CN109579780A - One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method - Google Patents
One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method Download PDFInfo
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Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to one kind is based on polarization spectro auto-collimation three-dimensional perspective measuring device and method；The device is made of light source, the polarizer, spectroscope, polarization spectroscope, imaging sensor, collimating mirror, fixed pan reflecting mirror and cooperation target；This method passes through cooperation target, measuring beam is set to be divided into two bundles orthogonal measurement light, it is returned after fixed pan reflecting mirror and cooperation target reflection respectively, form respective image on the image sensor respectively, cooperation target is calculated relative to the pitch angle of optical axis, yaw angle and roll angle, to have the detectivity to measured object space three-dimensional corner using two picture position；Due to the present invention for roll angle using optical lever amplification principle, it is consistent with the measuring principle of pitch angle and yaw angle, therefore the technical advantage of the big working distance of high-precision is all had for three-dimensional perspective measurement, and then has and increase measurement accuracy under identical operating distance, or increase the advantage of operating distance under identical measurement accuracy；Two-way measurement hot spot is received by two-way imaging sensor respectively, the requirement to subsequent image processing technique is reduced, improves the frequency response of measuring device.In addition, cooperation target designed by the present invention has, structure is simple, technical advantage of low manufacture cost.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields, and in particular to one kind is measured based on polarization spectro auto-collimation three-dimensional perspective
Apparatus and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, urgent need carries out wide working range, high-precision auto-collimation three-dimensional perspective measuring technique under big working distance.It is supported
The development of above-mentioned field technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, autocollimator is combined with Circular gratings, can carry out any line angle measurement；
Auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement；Maximum functional distance from several meters to
Rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the autocollimator two Circular gratings groups vertical each other with bidimensional
It closes, the measurement of space angle can be carried out；Position reference is formed by two-way autocollimator, the survey of space three-dimensional angle can be carried out
Amount.Angle working range is from tens rads to tens jiaos points.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, the most advanced branches of science can be measured using autocollimator
The angle rotating accuracy of experimental provision and high-end precision assembly rotary motion benchmark, the space line precision of measurement linear motion benchmark
The depth of parallelism and verticality of benchmark are moved two-by-two.
Auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field and answers extensively
With.
Traditional autocollimator is as shown in Figure 1, the device includes that light source 1, transmission-type collimating mirror 4, spectroscope 2 and image pass
Sensor 3；The light beam that light source 1 is emitted is incident on the reflection of measured object 51 after transmission-type collimating mirror 4 is collimated into collimated light beam
Face；From the light beam of 51 reflective surface of measured object, is acquired and be imaged by imaging sensor 3.Under this structure, from 51 surface of measured object
The light beam of reflection only carries the space angle information of two axis of measured object.This condition limitation, so that the device is tested in measurement
When the space angle information of object, the angle information that measured object is rotated around optical axis direction cannot be measured, other two axis can only be measured
Angle information.
And the modified autocollimator based on grating technology and image processing techniques can measure measured object space three-dimensional angle
Information is spent, but there are problems that following two:
The first, for the measuring principle of the roll angle around optical axis direction and traditional autocollimator to the pitching perpendicular to optical axis
Angle and yaw angle measuring principle are inconsistent, cause the measurement accuracy to measured object space three-dimensional angle different, and based at image
Reason technology around optical axis direction rolling angle measurement precision compared with perpendicular to the pitch angle of optical axis and yaw angle a low quantity
Grade；
The second, modified autocollimator need to be measured using grating diffration light around optical axis direction rotation angle angle information,
And there are the biggish angles of divergence for diffraction light.When instrument work is under conditions of big working distance, measurement light cannot be by image sensing
Device acquisition.So that modified autocollimator, which under the operating condition of big working distance, does not have, carries out space three-dimensional angle to measured object
Spend the ability of measurement.
Therefore traditional autocollimator is not capable of measuring the space three-dimensional angle information of object.And two above problem, explanation change
Have the ability of the space three-dimensional angle information of measurement object, but the measurement accuracy of around direction roll angle into type autocollimator device
It is lower；And do not have three-dimensional perspective measurement capability under the conditions of big working distance.
