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CN111342697A - A bridge piezoelectric drive linear actuator and control method - Google Patents

A bridge piezoelectric drive linear actuator and control method Download PDF

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Publication number
CN111342697A
CN111342697A CN202010209846.1A CN202010209846A CN111342697A CN 111342697 A CN111342697 A CN 111342697A CN 202010209846 A CN202010209846 A CN 202010209846A CN 111342697 A CN111342697 A CN 111342697A
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push rod
flexible hinge
motion mechanism
linear actuator
drive
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CN111342697B (en
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崔良玉
胡高峰
韩建鑫
靳刚
李占杰
贾静
须颖
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Sanying Motioncontrol Instruments Ltd
Tianjin University of Technology and Education China Vocational Training Instructor Training Center
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Sanying Motioncontrol Instruments Ltd
Tianjin University of Technology and Education China Vocational Training Instructor Training Center
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025Inertial sliding motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • H02N2/062Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

本发明属于压电促动器技术领域,具体涉及一种桥式压电驱动直线促动器及控制方法。该桥式压电驱动直线促动器,包括上盖、外壳、柔性铰链微动机构、推杆和压电陶瓷驱动,所述外壳内设有柔性铰链微动机构,柔性铰链微动机构上设有压电陶瓷驱动器和推杆,外壳两侧对应推杆两端分别设有凹槽,推杆两端通过外壳上的凹槽延伸至外壳外,所述柔性铰链微动机构上设有驱动滑槽,推杆位于柔性铰链微动机构上的驱动滑槽内,推杆与驱动滑槽槽壁之间设有滚珠板,使其成赫兹接触。其有益效果是:结构简单紧凑,通过一个压电陶瓷驱动器实现两个驱动头在两个方向上的运动控制,成本低,控制方法简单。

Figure 202010209846

The invention belongs to the technical field of piezoelectric actuators, and in particular relates to a bridge-type piezoelectric drive linear actuator and a control method. The bridge-type piezoelectric drive linear actuator includes an upper cover, a casing, a flexible hinge micro-movement mechanism, a push rod and a piezoelectric ceramic drive. The casing is provided with a flexible hinge micro-motion mechanism, and the flexible hinge micro-motion mechanism is provided with There is a piezoelectric ceramic driver and a push rod. There are grooves on both sides of the casing corresponding to the two ends of the push rod. The two ends of the push rod extend to the outside of the casing through the grooves on the casing. The push rod is located in the drive chute on the flexible hinge micro-movement mechanism, and a ball plate is arranged between the push rod and the wall of the drive chute to make it in Hertzian contact. The beneficial effects are as follows: the structure is simple and compact, the motion control of the two driving heads in two directions is realized by a piezoelectric ceramic driver, the cost is low, and the control method is simple.

Figure 202010209846

Description

一种桥式压电驱动直线促动器及控制方法A bridge piezoelectric drive linear actuator and control method

技术领域technical field

本发明属于压电促动器技术领域,具体涉及一种桥式压电驱动直线促动器及控制方法。The invention belongs to the technical field of piezoelectric actuators, and particularly relates to a bridge-type piezoelectric drive linear actuator and a control method.

背景技术Background technique

压电促动器主要包括:(1)信号控制式惯性压电促动器,其驱动原理是采用非对称的驱动信号作为动力源,并匹配前进和后退方向上对称的摩擦力实现驱动,但是需要简历里复杂和精密的信号控制系统,对促动器整机的微小化和集成化带来一定难度;(2)摩擦控制式惯性压电精密促动器,其驱动原理是采用对称的驱动信号和机械夹持结构共同作用产生的驱动力作为动力源,通过前进与后退方向上非对称的摩擦力实现驱动,但是目前的压电促动器结构复杂,成本高,且在运动过程中会产生寄生位移。Piezoelectric actuators mainly include: (1) Signal-controlled inertial piezoelectric actuators, the driving principle of which is to use an asymmetrical driving signal as a power source, and to match the symmetrical friction in the forward and backward directions to achieve driving, but It requires a complex and precise signal control system in the resume, which brings certain difficulties to the miniaturization and integration of the actuator; (2) Friction-controlled inertial piezoelectric precision actuator, whose driving principle is to use symmetrical drive The driving force generated by the joint action of the signal and the mechanical clamping structure is used as the power source, and the driving is realized by the asymmetric friction force in the forward and backward directions. parasitic displacement.

