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CN111384873A - A bionic inchworm drive device and excitation method thereof - Google Patents

A bionic inchworm drive device and excitation method thereof Download PDF

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CN111384873A
CN111384873A CN202010050003.1A CN202010050003A CN111384873A CN 111384873 A CN111384873 A CN 111384873A CN 202010050003 A CN202010050003 A CN 202010050003A CN 111384873 A CN111384873 A CN 111384873A
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rotor
hinge mechanism
flexible hinge
unit
clamping unit
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CN111384873B (en
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万嫩
李建平
温建明
张昱
马继杰
胡意立
程光明
阚君武
蔡俊杰
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Zhejiang Normal University CJNU
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023Inchworm motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • H02N2/123Mechanical transmission means, e.g. for gearing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

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Abstract

本发明属于精密驱动领域,具体涉及一种仿生尺蠖式驱动装置及其激励方法。本发明解决了尺蠖型压电驱动装置结构复杂、控制困难的技术问题。该装置包括驱动单元、钳位单元、转子、螺钉和底座;驱动单元和钳位单元通过螺钉安装在底座上;该装置采用电压信号时序控制的激励方法,使驱动单元和钳位单元交替协同工作,可实现大行程高精度旋转运动,可应用于精密超精密机械加工、微机电系统、微操作机器人、生物技术、航空航天等领域。

Figure 202010050003

The invention belongs to the field of precision driving, and in particular relates to a bionic inchworm type driving device and an excitation method thereof. The invention solves the technical problems of complex structure and difficult control of the inchworm type piezoelectric driving device. The device includes a driving unit, a clamping unit, a rotor, a screw and a base; the driving unit and the clamping unit are installed on the base by screws; the device adopts the excitation method of voltage signal timing control, so that the driving unit and the clamping unit work alternately and cooperatively , can realize large-stroke high-precision rotary motion, and can be used in precision ultra-precision machining, micro-electromechanical systems, micro-manipulation robots, biotechnology, aerospace and other fields.

Figure 202010050003

Description

一种仿生尺蠖式驱动装置及其激励方法A bionic inchworm drive device and excitation method thereof

技术领域technical field

本发明涉及一种微纳精密驱动装置,特别涉及一种仿生尺蠖式驱动装置及其激励方法。The invention relates to a micro-nano precision driving device, in particular to a bionic inchworm type driving device and an excitation method thereof.

背景技术Background technique

具有微/纳米级定位精度的精密驱动技术是超精密加工与测量、光学工程、智能机器人、现代医疗、航空航天科技等高尖端科学技术领域中的关键技术。为实现微/纳米级的输出精度,现代精密驱动技术的应用对驱动装置的精度提出了更高要求。传统的驱动装置输出精度低,整体尺寸大,无法满足现代先进科技技术中精密系统对微/纳米级高精度和驱动装置尺寸微小的要求。压电驱动装置具有体积尺寸小、位移分辨率高、输出负载大、能量转换率高等优点,能实现微/纳米级的输出精度,已经越来越多地被应用到微定位和精密超精密加工中。尺蠖压电驱动装置在获得较大输出行程的同时能够保证较高的输出精度与承载能力,受到了研究学者的广泛关注。尺蠖型驱动装置通常需采用两路钳位单元、一路驱动单元,多路控制,存在结构复杂、控制困难的问题,不利于尺蠖型压电驱动的实际应用。因此,有必要设计一种能简化结构和控制的尺蠖型压电驱动装置。Precision drive technology with micro/nano-level positioning accuracy is a key technology in high-end scientific and technological fields such as ultra-precision machining and measurement, optical engineering, intelligent robots, modern medical care, and aerospace technology. In order to achieve micro/nano-level output precision, the application of modern precision drive technology puts forward higher requirements for the precision of the drive device. The traditional driving device has low output precision and large overall size, which cannot meet the requirements of micro/nano-level high precision and small size of the driving device in the precision system of modern advanced technology. Piezoelectric drives have the advantages of small size, high displacement resolution, large output load, and high energy conversion rate. They can achieve micro/nano-level output accuracy, and have been increasingly used in micro-positioning and precision ultra-precision machining. middle. The inchworm piezoelectric drive device can ensure high output precision and bearing capacity while obtaining a large output stroke, which has attracted extensive attention of researchers. The inchworm type driving device usually needs to use two clamping units, one driving unit, and multi-channel control, which has the problems of complex structure and difficult control, which is not conducive to the practical application of the inchworm type piezoelectric drive. Therefore, it is necessary to design an inchworm piezoelectric driving device that can simplify the structure and control.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种仿生尺蠖式驱动装置及其激励方法,解决现有技术存在的上述问题。本发明通过电压信号的时序控制,使用一组驱动单元和一组钳位单元交替协同工作,可实现大行程高精度旋转驱动,同时能有效简化装置结构和控制。The purpose of the present invention is to provide a bionic inchworm type driving device and an excitation method thereof to solve the above problems existing in the prior art. Through the time sequence control of the voltage signal, the present invention uses a group of driving units and a group of clamping units to work alternately and cooperatively, so as to realize the large-stroke and high-precision rotary drive, and at the same time, the device structure and control can be effectively simplified.

