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CN111384873B - Bionic inchworm type driving device and excitation method thereof - Google Patents

Bionic inchworm type driving device and excitation method thereof Download PDF

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CN111384873B
CN111384873B CN202010050003.1A CN202010050003A CN111384873B CN 111384873 B CN111384873 B CN 111384873B CN 202010050003 A CN202010050003 A CN 202010050003A CN 111384873 B CN111384873 B CN 111384873B
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rotor
unit
hinge mechanism
flexible hinge
clamping
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CN111384873A (en
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万嫩
李建平
温建明
张昱
马继杰
胡意立
程光明
阚君武
蔡俊杰
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Zhejiang Normal University CJNU
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023Inchworm motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • H02N2/123Mechanical transmission means, e.g. for gearing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

本发明属于精密驱动领域,具体涉及一种仿生尺蠖式驱动装置及其激励方法。本发明解决了尺蠖型压电驱动装置结构复杂、控制困难的技术问题。该装置包括驱动单元、钳位单元、转子、螺钉和底座;驱动单元和钳位单元通过螺钉安装在底座上;该装置采用电压信号时序控制的激励方法,使驱动单元和钳位单元交替协同工作,可实现大行程高精度旋转运动,可应用于精密超精密机械加工、微机电系统、微操作机器人、生物技术、航空航天等领域。

The invention belongs to the field of precision driving, and specifically relates to a bionic inchworm driving device and an excitation method thereof. The invention solves the technical problems of complex structure and difficult control of the inchworm-type piezoelectric driving device. The device includes a drive unit, a clamp unit, a rotor, screws and a base; the drive unit and the clamp unit are installed on the base through screws; the device uses an excitation method controlled by voltage signal timing to enable the drive unit and the clamp unit to work together alternately , can achieve large-stroke and high-precision rotational motion, and can be used in precision and ultra-precision machining, micro-electromechanical systems, micro-operation robots, biotechnology, aerospace and other fields.

Description

一种仿生尺蠖式驱动装置及其激励方法A bionic inchworm driving device and its excitation method

技术领域Technical field

本发明涉及一种微纳精密驱动装置,特别涉及一种仿生尺蠖式驱动装置及其激励方法。The invention relates to a micro-nano precision driving device, and in particular to a bionic inchworm driving device and an excitation method thereof.

背景技术Background technique

具有微/纳米级定位精度的精密驱动技术是超精密加工与测量、光学工程、智能机器人、现代医疗、航空航天科技等高尖端科学技术领域中的关键技术。为实现微/纳米级的输出精度,现代精密驱动技术的应用对驱动装置的精度提出了更高要求。传统的驱动装置输出精度低,整体尺寸大,无法满足现代先进科技技术中精密系统对微/纳米级高精度和驱动装置尺寸微小的要求。压电驱动装置具有体积尺寸小、位移分辨率高、输出负载大、能量转换率高等优点,能实现微/纳米级的输出精度,已经越来越多地被应用到微定位和精密超精密加工中。尺蠖压电驱动装置在获得较大输出行程的同时能够保证较高的输出精度与承载能力,受到了研究学者的广泛关注。尺蠖型驱动装置通常需采用两路钳位单元、一路驱动单元,多路控制,存在结构复杂、控制困难的问题,不利于尺蠖型压电驱动的实际应用。因此,有必要设计一种能简化结构和控制的尺蠖型压电驱动装置。Precision drive technology with micro/nano-level positioning accuracy is a key technology in high-end scientific and technological fields such as ultra-precision processing and measurement, optical engineering, intelligent robots, modern medical care, and aerospace technology. In order to achieve micro/nano-level output accuracy, the application of modern precision drive technology places higher requirements on the accuracy of the drive device. The traditional drive device has low output precision and large overall size, and cannot meet the requirements of precision systems in modern advanced technology for micro/nano-level high precision and small drive device size. Piezoelectric drive devices have the advantages of small size, high displacement resolution, large output load, and high energy conversion rate. They can achieve micro/nano-level output accuracy and have been increasingly used in micro-positioning and precision ultra-precision machining. middle. The inchworm piezoelectric drive device can obtain a large output stroke while ensuring high output accuracy and load-bearing capacity, which has attracted widespread attention from researchers. Inchworm-type driving devices usually require two-way clamping units, one-way driving unit, and multi-channel control. They have problems of complex structure and difficult control, which are not conducive to the practical application of inchworm-type piezoelectric driving. Therefore, it is necessary to design an inchworm-type piezoelectric driving device that can simplify the structure and control.

