上由:过渡金属磷化物薄纳米片与激光诱导石墨烯泡沫耦合的复合电极,以及固态电解质构成;所述蛇形导线的材质为激光诱导石墨烯泡沫。Preferably, the laser-induced graphene foam electrode array of the interdigital structure includes an energy storage sheet unit fixed on a rigid substrate and a serpentine wire connecting the energy storage sheet unit; the electrode sheet unit is transitioned from bottom to top: The composite electrode is composed of metal phosphide thin nanosheets coupled with laser-induced graphene foam, and a solid-state electrolyte; the material of the serpentine wire is laser-induced graphene foam.

优选地,所述蛇形导线使储能片单元构成串联或并联或混联。Preferably, the serpentine wire makes the energy storage chip units form series or parallel or mixed connection.

优选地,所述过渡金属磷化物薄纳米片为锌、锰、钴、镍、铁、铜磷化物纳米片中的一种或多种;所述的固态电解质为PVA/KCl、 PVA/KOH、PVA/H2SO4、PVA/H3PO4、PVA/LiCl、PVA/LiOH中的一种或多种;所述硅树脂薄膜柔性基底的材质为聚二甲基硅氧烷和共聚酯。Preferably, the transition metal phosphide thin nanosheets are one or more of zinc, manganese, cobalt, nickel, iron, copper phosphide nanosheets; the solid electrolyte is PVA/KCl, PVA/KOH, One or more of PVA/H 2 SO 4 , PVA/H 3 PO 4 , PVA/LiCl, PVA/LiOH; the silicone resin film flexible substrate is made of polydimethylsiloxane and copolyester .

优选地,所述硅树脂薄膜柔性基底的厚度为100 μm;所述叉指结构的激光诱导石墨烯泡沫电极阵列的厚度为100 μm;所述过渡金属磷化物薄纳米片的长度为100 nm,厚度为4 nm;所述固态电解质的厚度为10 μm;所述刚性基底的尺寸为1 cm*1 cm*0.05 cm。Preferably, the thickness of the silicone resin film flexible substrate is 100 μm; the thickness of the laser-induced graphene foam electrode array of the interdigital structure is 100 μm; the length of the transition metal phosphide thin nanosheet is 100 nm, The thickness is 4 nm; the thickness of the solid electrolyte is 10 μm; the size of the rigid substrate is 1 cm*1 cm*0.05 cm.

以及,一种基于力学屈曲原理的柔性可延展超级电容器阵列的制备方法,其特征在于,包括以下步骤:And, a preparation method of a flexible and extensible supercapacitor array based on the principle of mechanical buckling, characterized in that it includes the following steps:

步骤S1:利用旋涂技术,制备硅树脂薄膜柔性基底;Step S1: using spin coating technology to prepare a silicone resin film flexible substrate;

步骤S2:利用双面胶带,将多片刚性基底以分散阵列排布固定在所述硅树脂薄膜柔性基底上;Step S2: using double-sided adhesive tape to fix multiple rigid substrates on the flexible silicone resin film in a dispersed array arrangement;

步骤S3:将聚酰亚胺薄膜黏贴于基底上,并利用二氧化碳激光器还原聚酰亚胺薄膜形成叉指结构的激光诱导石墨烯泡沫电极阵列;所述叉指结构的激光诱导石墨烯泡沫电极阵列包括固定在刚性基底上的储能片结构和连接储能片单元的蛇形导线;Step S3: sticking the polyimide film on the substrate, and reducing the polyimide film with a carbon dioxide laser to form a laser-induced graphene foam electrode array with an interdigital structure; the laser-induced graphene foam electrode with an interdigital structure The array includes an energy storage chip structure fixed on a rigid base and a serpentine wire connecting the energy storage chip units;

