CN110986830B - A dual-spectral three-dimensional attitude angle measurement device and measurement method - Google Patents
A dual-spectral three-dimensional attitude angle measurement device and measurement method Download PDFInfo
- Publication number
- CN110986830B CN110986830B CN201911064430.9A CN201911064430A CN110986830B CN 110986830 B CN110986830 B CN 110986830B CN 201911064430 A CN201911064430 A CN 201911064430A CN 110986830 B CN110986830 B CN 110986830B
- Authority
- CN
- China
- Prior art keywords
- dimensional
- dual
- image sensor
- spectrum
- prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 38
- 238000000691 measurement method Methods 0.000 title 1
- 238000001228 spectrum Methods 0.000 claims abstract description 51
- 238000012545 processing Methods 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 20
- 230000003595 spectral effect Effects 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000004364 calculation method Methods 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000002834 transmittance Methods 0.000 claims description 6
- 238000004590 computer program Methods 0.000 claims description 4
- 230000004927 fusion Effects 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 2
- 238000001579 optical reflectometry Methods 0.000 claims 1
- 239000013598 vector Substances 0.000 description 11
- 239000011159 matrix material Substances 0.000 description 7
- 230000009466 transformation Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000036544 posture Effects 0.000 description 5
- 238000005096 rolling process Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 206010034719 Personality change Diseases 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C1/00—Measuring angles
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
本发明涉及一种双光谱三维姿态角测量装置及测量方法，解决现有三维姿态角测量系统复杂、体积大以及测量精度较低，不符合航天领域测量要求的问题。该装置包括双光谱光源、二维自准直仪、图像传感器电路板、五棱分光棱镜、折转棱镜和数据处理模块；双光谱光源发射红绿光谱光束，该光谱光束经二维自准直仪的同一狭缝出射后入射至五棱分光棱镜，五棱分光棱镜将双光谱光束分成两路，第一光路光束穿过五棱分光棱镜直接入射至被测立方镜前表面，第二光路光束通过折转棱镜折转入射至被测立方镜的侧表面，两路光束原路反射，二维自准直仪的图像传感器对返回的光束进行分时成像，图像传感器电路板对图像进行采集，并传输给数据处理模块。
The invention relates to a dual-spectrum three-dimensional attitude angle measuring device and a measuring method, which solve the problems that the existing three-dimensional attitude angle measuring system is complex, large in size and low in measurement accuracy, and does not meet the measurement requirements in the aerospace field. The device includes a dual-spectrum light source, a two-dimensional auto-collimator, an image sensor circuit board, a pentagonal beam splitter prism, a refracting prism and a data processing module; the dual-spectrum light source emits red and green spectral light beams, which are subjected to two-dimensional self-collimation. The same slit of the instrument exits and then enters the pentaprism beam splitting prism. The pentaprism beam splitter divides the double-spectrum beam into two paths. The first beam passes through the pentagonal beam splitter and directly enters the front surface of the measured cube. The second beam beam The incident beam is refracted and incident on the side surface of the cube mirror to be measured by the refracting prism, and the two beams are reflected in the same way. and transmitted to the data processing module.
Description
Technical Field
The invention relates to the field of angle measurement, in particular to a double-spectrum three-dimensional attitude angle measuring device and a measuring method.
Background
The rotation attitude of an object in space mainly comprises a roll angle, a yaw angle and a pitch angle, and a measuring method and measuring equipment thereof are always important objects of interest. The method for measuring the three-dimensional attitude angle of the object mainly comprises an interference method, a polarization method and an auto-collimation method. The interference method has poor anti-interference capability, and the measurement precision is easily influenced; the polarization method has complex measurement system and large volume of the measurement device, and cannot be flexibly arranged, installed and used; the auto-collimation method based on image measurement has the characteristics of high measurement precision, simple system structure, small volume, flexible layout and the like, so that the auto-collimation method (including the collimation method) is widely applied to three-dimensional attitude angle measurement.
In the current engineering application, the three-dimensional attitude measurement of the device to be measured mainly adopts a measuring system with three bases in a triangular layout, the system can realize the three-dimensional attitude measurement of the device to be measured through flexible layout, but a plurality of single-photo-ordinary autocollimators are required to synchronously assist in measurement, relative errors caused by environmental influences among different autocollimators are difficult to eliminate, so that the measurement precision is influenced, and the angle measurement precision requirement in the aerospace field is extremely strict, so the measurement precision does not accord with the angle measurement precision requirement in the aerospace field. Meanwhile, the aerospace product has stricter requirements on the volume of the equipment, and the system has complex relative layout and large volume and is difficult to meet the measurement requirements of the aerospace product.
