CN110849845A - Device and method for on-line detection and control of micro-forming of composite microstructure array - Google Patents

Abstract

The invention provides a device for detecting and controlling micro-forming of a composite microstructure array on line, wherein a hot-pressing system of the device comprises a heating device, an upper template, a mold core fixing device, a microstructure mold core, an elastic micropore net, a workpiece positioning device and a lower template which are sequentially arranged from top to bottom; the microstructure mold core is fixed below the upper template through a mold core fixing device, and the upper template and the microstructure mold core are heated through a heating device; the elastic microporous net is coated at the bottom of the microstructure mold core; the workpiece and the microstructure mold core are arranged oppositely; the diffuse reflection optical detection control system comprises a light emitting device, a light receiving device and an optical signal processing control module; the invention also provides an on-line detection and control method for micro-forming of the composite microstructure array, which realizes the detection of the forming condition of the composite microstructure on the surface of the workpiece or the detection of the planar microstructure condition on the surface of the workpiece by controlling the light emitting device to emit light to the surface of the workpiece and controlling the light receiving device to receive diffuse reflection light.

Description

Device and method for online detection and control of composite microstructure array microforming

technical field

The invention relates to the technical field of on-line monitoring and intelligent fault diagnosis of composite microstructure array on workpiece surface, and more particularly, to a device and method for online detection and control of composite microstructure array micro-molding using the principle of diffuse reflection.

Background technique

High-precision microstructure arrays can be used in LED lighting, microfluidic chips, photovoltaic power generation, optical sensors, optical imaging systems, liquid crystal displays, solar cells and other fields. Compared with the planar microstructure arrays, the spatially composite microstructures have a larger surface area ratio and show superior performance. However, its manufacturing cost is high, and the composite microstructure array hot-pressing micro-molding technology is low-cost manufacturing, making it possible to realize industrialization. The key technology is how to quickly copy the micro- and nano-array structure morphology to the workpiece surface with high precision, and intelligently detect the composite micro-structure forming morphology online, and quickly feed it back to the control center to realize the intelligent manufacturing of the composite micro-structure. At present, the physical probe method and white light interferometry are used to detect the morphology of microstructure arrays. However, if the forming accuracy of macroscopic surface microarrays is detected, the work efficiency will be very low, and online detection and identification cannot be performed. The spatial composite microstructure array requires three-dimensional three-dimensional detection, which is less efficient.

However, the increasingly personalized and diversified production requires different sizes of the workpiece surface composite micro-mechanisms, and in the actual production process, the product quality is easily affected by changes in weather and temperature, the size of the workpiece to be processed, and equipment vibration. Therefore, it is necessary to detect on-line in the production process of composite microstructure array hot pressing and microforming, adjust the hot pressing microforming process parameters in real time, and realize the precise manufacture of composite microstructure array macroscopic products.

SUMMARY OF THE INVENTION

The purpose of the present invention is to overcome the shortcomings and deficiencies in the prior art, and to provide a device for online detection and control of the micro-forming of composite micro-structure arrays, which can quickly and reliably realize the online detection of the micro-structure formation on the surface of the workpiece by utilizing the principle of diffuse reflection, It not only greatly improves the detection efficiency, shortens the detection cycle, thereby reducing the time cost, but also provides a basis for the adjustment of process parameters for subsequent process production, so as to improve the processing quality and efficiency. The invention also provides an efficient and reliable method for online detection and control of the composite microstructure array microforming, so as to realize the self-adaptive control of the composite microstructure hot pressing process.

In order to achieve the above purpose, the present invention is achieved through the following technical solutions: a device for online detection and control of composite microstructure array microforming, characterized in that it includes a hot pressing system and a diffuse reflection optical detection control system; the hot pressing system It includes a heating device, an upper template, a mold core fixing device, a microstructure mold core, an elastic microporous mesh, a workpiece, a workpiece positioning device and a lower template sequentially arranged from top to bottom; the microstructure mold core is fixed by the mold core fixing device. Below the upper template, the upper template and the microstructure core are heated by a heating device; the elastic microporous mesh is covered on the bottom of the microstructure core; the workpiece is fixed on the lower template by the workpiece positioning device, and is connected with the microstructure. Relative setting of the mold core;

The diffuse reflection optical detection control system includes a light emitting device, a light receiving device and an optical signal processing control module; the light emitting device and the light receiving device are located on both sides of the hot pressing system respectively; the light receiving device and the light information processing control module Module signal connection.