本发明的上述目的通过以下技术方案实现:The above-mentioned purpose of the present invention is achieved through the following technical solutions:

一种仿生尺蠖式驱动装置,包括驱动单元、钳位单元、转子、螺钉和底座,驱动单元和钳位单元通过螺钉安装在底座上;所述装置通过对电压信号时序控制使驱动单元和钳位单元交替协同工作,驱动转子做旋转运动。A bionic inchworm type driving device, comprising a driving unit, a clamping unit, a rotor, a screw and a base, the driving unit and the clamping unit are mounted on the base by screws; The units work together alternately to drive the rotor to rotate.

所述的驱动单元包括压电叠堆、柔性铰链机构、预紧楔块;压电叠堆斜置于柔性铰链机构内,通过预紧楔块进行预紧;柔性铰链机构包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶紧转子并带动转子旋转。The drive unit includes a piezoelectric stack, a flexible hinge mechanism, and a pre-tightening wedge; the piezoelectric stack is obliquely placed in the flexible hinge mechanism, and pre-tightened by the pre-tightening wedge; the flexible hinge mechanism includes four thin-walled flexible For the hinge, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted through the screw, the arc-shaped convex part is in contact with the rotor, and the electric extension of the piezoelectric stack can push the arc-shaped convex part to tighten the rotor and drive the rotor to rotate.

所述的钳位单元包括压电叠堆、柔性铰链机构、预紧楔块;压电叠堆安装于柔性铰链机构内,通过预紧楔块进行预紧;柔性铰链机构包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶住转子实现钳位。The clamping unit includes a piezoelectric stack, a flexible hinge mechanism, and a pre-tightening wedge; the piezoelectric stack is installed in the flexible hinge mechanism, and is pre-tightened by the pre-tightening wedge; the flexible hinge mechanism includes four thin-walled flexible For the hinge, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted through the screw, the arc-shaped convex part is in contact with the rotor, and the electric extension of the piezoelectric stack can push the arc-shaped convex part against the rotor to achieve clamping.

一种仿生尺蠖式驱动装置的激励方法,包括以下步骤:An excitation method for a bionic inchworm drive device, comprising the following steps:

第①步,初始状态:调节螺钉来控制柔性铰链机构与转子间的初始预紧力;采用两组电压信号分别控制驱动单元、钳位单元;驱动单元和钳位单元的压电叠堆都不带电;Step ①, initial state: adjust the screw to control the initial preload between the flexible hinge mechanism and the rotor; use two sets of voltage signals to control the driving unit and the clamping unit respectively; the piezoelectric stacks of the driving unit and the clamping unit are not charged;

第②步,驱动单元推动转子旋转;Step ②, the drive unit pushes the rotor to rotate;

