CN111883472A - Method for manufacturing and repairing micro light-emitting diode display - Google Patents
Method for manufacturing and repairing micro light-emitting diode display Download PDFInfo
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- CN111883472A CN111883472A CN202010606852.0A CN202010606852A CN111883472A CN 111883472 A CN111883472 A CN 111883472A CN 202010606852 A CN202010606852 A CN 202010606852A CN 111883472 A CN111883472 A CN 111883472A
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68372—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to support a device or wafer when forming electrical connections thereto
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- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
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Abstract
本发明提供一种微型发光二极管显示器的修补方法,包括如下步骤:S1:可伸缩吸头吸附多个微型发光二极管并将每个微型发光二极管放置在驱动基板上的相邻微型发光二极管之间的位置上;S2:改变可伸缩吸头的温度使得可伸缩吸头产生弹性形变,当驱动基板的放置微型发光二极管的位置上存在微型发光二极管,则驱动基板上的微型发光二极管把可伸缩吸头上对应的微型发光二极管挡住使其无法移动;当驱动基板的放置微型发光二极管的位置上缺少微型发光二极管,则可伸缩吸头上对应的微型发光二极管移动至缺少微型发光二极管的位置上。本发明在不进行封装的情况进行检测,易于修补,且不需要微型发光二极管缺失点的检测,节省时间和成本;提高修补效率,能同时修补所有缺失点。
The present invention provides a repairing method for a miniature light-emitting diode display, comprising the following steps: S1: a retractable suction head adsorbs a plurality of miniature light-emitting diodes and places each miniature light-emitting diode between adjacent miniature light-emitting diodes on a driving substrate position; S2: Change the temperature of the retractable tip to make the retractable tip elastically deform. When there is a micro-LED on the position where the micro-LED is placed on the driving substrate, the micro-LED on the driving substrate will move the retractable tip. The corresponding micro-LEDs on the retractable tip are blocked so that they cannot be moved; when the micro-LEDs are missing from the positions where the micro-LEDs are placed on the driving substrate, the corresponding micro-LEDs on the retractable tip move to the position where the micro-LEDs are missing. The present invention performs detection without encapsulation, is easy to repair, does not require detection of missing points of micro light emitting diodes, saves time and cost, improves repairing efficiency, and can repair all missing points at the same time.
Description
技术领域technical field
本发明涉及微型发光二极管的技术领域,尤其涉及一种微型发光二极管显示器的制造方法和修补方法。The present invention relates to the technical field of miniature light-emitting diodes, and in particular, to a manufacturing method and a repairing method of a miniature light-emitting diode display.
背景技术Background technique
Micro LED显示器由于具有低功耗、高亮度、超高解析度与色彩饱和度、反应速度快、超省电(Micro LED显示器的耗电量为液晶显示器耗电量的10%,为有机电致发光显示器耗电量的50%)、长寿命、高效率、适应各种尺寸和无缝拼接等优势,因而成为目前最具有潜力的下一代新型显示技术。Micro LED displays have low power consumption, high brightness, ultra-high resolution and color saturation, fast response speed, and ultra-power saving (the power consumption of Micro LED displays is 10% of that of liquid crystal displays, which is an organic electro- 50% of the power consumption of light-emitting displays), long life, high efficiency, adaptability to various sizes and seamless splicing, etc., so it has become the most potential next-generation new display technology.
制作Micro LED显示器需要将百万颗的微米级LED转移至背板上,目前技术转移后难免存在LED缺失的情况,如果不进行修补,便会造成显示不良,如何对缺失点进行修补是迫切需要解决的难题。Making a Micro LED display requires transferring millions of micron-sized LEDs to the backplane. At present, it is inevitable that there will be missing LEDs after the technology transfer. If it is not repaired, it will cause poor display. How to repair the missing points is urgent problem solved.