In the above scheme, the device of the present invention drives the workpiece to close the mold to the microstructure core covered with the elastic microporous mesh by controlling the lower template, and maintains the pressure for a certain period of time, so that the surface of the workpiece is micro-molded to obtain a surface composed of the surface of the microstructure core and the microstructure core. The composite microstructure formed by the composite of elastic microporous mesh; and control the light emission to emit light on the surface of the workpiece and control the light receiving device to receive the diffuse reflection light, so as to realize the detection of the forming condition of the composite microstructure on the surface of the workpiece, so as to realize the use of the principle of diffuse reflection. The rapid and reliable online detection of the microstructure forming of the workpiece surface not only greatly improves the detection efficiency and reduces the time cost, but also provides a basis for the subsequent process production to adjust the process parameters to improve the processing quality and efficiency.

The incident angle θ of the light beam emitted by the light emitting device and the surface of the workpiece is 10°～80°; the number n of the light emitters in the light emitting device is between the width d of the single beam radiating the workpiece and the width l of the workpiece The relationship is:

The light receiving device is an illuminance sensor; the illuminance sensor is arranged in a theoretical direction in which the incident light is specularly reflected on the surface of the workpiece.

The elastic microporous mesh is made by weaving nylon threads or metal threads; or, the elastic microporous mesh is a microporous mesh formed by drilling holes on the surface of the material by using a laser drilling method.

The microstructure core is made of stainless steel material, ceramic material or silicon carbide material.

The pore size of the elastic microporous net is smaller than the surface microstructure size of the microstructure core; the elastic microporous net coated on the bottom of the microstructure core is in a natural elongation state.

A method for online detection and control of composite microstructure array microforming, characterized in that: by controlling a light emitting device to emit light on the surface of a workpiece and controlling a light receiving device to receive diffusely reflected light, the detection of the molding condition of the composite microstructure on the surface of the workpiece is realized. , or detect the plane microstructure of the workpiece surface;

The detection of the forming of the composite microstructure on the surface of the workpiece refers to:

First, set the target molding height of the composite microstructure and the parameters of the hot pressing process;

Secondly, control the template to drive the workpiece to close the mold to the microstructure core covered with the elastic microporous mesh, and maintain the pressure for a certain period of time, so that the surface of the workpiece is micro-molded to obtain a composite of the surface of the microstructure core and the elastic microporous mesh. A composite microstructure; wherein, the composite microstructure includes a microgroove structure and a surface small microlens structure;

Then, when the lower template drives the workpiece to release the film, the light emitting device is controlled to move in a moving way, a single light emitter is used to emit parallel light to the workpiece, and the light receiving device is used to receive the diffusely reflected light, so as to realize the molding of the composite microstructure on the surface of the workpiece. The situation is detected point by point; after the workpiece is removed from the film and stationary, the light emitting device is controlled to use several light emitters to emit parallel light to the workpiece, and finally the light receiving device is used to receive the diffusely reflected light, so as to realize the molding of the composite microstructure on the workpiece surface. comprehensive inspection;

Finally, the diffuse reflectance is calculated according to the ratio of the received diffuse reflected light flux to the emitted parallel light flux, and the relationship between the diffuse reflectance and the size of the composite microstructure in the empirical database is compared to determine the microgroove structure and surface size of the composite microstructure. The depth and quality of the micro-molding of the micro-lens structure; at the same time, the reasons for the micro-molding of the composite micro-structure are analyzed, and the fixed level of the workpiece or the hot-pressing process parameters are adjusted according to the analysis results, so that the actual height of the hot-pressed composite micro-structure gradually approaches the composite micro-structure The target forming height can realize the self-adaptive control of the hot pressing process.