Summary of the invention
It is asked for measured object is not capable of measuring present in traditional auto-collimation angle measurement unit around the rotation angle of optical axis direction
Topic, the invention discloses one kind to be based on polarization spectro auto-collimation three-dimensional perspective measuring device and method, with tradition self-collimation measurement
Device is compared, and is had and is measured in tested object space simultaneously under conditions of identical measurement accuracy and operating distance around three axis rotation angles
Three-dimensional perspective technical advantage；And compared to other auto-collimation three-dimensional perspective measuring devices, it is tested all having while measuring
In object space under conditions of the three-dimensional perspective of three axis rotation angles, in the rolling angle measurement around optical axis direction have high-precision,
The technical advantage of high frequency sound, big working distance.
The object of the present invention is achieved like this:
One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device, including light source, the polarizer, spectroscope, transmission-type
Collimating mirror, stationary mirror, cooperation target, the first imaging sensor, the second imaging sensor and measurement end polarization spectroscope；
The light beam of light source outgoing, first passes around the polarizer, light beam of light source is made to become linearly polarized light, be collimated into using transmission-type collimating mirror
Collimated light beam.All the way through the polarization spectroscope in cooperation target, it is incident on the plane mirror in cooperation target, reflection
After light beam is using the polarization spectroscope transmission in cooperation target, transmitted again through measurement end polarization spectroscope along optical path backtracking
It is acquired and is imaged by the first imaging sensor afterwards；Another way is reflected by the polarization spectroscope in cooperation target, is incident on fixed pan
On reflecting mirror, after the light beam of reflection is using the polarization spectroscope reflection in cooperation target, along optical path backtracking again through measuring
It is imaged after holding polarization spectroscope reflection by the acquisition of the second imaging sensor；
The polarizer is the polarizing film of an adjustable polarization direction, light source polarization direction and conjunction by the polarizer
The two-way perpendicular polarization direction for making polarization spectroscope in target is all different.Adjustable first image sensing of the polarizer
The received measurement light hot spot light intensity of device and the second imaging sensor institute, is consistent measurement end two-way.
The cooperation target includes polarization spectroscope and plane mirror, is installed to the measurement surface of measured object；And
Fixed pan reflecting mirror is not connected independently of cooperation target with cooperation target and measured object, is fixed on and light source, light splitting
On the fixed identical measurement pedestal of mirror, imaging sensor, transmission-type collimating mirror.When space three-dimensional angular turn occurs for measured object
When, cooperation target generates identical space three-dimensional angular turn with measured object, and other of stationary mirror and measuring device portion
Divide to be fixed on measurement pedestal and does not generate movement.
Polarization spectroscope in the cooperation target could alternatively be spectroscope and quarter wave plate, measurement end polarization spectroscope
It could alternatively be spectroscope and analyzer, the effect of same polarizing light splitting.The measuring beam reflected through spectroscope passes through twice
Quarter wave plate, polarization direction is perpendicular to the spectroscopical light beam of transmission.Two beams measurement light is total to the optical path return measurement end spectroscope time-division
For two-way, the first beam filters out the measurement light reflected through fixed pan reflecting mirror through analyzer, converges in the first imaging sensor；The
Two beams filter out the measurement light through plane mirror reflection in cooperation target through analyzer, converge in the second imaging sensor；
The first image sensor can be made of with the second imaging sensor CCD camera, it is also possible to which PSD, which is constituted, to be come into one
Step improves the frequency response of system and device.