第③步,钳位单元对转子进行钳位;Step ③, the clamping unit clamps the rotor;

第④步,驱动单元恢复到初始状态;The fourth step, the drive unit is restored to the initial state;

第⑤步,钳位单元恢复到初始状态,一个运动周期结束;Step ⑤, the clamping unit returns to the initial state, and one movement cycle ends;

第⑥步,重复上述步骤,驱动单元和钳位单元交替工作,该驱动装置可实现大行程高精度旋转运动。In step ⑥, the above steps are repeated, the driving unit and the clamping unit work alternately, and the driving device can realize large-stroke high-precision rotary motion.

本发明的主要优势在于:通过电压信号的时序控制,采用一组驱动单元和一组钳位单元交替协同工作,可实现微纳米级大行程旋转运动,同时可以有效简化装置结构和控制。该装置可应用于精密超精密加工、微操作机器人、微机电系统、大规模集成电路制造、生物技术等重要科学工程领域。The main advantage of the present invention is: through the time sequence control of the voltage signal, a group of driving units and a group of clamping units are used to work alternately and cooperatively, so that the micro-nano level large-stroke rotational motion can be realized, and the device structure and control can be effectively simplified. The device can be applied to important scientific and engineering fields such as precision ultra-precision machining, micro-manipulation robots, micro-electromechanical systems, large-scale integrated circuit manufacturing, and biotechnology.

附图说明Description of drawings

此处附图说明用来提供对本发明的进一步理解,构成本申请的一部分,本发明的示意性实例及其说明用于解释本发明,并不构成对本发明的不当限定。The accompanying drawings here are used to provide a further understanding of the present invention and constitute a part of the present application. The schematic examples of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention.

图1是本发明的等轴测视示意图;1 is a schematic isometric view of the present invention;

图2是本发明的驱动单元柔性铰链机构示意图;Fig. 2 is the schematic diagram of the flexible hinge mechanism of the drive unit of the present invention;

图3是本发明的钳位单元柔性铰链机构示意图;3 is a schematic diagram of the flexible hinge mechanism of the clamping unit of the present invention;

图4是加载在驱动单元压电叠堆、钳位单元压电叠堆上的电压信号。FIG. 4 is a voltage signal applied to the piezoelectric stack of the driving unit and the piezoelectric stack of the clamping unit.

图中:In the picture:

1.驱动单元; 2.转子; 3.底座;1. Drive unit; 2. Rotor; 3. Base;

4.钳位单元; 5.螺钉; 1-1.压电叠堆I;4. Clamping unit; 5. Screw; 1-1. Piezoelectric stack I;

1-2.预紧楔块I; 1-3.柔性铰链机构I; 4-1.压电叠堆II;1-2. Preload wedge I; 1-3. Flexible hinge mechanism I; 4-1. Piezoelectric stack II;

4-2.预紧楔块II; 4-3.柔性铰链机构II。4-2. Preload wedge II; 4-3. Flexible hinge mechanism II.

具体实施方式Detailed ways

下面结合附图进一步说明本发明的详细内容及其具体实施方式。The details of the present invention and the specific implementations thereof will be further described below with reference to the accompanying drawings.

参见图1至图3所示,一种仿生尺蠖式驱动装置,主要包括驱动单元(1)、钳位单元(4)、转子(2)、螺钉(5)和底座(3),驱动单元(1)和钳位单元(4)通过螺钉(5)安装在底座(3)上;所述装置通过对电压信号时序控制使驱动单元(1)和钳位单元(4)交替协同工作,驱动转子(2)做旋转运动。Referring to Figures 1 to 3, a bionic inchworm driving device mainly includes a driving unit (1), a clamping unit (4), a rotor (2), a screw (5) and a base (3), and the driving unit ( 1) and the clamping unit (4) are mounted on the base (3) through screws (5); the device makes the driving unit (1) and the clamping unit (4) work alternately and cooperatively by controlling the voltage signal sequence to drive the rotor (2) Do a rotating motion.