Specifically, the detection of the forming condition of the composite microstructure on the surface of the workpiece includes the following steps:

1), setting the target molding height of the composite microstructure and the hot pressing process parameters; the height _h1 of the microgroove structure of the composite microstructure is 1-1000 μm, and the height h2 of the small microlens structure _on the surface is 1-200 μm; the The hot-pressing process parameters are: hot-pressing pressure 3-30MPa, holding time 0.1-20s, microstructure core temperature 20-200℃, lower template moving speed 0.1-10mm/s; under the control, the template is under the action of the hydraulic system Drive the workpiece to close the mold with the microstructure core covered with the elastic microporous mesh, and hold the pressure for a certain period of time to micro-form on the surface of the workpiece to obtain a composite microstructure composed of the surface of the microstructure core and the elastic microporous mesh. The composite microstructure includes a microgrooved structure and a surface small microlens structure;

2) Under the control, the template starts to drive the workpiece away from the microstructure core to move at a constant speed along the negative direction of the Z axis under the action of the hydraulic system, and the light emission device emits parallel light during the demoulding process, and the incident angle of the light and the surface of the workpiece is θ; Among them, θ is 10°～80°;

3) The light emitting device turns on a single light emitter during the demoulding process, and uses the principle that when the workpiece moves away from the mold core in the negative direction of the Z axis at a uniform speed, the incident point of the beam on the surface of the workpiece will move at a uniform speed in the positive direction of the Y axis to achieve Accurately detect the formation of composite microstructures on the surface of workpieces point by point;

4) When the light emitting device is stationary when the workpiece is returned to the station, all light emitters are turned on, and the emitted light irradiates the entire workpiece surface, so as to quickly detect the formation of the composite microstructure on the entire workpiece surface;

5), the light receiving device receives the light after the diffuse reflection on the surface of the workpiece, and finally performs logical processing on the optical information through the optical signal processing control module;

6) The optical signal processing control module calculates the diffuse reflectance according to the ratio of the received diffuse reflected light luminous flux to the emitted parallel light luminous flux, and compares the relationship between the diffuse reflectance and the size of the composite microstructure in the empirical database to determine the microstructure of the composite microstructure. The depth and quality of the micro-molding of the groove-shaped structure and the surface micro-lens structure;

7) The optical signal processing control module analyzes the reasons for forming the composite microstructure, and adjusts the fixed level of the workpiece or the hot pressing process parameters according to the analysis results, including hot pressing pressure, holding time, microstructure core temperature and lower template movement speed, It is transmitted to the PLC of the hot pressing system, and the next hot pressing processing is performed according to the adjusted process parameters; the above steps are cycled, so that the actual height of the composite microstructure formed by hot pressing gradually approaches the target forming height of the composite microstructure, so as to achieve thermal Adaptive control of the pressing process.

The establishment of the experience database is based on the previous experiments. The establishment refers to: firstly changing the hot pressing process parameters, and then recording the diffuse reflectivity of the workpiece surface and the microgroove structure of the composite microstructure and the surface microlens structure under different hot pressing process parameters. Then, establish the relationship between the diffuse reflectance and the micro-groove structure of the composite microstructure and the height of the small microlens structure on the surface, and finally correlate the diffuse reflectance with the hot pressing process parameters;

Among them, the empirical formulas of the height of the micro-grooved structure of the composite micro-structure, the height of the surface micro-lens structure and the diffuse reflectance m are:

h ₁ =a ₁ m+b ₁ ;

h ₂ =a ₂ m ² +b ₂ m+c ₂ ;

In the formula, h ₁ and h ₂ represent the height of the micro-groove structure and the height of the small micro-lens structure on the surface, respectively, in μm; m represents the diffuse reflectance, in %; a ₁ , a ₂ , b ₁ , b ₂ , c ₂ are constants in μm, 0.01≤a ₁ ≤1, 5≤b ₁ ≤500, 0.001≤a ₂ ≤0.002, 0.01≤b ₂ ≤0.2, 5≤c ₂ ≤20.

The priority order of adjusting the process parameters is the holding time, the core temperature, the hot pressing pressure and the movement speed of the lower die.

Compared with the prior art, the present invention has the following advantages and beneficial effects:

1. The present invention reflects the change of the height of the composite microstructure array on the surface of the workpiece in real time by using the principle of diffuse reflection to sense the change of illuminance online, which is more accurate than the general macroscopic light source radiating around the space to detect the microarray thermoforming method. . In addition, the method can detect both planar microstructure arrays and composite microstructure arrays, and can detect both transparent workpieces and surface microforming of opaque workpieces. In addition, compared with the use of a profilometer to detect the contour shape of the composite microstructure, the detection efficiency is greatly improved, the detection cycle is shortened, and the time cost is reduced.