发明内容Contents of the invention

本发明的目的在于提供一种仿生尺蠖式驱动装置及其激励方法,解决现有技术存在的上述问题。本发明通过电压信号的时序控制,使用一组驱动单元和一组钳位单元交替协同工作,可实现大行程高精度旋转驱动,同时能有效简化装置结构和控制。The purpose of the present invention is to provide a bionic inchworm driving device and its excitation method to solve the above problems existing in the prior art. Through the timing control of voltage signals, the present invention uses a set of driving units and a set of clamping units to alternately work together to achieve large-stroke and high-precision rotational driving, while effectively simplifying the device structure and control.

本发明的上述目的通过以下技术方案实现:The above objects of the present invention are achieved through the following technical solutions:

一种仿生尺蠖式驱动装置,包括驱动单元、钳位单元、转子、螺钉和底座,驱动单元和钳位单元通过螺钉安装在底座上;所述装置通过对电压信号时序控制使驱动单元和钳位单元交替协同工作,驱动转子做旋转运动。A bionic inchworm driving device includes a driving unit, a clamping unit, a rotor, screws and a base. The driving unit and the clamping unit are installed on the base through screws; the device controls the driving unit and the clamping unit by controlling the timing of voltage signals. The units work together alternately to drive the rotor to rotate.

所述的驱动单元包括压电叠堆、柔性铰链机构、预紧楔块;压电叠堆斜置于柔性铰链机构内,通过预紧楔块进行预紧;柔性铰链机构包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶紧转子并带动转子旋转。The driving unit includes a piezoelectric stack, a flexible hinge mechanism, and a preloading wedge; the piezoelectric stack is placed obliquely in the flexible hinge mechanism and is preloaded by the preloading wedge; the flexible hinge mechanism includes four thin-walled flexible Hinge, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted through screws. The arc-shaped protruding part is in contact with the rotor. The electrical extension of the piezoelectric stack can push the arc-shaped protruding part to tighten the rotor and drive the rotor to rotate.

所述的钳位单元包括压电叠堆、柔性铰链机构、预紧楔块;压电叠堆安装于柔性铰链机构内,通过预紧楔块进行预紧;柔性铰链机构包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶住转子实现钳位。The clamping unit includes a piezoelectric stack, a flexible hinge mechanism, and a preloading wedge; the piezoelectric stack is installed in the flexible hinge mechanism and is preloaded by the preloading wedge; the flexible hinge mechanism includes four thin-walled flexible Hinge, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted through screws. The arc-shaped protruding part contacts the rotor, and the electrical extension of the piezoelectric stack can push the arc-shaped protruding part against the rotor to achieve clamping.

一种仿生尺蠖式驱动装置的激励方法,包括以下步骤:An excitation method for a bionic inchworm drive device includes the following steps:

第①步,初始状态:调节螺钉来控制柔性铰链机构与转子间的初始预紧力;采用两组电压信号分别控制驱动单元、钳位单元;驱动单元和钳位单元的压电叠堆都不带电;Step 1, initial state: adjust the screw to control the initial pre-tightening force between the flexible hinge mechanism and the rotor; use two sets of voltage signals to control the drive unit and clamp unit respectively; the piezoelectric stacks of the drive unit and clamp unit are not charged;

第②步,驱动单元推动转子旋转;Step 2: The drive unit drives the rotor to rotate;

第③步,钳位单元对转子进行钳位;Step ③: The clamping unit clamps the rotor;

第④步,驱动单元恢复到初始状态;Step ④, the drive unit returns to its initial state;

第⑤步,钳位单元恢复到初始状态,一个运动周期结束;Step ⑤, the clamping unit returns to the initial state, and a movement cycle ends;

第⑥步,重复上述步骤,驱动单元和钳位单元交替工作,该驱动装置可实现大行程高精度旋转运动。Step ⑥, repeat the above steps, the driving unit and the clamping unit work alternately. The driving device can realize large-stroke and high-precision rotation motion.