所述的驱动单元(1)包括柔性铰链机构I(1-3)、预紧楔块I(1-2)、压电叠堆I(1-1);压电叠堆I(1-1)安装于柔性铰链机构I(1-3)内,通过预紧楔块I(1-2)进行预紧;柔性铰链机构I(1-3)包含四个薄壁柔性铰链,通过螺钉(5)可调节柔性铰链机构I(1-3)与转子(2)之间的初始预紧力,弧形凸起部分与转子(2)接触,压电叠堆I(1-1)得电伸长可推动弧形凸起部分顶紧转子(2)并带动转子(2)旋转。The drive unit (1) includes a flexible hinge mechanism I(1-3), a preload wedge I(1-2), a piezoelectric stack I(1-1); the piezoelectric stack I(1-1) ) is installed in the flexible hinge mechanism I (1-3), and is pre-tightened by the pre-tightening wedge I (1-2); ) The initial preload force between the flexible hinge mechanism I (1-3) and the rotor (2) can be adjusted, the arc-shaped convex part is in contact with the rotor (2), and the piezoelectric stack I (1-1) is electrically stretched. The long can push the arc-shaped convex part to press against the rotor (2) and drive the rotor (2) to rotate.

所述的钳位单元(4)包括压电叠堆II(4-1)、预紧楔块II(4-2)、柔性铰链机构II(4-3);压电叠堆II(4-1)安装于柔性铰链机构II(4-3)内,通过预紧楔块II(4-2)进行预紧;柔性铰链机构II(4-3)包含四个薄壁柔性铰链,通过螺钉(5)可调节柔性铰链机构II(4-3)与转子(2)之间的初始预紧力,弧形凸起部分与转子(2)接触,压电叠堆II(4-1)得电伸长可推动弧形凸起部分顶住转子(2)实现钳位。The clamping unit (4) includes a piezoelectric stack II (4-1), a preload wedge II (4-2), a flexible hinge mechanism II (4-3); the piezoelectric stack II (4-2) 1) Installed in the flexible hinge mechanism II (4-3), and pre-tightened by the pre-tightening wedge II (4-2); the flexible hinge mechanism II (4-3) contains four thin-walled flexible hinges, which are 5) The initial preload force between the flexible hinge mechanism II (4-3) and the rotor (2) can be adjusted, the arc-shaped convex part is in contact with the rotor (2), and the piezoelectric stack II (4-1) is energized The elongation can push the arc-shaped convex part against the rotor (2) to realize clamping.

一种仿生尺蠖式驱动装置的激励方法,包括以下步骤:An excitation method for a bionic inchworm drive device, comprising the following steps:

第①步,初始状态:调节螺钉(5)来控制柔性铰链机构I(1-3)、柔性铰链机构II(4-3)与转子(2)间的初始预紧力;采用两组电压信号分别控制驱动单元(1)、钳位单元(4);驱动单元(1)和钳位单元(4)的压电叠堆都不带电;Step ①, initial state: adjust the screw (5) to control the initial preload between the flexible hinge mechanism I (1-3), flexible hinge mechanism II (4-3) and the rotor (2); use two sets of voltage signals The driving unit (1) and the clamping unit (4) are controlled respectively; the piezoelectric stacks of the driving unit (1) and the clamping unit (4) are not charged;

第②步,驱动单元(1)推动转子(2)旋转;Step ②, the drive unit (1) pushes the rotor (2) to rotate;

第③步,钳位单元(4)对转子(2)进行钳位;Step ③, the clamping unit (4) clamps the rotor (2);

第④步,驱动单元(1)恢复到初始状态;The fourth step, the drive unit (1) is restored to the initial state;

第⑤步,钳位单元(4)恢复到初始状态,一个运动周期结束;Step ⑤, the clamping unit (4) is restored to the initial state, and one movement cycle ends;

第⑥步,重复上述步骤,驱动单元(1)和钳位单元(4)交替工作,该驱动装置可实现大行程高精度旋转运动。In step ⑥, the above steps are repeated, the driving unit (1) and the clamping unit (4) work alternately, and the driving device can realize large-stroke and high-precision rotary motion.