2. In the present invention, only a single light emitter is turned on during the demoulding process, and the forming condition of the composite microstructure on the surface of the workpiece can be accurately detected point by point. When the workpiece is returned to the station, all light emitters are turned on, and the micro-forming of the composite microstructure on the entire surface can be quickly and quickly detected. Therefore, it has the characteristics of convenient operation, flexibility, high integration and multi-function.

3. The present invention utilizes real-time analysis and diffuse reflection optical detection and control system to perform data fusion, characterization and comparison of composite microstructure height, diffuse reflectance and hot-pressing parameter data, and intelligently adjusts process parameters in real time, thereby realizing macroscopic evaluation of products. The self-adaptive closed-loop control of the micro-molding effect of the surface composite microstructure array is beneficial to improve the anti-interference ability of the production process, and can meet the needs of precise and rapid prototyping of diversified products, thereby reducing the production cost and improving the processing quality and efficiency.

Description of drawings

Fig. 1 is the schematic diagram of the device of the present invention for online detection and control of composite microstructure array microforming;

Figure 2 is a schematic diagram of specular reflection;

Figure 3 is a schematic diagram of diffuse reflection;

Fig. 4 is a composite microstructure micro-molding effect diagram;

Among them, 1. light source fixing device; 2. upper template; 3(A) and 3(B), core fixing device; 4. heating device; 5. microstructure core; 6. elastic microporous mesh; 7. receiving 8, light receiving device; 9, lower template; 10, workpiece clamping device; 11, workpiece; 12, workpiece positioning device; 13, light emitting device; 14, optical signal processing control module.

Detailed ways

The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

Example 1

As shown in Figure 1, a device for online detection and control of composite microstructure array microforming includes a hot pressing system and a diffuse reflection optical detection and control system, wherein the hot pressing system includes heating devices 4 arranged in sequence from top to bottom, and an upper template 2. Core fixing devices 3(A), 3(B), microstructure core 5, elastic microporous mesh 6, workpiece 11, workpiece positioning device 12 and lower template 9; microstructure core 5 passes through the core fixing device 3(A), 3(B) are fixed under the upper template 2, and the upper template 2 and the microstructure core 5 are heated by the heating device 4; the elastic microporous mesh 6 is wrapped on the bottom of the microstructure core 5, and the workpiece 11 passes through The workpiece positioning device 12 is fixed on the lower mold plate 9 and is disposed opposite to the microstructure mold core 5 . The diffuse reflection optical detection and control system includes a light emitting device 13, a light receiving device 8, and an optical signal processing control module 14; On both sides of the system, the light receiving device 8 is signal-connected with the light information processing control module 14 .

来计算，本实施例的工件的宽度l为20mm，单束光束辐射工件的宽度d为5mm，光线发射器的个数n可计算为4个。In this embodiment, the incident angle θ of the light beam emitted by the light emitting device 13 and the surface of the workpiece 11 is 45°, and the number n of the light emitters in the light emitting device 13 can be determined by the formula

To calculate, the width l of the workpiece in this embodiment is 20mm, the width d of the workpiece irradiated by a single beam is 5mm, and the number n of light emitters can be calculated as 4.

The light receiving device 8 of the present invention is an illuminance sensor, and the illuminance sensor is arranged in a theoretical direction in which the incident light is specularly reflected on the surface of the workpiece 11 . The elastic microporous mesh 6 in this embodiment is made of nylon threads, and the aperture of the elastic microporous mesh 6 is 20 μm and the height is 30 μm. The workpiece 11 in this embodiment is made of acrylic, the material of the microstructure core 5 is stainless steel, the height of the surface microgroove structure is 100 μm, the width is 375 μm, the elastic microporous mesh 6 is fixed around the side wall of the microstructure core 5, and is covered with The elastic microporous mesh 6 at the bottom of the microstructure mold core 5 is in a natural stretched state.