It is a kind of above-mentioned based on being realized in polarization spectro auto-collimation three-dimensional perspective measuring device based on polarization spectro autocollimatic
Straight three-dimensional perspective measurement method, comprising the following steps:
Step a, combination target is fixed to measured object surface, it is spectroscopical that placement stationary mirror is parallel to its mirror surface
Exit facet；
Step b, bright light source is put, the position of measured object and stationary mirror is adjusted, makes the received hot spot of imaging sensor
In image sensor center position, fix the position of stationary mirror；
Step c, the hot spot light levels of the first imaging sensor and the second imaging sensor are observed, polarizer corner is adjusted
So that the light intensity that two imaging sensors receive is consistent；
Step d, combination target generates space three-dimensional rotation with measured object, and the output of the first imaging sensor is through in cooperation target
The shift value of the beam and focus of plane mirror reflection, wherein hot spot range image sensor center is decomposed into S1, S2, the
Two imaging sensors export the shift value of the beam and focus of fixed pan reflecting mirror reflection, wherein in hot spot range image sensor
Heart position is S3；
Step e, using displacement S1, S2 of the first imaging sensor hot spot, according to S1=ftan (2 β), S2=ftan
(2 γ) calculating acquires β, γ, and wherein β, γ are the angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of the second imaging sensor hot spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ
For the angle for reflecting light beam light echo and optical axis all the way through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
The utility model has the advantages that
Compared with traditional Littrow angle degree measuring device, the present invention by plane mirror target therein replace with cooperation target with
Fixed pan reflecting mirror is as object space three-dimensional corner probe unit.This structure setting, measuring beam is divided into two, and one
Road carries the angle information of measured object pitch angle, yaw angle, another way after the plane mirror reflection in cooperation target
The roll angle angle information that measured object is rotated around optical axis direction is carried after the reflection of fixed pan reflecting mirror.The measurement of this two-way
Light is acquired by sensor, therefore has not only obtained the information of object pitch angle, yaw angle, but also object roll angle is also obtained
Angle information makes apparatus have the pitch angle, yaw angle angle for measuring Objects around A optical axis roll angle and vertical optical axis
Three-dimensional perspective measurement capability；The measuring principle of roll angle is consistent with traditional autocollimator measurement pitch angle, the principle of yaw angle, benefit
With the enlarge-effect of optical lever, so that measurement accuracy of the present invention is higher than the device using grating and image processing techniques；The present invention
Device will not generate optical grating diffraction effect bring diffraction light, measure light echo and elementary beam angular deviation is small, in identical measurement
Under range, apparatus of the present invention have biggish operating distance.Therefore, compared with traditional Littrow angle degree measuring device, the present invention
With the technical advantage for increasing angle measurement dimension under identical operating distance, identical measurement accuracy；With based on grating technology with
The modified autocollimator of image processing techniques is compared, the present invention have equal angular measure dimension under big operating distance,
High-precision technical advantage.
In addition to this, the present invention also has following several technical advantages:
The first, polarization spectroscope and plane mirror composition combination target are selected, volume weight is small, installation to measured object table
Face will not influence measured object space three-dimensional angular movement；And by plane mirror as fixed pan reflecting mirror, compared to other
Special target in auto-collimation three-dimensional perspective measuring device, structure is simple, easy to manufacture.
The second, select fixed pan reflecting mirror as third dimension angle sensing equipment, structure it is simple and in addition around vertical
It is almost the same in the sensing principle of two axis of optical axis, so that of the invention around optical axis direction and perpendicular to other two axis of two axis of optical axis
The rotation angle in direction all keeps the high measurement accuracy of same order；
Spectroscope generates space three-dimensional angle as a part and measured object of combination target jointly in third, the present invention
Rotation, so that rotation angle (yaw angle) measurement accuracy around the wherein axis perpendicular to optical axis doubles.
4th, polarization spectroscope or spectroscope is selected to distinguish respectively to the polarization state of two beams measurement light with quarter wave plate, and
It receives two-way measurement hot spot respectively by two-way imaging sensor (CCD or PSD), reduces and subsequent image processing technique is wanted
It asks, improves the frequency response of measuring device.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement unit.
Fig. 2 is that the present invention is based on the structural representations of polarization spectro auto-collimation three-dimensional perspective measuring device specific embodiment one
Figure.
Fig. 3 is the structural schematic diagram for cooperating target installation in specific embodiment one.
Fig. 4 is that the present invention is based on the structural representations of polarization spectro auto-collimation three-dimensional perspective measuring device specific embodiment two
Figure.
Fig. 5 is the structural schematic diagram for cooperating target installation in specific embodiment two.
Fig. 6 is that the present invention is based on the structural representations of polarization spectro auto-collimation three-dimensional perspective measuring device specific embodiment three
Figure.