步骤S4:采用水热法制备过渡金属氧化物超薄纳米片,并采用高温还原将其转化为过渡金属磷化物薄纳米片,之后利用喷涂方法和借助掩模板将过渡金属磷化物薄纳米片沉积于储能片结构上,形成过渡金属磷化物薄纳米片与激光诱导石墨烯泡沫耦合的复合电极;Step S4 : preparing ultrathin nanosheets of transition metal oxides by a hydrothermal method, and converting them into thin nanosheets of transition metal phosphides by high-temperature reduction, and then depositing thin nanosheets of transition metal phosphides by spraying and using a mask On the structure of the energy storage sheet, a composite electrode of the transition metal phosphide thin nanosheet coupled with the laser-induced graphene foam is formed;

步骤S5:将固态电解质沉积于所述过渡金属磷化物薄纳米片与激光诱导石墨烯泡沫耦合的复合电极上;Step S5: depositing a solid electrolyte on the composite electrode coupled with the transition metal phosphide thin nanosheet and the laser-induced graphene foam;

步骤S6:通过旋涂技术,在所述叉指结构的激光诱导石墨烯泡沫电极阵列表面形成硅树脂薄膜封装层。Step S6 : forming a silicone resin film encapsulation layer on the surface of the laser-induced graphene foam electrode array of the interdigital structure by spin coating technology.

优选地,所述刚性基底的材质为SiO2或Si;所述过渡金属磷化物薄纳米片为锌、锰、钴、镍、铁、铜磷化物纳米片中的一种或多种;所述的固态电解质为PVA/KCl、 PVA/KOH、PVA/H2SO4、PVA/H3PO4、PVA/LiCl、PVA/LiOH中的一种或多种;所述硅树脂薄膜柔性基底的材质为聚二甲基硅氧烷和共聚酯。Preferably, the material of the rigid substrate is SiO 2 or Si; the transition metal phosphide nanosheets are one or more of zinc, manganese, cobalt, nickel, iron and copper phosphide nanosheets; the The solid electrolyte is one or more of PVA/KCl, PVA/KOH, PVA/H 2 SO 4 , PVA/H 3 PO 4 , PVA/LiCl, PVA/LiOH; the material of the silicone resin film flexible substrate For polydimethylsiloxane and copolyester.

优选地,所述蛇形导线使储能片结构构成串联或并联或混联。Preferably, the serpentine wire makes the structure of the energy storage sheet form a series or a parallel or a mixed connection.

相较于现有技术,本发明及其优选方案不仅可以实现储能器件的柔性可延展,也可以通过叉指电极联接方式的调控(串联或者并联)来实现其输出电压和电流的调控,从而极大拓展超级电容器阵列的应用范围和领域;在同样的空间结构中,本发明利用过渡金属磷化物超薄纳米片与石墨烯协同储能,从而实现在不牺牲超级电容器循环寿命和功率密度的前提下有效提高其能量密度的目的。利用力学屈曲原理实现无机微纳电子器件的柔性可延展的制备方法, 具有通用性强、便于集成、易于推广、制作成本低和操作简单等优势,其可以有效解决传统供能器件刚性不适宜穿戴、续航能力差、频繁回收等问题,推动了可穿戴电子设备的应用和发展,在电子皮肤、可穿戴生理监测治疗装置、柔性导电织物、薄膜晶体管和透明薄膜柔性门电路等领域有广泛的应用前景。Compared with the prior art, the present invention and its preferred solution can not only realize the flexibility and extensibility of the energy storage device, but also realize the regulation of its output voltage and current by regulating the connection mode of the interdigital electrodes (series or parallel), thereby The application scope and field of supercapacitor arrays are greatly expanded; in the same spatial structure, the present invention utilizes transition metal phosphide ultrathin nanosheets and graphene to synergize energy storage, thereby realizing the supercapacitor cycle life and power density without sacrificing the energy storage. Under the premise of effectively improving its energy density. The flexible and extensible preparation method of inorganic micro-nanoelectronic devices using the principle of mechanical buckling has the advantages of strong versatility, easy integration, easy promotion, low production cost and simple operation. It can effectively solve the problem that the rigidity of traditional energy supply devices is not suitable for wearing. , poor battery life, frequent recycling and other problems have promoted the application and development of wearable electronic devices, which have a wide range of applications in the fields of electronic skin, wearable physiological monitoring and treatment devices, flexible conductive fabrics, thin film transistors and transparent thin film flexible gate circuits. prospect.