The method used in this embodiment for online detection and control of the composite microstructure array microforming device is as follows: by controlling the light emitting device 13 to emit light to the surface of the workpiece 11 and controlling the light receiving device 8 to receive the diffusely reflected light, the surface of the workpiece 11 is controlled to emit light. The detection of the molding condition of the composite microstructure, specifically:

First, set the target molding height of the composite microstructure and the parameters of the hot pressing process;

Next, the lower template 9 is controlled to drive the workpiece 11 to close the mold to the microstructure mold core 5 covered with the elastic microporous mesh 6, and the pressure is maintained for a certain period of time, so that the surface of the workpiece 11 is micromolded to obtain the surface of the microstructure mold core 5 and the elastic microstructure. A composite microstructure formed by compounding the mesh 6; wherein, the composite microstructure includes a micro-groove structure and a surface small micro-lens structure;

Then, when the lower template 9 drives the film of the workpiece 11, the light emitting device 13 is controlled to move in a moving manner, a single light emitter is used to emit parallel light rays to the workpiece 11, and the light receiving device 8 is used to receive the diffusely reflected light, so as to realize the detection of the surface of the workpiece 11. The forming condition of the composite microstructure is detected point by point; after the workpiece is removed from the film and stationary, the light emitting device 13 is controlled to use several light emitters to emit parallel light to the workpiece 11, and finally the light receiving device 8 is used to receive the diffusely reflected light, so as to realize the detection of the workpiece. 11 Comprehensive inspection of the molding of the surface composite microstructure;

Finally, the diffuse reflectance is calculated according to the ratio of the received diffuse reflected light flux to the emitted parallel light flux, and the relationship between the diffuse reflectance and the size of the composite microstructure in the empirical database is compared to determine the microgroove structure and surface size of the composite microstructure. The depth and quality of the micro-molding of the micro-lens structure; at the same time, the reasons for the micro-molding of the composite micro-structure are analyzed, and the fixed level of the workpiece 11 or the hot-pressing process parameters are adjusted according to the analysis results, so that the actual height of the hot-pressed composite micro-structure gradually approaches the composite micro-structure. The target forming height of the structure is realized, and the self-adaptive control of the hot pressing process is realized.

Specifically, it includes the following steps:

1), set the target molding height of the composite microstructure and the parameters of the hot pressing process _; the height _h1 of the microgroove structure of the composite microstructure is 70 μm, and the height h2 of the surface small microlens structure is 30 μm; the hot pressing process parameters are: hot pressing The pressure is 10MPa, the pressure holding time is 2s, the microstructure core temperature is 118℃, and the movement speed of the lower template is 3mm/s; the lower template 9 is controlled to drive the workpiece 11 to the microstructure covered with the elastic microporous mesh 6 under the action of the hydraulic system. The mold core 5 is closed, and the pressure is maintained for 2 seconds. The surface of the workpiece 11 is micro-molded to obtain a composite microstructure composed of the surface of the microstructure core and the elastic microporous mesh. Micro lens structure;

2) Under the control, the template 9 starts to drive the workpiece 11 away from the microstructure core 5 to move at a constant speed in the negative direction of the Z axis under the action of the hydraulic system. The angle is θ; where, θ is 45°;

3) The light emitting device 13 turns on a single light emitter during the demoulding process, and when the workpiece 11 moves away from the mold core at a constant speed in the negative direction of the Z axis, the incident point of the beam on the surface of the workpiece 11 will move at a constant speed along the positive direction of the Y axis. The principle is to realize the precise point-by-point detection of the formation of the composite microstructure on the surface of the workpiece 11;

4), the light emitting device 13 turns on all the light emitters when the workpiece 11 returns to the station and is stationary, and the emitted light irradiates the entire surface of the workpiece 11, so as to quickly detect the composite microstructure forming condition of the entire workpiece 11 surface;

5), the light receiving device 8 receives the light after the diffuse reflection on the surface of the workpiece 11, and finally performs logical processing on the optical information through the optical signal processing control module 14;

6), the optical signal processing control module 14 calculates the diffuse reflectance according to the ratio of the received diffuse reflected light luminous flux to the emitted parallel light luminous flux, and compares the relationship between the diffuse reflectance and the size of the composite microstructure in the empirical database to determine the size of the composite microstructure. Depth and quality of micro-molding of micro-grooved structures and surface micro-lens structures.

7), the optical signal processing control module 14 analyzes the reasons for forming the composite microstructure, and adjusts the fixed level of the workpiece or the hot pressing process parameters according to the analysis results, including the hot pressing pressure, the holding time, the temperature of the microstructure core and the movement speed of the lower template , and transmit it to the PLC of the hot-pressing system, and perform the next hot-pressing process according to the adjusted process parameters; cycle the above steps to make the actual height of the hot-pressed composite microstructure gradually approach the target molding height of the composite microstructure, and achieve Adaptive control of hot pressing process.