本发明的主要优势在于:通过电压信号的时序控制,采用一组驱动单元和一组钳位单元交替协同工作,可实现微纳米级大行程旋转运动,同时可以有效简化装置结构和控制。该装置可应用于精密超精密加工、微操作机器人、微机电系统、大规模集成电路制造、生物技术等重要科学工程领域。The main advantage of the present invention is that through the timing control of voltage signals, a set of driving units and a set of clamping units are used to alternately work together to achieve micro-nano-level large-stroke rotation, and at the same time, the device structure and control can be effectively simplified. The device can be used in important scientific and engineering fields such as precision ultra-precision machining, micro-operation robots, micro-electromechanical systems, large-scale integrated circuit manufacturing, and biotechnology.

附图说明Description of drawings

此处附图说明用来提供对本发明的进一步理解,构成本申请的一部分,本发明的示意性实例及其说明用于解释本发明,并不构成对本发明的不当限定。The description of the drawings here is used to provide a further understanding of the present invention and constitutes a part of the present application. The illustrative examples of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention.

图1是本发明的等轴测视示意图;Figure 1 is an isometric view of the present invention;

图2是本发明的驱动单元柔性铰链机构示意图;Figure 2 is a schematic diagram of the flexible hinge mechanism of the drive unit of the present invention;

图3是本发明的钳位单元柔性铰链机构示意图;Figure 3 is a schematic diagram of the flexible hinge mechanism of the clamping unit of the present invention;

图4是加载在驱动单元压电叠堆、钳位单元压电叠堆上的电压信号。Figure 4 is the voltage signal loaded on the piezoelectric stack of the driving unit and the piezoelectric stack of the clamping unit.

图中:In the picture:

1.驱动单元; 2.转子; 3.底座;1. Drive unit; 2. Rotor; 3. Base;

4.钳位单元; 5.螺钉; 1-1.压电叠堆I;4. Clamp unit; 5. Screw; 1-1. Piezoelectric stack I;

1-2.预紧楔块I; 1-3.柔性铰链机构I; 4-1.压电叠堆II;1-2. Preload wedge I; 1-3. Flexible hinge mechanism I; 4-1. Piezoelectric stack II;

4-2.预紧楔块II; 4-3.柔性铰链机构II。4-2. Preload wedge II; 4-3. Flexible hinge mechanism II.

具体实施方式Detailed ways

下面结合附图进一步说明本发明的详细内容及其具体实施方式。The detailed content and specific implementation methods of the present invention will be further described below with reference to the accompanying drawings.

参见图1至图3所示,一种仿生尺蠖式驱动装置,主要包括驱动单元(1)、钳位单元(4)、转子(2)、螺钉(5)和底座(3),驱动单元(1)和钳位单元(4)通过螺钉(5)安装在底座(3)上;所述装置通过对电压信号时序控制使驱动单元(1)和钳位单元(4)交替协同工作,驱动转子(2)做旋转运动。Referring to Figures 1 to 3, a bionic inchworm type driving device mainly includes a driving unit (1), a clamping unit (4), a rotor (2), a screw (5) and a base (3). The driving unit ( 1) and the clamping unit (4) are installed on the base (3) through screws (5); the device controls the voltage signal timing to make the driving unit (1) and the clamping unit (4) work together alternately to drive the rotor. (2) Make rotational movements.

所述的驱动单元(1)包括柔性铰链机构I(1-3)、预紧楔块I(1-2)、压电叠堆I(1-1);压电叠堆I(1-1)安装于柔性铰链机构I(1-3)内,通过预紧楔块I(1-2)进行预紧;柔性铰链机构I(1-3)包含四个薄壁柔性铰链,通过螺钉(5)可调节柔性铰链机构I(1-3)与转子(2)之间的初始预紧力,弧形凸起部分与转子(2)接触,压电叠堆I(1-1)得电伸长可推动弧形凸起部分顶紧转子(2)并带动转子(2)旋转。The driving unit (1) includes a flexible hinge mechanism I (1-3), a preload wedge I (1-2), and a piezoelectric stack I (1-1); the piezoelectric stack I (1-1 ) is installed in the flexible hinge mechanism I (1-3) and is pre-tightened by the preload wedge I (1-2); the flexible hinge mechanism I (1-3) contains four thin-walled flexible hinges, which are pre-tensioned by the screws (5 ) The initial preload force between the flexible hinge mechanism I (1-3) and the rotor (2) can be adjusted. The arc-shaped protruding part contacts the rotor (2), and the piezoelectric stack I (1-1) is electrically stretched. The long one can push the arc-shaped protruding part to press against the rotor (2) and drive the rotor (2) to rotate.

所述的钳位单元(4)包括压电叠堆II(4-1)、预紧楔块II(4-2)、柔性铰链机构II(4-3);压电叠堆II(4-1)安装于柔性铰链机构II(4-3)内,通过预紧楔块II(4-2)进行预紧;柔性铰链机构II(4-3)包含四个薄壁柔性铰链,通过螺钉(5)可调节柔性铰链机构II(4-3)与转子(2)之间的初始预紧力,弧形凸起部分与转子(2)接触,压电叠堆II(4-1)得电伸长可推动弧形凸起部分顶住转子(2)实现钳位。The clamping unit (4) includes a piezoelectric stack II (4-1), a preload wedge II (4-2), and a flexible hinge mechanism II (4-3); the piezoelectric stack II (4- 1) Installed in the flexible hinge mechanism II (4-3), preloaded by the preload wedge II (4-2); the flexible hinge mechanism II (4-3) contains four thin-walled flexible hinges, which are preloaded by screws ( 5) The initial preload force between the flexible hinge mechanism II (4-3) and the rotor (2) can be adjusted. The arc-shaped protruding part contacts the rotor (2), and the piezoelectric stack II (4-1) is energized. Extending can push the arc-shaped convex part against the rotor (2) to achieve clamping.

一种仿生尺蠖式驱动装置的激励方法,包括以下步骤:An excitation method for a bionic inchworm drive device includes the following steps:

第①步,初始状态:调节螺钉(5)来控制柔性铰链机构I(1-3)、柔性铰链机构II(4-3)与转子(2)间的初始预紧力;采用两组电压信号分别控制驱动单元(1)、钳位单元(4);驱动单元(1)和钳位单元(4)的压电叠堆都不带电;Step ①, initial state: adjust the screw (5) to control the initial pre-tightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2); use two sets of voltage signals Control the driving unit (1) and the clamping unit (4) respectively; the piezoelectric stacks of the driving unit (1) and the clamping unit (4) are not electrified;

第②步,驱动单元(1)推动转子(2)旋转;Step ②, the drive unit (1) pushes the rotor (2) to rotate;

第③步,钳位单元(4)对转子(2)进行钳位;Step ③: The clamping unit (4) clamps the rotor (2);

第④步,驱动单元(1)恢复到初始状态;Step ④, the drive unit (1) returns to the initial state;

第⑤步,钳位单元(4)恢复到初始状态,一个运动周期结束;Step ⑤, the clamping unit (4) returns to the initial state, and one movement cycle ends;

第⑥步,重复上述步骤,驱动单元(1)和钳位单元(4)交替工作,该驱动装置可实现大行程高精度旋转运动。Step ⑥: Repeat the above steps, and the driving unit (1) and the clamping unit (4) work alternately. The driving device can realize large-stroke and high-precision rotation motion.