附图说明Description of drawings

下面结合附图和具体实施方式对本发明进一步详细的说明:The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments:

图1是本发明实施例步骤1处理后的柔性基底结构示意图;FIG. 1 is a schematic diagram of a flexible substrate structure after processing in step 1 of an embodiment of the present invention;

图2是本发明实施例步骤2处理后的在柔性基底上加入SiO2/Si刚性衬底结构示意图;FIG. 2 is a schematic structural diagram of adding SiO 2 /Si rigid substrate on the flexible substrate after processing in step 2 according to the embodiment of the present invention;

图3是本发明实施例步骤3处理后的结构示意图;3 is a schematic structural diagram after processing in step 3 of the embodiment of the present invention;

图4是本发明实施例步骤4处理后的结构示意图;4 is a schematic structural diagram after processing in step 4 of the embodiment of the present invention;

图5是本发明实施例步骤5处理后的结构示意图;5 is a schematic structural diagram after processing in step 5 of the embodiment of the present invention;

图6是本发明实施例步骤6处理后的结构示意图;6 is a schematic structural diagram after processing in step 6 of the embodiment of the present invention;

图7是本发明实施例拉伸测试示意图;7 is a schematic diagram of a tensile test according to an embodiment of the present invention;

图8是本发明实施例性能测试示意图。FIG. 8 is a schematic diagram of a performance test of an embodiment of the present invention.

具体实施方式Detailed ways

为让本专利的特征和优点能更明显易懂,下文特举实施例,作详细说明如下:In order to make the features and advantages of this patent more obvious and easy to understand, the following specific examples are given and described in detail as follows:

本实施例通过基于力学屈曲原理的柔性可延展超级电容器阵列的制备过程对方案进行详细的阐释:In this example, the scheme is explained in detail through the preparation process of the flexible and extensible supercapacitor array based on the principle of mechanical buckling:

如图1所示,步骤S1首先是硅树脂薄膜柔性基底的制备。本实施例使用旋涂方法,在洁净的培养皿上制备硅树脂薄膜,待加热固化后得到柔性可延展可拉伸的硅树脂薄膜1作为柔性基底。硅树脂的材质可采用聚二甲基硅氧烷 (PDMS) 和共聚酯 (Ecoflex),厚度为100μm。As shown in FIG. 1 , step S1 is first to prepare a flexible substrate of a silicone resin film. In this embodiment, a spin coating method is used to prepare a silicone resin film on a clean petri dish, and after heating and curing, a flexible, extensible and stretchable silicone resin film 1 is obtained as a flexible substrate. Silicone materials are available in polydimethylsiloxane (PDMS) and copolyester (Ecoflex) with a thickness of 100μm.

如图2所示,步骤S2是在硅树脂薄膜柔性基底上采用双面胶带阵列式分散固定SiO2/Si刚性基底2,隔离柔性可拉伸基底和叉指电极储能单元之间的应变与应力,以达到保护叉指电极的目的。在本实施例中,双面胶带可以采用3M VHB胶带,刚性基底2的尺寸为1cm*1 cm*0.05 cm。As shown in Figure 2, step S2 is to use a double-sided tape array to disperse and fix the SiO 2 /Si rigid substrate 2 on the flexible substrate of the silicone resin film to isolate the strain and the interdigital electrode energy storage unit between the flexible stretchable substrate and the interdigital electrode energy storage unit. stress to achieve the purpose of protecting the interdigital electrodes. In this embodiment, the double-sided tape can be 3M VHB tape, and the size of the rigid substrate 2 is 1 cm*1 cm*0.05 cm.