The establishment of the experience database of the present invention is based on the previous experiments, and its establishment means: firstly changing the hot-pressing process parameters, and then recording the diffuse reflectance of the surface of the workpiece 11 and the micro-groove structure and surface smallness of the composite microstructure under different hot-pressing process parameters. The height of the microlens structure, then establish the relationship between the diffuse reflectance and the microgroove structure of the composite microstructure and the height of the surface microlens structure, and finally correlate the diffuse reflectance with the hot pressing process parameters;

Among them, the empirical formulas of the height of the micro-grooved structure of the composite micro-structure and the height of the surface micro-lens structure and the diffuse reflectance m are:

h ₁ =a ₁ m+b ₁ ;

h ₂ =a ₂ m ² +b ₂ m+c ₂ ;

In the formula, h ₁ and h ₂ represent the height of the micro-groove structure and the height of the small micro-lens structure on the surface, respectively, in μm; m represents the diffuse reflectance, in %; a ₁ , a ₂ , b ₁ , b ₂ , c ₂ are constants in μm, 0.01≤a ₁ ≤1, 5≤b ₁ ≤500, 0.001≤a ₂ ≤0.002, 0.01≤b ₂ ≤0.2, 5≤c ₂ ≤20.

The priority order of adjusting the process parameters is the holding time, the core temperature, the hot pressing pressure and the movement speed of the lower die.

In this embodiment, the diffuse reflectances of the composite microstructures formed at three locations on the surface of the workpiece 11 detected by a single light emitter are 33%, 30%, and 33%, respectively. The height of the composite microstructure at the edge of the surface of the workpiece 11 can be determined by the method of the present invention for online detection and control of the microforming of the composite microstructure array _: the height _h1 of the microgroove structure is 66.5 μm, the height h2 of the surface small microlens structure is 27.49 μm, The height of the middle composite microstructure: the height _h1 of the microgroove structure is 65, and the height h2 of the small microlens structure on the surface is ₂₅ μm; since the molding height of the composite microstructure is lower than the preset composite microstructure, and the middle is lower than the edge, it shows that the surface of the workpiece 11 is Uneven force or heat uniformity. Therefore, by extending the hot pressing time, reducing the temperature of the microstructure mold core or adjusting the fixed level of the workpiece 11, it is gradually adjusted until the target composite microstructure is formed. Finally, the hot-pressing process parameters were adjusted as the hot-pressing pressure of 10MPa, the holding time of 4s, the core temperature of 115°C, and the movement speed of the lower template of 3mm. The surface morphology of the hot-pressed micro-molded composite microstructure is shown in Figure 4. If the target size of the composite microstructure on the workpiece surface changes or the weather temperature changes greatly, the workpiece size changes, and the equipment vibrates significantly, the parameters will be re-adjusted intelligently.

Embodiment 2

The difference between this embodiment and the first embodiment is only that: the method for online detection and control of composite microstructure array microforming in this embodiment is to control the light emitting device to emit light to the surface of the workpiece and control the light receiving device to receive diffusely reflected light, so as to realize the The surface microstructure of the workpiece is detected.

This embodiment is carried out according to the following steps:

As shown in FIG. 1 , the acrylic workpiece 11 is placed above the workpiece positioning device 12 and clamped by the workpiece clamping device 10 . The light emitting device 13 and the light receiving device 8 are respectively fixed on the left and right sides of the hot pressing system by the light source fixing device 1 and the receiver fixing device 7 , and the light receiving device 8 is connected with the optical information processing control module 14 .

The workpiece 11 is not hot-pressed, the light emitting device 13 turns on all the light emitters, and the emitted light irradiates the entire surface of the workpiece 11. Since the original surface of the acrylic workpiece 11 to be processed is smooth, the light receiving device 8 can almost receive the mirror reflection on the surface of the workpiece 11. Of all the light rays, the specular reflection and diffuse reflection principles are shown in Figure 2 and Figure 3. In this embodiment, the method can be used to comprehensively detect the surface plane microstructure of the acrylic workpiece 11 that is not hot-pressed, which greatly improves the detection efficiency, shortens the detection cycle, and reduces the time cost.