参见图1至图4所示,本发明的具体工作过程如下:Referring to Figures 1 to 4, the specific working process of the present invention is as follows:

第①步,初始状态:调节螺钉(5)来控制柔性铰链机构I(1-3)、柔性铰链机构II(4-3)与转子(2)间的初始预紧力。采用两组电压信号U1、U2分别控制驱动单元(1)中的压电叠堆I(1-1)、钳位单元(4)中的压电叠堆II(4-1)。压电叠堆I(1-1)、压电叠堆II(4-1)都不带电;Step ①, initial state: adjust the screw (5) to control the initial pre-tightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2). Two sets of voltage signals U 1 and U 2 are used to control the piezoelectric stack I (1-1) in the driving unit (1) and the piezoelectric stack II (4-1) in the clamping unit (4) respectively. Neither the piezoelectric stack I(1-1) nor the piezoelectric stack II(4-1) is charged;

第②步,U1上升信号,驱动单元(1)动作:当压电叠堆I(1-1)通电后,通过逆压电效应伸长,驱动柔性铰链机构I(1-3)变形,导致柔性铰链机构I(1-3)的弧形凸起顶紧转子(2),同时带动转子(2)旋转;Step ②, U 1 rises signal, the driving unit (1) acts: when the piezoelectric stack I (1-1) is energized, it stretches through the reverse piezoelectric effect, driving the flexible hinge mechanism I (1-3) to deform. As a result, the arc-shaped protrusion of the flexible hinge mechanism I (1-3) presses against the rotor (2), and at the same time drives the rotor (2) to rotate;

第③步,U2上升信号,钳位单元(4)动作:在压电叠堆I(1-1)失电回退前,钳位单元(4)的压电叠堆II(4-1)通电,通过逆压电效应伸长,推动柔性铰链机构II(4-3)的弧形凸起顶紧转子(2)进行钳位;Step ③, U 2 rising signal, clamping unit (4) action: before the piezoelectric stack I (1-1) loses power and retreats, the piezoelectric stack II (4-1) of the clamping unit (4) ) is energized and stretches through the inverse piezoelectric effect, pushing the arc-shaped protrusion of the flexible hinge mechanism II (4-3) against the rotor (2) for clamping;

第④步,U1下降信号,驱动单元(1)恢复:压电叠堆I(1-1)失电,恢复到初始状态,柔性铰链机构I(1-3)也恢复到初始状态,转子(2)仍保持在转动一个角度后的位置;Step ④, U 1 drops the signal, and the drive unit (1) recovers: the piezoelectric stack I (1-1) loses power and returns to the initial state, the flexible hinge mechanism I (1-3) also returns to the initial state, and the rotor (2) Still maintaining the position after turning an angle;

第⑤步,U2下降信号,钳位单元(4)恢复:压电叠堆II(4-1)失电,恢复到初始状态,柔性铰链机构II(4-3)也恢复到初始状态,一个运动周期结束;Step ⑤, U 2 decreases the signal and the clamping unit (4) recovers: the piezoelectric stack II (4-1) loses power and returns to the initial state, and the flexible hinge mechanism II (4-3) also returns to the initial state. The end of a movement cycle;

重复上述步骤,驱动单元(1)和钳位单元(4)交替工作,该驱动装置可实现大行程高精度旋转运动。Repeating the above steps, the driving unit (1) and the clamping unit (4) work alternately, and the driving device can realize large-stroke and high-precision rotation motion.

本发明涉及的一种仿生尺蠖式驱动装置及其激励方法,通过对电压信号的时序控制,采用一组驱动单元和一组钳位单元交替协同工作,可实现大行程精密旋转驱动,具有发热小、驱动平稳、可靠、高效的特点。The invention relates to a bionic inchworm driving device and an excitation method thereof. Through timing control of voltage signals, a group of driving units and a group of clamping units are used to alternately work together to achieve large-stroke precision rotational driving with low heat generation. , The driving characteristics are smooth, reliable and efficient.

Claims (2)

1.一种仿生尺蠖式驱动装置,其特征在于:包括一组驱动单元、一组钳位单元、转子、螺钉和底座,驱动单元和钳位单元通过螺钉安装在底座上,所述驱动单元和所述钳位单元相对布置在转子两侧;所述装置采用电压信号时序控制的激励方法,使驱动单元和钳位单元交替协同工作,可实现旋转运动;所述的驱动单元包括压电叠堆、柔性铰链机构、预紧楔块,压电叠堆斜置于柔性铰链机构内,通过预紧楔块进行预紧,柔性铰链机构为方形,包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶紧转子并带动转子旋转;所述的钳位单元包括压电叠堆、柔性铰链机构、预紧楔块,压电叠堆安装于柔性铰链机构内,通过预紧楔块进行预紧,柔性铰链机构为类一字型,包含四个薄壁柔性铰链,通过螺钉可调节柔性铰链机构与转子间的初始预紧力,弧形凸起部分与转子接触,压电叠堆得电伸长可推动弧形凸起部分顶住转子实现钳位。1. A bionic inchworm driving device, characterized in that: it includes a set of driving units, a set of clamping units, a rotor, screws and a base. The driving unit and the clamping unit are installed on the base through screws. The driving unit and The clamping units are relatively arranged on both sides of the rotor; the device adopts an excitation method controlled by voltage signal timing, so that the driving unit and the clamping unit alternately work together to achieve rotational motion; the driving unit includes a piezoelectric stack , flexible hinge mechanism, preloading wedge, the piezoelectric stack is placed obliquely in the flexible hinge mechanism, and is preloaded by the preloading wedge. The flexible hinge mechanism is square and contains four thin-walled flexible hinges, and the flexibility can be adjusted through screws The initial pre-tightening force between the hinge mechanism and the rotor, the arc-shaped protruding part contacts the rotor, and the piezoelectric stack is electrically extended to push the arc-shaped protruding part to tighten the rotor and drive the rotor to rotate; the clamping unit includes Piezoelectric stack, flexible hinge mechanism, and preloading wedge. The piezoelectric stack is installed in the flexible hinge mechanism and is preloaded by the preloading wedge. The flexible hinge mechanism is in a straight-shaped shape and contains four thin-walled flexible hinges. , the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted by screws, the arc-shaped protruding part contacts the rotor, and the electrical extension of the piezoelectric stack can push the arc-shaped protruding part against the rotor to achieve clamping. 2.一种如权利要求1所述的仿生尺蠖式驱动装置的激励方法,其特征在于:包括以下步骤:2. An excitation method for the bionic inchworm drive device as claimed in claim 1, characterized in that it includes the following steps: 第①步,初始状态:调节螺钉来控制柔性铰链机构与转子间的初始预紧力;采用两组电压信号分别控制驱动单元、钳位单元;驱动单元和钳位单元的压电叠堆都不带电;Step 1, initial state: adjust the screw to control the initial pre-tightening force between the flexible hinge mechanism and the rotor; use two sets of voltage signals to control the drive unit and clamp unit respectively; the piezoelectric stacks of the drive unit and clamp unit are not charged; 第②步,驱动单元推动转子旋转;Step 2: The drive unit drives the rotor to rotate; 第③步,钳位单元对转子进行钳位;Step ③: The clamping unit clamps the rotor; 第④步,驱动单元恢复到初始状态;Step ④, the drive unit returns to its initial state; 第⑤步,钳位单元恢复到初始状态,一个运动周期结束;Step ⑤, the clamping unit returns to the initial state, and a movement cycle ends; 重复上述步骤,驱动单元和钳位单元交替工作,该驱动装置可实现旋转运动。Repeat the above steps, the driving unit and the clamping unit work alternately, and the driving device can realize rotational movement.
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