Disclosure of Invention
The invention provides a double-spectrum three-dimensional attitude angle measuring device and a measuring method, aiming at the problems that a three-dimensional attitude angle measuring system in the prior art is complex, large in size and low in measuring precision and does not meet the measuring requirements in the aerospace field.
The technical scheme provided by the invention is as follows:
a double-spectrum three-dimensional attitude angle measuring device comprises a double-spectrum light source, a two-dimensional autocollimator, an image sensor circuit board, a pentagonal beam splitter prism, a turning prism and a data processing module; the double-spectrum light source emits red and green spectrum light beams, the red and green spectrum light beams are emitted through the same slit of the two-dimensional autocollimator and then enter the pentagonal beam splitter prism, the pentagonal beam splitter prism divides the red and green spectrum light beams into two paths, the first light path light beam passes through the pentagonal beam splitter prism and directly enters the front surface of the cube mirror to be detected, the second light path light beam is converted by the converting prism and enters the side surface of the cube mirror to be detected, the two light beams are reflected in the original path, the image sensor of the two-dimensional autocollimator performs time-sharing imaging on the returned light beams, the image sensor circuit board acquires an imaged image and transmits the imaged image to the data processing module, and the data processing module obtains the three-dimensional posture of the cube mirror to be detected through fusion calculation; the data processing module comprises a memory, a processor and a computer program which is stored on the memory and can run on the processor, and the processor realizes the following calculation processes when executing the computer program;
calculating the yaw angle beta, the pitch angle omega and the roll angle alpha of the cube mirror to be measured;
S2y＝f×tan2a2
α＝arcsin(-sina2/cosω)
wherein S is1zThe difference value of the position of the first light path light beam when the first light path light beam is emitted on the image sensor and the position of the first light path light beam when the first light path light beam returns in the Z direction is obtained; s1yThe difference value of the position of the first light path light beam when the first light path light beam is emitted on the image sensor and the position of the first light path light beam when the first light path light beam returns in the Y direction; s2yThe difference value of the position of the second light path light beam when the second light path light beam is emitted on the image sensor and the position of the second light path light beam when the second light path light beam returns in the Y direction; f is the focal length of the receiving system of the two-dimensional autocollimator.
Furthermore, an additional prism is arranged on the left side face of the pentagonal beam splitter prism, the right side face and the bottom face of the pentagonal beam splitter prism and the left side face of the additional prism are plated with broadband antireflection films, so that the transmittance of red light and green light is better than 99%, and the left side face of the pentagonal beam splitter prism is plated with a semi-reflective and semi-transparent film, so that the transmittance of the red light is better than 95% and the reflectance of the green light is better than 95%.
Furthermore, the wavelength range of the red light of the double-spectrum light source is 620 nm-660 nm, and the wavelength range of the green light is 500 nm-540 nm.
Further, the dual-spectrum light source adopts a bicolor LED lamp.
Meanwhile, the invention also provides a measuring method based on the double-spectrum three-dimensional attitude angle measuring device, which comprises the following steps:
step one, a double-spectrum light source emits red-green spectrum light beams;
step two, an image sensor of the two-dimensional autocollimator performs time-sharing imaging on the returned red and green spectrum light beams;
acquiring an imaged image by the image sensor circuit board, and transmitting the imaged image to the data processing module, wherein the data processing module obtains the three-dimensional posture of the measured cube mirror through fusion calculation;
3.1) obtaining the image point displacement S of the first light path light beam on the two-dimensional autocollimator image sensor1z、S1yThe image point displacement S of the second light path light beam on the two-dimensional autocollimator image sensor2y；
Wherein S is1zThe difference value of the position of the first light path light beam when the first light path light beam is emitted on the image sensor and the position of the first light path light beam when the first light path light beam returns in the Z direction is obtained; s1yThe difference value of the position of the first light path light beam when the first light path light beam is emitted on the image sensor and the position of the first light path light beam when the first light path light beam returns in the Y direction; s2yThe difference value of the position of the second light path light beam when the second light path light beam is emitted on the image sensor and the position of the second light path light beam when the second light path light beam returns in the Y direction;
3.2) calculating the yaw angle beta and the pitch angle omega of the cube mirror to be measured;
3.3) calculating the rolling angle alpha of the measured cubic mirror;
S2y＝f×tan2a2
α＝arc sin(-sina2/cosω)
wherein f is the focal length of the receiving system of the two-dimensional autocollimator.