The above-mentioned embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited by the above-mentioned embodiments, and any other changes, modifications, substitutions, combinations, The simplification should be equivalent replacement manners, which are all included in the protection scope of the present invention.

Claims (10)

1. A device for on-line detection and control of composite microstructure array microforming, characterized in that: comprising a hot pressing system and a diffuse reflection optical detection control system; the hot pressing system comprises a heating device, an upper template set in turn from top to bottom , a core fixing device, a microstructure core, an elastic microporous mesh, a workpiece, a workpiece positioning device and a lower template; the microstructure core is fixed under the upper template by the core fixing device, and the upper template and the microstructure core pass through The heating device is heated; the elastic microporous mesh is covered on the bottom of the microstructure mold core; the workpiece is fixed on the lower template by the workpiece positioning device, and is arranged opposite to the microstructure mold core; The diffuse reflection optical detection control system includes a light emitting device, a light receiving device and an optical signal processing control module; the light emitting device and the light receiving device are located on both sides of the hot pressing system respectively; the light receiving device and the light information processing control module Module signal connection. 2 . The device for online detection and control of composite microstructure array microforming according to claim 1 , wherein the incident angle θ between the light beam emitted by the light emitting device and the surface of the workpiece is 10° to 80°; The relationship between the number n of light emitters in the emitting device and the width d of the single beam irradiated workpiece and the width l of the workpiece is: 3. The device for on-line detection and control of composite microstructure array microforming according to claim 1, wherein the light receiving device is an illuminance sensor; direction. 4 . The device for online detection and control of composite microstructure array microforming according to claim 1 , wherein: the elastic microporous mesh is made of nylon thread or metal thread; The perforated mesh is a micro-perforated mesh formed by drilling holes on the surface of the material by means of laser drilling. 5 . The device for online detection and control of composite microstructure array microforming according to claim 1 , wherein the microstructure core is made of stainless steel material, ceramic material or silicon carbide material. 6 . 6. The device for online detection and control of composite microstructure array microforming according to claim 1, characterized in that: the aperture of the elastic microporous mesh is smaller than the surface microstructure size of the microstructure core; The elastic microporous mesh at the bottom of the mold core is in a natural elongation state. 7. A method for online detection and control of composite microstructure array microforming, characterized in that: by controlling a light emitting device to emit light to the surface of the workpiece and controlling a light receiving device to receive diffusely reflected light, the molding of the composite microstructure on the surface of the workpiece is realized. Carry out inspection, or inspect the plane microstructure of the workpiece surface; The detection of the forming of the composite microstructure on the surface of the workpiece refers to: First, set the target molding height of the composite microstructure and the parameters of the hot pressing process; Secondly, control the template to drive the workpiece to close the mold to the microstructure core covered with the elastic microporous mesh, and maintain the pressure for a certain period of time, so that the surface of the workpiece is micro-molded to obtain a composite of the surface of the microstructure core and the elastic microporous mesh. A composite microstructure; wherein, the composite microstructure includes a microgroove structure and a surface small microlens structure; Then, when the lower template drives the workpiece to release the film, the light emitting device is controlled to move in a moving way, a single light emitter is used to emit parallel light to the workpiece, and the light receiving device is used to receive the diffusely reflected light, so as to realize the molding of the composite microstructure on the surface of the workpiece. The situation is detected point by point; after the workpiece is removed from the film and stationary, the light emitting device is controlled to use several light emitters to emit parallel light to the workpiece, and finally the light receiving device is used to receive the diffusely reflected light, so as to realize the forming of the composite microstructure on the workpiece surface. comprehensive inspection; Finally, the diffuse reflectance is calculated according to the ratio of the received diffuse reflected light flux to the emitted parallel light flux, and the relationship between the diffuse reflectance and the size of the composite microstructure in the empirical database is compared to determine the microgroove structure and surface size of the composite microstructure. The depth and quality of the micro-molding of the micro-lens structure; at the same time, the reasons for the micro-molding of the composite micro-structure are analyzed, and the fixed level of the workpiece or the hot-pressing process parameters are adjusted according to the analysis results, so that the actual height of the hot-pressed composite micro-structure gradually approaches the composite micro-structure The target forming height can realize the self-adaptive control of the hot pressing process. 