现有技术首先要对背板进行检测,找到缺失点再逐一进行修补或者加电测试找到缺失点,再一一修补。现有技术存在效率低的问题。In the prior art, the backplane is firstly inspected, and the missing points are found and then repaired one by one, or a power-on test is performed to find the missing points, and then repaired one by one. The prior art has the problem of low efficiency.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于提供一种节约时间和成本、且体改修补效率的微型发光二极管显示器的制造方法和修补方法。The purpose of the present invention is to provide a manufacturing method and a repairing method of a miniature light emitting diode display that saves time and cost, and improves the repairing efficiency.
本发明提供一种微型发光二极管显示器的修补方法,包括如下步骤:The present invention provides a method for repairing a miniature light-emitting diode display, comprising the following steps:
S1:可伸缩吸头吸附多个微型发光二极管并将每个微型发光二极管放置在驱动基板上的相邻微型发光二极管之间的位置上;S1: the retractable suction head adsorbs a plurality of miniature light-emitting diodes and places each miniature light-emitting diode in a position between adjacent miniature light-emitting diodes on the driving substrate;
S2:改变可伸缩吸头的温度使得可伸缩吸头产生弹性形变,当驱动基板的放置微型发光二极管的位置上存在微型发光二极管,则驱动基板上的微型发光二极管把可伸缩吸头上对应的微型发光二极管挡住使其无法移动;当驱动基板的放置微型发光二极管的位置上缺少微型发光二极管,则可伸缩吸头上对应的微型发光二极管移动至缺少微型发光二极管的位置上;S2: Change the temperature of the retractable tip to make the retractable tip elastically deform. When there is a micro-LED on the position where the micro-LED is placed on the driving substrate, the micro-LED on the driving substrate will put the corresponding micro-LED on the retractable tip. The micro LEDs are blocked so that they cannot be moved; when the micro LEDs are missing from the position where the micro LEDs are placed on the drive substrate, the corresponding micro LEDs on the retractable tip move to the position where the micro LEDs are missing;
S3:给微型发光二极管两端进行通电,点亮微型发光二极管使得微型发光二极管固定在驱动基板上;S3: energize both ends of the miniature light-emitting diode, and light the miniature light-emitting diode so that the miniature light-emitting diode is fixed on the driving substrate;
S4:移走可伸缩吸头。S4: Remove the retractable tip.
进一步地,步骤S1中的可伸缩吸头的制造方法为:Further, the manufacturing method of the retractable suction head in step S1 is:
在可伸缩基底上形成阵列设置的金属接触部;forming an array of metal contacts on a retractable substrate;
在金属接触部上形成导电粘合层,微型发光二极管由导电粘合层吸附。A conductive adhesive layer is formed on the metal contact portion, and the micro light-emitting diode is adsorbed by the conductive adhesive layer.
进一步地,可伸缩基底为记忆合金形成的基底,记忆合金为Cu/Zn/Ga合金、 In和Ti合金、Au/Cu/Zn合金的一种。Further, the stretchable substrate is a substrate formed of a memory alloy, and the memory alloy is one of Cu/Zn/Ga alloy, In and Ti alloy, and Au/Cu/Zn alloy.
进一步地,可伸缩基底为弹性薄膜形成的基底。Further, the stretchable substrate is a substrate formed by an elastic film.
进一步地,导电粘合层采用点胶方式固定在金属接触部上。Further, the conductive adhesive layer is fixed on the metal contact portion by means of dispensing.
进一步地,驱动基板包括具有阵列设置的凹槽的驱动背板、位于凹槽内的下电极、位于凹槽内且位于下电极上的光敏导电层以及位于驱动背板上且位于相邻凹槽之间的低表面能层,步骤S1中,可伸缩吸头吸附的多个微型发光二极管放置在驱动基板的低表面能层上。Further, the driving substrate includes a driving backplane with grooves arranged in an array, a lower electrode located in the groove, a photosensitive conductive layer located in the groove and on the lower electrode, and a driving backplane located in the adjacent grooves. Between the low surface energy layers, in step S1, a plurality of miniature light-emitting diodes adsorbed by the retractable suction head are placed on the low surface energy layer of the driving substrate.