In figure: 1 light source, 2 spectroscopes, 3 first imaging sensors, 4 transmission-type collimating mirrors, 5 cooperation targets, 51 plane reflections
Mirror, 52 spectroscopes, 53 polarization spectroscopes, 6 fixed pan reflecting mirrors, 7 measured objects, 8 measurement end polarization spectroscopes, 9 second images
Sensor, 10 polarizers, 11 spectroscopes, 12 analyzers, 13 analyzers, 14 quarter wave plates.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is based on polarization spectro auto-collimation three-dimensional perspective measuring device embodiment.
The present embodiment based on polarization spectro auto-collimation three-dimensional perspective measuring device, structural schematic diagram is as shown in Figure 2.The angle
Degree measuring device include light source 1, spectroscope 2, the first imaging sensor 3, transmission-type collimating mirror 4, cooperation target 5 (including
Polarization spectroscope 53, plane mirror 51), fixed pan reflecting mirror 6, measurement end polarization spectroscope 8, the second imaging sensor 9,
The polarizer 10.
The light beam that light source 1 is emitted is incident in cooperation target 5 after transmission-type collimating mirror 4 is collimated into collimated light beam
On polarization spectroscope 53；Through the light beam all the way of polarization spectroscope 53, after the plane mirror 51 in cooperation target 5 reflects,
Along backtracking, is transmitted through measurement end polarization spectroscope 8 and imaging is acquired by the first imaging sensor 3；And another way light beam passes through
It after polarization spectroscope 53 reflects, is incident on the surface of stationary mirror 6, then after the reflection of stationary mirror 6, Yan Yuanlu is returned
It returns, reflected through measurement end polarization spectroscope 8 and imaging is acquired by imaging sensor 3.
The spectroscope 2 is arranged between light source 1 and transmission-type collimating mirror 4, and the first imaging sensor 3 and the second image pass
The position conjugate in 4 focal plane of transmission-type collimating mirror, with light source 1 is arranged in sensor 9；The two-way light beam returned from cooperation target 5,
Successively by the transmission of transmission-type collimating mirror 4, the reflection of spectroscope 2, measurement end polarization spectroscope transmission or reflection, respectively by the first figure
As sensor 3 and the acquisition imaging of the second imaging sensor 9；It is vertical with optical axis on the measured object surface of fixed cooperation target 5, and not
Under conditions of rotating around optical axis direction, the first imaging sensor 3 and 9 institute of the second imaging sensor are at picture in image plane center position
It sets.
Measuring principle is as follows:
If measuring the space three-dimensional corner of measured object 7, the space coordinates for defining the three-dimensional corner of measured object 7 are needed first: such as
Shown in Fig. 3, if optical axis direction is x-axis, downwardly direction is y-axis, 7 surface outwardly direction of vertical measured object is z-axis；And it defines
The space three-dimensional corner of measured object 7 is respectively around x-axis, y-axis, z-axis right handed ɑ, β, γ.
Secondly, the cooperation target 5, including polarization spectroscope 53 and plane mirror 51, it is fixed on the surface of measured object 7
On, if the space three-dimensional angle change of Fig. 3, therefore cooperation target 5 are the space three-dimensional angle change of measured object 7.And it fixes
Reflecting mirror 6 is not connect then with cooperation target 5, measured object 7, is fixed on measurement pedestal.
When measured object 7 rotates the angle ɑ, β, γ respectively clockwise around x-axis, y-axis, z-axis to generate space three-dimensional angle
When rotation, cooperation target 5 also has rotated the angle ɑ, β, γ clockwise around x-axis, y-axis, z-axis respectively, and 6 space of stationary mirror
Position is constant.
The light beam being incident in cooperation target on plane mirror 51 is transmitted by polarization spectroscope 53, due to plane mirror 51
Space three-dimensional angular turn is generated with measured object 7, therefore the light beam reflected through plane mirror 51 and elementary beam generate 2 β, 2 γ
The deflection at angle.Consistent with the principle of traditional autocollimator measurement, this road light beam converges on the first imaging sensor 3, light beam light
Spot and image sensor center position generate displacement S1 and S2 respectively.