Compared with the prior art, the device has the advantages that:
1. due to the compatibility of double spectrums, the device can complete the three-dimensional attitude measurement of the cube mirror to be measured only by one two-dimensional autocollimator, has simple structure and small volume, saves space layout and is suitable for the requirements of the equipment to be measured in the aerospace field.
2. The invention has the advantages that through double-spectrum synchronous measurement, the synchronous assistance of a plurality of single-spectrum autocollimators is not needed, and further, the relative error caused by the environmental influence among different autocollimators is avoided, so that the measurement precision is higher, the flexible layout can be realized by adjusting the position size of the folding light pipe, and the self low-frequency error resistance is extremely strong.
Drawings
FIG. 1 is a schematic layout of a dual-spectrum three-dimensional attitude angle measuring device according to the present invention;
fig. 2 is a schematic view of a surface coating of a pentagonal beam splitter prism in the dual-spectrum three-dimensional attitude angle measuring apparatus according to the present invention.
Reference numerals: the system comprises a 1-two-dimensional autocollimator, a 2-double spectrum light source, a 3-image sensor circuit board, a 4-pentagonal beam splitting prism, a 5-additional prism, a 6-first light path, a 7-front surface of a cube to be detected, an 8-side surface of the cube to be detected, a 9-cube to be detected, a 10-second light path, an 11-turning prism and a 12-data processing module.
Detailed Description
The invention is described in further detail below with reference to the figures and specific embodiments.
The invention provides a double-spectrum three-dimensional attitude angle measuring device and a measuring method, which can be used for independently completing high-precision measurement of the three-dimensional attitude of a measured target. The device realizes three-dimensional attitude measurement based on an autocollimator principle of image processing, the two-dimensional autocollimator receives coordinate positions of double spectrums on a CMOS detector through time-sharing switching, an image sensor circuit board transmits the receiving coordinate values of the CMOS detector to a data processing module, and the data processing module calculates the three-dimensional attitude angle of a cube mirror to be measured according to the obtained information.
As shown in fig. 1, the dual-spectrum three-dimensional attitude angle measuring device of the present invention includes a dual-spectrum light source 2, a two-dimensional autocollimator 1, an image sensor circuit board 3, a pentaprism 4, an additional prism 5, a turning prism 11, and a data processing module 12; the two-dimensional autocollimator 1 and the dual-spectrum light source 2 adopt the working idea of ' single optical axis + single sensor + single slit + dual light source ', the dual-spectrum light source 2 emits red and green spectrum light beams through the same slit, the light beams are output through the autocollimator, the dual-spectrum light beams are divided into two paths by the pentaprism, the first light path light beam directly passes through the pentaprism beam splitter prism 4 and is incident to the front surface 7 of the cube to be measured, the second light path light beam is refracted and incident to the side surface 8 of the cube to be measured through the turning prism 11, the two light beams are reflected by the original path, the autocollimator switches the reflected light path in a time-sharing way ', the image sensor circuit board collects images and transmits the images to the data processing module, and the data processing module obtains the three-dimensional postures (yaw angle, pitch angle and roll angle. The measuring device has the advantages of high precision, simple device, flexible layout of the position and the size of the turning prism, suitability for engineering application and strong self low-frequency error resistance.
The specific arrangement of the components is described in detail below. The parameters of the double-spectrum three-dimensional attitude angle measuring device comprise caliber, wavelength range, focal length, yaw angle, pitch angle, roll angle, view field, measuring range and measuring resolution.
The dual-spectrum light source 2 is used for providing a red-green spectrum light source (used for emitting red-green spectrum collimated light beams); the wavelength range of the light source is 620 nm-660 nm of red light (the central wavelength is 640nm) and 500 nm-540 nm of green light (the central wavelength is 520 nm). When the front surface R1 of the cube mirror to be measured is subjected to collimation measurement, an LED with the wavelength of 640nm is selected, and the spectral range is 620 nm-660 nm; when the lateral surface R2 of the cube mirror to be measured is self-aligned, the light source of the self-collimating system selects an LED with the wavelength of 520nm, and the spectral range is 500 nm-540 nm.