8. The method for online detection and control of composite microstructure array micro-molding according to claim 7, wherein the detection of the molding condition of the composite microstructure on the surface of the workpiece comprises the following steps: 1), setting the target molding height of the composite microstructure and the hot pressing process parameters; the height _h1 of the microgroove structure of the composite microstructure is 1-1000 μm, and the height h2 of the small microlens structure _on the surface is 1-200 μm; the The hot-pressing process parameters are: hot-pressing pressure 3-30MPa, holding time 0.1-20s, microstructure core temperature 20-200℃, lower template moving speed 0.1-10mm/s; under the control, the template is under the action of the hydraulic system Drive the workpiece to close the mold with the microstructure core covered with the elastic microporous mesh, and hold the pressure for a certain period of time to micro-form on the surface of the workpiece to obtain a composite microstructure composed of the surface of the microstructure core and the elastic microporous mesh. The composite microstructure includes a microgrooved structure and a surface small microlens structure; 2) Under the control, the template starts to drive the workpiece away from the microstructure core to move at a constant speed along the negative direction of the Z axis under the action of the hydraulic system, and the light emission device emits parallel light during the demoulding process, and the incident angle of the light and the surface of the workpiece is θ; Among them, θ is 10°～80°; 3) The light emitting device turns on a single light emitter during the demoulding process, and uses the principle that when the workpiece moves away from the mold core in the negative direction of the Z axis at a uniform speed, the incident point of the beam on the surface of the workpiece will move at a uniform speed in the positive direction of the Y axis to achieve Accurately detect the formation of composite microstructures on the surface of workpieces point by point; 4) When the light emitting device is stationary when the workpiece is returned to the station, all light emitters are turned on, and the emitted light irradiates the entire workpiece surface, so as to quickly detect the formation of the composite microstructure on the entire workpiece surface; 5), the light receiving device receives the light after the diffuse reflection on the surface of the workpiece, and finally performs logical processing on the optical information through the optical signal processing control module; 6) The optical signal processing control module calculates the diffuse reflectance according to the ratio of the received diffuse reflected light luminous flux to the emitted parallel light luminous flux, and compares the relationship between the diffuse reflectance and the size of the composite microstructure in the empirical database to determine the microstructure of the composite microstructure. The depth and quality of the micro-molding of the groove-shaped structure and the surface micro-lens structure; 7) The optical signal processing control module analyzes the reasons for forming the composite microstructure, and adjusts the fixed level of the workpiece or the hot pressing process parameters according to the analysis results, including hot pressing pressure, holding time, microstructure core temperature and lower template movement speed, It is transmitted to the PLC of the hot pressing system, and the next hot pressing processing is performed according to the adjusted process parameters; the above steps are cycled, so that the actual height of the composite microstructure formed by hot pressing gradually approaches the target forming height of the composite microstructure, so as to achieve thermal Adaptive control of the pressing process. 9. The method for on-line detection and control of composite microstructure array microforming according to claim 8, characterized in that: the establishment of an empirical database refers to: firstly changing the hot-pressing process parameters, then recording the workpiece surface under different hot-pressing process parameter conditions The diffuse reflectance of the composite microstructure and the height of the micro-groove structure and the surface microlens structure are established, and then the relationship between the diffuse reflectance and the height of the micro-groove structure of the composite microstructure and the surface microlens structure is established, and finally the diffuse reflectance is related. Reflectivity and hot pressing process parameters; Among them, the empirical formulas of the height of the micro-grooved structure of the composite micro-structure, the height of the surface micro-lens structure and the diffuse reflectance m are: h ₁ =a ₁ m+b ₁ ; h ₂ =a ₂ m ² +b ₂ m+c ₂ ; In the formula, h ₁ and h ₂ represent the height of the micro-groove structure and the height of the small micro-lens structure on the surface, respectively, in μm; m represents the diffuse reflectance, in %; a ₁ , a ₂ , b ₁ , b ₂ , c ₂ are constants in μm, 0.01≤a ₁ ≤1, 5≤b ₁ ≤500, 0.001≤a ₂ ≤0.002, 0.01≤b ₂ ≤0.2, 5≤c ₂ ≤20. 10 . The method for on-line detection and control of composite microstructure array microforming according to claim 8 , wherein the priority order of adjusting process parameters is holding time, core temperature, hot pressing pressure and lower die plate movement speed. 11 .

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