And meeting following relationship, S1=ftan (2 β), S2=ftan (2 γ), f are the focal length of transmission-type collimating mirror 4.
Therefore it can be calculated according to the displacement S1 and S2 of hot spot on imaging sensor 3 and image sensor center position
Measured object 7 is around y-axis, the angle beta of z-axis rotation, the angle γ.
The light beam for being incident in stationary mirror 6 is reflected by polarization spectroscope 53, since polarization spectroscope 53 is with measured object 7
Space three-dimensional angular turn, therefore the light beam reflected through fixed pan reflecting mirror 6 are generated, then through the reflection of polarization spectroscope 53 and original
Light beam generates the deflection at the angle θ, this road light beam converges on the second imaging sensor 9, beam and focus and image sensor center position
Set generation displacement S3.
And meeting following relationship, S3=ftan (θ), f are the focal length of transmission-type collimating mirror 4.
θ=F (ɑ, beta, gamma) is obtained by space geometry relationship, can similarly obtain ɑ=G (θ, beta, gamma), F, G respectively indicate two letters
Number.
Therefore it can be calculated according to hot spot on the second imaging sensor 9 and the displacement S3 of image sensor center position
The space angle θ of this road light beam and elementary beam；Further according to β, γ value formula ɑ=G (θ, beta, gamma) and acquired before, so that it may resolve
The angle ɑ out, to obtain measured object 7 around the angle angle ɑ, β, γ that x-axis, y-axis, z-axis rotate, the space three-dimensional for obtaining measured object 7 turns
Angle information.
The present embodiment based on polarization spectro auto-collimation three-dimensional perspective measurement method embodiment, comprising the following steps:
Step a, combination target 5 is fixed to 7 surface of measured object, placing stationary mirror 6 makes its mirror surface be parallel to polarization
The exit facet of spectroscope 53；
Step b, bright light source is put, the position of measured object 7 and stationary mirror 6 is adjusted, makes the first imaging sensor 3 and the
The received hot spot of two imaging sensor 9 is in image sensor center position, fixes the position of stationary mirror 6；
Step c, the hot spot light levels of the first imaging sensor 3 and the second imaging sensor 9 are observed, the polarizer 10 is adjusted
The light intensity that corner receives two imaging sensors is consistent；
Step d, combination target generates space three-dimensional rotation with measured object, and the first imaging sensor 3 is exported through plane reflection
The shift value for the beam and focus that mirror 51 reflects, wherein hot spot range image sensor center is decomposed into S1, S2, the second image
Sensor 9 exports the shift value for the beam and focus that fixed pan reflecting mirror 6 reflects, wherein hot spot range image sensor centre bit
It is set to S3；
Step e, using displacement S1, S2 of 3 hot spot of the first imaging sensor, according to S1=ftan (2 β), S2=f
Tan (2 γ) calculating acquires β, γ, and wherein β, γ are the angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of 9 hot spot of the second imaging sensor, θ is acquired according to S3=ftan (θ) calculating, wherein
θ is the angle that light beam light echo and optical axis all the way are reflected through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
The innovation of the invention consists in that forming cooperation target 5 using polarization spectroscope 53, and measurement end is added in measurement end
Polarization spectroscope 8.This structure assigns two-way measuring beam different polarizabilities by polarization spectroscope 53, inclined by measurement end
Vibration spectroscope 8 separates two-way measuring beam, and is received respectively with the first imaging sensor 3 and the second imaging sensor 9.To
It solves the problems, such as that the identification of received two hot spots of imaging sensor is distinguished, simplifies the program of imaging sensor image procossing,
Reduce the requirement to image processing software technology；The speed of data processing is improved simultaneously, to improve the frequency response of system.
Secondly the hot spot light intensity that the first imaging sensor 3 and the second imaging sensor 9 receive is adjusted using the polarizer 10,
Two beam measuring beam light intensity are solved the problems, such as since light path element determination cannot be adjusted, avoid having hot spot light intensity excessively weak in two-way
Or too strong the problem of causing immeasurability.
Specific embodiment two
The present embodiment is based on polarization spectro auto-collimation three-dimensional perspective measuring device embodiment.