发明内容SUMMARY OF THE INVENTION

本发明为了弥补现有技术的缺陷,提供了一种桥式压电驱动直线促动器及控制方法。In order to make up for the defects of the prior art, the present invention provides a bridge piezoelectric driving linear actuator and a control method.

本发明是通过如下技术方案实现的:The present invention is achieved through the following technical solutions:

一种桥式压电驱动直线促动器,包括上盖、外壳、柔性铰链微动机构、推杆和压电陶瓷驱动,所述外壳内设有柔性铰链微动机构,柔性铰链微动机构上设有压电陶瓷驱动器和推杆,外壳两侧对应推杆两端分别设有凹槽,推杆两端通过外壳上的凹槽延伸至外壳外,所述柔性铰链微动机构上设有驱动滑槽,推杆位于柔性铰链微动机构上的驱动滑槽内,推杆与驱动滑槽槽壁之间设有滚珠板,使其成赫兹接触。A bridge type piezoelectric drive linear actuator, comprising an upper cover, a casing, a flexible hinge micro-movement mechanism, a push rod and a piezoelectric ceramic drive, the casing is provided with a flexible hinge micro-motion mechanism, and the flexible hinge micro-motion mechanism is arranged on the flexible hinge micro-motion mechanism. A piezoelectric ceramic driver and a push rod are provided. There are grooves on both sides of the casing corresponding to the two ends of the push rod. The two ends of the push rod extend to the outside of the casing through the grooves on the casing. The flexible hinge micro-movement mechanism is provided with a drive The chute, the push rod is located in the drive chute on the flexible hinge micro-movement mechanism, and a ball plate is arranged between the push rod and the wall of the drive chute to make hertz contact.

进一步,所述柔性铰链微动机构中间为镂空状,柔性铰链微动机构位于中间镂空处两侧对称设有半圆形驱动头,推杆位于两个半圆形驱动头之间,压电陶瓷驱动器位于柔性铰链微动机构中间为镂空处。Further, the flexible hinge micro-moving mechanism is hollow in the middle, the flexible hinge micro-moving mechanism is located in the middle hollow with semi-circular driving heads symmetrically on both sides, the push rod is located between the two semi-circular driving heads, and the piezoelectric ceramic The driver is located in the hollow in the middle of the flexible hinge micro-movement mechanism.

进一步,所述压电陶瓷驱动器通过预紧螺栓安装在柔性铰链微动机构内部镂空处,且装配方向与推杆长轴方向一致。Further, the piezoelectric ceramic driver is installed on the hollow inside the flexible hinge micro-movement mechanism through pre-tightening bolts, and the assembly direction is consistent with the long axis direction of the push rod.

进一步,所述柔性铰链微动机构一侧位于两个半圆形驱动头上分别设有滚珠板。Further, one side of the flexible hinge micro-moving mechanism is located on the two semi-circular driving heads and respectively provided with ball plates.

一种桥式压电驱动直线促动器的控制方法,通过滚珠板与柔性铰链微动机构呈赫兹接触,通过驱动头的黏滑驱动方式,带动推杆在轴向方向运动;上盖与驱动头之间通过滚珠板接触,可对驱动头进行约束,防止其在运动过程中产生寄生位移,利用预紧螺栓调节压电陶瓷驱动器的预紧;通过非对称三角波的电压驱动,实现压电陶瓷驱动器的黏滑驱动,通过调节施加的静态电压可调节预紧力,通过调节施加的动态电压,从而调整运动速度及运动方向。A control method for a bridge-type piezoelectric drive linear actuator. The ball plate is in Hertzian contact with the flexible hinge micro-movement mechanism, and the stick-slip drive mode of the drive head drives the push rod to move in the axial direction; the upper cover and the drive The contact between the heads through the ball plate can constrain the driving head to prevent it from generating parasitic displacement during the movement process, and use the preload bolt to adjust the preload of the piezoelectric ceramic driver; through the voltage drive of the asymmetric triangular wave, the piezoelectric ceramic can be realized. In the stick-slip drive of the driver, the preload can be adjusted by adjusting the applied static voltage, and the moving speed and moving direction can be adjusted by adjusting the applied dynamic voltage.

本发明的有益效果是:结构简单紧凑,通过一个压电陶瓷驱动器实现两个驱动头在两个方向上的运动控制,成本低,控制方法简单。The beneficial effects of the invention are that the structure is simple and compact, the motion control of the two driving heads in two directions is realized by a piezoelectric ceramic driver, the cost is low, and the control method is simple.

附图说明Description of drawings

下面结合附图对本发明作进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.

