CN103011069A - Stick-slip rotating and positioning device - Google Patents

Abstract

The invention relates to a rotary positioning device, in particular to a stick-slip rotary positioning device. In order to solve the problem that the current rotary positioning device cannot be used in ultra-low temperature, ultra-vacuum, high electric field or high magnetic field and other workplaces, and The problem of the large size of the rotary positioning device and the large positioning error, the device includes a rotating unit, a driving unit and a base, the rotating unit includes a first rotating semi-circular table and a second rotating semi-circular table, and the driving unit includes a driving elastic table and a driving turntable , the base includes the abutment and the piezoelectric ceramic driver, the upper end surface of the driving elastic table is processed with multiple groups of flexible hinges, the bottom end surface of the driving elastic table is provided with a fork structure, the bottom of the fork structure is provided with a driving rotating plate, and the rotation unit is set on the drive On the top of the elastic platform, the driving elastic platform is arranged on the base platform, and the piezoelectric ceramic driver is arranged in the base platform. The invention is used in micro-nano operation experiment research.

Description

A stick-slip rotary positioning device

technical field

The invention relates to a rotary positioning device, in particular to a stick-slip rotary positioning device.

Background technique

Nano-positioning technology is the basis of nano-operation technology. With the rapid development of nano-technology, more and more application fields require small-sized rotary positioning devices with nano-level positioning accuracy and millimeter-level motion strokes. At present, the existing technology of rotary positioning The application environment of the device is also very extreme, and cannot be used in workplaces such as ultra-low temperature, ultra-vacuum, high electric field or high magnetic field, and the rotary positioning device in the prior art is bulky and has large positioning errors.

Contents of the invention

In order to solve the problem that the current rotary positioning device cannot be used in ultra-low temperature, ultra-vacuum, high electric field or high magnetic field and other working places, and the rotary positioning device in the prior art has a large volume and large positioning error, it further provides a stick-slip type rotary positioning device.

The technical solution adopted by the present invention to solve the above problems is: the device includes a rotating unit, a driving unit and a base; the rotating unit includes a first rotating semi-circular platform and a second rotating semi-circular platform, and the driving unit includes a driving elastic platform and a driving rotating plate , the base includes a base and a piezoelectric ceramic driver, a first V-shaped groove is processed at the center of the cross-section of the first rotating semi-circular table, a second V-shaped groove is processed at the center of the cross-section of the second rotating semi-circular table, and the first rotating semi-circular table It is installed and combined with the second rotating semi-circular table to form a round table. The first V-shaped groove and the second V-shaped groove are arranged opposite to each other. The driving elastic table is in the shape of a rectangular plate. The upper end of the driving elastic table is processed with multiple sets of symmetrical flexible hinges. The top of the elastic table is provided with a load-bearing end surface, and the load-bearing end surface is provided with a rotating shaft. The bottom end surface of the driving elastic table is facing the load-bearing end surface with a fork-shaped structure. The bottom of the fork-shaped structure is processed with a notch. There is a vertical plate arranged vertically between them, and two horizontal plates are arranged alternately. The abutment is in the shape of a rectangular plate. A first rectangular through hole is processed on the abutment. A rectangular slot, one end of the rectangular slot is processed with a second rectangular through hole, the second rectangular through hole communicates with the first rectangular through hole, two second rectangular through holes are arranged alternately,

The first rotating semi-circular table and the second rotating semi-circular table are combined into one, the rotating unit is set on the top of the driving elastic table, and the first V-shaped groove and the second V-shaped groove clamp and fix the rotating shaft in the two V-shaped grooves , a vertical plate is fixed in the notch of the fork-shaped structure at the bottom of the driving elastic table, the driving elastic table is arranged on the base, the piezoelectric ceramic driver is arranged in the rectangular groove, and the two horizontal plates are respectively close to the piezoelectric ceramic driver. One end is arranged in the second rectangular through hole.

The beneficial effects of the present invention are: the present invention can be applied to work in the complex environment of ultra-low temperature, ultra-vacuum, high electric field or high magnetic field, and the present invention adopts the stick-slip type, which refers to the use of the rotating unit 1 and the rotating shaft 2-1-2. When the friction force is static friction force, the two objects will rotate continuously without relative displacement. When the friction force is dynamic friction force, the two objects will undergo relative displacement. It has small radial runout, compact structure, small volume (less than 10cm3), and positioning accuracy. The high-level advantages can reach nanometer-level positioning accuracy, and the invention meets the design requirements, is easy to operate, and has the characteristics of high applicability.