The present embodiment based on polarization spectro auto-collimation three-dimensional perspective measuring device, structural schematic diagram is as shown in Figure 4.Having
On the basis of body embodiment one, cooperation target 5 of the present embodiment include polarization spectroscope 53；Cooperate the polarization point in target 5
Light microscopic 53 is directly installed on the surface of measured object 7, as shown in Figure 5.
The present embodiment based on polarization spectro auto-collimation three-dimensional perspective measurement method embodiment, comprising the following steps:
Step a, combination target 5 is fixed to 7 surface of measured object, placing stationary mirror 6 makes its mirror surface be parallel to polarization
The exit facet of spectroscope 53；
Step b, bright light source is put, the position of measured object 7 and stationary mirror 6 is adjusted, makes the first imaging sensor 3 and the
The received hot spot of two imaging sensor 9 is in image sensor center position, fixes the position of stationary mirror 6；
Step c, the hot spot light levels of the first imaging sensor 3 and the second imaging sensor 9 are observed, the polarizer 10 is adjusted
The light intensity that corner receives two imaging sensors is consistent；
Step d, combination target generates space three-dimensional rotation with measured object, and the first imaging sensor 3 is exported through 7 table of measured object
The shift value of the beam and focus of face reflection, wherein hot spot range image sensor center is decomposed into S1, S2, and the second image passes
Sensor 9 exports the shift value for the beam and focus that fixed pan reflecting mirror 6 reflects, wherein hot spot range image sensor center
For S3；
Step e, using displacement S1, S2 of 3 hot spot of the first imaging sensor, according to S1=ftan (2 β), S2=f
Tan (2 γ) calculating acquires β, γ, and wherein β, γ are the angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of 9 hot spot of the second imaging sensor, θ is acquired according to S3=ftan (θ) calculating, wherein
θ is the angle that light beam light echo and optical axis all the way are reflected through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
Specific embodiment three
The present embodiment is based on polarization spectro auto-collimation three-dimensional perspective measuring device embodiment.
The present embodiment based on polarization spectro auto-collimation three-dimensional perspective measuring device, structural schematic diagram is as shown in Figure 6.Having
On the basis of body embodiment one, the present embodiment will be cooperated in target 5 based on polarization spectro auto-collimation three-dimensional perspective measuring device
Polarization spectroscope 53 be changed to spectroscope 52, measurement end polarization spectroscope 8 is changed to spectroscope 11, in spectroscope 52 and fixed flat
Quarter wave plate 14 is added between the reflecting mirror of face, analyzer 12 is added between the first imaging sensor 3 and spectroscope 11, second
Analyzer 11 is added between imaging sensor 9 and spectroscope 11；
The present embodiment based on polarization spectro auto-collimation three-dimensional perspective measurement method embodiment, comprising the following steps:
Step a, combination target 5 is fixed to 7 surface of measured object, places stationary mirror 6 and quarter wave plate 14 and makes its mirror
Face is parallel to the exit facet of spectroscope 52；
Step b, bright light source is put, the position of measured object 7 and stationary mirror 6 is adjusted, makes the first imaging sensor 3 and the
The received hot spot of two imaging sensor 9 is in image sensor center position, fixes the position of stationary mirror 6；
Step c, when being added without quarter wave plate 14, analyzer 12 is adjusted, so that the received hot spot of the first imaging sensor 3
Light intensity is most strong, the position of fixed analyzer 12.Analyzer 11 is adjusted after quarter wave plate 14 is added, so that the second imaging sensor connects
When most strong and analyzer 11 the angle direction of the spot intensity of receipts and orthogonal 12 angle direction of analyzer, fixed analyzer 11
Position；
Step d, combination target generates space three-dimensional rotation with measured object, and the first imaging sensor 3 is exported through plane reflection
The shift value for the beam and focus that mirror 51 reflects, wherein hot spot range image sensor center is decomposed into S1, S2, the second image
Sensor 9 exports the shift value for the beam and focus that fixed pan reflecting mirror 6 reflects, wherein hot spot range image sensor centre bit
It is set to S3；
Step e, using displacement S1, S2 of 3 hot spot of the first imaging sensor, according to S1=ftan (2 β), S2=f
Tan (2 γ) calculating acquires β, γ, and wherein β, γ are the angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of 9 hot spot of the second imaging sensor, θ is acquired according to S3=ftan (θ) calculating, wherein
θ is the angle that light beam light echo and optical axis all the way are reflected through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
The innovation of the invention consists in that the polarization different from the imparting two-way measuring beam of quarter wave plate 14 using the polarizer 10
Property, two-way measuring beam is separated by the orthogonal analyzer in measurement end polarization direction, and respectively with the first image sensing
Device 3 and the second imaging sensor 9 receive.To solve the problems, such as that the identification of received two hot spots of imaging sensor is distinguished, letter
Change the program of imaging sensor image procossing, reduces the requirement to image processing software technology；Data processing is improved simultaneously
Speed, to improve the frequency response of system.