参见图1至图4所示,本发明的具体工作过程如下:1 to 4, the specific working process of the present invention is as follows:

第①步,初始状态:调节螺钉(5)来控制柔性铰链机构I(1-3)、柔性铰链机构II(4-3)与转子(2)间的初始预紧力。采用两组电压信号U1、U2分别控制驱动单元(1)中的压电叠堆I(1-1)、钳位单元(4)中的压电叠堆II(4-1)。压电叠堆I(1-1)、压电叠堆II(4-1)都不带电;Step ①, initial state: adjust the screw (5) to control the initial preload between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2). Two sets of voltage signals U 1 and U 2 are used to control the piezoelectric stack I (1-1) in the driving unit (1) and the piezoelectric stack II (4-1) in the clamping unit (4), respectively. Piezoelectric stack I (1-1) and piezoelectric stack II (4-1) are not charged;

第②步,U1上升信号,驱动单元(1)动作:当压电叠堆I(1-1)通电后,通过逆压电效应伸长,驱动柔性铰链机构I(1-3)变形,导致柔性铰链机构I(1-3)的弧形凸起顶紧转子(2),同时带动转子(2)旋转;The second step, U1 rises the signal, the driving unit ( 1 ) acts: when the piezoelectric stack I (1-1) is energized, it stretches through the inverse piezoelectric effect to drive the flexible hinge mechanism I (1-3) to deform, Cause the arc-shaped protrusion of the flexible hinge mechanism I (1-3) to press against the rotor (2), and at the same time drive the rotor (2) to rotate;

第③步,U2上升信号,钳位单元(4)动作:在压电叠堆I(1-1)失电回退前,钳位单元(4)的压电叠堆II(4-1)通电,通过逆压电效应伸长,推动柔性铰链机构II(4-3)的弧形凸起顶紧转子(2)进行钳位;Step ③, U 2 rises signal, the clamping unit (4) acts: before the piezoelectric stack I (1-1) loses power and retreats, the piezoelectric stack II (4-1 of the clamping unit (4) ) is energized, elongated through the inverse piezoelectric effect, and pushes the arc-shaped protrusion of the flexible hinge mechanism II (4-3) to press against the rotor (2) for clamping;

第④步,U1下降信号,驱动单元(1)恢复:压电叠堆I(1-1)失电,恢复到初始状态,柔性铰链机构I(1-3)也恢复到初始状态,转子(2)仍保持在转动一个角度后的位置;Step 4, U1 drops the signal, the drive unit ( 1 ) recovers: the piezoelectric stack I (1-1) loses power and returns to the initial state, the flexible hinge mechanism I (1-3) also returns to the initial state, the rotor (2) remains in the position after turning an angle;

第⑤步,U2下降信号,钳位单元(4)恢复:压电叠堆II(4-1)失电,恢复到初始状态,柔性铰链机构II(4-3)也恢复到初始状态,一个运动周期结束;Step ⑤, U 2 drops the signal, the clamping unit (4) recovers: the piezoelectric stack II (4-1) loses power and returns to the initial state, and the flexible hinge mechanism II (4-3) also returns to the initial state, A motion cycle ends;

重复上述步骤,驱动单元(1)和钳位单元(4)交替工作,该驱动装置可实现大行程高精度旋转运动。By repeating the above steps, the driving unit (1) and the clamping unit (4) work alternately, and the driving device can realize large-stroke and high-precision rotational motion.