Description of drawings

Fig. 1 is a schematic diagram of the overall structure of the present invention, and Fig. 2 is a combination of the first rotating semi-circular table 1-1 and the second rotating semi-circular table 1-2 through the first adjusting bolt 1-3 and two adjusting springs 1-4 in the present invention It is a schematic diagram of the overall structure of the rotating unit 1. FIG. 3 is a schematic diagram of the structure of the driving rotating plate 2-2 of the present invention. FIG. 4 is a schematic diagram of the structure of the piezoelectric ceramic driver 3-2 of the present invention. FIG. 3, Fig. 6 is a schematic diagram of the present invention installing the pre-tightening screw 3-4 on the abutment 3-1, Fig. 7 is a schematic diagram of the present invention installing the first fixing bolt 2-3 on the driving elastic platform 2-1 , Figure 8 is a front view of the overall structure of the present invention combined with the first adjusting bolt 1-3, two adjusting springs 1-4, the first rotating semicircular platform 1-1 and the second rotating semicircular platform 1-2, and Figure 9 is The top view of the drive elastic table 2-1 of the present invention, Fig. 10 is the front view of the drive elastic table 2-1 of the present invention, Fig. 11 is the side view of the drive elastic table 2-1 of the present invention, and Fig. 12 is the drive rotating plate 2 of the present invention -2 The front view of the position structure installed in the base 3-1, Fig. 13 is the bottom view of the fork-shaped structure 2-1-4 installed on the driving elastic platform 2-1 of the present invention with the driving rotating plate 2-2.

Detailed ways

Specific Embodiment 1: This embodiment is described in conjunction with FIGS. 1-13 , a stick-slip rotary positioning device, which includes a rotating unit 1 , a driving unit 2 and a base 3 ; the rotating unit 1 includes a first rotating semicircular table 1 -1 and the second rotating semi-circular table 1-2, the driving unit 2 includes the driving elastic table 2-1 and the driving rotating plate 2-2, the base 3 includes the base table 3-1 and the piezoelectric ceramic driver 3-2, the first rotating A first V-shaped groove 1-5 is processed at the center of the cross-section of the semi-circular table 1-1, a second V-shaped groove 1-6 is processed at the center of the cross-section of the second rotating semi-circular table 1-2, and the first rotating semi-circular table 1-2 1 and the second rotating semi-circular table 1-2 are relatively installed and combined to form a circular table, the first V-shaped groove 1-5 and the second V-shaped groove 1-6 are arranged oppositely, the driving elastic table 2-1 is a rectangular plate shape, and the driving elastic There are multiple sets of symmetrical flexible hinges 2-1-1 processed on the upper surface of the table 2-1, the top of the drive elastic table 2-1 is provided with a bearing end surface 2-1-3, and the bearing end surface 2-1-3 is provided with a rotating shaft 2 -1-2, the bottom end face of the driving elastic table 2-1 is facing the bearing end face 2-1-3 with a fork-shaped structure 2-1-4, and the bottom of the fork-shaped structure 2-1-4 is processed with a notch 2-1 -5, the driving rotating plate 2-2 is composed of a vertical plate 2-2-2 vertically arranged between two horizontal plates 2-2-1, and the two horizontal plates 2-2-1 are arranged alternately, basically The platform 3-1 is in the shape of a rectangular plate, and a first rectangular through hole 3-5 is processed on the abutment 3-1, and a rectangular groove 3-6 is respectively staggered on the two sides close to the rectangular through hole 3-5. One end of the groove 3-6 is processed with a second rectangular through hole 3-7, the second rectangular through hole 3-7 communicates with the first rectangular through hole 3-5, and two second rectangular through holes 3-7 are arranged alternately,

The first rotating semi-circular table 1-1 and the second rotating semi-circular table 1-2 are combined into one, the rotating unit 1 is arranged on the top of the driving elastic table 2-1, and the first V-shaped groove 1-5 and the second V-shaped groove 1-6 Clamp and fix the rotating shaft 2-1-2 in two V-shaped grooves, drive the fork-shaped structure 2-1-4 at the bottom of the elastic table 2-1 and fix it in the notch 2-1-5 The vertical plate 2-2-2, the driving elastic table 2-1 is set on the base 3-1, the piezoelectric ceramic driver 3-2 is set in the rectangular groove 3-6, and the two horizontal plates 2-2-1 are respectively One end close to the piezoelectric ceramic driver 3-2 is arranged in the second rectangular through hole 3-7,

The stick-slip rotary positioning device of the present invention has the advantages of small radial runout, compact structure, small volume (less than 10cm3), high positioning accuracy, etc., and the rotary unit 1 is axially positioned on the bearing end surface 2 at the root of the rotary shaft 2-1-2 -1-3, the end face not only bears the axial load of the positioning platform, but also has a small contact area with the rotating unit 1, which can effectively reduce the influence of the friction force of the bearing end face 2-1-3 on the rotation positioning. The drive of the present invention The elastic table 2-1 is an elastic structure processed as a whole, and multiple sets of symmetrically processed flexible hinges 2-1-1 limit the three axial translation degrees of freedom and two horizontal axial rotations of the central rotation axis 2-1-2 of the drive table , structurally solves the problem of excessive radial runout of the positioning table, and the rotating shaft at the center has two functions of the rotor and the rotating shaft at the same time, which is used to transmit the output of the rotating displacement of the flexible hinge 2-1-1, and realize the rotation unit 1, the driving rotating plate 2-2 cooperates with the fork-shaped structure 2-1-4 at the lower part of the driving elastic table 2-1, which limits the rotation of the driving rotating plate 2-2 in the other two directions. In addition, it is piezoelectric ceramics The driver 3-2 provides a larger installation space. The piezoelectric ceramic driver 3-2 has high displacement output resolution (sub-nanometer level), high frequency response (up to dozens of kHz), high reliability, small size, and output The piezoelectric ceramic driver 3-2 of the present invention is mechanically fixed in the base, which can effectively protect the piezoelectric ceramic driver 3-2 from being damaged by external force.

Specific Embodiment 2: This embodiment is described in conjunction with Fig. 1, Fig. 2 and Fig. 8, a stick-slip rotary positioning device, the first rotating semi-circular table 1-1 is processed with two countersunk holes 1-7, countersunk The centerline of the head hole 1-7 is perpendicular to the straight face on one side of the first rotating semicircular platform 1-1, and the second rotating semicircular platform 1-2 is provided with two first threaded holes 1-8, and the two first threaded holes The holes 1-8 are set opposite to the two counterbores 1-7, and the others are the same as in the first embodiment.

Specific embodiment three: This embodiment is described in conjunction with Fig. 1, Fig. 2 and Fig. 8, a stick-slip type rotary positioning device, the device also includes two first adjusting bolts 1-3 and two adjusting springs 1-4 , the adjusting spring 1-4 is set on the first adjusting bolt 1-3 screw, the adjusting spring 1-4 is installed in the first threaded hole 1-8 through the countersunk hole 1-7, and the adjusting spring 1-4 and the first The screw rods of the adjusting bolts 1-3 can effectively fix the two semicircular bodies. This method can precisely adjust the friction between the rotating unit 1 and the rotating shaft 2-1-2 to make the structure compact. Others are the same as the second embodiment.

Specific Embodiment 4: This embodiment is described in conjunction with Fig. 1, Fig. 6 and Fig. 12, a stick-slip rotary positioning device, one side of the two rectangular grooves 3-6 in the base 3-1 are respectively processed with The countersunk threaded hole 3-9, the other end of the countersunk threaded hole 3-9 passes the outer surface of the abutment 3-1, the center line of the countersunk threaded hole 3-9 is the length of the rectangular through hole 3-5 The sides are parallel, and the others are the same as in Embodiment 1.

Specific embodiment five: This embodiment is described in conjunction with Fig. 1, Fig. 6 and Fig. 12, a stick-slip type rotary positioning device, the device also includes two pre-tightening plates 3-3 and two pre-tightening screws 3-4 , the pre-tightening screw 3-4 is installed in the countersunk threaded hole 3-9, the pre-tightening plate 3-3 is set between the pre-tightening screw 3-4 and the piezoelectric ceramic driver 3-2, and the pre-tightening plate 3-3 is set Between the pre-tightening screw 3-4 and the piezoelectric ceramic driver 3-2, the wear of the pre-tightening screw 3-4 on the piezoelectric ceramic driver 3-2 can be effectively prevented, and the pre-tightening screw 3-4 can be screwed in and out Withstand the pretensioning plate 3-3 and the piezoelectric ceramic driver 3-2, and then withstand the driving rotating plate 2-2, and the other is the same as the fourth embodiment.