The two-dimensional autocollimator 1 transmits two paths of red and green light beams and performs switching collimation measurement on red and green double spectrums, and when the double-spectrum autocollimator needs to switch the red and green spectrums in a time-sharing manner to perform collimation measurement, the switching frequency is 50HZ, so that the angle measurement stability of the two paths of light beams is ensured.
The image sensor circuit board 3 finishes two paths of light beam collimation image acquisition, transmits the acquired images to the data processing module 12, and the data processing module 12 obtains the three-dimensional posture of the measured cubic mirror 9 through calculation.
The additional prism 5 and the pentagonal beam-splitting prism 4 are bonded into a whole by glue, the coating film of the bonding surface is used for splitting, the pentagonal beam-splitting prism 4 is positioned between the two-dimensional autocollimator and the cube mirror to be measured and at the position of the light outlet of the two-dimensional autocollimator, the relative position between the position of the pentagonal beam-splitting prism and the two-dimensional autocollimator is fixed, red light (640nm) measurement signal light is transmitted, and green light (520nm) measurement signal light is subjected to 90-degree turning. That is to say, the pentagonal beam splitter prism 4 splits the red and green spectrum light beam transmitted by the two-dimensional autocollimator into a first light path 6 and a second light path 10, the first light path 6 directly passes through the pentagonal beam splitter prism and enters the front surface 7 of the cube to be measured, the second light path 10 is turned to the vertical surface (i.e. the side surface 8 of the cube to be measured) of the cube to be measured 9 through the turning prism 11, and the pentagonal beam splitter prism 4 mainly performs 90 ° vertical turning on the second light path light beam.
The five-edge beam splitter prism 4 comprises seven outer surfaces, wherein the right side surface, the bottom surface and the right side surface of the additional prism 5 are plated with a broadband antireflection film, the right upper side surface is plated with a total reflection film, and the left side surface is plated with a semi-reflection and semi-transmission film (color separation film). As shown in fig. 2, the pentaprism 4 is coated with a dichroic film on the inclined plane b, which can transmit red light (transmittance is better than 95%) and reflect green light (reflectance is better than 95%), and is coated with broadband antireflection films on the light-transmitting surfaces a, c, and d, respectively, so that the transmittances of red light (640nm) and green light (520nm) are better than 99%.
The turning prism 11 is arranged at the light outlet of the second light path 10 of the pentagonal beam splitter prism 4 and transmits the light beam of the second light path 10 of the pentagonal beam splitter prism 4 to the vertical surface of the cube 9 to be measured (the side surface 8 of the cube to be measured); the turning prism 11 is a non-attitude-sensitive optical device, the vector change of emergent light cannot be caused after the attitude change of the prism, and 180-degree translation transformation can be performed on the second light path 10 by utilizing the characteristic.
The cube mirror 9 to be measured is arranged at the position where the light outlet of the first light path 6 of the pentagonal beam splitter prism and the light outlet of the second light path 10 of the turning prism are vertically crossed, and the change of the three-dimensional posture of the cube mirror to be measured causes the change of the reflection light path.
The device has the synchronous measurement function of yaw, pitch and roll three-dimensional attitude angles; yaw and pitch angle measurement accuracy: 2 arc second or less; roll angle measurement accuracy: 6 arc second or less; measurement range: 15'; measurement resolution: less than or equal to 0.5 arc second.