Claims (4)
1. one kind is based on polarization spectro auto-collimation three-dimensional perspective measuring device, which is characterized in that including light source (1), spectroscope
(2), the first imaging sensor (3), transmission-type collimating mirror (4), cooperation target (5), fixed pan reflecting mirror (6), measurement end are inclined
Shake spectroscope (8), the second imaging sensor (9) and the polarizer (10), the cooperation target (5) by plane mirror (51) with
Polarization spectroscope (53) composition；The light beam of light source (1) outgoing, first passing around the polarizer (10) becomes linearly polarized light, using saturating
It penetrates after formula collimating mirror (4) is collimated into collimated light beam, is incident on the polarization spectroscope (53) in cooperation target (5)；Through polarization
The light beam all the way of spectroscope (53), after plane mirror (51) reflection in cooperation target (5), along backtracking, through measuring
Polarization spectroscope (8) transmission is held, is finally acquired and is imaged by the first imaging sensor (3)；And another way light beam is through polarization spectroscope
(53) it after reflecting, is incident on the surface of fixed pan reflecting mirror (6), then after fixed pan reflecting mirror (6) reflection, Yan Yuanlu
It returns, is reflected through measurement end polarization spectroscope (8), finally acquired and be imaged by the second imaging sensor (9)；
The spectroscope (2) is arranged between light source (1) and transmission-type collimating mirror (4), the first imaging sensor (3) and the second figure
As sensor (9) are arranged at transmission-type collimating mirror (4) focal plane, the position conjugate with light source (1)；From cooperation target (5)
The two-way light beam of return, successively by transmission-type collimating mirror (4) transmission, spectroscope (2) reflection, through measurement end polarization spectroscope
(8) beam splitting is imaged by the first imaging sensor (3) and the second imaging sensor (9) acquisition respectively；Cooperate target (5) fixed
Measured object surface it is vertical with optical axis, and under conditions of not rotating around optical axis direction, the first imaging sensor (3) and the second image
Sensor (9) institute is at picture in image plane center position；
The cooperation target (5), including polarization spectroscope (53) and plane mirror (51), are fixed on the surface of measured object (7)
On, therefore the space three-dimensional angle change for cooperating target (5) is the space three-dimensional angle change of measured object (7).And it is fixed flat
Face reflecting mirror (6) is not connect then with cooperation target (5), measured object (7), is fixed on measurement pedestal；
Or
The cooperation target (5), including polarization spectroscope (53), are fixed on the surface of measured object (7), therefore cooperate target
(5) space three-dimensional angle change is the space three-dimensional angle change of measured object (7).And fixed pan reflecting mirror (6) is then not
It connect, is fixed on measurement pedestal with cooperation target (5), measured object (7).The measurement surface of measured object (7) is served as instead at this time
Face is penetrated, instead of plane mirror (51).