如图3所示,步骤S3是在基底上粘贴PI (聚酰亚胺薄膜) 薄膜,并利用二氧化碳激光器还原PI膜以制备叉指结构的激光诱导石墨烯泡沫电极阵列3,厚度为100 μm,其形貌由计算机控制的激光直写技术实现;其中叉指结构的激光诱导石墨烯(LIG)泡沫电极阵列包括固定在刚性基底上的储能片结构4和连接储能片单元的蛇形导线。其中,蛇形导线的材质为激光诱导石墨烯泡沫,蛇形导线和柔性可拉伸基底无紧密接触,利用蛇形导线的拉伸形变获得整个叉指电极阵列的柔性可延展。叉指电极阵列利用蛇形导线可以实现串联和并联或者结合串联并联的混联,从而调控其输出电压和电流。As shown in Figure 3, step S3 is to paste a PI (polyimide film) film on the substrate, and use a carbon dioxide laser to reduce the PI film to prepare an interdigitated structure of laser-induced graphene foam electrode array 3 with a thickness of 100 μm, Its morphology is realized by computer-controlled laser direct writing technology; the interdigitated laser-induced graphene (LIG) foam electrode array includes an energy storage sheet structure 4 fixed on a rigid substrate and a serpentine wire connecting the energy storage sheet units. . Among them, the material of the serpentine wire is laser-induced graphene foam, and the serpentine wire and the flexible stretchable substrate are not in close contact, and the stretch deformation of the serpentine wire is used to obtain the flexibility and extensibility of the entire interdigital electrode array. The interdigitated electrode array can realize series and parallel or a combination of series and parallel by using serpentine wires, so as to control its output voltage and current.

本实施例采用的二氧化碳激光器的功率为3.4 W。The power of the carbon dioxide laser used in this embodiment is 3.4 W.

如图4所示,步骤S4是借助掩模板并利用喷涂技术,将水热法联合高温还原方法制备的过渡金属磷化物薄纳米片(长度约为100nm,厚度约为4nm)与储能片结构4上的LIG耦合形成复合电极材料,并保持蛇形导线不与过渡金属磷化物薄纳米片发生作用。从而达到提升储能密度的目的。其中,过渡金属磷化物薄纳米片为锌、锰、钴、镍、铁、铜磷化物纳米片中的一种或多种。As shown in Figure 4, step S4 is to use a mask and spraying technology to combine the transition metal phosphide nanosheets (about 100 nm in length, about 4 nm in thickness) prepared by hydrothermal method combined with high temperature reduction method. The LIG coupling on 4 forms a composite electrode material and keeps the serpentine wires from interacting with the thin transition metal phosphide nanosheets. So as to achieve the purpose of increasing the energy storage density. The transition metal phosphide thin nanosheets are one or more of zinc, manganese, cobalt, nickel, iron and copper phosphide nanosheets.

如图5所示,步骤S5是在储能片结构4上沉积固态电解质5。将一定数量的KCl、KOH、H2SO4、H3PO4、LiCl、或LiOH和去离子水、PVA 粉末混合并加热至90οC保温30分钟,随后将其沉积在储能片结构4上,其厚度为10 μm。As shown in FIG. 5 , step S5 is to deposit a solid electrolyte 5 on the energy storage sheet structure 4 . A certain amount of KCl, KOH, H 2 SO 4 , H 3 PO 4 , LiCl, or LiOH and deionized water, PVA powder were mixed and heated to 90 o C for 30 minutes, and then deposited on the energy storage sheet structure 4 , its thickness is 10 μm.

如图6所示,步骤S6是超级电容器阵列的封装。采用旋涂技术,利用硅树脂实现超级电容器阵列的封装,从而在叉指结构的激光诱导石墨烯泡沫电极阵列表面形成硅树脂薄膜封装层6,其厚度也为100 μm。As shown in FIG. 6 , step S6 is the packaging of the supercapacitor array. Using spin coating technology, the supercapacitor array is encapsulated with silicone resin, so that a silicone resin film encapsulation layer 6 is formed on the surface of the interdigitated structure of the laser-induced graphene foam electrode array, and its thickness is also 100 μm.