As shown in FIG. 1, an O-XYZ coordinate system is established, and the coordinate transformation relation of the following vectors exists in the O-XYZ coordinate system, so that the measured cube mirror has a rolling angle alpha (around an X axis), a yaw angle beta (around a Y axis) and a pitch angle omega (around a Z axis). The three-dimensional attitude of the measured cube mirror 9 changes, the front surface 7 and the side surface 8 of the measured cube mirror rotate angularly, and the action matrix of the front surface 7 of the measured cube mirror is as follows:
the action matrix of the side surface 8 of the cube under test is:
action matrix R of right-angle roof prism in light path from cube mirror to be measured to two-dimensional autocollimatorZ
Action matrix R of pentagonal beam-splitting prism in light path from cube mirror to be measured to two-dimensional autocollimatorW
In the O-XYZ coordinate system, the coordinate transformation relation of the following vectors is as follows:
coordinate transformation matrix of rotation angle α around OX axis: (Rolling change)
Coordinate transformation matrix of rotation angle β around OY axis: (yaw transformation)
Coordinate transformation matrix of rotation angle ω around OZ axis: (Pitch Change)
Measured cubeMirror reflection surface R1Is an initial vector of
Measured cube reflecting surface R2Is an initial vector of
Then when the measured cubic mirror has a rolling angle alpha (around the X axis), a yaw angle beta (around the Y axis) and a pitch angle omega (around the Z axis), the vector I is assumed to be formed when the measured cubic mirror rotates alpha → omega → beta in turn around the OX axis, the OZ axis and the OY axis1、I2Is changed into I1′、I2' (in the measurement coordinate system, OXYZ);
I2the I is obtained after the reflection of a right-angle roof prism and a pentagonal beam splitter prism2"coordinate rotation:
thus, according to the vector I1Calculating the yaw angle beta and the pitch angle omega of the cube mirror to be measured according to the change situation of the coordinate values; vector I1' Angle included by the plane XOZ, i.e. the pitch angle of the vector is a1Vector I1' yaw angle in coordinate System OXYZ is b1Then there is
Displacement S of image point 1 of return beam imaging of two-dimensional autocollimator on CMOS image sensor of autocollimator1z、S1yIt can be measured that, assuming the focal length of the receiving system of the autocollimator as f, the relationship between the displacement and the yaw angle β and the pitch angle ω, which can be obtained by the autocollimator measurement principle, is as follows:
and calculating the yaw angle beta and the pitch angle omega of the measured cubic mirror 9 according to the formula.
According to the vector I2"the coordinates of which can be calculated2"variation of angle a with plane XOZ2The following formula:
sina2＝-sinαcosω
displacement S of an image point 2 of a return beam of a two-dimensional autocollimator 1 imaged on a CMOS image sensor of the autocollimator2z、S2yIt can be measured that, assuming the focal length of the receiving system of the autocollimator as f, the relationship between the displacement and the roll angle α obtained from the autocollimator measurement principle is as follows:
S2y＝f×tan2a2
the roll angle α calculation formula can be derived from the above equation:
α＝arc sin(-sina2/cosω)
according to the principle, the double-spectrum three-dimensional attitude angle measuring method provided by the invention comprises the following steps:
step one, a double-spectrum light source 2 emits a red-green spectrum collimated light beam;
secondly, the image sensor of the two-dimensional autocollimator 1 performs time-sharing imaging on the returned light beam;
thirdly, the image sensor circuit board 3 collects the imaged image and transmits the image to the data processing module 12, and the data processing module 12 obtains the three-dimensional attitude of the cube mirror to be measured through fusion calculation;
3.1) obtaining the image point displacement S of the first light path light beam on the autocollimator image sensor1z、S1yThe image point displacement S of the second light path beam on the autocollimator image sensor2y；
Wherein S is1zThe difference value of the position of the first light path light beam when the first light path light beam is emitted on the image sensor and the position of the first light path light beam when the first light path light beam returns in the Z direction is obtained; s1yThe difference value of the position of the first light path light beam when the first light path light beam is emitted on the image sensor and the position of the first light path light beam when the first light path light beam returns in the Y direction; s2yThe difference value of the position of the second light path light beam when the second light path light beam is emitted on the image sensor and the position of the second light path light beam when the second light path light beam returns in the Y direction;
3.2) calculating the yaw angle beta and the pitch angle omega of the measured cube mirror 9;
3.3) calculating the rolling angle alpha of the measured cubic mirror 9;
S2y＝f×tan2a2
α＝arc sin(-sina2/cosω)
wherein f is the focal length of the receiving system of the two-dimensional autocollimator.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911064430.9A CN110986830B (en) | 2019-11-04 | 2019-11-04 | A dual-spectral three-dimensional attitude angle measurement device and measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911064430.9A CN110986830B (en) | 2019-11-04 | 2019-11-04 | A dual-spectral three-dimensional attitude angle measurement device and measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110986830A CN110986830A (en) | 2020-04-10 |