Specific embodiment six: This embodiment is described in conjunction with Fig. 1, Fig. 6 and Fig. 7, a stick-slip type rotary positioning device, the two opposite corners of the upper end surface of the drive elastic table 2-1 are respectively provided with grooves 2-6 , The groove 2-6 is provided with a through hole 2-7, and the two opposite corners of the abutment 3-1 are provided with a second thread 3-8, and the others are the same as in the first embodiment.

Specific Embodiment Seven: This embodiment is described in conjunction with Fig. 1, Fig. 6 and Fig. 7, a stick-slip rotary positioning device, the device also includes two first fixing bolts 2-3, the first fixing bolt 2-3 It passes through the through hole 2-7 and is fixed in the second thread 3-8, and the driving elastic table 2-1 and the abutment 3-1 are fixed together by the first fixing bolt 2-3, and the others are the same as the sixth embodiment.

Embodiment 8: This embodiment is described in conjunction with FIG. 3 , FIG. 10 and FIG. 11 , a stick-slip rotary positioning device, and a through hole 2-1 is processed on the two side plates of the notch 2-1-5. -6, the third threaded hole 2-2-3 is processed on the vertical plate 2-2-2, and the others are the same as in the first embodiment.

Specific Embodiment Ninth: This embodiment is described in conjunction with FIG. 3, FIG. 9, FIG. 10, FIG. 11 and FIG. The bolt 2-4 is installed in the third threaded hole 2-2-3 through the through hole 2-1-6, and the driving rotating plate 2-2 and the fork structure 2-1-4 are tightly connected by the second fixing bolt 2-4 Fixed together, the others are the same as the eighth embodiment.

working principle

When working, the pre-tightening screw 3-4 is installed in the abutment 3-1, and the piezoelectric ceramic driver 3-2 is tightly attached to the driving rotating plate 2-2 by squeezing the pre-tightening plate 3-3. After the installation and debugging of the device is completed, a certain load is placed on the upper end surface of the rotating unit 1, and by controlling the movement mode of the piezoelectric ceramic driver 3-2, that is, inputting different sawtooth wave signals, the piezoelectric ceramic driver 3-2 will output cycle Stepping linear displacement, the piezoelectric ceramic driver 3-2 drives the rotating plate 2-2 to periodically step and rotate, and at this time drives the flexible hinge 2-1-1 and the rotating shaft 2-1 on the elastic table 2-1 -2 Follow the driving turntable 2-2 to perform step-by-step rotation. When the friction force between the rotation unit 1 and the rotation shaft 2-1-2 is used as static friction force, the two objects will continue to rotate without relative displacement. When the friction force is When the dynamic friction force occurs, the relative displacement of the two objects occurs, and the rotation and positioning of the rotating unit 1 are realized through the movement, thereby realizing the nanoscale precise positioning of the objects.

Claims (9)