本发明涉及的一种仿生尺蠖式驱动装置及其激励方法,通过对电压信号的时序控制,采用一组驱动单元和一组钳位单元交替协同工作,可实现大行程精密旋转驱动,具有发热小、驱动平稳、可靠、高效的特点。The invention relates to a bionic inchworm type driving device and an excitation method thereof. Through the time sequence control of the voltage signal, a group of driving units and a group of clamping units are used to alternately work together, which can realize large-stroke precision rotational driving, and has the advantages of low heat generation and low heat generation. , The drive is stable, reliable and efficient.

Claims (4)

1.一种仿生尺蠖式驱动装置,其特征在于:包括驱动单元、钳位单元、转子、螺钉和底座,驱动单元和钳位单元通过螺钉安装在底座上;所述装置采用电压信号时序控制的激励方法,使驱动单元和钳位单元交替协同工作,可实现旋转运动。1. a bionic inchworm type driving device is characterized in that: comprising a driving unit, a clamping unit, a rotor, a screw and a base, and the driving unit and the clamping unit are installed on the base by screws; The excitation method makes the driving unit and the clamping unit work alternately and cooperatively to realize the rotational movement. 2.根据权利要求1所述的仿生尺蠖式驱动装置,其特征在于:所述的驱动单元包括压电叠堆、柔性铰链机构、预紧楔块;压电叠堆斜置于柔性铰链机构内,通过预紧楔块进行预紧;柔性铰链机构包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶紧转子并带动转子旋转。2 . The bionic inchworm type driving device according to claim 1 , wherein the driving unit comprises a piezoelectric stack, a flexible hinge mechanism, and a pre-tightening wedge; the piezoelectric stack is placed obliquely in the flexible hinge mechanism. 3 . , pre-tightened by pre-tightening wedges; the flexible hinge mechanism includes four thin-walled flexible hinges, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted by screws, the arc-shaped convex part is in contact with the rotor, and the piezoelectric stack The electric extension can push the arc-shaped convex part against the rotor and drive the rotor to rotate. 3.根据权利要求1所述的仿生尺蠖式驱动装置,其特征在于:所述的钳位单元包括压电叠堆、柔性铰链机构、预紧楔块;压电叠堆安装于柔性铰链机构内,通过预紧楔块进行预紧;柔性铰链机构包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶住转子实现钳位。3 . The bionic inchworm drive device according to claim 1 , wherein the clamping unit comprises a piezoelectric stack, a flexible hinge mechanism, and a pre-tightening wedge; the piezoelectric stack is installed in the flexible hinge mechanism. 4 . , pre-tightened by pre-tightening wedges; the flexible hinge mechanism includes four thin-walled flexible hinges, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted by screws, the arc-shaped convex part is in contact with the rotor, and the piezoelectric stack Electric extension can push the arc-shaped convex part against the rotor to achieve clamping. 4.一种如权利要求1所述的仿生尺蠖式驱动装置的激励方法,其特征在于:包括以下步骤:4. a kind of excitation method of bionic inchworm type driving device as claimed in claim 1, is characterized in that: comprises the following steps: 第①步,初始状态:调节螺钉来控制柔性铰链机构与转子间的初始预紧力;采用两组电压信号分别控制驱动单元、钳位单元;驱动单元和钳位单元的压电叠堆都不带电;Step ①, initial state: adjust the screw to control the initial preload between the flexible hinge mechanism and the rotor; use two sets of voltage signals to control the driving unit and the clamping unit respectively; the piezoelectric stacks of the driving unit and the clamping unit are not charged; 第②步,驱动单元推动转子旋转;Step ②, the drive unit pushes the rotor to rotate; 第③步,钳位单元对转子进行钳位;Step ③, the clamping unit clamps the rotor; 第④步,驱动单元恢复到初始状态;The fourth step, the drive unit is restored to the initial state; 第⑤步,钳位单元恢复到初始状态,一个运动周期结束;Step ⑤, the clamping unit returns to the initial state, and one movement cycle ends; 重复上述步骤,驱动单元和钳位单元交替工作,该驱动装置可实现旋转运动。By repeating the above steps, the driving unit and the clamping unit work alternately, and the driving device can realize rotational motion.
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