2. according to claim 1 be based on polarization spectro auto-collimation three-dimensional perspective measuring device, which is characterized in that further include
Cooperate the spectroscope (52) in target (5), spectroscope (11), quarter wave plate (14) and two analyzers (12), (13)；
The spectroscope (52) is placed in cooperation target (5) before plane mirror (51), and the polarizer (10) becomes light source (1)
Linearly polarized light is divided into two bundles measurement light through spectroscope (52)；The quarter wave plate (14) is placed on spectroscope (52) and fixed pan
Between reflecting mirror (6), through spectroscope (52) reflection a branch of measuring beam through quarter wave plate transmit twice rear polarizer direction just with
The polarization direction of the second beam measurement light through spectroscope (52) transmission is perpendicular；
The spectroscope (11) is placed between spectroscope (2) and the first, second imaging sensor (3), (9), incites somebody to action in end of probe
Two beams measurement light is uniformly divided into two beams, and the measurement light transmitted through analyzer (12) is the measurement reflected through plane mirror (51)
Light converges at the first imaging sensor (3)；Measurement light through analyzer (11) transmission is anti-through fixed pan reflecting mirror (6)
The measurement light penetrated converges at the second imaging sensor (9).
3. described in the claim 1 it is a kind of be based on based on the one kind realized in polarization spectro auto-collimation three-dimensional perspective measuring device it is inclined
Vibration light splitting auto-collimation three-dimensional perspective measurement method, which comprises the following steps:
Step a, combination target (5) is fixed to measured object (7) surface, placing stationary mirror (6) is parallel to its mirror surface partially
The exit facet of vibration spectroscope (53)；
Step b, put bright light source, adjust the position of measured object (7) and stationary mirror (6), make the first imaging sensor (3) with
Second imaging sensor (9) received hot spot is in image sensor center position, keeps the position of stationary mirror (6) solid
It is fixed；
Step c, the hot spot light levels of the first imaging sensor (3) and the second imaging sensor (9) are observed, the polarizer is adjusted
(10) light intensity that corner receives two imaging sensors is consistent；
Step d, combination target generates space three-dimensional rotation with measured object, and the first imaging sensor (3) is exported through plane mirror
(51) shift value of the beam and focus reflected, wherein hot spot range image sensor center is decomposed into S1, S2, the second image
Sensor (9) exports the shift value of the beam and focus of fixed pan reflecting mirror (6) reflection, wherein in hot spot range image sensor
Heart position is S3；
Step e, using displacement S1, S2 of the first imaging sensor (3) hot spot, according to S1=ftan (2 β), S2=ftan
(2 γ) calculating acquires β, γ, and wherein β, γ are the angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of the second imaging sensor (9) hot spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ
For the angle for reflecting light beam light echo and optical axis all the way through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, and G is indicated
One function.Finally obtain angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
4. described in the claim 2 it is a kind of be based on based on the one kind realized in polarization spectro auto-collimation three-dimensional perspective measuring device it is inclined
Vibration light splitting auto-collimation three-dimensional perspective measurement method, which comprises the following steps:
Step a, combination target (5) is fixed to measured object (7) surface, places stationary mirror (6) and quarter wave plate (14) and makes
Its mirror surface is parallel to the exit facet of spectroscope (52)；
Step b, put bright light source, adjust the position of measured object (7) and stationary mirror (6), make the first imaging sensor (3) with
Second imaging sensor (9) received hot spot is in image sensor center position, keeps the position of stationary mirror (6) solid
It is fixed；
Step c, it when being added without quarter wave plate (14), adjusts analyzer (12), so that the first imaging sensor (3) received light
Spot light intensity is most strong, the position of fixed analyzer (12).Quarter wave plate (14) are added and adjust analyzer (11) afterwards, so that the second image
When most strong and analyzer (11) the angle direction of the received spot intensity of sensor and orthogonal analyzer (12) angle direction,
The position of fixed analyzer (11)；
Step d, combination target generates space three-dimensional rotation with measured object, and the first imaging sensor (3) is exported through plane mirror
(51) shift value of the beam and focus reflected, wherein hot spot range image sensor center is decomposed into S1, S2, the second image
Sensor (9) exports the shift value of the beam and focus of fixed pan reflecting mirror (6) reflection, wherein in hot spot range image sensor
Heart position is S3；
Step e, using displacement S1, S2 of the first imaging sensor (3) hot spot, according to S1=ftan (2 β), S2=ftan
(2 γ) calculating acquires β, γ, and wherein β, γ are the angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of the second imaging sensor (9) hot spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ
For the angle for reflecting light beam light echo and optical axis all the way through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, and G is indicated
One function.Finally obtain angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
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