1. A stick-slip type rotary positioning device, characterized in that: the device comprises a rotary unit (1), a drive unit (2) and a base (3); the rotary unit (1) comprises a first rotary semicircular platform (1- 1) and the second rotating semi-circular table (1-2), the driving unit (2) includes a driving elastic table (2-1) and a driving rotating plate (2-2), and the base (3) includes an abutment (3-1) And the piezoelectric ceramic driver (3-2), the first V-shaped groove (1-5) is processed at the center of the cross-section of the first rotating semi-circular table (1-1), and the cross-section of the second rotating semi-circular table (1-2) A second V-shaped groove (1-6) is processed at the center of the circle, and the first rotating semi-circular platform (1-1) and the second rotating semi-circular platform (1-2) are relatively installed and combined to form a circular platform. The first V-shaped groove (1-6) -5) is arranged opposite to the second V-shaped groove (1-6), the driving elastic table (2-1) is in the shape of a rectangular plate, and the upper end surface of the driving elastic table (2-1) is processed with multiple sets of symmetrical flexible hinges (2 -1-1), the top of the driving elastic table (2-1) is provided with a load-bearing end surface (2-1-3), and the load-bearing end surface (2-1-3) is provided with a rotating shaft (2-1-2), and the drive The bottom end surface of the elastic table (2-1) is facing the bearing end surface (2-1-3) and is provided with a fork-shaped structure (2-1-4), and the bottom of the fork-shaped structure (2-1-4) is processed with a notch ( 2-1-5), the driving rotating plate (2-2) is composed of a vertical plate (2-2-2) vertically arranged between two horizontal plates (2-2-1), and the two horizontal plates The plates (2-2-1) are arranged staggeredly, the abutment (3-1) is in the shape of a rectangular plate, and the abutment (3-1) is processed with a first rectangular through hole (3-5), which is close to the rectangular through hole (3-5). -5) The long sides on both sides are staggered with a rectangular groove (3-6) respectively, and one end of the rectangular groove (3-6) is processed with a second rectangular through hole (3-7), and the second rectangular through hole (3-7) -7) communicating with the first rectangular through hole (3-5), two second rectangular through holes (3-7) are arranged alternately, The first rotating semi-circular table (1-1) and the second rotating semi-circular table (1-2) are combined into one, the rotating unit (1) is arranged on the top of the driving elastic table (2-1), and the first V-shaped groove ( 1-5) and the second V-shaped groove (1-6) clamp and fix the rotating shaft (2-1-2) in the two V-shaped grooves, and drive the fork-shaped structure at the bottom of the elastic table (2-1) ( A vertical plate (2-2-2) is fixed inside the notch (2-1-5) of 2-1-4), and the driving elastic platform (2-1) is arranged on the abutment (3-1), The piezoelectric ceramic driver (3-2) is arranged in the rectangular groove (3-6), and two horizontal plates (2-2-1) are respectively arranged in the second rectangular groove close to one end of the piezoelectric ceramic driver (3-2). Inside the through hole (3-7). 2. A kind of stick-slip type rotary positioning device according to claim 1, characterized in that: said first rotary semicircular table (1-1) is processed with two countersunk holes (1-7), countersunk holes ( The center line of 1-7) is perpendicular to the straight face on one side of the first rotating semi-circular platform (1-1), and the second rotating semi-circular platform (1-2) is provided with two first threaded holes (1-8), and The two first threaded holes (1-8) are arranged opposite to the two counterbore holes (1-7). 3. A stick-slip rotary positioning device according to claim 2, characterized in that: said device further comprises two first adjusting bolts (1-3) and two adjusting springs (1-4), and the adjusting spring (1-4) is sleeved on the screw rod of the first adjusting bolt (1-3), and the adjusting spring (1-4) is installed in the first threaded hole (1-8) through the counterbore (1-7). 4. A stick-slip rotary positioning device according to claim 1, characterized in that: one side of the two rectangular grooves (3-6) in the abutment (3-1) is respectively processed with countersunk heads The threaded hole (3-9), the other end of the countersunk threaded hole (3-9) passes through the outer surface of the abutment (3-1), the centerline of the threaded hole (3-9) of the countersunk head and the rectangular through hole The long sides of (3-5) are parallel. 5. A stick-slip rotary positioning device according to claim 4, characterized in that: the device also includes two pre-tightening plates (3-3) and two pre-tightening screws (3-4), the pre-tightening The screw (3-4) is installed in the countersunk threaded hole (3-9), and the pre-tightening plate (3-3) is arranged between the pre-tightening screw (3-4) and the piezoelectric ceramic driver (3-2). 6. A stick-slip type rotary positioning device according to claim 1, characterized in that grooves (2-6) are respectively provided at two opposite corners of the upper end surface of the driving elastic table (2-1), and the grooves (2-6) is provided with a through hole (2-7), and two opposite corners of the abutment (3-1) are provided with second threads (3-8). 7. A stick-slip rotary positioning device according to claim 6, characterized in that: the device further comprises two first fixing bolts (2-3), and the first fixing bolts (2-3) pass through the The hole (2-7) is fixed in the second thread (3-8). 8. A stick-slip type rotary positioning device according to claim 1, characterized in that: through holes (2-1-6) are relatively processed on the two side plates of the notch (2-1-5), A third threaded hole (2-2-3) is processed on the vertical plate (2-2-2). 9. A stick-slip rotary positioning device according to claim 1, characterized in that: the device further comprises a second fixing bolt (2-4), and the second fixing bolt (2-4) passes through the through hole (2 -1-6) Installed in the third threaded hole (2-2-3).

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