附图1为本发明的结构示意图;Accompanying drawing 1 is the structural representation of the present invention;

附图2为本发明柔性铰链微动机构的结构示意图。FIG. 2 is a schematic structural diagram of the flexible hinge micro-movement mechanism of the present invention.

图中,1 上盖,2外壳,3凹槽,4柔性铰链微动机构,5推杆,6滚珠板,7驱动滑槽,8压电陶瓷驱动器。In the figure, 1 upper cover, 2 shell, 3 groove, 4 flexible hinge micro-movement mechanism, 5 push rod, 6 ball plate, 7 drive chute, 8 piezoelectric ceramic driver.

具体实施方式Detailed ways

附图1、2为本发明的一种具体实施例。该发明一种桥式压电驱动直线促动器,包括上盖1、外壳2、柔性铰链微动机构4、推杆5和压电陶瓷驱动,所述外壳2内设有柔性铰链微动机构4,柔性铰链微动机构4上设有压电陶瓷驱动器8和推杆5,外壳2两侧对应推杆5两端分别设有凹槽3,推杆5两端通过外壳2上的凹槽3延伸至外壳2外,所述柔性铰链微动机构4上设有驱动滑槽7,推杆5位于柔性铰链微动机构4上的驱动滑槽7内,推杆5与驱动滑槽7槽壁之间设有滚珠板6,使其成赫兹接触。Figures 1 and 2 are a specific embodiment of the present invention. This invention is a bridge type piezoelectric drive linear actuator, which includes an upper cover 1, a casing 2, a flexible hinge micro-movement mechanism 4, a push rod 5 and a piezoelectric ceramic drive, and the casing 2 is provided with a flexible hinge micro-motion mechanism 4. The flexible hinge micro-movement mechanism 4 is provided with a piezoelectric ceramic driver 8 and a push rod 5. The two sides of the casing 2 correspond to the two ends of the push rod 5 with grooves 3 respectively, and the two ends of the push rod 5 pass through the grooves on the casing 2. 3 extends to the outside of the housing 2, the flexible hinge micro-movement mechanism 4 is provided with a driving chute 7, the push rod 5 is located in the driving chute 7 on the flexible hinge micro-motion mechanism 4, and the push rod 5 and the driving chute 7 groove Ball plates 6 are provided between the walls so that they are in Hertzian contact.

进一步,所述柔性铰链微动机构4中间为镂空状,柔性铰链微动机构4位于中间镂空处两侧对称设有半圆形驱动头,推杆5位于两个半圆形驱动头之间,压电陶瓷驱动器8位于柔性铰链微动机构4中间为镂空处。Further, the flexible hinge micro-moving mechanism 4 is hollow in the middle, the flexible hinge micro-moving mechanism 4 is located in the middle hollow with semi-circular driving heads symmetrically on both sides, and the push rod 5 is located between the two semi-circular driving heads. The piezoelectric ceramic driver 8 is located in a hollowed out place in the middle of the flexible hinge micro-moving mechanism 4 .

进一步,所述压电陶瓷驱动器8通过预紧螺栓安装在柔性铰链微动机构4内部镂空处,且装配方向与推杆5长轴方向一致。Further, the piezoelectric ceramic driver 8 is installed at the hollow inside the flexible hinge micro-movement mechanism 4 through pre-tightening bolts, and the assembly direction is consistent with the long axis direction of the push rod 5 .

进一步,所述柔性铰链微动机构4一侧位于两个半圆形驱动头上分别设有滚珠板6。Further, one side of the flexible hinge micro-moving mechanism 4 is located on the two semicircular driving heads, respectively, with ball plates 6 .

一种桥式压电驱动直线促动器的控制方法,通过滚珠板6与柔性铰链微动机构4呈赫兹接触,通过驱动头的黏滑驱动方式,带动推杆5在轴向方向运动;上盖1与驱动头之间通过滚珠板6接触,可对驱动头进行约束,防止其在运动过程中产生寄生位移,利用预紧螺栓调节压电陶瓷驱动器8的预紧;通过非对称三角波的电压驱动,实现压电陶瓷驱动器8的黏滑驱动,通过调节施加的静态电压可调节预紧力,通过调节施加的动态电压,从而调整运动速度及运动方向。A control method of a bridge-type piezoelectric drive linear actuator, the ball plate 6 is in Hertzian contact with the flexible hinge micro-movement mechanism 4, and the push rod 5 is driven to move in the axial direction through the stick-slip drive mode of the drive head; The contact between the cover 1 and the driving head is made by the ball plate 6, which can restrain the driving head and prevent it from generating parasitic displacement during the movement process, and use the preload bolt to adjust the preload of the piezoelectric ceramic driver 8; through the voltage of the asymmetric triangle wave Drive, realize the stick-slip drive of the piezoelectric ceramic driver 8, adjust the applied static voltage to adjust the preload, and adjust the applied dynamic voltage to adjust the movement speed and movement direction.

本发明不局限于上述实施方式,任何人应得知在本发明的启示下作出的与本发明具有相同或相近的技术方案,均落入本发明的保护范围之内。The present invention is not limited to the above-mentioned embodiments, and anyone should know that the technical solutions that are identical or similar to the present invention made under the inspiration of the present invention fall within the protection scope of the present invention.

本发明未详细描述的技术、形状、构造部分均为公知技术。The technology, shape, and structural part that are not described in detail in the present invention are all well-known technologies.

Claims (5)

1. The utility model provides a bridge type piezoelectricity drive linear actuator, includes upper cover, shell, flexible hinge fine motion mechanism, push rod and piezoceramics drive, its characterized in that, be equipped with flexible hinge fine motion mechanism in the shell, be equipped with piezoceramics driver and push rod on the flexible hinge fine motion mechanism, the shell both sides correspond the push rod both ends and are equipped with the recess respectively, outside the recess that the push rod both ends were passed through on the shell extended to the shell, be equipped with the drive spout on the flexible hinge fine motion mechanism, the push rod lies in the drive spout on the flexible hinge fine motion mechanism, is equipped with the ball board between push rod and the drive spout cell wall, makes it become the Her.
2. A bridge piezoelectric driven linear actuator as claimed in claim 1 wherein: the middle of the flexible hinge micro-motion mechanism is hollowed, semicircular driving heads are symmetrically arranged at two sides of the hollowed part in the middle of the flexible hinge micro-motion mechanism, the push rod is positioned between the two semicircular driving heads, and the piezoelectric ceramic driver is positioned at the hollowed part in the middle of the flexible hinge micro-motion mechanism.
3. A bridge piezoelectric driven linear actuator as claimed in claim 1 wherein: the piezoelectric ceramic driver is installed at a hollow-out position inside the flexible hinge micro-motion mechanism through a pre-tightening bolt, and the assembling direction is consistent with the long axis direction of the push rod.
4. A bridge piezoelectric driven linear actuator as claimed in claim 1 wherein: and ball plates are respectively arranged on the two semicircular driving heads on one side of the flexible hinge micro-motion mechanism.
5. A control method of a bridge type piezoelectric driving linear actuator is characterized in that: the ball plate is in Hertz contact with the flexible hinge micro-motion mechanism, and the push rod is driven to move in the axial direction in a stick-slip driving mode of the driving head; the upper cover is in contact with the driving head through the ball plate, so that the driving head can be restrained, parasitic displacement of the driving head in the motion process is prevented, and the pre-tightening of the piezoelectric ceramic driver is adjusted by the pre-tightening bolt; the piezoelectric ceramic driver is driven by the voltage of the asymmetric triangular wave to realize the stick-slip driving of the piezoelectric ceramic driver, the pretightening force can be adjusted by adjusting the applied static voltage, and the movement speed and the movement direction can be adjusted by adjusting the applied dynamic voltage.
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CN110421532A (en) * 2019-08-15 2019-11-08 山东大学深圳研究院 A kind of micro-nano servo platform of Piezoelectric Ceramic
CN110768570A (en) * 2019-04-08 2020-02-07 浙江师范大学 A micro-nano step piezoelectric drive device
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Publication number Priority date Publication date Assignee Title
US20080191583A1 (en) * 2007-01-25 2008-08-14 Siemens Aktiengesellschaft Linear drive and method for displacing an object by a linear drive
US20140239771A1 (en) * 2011-08-05 2014-08-28 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelectric rotary drive for a shaft
WO2013064513A1 (en) * 2011-11-02 2013-05-10 Physik Instrumente (Pi) Gmbh & Co. Kg Drive apparatus
CN103011069A (en) * 2012-12-13 2013-04-03 哈尔滨工业大学 Stick-slip rotating and positioning device
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CN107070300A (en) * 2017-04-27 2017-08-18 西安交通大学 A kind of double piezoelectric pile angular displacement actuator and method with clamper function
CN110768570A (en) * 2019-04-08 2020-02-07 浙江师范大学 A micro-nano step piezoelectric drive device
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