如图7所示,是通过本实施例方案制备获得的柔性可延展超级电容器阵列拉伸过程的电子照片图。串联(上半部分)和并联(下半部分)组装的柔性可延展超级电容器阵列的延展率高到100%。As shown in FIG. 7 , it is an electronic photograph of the stretching process of the flexible and extensible supercapacitor array prepared by the scheme of this embodiment. The flexible stretchable supercapacitor arrays assembled in series (top half) and parallel (bottom half) have stretchability as high as 100%.

图8是通过本实施例方案制备获得的柔性可延展超级电容器阵列在串联和并联条件下的输出性能。如图8所示,串联组装的柔性可延展超级电容器阵列的输出电压高达2.4V (是单一叉指电极电容器的4倍);并联组装的柔性可延展超级电容器阵列的输出电流为单一叉指电极电容器的4倍;并且无论是串联或并联组装柔性可延展超级电容器阵列的电容性能在拉伸过程中几乎保持不变。其次,通过该实施例方案,实现了20个叉指电极电容器的高效并联组装,其系统的电容量几乎和组装电容器个数成正比。这种输出电压和电流的高度可调性质,能够大幅提高超级电容器的应用范围和领域。FIG. 8 is the output performance of the flexible and extensible supercapacitor array prepared by the solution of this embodiment under the condition of series and parallel. As shown in Figure 8, the output voltage of the flexible and stretchable supercapacitor array assembled in series is as high as 2.4V (4 times that of a single interdigitated electrode capacitor); the output current of the flexible and stretchable supercapacitor array assembled in parallel is a single interdigitated electrode. capacitors; and the capacitive performance of the flexible stretchable supercapacitor arrays, whether assembled in series or in parallel, remained almost unchanged during the stretching process. Secondly, through the solution of this embodiment, the efficient parallel assembly of 20 interdigital electrode capacitors is realized, and the capacitance of the system is almost proportional to the number of assembled capacitors. This highly tunable nature of output voltage and current can greatly improve the application range and field of supercapacitors.

本专利不局限于上述最佳实施方式,任何人在本专利的启示下都可以得出其它各种形式的基于力学屈曲原理的柔性可延展超级电容器阵列及制备方法,凡依本发明申请专利范围所做的均等变化与修饰,皆应属本专利的涵盖范围。This patent is not limited to the above-mentioned best embodiment, anyone can come up with other various forms of flexible and extensible supercapacitor arrays and preparation methods based on the principle of mechanical buckling under the inspiration of this patent. All equivalent changes and modifications made shall fall within the scope of this patent.

Claims (9)

1.一种基于力学屈曲原理的柔性可延展超级电容器阵列,其特征在于,包括:硅树脂薄膜柔性基底、固定在所述硅树脂薄膜柔性基底上的构成分散阵列的多片刚性基底、固定在所述刚性基底上的叉指结构的激光诱导石墨烯泡沫电极阵列、以及覆盖在所述叉指结构的激光诱导石墨烯泡沫电极阵列表面的硅树脂薄膜封装层。1. A flexible and extensible supercapacitor array based on the principle of mechanical buckling, characterized in that, comprising: a flexible substrate of a silicone resin film, a plurality of rigid substrates constituting a dispersed array fixed on the flexible substrate of a silicone resin film, A laser-induced graphene foam electrode array with an interdigitated structure on the rigid substrate, and a silicone resin film encapsulation layer covering the surface of the interdigitated structure of the laser-induced graphene foam electrode array. 2.根据权利要求1所述的基于力学屈曲原理的柔性可延展超级电容器阵列,其特征在于:所述刚性基底的材质为SiO2或Si。2 . The flexible and extensible supercapacitor array based on the principle of mechanical buckling according to claim 1 , wherein the rigid substrate is made of SiO 2 or Si. 3 . 3.根据权利要求1所述的基于力学屈曲原理的柔性可延展超级电容器阵列,其特征在于:所述叉指结构的激光诱导石墨烯泡沫电极阵列包括固定在刚性基底上的储能片单元和连接储能片单元的蛇形导线;所述电极片单元从下往上由:过渡金属磷化物薄纳米片与激光诱导石墨烯泡沫耦合的复合电极,以及固态电解质构成;所述蛇形导线的材质为激光诱导石墨烯泡沫。3. The flexible and extensible supercapacitor array based on the principle of mechanical buckling according to claim 1, wherein the laser-induced graphene foam electrode array of the interdigital structure comprises an energy storage sheet unit fixed on a rigid substrate and A serpentine wire connecting the energy storage sheet unit; the electrode sheet unit from bottom to top is composed of: a composite electrode coupled with a transition metal phosphide nanosheet and a laser-induced graphene foam, and a solid-state electrolyte; the serpentine wire is composed of: The material is laser-induced graphene foam. 4.根据权利要求3所述的基于力学屈曲原理的柔性可延展超级电容器阵列,其特征在于:所述蛇形导线使储能片单元构成串联或并联或混联。4 . The flexible and extensible supercapacitor array based on the principle of mechanical buckling according to claim 3 , wherein the serpentine wires make the energy storage chip units form series, parallel or mixed connections. 5 . 5.根据权利要求3所述的基于力学屈曲原理的柔性可延展超级电容器阵列,其特征在于:所述过渡金属磷化物薄纳米片为锌、锰、钴、镍、铁、铜磷化物纳米片中的一种或多种;所述的固态电解质为PVA/KCl、 PVA/KOH、PVA/H2SO4、PVA/H3PO4、PVA/LiCl、PVA/LiOH中的一种或多种;所述硅树脂薄膜柔性基底的材质为聚二甲基硅氧烷和共聚酯。5. The flexible and extensible supercapacitor array based on the principle of mechanical buckling according to claim 3, wherein the transition metal phosphide nanosheets are zinc, manganese, cobalt, nickel, iron, copper phosphide nanosheets One or more of; the solid electrolyte is one or more of PVA/KCl, PVA/KOH, PVA/H 2 SO 4 , PVA/H 3 PO 4 , PVA/LiCl, PVA/LiOH ; The material of the flexible substrate of the silicone resin film is polydimethylsiloxane and copolyester. 6.根据权利要求5所述的基于力学屈曲原理的柔性可延展超级电容器阵列,其特征在于:所述硅树脂薄膜柔性基底的厚度为100 μm;所述叉指结构的激光诱导石墨烯泡沫电极阵列的厚度为100 μm;所述过渡金属磷化物薄纳米片的长度为100 nm,厚度为4 nm;所述固态电解质的厚度为10 μm;所述刚性基底的尺寸为1 cm*1 cm*0.05 cm。6 . The flexible and extensible supercapacitor array based on the principle of mechanical buckling according to claim 5 , wherein the thickness of the flexible substrate of the silicone resin film is 100 μm; the laser-induced graphene foam electrode of the interdigital structure is 100 μm. 7 . The thickness of the array is 100 μm; the length of the transition metal phosphide thin nanosheet is 100 nm and the thickness is 4 nm; the thickness of the solid electrolyte is 10 μm; the size of the rigid substrate is 1 cm*1 cm* 0.05 cm. 7.一种基于力学屈曲原理的柔性可延展超级电容器阵列的制备方法,其特征在于,包括以下步骤:7. A preparation method of a flexible and extensible supercapacitor array based on the principle of mechanical buckling, characterized in that, comprising the following steps: 步骤S1:利用旋涂技术,制备硅树脂薄膜柔性基底;Step S1: using spin coating technology to prepare a silicone resin film flexible substrate; 步骤S2:利用双面胶带,将多片刚性基底以分散阵列排布固定在所述硅树脂薄膜柔性基底上;Step S2: using double-sided adhesive tape to fix multiple rigid substrates on the flexible silicone resin film in a dispersed array arrangement; 步骤S3:将聚酰亚胺薄膜黏贴于基底上,并利用二氧化碳激光器还原聚酰亚胺薄膜形成叉指结构的激光诱导石墨烯泡沫电极阵列;所述叉指结构的激光诱导石墨烯泡沫电极阵列包括固定在刚性基底上的储能片结构和连接储能片单元的蛇形导线;Step S3: sticking the polyimide film on the substrate, and reducing the polyimide film with a carbon dioxide laser to form a laser-induced graphene foam electrode array with an interdigital structure; the laser-induced graphene foam electrode with an interdigital structure The array includes an energy storage chip structure fixed on a rigid base and a serpentine wire connecting the energy storage chip units; 步骤S4:采用水热法制备过渡金属氧化物超薄纳米片,并采用高温还原将其转化为过渡金属磷化物薄纳米片,之后利用喷涂方法和借助掩模板将过渡金属磷化物薄纳米片沉积于储能片结构上,形成过渡金属磷化物薄纳米片与激光诱导石墨烯泡沫耦合的复合电极;Step S4 : preparing ultrathin nanosheets of transition metal oxides by a hydrothermal method, and converting them into thin nanosheets of transition metal phosphides by high-temperature reduction, and then depositing thin nanosheets of transition metal phosphides by spraying and using a mask On the structure of the energy storage sheet, a composite electrode of the transition metal phosphide thin nanosheet coupled with the laser-induced graphene foam is formed; 步骤S5:将固态电解质沉积于所述过渡金属磷化物薄纳米片与激光诱导石墨烯泡沫耦合的复合电极上;Step S5: depositing a solid electrolyte on the composite electrode coupled with the transition metal phosphide thin nanosheet and the laser-induced graphene foam; 步骤S6:通过旋涂技术,在所述叉指结构的激光诱导石墨烯泡沫电极阵列表面形成硅树脂薄膜封装层。Step S6 : forming a silicone resin film encapsulation layer on the surface of the laser-induced graphene foam electrode array of the interdigital structure by spin coating technology. 8.根据权利要求7所述的基于力学屈曲原理的柔性可延展超级电容器阵列的制备方法,其特征在于:所述刚性基底的材质为SiO2或Si;所述过渡金属磷化物薄纳米片为锌、锰、钴、镍、铁、铜磷化物纳米片中的一种或多种;所述的固态电解质为PVA/KCl、 PVA/KOH、PVA/H2SO4、PVA/H3PO4、PVA/LiCl、PVA/LiOH中的一种或多种;所述硅树脂薄膜柔性基底的材质为聚二甲基硅氧烷和共聚酯。8 . The method for preparing a flexible and extensible supercapacitor array based on the principle of mechanical buckling according to claim 7 , wherein: the material of the rigid substrate is SiO 2 or Si; the transition metal phosphide thin nanosheets are One or more of zinc, manganese, cobalt, nickel, iron, copper phosphide nanosheets; the solid electrolyte is PVA/KCl, PVA/KOH, PVA/H 2 SO 4 , PVA/H 3 PO 4 , one or more of PVA/LiCl, PVA/LiOH; the material of the silicone resin film flexible substrate is polydimethylsiloxane and copolyester. 9.根据权利要求7所述的基于力学屈曲原理的柔性可延展超级电容器阵列的制备方法,其特征在于:所述蛇形导线使储能片结构构成串联或并联或混联。9 . The method for preparing a flexible and extensible supercapacitor array based on the principle of mechanical buckling according to claim 7 , wherein the serpentine wire makes the structure of the energy storage sheet to be connected in series, in parallel or in mixed connection. 10 .
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