本发明还提供一种微型发光二极管显示器的制造方法,包括如下步骤:The present invention also provides a method for manufacturing a miniature light-emitting diode display, comprising the following steps:
S1:在驱动背板上形成阵列设置的凹槽;S1: The grooves for array setting are formed on the drive backplane;
S2:在驱动背板的凹槽内形成下电极;S2: the lower electrode is formed in the groove of the driving backplane;
S3:在驱动背板上且位于相邻凹槽之间形成低表面能层;S3: a low surface energy layer is formed on the driving backplane and between adjacent grooves;
S4:在下电极上形成光敏导电层;S4: forming a photosensitive conductive layer on the lower electrode;
S5:微型发光二极管转移至驱动背板上的光敏导电层上并固化微型发光二极管。S5: The micro light emitting diodes are transferred to the photosensitive conductive layer on the driving backplane and the micro light emitting diodes are cured.
进一步地,步骤S4中,光敏导电层的上表面不高于低表面能层的上表面。Further, in step S4, the upper surface of the photosensitive conductive layer is not higher than the upper surface of the low surface energy layer.
进一步地,步骤S4中,当光照的情况下固化,光敏导电层为包括光敏层和掺杂在光敏层中的金属球或纳米银材料形成的层状结构。Further, in step S4, when cured under light, the photosensitive conductive layer is a layered structure including a photosensitive layer and a metal ball or nano-silver material doped in the photosensitive layer.
进一步地,光敏导电层的材料可以为丙烯酸酯类预聚物、活性单体和光引发剂混合后的材料。Further, the material of the photosensitive conductive layer may be a material obtained by mixing an acrylate-based prepolymer, an active monomer and a photoinitiator.
本发明在不进行封装的情况进行检测,易于修补,且不需要微型发光二极管缺失点的检测,节省时间和成本;提高修补效率,能同时修补所有缺失点。The present invention performs detection without encapsulation, is easy to repair, does not require detection of missing points of micro light emitting diodes, saves time and cost, improves repairing efficiency, and can repair all missing points at the same time.
附图说明Description of drawings
图1和图2为本发明微型发光二极管显示器的修补方法第一实施例的步骤之一的结构示意图;FIG. 1 and FIG. 2 are schematic structural diagrams of one of the steps of the first embodiment of the repairing method of the micro LED display according to the present invention;
图3为本发明微型发光二极管显示器的修补方法第一实施例的步骤之二的结构示意图;FIG. 3 is a schematic structural diagram of step 2 of the first embodiment of the repairing method for the micro LED display of the present invention;
图4为本发明微型发光二极管显示器的修补方法第一实施例的步骤之三的结构示意图;FIG. 4 is a schematic structural diagram of step 3 of the first embodiment of the repairing method for the miniature light-emitting diode display of the present invention;
图5为本发明微型发光二极管显示器的修补方法第二实施例的步骤之一的结构示意图;FIG. 5 is a schematic structural diagram of one of the steps of the second embodiment of the repairing method for the miniature light-emitting diode display of the present invention;
图6为本发明微型发光二极管显示器的修补方法第二实施例的步骤之二的结构示意图;FIG. 6 is a schematic structural diagram of step 2 of the second embodiment of the repairing method for the miniature light-emitting diode display according to the present invention;
图7为本发明微型发光二极管显示器的修补方法第二实施例的步骤之三的结构示意图;FIG. 7 is a schematic structural diagram of step 3 of the second embodiment of the repairing method for the miniature light-emitting diode display of the present invention;
图8为本发明微型发光二极管显示器的修补方法第二实施例的步骤之四的结构示意图;FIG. 8 is a schematic structural diagram of step 4 of the second embodiment of the repairing method for the miniature light-emitting diode display of the present invention;
图9为本发明微型发光二极管显示器的修补方法第二实施例的步骤之五的结构示意图;FIG. 9 is a schematic structural diagram of step 5 of the second embodiment of the repairing method for the miniature light-emitting diode display of the present invention;
图10为本发明可伸缩吸头的制造方法的步骤之一的结构示意图;10 is a schematic structural diagram of one of the steps of the manufacturing method of the retractable suction head of the present invention;
图11为本发明可伸缩吸头的制造方法的步骤之二的结构示意图。FIG. 11 is a schematic structural diagram of the second step of the manufacturing method of the retractable suction head of the present invention.
具体实施方式Detailed ways
下面结合附图和具体实施例,进一步阐明本发明,应理解这些实施例仅用于说明本发明而不用于限制本发明的范围,在阅读了本发明之后,本领域技术人员对本发明的各种等价形式的修改均落于本申请所附权利要求所限定的范围。Below in conjunction with the accompanying drawings and specific embodiments, the present invention will be further clarified. It should be understood that these embodiments are only used to illustrate the present invention and not to limit the scope of the present invention. Modifications of equivalent forms all fall within the scope defined by the appended claims of this application.
为使图面简洁,各图中只示意性地表示出了与本发明相关的部分,它们并不代表其作为产品的实际结构。另外,以使图面简洁便于理解,在有些图中具有相同结构或功能的部件,仅示意性地绘示了其中的一个,或仅标出了其中的一个。在本文中,“一个”不仅表示“仅此一个”,也可以表示“多于一个”的情形。In order to keep the drawings concise, the drawings only schematically show the parts related to the present invention, and they do not represent its actual structure as a product. In addition, in order to make the drawings concise and easy to understand, in some drawings, only one of the components having the same structure or function is schematically shown, or only one of them is marked. As used herein, "one" not only means "only one", but also "more than one".
本发明一种微型发光二极管显示器的修补方法,包括如下步骤:A method for repairing a miniature light-emitting diode display of the present invention comprises the following steps:
S1:如图1和图2所示,可伸缩吸头200吸附多个微型发光二极管1且将每个微型发光二极管1放置在驱动基板100上的相邻微型发光二极管1之间的位置上;S1: As shown in FIG. 1 and FIG. 2 , the
其中,可伸缩吸头200包括可伸缩基底201、位于可伸缩基底201上且阵列设置的金属接触部202以及位于金属接触部202上的导电粘合层203,微型发光二极管1由导电粘合层203吸附。The
导电粘合层203采用点胶方式固定在金属接触部202上,金属接触部202 的材料为金或银或铜等,可伸缩基底201为记忆合金形成的基底或弹性薄膜形成的基底,记忆合金为Cu/Zn/Ga合金、In和Ti合金、Au/Cu/Zn合金的一种。The conductive
S2:如图3所示,改变可伸缩吸头200的温度使得可伸缩吸头200产生弹性形变,当驱动基板100的放置微型发光二极管1的位置上存在微型发光二极管,则驱动基板100上的微型发光二极管1把可伸缩吸头200上对应的微型发光二极管挡住使其无法移动;当驱动基板100的放置微型发光二极管1的位置上缺少微型发光二极管,则可伸缩吸头200上对应的微型发光二极管移动至缺少微型发光二极管的位置上;S2: As shown in FIG. 3 , changing the temperature of the
其中,微型发光二极管1移动的距离根据控制的温度进行确定。如图1所示,驱动基板100存在缺少微型发光二极管的位置A,可伸缩基底201加热后可以产生位移的改变,控制可伸缩基底201的温度,使得金属接触部202、导电粘合层 203和对应的微型发光二极管1一起移动至位置A处。Wherein, the moving distance of the micro light-emitting
当可伸缩吸头200的微型发光二极管移动至没有缺少微型发光二极管的位置上,可伸缩吸头200的微型发光二极管被驱动基板100的微型发光二极管挡住使其无法移动,这是由于可伸缩基底201具有伸缩性,将微型发光二极管填补进缺失位置,快速完成修补。When the micro LEDs of the
S3:如图4所示,给微型发光二极管两端进行通电,点亮微型发光二极管1 使得微型发光二极管1固定在驱动背板100上;S3: As shown in FIG. 4 , energize both ends of the miniature light-emitting diode to light up the miniature light-emitting
S4:移走可伸缩吸头200。S4: The
通过上述步骤完成对驱动基板100上缺少的微型发光二极管1进行修补,且不需要提前进行微型发光二极管缺点位置的检测。Repairing the missing micro
步骤S3中,“给微型发光二极管两端进行通电”的意思是位于驱动背板100 上的所有微型发光二极管都进行通电。In step S3, "energizing both ends of the micro-LEDs" means that all the micro-LEDs on the driving
驱动基板100包括具有阵列设置的凹槽11的驱动背板10、位于凹槽11内的下电极20、位于凹槽11内且位于下电极20上的光敏导电层40以及位于驱动背板10上且位于相邻凹槽11之间的低表面能层30,光敏导电层40的上表面不高于低表面能层30的上表面。The driving
相邻凹槽11之间的距离不小于每颗微型发光二极管的最大宽度。低表面能层30的材料是聚四氟乙烯、氟化乙烯丙烯共聚物和过氟烷基化物的一种或多种组合。The distance between
步骤S1中,可伸缩吸头200吸附的多个微型发光二极管1放置在驱动基板 100的低表面能层30上。In step S1, the plurality of micro
本发明还提供一种微型发光二极管显示器的制造方法,包括如下步骤:The present invention also provides a method for manufacturing a miniature light-emitting diode display, comprising the following steps:
S1:如图5所示,在驱动背板10上形成阵列设置的凹槽11;S1: As shown in FIG. 5 , a
其中,采用湿蚀刻技术在驱动背板10形式阵列设置的凹槽11。Among them, the
S2:如图6所示,在驱动背板10的凹槽11内形成下电极20;S2: As shown in FIG. 6, the
S3:如图7所示,在驱动背板10上且位于相邻凹槽11之间形成低表面能层 30;S3: As shown in FIG. 7 , a low
其中,通过曝光和显影等方式制作图案化的低表面能层30。Wherein, the patterned low
S4:如图8所示,在下电极20上形成光敏导电层40,光敏导电层40的上表面不高于低表面能层30的上表面;S4: As shown in FIG. 8 , a photosensitive
其中,在下电极20的上方制作光敏导电层40,当光照的情况下固化,光敏导电层40为包括光敏层和掺杂在光敏层中的金属球或纳米银材料形成的层状结构,光敏导电层40的材料可以为丙烯酸酯类预聚物、活性单体和光引发剂混合后的材料,光引发剂为可见光引发剂。也就是说,在光照的情况下,光敏导电层 40可以使得微型发光二极管固定在光敏导电层40上。Wherein, a photosensitive
S5:如图9所示,微型发光二极管50转移至驱动背板10上的光敏导电层 40上并固化微型发光二极管50。S5: As shown in FIG. 9 , the micro LEDs 50 are transferred to the photosensitive
以上步骤形成微型发光二极管显示器。The above steps form a miniature light emitting diode display.
本发明还提供一种可伸缩吸头的制造方法,包括如下步骤:The present invention also provides a method for manufacturing a retractable suction head, comprising the following steps:
S1:如图10所示,在可伸缩基底201上形成阵列设置的金属接触部202;S1: As shown in FIG. 10 ,
S2:如图11所示,在金属接触部202上形成导电粘合层203。S2 : As shown in FIG. 11 , a conductive
微型发光二极管1由导电粘合层203吸附。The micro light-emitting
本发明在不进行封装的情况进行检测,易于修补,且不需要微型发光二极管缺失点的检测,节省时间和成本;提高修补效率,能同时修补所有缺失点。The present invention performs detection without encapsulation, is easy to repair, does not require detection of missing points of micro light emitting diodes, saves time and cost, improves repairing efficiency, and can repair all missing points at the same time.
以上详细描述了本发明的优选实施方式,但是本发明并不限于上述实施方式中的具体细节,在本发明的技术构思范围内,可以对本发明的技术方案进行多种等同变换(如数量、形状、位置等),这些等同变换均属于本发明的保护范围。The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the specific details of the above-mentioned embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations (such as quantity, shape, etc.) can be performed on the technical solutions of the present invention. , position, etc.), these equivalent transformations all belong to the protection scope of the present invention.
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