| CN110986830B true CN110986830B (en) | 2021-06-22 |
Family
ID=70082984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911064430.9A Active CN110986830B (en) | 2019-11-04 | 2019-11-04 | A dual-spectral three-dimensional attitude angle measurement device and measurement method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110986830B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022188166A1 (en) * | 2021-03-12 | 2022-09-15 | 欧菲光集团股份有限公司 | Camera lens module, photographing module and electronic device |
| CN113776448B (en) * | 2021-08-31 | 2023-05-09 | 昆明理工大学 | A Material Deformation Measurement Method Based on Color Digital Holographic Interferometry |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106482670A (en) * | 2016-12-09 | 2017-03-08 | 中国科学院长春光学精密机械与物理研究所 | A kind of three-dimensional perspective measuring system |
| DE202017002803U1 (en) * | 2016-06-14 | 2017-06-26 | Kaleas GmbH & Co. KG | Measuring device for determining an angle |
| CN107290058A (en) * | 2017-06-12 | 2017-10-24 | 哈尔滨工程大学 | Based on the holographic Jones matrix parameter synchronous measuring apparatus of polarized orthogonal and method |
| CN108020163A (en) * | 2017-12-26 | 2018-05-11 | 中国科学技术大学 | A kind of device of micro- tracking particulate three-D displacement |
| CN109579780A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method |
| CN110006367A (en) * | 2019-04-17 | 2019-07-12 | 北京信息科技大学 | Yaw angle, pitch angle measurement method and device |
-
2019
- 2019-11-04 CN CN201911064430.9A patent/CN110986830B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202017002803U1 (en) * | 2016-06-14 | 2017-06-26 | Kaleas GmbH & Co. KG | Measuring device for determining an angle |
| CN106482670A (en) * | 2016-12-09 | 2017-03-08 | 中国科学院长春光学精密机械与物理研究所 | A kind of three-dimensional perspective measuring system |
| CN107290058A (en) * | 2017-06-12 | 2017-10-24 | 哈尔滨工程大学 | Based on the holographic Jones matrix parameter synchronous measuring apparatus of polarized orthogonal and method |
| CN108020163A (en) * | 2017-12-26 | 2018-05-11 | 中国科学技术大学 | A kind of device of micro- tracking particulate three-D displacement |
| CN109579780A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method |
| CN110006367A (en) * | 2019-04-17 | 2019-07-12 | 北京信息科技大学 | Yaw angle, pitch angle measurement method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110986830A (en) | 2020-04-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109631827B (en) | Double-light-source high-precision anti-interference large-working-distance auto-collimation device and method based on absolute angle measurement | |
| US11578969B2 (en) | Optical assembly, method for producing data in the same, and method for manufacturing structure | |
| CN105929382B (en) | A kind of coaxial fill-in light calibration device of the transmitting-receiving of active electro-optical system and method | |
| CN102003935B (en) | Environment compensation method in laser tracker measurement | |
| WO2018103268A1 (en) | Laser measurement system for measuring geometric error in six degrees of freedom of rotating shaft, and method therefor | |
| CN109579777B (en) | Double-light-source high-precision anti-interference large-working-distance auto-collimation device and method | |
| CN111412832B (en) | Semiconductor laser six-degree-of-freedom error measurement system based on interferometer module | |
| CN104613900A (en) | Full optical path drift compensation high-precision roll angle measuring method and device | |
| CN109579779B (en) | High-precision high-frequency-response anti-interference large-working-distance auto-collimation device and method | |
| CN110986830B (en) | A dual-spectral three-dimensional attitude angle measurement device and measurement method | |
| CN114046732B (en) | Method and system for simultaneously measuring geometric errors of multiple degrees of freedom by utilizing laser | |
| CN112665532B (en) | High-precision laser warning device based on four-quadrant detector and two-dimensional grating | |
| CN107478195A (en) | One kind is based on optical space object status measurement apparatus and its measuring method | |
| CN104748720B (en) | Spatial angle measuring device and angle measuring method | |
| CN107702644A (en) | A kind of multi-degree of freedom measurement device based on double PSD | |
| CN104142123B (en) | It is applied to the Three Degree Of Freedom laser measurement system of plant equipment geometric error measurement | |
| CN101319873B (en) | Spatial Phase Shifters for Synchronized Phase-Shifting Interferometers | |
| CN109579776B (en) | High-precision anti-interference large working distance self-collimation device and method | |
| CN103424069A (en) | Optical device, interference system and optical measuring method used for measuring multiple geometric errors | |
| CN113483726B (en) | Method and system for measuring three-dimensional angle motion error in miniaturized and high-precision manner | |
| CN201212838Y (en) | Spatial Phase Shifters for Synchronized Phase-Shifting Interferometers | |
| CN114234854B (en) | Method and device for simultaneously measuring three-degree-of-freedom angles | |
| CN106323198A (en) | High precision, wide range and large working distance laser auto-collimation device and method | |
| CN109556566B (en) | System and method for measuring relative three-dimensional attitude angle between three bases | |
| CN109579781B (en) | High-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |